CN114473670A - Silicon rod end face repairing method and device - Google Patents
Silicon rod end face repairing method and device Download PDFInfo
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- CN114473670A CN114473670A CN202111631136.9A CN202111631136A CN114473670A CN 114473670 A CN114473670 A CN 114473670A CN 202111631136 A CN202111631136 A CN 202111631136A CN 114473670 A CN114473670 A CN 114473670A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 183
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 183
- 239000010703 silicon Substances 0.000 title claims abstract description 183
- 238000000034 method Methods 0.000 title claims abstract description 34
- 230000005540 biological transmission Effects 0.000 claims abstract description 91
- 230000033001 locomotion Effects 0.000 claims abstract description 35
- 238000012545 processing Methods 0.000 claims description 31
- 230000007246 mechanism Effects 0.000 claims description 23
- 230000008439 repair process Effects 0.000 claims description 20
- 239000003638 chemical reducing agent Substances 0.000 claims description 15
- 238000013519 translation Methods 0.000 claims description 8
- 229910000831 Steel Inorganic materials 0.000 claims description 5
- 239000010959 steel Substances 0.000 claims description 5
- 210000001503 joint Anatomy 0.000 claims 1
- 230000008569 process Effects 0.000 abstract description 10
- 230000009286 beneficial effect Effects 0.000 abstract description 5
- 238000012958 reprocessing Methods 0.000 abstract 2
- 238000003754 machining Methods 0.000 description 13
- 210000000056 organ Anatomy 0.000 description 11
- 239000004677 Nylon Substances 0.000 description 8
- 229920001778 nylon Polymers 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 229910001651 emery Inorganic materials 0.000 description 6
- 239000003921 oil Substances 0.000 description 6
- 238000012423 maintenance Methods 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 230000009467 reduction Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 3
- 238000004891 communication Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 238000013459 approach Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910003460 diamond Inorganic materials 0.000 description 2
- 239000010432 diamond Substances 0.000 description 2
- 230000002669 organ and tissue protective effect Effects 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000002457 bidirectional effect Effects 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000007790 scraping Methods 0.000 description 1
- 238000006748 scratching Methods 0.000 description 1
- 230000002393 scratching effect Effects 0.000 description 1
- 229910021487 silica fume Inorganic materials 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/10—Single-purpose machines or devices
- B24B7/16—Single-purpose machines or devices for grinding end-faces, e.g. of gauges, rollers, nuts, piston rings
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/02—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables
- B24B47/04—Drives or gearings; Equipment therefor for performing a reciprocating movement of carriages or work- tables by mechanical gearing only
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B47/00—Drives or gearings; Equipment therefor
- B24B47/10—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces
- B24B47/12—Drives or gearings; Equipment therefor for rotating or reciprocating working-spindles carrying grinding wheels or workpieces by mechanical gearing or electric power
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B7/00—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor
- B24B7/20—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground
- B24B7/22—Machines or devices designed for grinding plane surfaces on work, including polishing plane glass surfaces; Accessories therefor characterised by a special design with respect to properties of the material of non-metallic articles to be ground for grinding inorganic material, e.g. stone, ceramics, porcelain
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Abstract
The application discloses a method for repairing the end face of a silicon rod, and belongs to the technical field of grinding. The method comprises the following steps: clamping a silicon rod to be repaired on a workpiece clamping table; moving the first transmission assembly and the second transmission assembly, and aligning the silicon rod to be repaired on the workpiece clamping table with the grinding assembly; and controlling the first transmission component to drive the grinding component to perform reciprocating motion for preset times along an X axis and controlling the second transmission component to drive the workpiece clamping table to perform reciprocating motion for preset times along a Y axis in cooperation with the movement of the first transmission component, so that the grinding component performs grinding for the preset times on the end surface of the silicon rod to be repaired, and the silicon rod with the repaired end surface is obtained. The embodiment of this application treats the silicon rod of reprocessing through cutting the way of rubbing to pieces and processes, reduces the emergence of the edge breakage or the unevenness situation appearing in the silicon rod terminal surface, has the beneficial effect that improves silicon rod reprocessing quality.
