CN111235544B - Film coating machine - Google Patents
Film coating machine Download PDFInfo
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- CN111235544B CN111235544B CN202010053715.9A CN202010053715A CN111235544B CN 111235544 B CN111235544 B CN 111235544B CN 202010053715 A CN202010053715 A CN 202010053715A CN 111235544 B CN111235544 B CN 111235544B
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- coating
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- film coating
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
- C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
Abstract
The invention provides a film coating machine which comprises a vacuum cavity, a swing mechanism, a film coating roller system mechanism and a film coating mechanism, wherein when a first film coating cooling roller is positioned at a first target position and a second film coating cooling roller is positioned at a second target position, a base material released by a second coiling and uncoiling piece is sequentially wound on the second film coating cooling roller and the first film coating cooling roller, and then the first coiling and uncoiling piece is coiled; when the slewing mechanism drives the first film coating cooling roller to rotate to the second target position, the base material released by the first winding and unwinding member is sequentially wound on the first film coating cooling roller and the second film coating cooling roller and then wound by the second winding and unwinding member. According to the film coating machine provided by the invention, the targets on the first film coating part and the second film coating part are coated on the front side of the base material, and the targets on the first film coating part and the second film coating part are also coated on the back side of the base material, so that different materials can be simultaneously coated on the two sides of the base material of the single-cavity film coating machine without opening a vacuum cavity, and the time consumption can be reduced.
Description
Technical Field
The invention belongs to the technical field of coating, and particularly relates to a coating machine.
Background
The vacuum winding coating technology is a technology for preparing one layer or a plurality of layers of films with certain functions on the surface of a coil material substrate in a vacuum chamber by methods such as thermal evaporation or magnetron sputtering. The vacuum winding coating equipment mainly has the following characteristics: firstly, the plated substrate is a flexible substrate, namely, the substrate has windability; secondly, the film coating process has continuity, namely, the film coating is continuously carried out in a working period; and thirdly, performing the film coating process in a high vacuum environment. The winding film plating machine has the structure that a film is plated on the surface of a base material in the unwinding and winding processes, the film plating structure is a working part of the vacuum winding film plating equipment and is positioned between the unwinding and winding of the base material, and the working principle of the working part can be any one of resistance evaporation, induction evaporation, electron beam evaporation, magnetron sputtering or other vacuum film plating methods. The working process of magnetron sputtering is that electrons collide with argon gas as sputtering gas in the process of accelerating to fly to a substrate film under the action of an electric field to ionize a large amount of argon ions and electrons, and the electrons fly to the substrate film and continuously collide with argon atoms in the process to generate more argon atoms and electrons; the argon ions accelerate to bombard the target under the action of an electric field, a large amount of target atoms are sputtered, and neutral target atoms (or molecules) are deposited on the surface of the substrate film to form a film.
In the single-cavity film plating machine in the prior art, multiple different materials are simultaneously plated on two sides of a base material, a target needs to be replaced after one-time film plating is completed, and a vacuum cavity needs to be opened when the target is replaced, so that process conditions such as vacuum and the like need to be created again, the process is long in consumed time, and the quality of a product is reduced. In view of the above, it is a technical problem to be solved how to design a single-chamber coater capable of coating different materials on two sides of a substrate and reducing time consumption.
Disclosure of Invention
The invention aims to provide a film coating machine, which aims to solve the technical problem that how to design a single-cavity film coating machine which can coat different materials on two sides of a base material and reduce time consumption in the prior art is to be solved.
In order to achieve the purpose, the invention adopts the technical scheme that: the coating machine comprises a vacuum cavity, a swing mechanism, a coating roller system mechanism and a coating mechanism, wherein the swing mechanism and the coating mechanism are arranged in the vacuum cavity, the coating roller system mechanism comprises a first coating cooling roller, a first coiling and uncoiling piece, a second coating cooling roller and a second coiling and uncoiling piece, and the coating mechanism comprises a first coating part and a second coating part;
when the first film coating cooling roller is located at a first target position and the second film coating cooling roller is located at a second target position, the base material released by the second winding and unwinding part is sequentially wound on the second film coating cooling roller and the first film coating cooling roller and then wound by the first winding and unwinding part, the first film coating part is used for coating the front side of the base material passing through the second film coating cooling roller, and the second film coating part is used for coating the back side of the base material passing through the first film coating cooling roller;
the rotation mechanism drives the first film coating cooling roller to rotate to the second target position and the second film coating cooling roller rotates to the first target position, the first substrate released by the winding and unwinding part is wound on the first film coating cooling roller and the second film coating cooling roller in sequence, and then the second winding and unwinding part is wound, the second film coating part is used for coating the film on the front surface of the substrate of the second film coating cooling roller, and the first film coating part is used for coating the film on the back surface of the substrate of the first film coating cooling roller.
