CN111216257A - Monocrystalline silicon rod cutting device and method based on monocrystalline silicon piece production - Google Patents
Monocrystalline silicon rod cutting device and method based on monocrystalline silicon piece production Download PDFInfo
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- CN111216257A CN111216257A CN202010087281.4A CN202010087281A CN111216257A CN 111216257 A CN111216257 A CN 111216257A CN 202010087281 A CN202010087281 A CN 202010087281A CN 111216257 A CN111216257 A CN 111216257A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/04—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor by tools other than rotary type, e.g. reciprocating tools
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B5/00—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
- B24B5/50—Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground, e.g. strings
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0076—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for removing dust, e.g. by spraying liquids; for lubricating, cooling or cleaning tool or work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B28—WORKING CEMENT, CLAY, OR STONE
- B28D—WORKING STONE OR STONE-LIKE MATERIALS
- B28D5/00—Fine working of gems, jewels, crystals, e.g. of semiconductor material; apparatus or devices therefor
- B28D5/0058—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material
- B28D5/0082—Accessories specially adapted for use with machines for fine working of gems, jewels, crystals, e.g. of semiconductor material for supporting, holding, feeding, conveying or discharging work
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- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Processing Of Stones Or Stones Resemblance Materials (AREA)
Abstract
The invention discloses a monocrystalline silicon rod cutting device based on monocrystalline silicon piece production, which comprises a workbench (1) and a through groove (2) formed in the top of the workbench (1), wherein a monocrystalline silicon rod barreling device (3) and a slicing device (4) are respectively arranged on the top surface of the workbench (1) and positioned on the front side and the rear side of the through groove (2), a left clamping device (5) and a right clamping device (6) are respectively arranged on the top surface of the workbench (1) and positioned on the left side and the right side of the through groove (2), and a monocrystalline silicon piece cleaning device is arranged right below the through groove (2); it also discloses a method for producing the monocrystalline silicon wafer. The invention has the beneficial effects that: the structure is compact, the production efficiency of the monocrystalline silicon piece is greatly improved, the cleaning efficiency of the monocrystalline silicon piece is improved, the labor intensity of workers is reduced, and the operation is simple.
Description
Technical Field
The invention relates to the technical field of photovoltaic monocrystalline silicon rod slicing, in particular to a monocrystalline silicon rod cutting device and method based on monocrystalline silicon piece production.
Background
Single crystal silicon, an important semiconductor material, has good electrical properties and thermal stability, and has been discovered and utilized as a substitute for other semiconductor materials soon. The silicon material has better high temperature resistance and radiation resistance, and is particularly suitable for manufacturing high-power devices, so that the silicon material is the most applied semiconductor material, and most silicon materials of integrated circuit semiconductor devices are manufactured. In the method for manufacturing a silicon single crystal having good properties, the Czochralski method for growing a silicon single crystal has relatively simple equipment and process, and is easy to realize automatic control. After being pulled out from a single crystal furnace, the straight-pull single crystal silicon rod needs to be subjected to a series of working procedures, and the single crystal silicon rod needs to be subjected to barreling, slicing and cleaning in the early stage; and in the later stage, the silicon wafer is subjected to the procedures of texturing, diffusion, crystallization, sintering and the like to be manufactured into a semiconductor device or a solar cell for photovoltaic power generation.
The purpose of the tumbling mill is to grind a monocrystalline silicon rod with an irregular cross section into a monocrystalline silicon rod with a circular cross section by using a grinding wheel, the conventional tumbling mill mode is carried out on a machine tool, namely, a three-jaw chuck is firstly used for clamping one end of the monocrystalline silicon rod, then a conical hole is drilled on the other end surface of the monocrystalline silicon rod, and then a conical head at the tail part of the machine tool is inserted into the conical hole, so that the tool for the monocrystalline silicon rod is realized, the three-jaw chuck is rotated to drive the monocrystalline silicon rod to rotate, and meanwhile, a worker leans against the outer surface of the monocrystalline silicon rod by using the grinding wheel to grind the monocrystalline silicon rod into a cylindrical. However, in the tumbling process, a worker is required to move along the axis of the single crystal silicon rod by using the grinding wheel to perform tumbling on the whole single crystal silicon rod, so that the labor intensity of the worker is increased, and the tumbling efficiency is further reduced.
After the barreling is finished, a worker transports the qualified monocrystalline silicon rod to the cutting device, the slicing device is used for cutting the monocrystalline silicon rod into slices, the slicing device cuts the monocrystalline silicon rod one by one along the axis of the monocrystalline silicon rod through the cutting slices, the slicing efficiency is very low, the production efficiency of monocrystalline silicon slices is reduced, and further the yield of the monocrystalline silicon slices is reduced.
After slicing is finished, workers convey qualified monocrystalline silicon wafers into a cleaning water tank, and impurities and scraps attached to the surfaces of the monocrystalline silicon wafers are cleaned by water in the cleaning tank. The specific cleaning process comprises the following steps: a worker firstly places a monocrystalline silicon wafer to be cleaned in a cleaning basket, and then places the cleaning basket in a cleaning tank with an ultrasonic generator to remove impurities and scraps attached to the monocrystalline silicon wafer. However, the cleaning basket and the water are always still, and therefore, the single crystal silicon wafer needs to be soaked for a long time to clean impurities and scraps attached to the single crystal silicon wafer and completely remove the impurities and the scraps, which undoubtedly reduces the production efficiency of the single crystal silicon wafer. In addition, the monocrystalline silicon piece needs to be manually salvaged after being cleaned, which undoubtedly increases the labor intensity of workers. Therefore, the existing production process of the monocrystalline silicon piece cannot be popularized and used continuously. Therefore, a monocrystalline silicon wafer cutting device which can greatly improve the production efficiency of monocrystalline silicon wafers, improve the cleaning efficiency of monocrystalline silicon wafers and reduce the labor intensity of workers is needed.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide the monocrystalline silicon rod cutting device and the monocrystalline silicon rod cutting method based on monocrystalline silicon wafer production, which have the advantages of compact structure, greatly improved monocrystalline silicon wafer production efficiency, improved monocrystalline silicon wafer cleaning efficiency, reduced labor intensity of workers and simple operation.