Description
Technical Field
The application belongs to the technical field of grinding, and particularly relates to a method and equipment for repairing an end face of a silicon rod.
Background
At present, the silicon rod processing procedures are mainly cutting, squaring and polishing, but the silicon rod cut by the cutting machine during the cutting procedure has end surface inclined plane and edge breakage due to various problems of equipment tooling, level and the like; resulting in difficult processing in the subsequent cutting-polishing section and reduced yield. For this purpose, it is necessary to cut off the parts of the end faces that are not flat and have broken edges.
In the prior art, two kinds of equipment for repairing the end face exist, one is a single-cutter head cutting machine, and the other is a common three-phase asynchronous motor. When the diamond wire cutting machine with the single cutter head is used for cutting, because the diamond wire cutting considers the cutting support area of the cutter, the cut silicon rod has larger volume, and a large amount of silicon rod loss is caused; if the common end face grinding machine which is driven by a belt for a common three-phase asynchronous motor to rotate is adopted for grinding, the grinding wheel is easy to shake during grinding to cause edge and burr collapse of the end face of the silicon rod, the repaired end face of the silicon rod cannot achieve an ideal effect, parallel reciprocating motion is adopted in the grinding of the end face grinding machine, the grinding wheel is abraded too fast in the machining mode, and the machining efficiency is low.
Therefore, a repair device suitable for the end face of the silicon rod is urgently needed.
Disclosure of Invention
The embodiment of the application aims to provide a method and equipment for repairing the end face of a silicon rod, which can solve the problems, improve the quality of the repaired end face of the silicon rod and have high repairing efficiency.
In order to solve the technical problem, the present application is implemented as follows:
in a first aspect, embodiments of the present application provide a method for repairing an end surface of a silicon rod, the method including:
clamping a silicon rod to be repaired on a workpiece clamping table;
moving the first transmission component and the second transmission component, and aligning the silicon rod to be repaired on the workpiece clamping table with the grinding component;
and controlling the first transmission component to drive the grinding component to perform reciprocating motion for preset times along an X axis and controlling the second transmission component to drive the workpiece clamping table to perform reciprocating motion for preset times along a Y axis in cooperation with the movement of the first transmission component, so that the grinding component performs grinding for the preset times on the end surface of the silicon rod to be repaired, and the silicon rod with the repaired end surface is obtained.
The first transmission mechanism drives the grinding assembly to reciprocate along the X axis, the grinding assembly grinds the end face of the silicon rod to be repaired for multiple times, and the grinding assembly and the workpiece clamping table both reciprocate once every time grinding is carried out. Through the reciprocating motion of the grinding component and the workpiece clamping table which are matched with each other, the grinding component grinds the end face of the silicon rod with repair clamped on the workpiece clamping table for a preset number of times, repair of the end face of the silicon rod to be repaired is achieved, the embodiment of the application processes the silicon rod to be repaired in a scraping and rubbing mode, the occurrence of edge breakage or unevenness of the end face of the silicon rod is reduced, and the beneficial effect of improving the repair quality of the silicon rod is achieved.
In a second aspect, the embodiment of the application provides silicon rod end face repair equipment, which comprises an equipment main body, a grinding assembly, a workpiece clamping table, a first transmission assembly and a second transmission assembly, wherein the equipment main body is movably connected with the grinding assembly through the first transmission assembly;
the workpiece clamping table is movably connected to the equipment main body through the second transmission assembly and used for fixing the silicon rod to be repaired;
the first transmission assembly drives the grinding assembly to move in a translation mode along the X-axis direction, and the second transmission assembly drives the workpiece clamping table to move in a translation mode along the Y-axis direction.
In the embodiment of the application, the first transmission mechanism drives the grinding component to reciprocate along the X axis, the grinding component grinds the end surface of the silicon rod to be repaired for multiple times, and the grinding component and the workpiece clamping table both reciprocate once every time grinding is performed. Through the reciprocating motion of many times that mutually supports between grinding assembly and the work piece centre gripping platform for grinding of preset number of times is carried out to the terminal surface of taking the repair silicon rod of centre gripping on the work piece centre gripping platform to grinding assembly, realizes treating the repair of repairing the silicon rod terminal surface, and the embodiment of this application treats repairing the silicon rod and processes through cutting to pieces the mode of rubbing, reduces the emergence of the edge breakage or the unevenness situation appearing in the silicon rod terminal surface, has the beneficial effect of improvement silicon rod repair quality.