Furthermore, the film plating machine also comprises a constant pressure device, wherein the constant pressure device comprises a connecting plate, a rack, a gear and a rotary cylinder;
the connecting plate is connected with the first coiling and uncoiling piece, one end of the connecting plate is fixedly connected with the rack, the rack is meshed with the gear, and the rack is arranged on the rotary cylinder in a fixed position in a surrounding mode;
the rotating cylinder rotates to output constant torque to drive the gear to rotate, when the first winding and unwinding member or the second winding and unwinding member winds, the rotating direction of the rotating cylinder is the same as the rotating direction of the first winding and unwinding member or the second winding and unwinding member, and the gear rotates to drive the rack to move in a translation mode in the direction far away from the first coating cooling roller or the second coating cooling roller;
when the first coiling and uncoiling piece or the second coiling and uncoiling piece is uncoiled, the rotating direction of the rotating cylinder is opposite to the rotating direction of the first coiling and uncoiling piece or the second coiling and uncoiling piece, and the gear rotates to drive the rack to move in a translation mode towards the direction close to the first coating cooling roller or the second coating cooling roller.
Further, the coating machine also comprises a transition roller;
and the base material between the first film coating cooling roller and the second film coating cooling roller is wound between the first film coating cooling roller and the second film coating cooling roller in an S shape through the transition roller.
Furthermore, the film coating machine also comprises a magnetic powder brake;
the magnetic powder brake sets up first receive and release a roll spare with the second receive and release on the roll spare, just the magnetic powder brake with the transition roller is connected, the transition roller is used for detecting the tension of substrate, the magnetic powder brake passes through the transition roller detects the tension of substrate sets up the corresponding resistance of tension.
Furthermore, the film coating machine also comprises a first motor and a second motor;
the first motor is connected with the first coating cooling roller, the second motor is connected with the second coating cooling roller, the first coating cooling roller and the second coating cooling roller are driving wheels, and the first winding and unwinding part and the second winding and unwinding part are driven wheels.
Further, the first target position faces the first film coating component, the second target position faces the second film coating component, and the second film coating component is arranged opposite to the first film coating component.
Further, the coating mechanism further comprises a third coating part and a fourth coating part, wherein the third coating part and the fourth coating part are arranged oppositely;
when the slewing mechanism can drive the first film coating cooling roller to rotate to the third target position, the second film coating cooling roller rotates to a fourth target position, the base material released by the first winding and unwinding member is sequentially wound on the first film coating cooling roller and the second film coating cooling roller and then wound by the second winding and unwinding member, the fourth film coating component is used for coating the front side of the base material passing through the second film coating cooling roller, and the third film coating component is used for coating the back side of the base material passing through the first film coating cooling roller;
the rotation mechanism can drive the first coating film cooling roller rotates to when the fourth target position, the second coating film cooling roller rotates to the third target position, the second receive and releases the substrate winding in proper order of a piece and twines the second coating film cooling roller and on the first coating film cooling roller, again by the first piece that receives and releases carries out the rolling, the third coating film part is used for the process the positive coating film of the substrate of second coating film cooling roller, the fourth coating film part is used for the process the reverse side of the substrate of first coating film cooling roller carries out the coating film.
Furthermore, the first film plating component adopts a film plating mode of vacuum evaporation.
