CN111316090A - 透明或半透明材料微观缺陷检测系统及方法 - Google Patents

透明或半透明材料微观缺陷检测系统及方法 Download PDF

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Publication number
CN111316090A
CN111316090A CN201980005534.4A CN201980005534A CN111316090A CN 111316090 A CN111316090 A CN 111316090A CN 201980005534 A CN201980005534 A CN 201980005534A CN 111316090 A CN111316090 A CN 111316090A
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CN
China
Prior art keywords
scanning
defect
frequency
transparent
detected
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Pending
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CN201980005534.4A
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English (en)
Chinese (zh)
Inventor
王星泽
闫静
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Heren Technology Shenzhen Co ltd
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Heren Technology Shenzhen Co ltd
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Application filed by Heren Technology Shenzhen Co ltd filed Critical Heren Technology Shenzhen Co ltd
Publication of CN111316090A publication Critical patent/CN111316090A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8806—Specially adapted optical and illumination features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8901—Optical details; Scanning details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/8914—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the material examined
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
    • G01N21/892—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles characterised by the flaw, defect or object feature examined
    • G01N21/896—Optical defects in or on transparent materials, e.g. distortion, surface flaws in conveyed flat sheet or rod
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8867—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing
    • G01N2021/887—Grading and classifying of flaws using sequentially two or more inspection runs, e.g. coarse and fine, or detecting then analysing the measurements made in two or more directions, angles, positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8854—Grading and classifying of flaws
    • G01N2021/8874—Taking dimensions of defect into account
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
    • G01N2021/8887—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges based on image processing techniques

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  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Pathology (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Textile Engineering (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Signal Processing (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
CN201980005534.4A 2019-04-04 2019-04-04 透明或半透明材料微观缺陷检测系统及方法 Pending CN111316090A (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2019/081552 WO2020199206A1 (fr) 2019-04-04 2019-04-04 Système et procédé de détection de défaut microscopique dans un matériau transparent ou semi-transparent

Publications (1)

Publication Number Publication Date
CN111316090A true CN111316090A (zh) 2020-06-19

Family

ID=71148358

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980005534.4A Pending CN111316090A (zh) 2019-04-04 2019-04-04 透明或半透明材料微观缺陷检测系统及方法

Country Status (2)

Country Link
CN (1) CN111316090A (fr)
WO (1) WO2020199206A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111929310A (zh) * 2020-09-25 2020-11-13 歌尔股份有限公司 表面缺陷检测方法、装置、设备及存储介质

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986659A (en) * 1988-02-29 1991-01-22 Aerometrics, Inc. Method for measuring the size and velocity of spherical particles using the phase and intensity of scattered light
JP2001235396A (ja) * 1999-12-16 2001-08-31 Furukawa Electric Co Ltd:The 光ファイバの欠陥検出方法
CN1340155A (zh) * 1999-12-16 2002-03-13 古河电气工业株式会社 检测光纤缺陷的方法
US20050259248A1 (en) * 2004-05-18 2005-11-24 Gip Tung S Nondestructive evaluation of subsurface damage in optical elements
JP2010008173A (ja) * 2008-06-25 2010-01-14 Panasonic Electric Works Co Ltd 光透過性フィルムの欠陥検出装置
DE102009043001A1 (de) * 2009-09-25 2011-04-14 Schott Ag Verfahren zur Bestimmung von Defekten in einem Für elektromagnetische Wellen transparenten Material, insbesonders für optische Zwecke, eine Vorrichtung hierzusowie die Verwendung dieser Materialien
US20150070688A1 (en) * 2013-09-12 2015-03-12 Corning Incorporated Systems and methods for inspecting wound optical fiber

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006019468B3 (de) * 2006-04-26 2007-08-30 Siemens Ag Optischer Sensor und Verfahren zur optischen Inspektion von Oberflächen
JP2009236791A (ja) * 2008-03-28 2009-10-15 Hitachi High-Technologies Corp 欠陥検査方法及び欠陥検査装置
DE102012002174B4 (de) * 2012-02-07 2014-05-15 Schott Ag Vorrichtung und Verfahren zum Erkennen von Fehlstellen innerhalb des Volumens einer transparenten Scheibe und Verwendung der Vorrichtung
JP2014044094A (ja) * 2012-08-24 2014-03-13 Hitachi High-Technologies Corp 基板検査方法及び装置
JP6483152B2 (ja) * 2014-12-05 2019-03-13 株式会社アルバック 基板監視装置、および、基板監視方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4986659A (en) * 1988-02-29 1991-01-22 Aerometrics, Inc. Method for measuring the size and velocity of spherical particles using the phase and intensity of scattered light
JP2001235396A (ja) * 1999-12-16 2001-08-31 Furukawa Electric Co Ltd:The 光ファイバの欠陥検出方法
CN1340155A (zh) * 1999-12-16 2002-03-13 古河电气工业株式会社 检测光纤缺陷的方法
US20050259248A1 (en) * 2004-05-18 2005-11-24 Gip Tung S Nondestructive evaluation of subsurface damage in optical elements
JP2010008173A (ja) * 2008-06-25 2010-01-14 Panasonic Electric Works Co Ltd 光透過性フィルムの欠陥検出装置
DE102009043001A1 (de) * 2009-09-25 2011-04-14 Schott Ag Verfahren zur Bestimmung von Defekten in einem Für elektromagnetische Wellen transparenten Material, insbesonders für optische Zwecke, eine Vorrichtung hierzusowie die Verwendung dieser Materialien
US20150070688A1 (en) * 2013-09-12 2015-03-12 Corning Incorporated Systems and methods for inspecting wound optical fiber
CN105745523A (zh) * 2013-09-12 2016-07-06 康宁股份有限公司 用于检查缠绕的光纤的系统和方法

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
邓谋栋: "蓝宝石晶片缺陷激光无损检测及其计算模拟研究", 《中国优秀硕士学位论文全文数据库》 *
陈军等: "特征提取在激光散射扫描层析技术检测硅内部微体缺陷中的应用", 《光电工程》 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111929310A (zh) * 2020-09-25 2020-11-13 歌尔股份有限公司 表面缺陷检测方法、装置、设备及存储介质

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Application publication date: 20200619