Drawings
FIG. 1 is a schematic structural diagram of a silicon rod end face repairing device in an embodiment of the application;
FIG. 2 is a flow chart of a method for repairing an end surface of a silicon rod in an embodiment of the present application;
FIG. 3 is a schematic structural diagram of the silicon rod end face repairing apparatus according to the embodiment after the first shell and the second shell are hidden;
FIG. 4 is a front view of the silicon rod end face repairing apparatus according to the embodiment of the present application after the first casing and the second casing are hidden;
FIG. 5 is a side view of the silicon rod end face repair apparatus according to the example of the present application after the first and second housings are hidden;
FIG. 6 is a schematic structural diagram of the silicon rod end face repairing device in the embodiment after the grinding motor, the axle box and the grinding wheel are connected;
FIG. 7 is a schematic view showing the structure of a grinding unit in an apparatus for repairing an end face of a silicon rod according to an embodiment of the present invention;
FIG. 8 is a schematic view showing the use of the grinding unit in the apparatus for repairing the end face of the silicon rod according to the example of the present application;
fig. 9 is a schematic structural view of an apparatus body in the silicon rod end face repairing apparatus in the example of the present application.
Description of reference numerals:
10. an apparatus main body; 11. a drain hole; 12. a water outlet; 20. a grinding assembly; 21. a grinding head supporting seat; 22. grinding the motor; 23. an axle box; 24. grinding a grinding wheel; 30. a first transmission assembly; 31. a first drive motor; 32. a first organ cover; 33. a first cover plate; 40. a workpiece clamping table; 41. a workpiece machining seat; 42. a clamping structure; 50. a second transmission assembly; 51. a second drive motor; 52. a second organ guard; 53. a second cover plate; 60. a first housing; 61. an observation window; 70. a second housing; 71. processing a safety door; 80. and (5) the silicon rod is to be repaired.
Detailed Description
The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are some, but not all, embodiments of the present application. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
The terms first, second and the like in the description and in the claims of the present application are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It will be appreciated that the data so used may be interchanged under appropriate circumstances such that embodiments of the application may be practiced in sequences other than those illustrated or described herein, and that the terms "first," "second," and the like are generally used herein in a generic sense and do not limit the number of terms, e.g., the first term can be one or more than one. In addition, "and/or" in the specification and claims means at least one of connected objects, a character "/" generally means that a preceding and succeeding related objects are in an "or" relationship.
The silicon rod end face repair equipment provided by the embodiment of the application is described in detail through specific embodiments and application scenarios thereof with reference to the accompanying drawings.
Referring to fig. 2, the embodiment of the present application provides a flow chart of steps of a method for repairing an end surface of a silicon rod. In the present embodiment, the moving direction of the polishing assembly 20 is defined as the X-axis, and the moving direction of the workpiece holding stage 40 is defined as the Y-axis. The grinding assembly 20 moves along the X-axis and the workpiece holding stage 40 moves along the Y-axis, which are perpendicular to each other.
Step 101: clamping the silicon rod 80 to be repaired on the workpiece clamping table 40;
in the repair process of the end face of the silicon rod, the workpiece clamping table 40 is arranged for fixing the silicon rod to be processed in the processing process. The silicon rod 80 to be repaired is placed on the workpiece holding table 40 so that the end surface to be repaired of the silicon rod 80 to be repaired is closely attached to the grinding unit 20.
It should be noted that, the silicon rod 80 to be repaired is placed on the nylon blocks arranged at the bottom and the side of the workpiece holding table 40, and the silicon rod 80 to be repaired is placed on the nylon blocks without scratching; if the end surface of the silicon rod 80 to be repaired is processed into an inclined surface, the nylon block can be adjusted to be level and smooth.