The coating machine provided by the invention has the beneficial effects that: compared with the prior art, before the rotation mechanism of the film coating machine provided by the invention rotates, the first film coating cooling roller is positioned at the first target position and the second film coating cooling roller is positioned at the second target position, the base material released by the second winding and unwinding member is sequentially wound on the second film coating cooling roller and the first film coating cooling roller and then wound by the first winding and unwinding member, the target material on the second film coating part is plated on the back surface of the base material, and the target material on the first film coating part is plated on the front surface of the base material, so that double-sided film coating of the base material is realized after one-time film coating is finished; the rotating mechanism is driven without opening a vacuum cavity, after the rotating mechanism rotates, the base material released by the first winding and unwinding part is sequentially wound on the first coating cooling roller and the second coating cooling roller, and then is wound by the second winding and unwinding part, the first coating cooling roller is positioned at the second target position, the second coating cooling roller is positioned at the first target position, so that the target material on the second coating part is coated on the front surface of the base material, the target material on the first coating part is coated on the reverse surface of the base material, so that the target materials on the first coating part and the second coating part are coated on the front surface of the base material, and the target materials on the first coating part and the second coating part are coated on the reverse surface of the base material, so that different materials are coated on the double surfaces of the base material of the single-cavity coating machine at the same time; different materials can be simultaneously plated on the two sides of the base material of the single-cavity coating machine without opening the vacuum cavity, so that the process conditions such as vacuum and the like do not need to be built again, and time consumption can be reduced.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments or the prior art descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without inventive exercise.
Fig. 1 is a schematic structural diagram of a first coating cooling roller of a coating machine provided in an embodiment of the present invention located at the first target position;
FIG. 2 is a schematic structural diagram of the first coating cooling roller of the coating machine located at the second target position according to the embodiment of the present invention;
FIG. 3 is a schematic structural diagram of a first target position, a second target position, a third target position and a fourth target position on a revolving mechanism of a film plating machine according to an embodiment of the present invention;
FIG. 4 is a schematic structural diagram of a constant pressure device, a first film coating cooling roller and a first winding and unwinding member of a film coating machine according to an embodiment of the present invention;
fig. 5 is a schematic structural diagram of the first coating cooling roller of the coating machine provided by the embodiment of the invention located at the third target position;
fig. 6 is a schematic structural diagram of the first coating cooling roller of the coating machine provided by the embodiment of the invention located at the fourth target position;
fig. 7 is a schematic structural diagram of an unwinding process of a coating machine according to an embodiment of the present invention;
fig. 8 is a schematic structural diagram of a winding process of a film plating machine according to an embodiment of the present invention.
Wherein, in the figures, the respective reference numerals:
1. a vacuum chamber; 2. a swing mechanism; 3. a coating roller system mechanism; 31. a first coated chill roll; 32. a first coiling and uncoiling piece; 33. a second film-coating cooling roller; 34. a second coiling and uncoiling piece; 41. a first target site; 42. a second target site; 43. a third target site; 44. a fourth target site; 5. a film coating mechanism; 51. a first plating member; 52. a second plating member; 53. a third plating member; 54. a fourth coated member; 6. a constant pressure device; 61. a connecting plate; 62. a rack; 63. a gear; 64. a rotating cylinder; 7. a transition roll; 8. a magnetic powder brake; 91. a first motor.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present invention more clearly apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
It will be understood that the terms "length," "width," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," and the like, as used herein, refer to an orientation or positional relationship indicated in the drawings that is solely for the purpose of facilitating the description and simplifying the description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and is therefore not to be construed as limiting the invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically defined otherwise.
Referring to fig. 1 to 3 together, a coating machine according to the present invention will now be described. The coating machine comprises a vacuum cavity 1, a rotary mechanism 2, a coating roller system mechanism 3 and a coating mechanism 5, wherein the rotary mechanism 2 and the coating mechanism 5 are arranged in the vacuum cavity 1, the coating roller system mechanism 3 is arranged on the rotary mechanism 2, the coating roller system mechanism 3 comprises a first coating cooling roller 31, a first coiling and uncoiling coil piece 32, a second coating cooling roller 33 and a second coiling and uncoiling coil piece 34, and the coating mechanism 5 comprises a first coating part 51 and a second coating part 52; when the first film-coating cooling roller 31 is located at a first target position 41 and the second film-coating cooling roller 33 is located at a second target position 42, the base material released by the second winding and unwinding member 34 is sequentially wound on the second film-coating cooling roller 33 and the first film-coating cooling roller 31, the first winding and unwinding member 32 is wound, the first film-coating member 51 is used for coating the front surface of the base material passing through the second film-coating cooling roller 33, and the second film-coating member 52 is used for coating the back surface of the base material passing through the first film-coating cooling roller 31; the rotation mechanism 2 drives the first coating film cooling roller 31 rotates to the second target position 42 and the second coating film cooling roller 33 rotates to the first target position 41, the first base material released by the winding and unwinding part 32 is wound on the first coating film cooling roller 31 and the second coating film cooling roller 33 in sequence, the second winding and unwinding part 34 winds, the second coating film part 52 is used for coating the film on the front surface of the base material passing through the second coating film cooling roller 33, and the first coating film part 51 is used for coating the film on the reverse surface of the base material passing through the first coating film cooling roller 31.
