CN207930412U - A kind of tumbling mill of barreling silicon single crystal rod - Google Patents
A kind of tumbling mill of barreling silicon single crystal rod Download PDFInfo
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- CN207930412U CN207930412U CN201820276813.7U CN201820276813U CN207930412U CN 207930412 U CN207930412 U CN 207930412U CN 201820276813 U CN201820276813 U CN 201820276813U CN 207930412 U CN207930412 U CN 207930412U
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- barreling
- single crystal
- silicon single
- crystal rod
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Abstract
The utility model discloses a kind of tumbling mills of barreling silicon single crystal rod, it includes fuselage（1）, be set to fuselage（1）The transverse hydraulic slide unit at top（2）With longitudinal hydraulic pressure moving platform（3）, transverse hydraulic slide unit（2）Top surface on and positioned at its left and right end portions be respectively arranged with actuating unit and cross cylinder（4）, the output end of actuating unit is connected with shaft（5）, cross cylinder（4）Piston rod（15）End be rotatably installed with axle sleeve（6）, axle sleeve（6）Left side on be provided with conical head（7）, conical head（7）On be cased with sleeve（8）, sleeve（8）With shaft（5）Coaxial arrangement, longitudinal hydraulic pressure moving platform（3）Top be installed with motor A（9）, motor A（9）Output shaft on the front and back grinding wheel being arranged is installed.The utility model has the beneficial effects that：Compact-sized, barreling precision height, the silicon single crystal rod for capableing of barreling different length, improves barreling efficiency at the tooling for fast implementing silicon single crystal rod.
Description
Technical field
The utility model is related to the technical field of silicon single crystal rod barreling, especially a kind of tumbling mill of barreling silicon single crystal rod.
Background technology
Monocrystalline silicon has good electric property and thermal stability as a kind of important semi-conducting material, from by people
It was found that and substituting other semi-conducting materials quickly after utilization.Silicon materials are because it is preferable with high temperature resistant and radiation resistance, especially
Suitable for making the characteristic of high power device as a kind of most semi-conducting material of application, integrated circuit semiconductor apparatus is big
Made of most silicon materials.In the good silicon single crystal method of manufacturing property, Grown by CZ Method silicon single crystal has equipment and technique
It is relatively easy, easy to implement to automatically control.Pulling of crystals silicon rod needs to carry out a series of after drawing out from single crystal growing furnace
Process, early period include block, the grinding of evolution, fillet and the mechanical processings such as plane lapping；Mid-term also needs to carry out silicon single crystal rod
Barreling, slice, cleaning, chamfering, grinding and the works such as clean again；Silicon chip is carried out the processes such as making herbs into wool, diffusion, crystallization and sintering by the later stage
It can just be manufactured into semiconductor devices or the solar battery sheet for photovoltaic generation afterwards.
It by section is that be polished into section be circular list to irregular silicon single crystal rod that the purpose of wherein barreling, which is using grinding wheel,
Crystalline silicon rod, existing barreling mode carry out on lathe, i.e., clamp one end of silicon single crystal rod first with scroll chuck, then
A bellmouth is made a call on the other end of silicon single crystal rod, then the conehead of lathe tail portion is inserted in bellmouth, to realize
The tooling of silicon single crystal rod rotates scroll chuck, and scroll chuck drives silicon single crystal rod rotation, while worker leans against monocrystalline using grinding wheel
Silicon rod outer surface, to wear into cylindric silicon single crystal rod.However, there are the defects more than upper material process for this barreling mode, reduce
Production efficiency, worker is also needed in tumbling process is moved along the axis of silicon single crystal rod using grinding wheel in addition, could be to whole
A silicon single crystal rod barreling, increases the labor intensity of worker, further reduced barreling efficiency.
Utility model content
The shortcomings that the purpose of the utility model is to overcome the prior arts, provide it is a kind of it is compact-sized, barreling precision is high, fast
Speed realizes the tooling of silicon single crystal rod, the silicon single crystal rod for capableing of barreling different length, the barreling silicon single crystal rod for improving barreling efficiency
Tumbling mill.
The purpose of this utility model is achieved through the following technical solutions：A kind of tumbling mill of barreling silicon single crystal rod, it is wrapped
Fuselage, the transverse hydraulic slide unit for being set to fuselage roof and longitudinal hydraulic pressure moving platform are included, on the top surface of the transverse hydraulic slide unit
And it is respectively arranged with actuating unit and cross cylinder positioned at its left and right end portions, the output end of actuating unit is connected with shaft, horizontal
The end of the piston rod of oil cylinder is rotatably installed with axle sleeve, and conical head is provided on the left side of axle sleeve, sleeve is cased on conical head,
Sleeve is coaxially disposed with shaft, is installed with motor A at the top of the longitudinal direction hydraulic pressure moving platform, is installed on the output shaft of motor A
There is the front and back grinding wheel being arranged, which further includes controller, the controller and actuating unit, cross cylinder, transverse hydraulic
Slide unit, longitudinal hydraulic pressure moving platform are connected with motor A.