Step 102: moving the first transmission assembly 30 and the second transmission assembly 50 to align the silicon rod 80 to be repaired on the workpiece clamping table 40 with the grinding assembly 20;
before the grinding function is started, the silicon rod 80 to be repaired needs to be subjected to tool setting, that is, the X axis and the Y axis are restored to the initial positions, and then, the alignment of the silicon rod 80 to be repaired and the grinding assembly 20 is realized through the tool setting operation. After the tool setting operation is completed, the X axis and the Y axis move to the designated coordinates, and then the next step of instruction is suspended.
It should be noted that in the embodiment of the present application, a trial cutting method may be adopted to set a tool, and a tool setting gauge may also be adopted to automatically set a tool; the tool setting can be performed manually, and a "one-key tool setting" function on the equipment can also be adopted, which is not limited in this embodiment.
Step 103: and controlling the first transmission component 30 to drive the grinding component 20 to perform reciprocating motion for a preset number of times along the X axis, and controlling the second transmission component 50 to drive the workpiece clamping table 40 to perform reciprocating motion for a preset number of times along the Y axis in cooperation with the movement of the first transmission component 30, so that the grinding component 20 grinds the end surface of the silicon rod 80 to be repaired for a preset number of times, and the silicon rod with the repaired end surface is obtained.
The first transmission mechanism drives the grinding assembly 20 to reciprocate along the X axis, the grinding assembly 20 grinds the end face of the silicon rod 80 to be repaired for multiple times, and the grinding assembly 20 and the workpiece clamping table 40 both reciprocate once every time grinding is carried out. Through the reciprocating motion of the grinding component 20 and the workpiece clamping table 40 which are mutually matched, the grinding component 20 grinds the end face of the silicon rod with repair clamped on the workpiece clamping table 40 for a preset number of times, and repair of the end face of the silicon rod 80 to be repaired is achieved.
Optionally, in this embodiment of the present application, the controlling the first transmission assembly 30 to drive the grinding assembly 20 to perform a reciprocating motion for a preset number of times along the X axis includes:
the grinding component 20 makes reciprocating translational motion along the X-axis direction, and the speed of the grinding component 20 when approaching the end face of the silicon rod 80 to be repaired is less than the speed of the grinding component 20 when departing from the end face of the silicon rod 80 to be repaired;
the speed range of the grinding component 20 close to the end face of the silicon rod 80 to be repaired is 50/s-100 mm/s;
the speed range of the grinding component 20 when the end face of the silicon rod 80 to be repaired is 250/s-400 mm/s.
In the embodiment of the present application, the polishing assembly 20 is driven by the first transmission assembly 30 to reciprocate along X for a predetermined number of times, and the movement speed of the polishing assembly 20 is different during the reciprocating movement. When the grinding assembly 20 is fed (for grinding the silicon rod 80 to be repaired), the movement speed range of the grinding assembly 20 is 50/s-100 mm/s; when the grinding assembly 20 is withdrawn (without grinding the silicon rod 80 to be repaired), the speed of the grinding assembly 20 ranges from 250/s to 400 mm/s. By controlling the feed and retraction speeds of the grinding assembly 20, the movement modes of the grinding assembly 20, namely low-speed feed and high-speed retraction, are realized. The low-speed running speed is adopted during processing of the grinding assembly 20, so that the end face processing precision is improved, and the problem of edge breakage caused by collision of the silicon rod to be processed is avoided. The high operating speed tool retracting is adopted when the grinding assembly 20 is not machined, so that the machining time is shortened, and the machining efficiency is improved. The embodiment of this application has the beneficial effect that reduces the emery wheel loss, promotes machining efficiency.
When the feed speed is lower than 50mm/s, the actual machining effect is not changed so much, and the machining efficiency is also reduced, whereas when the feed speed is higher than 100mm/s, the machining effect is reduced but the efficiency is improved. When the withdrawal speed is lower than 250mm/s, the processing efficiency is reduced, and the maximum withdrawal speed is set to 400mm/s for processing safety.