The purpose of the invention is realized by the following technical scheme: a monocrystalline silicon rod cutting device based on monocrystalline silicon piece production comprises a workbench and a through groove formed in the top of the workbench, wherein a monocrystalline silicon rod barreling device and a slicing device are respectively arranged on the top surface of the workbench and positioned at the front side and the rear side of the through groove, a left clamping device and a right clamping device are respectively arranged on the top surface of the workbench and positioned at the left side and the right side of the through groove, and a monocrystalline silicon piece cleaning device is arranged right below the through groove;
the left clamping device comprises a speed reducer, a driving belt pulley, a belt, a driven belt pulley, a three-jaw chuck I and a motor I, wherein the speed reducer is fixedly arranged on the top surface of the workbench, the motor I is horizontally arranged and arranged on the top surface of the speed reducer, the driving belt pulley is arranged on an output shaft of the motor I, the driven belt pulley is arranged on an input shaft of the speed reducer, the driven belt pulley is arranged on the input shaft of the speed reducer, the three-jaw chuck I is arranged on the output shaft of the speed reducer, and the belt is arranged between the driving belt pulley and the driven belt pulley;
the right clamping device comprises a hydraulic cylinder, a three-jaw chuck II and a bearing seat, the hydraulic cylinder is horizontally arranged and fixedly mounted on the top surface of the workbench, a mounting plate is welded on the action end of a piston rod of the hydraulic cylinder, the bearing seat is fixedly arranged on the end surface of the mounting plate, a rotating shaft is rotatably mounted in the bearing seat, the rotating shaft extends outside the bearing seat, the extending end is fixedly provided with the three-jaw chuck II, and the three-jaw chuck II and the three-jaw chuck I are oppositely arranged left and right;
the monocrystalline silicon rod barreling device comprises a transverse moving device, a longitudinal moving device, a motor II and a grinding wheel, wherein the transverse moving device comprises a horizontal guide rail, a horizontal sliding table, a sliding block A and a horizontal oil cylinder, the horizontal guide rail and the horizontal oil cylinder are fixedly arranged on the top surface of a workbench, the sliding block A is arranged at the bottom of the horizontal sliding table, the horizontal sliding table is arranged on the horizontal guide rail through the sliding fit of the sliding block A and the horizontal guide rail, and a piston rod of the horizontal oil cylinder is fixedly arranged on the horizontal sliding table; the longitudinal moving device comprises a longitudinal oil cylinder, a sliding block B, a longitudinal sliding table and a longitudinal guide rail, wherein the longitudinal oil cylinder and the longitudinal guide rail are fixedly arranged on the top surface of the horizontal sliding table; the motor II is horizontally arranged and fixedly arranged on the top surface of the longitudinal sliding table, and the grinding wheel is arranged on an output shaft of the motor II;
the slicing device comprises a feeding oil cylinder and a main shaft, wherein the feeding oil cylinder is longitudinally arranged and fixedly installed on the top surface of the workbench, a fixed plate is welded on the action end of a piston rod of the feeding oil cylinder, vertical plates are welded on the left side and the right side of the front end surface of the fixed plate, the main shaft is horizontally arranged and fixedly arranged between the two vertical plates, a plurality of cutters are fixedly arranged on the main shaft at intervals along the length direction of the main shaft, and the cutters are positioned between a three-jaw chuck I and a three-jaw chuck II;
monocrystalline silicon piece belt cleaning device includes washing tank, air compressor machine and the dish of giving vent to anger, washing tank open-top, the bottom of washing tank is sealed, and the washing tank is located logical groove under, the dish of giving vent to anger sets up under the washing tank, and the branch pipe that has set firmly many even air-out dish on the top surface of air-out dish, and the branch pipe extends in the washing tank, and extends to serve and be connected with the check valve, the gas outlet department of air compressor machine is connected with the pipeline, the bottom intercommunication of pipeline and air-out dish.
Vertical oil cylinders are fixedly mounted on the left side wall and the right side wall of the cleaning tank.
A net cylinder with an opening at the top and a closed bottom is arranged in the cleaning tank, support plates are welded on the left side wall and the right side wall of the net cylinder, and the two support plates are welded on the action ends of the two vertical oil cylinder piston rods respectively.
The main shaft includes and turns right to be provided with left side axle, spacing ring, circle axle and right-hand axle in order by a left side, seted up the external screw thread on the cylinder of circle axle right-hand member portion, threaded connection has lock nut on the external screw thread, and the circle epaxial position has a plurality of cutters between spacing ring and the lock nut in proper order, and the cutter cutting edge sets up forward, is provided with the spacer bush of cover on locating the circle epaxial between the adjacent cutter, under lock nut and external screw thread threaded connection power, the cutter supports to press between spacing ring and lock nut.
The distance between two adjacent cutters is equal.
The cutter is provided with a through hole which is sleeved on the round shaft.
Vertical holes are formed in the top surfaces of the left square shaft and the right square shaft.
Threaded holes corresponding to the vertical holes are formed in the top surfaces of the two vertical plates, and the left square shaft and the right square shaft penetrate through the vertical holes through screws respectively and are fixed on the vertical plates in a threaded connection mode with the threaded holes.
The cutting device further comprises a controller, and the controller is electrically connected with the motor I, the motor II, the hydraulic cylinder, the feeding oil cylinder, the vertical oil cylinder, the horizontal oil cylinder and the longitudinal oil cylinder.