The embodiment further comprises a vacuum system, wherein the vacuum system is used for vacuumizing the vacuum cavity to a vacuum environment required by magnetron sputtering.
Compared with the prior art, the coating machine provided by the invention has the advantages that before the rotation mechanism rotates, the first coating cooling roller is positioned at the first target position and the second coating cooling roller is positioned at the second target position, the base material released by the second winding and unwinding member is sequentially wound on the second coating cooling roller and the first coating cooling roller and then wound by the first winding and unwinding member, the target material on the second coating part is coated on the back surface of the base material, and the target material on the first coating part is coated on the front surface of the base material, so that double-sided coating of the base material is realized after one-time coating is finished; the rotating mechanism is driven without opening a vacuum cavity, after the rotating mechanism rotates, the base material released by the first winding and unwinding part is sequentially wound on the first coating cooling roller and the second coating cooling roller, and then is wound by the second winding and unwinding part, the first coating cooling roller is positioned at the second target position, the second coating cooling roller is positioned at the first target position, so that the target material on the second coating part is coated on the front surface of the base material, the target material on the first coating part is coated on the reverse surface of the base material, so that the target materials on the first coating part and the second coating part are coated on the front surface of the base material, and the target materials on the first coating part and the second coating part are coated on the reverse surface of the base material, so that different materials are coated on the double surfaces of the base material of the single-cavity coating machine at the same time; different materials can be simultaneously plated on the two sides of the base material of the single-cavity film plating machine without opening the vacuum cavity, so that technological conditions such as vacuum and the like do not need to be created again, time consumption can be reduced, meanwhile, the environment in the vacuum cavity is not affected without opening the vacuum cavity, the technological conditions such as vacuum and the like do not need to be created again, and product quality is improved.
Further, referring to fig. 1 and fig. 4 together, as a specific embodiment of the film plating machine provided by the present invention, the film plating machine further includes a constant pressure device 6, where the constant pressure device 6 includes a connection plate 61, a rack 62, a gear 63, and a rotary cylinder 64; the connecting plate 61 is connected with the first coiling and uncoiling piece 32, one end of the connecting plate 61 is fixedly connected with the rack 62, the rack 62 is meshed with the gear 63, and the rack 62 is arranged on the rotary cylinder 64 in a fixed position in a surrounding mode; the rotating cylinder 64 rotates to output constant torque to drive the gear 63 to rotate, when the first winding and unwinding member 32 or the second winding and unwinding member 34 winds, the rotating direction of the rotating cylinder 64 is the same as the rotating direction of the first winding and unwinding member 32 or the second winding and unwinding member 34, and the gear 63 rotates to drive the rack 62 to move in a translation mode in the direction away from the first coating cooling roller 31 or the second coating cooling roller 33; when the first winding and unwinding member 32 or the second winding and unwinding member 34 is unwinding, the rotation direction of the rotating cylinder 64 is opposite to the rotation direction of the first winding and unwinding member 32 or the second winding and unwinding member 34, and the gear 63 rotates to drive the rack 62 to move in a translational manner in a direction close to the first coating cooling roller 31 or the second coating cooling roller 33.
In this embodiment, when the first winding and unwinding member and the second winding and unwinding member are wound or unwound, the diameters of the base materials wound by the first winding and unwinding member and the second winding and unwinding member are dynamic, the diameters of the wound base materials are gradually increased in the winding process, and the diameters of the wound base materials are gradually decreased in the unwinding process; the rotary cylinder outputs constant torque, can drive the gear to rotate, controls the first winding and unwinding part and the second winding and unwinding part to perform translational motion through meshing of the gear and the rack, so that the first winding and unwinding part compresses the first film-coated cooling roller constantly, the second winding and unwinding part compresses the second film-coated cooling roller constantly, the constant torque is converted into constant pressure on the first film-coated cooling roller and the second film-coated cooling roller, and the base material wound by the first winding and unwinding part and the second winding and unwinding part is stable and free of wrinkles. Specifically, referring to fig. 7, when the first winding and unwinding member or the second winding and unwinding member unwinds, the rotation direction of the rotating cylinder is opposite to the rotation direction of the first winding and unwinding member or the second winding and unwinding member, and the gear rotates to drive the rack to move in a translational manner in a direction close to the first coating cooling roller or the second coating cooling roller, so as to drive the first winding and unwinding member or the second winding and unwinding member to move in a translational manner in a direction close to the first coating cooling roller or the second coating cooling roller. Referring to fig. 8, when the first winding and unwinding member or the second winding and unwinding member is wound, the rotation direction of the rotating cylinder is the same as the rotation direction of the first winding and unwinding member or the second winding and unwinding member, and the gear rotates to drive the rack to move in a translational manner in a direction away from the first coating cooling roller or the second coating cooling roller, so as to drive the first winding and unwinding member or the second winding and unwinding member to move in a translational manner in a direction away from the first coating cooling roller or the second coating cooling roller.