Optionally, in this embodiment of the application, the controlling the second transmission assembly 50 to drive the workpiece holding stage 40 to perform reciprocating motion for a preset number of times along the Y axis includes:
when the silicon rod 80 to be repaired moves in the direction close to the grinding component 20 along the Y-axis direction, the grinding component 20 grinds the end surface of the silicon rod 80 to be repaired;
when the silicon rod 80 to be repaired moves along the direction of the Y axis away from the grinding component 20, the end surface of the silicon rod 80 to be repaired deviates from the grinding component 20;
when the workpiece clamping table 40 moves along the Y axis direction to approach the X axis direction, the grinding assembly 20 is driven by the first transmission mechanism to move along the X axis direction to approach the end surface of the silicon rod 80 to be repaired;
when the workpiece clamping table 40 moves along the Y axis away from the X axis, the grinding assembly 20 is driven by the first transmission mechanism to move along the X axis away from the end surface of the silicon rod 80 to be repaired.
In the embodiment of the present application, the silicon rod 80 to be repaired, which is disposed on the workpiece holding table 40, is driven by the second transmission assembly 50 to move along the Y-axis direction, and when the silicon rod 80 to be repaired moves along the Y-axis direction toward the direction close to the grinding assembly 20, the grinding assembly 20 is driven by the first transmission assembly 30 to move and grind the end surface of the silicon rod 80 to be repaired; when the silicon rod 80 to be repaired moves away from the grinding assembly 20 along the Y-axis direction, the end surface of the silicon rod 80 to be repaired deviates from the grinding assembly 20, and the grinding assembly 20 does not grind the end surface of the silicon rod 80 to be repaired. In the embodiment of the present application, the grinding unit 20 with no feed amount when retracting does not grind the end surface of the silicon rod 80 to be repaired.
Optionally, in an embodiment of the present application, the grinding component 20 grinds the end surface of the silicon rod 80 to be repaired a preset number of times to obtain a repaired end surface silicon rod, including:
the grinding wheel 24 arranged on the grinding component 20 is driven by the axle box 23 to rotate, and the grinding surface of the grinding wheel 24 is in rotational abutment with the end surface of the silicon rod 80 to be repaired, so that the grinding wheel 24 grinds the end surface of the silicon rod 80 to be repaired;
determining the preset times according to the A ═ a/b;
wherein A is a preset number of times, a is used for representing the grinding total amount of the silicon rod 80 to be repaired, and b is used for representing the unit feeding amount.
In the embodiments of the present application, the calculation formula is illustrated by way of example. For example, if the total grinding amount of the silicon rod to be processed is 2mm, the unit feed amount is set to 0.25mm, and the total number of knives is 2 mm/0.25 to 8 (knives). The first knife motor after knife setting does not feed, the grinding amount can reach 0.5mm at most, namely, the silicon rod end face can be ground by 0.5mm through one reciprocating motion of the grinding wheel, the knife is not ground when being returned, the Y-axis is fed each time and moves forwards by 0.25mm relative to the position, the X-axis moves from left to right at a slow speed, and the Y-axis moves by 0.25mm plus 5mm relative to the position in the opposite direction when being returned, so that a gap is reserved between the position and the position, which enable the X-axis to return at a high speed; thus, the reciprocating motion is timed 8 times and stopped, and all motors return to the initial position.
The main steps are as follows:
the first step is as follows: feeding, wherein the Y axis advances by 0.25mm, and the X axis moves from left to right;
the second step is that: returning the cutter, wherein the Y axis returns by 5mm, and the X axis moves from right to left;
the third step: feeding, wherein the Y axis advances by 5+0.5mm, and the X axis moves from left to right;
the fourth step: returning the cutter, wherein the Y axis returns by 5mm, and the X axis moves from right to left;
the fifth step: feeding, wherein the Y axis advances by 5+0.75mm, and the X axis moves from left to right;
and a sixth step: returning the cutter, wherein the Y axis returns by 5mm, and the X axis moves from right to left;
……；
the fifteenth step: the Y axis advances by 5+2mm, and the X axis moves from left to right;
sixteenth, step: and returning the cutter, wherein the X axis moves from right to left.