The method for producing the monocrystalline silicon wafers by using the monocrystalline silicon rod cutting device based on monocrystalline silicon wafer growth comprises the following steps:
s1, feeding of the silicon single crystal rod: a worker clamps the left end part of the monocrystalline silicon rod to be barreled in the three-jaw chuck I, clamps the left end part of the monocrystalline silicon rod by using the three-jaw chuck I, operates the hydraulic cylinder to enable a piston rod of the hydraulic cylinder to extend leftwards, ensures that the three-jaw chuck II extends into the right end part of the monocrystalline silicon rod, and clamps the right end part of the monocrystalline silicon rod by using the three-jaw chuck II, so that the feeding operation of the monocrystalline silicon rod is realized;
s2, barreling of the single crystal silicon rod, which comprises the following steps:
s21, a worker operates the longitudinal oil cylinder to enable a piston rod of the longitudinal oil cylinder to extend backwards, the piston rod drives a sliding block B of the longitudinal sliding table to move backwards along the longitudinal guide rail, the longitudinal sliding table drives a motor II on the longitudinal sliding table to move backwards, and when the grinding wheel is observed to contact the single crystal silicon rod, the operation of the longitudinal oil cylinder is immediately stopped;
s22, a worker turns on a motor I, the motor I drives a driving belt pulley to rotate, the driving belt pulley drives a driven belt pulley to rotate through a belt, the driven belt pulley drives an input shaft of a speed reducer to rotate, an output shaft of the speed reducer is further driven to rotate, the output shaft drives a three-jaw chuck I to rotate, and the three-jaw chuck I drives the single crystal silicon rod to rotate around the axis of the three-jaw chuck I;
s23, turning on a motor II by a worker, driving a grinding wheel to rotate by the motor II, starting to roll and grind the silicon single crystal rod by the grinding wheel, simultaneously operating a horizontal oil cylinder to enable a piston rod of the horizontal oil cylinder to move back and forth, driving a horizontal sliding table to move back and forth from side to side by the horizontal oil cylinder, further driving the grinding wheel to do back and forth from side to side along the axis of the silicon single crystal rod, and finishing the roll grinding of the outer cylindrical surface of the silicon single crystal rod in the moving process;
s3, cutting the silicon single crystal rod, which comprises the following steps:
s31, after tumbling for a period of time, turning off the motor II, operating the piston rod of the longitudinal oil cylinder to retract, driving the longitudinal sliding table to move forwards and reset by the piston rod, and separating the grinding wheel from the single crystal silicon rod;
s32, a worker operates a piston rod of a feeding oil cylinder to extend forwards, the piston rod drives a fixing plate to move forwards, the fixing plate drives a main shaft and a cutter on the main shaft to move forwards, the cutter does linear motion, the single crystal silicon rod rotates around the axis of the cutter, the cutter can cut the single crystal silicon rod along the radial direction of the single crystal silicon rod, and a single crystal silicon wafer can be obtained after the cutter penetrates through the single crystal silicon rod;
s33, operating the piston rod of the feeding oil cylinder to retract, and driving the fixing plate and the main shaft to reset by the piston rod;
s4, cleaning of the monocrystalline silicon wafer: the monocrystalline silicon piece after the cutting passes through logical groove and drops in the net section of thick bamboo under gravity, opens the air compressor machine this moment, and air compressor machine output high-pressure gas, and high-pressure gas passes the pipeline in order, goes out the inner chamber of gas dish, branch pipe, check valve and enters into the aquatic in the washing tank, produces the bubble in water, and the bubble passes in the net section of thick bamboo bottom enters into the net section of thick bamboo, will attach to impurity and granule on it behind the bubble effect monocrystalline silicon piece and clear away to the washing of monocrystalline silicon piece has been realized.
The invention has the following advantages:
1. the monocrystalline silicon rod barreling device comprises a transverse moving device, a longitudinal moving device, a motor II and a grinding wheel, wherein the transverse moving device comprises a horizontal guide rail, a horizontal sliding table, a slide block A and a horizontal oil cylinder; the motor II is horizontally arranged and fixedly arranged on the top surface of the longitudinal sliding table, and the grinding wheel is arranged on an output shaft of the motor II; when the device works, the horizontal oil cylinder drives the horizontal sliding table to move left and right in a reciprocating manner, so that the grinding wheel is driven to move left and right in a reciprocating manner along the axis of the single crystal silicon rod, and the cylindrical surface of the single crystal silicon rod is ground in a rolling manner in the moving process; therefore, manual grinding is not needed, and the grinding wheel is used for rapidly and once barreling along the axis of the monocrystalline silicon rod, so that the labor intensity of workers is reduced, the barreling efficiency is improved, and the production efficiency of monocrystalline silicon wafers is improved.
2. The slicing device comprises a feeding oil cylinder and a main shaft, wherein the feeding oil cylinder is longitudinally arranged and fixedly installed on the top surface of a workbench, a fixed plate is welded on the action end of a piston rod of the feeding oil cylinder, vertical plates are welded on the left side and the right side of the front end surface of the fixed plate, the main shaft is horizontally arranged and fixedly arranged between the two vertical plates, a plurality of cutters are fixedly arranged on the main shaft at intervals along the length direction of the main shaft, the cutters are positioned between a three-jaw chuck I and a three-jaw chuck II, and the cutters do linear motion and rotate around the axis of the single crystal silicon rod, so that the cutters can cut the single crystal silicon rod along the radial direction of the single crystal silicon rod, and; because the main shaft is provided with the plurality of cutters, and the distances between two adjacent cutters are equal, a plurality of monocrystalline silicon wafers can be obtained at one time through one-time operation, compared with a traditional cutting device, the slicing time is greatly shortened, and the production efficiency of the monocrystalline silicon wafers is further improved.
