CN107703188A - A kind of built-in calibration method of humidity sensor chip - Google Patents
A kind of built-in calibration method of humidity sensor chip Download PDFInfo
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- CN107703188A CN107703188A CN201710717801.3A CN201710717801A CN107703188A CN 107703188 A CN107703188 A CN 107703188A CN 201710717801 A CN201710717801 A CN 201710717801A CN 107703188 A CN107703188 A CN 107703188A
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 16
- 238000000205 computational method Methods 0.000 claims description 4
- 238000012360 testing method Methods 0.000 abstract description 4
- 238000012886 linear function Methods 0.000 abstract description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
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Abstract
The invention discloses a kind of built-in calibration method of humidity sensor chip, including humidity sensor front end, analog-to-digital conversion module（ADC）, linear scale unit, nonvolatile memory（NVM）, humidity is converted into conversion voltage signal, then sampled by ADC by the humidity sensor front end, the data signal X after being sampled, and the present invention, which passes through, tests 5 humidity points（Precision is improved if desired for further, humidity point can be increased）Data value, humidity sensor chip operation interval is then divided into 4 sections of ranges of linearity according to the numerical value of these humidity points.In chip operation, which section 4 sections of ranges of linearity is fallen according to conversion voltage value, selects corresponding linear function to calculate humidity value.The relation between conversion voltage and humidity is set, all closer to linear relationship, so that the humidity sensor after calibration can operate at broader range, and to there is higher precision in each sectional area by this method.
Description
Technical field
The present invention relates to a kind of humidity sensor, the built-in calibration method of specifically a kind of humidity sensor chip.
Background technology
There is rapid development in the application of sensor technology, using the widest particularly when carrying out temperature and humidity measurement
It is general.Humidity sensor act as the terminal part of one of which information gathering, is widely applied in automotive electronics, refrigerates storage
In fortune, controlled in industry in, in animal husbandry, even in average family.
Humidity sensor act as the terminal part of one of which information gathering, be widely applied in automotive electronics,
In refrigerating in accumulating, being controlled in industry, in animal husbandry, even in average family.Application of the in the market for humidity sensor
Need diversified.Application very sensitive to cost for those while of a relatively high to humidity sensor required precision
For occasion, it is very difficult that application requirement precision is met in sensor full operating range.A kind of conventional humidity sensor core
Piece operation principle is that humidity is converted into a voltage signal directly proportional to humidity, by the voltage signal collected by linear
Relation conversion can obtain humidity value.In fact, not being strict linear relationship between humidity and converted electrical number, but deposit
Certain non-linear.Therefore in the higher occasion of required precision, it is necessary to certain calibration be done to humidity sensor chip, to repair
It is non-linear between positive humidity and conversion voltage signal.
The content of the invention
The technical problem to be solved in the present invention is to provide a kind of built-in calibration method of humidity sensor chip, to solve to carry on the back
The problem of being mentioned in scape technology.
To achieve the above object, the present invention provides following technical scheme：
A kind of built-in calibration method of humidity sensor chip, including humidity sensor front end, analog-to-digital conversion module（ADC）, line
Property scale unit, nonvolatile memory（NVM）, humidity is converted into conversion voltage signal by the humidity sensor front end, so
Sampled afterwards by ADC, the data signal X after being sampled, data signal X are wet with calibration humidity point X1 registers, calibration respectively
Degree point X2 registers, calibration humidity point X3 registers are compared by comparator, as data signal X<During X1, linearity range judges
Control selections device 1 is selected intercept register A1 value to export to the linear scale unit of rear class, and control selections device 2 by logic
Selection slope register S1 value is exported to the linear scale unit of rear class, as data signal X1<X<During X2, linearity range judges to patrol
Collect and select intercept register A2 value to export to the linear scale unit of rear class control selections device 1, and control selections device 2 selects
The value for selecting slope register S2 is exported to the linear scale unit of rear class, as data signal X2<X<During X3, linearity range decision logic
Intercept register A3 value is selected to export to the linear scale unit of rear class control selections device 1, and control selections device 2 selects
Slope register S3 value is exported to the linear scale unit of rear class, as data signal X>During X3, linearity range decision logic will be controlled
Selector 1 processed selects intercept register A4 value to export to the linear scale unit of rear class, and control selections device 2 selects slope
Register S4 value is exported to the linear scale unit of rear class, and linear scale unit is according to the values of intercept and slope brought
Value, the humidity value HM after must calibrating is calculated according to linear computational method.
