CN109822432A - Tumbling mill is used in a kind of polishing of monocrystalline silicon piece section - Google Patents

Tumbling mill is used in a kind of polishing of monocrystalline silicon piece section Download PDF

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Publication number
CN109822432A
CN109822432A CN201910193483.4A CN201910193483A CN109822432A CN 109822432 A CN109822432 A CN 109822432A CN 201910193483 A CN201910193483 A CN 201910193483A CN 109822432 A CN109822432 A CN 109822432A
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CN
China
Prior art keywords
monocrystalline silicon
silicon piece
bracket
fixedly connected
tumbling mill
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910193483.4A
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Chinese (zh)
Inventor
李鹭赵
富军
傅昭林
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHENGDU QINGYANG ELECTRONIC MATERIALS Co Ltd
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CHENGDU QINGYANG ELECTRONIC MATERIALS Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
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Priority to CN201910193483.4A priority Critical patent/CN109822432A/en
Publication of CN109822432A publication Critical patent/CN109822432A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a kind of monocrystalline silicon piece section polishing tumbling mills, are related to monocrystalline silicon piece technical field, including pedestal, and bracket is fixedly connected with above the pedestal, and the upper end of the bracket is fixedly connected with cross bar, and the side of the cross bar is fixedly connected with slide bar.The present invention is when in use, monocrystalline silicon piece is placed in the bracket on lower pallet, then it rotates top board and is inserted into bolt, monocrystalline silicon piece is compressed in bracket by briquetting at this time, then start driving motor, shake crank, crank is slided on slide bar by threaded rod band movable slider at this time, monocrystalline silicon piece to be mounted on lower pallet is mobile to the direction of roller, and then it polishes monocrystalline silicon piece section, compared to more existing tumbling mill, novel monocrystalline silicon piece section polishing tumbling mill, the depth of polishing can be controlled, to improve product quality, and single can polish multiple monocrystalline silicon pieces, processing efficiency is higher, improve production efficiency.

Description

Tumbling mill is used in a kind of polishing of monocrystalline silicon piece section
Technical field
The present invention relates to monocrystalline silicon piece technical field, tumbling mill is used in specifically a kind of monocrystalline silicon piece section polishing.
Background technique
Monocrystalline silicon piece: the monocrystal of silicon is a kind of crystal with basic complete lattice structure.Different directions have Different property is a kind of good semiconducting material.Purity requirement reaches 99.9999%, even up to 99.9999999% with On.It is used for producing the semiconductor devices, solar battery etc..It is drawn in single crystal growing furnace with the polysilicon of high-purity, monocrystalline silicon It is a kind of nonmetalloid that comparison is active, is the important component of crystalline material, the forward position in new material development.It is led It wants purposes to be used as semiconductor material and utilizes solar energy power generating, heat supply etc..Since solar energy has cleaning, environmental protection, side Just equal many advantages, in the late three decades, solar utilization technique is researching and developing, commercially produce, all obtain in terms of market development Obtained tremendous development, become the world quickly, one of the new industry of stable development.Monocrystalline silicon can be used for diode grade, rectification Device level, the production of circuit-level and solar battery grade single crystal product article and deep processing manufacture, subsequent product integrated circuit and Semiconductor separation part is widely used to every field, also occupies an important position in military avionic equipment.In photovoltaic technology It, can direct handle using silicon single crystal solar battery produced with today of microminiature semiconductor inverter technology rapid development Solar energy is converted into luminous energy, realizes the beginning for green energy resource revolution of marching toward.Now, external solar photovoltaic power plant has arrived In the theoretical stage of ripeness, to practical stage transition, the utilization of solar energy silicon single crystal will be spread to worldwide, Market demand is self-evident.