3. The monocrystalline silicon wafer cleaning device comprises a cleaning tank, an air compressor and an air outlet disc, wherein the top of the cleaning tank is open, the bottom of the cleaning tank is closed, the cleaning tank is positioned right below a through groove, the air outlet disc is arranged right below the cleaning tank, a plurality of branch pipes communicated with the air outlet disc are fixedly arranged on the top surface of the air outlet disc, the branch pipes extend into the cleaning tank, the extending ends of the branch pipes are connected with one-way valves, the air outlet of the air compressor is connected with a pipeline, the pipeline is communicated with the bottom of the air outlet disc, when the monocrystalline silicon wafer cleaning device works, the air compressor generates high-pressure gas, the high-pressure gas sequentially penetrates through the pipeline, an inner cavity of the air outlet disc, the branch pipes and the one-way valves to enter water in the cleaning tank, bubbles are generated in the water and penetrate through the bottom of a net cylinder to enter the net cylinder, impurities and particles attached to the, the production efficiency of the monocrystalline silicon piece is greatly improved; after cleaning, the piston rod of the vertical oil cylinder is operated to extend upwards, the piston rod drives the support plate to move upwards, the support plate drives the net barrel to move upwards, and after the net barrel extends out of the cleaning tank, workers can take finished monocrystalline silicon wafers conveniently, and the labor intensity of the workers for collecting the monocrystalline silicon wafers is reduced.
Drawings
FIG. 1 is a schematic structural view of the present invention;
3 FIG. 32 3 is 3 a 3 cross 3- 3 sectional 3 view 3 A 3- 3 A 3 of 3 FIG. 31 3; 3
FIG. 3 is a cross-sectional view B-B of FIG. 2;
FIG. 4 is a cross-sectional view C-C of FIG. 1 with the grinding wheel removed;
FIG. 5 is an enlarged view of part I of FIG. 2;
FIG. 6 is a schematic view of the spindle and cutter mounting;
FIG. 7 is a right side view of FIG. 6;
FIG. 8 is a schematic view of the structure of the cutter;
FIG. 9 is a schematic view of the operation of tumbling a single crystal silicon rod;
FIG. 10 is a schematic view of the operation of slicing a single crystal silicon rod;
FIG. 11 is a schematic structural diagram of the second embodiment;
in the figure, 1-workbench, 2-through groove, 3-single crystal silicon rod barreling device, 4-slicing device, 5-left clamping device, 6-right clamping device, 7-reducer, 8-driving belt pulley, 9-belt, 10-driven belt pulley, 11-three-jaw chuck I, 12-motor I, 13-hydraulic cylinder, 14-three-jaw chuck II, 15-bearing seat, 16-mounting plate, 17-rotating shaft, 18-motor II, 19-grinding wheel, 20-horizontal guide rail, 21-horizontal sliding table, 22-slide block A, 23-horizontal cylinder, 24-longitudinal cylinder, 25-slide block B, 26-longitudinal sliding table, 27-longitudinal guide rail, 28-feeding cylinder, 29-fixing plate, 30-vertical plate, 31-a cutter, 32-a cleaning groove, 33-an air compressor, 34-an air outlet disc, 35-a branch pipe, 36-a one-way valve, 37-a vertical oil cylinder, 38-a net cylinder, 39-a support plate, 40-a left square shaft, 41-a limiting ring, 42-a round shaft, 43-a right shaft, 44-an external thread, 45-a locking nut, 47-a spacer bush, 48-a through hole, 49-a vertical hole, 50-a screw, 51-a controller and 52-a single crystal silicon rod.
Detailed Description
The invention will be further described with reference to the accompanying drawings, without limiting the scope of the invention to the following:
the first embodiment is as follows: as shown in fig. 1-2, a monocrystalline silicon rod cutting device based on monocrystalline silicon piece production, it includes workstation 1, sets up logical groove 2 at workstation 1 top, the top surface of workstation 1 and the front and back side that is located logical groove 2 are provided with monocrystalline silicon rod barreling device 3 and slicing device 4 respectively, the top surface of workstation 1 and the left and right sides that is located logical groove 2 are provided with left clamping device 5 and right clamping device 6 respectively, be provided with monocrystalline silicon piece belt cleaning device under logical groove 2.
As shown in fig. 1-2, the left clamping device 5 includes a speed reducer 7, a driving pulley 8, a belt 9, a driven pulley 10, a three-jaw chuck I11 and a motor I12, the speed reducer 7 is fixedly arranged on the top surface of the workbench 1, the motor I12 is horizontally arranged and arranged on the top surface of the speed reducer 7, the driving pulley 8 is mounted on an output shaft of the motor I12, the driven pulley 10 is mounted on an input shaft of the speed reducer 7, the driven pulley 10 is mounted on the input shaft of the speed reducer 7, the three-jaw chuck I11 is mounted on the output shaft of the speed reducer 7, and the belt 9 is mounted between the driving pulley 8 and the driven pulley 10;
as shown in fig. 1-2, the right clamping device 6 includes a hydraulic cylinder 13, a three-jaw chuck II14 and a bearing seat 15, the hydraulic cylinder 13 is horizontally disposed and fixedly mounted on the top surface of the worktable 1, a mounting plate 16 is welded to an action end of a piston rod of the hydraulic cylinder 13, the bearing seat 15 is fixedly mounted on an end surface of the mounting plate 16, a rotating shaft 17 is rotatably mounted in the bearing seat 15, the rotating shaft 17 extends outside the bearing seat 15, a three-jaw chuck II14 is fixedly mounted on an extension end of the rotating shaft 17, and the three-jaw chuck II14 and the three-jaw chuck I11 are oppositely disposed left and right;