The actuating unit includes motor B and reduction box, and the output end of motor B and the input terminal of reduction box connect.
The shaft is connected to the output end of reduction box.
It is additionally provided with guide holder at the top of the transverse hydraulic slide unit.
The piston rod of the cross cylinder is slidably mounted in the pilot hole of guide holder.
The utility model has the following advantages：The utility model is compact-sized, barreling precision is high, fast implements silicon single crystal rod
Tooling, be capable of barreling different length silicon single crystal rod, improve barreling efficiency.
Description of the drawings
Fig. 1 is the structural schematic diagram of the utility model；
Fig. 2 is the front view of the utility model；
In figure, 1- fuselages, 2- transverse hydraulic slide units, the longitudinal directions 3- hydraulic pressure moving platform, 4- cross cylinders, 5- shafts, 6- axle sleeves, 7-
Conical head, 8- sleeves, 9- motors A, 10- grinding wheel, 11- motors B, 12- reduction box, 13- guide holders, 15- piston rods, 16- monocrystalline
Silicon rod.
Specific implementation mode
The utility model is further described below in conjunction with the accompanying drawings, the scope of protection of the utility model be not limited to
It is lower described：
As shown in Figure 1 and 2, a kind of tumbling mill of barreling silicon single crystal rod, it includes fuselage 1, is set to the cross at 1 top of fuselage
To hydraulic pressure moving platform 2 and longitudinal hydraulic pressure moving platform 3, set respectively on the top surface of the transverse hydraulic slide unit 2 and positioned at its left and right end portions
It is equipped with actuating unit and cross cylinder 4, the output end of actuating unit is connected with shaft 5, the end of the piston rod 15 of cross cylinder 4
It is rotatably installed with axle sleeve 6, conical head 7 is provided on the left side of axle sleeve 6, sleeve 8, sleeve 8 and shaft 5 are cased on conical head 7
The top of coaxial arrangement, the longitudinal direction hydraulic pressure moving platform 3 is installed with motor A9, and front and back set is equipped on the output shaft of motor A9
The grinding wheel 10 set.The tumbling mill further includes controller, the controller and actuating unit, cross cylinder 4, transverse hydraulic slide unit 2,
Longitudinal hydraulic pressure moving platform 3 is connected with motor A9, the stretching or retraction of 4 piston rod of controlled level oil cylinder is capable of by controller, into one
Step changes the level interval between shaft 5 and sleeve 8, and to the silicon single crystal rod conducive to clamping different length, while controller is also
Transverse hydraulic slide unit 2 can be controlled and do reciprocal side-to-side movement, while the startup or closing of motor A9 and motor B11 can also be controlled.
The actuating unit includes motor B11 and reduction box 12, and the output end of motor B11 connects with the input terminal of reduction box 12
It connects；The shaft 5 is connected to the output end of reduction box 12.The top of the transverse hydraulic slide unit 2 is additionally provided with guide holder 13.Institute
The piston rod 15 for stating cross cylinder 4 is slidably mounted in the pilot hole of guide holder 13.
The course of work of the utility model is as follows：It will wait for that the left side of barreling silicon single crystal rod 16 is resisted against the end face of shaft 5
On, then the piston rod 15 of controlled level oil cylinder 4 stretches out sleeve 8 is made to be resisted against on the right side of silicon single crystal rod 16 to the left, to real
The Rapid tooling for having showed silicon single crystal rod is clamped without scroll chuck and without boring bellmouth in silicon rod tail portion, is greatly improved
Tooling efficiency；After tooling, controlling longitudinal stretching of hydraulic pressure moving platform 3 makes grinding wheel 10 touch 16 outer surface of silicon single crystal rod, then controls
Motor A9 and motor B11 processed starts, and motor A9 drives grinding wheel 10 to do high speed rotary motion, and the torque of motor B11 is through reduction box 12
Shaft 5 is passed to after deceleration, shaft 5 drives silicon single crystal rod 16 to rotate around own axes, while controlling transverse hydraulic cunning
Platform 2 does bilateral reciprocation, and 10 barreling silicon single crystal rod of grinding wheel obtains columnar single crystal silicon rod, therefore nothing after a period of time barreling
Man-hour manually hand-held grinder buffing silicon single crystal rod is needed, the labor intensity of worker is alleviated, improves barreling efficiency, improves barreling essence
Degree.