Further, referring to fig. 1 and fig. 2 together, as a specific embodiment of the film plating machine provided by the present invention, the film plating machine further includes a transition roller 7; the substrate between the first coated cooling roller 31 and the second coated cooling roller 33 is wound between the first coated cooling roller 31 and the second coated cooling roller 33 in an "S" shape by the transition roller 7.
Further, referring to fig. 1 and fig. 4 together, as a specific embodiment of the film plating machine provided by the present invention, the film plating machine further includes a magnetic powder brake 8; magnetic powder brake 8 sets up first receive and release a roll 32 with the second receive and release on the roll 34, just magnetic powder brake 8 with transition roller 7 is connected, transition roller 7 is used for detecting the tension of substrate, magnetic powder brake 8 passes through transition roller 7 detects the tension of substrate sets up the corresponding resistance of tension.
In this embodiment, the magnetic powder brake is disposed on the first winding and unwinding member and the second winding and unwinding member, and after the tension of the monitored substrate is detected by the transition roller, the magnetic powder brake provides a resistance corresponding to the tension, so as to control the tension of the coating roller system mechanism.
Further, referring to fig. 1 and fig. 4, as a specific embodiment of the film plating machine provided by the present invention, the film plating machine further includes a first motor 91 and a second motor; the first motor 91 is connected with the first coating cooling roller 31, the second motor is connected with the second coating cooling roller 33, the first coating cooling roller 31 and the second coating cooling roller 33 are driving wheels, and the first winding and unwinding member 32 and the second winding and unwinding member 34 are driven wheels. The first and second motors may be frameless motors.
Further, referring to fig. 1 and fig. 3 together, as an embodiment of the film plating machine provided by the present invention, the first target position 41 faces the first film plating part 51, the second target position 42 faces the second film plating part 52, and the second film plating part 52 is disposed opposite to the first film plating part 51.
Further, referring to fig. 3, fig. 5 and fig. 6, as a specific embodiment of the film plating machine provided by the present invention, the film plating mechanism 5 further includes a third film plating part 53 and a fourth film plating part 54, wherein the third film plating part 53 and the fourth film plating part 54 are disposed opposite to each other; specifically, the third plating member 53 faces the third target position 43, and the fourth plating member 54 faces the fourth target position 44;
when the swing mechanism 2 can drive the first film-coating cooling roller 31 to rotate to the third target position 43, the second film-coating cooling roller 33 rotates to the fourth target position 44, the substrate released by the first take-up and pay-off roll 32 is sequentially wound on the first film-coating cooling roller 31 and the second film-coating cooling roller 33, and then is wound by the second take-up and pay-off roll 34, the fourth film-coating part 54 is used for coating the front surface of the substrate passing through the second film-coating cooling roller 33, and the third film-coating part 53 is used for coating the back surface of the substrate passing through the first film-coating cooling roller 31;
the rotation mechanism 2 can drive the first coating film cooling roller 31 rotates to the time of fourth target position 44, the second coating film cooling roller 33 rotates to the third target position 43, the second receive and releases the substrate that a piece 34 releases and twine in proper order the second coating film cooling roller 33 and on the first coating film cooling roller 31, again by the first roll 32 that receive and releases carries out the rolling, the third coating film part 53 is used for the process the positive coating film of the substrate of the second coating film cooling roller 33, the fourth coating film part 54 is used for the process the reverse side of the substrate of the first coating film cooling roller 31 carries out the coating film.