as shown in fig. 1, 2 and 4, the single crystal silicon rod barreling device 3 comprises a transverse moving device, a longitudinal moving device, a motor II18 and a grinding wheel 19, wherein the transverse moving device comprises a horizontal guide rail 20, a horizontal sliding table 21, a slide block a22 and a horizontal oil cylinder 23, the horizontal guide rail 20 and the horizontal oil cylinder 23 are both fixedly installed on the top surface of the workbench 1, the bottom of the horizontal sliding table 21 is provided with a slide block a22, the horizontal sliding table 21 is installed on the horizontal guide rail 20 through the slide block a22 and the horizontal guide rail 20 in a sliding fit manner, and a piston rod of the horizontal oil cylinder 23 is fixedly installed on the horizontal sliding table 21; the longitudinal moving device comprises a longitudinal oil cylinder 24, a sliding block B25, a longitudinal sliding table 26 and a longitudinal guide rail 27, wherein the longitudinal oil cylinder 24 and the longitudinal guide rail 27 are fixedly arranged on the top surface of the horizontal sliding table 21, the longitudinal oil cylinder 24 is positioned on the front side of the longitudinal guide rail 27, the sliding block B25 is fixedly arranged at the bottom of the longitudinal sliding table 26, the longitudinal sliding table 26 is arranged on the longitudinal guide rail 27 through the sliding block B25 in a sliding fit manner with the longitudinal guide rail 27, and a piston rod of the longitudinal oil cylinder 24 is fixedly arranged on the longitudinal sliding table 26; the motor II18 is horizontally arranged and fixedly arranged on the top surface of the longitudinal sliding table 26, and the grinding wheel 19 is arranged on the output shaft of the motor II 18;
as shown in fig. 1, 2, 3, 5, 6, 7, and 8, the slicing apparatus 4 includes a feeding cylinder 28 and a main shaft, the feeding cylinder 28 is longitudinally disposed and fixedly mounted on the top surface of the worktable 1, a fixing plate 29 is welded on an action end of a piston rod of the feeding cylinder 28, vertical plates 30 are welded on left and right sides of a front end surface of the fixing plate 29, the main shaft is horizontally disposed and fixedly disposed between the two vertical plates 30, a plurality of cutters 31 are fixedly disposed on the main shaft along a length direction thereof at intervals, and the cutters 31 are disposed between a three-jaw chuck I11 and a three-jaw chuck II 14;
as shown in fig. 1, 2 and 3, monocrystalline silicon piece belt cleaning device includes washing tank 32, air compressor machine 33 and air outlet disc 34, washing tank 32 open-top, washing tank 32's bottom is sealed, and washing tank 32 is located logical 2 under, air outlet disc 34 sets up under washing tank 32, has set firmly many spinal branchs 35 that link to air outlet disc 34 on air outlet disc 34's the top surface, and branch 35 extends in washing tank 32, and is connected with check valve 36 on the extension end, air compressor machine 33's gas outlet department is connected with the pipeline, and the pipeline communicates with air outlet disc 34's bottom, equal fixed mounting has vertical hydro-cylinder 37 on the lateral wall about washing tank 32. A net cylinder 38 with an opening at the top and a closed bottom is arranged in the cleaning tank 32, support plates 39 are welded on the left side wall and the right side wall of the net cylinder 38, and the two support plates 39 are respectively welded on the action ends of piston rods of two vertical oil cylinders 37.
As shown in fig. 6-8, the main shaft includes that left side axle 40, spacing ring 41, circle axle 42 and right-hand axle 43 are set gradually to the right side by a left side, external screw thread 44 has been seted up on the cylinder of circle axle 42 right-hand member portion, threaded connection has lock nut 45 on the external screw thread 44, and it has a plurality of cutters 31 to lie in proper order to overlap between spacing ring 41 and the lock nut 45 on the circle axle 42, and the interval between two adjacent cutters 31 equals, and the cutter 31 cutting edge sets up forward, is provided with the spacer 47 of cover locating on circle axle 42 between the adjacent cutter 31, and under lock nut 45 and external screw thread 44 threaded connection power, cutter 31 supports and presses between spacing ring 41 and lock nut 45. The cutter 31 is provided with a through hole 48, and the through hole 48 is sleeved on the circular shaft 42. The distance between two adjacent cutters can be adjusted by changing the thickness of the spacer 47, so that the thickness of the monocrystalline silicon wafer is changed.
As shown in fig. 5, vertical holes 49 are formed in the top surfaces of the left shaft 40 and the right shaft 43, threaded holes corresponding to the vertical holes 49 are formed in the top surfaces of the two vertical plates 30, and the left shaft 40 and the right shaft 43 respectively penetrate through the vertical holes 49 through screws 50 and are fixed to the vertical plates 30 in a threaded manner.