Compared with prior art, the beneficial effects of the invention are as follows：The present invention is by testing 5 humidity points（If desired for entering one
Step improves precision, can increase humidity point）Data value, then according to the numerical value of these humidity points by humidity sensor chip work
It is divided into 4 sections of ranges of linearity as section.In chip operation, which section 4 sections of ranges of linearity is fallen according to conversion voltage value, selected
Corresponding linear function calculates humidity value.Make the relation between conversion voltage and humidity by this method each
Sectional area all closer to linear relationship, so that the humidity sensor after calibration can operate at broader range, and has
There is higher precision.
Brief description of the drawings
Fig. 1 is the operation principle block diagram of high-precision humidity sensor.
The operation principle schematic diagram of Fig. 2 linear gauging schemes.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technical scheme in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, rather than whole embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other under the premise of creative work is not made
Embodiment, belong to the scope of protection of the invention.
Refer to Fig. 1-2, a kind of built-in calibration method of humidity sensor chip, including humidity sensor front end, modulus
Modular converter（ADC）, linear scale unit, nonvolatile memory（NVM）, humidity is converted into by the humidity sensor front end
Voltage signal is changed, is then sampled by ADC, the data signal X after being sampled, data signal X are respectively with calibrating humidity point
X1 registers, calibration humidity point X2 registers, calibration humidity point X3 registers are compared by comparator, as data signal X<
During X1, control selections device 1 is selected intercept register A1 value to export to the linear scale unit of rear class by linearity range decision logic,
And control selections device 2 selects slope register S1 value to export to the linear scale unit of rear class, as data signal X1<X<X2
When, control selections device 1 is selected intercept register A2 value to export to the linear scale unit of rear class by linearity range decision logic, and
And control selections device 2 selects slope register S2 value to export to the linear scale unit of rear class, as data signal X2<X<X3
When, control selections device 1 is selected intercept register A3 value to export to the linear scale unit of rear class by linearity range decision logic, and
And control selections device 2 selects slope register S3 value to export to the linear scale unit of rear class, as data signal X>During X3, line
Control selections device 1 is selected intercept register A4 value to export to the linear scale unit of rear class by property section decision logic, and is controlled
Selector 2 processed selects slope register S4 value to export to the linear scale unit of rear class, and linear scale unit is according to bringing
Values of intercept and slope value, the humidity value HM after must calibrating is calculated according to linear computational method.
The present invention operation principle be：In the detection calibration stage, the conversion voltage of the invention for passing through 5 humidity points of test
Value, then according to these humidity points, is divided into 4 sections of ranges of linearity by the X-HM curves of humidity sensor chip.In chip operation,
Which region of 4 ranges of linearity is according to conversion voltage X values, selects corresponding linear function to calculate humidity
Value HM.The relation between conversion voltage signal X and humidity P is set all to be closed in each sectional area closer to linear by this method
System, so that the humidity sensor after the method calibration can operate at broader range, and there is higher precision.Test
When measure 5 humidity points, 5 points are divided into 4 sections, and each section has the slope that a corresponding coefficient represents this section of section（S1,
S2, S3, S4）, and 4 sections of curves are in the intercept of X-axis（A1, A2, A3, A4）, 3 humidity point readings that humidity section is divided into 4 sections
（X1, X2, X3）, these information must be all preserved to the nonvolatile memory of chip（NVM）In.Will be whole wet by 5 points
Degree scope is divided into 4 regions, the section and 2 sections of open sections of 2 sections of closings（As shown in Figure 2）.It is fitted with 4 sections of straight lines
Moisture curve.The system architecture of humidity sensor chip is as shown in figure 1, humidity is converted into conversion electricity by humidity sensor front end
Signal is pressed, is then sampled by ADC, the data signal X after being sampled.Data signal X deposits with calibration humidity point X1 respectively
Device, calibration humidity point X2 registers, calibration humidity point X3 registers are compared by comparator.As data signal X<During X1,
Control selections device 1 is selected intercept register A1 value to export to the linear scale unit of rear class by linearity range decision logic, and
Control selections device 2 selects slope register S1 value to export to the linear scale unit of rear class.As data signal X1<X<During X2,
Control selections device 1 is selected intercept register A2 value to export to the linear scale unit of rear class by linearity range decision logic, and
Control selections device 2 selects slope register S2 value to export to the linear scale unit of rear class.As data signal X2<X<During X3,
Control selections device 1 is selected intercept register A3 value to export to the linear scale unit of rear class by linearity range decision logic, and
Control selections device 2 selects slope register S3 value to export to the linear scale unit of rear class.As data signal X>During X3, linearly
Control selections device 1 is selected intercept register A4 value to export to the linear scale unit of rear class by section decision logic, and is controlled
Selector 2 selects slope register S4 value to export to the linear scale unit of rear class.Linear scale unit is according to bringing
Values of intercept and slope value, the humidity value HM after must calibrating is calculated according to linear computational method.Make conversion voltage by this method
Relation between humidity in each sectional area all closer to linear relationship so that the humidity sensor after the method calibration
Broader range is can operate at, and there is higher precision.