And finally, returning the tool at a very low speed to see whether uneven parts exist or not, wherein the main purpose of the step is to enable the grinding wheel to feed at different positions, and solve the problem that burrs on the end surface of the silicon rod and rough marks on the grinding wheel possibly caused by previous feeding or reciprocating motion feeding. The embodiment of this application has the accurate volume of calculating the silicon rod 80 of treating to reprocess and needing the grinding, even appear undulant beneficial effect that also can not produce bad phenomenon to the silicon rod when the emery wheel moves back the sword.
The grinding amount obtained by long-time operation is in an optimal range of 0.25-0.35mm, the grinding efficiency is improved by 10% when the grinding amount is more than 0.35mm, but the end face of the produced silicon rod is easy to have ripples (within the silicon rod compliance standard); when the grinding quantity is less than 0.25mm, the grinding efficiency is reduced by 10 percent, and the quality of the produced silicon rod is not different from that of the silicon rod with the thickness of 0.35 mm.
It should be noted that, in order to ensure safety during the processing and prevent the silicon rod 80 to be repaired from being damaged due to collision between the silicon rod 80 to be repaired and the grinding assembly 20, the amount of the knife return in the Y-axis needs to be much larger than the amount of the feed, and the specific setting value is determined according to the actual processing conditions, which is not limited in this embodiment.
Optionally, in the embodiment of the present application, an included angle between the grinding surface and the end surface of the silicon rod 80 to be repaired ranges from 1 ° to 3 °.
In the embodiment of the present application, the base of the grinding wheel 24 is inclined based on the Y axis, so that the grinding surface and the end surface of the silicon rod 80 to be repaired have a certain included angle therebetween. The workpiece holding table 40 is stationary. The grinding surface is inclined by 1-3 degrees relative to the end surface of the silicon rod 80 to be repaired, the grinding head part grinds the end surface of the silicon rod on the workpiece clamping table 40 in a cutting and rubbing mode, the abrasion wheel loss is reduced, and the quality processing efficiency of the finished silicon rod is improved.
Referring to fig. 1 to 8, embodiments of the present application provide a silicon rod end surface repair apparatus,
the grinding device comprises a device body 10, a grinding assembly 20, a workpiece clamping table 40, a first transmission assembly 30 and a second transmission assembly 50, wherein the device body 10 and the grinding assembly 20 are movably connected through the first transmission assembly 30;
the workpiece clamping table 40 is movably connected to the apparatus main body 10 through the second transmission assembly 50, and the workpiece clamping table 40 is used for fixing the silicon rod 80 to be repaired;
the first transmission assembly 30 drives the grinding assembly 20 to move in a translational manner along the X-axis direction, and the second transmission assembly 50 drives the workpiece clamping table 40 to move in a translational manner along the Y-axis direction. In the embodiment of the present application, the apparatus body 10 is configured to carry and mount other components of the silicon rod end face repair apparatus. The grinding assembly 20 is configured to grind the silicon rod 80 to be repaired, and the grinding assembly 20 is driven by the first transmission assembly 30 to move relative to the apparatus main body 10. The first transmission assembly 30 drives the grinding assembly 20 to move in a translational manner along the X-axis direction, and the second transmission assembly 50 drives the workpiece clamping table 40 to move in a translational manner along the Y-axis direction. Under the matching motion of the X axis and the Y axis, the grinding assembly 20 realizes the grinding of the end surface of the silicon rod 80 to be repaired.
It should be noted that, a lot of oil stain steam can appear at the in-process of grinding, oil stain steam can cause corrosion or pollution to first drive assembly 30, and then cause the transmission precision of first drive assembly 30 to reduce and directly scrap even, wash port 11 set up can be discharged the inside oil stain steam that produces when the equipment moves, and then protect first drive assembly 30, improve first drive assembly 30's life, reduce and avoid first drive assembly 30's corrosion or pollution even, and then reduce the change frequency of silicon rod terminal surface reprocess equipment internals, reduce the reprocess cost of silicon rod.