The method for producing the monocrystalline silicon wafers by using the monocrystalline silicon rod cutting device based on monocrystalline silicon wafer growth comprises the following steps:
s1, feeding of the silicon single crystal rod: a worker clamps the left end part of the monocrystalline silicon rod 52 to be barreled in the three-jaw chuck I11, clamps the left end part of the monocrystalline silicon rod 52 by using the three-jaw chuck I11, operates the hydraulic cylinder 13 to enable the piston rod of the hydraulic cylinder to extend leftwards, ensures that the three-jaw chuck II14 extends into the right end part of the monocrystalline silicon rod 52, and clamps the right end part of the monocrystalline silicon rod 52 by using the three-jaw chuck II14, so that the feeding operation of the monocrystalline silicon rod is realized;
s2, as shown in FIG. 9, the tumbling of the single crystal silicon rod specifically comprises the following steps:
s21, a worker operates the longitudinal oil cylinder 24 to enable the piston rod of the longitudinal oil cylinder to extend backwards, the piston rod drives the sliding block B25 of the longitudinal sliding table 26 to move backwards along the longitudinal guide rail 27, the longitudinal sliding table 26 drives the motor II18 on the longitudinal sliding table to move backwards, and when the grinding wheel 19 is observed to contact the single crystal silicon rod 52, the operation of the longitudinal oil cylinder 24 is immediately stopped;
s22, a worker turns on a motor I12, the motor I12 drives a driving belt pulley 8 to rotate, the driving belt pulley 8 drives a driven belt pulley 10 to rotate through a belt 9, the driven belt pulley 10 drives an input shaft of a speed reducer 7 to rotate, an output shaft of the speed reducer 7 is further driven to rotate, the output shaft drives a three-jaw chuck I11 to rotate, and the three-jaw chuck I11 drives the single crystal silicon rod 52 to rotate around the axis of the three-jaw chuck I11;
s23, a worker turns on a motor II18, the motor II18 drives a grinding wheel 19 to rotate, the grinding wheel 19 starts to roll and grind the single crystal silicon rod 52, meanwhile, the horizontal oil cylinder 23 is operated to enable a piston rod of the horizontal oil cylinder to reciprocate left and right, the horizontal oil cylinder 23 drives the horizontal sliding table 21 to reciprocate left and right, the grinding wheel 19 is further driven to reciprocate left and right along the axis of the single crystal silicon rod 52, and in the moving process, the roll grinding of the outer cylindrical surface of the single crystal silicon rod 52 is completed; therefore, manual grinding is not needed, and the grinding wheel 19 is used for rapidly and once barreling along the axis of the monocrystalline silicon rod, so that the labor intensity of workers is reduced, the barreling efficiency is improved, and the production efficiency of monocrystalline silicon wafers is improved;
s3, as shown in FIG. 10, the cutting of the single crystal silicon rod specifically comprises the following steps:
s31, after the roller grinding is carried out for a period of time, the motor II18 is turned off, the piston rod of the longitudinal oil cylinder 24 is operated to retract, the piston rod drives the longitudinal sliding table 26 to move forwards and reset, and the grinding wheel 19 is separated from the single crystal silicon rod 52 at the moment;
s32, a worker operates a piston rod of the feeding oil cylinder 28 to extend forwards, the piston rod drives the fixing plate 29 to move forwards, the fixing plate 29 drives the main shaft and the cutter 31 on the main shaft to move forwards, the cutter 31 does linear motion, the single crystal silicon rod 52 rotates around the axis of the cutter 31, the cutter 31 can cut the single crystal silicon rod 52 along the radial direction of the single crystal silicon rod 52, and a single crystal silicon wafer can be obtained after the cutter 31 penetrates through the single crystal silicon rod 52; because the main shaft is provided with the cutters 31 and the distances between two adjacent cutters 31 are equal, a plurality of monocrystalline silicon wafers can be obtained at one time through one-time operation, compared with the traditional cutting device, the slicing time is greatly shortened, and the production efficiency of the monocrystalline silicon wafers is further improved;
s33, operating the piston rod of the feeding oil cylinder 28 to retract, and driving the fixing plate 29 and the main shaft to reset by the piston rod;
s4, cleaning of the monocrystalline silicon wafer: the cut monocrystalline silicon piece passes through the through groove 2 under the gravity and falls into the net barrel 38, the air compressor 33 is opened at the moment, the air compressor 33 produces high-pressure gas, the high-pressure gas sequentially passes through the pipeline, the inner cavity of the air outlet disc 34, the branch pipe 35 and the check valve 36 and enters into water in the cleaning groove 32, bubbles are generated in the water, the bubbles pass through the bottom of the net barrel 38 and enter into the net barrel 38, impurities and particles attached to the bubbles are removed after the bubbles act on the monocrystalline silicon piece, and therefore the cleaning of the monocrystalline silicon piece is achieved. Compared with the traditional immersion type cleaning of the monocrystalline silicon piece, the cleaning time is greatly shortened, and the production efficiency of the monocrystalline silicon piece is greatly improved; after cleaning, the piston rod of the vertical oil cylinder 37 is operated to extend upwards, the piston rod drives the support plate 39 to move upwards, the support plate 39 drives the net barrel 38 to move upwards, and after the net barrel 38 extends out of the cleaning tank 32, workers can take finished monocrystalline silicon wafers conveniently, and the labor intensity of the workers for collecting the monocrystalline silicon wafers is reduced.
Example two: as shown in fig. 11, the present embodiment is different from the first embodiment in that: still include controller 51, controller 51 is connected with motor I12, motor II18, pneumatic cylinder 13, feed cylinder 28, vertical hydro-cylinder 37, horizontal hydro-cylinder 23, vertical hydro-cylinder 24 electricity, can control the extension or the withdrawal of feed cylinder 28, vertical hydro-cylinder 37, horizontal hydro-cylinder 23, vertical hydro-cylinder 24 piston rod through controller 51, can also control the start-up or the closing of motor I12 and motor II18 simultaneously, has made things convenient for workman's operation, has the characteristics that degree of automation is high.