Claims (1)
1. a kind of built-in calibration method of humidity sensor chip, including humidity sensor front end, analog-to-digital conversion module（ADC）、
Linear scale unit, nonvolatile memory（NVM）, it is characterised in that humidity is converted into by the humidity sensor front end
Voltage signal is changed, is then sampled by ADC, the data signal X after being sampled, data signal X are respectively with calibrating humidity point X1
Register, calibration humidity point X2 registers, calibration humidity point X3 registers are compared by comparator, as data signal X<X1
When, control selections device 1 is selected intercept register A1 value to export to the linear scale unit of rear class by linearity range decision logic, and
And control selections device 2 selects slope register S1 value to export to the linear scale unit of rear class, as data signal X1<X<X2
When, control selections device 1 is selected intercept register A2 value to export to the linear scale unit of rear class by linearity range decision logic, and
And control selections device 2 selects slope register S2 value to export to the linear scale unit of rear class, as data signal X2<X<X3
When, control selections device 1 is selected intercept register A3 value to export to the linear scale unit of rear class by linearity range decision logic, and
And control selections device 2 selects slope register S3 value to export to the linear scale unit of rear class, as data signal X>During X3, line
Control selections device 1 is selected intercept register A4 value to export to the linear scale unit of rear class by property section decision logic, and is controlled
Selector 2 processed selects slope register S4 value to export to the linear scale unit of rear class, and linear scale unit is according to bringing
Values of intercept and slope value, the humidity value HM after must calibrating is calculated according to linear computational method.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710717801.3A CN107703188A (en) | 2017-08-21 | 2017-08-21 | A kind of built-in calibration method of humidity sensor chip |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710717801.3A CN107703188A (en) | 2017-08-21 | 2017-08-21 | A kind of built-in calibration method of humidity sensor chip |
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| CN107703188A true CN107703188A (en) | 2018-02-16 |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114460917A (en) * | 2021-12-29 | 2022-05-10 | 广州高澜节能技术股份有限公司 | Method and system for improving process detection precision of converter valve cooling system |
| CN117705199A (en) * | 2024-02-05 | 2024-03-15 | 四川芯音科技有限公司 | High-performance MEMS temperature and humidity sensor |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1120666A (en) * | 1994-10-13 | 1996-04-17 | 林文 | Voltage linearized circuit |
| US20040254756A1 (en) * | 2003-06-16 | 2004-12-16 | Daniel Strittmatter | Internal bias measure with onboard ADC for electronic devices |
| US7379831B1 (en) * | 2004-05-12 | 2008-05-27 | Zilog, Inc. | Error correction in an oversampled ADC using few stored calibration coefficients |
-
2017
- 2017-08-21 CN CN201710717801.3A patent/CN107703188A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1120666A (en) * | 1994-10-13 | 1996-04-17 | 林文 | Voltage linearized circuit |
| US20040254756A1 (en) * | 2003-06-16 | 2004-12-16 | Daniel Strittmatter | Internal bias measure with onboard ADC for electronic devices |
| US7379831B1 (en) * | 2004-05-12 | 2008-05-27 | Zilog, Inc. | Error correction in an oversampled ADC using few stored calibration coefficients |
Non-Patent Citations (1)
| Title |
|---|
| 闫焕娜: "土壤湿度传感器的智能化研究" * |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114460917A (en) * | 2021-12-29 | 2022-05-10 | 广州高澜节能技术股份有限公司 | Method and system for improving process detection precision of converter valve cooling system |
| CN114460917B (en) * | 2021-12-29 | 2023-10-20 | 广州高澜节能技术股份有限公司 | Method and system for improving process detection precision of converter valve cooling system |
| CN117705199A (en) * | 2024-02-05 | 2024-03-15 | 四川芯音科技有限公司 | High-performance MEMS temperature and humidity sensor |
| CN117705199B (en) * | 2024-02-05 | 2024-05-03 | 四川芯音科技有限公司 | High-performance MEMS temperature and humidity sensor |
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Application publication date: 20180216 |