In this embodiment, a coordinate system is established with the center of the swing mechanism as the center of a circle, the first target position is located on the positive half shaft of the y-axis, the second target position is located on the negative half shaft of the y-axis, the third target position is located on the negative half shaft of the x-axis, and the fourth target position is located on the positive half shaft of the x-axis; the first film-coating cooling roller is positioned on a negative half shaft of a y axis, the second film-coating cooling roller is positioned on a positive half shaft of the y axis, the third film-coating cooling roller is positioned on a negative half shaft of an x axis, and the fourth film-coating cooling roller is positioned on a positive half shaft of the x axis.
In this embodiment, the first coating part can sputter the first target, and the second coating part can sputter the second target, so that two different materials, namely the first target and the second target, are simultaneously coated on two sides of the substrate of the single-cavity coating machine.
As a further extension, the embodiment may further include a fifth target position, a sixth target position, a seventh target position, an eighth target position, and so on, as well as a fifth plating part corresponding to the fifth target position, a seventh plating part corresponding to the sixth target position, a seventh plating part corresponding to the seventh target position, and an eighth plating part corresponding to the eighth target position, and the invention is not limited in particular.
Further, as an embodiment of the film plating machine provided by the present invention, the film plating mode of the first film plating member 51 is vacuum deposition, and the vacuum deposition can greatly increase the film plating efficiency.
After the substrate is coated, the first and second coating members 51 and 52 may be replaced with an anode layer ion source, or the third and fourth coating members 53 and 54 may be replaced with an anode layer ion source for cleaning the surface of the substrate after the coating is completed.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principle of the present invention are intended to be included within the scope of the present invention.
Claims (8)
1. A coating machine is characterized in that: the coating device comprises a vacuum cavity, a swing mechanism, a coating roller system mechanism and a coating mechanism, wherein the swing mechanism and the coating mechanism are arranged in the vacuum cavity, the coating roller system mechanism comprises a first coating cooling roller, a first coiling and uncoiling piece, a second coating cooling roller and a second coiling and uncoiling piece, and the coating mechanism comprises a first coating part and a second coating part;
when the first film coating cooling roller is located at a first target position and the second film coating cooling roller is located at a second target position, the base material released by the second winding and unwinding part is sequentially wound on the second film coating cooling roller and the first film coating cooling roller and then wound by the first winding and unwinding part, the first film coating part is used for coating the front side of the base material passing through the second film coating cooling roller, and the second film coating part is used for coating the back side of the base material passing through the first film coating cooling roller;
the rotation mechanism drives the first film coating cooling roller to rotate to the second target position and the second film coating cooling roller rotates to the first target position, the first substrate released by the winding and unwinding part is wound on the first film coating cooling roller and the second film coating cooling roller in sequence, and then the second winding and unwinding part is wound, the second film coating part is used for coating the film on the front surface of the substrate of the second film coating cooling roller, and the first film coating part is used for coating the film on the back surface of the substrate of the first film coating cooling roller.
2. The coater of claim 1 wherein: the film plating machine also comprises a constant pressure device, wherein the constant pressure device comprises a connecting plate, a rack, a gear and a rotary cylinder;
the connecting plate is connected with the first coiling and uncoiling piece, one end of the connecting plate is fixedly connected with the rack, the rack is meshed with the gear, and the rack is arranged on the rotary cylinder in a fixed position in a surrounding mode;
the rotating cylinder rotates to output constant torque to drive the gear to rotate, when the first winding and unwinding member or the second winding and unwinding member winds, the rotating direction of the rotating cylinder is the same as the rotating direction of the first winding and unwinding member or the second winding and unwinding member, and the gear rotates to drive the rack to move in a translation mode in the direction far away from the first coating cooling roller or the second coating cooling roller;
when the first coiling and uncoiling piece or the second coiling and uncoiling piece is uncoiled, the rotating direction of the rotating cylinder is opposite to the rotating direction of the first coiling and uncoiling piece or the second coiling and uncoiling piece, and the gear rotates to drive the rack to move in a translation mode towards the direction close to the first coating cooling roller or the second coating cooling roller.
3. The coater of claim 2 wherein: the film plating machine also comprises a transition roller;
and the base material between the first film coating cooling roller and the second film coating cooling roller is wound between the first film coating cooling roller and the second film coating cooling roller in an S shape through the transition roller.