The foregoing is illustrative of the preferred embodiments of this invention, and it is to be understood that the invention is not limited to the precise form disclosed herein and that various other combinations, modifications, and environments may be resorted to, falling within the scope of the concept as disclosed herein, either as described above or as apparent to those skilled in the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A monocrystalline silicon rod cutting device based on monocrystalline silicon piece production, which is characterized in that: the silicon wafer cleaning device comprises a workbench (1) and a through groove (2) formed in the top of the workbench (1), wherein a monocrystalline silicon rod barreling device (3) and a slicing device (4) are respectively arranged on the top surface of the workbench (1) and positioned on the front side and the rear side of the through groove (2), a left clamping device (5) and a right clamping device (6) are respectively arranged on the top surface of the workbench (1) and positioned on the left side and the right side of the through groove (2), and a monocrystalline silicon wafer cleaning device is arranged right below the through groove (2);
the left clamping device (5) comprises a speed reducer (7), a driving belt pulley (8), a belt (9), a driven belt pulley (10), a three-jaw chuck I (11) and a motor I (12), the speed reducer (7) is fixedly arranged on the top surface of the workbench (1), the motor I (12) is horizontally arranged and arranged on the top surface of the speed reducer (7), the driving belt pulley (8) is arranged on an output shaft of the motor I (12), the driven belt pulley (10) is arranged on an input shaft of the speed reducer (7), the driven belt pulley (10) is arranged on the input shaft of the speed reducer (7), the three-jaw chuck I (11) is arranged on the output shaft of the speed reducer (7), and the belt (9) is arranged between the driving belt pulley (8) and the driven belt pulley (10);
the right clamping device (6) comprises a hydraulic cylinder (13), a three-jaw chuck II (14) and a bearing seat (15), the hydraulic cylinder (13) is horizontally arranged and fixedly installed on the top surface of the workbench (1), an installation plate (16) is welded on the action end of a piston rod of the hydraulic cylinder (13), the bearing seat (15) is fixedly installed on the end surface of the installation plate (16), a rotating shaft (17) is installed in the bearing seat (15) in a rotating mode, the rotating shaft (17) extends to the outside of the bearing seat (15), the three-jaw chuck II (14) is fixedly arranged on the extending end, and the three-jaw chuck II (14) and the three-jaw chuck I (11) are oppositely arranged left and right;
the monocrystalline silicon rod barreling device (3) comprises a transverse moving device, a longitudinal moving device, a motor II (18) and a grinding wheel (19), the transverse moving device comprises a horizontal guide rail (20), a horizontal sliding table (21), a sliding block A (22) and a horizontal oil cylinder (23), the horizontal guide rail (20) and the horizontal oil cylinder (23) are fixedly installed on the top surface of the workbench (1), the sliding block A (22) is arranged at the bottom of the horizontal sliding table (21), the horizontal sliding table (21) is installed on the horizontal guide rail (20) through the sliding block A (22) and the horizontal guide rail (20) in a sliding fit mode, and a piston rod of the horizontal oil cylinder (23) is fixedly arranged on the horizontal sliding table (21); the longitudinal moving device comprises a longitudinal oil cylinder (24), a sliding block B (25), a longitudinal sliding table (26) and a longitudinal guide rail (27), wherein the longitudinal oil cylinder (24) and the longitudinal guide rail (27) are fixedly arranged on the top surface of the horizontal sliding table (21), the longitudinal oil cylinder (24) is positioned on the front side of the longitudinal guide rail (27), the sliding block B (25) is fixedly arranged at the bottom of the longitudinal sliding table (26), the longitudinal sliding table (26) is arranged on the longitudinal guide rail (27) through the sliding block B (25) in a sliding fit manner with the longitudinal guide rail (27), and a piston rod of the longitudinal oil cylinder (24) is fixedly arranged on the longitudinal sliding table (26); the motor II (18) is horizontally arranged and fixedly installed on the top surface of the longitudinal sliding table (26), and the grinding wheel (19) is installed on an output shaft of the motor II (18);
the slicing device (4) comprises a feeding oil cylinder (28) and a main shaft, the feeding oil cylinder (28) is longitudinally arranged and fixedly installed on the top surface of the workbench (1), a fixing plate (29) is welded on the action end of a piston rod of the feeding oil cylinder (28), vertical plates (30) are welded on the left side and the right side of the front end surface of the fixing plate (29), the main shaft is horizontally arranged and fixedly arranged between the two vertical plates (30), a plurality of cutters (31) are fixedly arranged on the main shaft at intervals along the length direction of the main shaft, and the cutters (31) are positioned between a three-jaw chuck I (11) and a three-jaw chuck II (14);
monocrystalline silicon piece belt cleaning device includes washing tank (32), air compressor machine (33) and air outlet disc (34), washing tank (32) open-top, the bottom of washing tank (32) is sealed, and washing tank (32) are located logical groove (2) under, air outlet disc (34) set up under washing tank (32), and air outlet disc (34) set firmly branch pipe (35) of many intercommunication air outlet disc (34) on the top surface, and branch pipe (35) extend in washing tank (32), and extend to serve and be connected with check valve (36), the gas outlet department of air compressor machine (33) is connected with the pipeline, the pipeline communicates with the bottom of air outlet disc (34).
2. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 1, wherein: vertical oil cylinders (37) are fixedly mounted on the left side wall and the right side wall of the cleaning tank (32).
3. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 1, wherein: a net barrel (38) with an opening at the top and a closed bottom is arranged in the cleaning tank (32), support plates (39) are welded on the left side wall and the right side wall of the net barrel (38), and the two support plates (39) are welded on the action ends of piston rods of two vertical oil cylinders (37) respectively.
4. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 1, wherein: the main shaft includes that turn right by a left side and be provided with left side axle (40), spacing ring (41), circle axle (42) and right side axle (43) in order, external screw thread (44) have been seted up on the cylinder of circle axle (42) right-hand member portion, threaded connection has lock nut (45) on external screw thread (44), it has a plurality of cutters (31) to lie in proper order to overlap between spacing ring (41) and lock nut (45) on circle axle (42), cutter (31) cutting edge sets up forward, is provided with spacer (47) that the cover was located on circle axle (42) between adjacent cutter (31), under lock nut (45) and external screw thread (44) threaded connection power, cutter (31) are supported and are pressed between spacing ring (41) and lock nut (45).
5. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 4, wherein: the distance between two adjacent cutters (31) is equal.
6. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 4, wherein: a through hole (48) is formed in the cutter (31), and the through hole (48) is sleeved on the circular shaft (42).
7. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 4, wherein: vertical holes (49) are formed in the top surfaces of the left square shaft (40) and the right square shaft (43).
8. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 1, wherein: threaded holes corresponding to the vertical holes (49) are formed in the top surfaces of the two vertical plates (30), and the left square shaft (40) and the right square shaft (43) penetrate through the vertical holes (49) through screws (50) and are fixed on the vertical plates (30) in a threaded connection mode.
9. The cutting device for the silicon single crystal rod based on the production of the silicon single crystal wafer as claimed in claim 1, wherein: the cutting device further comprises a controller (51), wherein the controller (51) is electrically connected with the motor I (12), the motor II (18), the hydraulic cylinder (13), the feeding oil cylinder (28), the vertical oil cylinder (37), the horizontal oil cylinder (23) and the longitudinal oil cylinder (24).