It is polished using section of the tumbling mill to monocrystalline silicon piece, when in use, is needed manually not currently on the market Intermittent insertion is removed, and the depth that this barreling area is more inserted into has direct relation, causes barreling section to be affected, while people Work polishing can only once polish a piece of monocrystalline silicon piece, and processing efficiency is low.Therefore, those skilled in the art provide a kind of monocrystalline Silicon wafer section polishing tumbling mill, to solve the problems mentioned in the above background technology.
Summary of the invention
The purpose of the present invention is to provide a kind of monocrystalline silicon piece section polishing tumbling mills, to solve in above-mentioned background technique The problem of proposition.
To achieve the above object, the invention provides the following technical scheme:
A kind of polishing of monocrystalline silicon piece section tumbling mill, including pedestal are fixedly connected with bracket above the pedestal, institute The upper end for stating bracket is fixedly connected with cross bar, and the side of the cross bar is fixedly connected with slide bar, and the top of the cross bar is fixed to be connected It is connected to bearing piece, the bearing piece is rotatably connected to crank, and the crank is fixedly connected with threaded rod, slidably connects on the slide bar Sliding block, one end of the threaded rod are rotationally connected with the sliding block, and the side of the sliding block is fixedly connected with lower pallet, under described The side of supporting plate is rotatably connected to hinge, and the hinge is rotatably connected to top board, and the upper surface of the pedestal is equipped with driving Motor, the output shaft of the driving motor are sequentially connected with driving belt pulley, and the driving belt pulley is sequentially connected with transmission skin Band, the side of the cross bar are fixedly connected with strut, and the strut is rotatably connected to roller, and the drum drive is connected with driven Belt pulley, the driven pulley transmission connection are electrically connected in the driving belt, the driving motor and external power supply.
As a further solution of the present invention: the upper surface of the lower pallet offers bracket, the following table of the top board Face is provided with briquetting, and the bracket and briquetting are adapted.
As further scheme of the invention: the left end of the top board is fixedly connected with upper fixture block, the lower pallet Left end be fixedly connected with lower fixture block, the lower fixture block and upper fixture block are adapted.
As further scheme of the invention: the lower fixture block is connected with bolt, and the side of the upper fixture block offers Hole, described hole and the bolt are adapted.
As further scheme of the invention: the quantity of the bracket is five, is equidistantly divided between each bracket Cloth.
As further scheme of the invention: the quantity of the briquetting is five, is equidistantly divided between each briquetting Cloth.
As further scheme of the invention: the equal length of the top board and lower pallet, the quantity of the slide bar It is two, it is parallel between two slide bars.
As the present invention further scheme: the two sides of the sliding block offer slide opening, two slide openings distributions and Two slide bars are adapted.
As further scheme of the invention: being fixedly connected with feet, the quantity of the feet below the pedestal It is four, four feets are distributed in four corners of the pedestal.
As further scheme of the invention: the bracket is set as rectangle, and the bracket is close to the roller Side is set as being open.
Compared with prior art, the beneficial effects of the present invention are: in the use of the present invention, monocrystalline silicon piece is placed on subiculum In bracket on plate, then rotates top board and be inserted into bolt, monocrystalline silicon piece is compressed in bracket by briquetting at this time, is then started Driving motor shakes crank, and crank is slided on slide bar by threaded rod band movable slider at this time, to will be mounted on lower pallet Monocrystalline silicon piece it is mobile to the direction of roller, and then polish monocrystalline silicon piece section, compare more existing tumbling mill, it is novel Monocrystalline silicon piece section polishing use tumbling mill, the depth of polishing can be controlled, to improve product quality, and single Can polish multiple monocrystalline silicon pieces, and processing efficiency is higher, improve production efficiency.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that tumbling mill is used in a kind of polishing of monocrystalline silicon piece section;
Fig. 2 is the structural schematic diagram of lower pallet in a kind of monocrystalline silicon piece section polishing tumbling mill;
Fig. 3 is the side structure schematic view that tumbling mill is used in a kind of polishing of monocrystalline silicon piece section;
Fig. 4 is the structural schematic diagram of upper fixture block in a kind of monocrystalline silicon piece section polishing tumbling mill;
Fig. 5 is the overlooking structure diagram that tumbling mill is used in a kind of polishing of monocrystalline silicon piece section.