Claims (5)
1. a kind of tumbling mill of barreling silicon single crystal rod, it is characterised in that：It includes fuselage（1）, be set to fuselage（1）The cross at top
To hydraulic pressure moving platform（2）With longitudinal hydraulic pressure moving platform（3）, the transverse hydraulic slide unit（2）Top surface on and be located at its left and right end portions
It is respectively arranged with actuating unit and cross cylinder（4）, the output end of actuating unit is connected with shaft（5）, cross cylinder（4）Work
Stopper rod（15）End be rotatably installed with axle sleeve（6）, axle sleeve（6）Left side on be provided with conical head（7）, conical head（7）On
It is cased with sleeve（8）, sleeve（8）With shaft（5）Coaxial arrangement, the longitudinal direction hydraulic pressure moving platform（3）Top be installed with motor A
（9）, motor A（9）Output shaft on the front and back grinding wheel being arranged is installed（10）, which further includes controller, the control
Device and actuating unit, cross cylinder（4）, transverse hydraulic slide unit（2）, longitudinal hydraulic pressure moving platform（3）With motor A（9）Connection.
2. a kind of tumbling mill of barreling silicon single crystal rod according to claim 1, it is characterised in that：The actuating unit includes
Motor B（11）And reduction box（12）, motor B（11）Output end and reduction box（12）Input terminal connection.
3. a kind of tumbling mill of barreling silicon single crystal rod according to claim 1, it is characterised in that：The shaft（5）Connection
In reduction box（12）Output end.
4. a kind of tumbling mill of barreling silicon single crystal rod according to claim 1, it is characterised in that：The transverse hydraulic slide unit
（2）Top be additionally provided with guide holder（13）.
5. a kind of tumbling mill of barreling silicon single crystal rod according to claim 1, it is characterised in that：The cross cylinder（4）
Piston rod（15）It is slidably mounted on guide holder（13）Pilot hole in.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820276813.7U CN207930412U (en) | 2018-02-27 | 2018-02-27 | A kind of tumbling mill of barreling silicon single crystal rod |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820276813.7U CN207930412U (en) | 2018-02-27 | 2018-02-27 | A kind of tumbling mill of barreling silicon single crystal rod |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207930412U true CN207930412U (en) | 2018-10-02 |
Family
ID=63653195
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820276813.7U Active CN207930412U (en) | 2018-02-27 | 2018-02-27 | A kind of tumbling mill of barreling silicon single crystal rod |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207930412U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109822432A (en) * | 2019-03-14 | 2019-05-31 | 成都青洋电子材料有限公司 | Tumbling mill is used in a kind of polishing of monocrystalline silicon piece section |
| CN113798965A (en) * | 2021-09-08 | 2021-12-17 | 亚洲硅业(青海)股份有限公司 | Silicon core preparation equipment |
| CN114310511A (en) * | 2022-01-12 | 2022-04-12 | 江苏益芯半导体有限公司 | Tumbling mill for wafer processing |
| CN114952458A (en) * | 2022-05-19 | 2022-08-30 | 宁夏中晶半导体材料有限公司 | Device and method for adjusting crystal bar positive crystal orientation tumbling |
| CN115870860A (en) * | 2023-02-22 | 2023-03-31 | 山东恒涛节能环保有限公司 | Polishing and grinding equipment for finish machining of shoulder end face of stepped shaft |
-
2018
- 2018-02-27 CN CN201820276813.7U patent/CN207930412U/en active Active
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109822432A (en) * | 2019-03-14 | 2019-05-31 | 成都青洋电子材料有限公司 | Tumbling mill is used in a kind of polishing of monocrystalline silicon piece section |
| CN113798965A (en) * | 2021-09-08 | 2021-12-17 | 亚洲硅业(青海)股份有限公司 | Silicon core preparation equipment |
| CN114310511A (en) * | 2022-01-12 | 2022-04-12 | 江苏益芯半导体有限公司 | Tumbling mill for wafer processing |
| CN114310511B (en) * | 2022-01-12 | 2022-10-18 | 江苏益芯半导体有限公司 | Tumbling mill for wafer processing |
| CN114952458A (en) * | 2022-05-19 | 2022-08-30 | 宁夏中晶半导体材料有限公司 | Device and method for adjusting crystal bar positive crystal orientation tumbling |
| CN114952458B (en) * | 2022-05-19 | 2024-04-26 | 宁夏中晶半导体材料有限公司 | Device and method for adjusting crystal bar positive crystal direction barreling machining |
| CN115870860A (en) * | 2023-02-22 | 2023-03-31 | 山东恒涛节能环保有限公司 | Polishing and grinding equipment for finish machining of shoulder end face of stepped shaft |
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