CN111344438B - 用于电镀钴的包含流平剂的组合物 - Google Patents

用于电镀钴的包含流平剂的组合物 Download PDF

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Publication number
CN111344438B
CN111344438B CN201880072834.XA CN201880072834A CN111344438B CN 111344438 B CN111344438 B CN 111344438B CN 201880072834 A CN201880072834 A CN 201880072834A CN 111344438 B CN111344438 B CN 111344438B
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China
Prior art keywords
group
composition
cobalt
integer
acid
Prior art date
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CN201880072834.XA
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English (en)
Chinese (zh)
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CN111344438A (zh
Inventor
N·恩格尔哈特
D·迈耶
M·阿诺德
A·弗鲁格尔
C·埃姆内特
L·B·亨德森
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BASF SE
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BASF SE
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Priority to CN202510649087.3A priority Critical patent/CN120776404A/zh
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    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
    • C25D3/14—Electroplating: Baths therefor from solutions of nickel or cobalt from baths containing acetylenic or heterocyclic compounds
    • C25D3/16—Acetylenic compounds
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D3/00—Electroplating: Baths therefor
    • C25D3/02—Electroplating: Baths therefor from solutions
    • C25D3/12—Electroplating: Baths therefor from solutions of nickel or cobalt
    • C25D3/14—Electroplating: Baths therefor from solutions of nickel or cobalt from baths containing acetylenic or heterocyclic compounds
    • C25D3/18—Heterocyclic compounds
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D5/00—Electroplating characterised by the process; Pretreatment or after-treatment of workpieces
    • C25D5/02—Electroplating of selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D7/00—Electroplating characterised by the article coated
    • C25D7/12—Semiconductors
    • C25D7/123—Semiconductors first coated with a seed layer or a conductive layer

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Electroplating And Plating Baths Therefor (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Electrodes Of Semiconductors (AREA)
CN201880072834.XA 2017-11-20 2018-11-19 用于电镀钴的包含流平剂的组合物 Active CN111344438B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202510649087.3A CN120776404A (zh) 2017-11-20 2018-11-19 用于电镀钴的包含流平剂的组合物

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP17202568.6 2017-11-20
EP17202568 2017-11-20
PCT/EP2018/081692 WO2019097044A1 (en) 2017-11-20 2018-11-19 Composition for cobalt electroplating comprising leveling agent

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202510649087.3A Division CN120776404A (zh) 2017-11-20 2018-11-19 用于电镀钴的包含流平剂的组合物

Publications (2)

Publication Number Publication Date
CN111344438A CN111344438A (zh) 2020-06-26
CN111344438B true CN111344438B (zh) 2025-06-06

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CN201880072834.XA Active CN111344438B (zh) 2017-11-20 2018-11-19 用于电镀钴的包含流平剂的组合物
CN202510649087.3A Pending CN120776404A (zh) 2017-11-20 2018-11-19 用于电镀钴的包含流平剂的组合物

Family Applications After (1)

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CN202510649087.3A Pending CN120776404A (zh) 2017-11-20 2018-11-19 用于电镀钴的包含流平剂的组合物

Country Status (8)

Country Link
US (2) US11377748B2 (https=)
EP (1) EP3714085B1 (https=)
JP (1) JP2021503560A (https=)
KR (1) KR102647950B1 (https=)
CN (2) CN111344438B (https=)
IL (1) IL274486A (https=)
TW (2) TWI870818B (https=)
WO (1) WO2019097044A1 (https=)

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* Cited by examiner, † Cited by third party
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US11230778B2 (en) 2019-12-13 2022-01-25 Macdermid Enthone Inc. Cobalt chemistry for smooth topology
FR3119848B1 (fr) * 2021-02-18 2025-10-31 Aveni Electrolyte et Procédé d’électrodéposition de cobalt
US12410534B2 (en) 2022-09-26 2025-09-09 Dupont Electronic Materials International, Llc Nickel electroplating compositions for rough nickel
US12428744B2 (en) 2022-09-26 2025-09-30 Rohm And Haas Electronic Materials Llc Nickel electroplating compositions for rough nickel

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US4425198A (en) 1981-06-16 1984-01-10 Omi International Corporation Brightening composition for zinc alloy electroplating bath and its method of use
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JP4128005B2 (ja) 2001-12-28 2008-07-30 日本リーロナール有限会社 電気ニッケルめっき液
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MY170653A (en) * 2010-12-21 2019-08-23 Basf Se Composition for metal electroplating comprising leveling agent
US9631292B2 (en) * 2011-06-01 2017-04-25 Basf Se Composition for metal electroplating comprising an additive for bottom-up filling of though silicon vias and interconnect features
EP2530102A1 (en) * 2011-06-01 2012-12-05 Basf Se Additive and composition for metal electroplating comprising an additive for bottom-up filling of though silicon vias
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Also Published As

Publication number Publication date
EP3714085A1 (en) 2020-09-30
US11377748B2 (en) 2022-07-05
IL274486A (en) 2020-06-30
US20200347503A1 (en) 2020-11-05
TW202334510A (zh) 2023-09-01
CN111344438A (zh) 2020-06-26
EP3714085B1 (en) 2023-08-09
JP2021503560A (ja) 2021-02-12
TW201923154A (zh) 2019-06-16
WO2019097044A1 (en) 2019-05-23
KR102647950B1 (ko) 2024-03-14
US20220298664A1 (en) 2022-09-22
KR20200089697A (ko) 2020-07-27
TWI870818B (zh) 2025-01-21
CN120776404A (zh) 2025-10-14
TWI800558B (zh) 2023-05-01

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