In figure: 1, pedestal;2, bracket;3, cross bar;4, bearing piece;5, sliding block;6, top board;7, lower pallet;8, roller;9, from Dynamic belt pulley;10, strut;11, driving belt;12, driving belt pulley;13, driving motor;14, feet;15, crank;16, it inserts Pin;17, briquetting;18, bracket;19, hinge;20, threaded rod;21, slide bar;22, upper fixture block;23, lower fixture block.
Specific embodiment
Please refer to Fig. 1~5, in the embodiment of the present invention, a kind of polishing of monocrystalline silicon piece section tumbling mill, including pedestal 1, bottom The top of seat 1 is fixedly connected with bracket 2, and the upper end of bracket 2 is fixedly connected with cross bar 3, and the side of cross bar 3 is fixedly connected with slide bar 21, the top of cross bar 3 is fixedly connected with bearing piece 4, and bearing piece 4 is rotatably connected to crank 15, and crank 15 is fixedly connected with threaded rod 20, Sliding block 5 is slidably connected on slide bar 21, one end of threaded rod 20 is rotationally connected with sliding block 5, and the side of sliding block 5 is fixedly connected with Lower pallet 7, the side of lower pallet 7 are rotatably connected to hinge 19, and hinge 19 is rotatably connected to top board 6, the upper surface peace of pedestal 1 Equipped with driving motor 13, the output shaft of driving motor 13 is sequentially connected with driving belt pulley 12, and driving belt pulley 12 is sequentially connected There is driving belt 11, the side of cross bar 3 is fixedly connected with strut 10, and strut 10 is rotatably connected to roller 8, and roller 8 is sequentially connected There is driven pulley 9, the transmission connection of driven pulley 9 is electrically connected in driving belt 11, driving motor 13 and external power supply, this Invention when in use, before processing, first extracts bolt 16, bolt 16 is detached from hole at this time, and top board 6 is first passed through hinge outward Chain 19 starts upwards, and monocrystalline silicon piece is placed in the bracket 18 on lower pallet 7, then rotates top board 6 simultaneously by hinge 19 It is inserted into bolt 16, monocrystalline silicon piece is compressed in bracket 18, then starts by upper fixture block 22 and the engaging of lower fixture block 23, briquetting 17 at this time The output shaft of driving motor 13, driving motor 13 drives driving belt pulley 12 to rotate, and driving belt pulley 12 passes through driving belt 11 Driven pulley 9 is driven to rotate, driven pulley 9 drives roller 8 to rotate, and shakes crank 15, crank 15 passes through threaded rod at this time 20 band movable sliders 5 slide on slide bar 21, move so that the monocrystalline silicon piece on lower pallet 7 will be mounted on to the direction of roller 8, And then polish monocrystalline silicon piece section, by shaking crank 15 i.e. controllable the distance between monocrystalline silicon piece and roller 8, from And compared to the depth of control polishing with manual control grinding depth, the simpler convenience of crank 15 is shaken, and can be significantly Improve precision, compare more existing tumbling mill, novel monocrystalline silicon piece section polishing tumbling mill, can to the depth of polishing into Row control, to improve product quality, and single can polish multiple monocrystalline silicon pieces, and processing efficiency is higher, improves production effect Rate.
The upper surface of lower pallet 7 offers bracket 18, and the lower surface of top board 6 is provided with briquetting 17, bracket 18 and briquetting 17 are adapted, as shown in Fig. 2, starting upwards before use, top board 6 is first passed through hinge 19, monocrystalline silicon piece is placed on down In bracket 18 on supporting plate 7, top board 6 is then rotated by hinge 19 and is inserted into bolt 16, at this time upper fixture block 22 and lower fixture block Monocrystalline silicon piece is compressed in bracket 18 by 23 engagings, briquetting 17, to complete the installation to monocrystalline silicon piece.