It should be noted that the drainage hole 11 may be a countersunk conical hole, which has a better drainage effect and can improve the drainage efficiency of oil stain water vapor. Can set up the drainage chamber in 11 below of wash port as required, the setting of drainage chamber can be collected the inside oil stain steam that produces when equipment operation, can set up the bottom in drainage chamber as required to the slope to set up outlet 12 in the lowest in drainage chamber, outlet 12 is used for the oil stain steam that the drainage intracavity was collected of discharging.
Optionally, in an embodiment of the present application, the first transmission assembly 30 includes a first driving motor 31, a first speed reducer and a first ball screw mechanism, the first driving motor 31 is connected to the first speed reducer, the first speed reducer is connected to the first ball screw mechanism, and the first ball screw mechanism is connected to the grinding assembly 20;
the second transmission assembly 50 comprises a second driving motor 51, a second speed reducer and a second ball screw mechanism, the second driving motor 51 is connected with the second speed reducer, the second speed reducer is connected with the second ball screw mechanism, and the second ball screw mechanism is connected with the workpiece clamping table 40.
In the embodiment of the present application, the first driving motor 31 is configured to drive the first ball screw mechanism, and then drive the grinding assembly 20 to move, because the first transmission assembly 30 drives the grinding assembly 20 to move in a translational manner along the X-axis direction, specifically, the first ball screw mechanism is driven to move in a translational manner, so that the grinding assembly 20 can change a grinding area in the X-axis direction, and the arrangement of the speed reducer can make the grinding assembly 20 move in a more stable and controllable manner, and thus the grinding assembly 20 is not easy to cause edge breakage or burr at the end of the silicon rod 80 to be repaired; the second driving motor 51 is used for driving the second ball screw mechanism to further drive the workpiece clamping table 40 to move, the second transmission assembly 50 drives the workpiece clamping table 40 to move in a translation mode along the Y-axis direction, and particularly the translation is achieved through transmission of the second ball screw mechanism, so that the workpiece clamping table 40 can change a ground area of the silicon rod 80 to be repaired in the Y-axis direction, the second speed reducer is arranged to enable the translation of the workpiece clamping table 40 to be more stable and controllable, and the grinding assembly 20 is further enabled not to easily cause edge breakage or burr at the end portion of the silicon rod 80 to be repaired; through the matching arrangement of the first transmission component and the second transmission component 50, the grinding component 20 can grind the plane range of the end part of the silicon rod 80 to be repaired, the working area of the grinding component 20 is larger, and each area of the end surface of the silicon rod can be ground.
The reduction ratio of the first reduction gear and the second reduction gear may be set to 1:10, or other reduction ratios may be set as necessary. The axle box 23 can be arranged on the first transmission component 30, the second transmission component 50 or the grinding component 20 according to requirements, and the axle box 23 can be arranged to be of a flexible buffer type, so that the end face of the corresponding silicon rod is less prone to edge breakage and burrs when emergency brake braking occurs to the equipment.
When the X-axis moves, the power drives the first driving motor 31 to drive the first speed reducer and then the axle box 23 and then the X-axis lead screw, so as to drive the grinding assembly 20 (specifically, the grinding head support seat 21 in the grinding assembly 20) to move. The Y-axis motion is also the same; x, Y shaft can be controlled by servo motor in absolute position, each shaft moving travel is equipped with front, middle and back three proximity switches, namely front limit sensor, origin switch and back limit sensor; when the grinding head supporting seat 21 or the workpiece machining seat 41 moves to the detection range of the limit switch, the brake is immediately stopped, and the HMI displays the current alarm information. The original point switch is that after each power failure, if the current encoder value is inconsistent with the actual position, the motor can be manually turned by JOG to rotate forwards and backwards until the original point switch detects that the current position can be set as the original point; each actuation of the shaft moves with the current origin as a reference point.
Optionally, in the embodiment of the present application, the grinding assembly 20 includes a grinding head support seat 21, a grinding motor 22, an axle box 23, and a grinding wheel 24, the grinding head support seat 21 is connected to the first transmission assembly 30, the grinding motor 22 is fixedly connected to the grinding support seat, and the grinding wheel 24 is connected to the grinding motor 22 through the axle box 23;
the workpiece clamping table 40 comprises a workpiece processing seat 41 and a clamping structure 42, the workpiece processing seat 41 is connected with the second transmission assembly 50, the clamping structure 42 is installed on the workpiece processing seat 41, and the clamping structure 42 is used for clamping the silicon rod 80 to be repaired.