4. The coater of claim 3 wherein: the film plating machine also comprises a magnetic powder brake;
the magnetic powder brake is arranged on the first winding and unwinding member and the second winding and unwinding member, the magnetic powder brake is connected with the transition roller, the transition roller is used for detecting the tension of the base material, and the magnetic powder brake sets the resistance corresponding to the tension through the tension of the base material detected by the transition roller.
5. The coater of claim 4 wherein: the film coating machine also comprises a first motor and a second motor;
the first motor is connected with the first coating cooling roller, the second motor is connected with the second coating cooling roller, the first coating cooling roller and the second coating cooling roller are driving wheels, and the first winding and unwinding part and the second winding and unwinding part are driven wheels.
6. The coater of claim 5 wherein: the first target position is opposite to the first film coating part, the second target position is opposite to the second film coating part, and the second film coating part is opposite to the first film coating part.
7. The coater of claim 6 wherein: the coating mechanism further comprises a third coating part and a fourth coating part, and the third coating part and the fourth coating part are arranged oppositely;
when the slewing mechanism can drive the first film-coating cooling roller to rotate to a third target position, the second film-coating cooling roller rotates to a fourth target position, the base material released by the first winding and unwinding member is sequentially wound on the first film-coating cooling roller and the second film-coating cooling roller and then wound by the second winding and unwinding member, the fourth film-coating part is used for coating the front surface of the base material passing through the second film-coating cooling roller, and the third film-coating part is used for coating the back surface of the base material passing through the first film-coating cooling roller;
the rotary mechanism can drive the first film coating cooling roller to rotate to the fourth target position, the second film coating cooling roller rotates to the third target position, the base materials released by the second winding and unwinding piece are sequentially wound on the second film coating cooling roller and the first film coating cooling roller, then the first winding and unwinding piece is wound, the third film coating component is used for coating the film on the front surface of the base materials of the second film coating cooling roller, and the fourth film coating component is used for coating the film on the back surface of the base materials of the first film coating cooling roller.
8. The coater of claim 7 wherein: the first film coating component adopts a film coating mode of vacuum evaporation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010053715.9A CN111235544B (en) | 2020-01-17 | 2020-01-17 | Film coating machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010053715.9A CN111235544B (en) | 2020-01-17 | 2020-01-17 | Film coating machine |
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| Publication Number | Publication Date |
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| CN111235544A CN111235544A (en) | 2020-06-05 |
| CN111235544B true CN111235544B (en) | 2022-05-10 |
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| CN202010053715.9A Active CN111235544B (en) | 2020-01-17 | 2020-01-17 | Film coating machine |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115261825A (en) * | 2022-07-21 | 2022-11-01 | 上海宝镀真空设备科技有限公司 | Vacuum winding type aluminizing machine translation type winding and unwinding roll |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104611682A (en) * | 2015-02-09 | 2015-05-13 | 常州工学院 | Magnetron sputtering winding plating equipment capable of double-sided reciprocating continuous high-efficient plating |
| CN104611680A (en) * | 2015-02-09 | 2015-05-13 | 常州工学院 | Magnetron sputtering winding plating equipment capable of rapid target exchanging and double-sided reciprocating continuous high-efficient plating |
| CN104674180A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | Quick target-exchange double-sided reciprocating continuous-coating magnetron sputtering winding coating machine |
| CN104674176A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | High-efficiency magnetron sputtering winding coating machine capable of continuously coating in double-sided reciprocated way |
| CN207811865U (en) * | 2018-01-22 | 2018-09-04 | 无锡光润真空科技有限公司 | Vacuum coater |
-
2020
- 2020-01-17 CN CN202010053715.9A patent/CN111235544B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104611682A (en) * | 2015-02-09 | 2015-05-13 | 常州工学院 | Magnetron sputtering winding plating equipment capable of double-sided reciprocating continuous high-efficient plating |
| CN104611680A (en) * | 2015-02-09 | 2015-05-13 | 常州工学院 | Magnetron sputtering winding plating equipment capable of rapid target exchanging and double-sided reciprocating continuous high-efficient plating |
| CN104674180A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | Quick target-exchange double-sided reciprocating continuous-coating magnetron sputtering winding coating machine |
| CN104674176A (en) * | 2015-02-09 | 2015-06-03 | 常州工学院 | High-efficiency magnetron sputtering winding coating machine capable of continuously coating in double-sided reciprocated way |
| CN207811865U (en) * | 2018-01-22 | 2018-09-04 | 无锡光润真空科技有限公司 | Vacuum coater |
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