The left end of top board 6 is fixedly connected with fixture block 22, and the left end of lower pallet 7 is fixedly connected with lower fixture block 23, lower card Block 23 and upper fixture block 22 are adapted, as shown in figure 4, monocrystalline silicon piece is placed in the bracket 18 on lower pallet 7, then pass through hinge Chain 19 rotates top board 6 and is inserted into bolt 16, and monocrystalline silicon piece is compressed on by upper fixture block 22 and the engaging of lower fixture block 23, briquetting 17 at this time In bracket 18, to complete the installation to monocrystalline silicon piece.
Lower fixture block 23 is connected with bolt 16, and the side of upper fixture block 22 opens up hole, and hole and bolt 16 are adapted, are adding Before work, first bolt 16 is extracted outward, bolt 16 is detached from hole at this time, first starts top board 6 upwards by hinge 19, will be single Crystal silicon chip is placed in the bracket 18 on lower pallet 7, is then rotated top board 6 by hinge 19 and is inserted into bolt 16, bolt 16 It is inserted into hole, monocrystalline silicon piece is compressed in bracket 18 by upper fixture block 22 and the engaging of lower fixture block 23, briquetting 17 at this time, thus completion pair The installation of monocrystalline silicon piece.
The quantity of bracket 18 is five, is equally spaced between each bracket 18, as shown in Fig. 2, when in use, single is by five A monocrystalline silicon piece is placed on five brackets 18, can once polish five monocrystalline silicon pieces, to improve processing efficiency.
The quantity of briquetting 17 is five, is equally spaced between each briquetting 17, as shown in Fig. 2, when in use, single is by five A monocrystalline silicon piece is placed on five brackets 18, then rotates top board 6 by hinge 19 and is inserted into bolt 16, at this time upper fixture block 22 Engaging with lower fixture block 23, monocrystalline silicon piece is compressed in bracket 18 by briquetting 17, so that the installation to monocrystalline silicon piece is completed, it can be with one It is secondary to polish five monocrystalline silicon pieces, to improve processing efficiency.
The equal length of top board 6 and lower pallet 7, the quantity of slide bar 21 are two, parallel between two slide bars 21, such as Shown in Fig. 5, when in use, crank 15 shaking, crank 15 is slided on slide bar 21 by threaded rod 20 with movable slider 5 at this time, from And it is mobile to the direction of roller 8 to be mounted on the monocrystalline silicon piece on lower pallet 7, and then polishes monocrystalline silicon piece section, two It is parallel between a slide bar 21, so that sliding block 5 is more stable in sliding, to improve product quality.
The two sides of sliding block 5 offer slide opening, and two slide opening distributions and two slide bars 21 are adapted, as shown in figure 5, using When, crank 15 is shaken, crank 15 is slided on slide bar 21 by threaded rod 20 with movable slider 5 at this time, so that subiculum will be mounted on Monocrystalline silicon piece on plate 7 is mobile to the direction of roller 8, and then polishes monocrystalline silicon piece section, phase between two slide bars 21 In parallel, so that sliding block 5 is more stable in sliding, by shake crank 15 be between controllable monocrystalline silicon piece and roller 8 away from From to be compared to the depth of control polishing with manual control grinding depth, the shake simpler convenience of crank 15, and energy Precision is enough greatly improved, to improve product quality.
The lower section of pedestal 1 is fixedly connected with feet 14, and the quantity of feet 14 is four, and four feets 14 are distributed in pedestal 1 Four corners, as described in Figure 1, when in use, driving motor 13 open when can generate vibration, due to the lower section of pedestal 1 It is fixedly connected with feet 14, the quantity of feet 14 is four, and four feets 14 are distributed in four corners of pedestal 1, feet 14 The effect of damping is played, grinding accuracy is improved.