10. The method for producing the monocrystalline silicon wafer based on the monocrystalline silicon rod cutting device for monocrystalline silicon wafer growth according to any one of claims 1 to 9, wherein: it comprises the following steps:
s1, feeding of the silicon single crystal rod: clamping the left end part of a to-be-barreled single crystal silicon rod (52) in a three-jaw chuck I (11) by a worker, clamping the left end part of the single crystal silicon rod (52) by using the three-jaw chuck I (11), extending a piston rod of the hydraulic cylinder (13) leftwards by operating the hydraulic cylinder (13), ensuring that a three-jaw chuck II (14) extends into the right end part of the single crystal silicon rod (52), and clamping the right end part of the single crystal silicon rod (52) by using the three-jaw chuck II (14), thereby realizing the feeding operation of the single crystal silicon rod;
s2, barreling of the single crystal silicon rod, which comprises the following steps:
s21, a worker operates the longitudinal oil cylinder (24) to enable a piston rod of the longitudinal oil cylinder to extend backwards, the piston rod drives a sliding block B (25) of the longitudinal sliding table (26) to move backwards along the longitudinal guide rail (27), the longitudinal sliding table (26) drives a motor II (18) on the longitudinal sliding table to move backwards, and when the grinding wheel (19) is observed to contact the monocrystalline silicon rod (52), the operation of the longitudinal oil cylinder (24) is immediately stopped;
s22, a worker turns on a motor I (12), the motor I (12) drives a driving belt pulley (8) to rotate, the driving belt pulley (8) drives a driven belt pulley (10) to rotate through a belt (9), the driven belt pulley (10) drives an input shaft of a speed reducer (7) to rotate, an output shaft of the speed reducer (7) is further driven to rotate, the output shaft drives a three-jaw chuck I (11) to rotate, and the three-jaw chuck I (11) drives a single crystal silicon rod (52) to rotate around the axis of the three-jaw chuck I (11);
s23, a worker turns on a motor II (18), the motor II (18) drives a grinding wheel (19) to rotate, the grinding wheel (19) starts to roll and grind the single crystal silicon rod (52), meanwhile, a horizontal oil cylinder (23) is operated to enable a piston rod of the horizontal oil cylinder to reciprocate left and right, the horizontal oil cylinder (23) drives a horizontal sliding table (21) to reciprocate left and right, the grinding wheel (19) is further driven to do reciprocating left and right motion along the axis of the single crystal silicon rod (52), and in the motion process, the roll grinding of the outer cylindrical surface of the single crystal silicon rod (52) is completed;
s3, cutting the silicon single crystal rod, which comprises the following steps:
s31, after the roller grinding is carried out for a period of time, the motor II (18) is closed, the piston rod of the longitudinal oil cylinder (24) is operated to retract, the piston rod drives the longitudinal sliding table (26) to move forwards and reset, and the grinding wheel (19) is separated from the single crystal silicon rod (52);
s32, a worker operates a piston rod of a feeding oil cylinder (28) to extend forwards, the piston rod drives a fixing plate (29) to move forwards, the fixing plate (29) drives a main shaft and a cutter (31) on the main shaft to move forwards, the cutter (31) moves linearly, the single crystal silicon rod (52) rotates around the axis of the cutter (31), the cutter (31) can cut the single crystal silicon rod (52) along the radial direction of the single crystal silicon rod (52), and when the cutter (31) penetrates through the single crystal silicon rod (52), a single crystal silicon wafer can be obtained;
s33, operating the piston rod of the feeding oil cylinder (28) to retract, and driving the fixing plate (29) and the main shaft to reset by the piston rod;
s4, cleaning of the monocrystalline silicon wafer: the monocrystalline silicon piece after the cutting passes through logical groove (2) under gravity and drops in net section of thick bamboo (38), open air compressor machine (33) this moment, air compressor machine (33) output high-pressure gas, high-pressure gas passes the pipeline in order, the inner chamber of air-out dish (34), branch pipe (35), check valve (36) enter into the aquatic in washing tank (32), produce the bubble in water, the bubble passes net section of thick bamboo (38) bottom and enters into net section of thick bamboo (38) in, will attach to impurity and granule on it behind the bubble effect monocrystalline silicon piece and clear away, thereby the washing of monocrystalline silicon piece has been realized.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010087281.4A CN111216257A (en) | 2020-02-11 | 2020-02-11 | Monocrystalline silicon rod cutting device and method based on monocrystalline silicon piece production |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202010087281.4A CN111216257A (en) | 2020-02-11 | 2020-02-11 | Monocrystalline silicon rod cutting device and method based on monocrystalline silicon piece production |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112975422A (en) * | 2021-02-22 | 2021-06-18 | 宁波跨马卡车部件有限公司 | Processing equipment and processing method for producing truck engine piston |
| CN114454361A (en) * | 2021-08-19 | 2022-05-10 | 青岛高测科技股份有限公司 | Silicon rod cutting equipment and system |
| CN114473670A (en) * | 2021-12-27 | 2022-05-13 | 保山隆基硅材料有限公司 | Silicon rod end face repairing method and device |
| CN117021386A (en) * | 2023-07-31 | 2023-11-10 | 内蒙古科晟科技有限公司 | Preparation process of monocrystalline silicon rod |
-
2020
- 2020-02-11 CN CN202010087281.4A patent/CN111216257A/en not_active Withdrawn
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112975422A (en) * | 2021-02-22 | 2021-06-18 | 宁波跨马卡车部件有限公司 | Processing equipment and processing method for producing truck engine piston |
| CN114454361A (en) * | 2021-08-19 | 2022-05-10 | 青岛高测科技股份有限公司 | Silicon rod cutting equipment and system |
| CN114473670A (en) * | 2021-12-27 | 2022-05-13 | 保山隆基硅材料有限公司 | Silicon rod end face repairing method and device |
| CN117021386A (en) * | 2023-07-31 | 2023-11-10 | 内蒙古科晟科技有限公司 | Preparation process of monocrystalline silicon rod |
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