Bracket 18 is set as rectangle, and bracket 18 is set as being open close to the side of roller 8, as shown in Fig. 2, using When, after monocrystalline silicon piece is placed in bracket 18, since bracket 18 is set as being open close to the side of roller 8, so that more Remaining partial denudation outside, shakes crank 15, and crank 15 is slided on slide bar 21 by threaded rod 20 with movable slider 5 at this time, from And it is mobile to the direction of roller 8 to be mounted on the monocrystalline silicon piece on lower pallet 7, and then polishes monocrystalline silicon piece section, leads to Shake crank 15 i.e. controllable the distance between monocrystalline silicon piece and roller 8 are crossed, thus to the depth and manual control of control polishing Grinding depth is compared, and shakes the simpler convenience of crank 15, and can greatly improve precision.
The working principle of the invention is: in the use of the present invention, before processing, first extracting bolt 16, inserting outward at this time Pin 16 is detached from hole, first starts top board 6 upwards by hinge 19, the bracket 18 monocrystalline silicon piece being placed on lower pallet 7 In, top board 6 is then rotated by hinge 19 and is inserted into bolt 16, upper fixture block 22 and the engaging of lower fixture block 23, briquetting 17 will at this time Monocrystalline silicon piece is compressed in bracket 18, then starts driving motor 13, and the output shaft of driving motor 13 drives driving belt pulley 12 Rotation, driving belt pulley 12 drive driven pulley 9 to rotate by driving belt 11, and driven pulley 9 drives roller 8 to rotate, Crank 15 is shaken, crank 15 is slided on slide bar 21 by threaded rod 20 with movable slider 5 at this time, so that lower pallet 7 will be mounted on On monocrystalline silicon piece it is mobile to the direction of roller 8, and then polish monocrystalline silicon piece section, it is i.e. controllable by shaking crank 15 The distance between monocrystalline silicon piece and roller 8 processed shakes to compare to the depth of control polishing with manual control grinding depth The simpler convenience of crank 15, and precision can be greatly improved, compare more existing tumbling mill, novel monocrystalline silicon piece section Polishing tumbling mill, can control the depth of polishing, to improve product quality, and single can polish multiple lists Crystal silicon chip, processing efficiency is higher, improves production efficiency.
It is above-described, it is merely preferred embodiments of the present invention, but protection scope of the present invention is not limited to This, anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention And its inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.

Claims (10)

1. a kind of polishing of monocrystalline silicon piece section tumbling mill, including pedestal (1), which is characterized in that the top of the pedestal (1) is solid Surely it is connected with bracket (2), the upper end of the bracket (2) is fixedly connected with cross bar (3), and the side of the cross bar (3) is fixedly connected Having slide bar (21), is fixedly connected with bearing piece (4) above the cross bar (3), the bearing piece (4) is rotatably connected to crank (15), The crank (15) is fixedly connected with threaded rod (20), slidably connects sliding block (5), the threaded rod on the slide bar (21) (20) one end is rotationally connected with the sliding block (5), and the side of the sliding block (5) is fixedly connected with lower pallet (7), the subiculum The side of plate (7) is rotatably connected to hinge (19), and the hinge (19) is rotatably connected to top board (6), the pedestal (1) it is upper Surface is equipped with driving motor (13), and the output shaft of the driving motor (13) is sequentially connected with driving belt pulley (12), described Driving belt pulley (12) is sequentially connected with driving belt (11), and the side of the cross bar (3) is fixedly connected with strut (10), described Strut (10) is rotatably connected to roller (8), and the roller (8) is sequentially connected with driven pulley (9), the driven pulley (9) transmission connection is electrically connected in the driving belt (11), the driving motor (13) and external power supply.
2. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 1, which is characterized in that the lower pallet (7) upper surface offers bracket (18), and the lower surface of the top board (6) is provided with briquetting (17), the bracket (18) and Briquetting (17) is adapted.
3. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 1, which is characterized in that the top board (6) left end is fixedly connected with fixture block (22), and the left end of the lower pallet (7) is fixedly connected with lower fixture block (23), under described Fixture block (23) and upper fixture block (22) are adapted.
4. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 3, which is characterized in that the lower fixture block (23) it is connected with bolt (16), the side of the upper fixture block (22) opens up hole, described hole and the bolt (16) Xiang Shi Match.
5. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 2, which is characterized in that the bracket (18) Quantity be five, be equally spaced between each bracket (18).
6. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 2, which is characterized in that the briquetting (17) Quantity be five, be equally spaced between each briquetting (17).
7. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 1, which is characterized in that the top board (6) and the equal length of lower pallet (7), the quantity of the slide bar (21) are two, parallel between two slide bars (21).
8. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 7, which is characterized in that the sliding block (5) Two sides offer slide opening, two slide openings distributions and two slide bars (21) are adapted.
9. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 1, which is characterized in that the pedestal (1) Lower section be fixedly connected with feet (14), the quantity of the feet (14) is four, and four feets (14) are distributed in described Four corners of pedestal (1).
10. a kind of monocrystalline silicon piece section polishing tumbling mill according to claim 2, which is characterized in that the bracket (18) it is set as rectangle, and the bracket (18) is set as being open close to the side of the roller (8).
CN201910193483.4A 2019-03-14 2019-03-14 Tumbling mill is used in a kind of polishing of monocrystalline silicon piece section Pending CN109822432A (en)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87207962U (en) * 1987-05-09 1988-07-20 四川省涪陵地区电子技术研究所 Winding-cutting ironcore-precision cutting fixture
WO2008093488A1 (en) * 2007-01-31 2008-08-07 Shin-Etsu Handotai Co., Ltd. Silicon wafer beveling device, silicon wafer manufacturing method, and etched silicon wafer
CN201613496U (en) * 2010-02-21 2010-10-27 晶科能源有限公司 Silicon wafer clamping device
CN102962742A (en) * 2012-11-14 2013-03-13 扬州协鑫光伏科技有限公司 Chamfering edge grinding machine for solar wafer
CN108406458A (en) * 2018-02-27 2018-08-17 成都青洋电子材料有限公司 A kind of monocrystalline silicon piece production system and its production technology
CN207841035U (en) * 2017-11-02 2018-09-11 浙江集英精密机器有限公司 Applied to the tumbling apparatus in total silicon stick drum sanding equipment
CN207930412U (en) * 2018-02-27 2018-10-02 成都青洋电子材料有限公司 A kind of tumbling mill of barreling silicon single crystal rod
CN109176233A (en) * 2018-10-25 2019-01-11 中建海峡建设发展有限公司 A kind of brick grinding apparatus for building

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN87207962U (en) * 1987-05-09 1988-07-20 四川省涪陵地区电子技术研究所 Winding-cutting ironcore-precision cutting fixture
WO2008093488A1 (en) * 2007-01-31 2008-08-07 Shin-Etsu Handotai Co., Ltd. Silicon wafer beveling device, silicon wafer manufacturing method, and etched silicon wafer
CN201613496U (en) * 2010-02-21 2010-10-27 晶科能源有限公司 Silicon wafer clamping device
CN102962742A (en) * 2012-11-14 2013-03-13 扬州协鑫光伏科技有限公司 Chamfering edge grinding machine for solar wafer
CN207841035U (en) * 2017-11-02 2018-09-11 浙江集英精密机器有限公司 Applied to the tumbling apparatus in total silicon stick drum sanding equipment
CN108406458A (en) * 2018-02-27 2018-08-17 成都青洋电子材料有限公司 A kind of monocrystalline silicon piece production system and its production technology
CN207930412U (en) * 2018-02-27 2018-10-02 成都青洋电子材料有限公司 A kind of tumbling mill of barreling silicon single crystal rod
CN109176233A (en) * 2018-10-25 2019-01-11 中建海峡建设发展有限公司 A kind of brick grinding apparatus for building

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Application publication date: 20190531