In this application embodiment, bistrique supporting seat 21 and work piece processing seat 41 are the core design part, can set up as required into special "L" shape and the square backplate of center fretwork putting into in order to keep apart the water and the silica fume that upper portion produced. The bottom installs one deck organ protection casing additional, and the backplate is motionless when the motor drags the supporting seat motion, and the organ protection casing follows the motion. The bottom and the side edges of the workpiece processing seat 41 can be additionally provided with nylon blocks with the thickness of 10mm according to requirements, and the silicon rod 80 to be repaired can not be scratched when being placed on the nylon blocks; if the end surface of the silicon rod 80 to be repaired is processed into an inclined surface, the nylon block can be adjusted to be level and smooth. The grinding head supporting seat 21 and the workpiece processing seat 41 can be composed of two plates which are in a convex-concave seamless fit, and a buffer nylon cushion is additionally arranged in the middle of the two plates as required.
It should be noted that the grinding head support seat 21 is configured to support the grinding motor 22, and since the grinding motor 22 is fixedly connected to the grinding support seat, after the grinding head support seat 21 is connected to the first transmission assembly 3030, the grinding motor 22 can be driven to translate along the X-axis direction, so as to drive the grinding wheel 24 on the grinding motor 22 to translate along the X-axis direction. The axle box 23 is arranged to connect the grinding wheel 24 with the grinding motor 22, the grinding wheel 24 can be driven to rotate by the grinding motor 22, so that the silicon rod 80 to be repaired is ground, and the axle box 23 can be arranged to be of a flexible buffer type, so that edge breakage and burrs of the end face of the corresponding silicon rod are less likely to be caused when emergency braking occurs to the equipment; the workpiece processing seat 41 in the workpiece clamping table 40 is used for bearing the silicon rod 80 to be repaired, and the clamping structure 42 is used for clamping and fixing the silicon rod 80 to be repaired. After the workpiece processing seat 41 is connected with the second transmission assembly 50 and the clamping structure 42 is installed on the workpiece processing seat 41, the silicon rod 80 to be repaired can be driven by the second transmission assembly 50 to translate along the Y-axis direction; through the matching arrangement of the first transmission component and the second transmission component 50, the grinding component 20 can grind the plane range of the end part of the silicon rod 80 to be repaired, the working area of the grinding component 20 is larger, and each area of the end surface of the silicon rod can be ground.
It should be noted that, in order to adopt the clamping structure 42 with a smaller size, the feeding shaft of the device can be adjusted, the two ends are isolated by the organ protective covers, and the whole weight is less than 30 kg; the corresponding second driving motor 51 can be dragged by a low-power motor, is convenient to disassemble and assemble during maintenance, and saves energy and cost.
In the application, a grinding wheel 24 grinding wheel reference surface inclines by 1-3 degrees relative to the end face of a workpiece, so that the grinding wheel loss is reduced, the quality of a silicon rod finished product and the processing efficiency are improved, if a grinding head and the workpiece are 90 degrees, and the grinding wheel is parallel to the end face of the silicon rod, grinding is carried out in a pushing mode, but only the front half part of the grinding wheel is used during actual grinding, if the rear half part of the grinding wheel swings in the operation, the phenomena of edge breakage and frizziness of the silicon rod can be caused, and the grinding wheel loss is increased invisibly; the grinding speed cannot be too high, otherwise, the motor is easy to overload, and in addition, if the end surface of the silicon rod is subjected to parallel grinding, the cutting edge is easy to increase suddenly and the grinding wheel is easy to collide with the silicon rod; the grinding wheel and the end face of the workpiece are inclined by 1-3 degrees, so that the contact area of the grinding head and the movement of the workpiece is larger, the grinding mode is not only forward pushing, but the grinding head moves towards one end with a large included angle relative to the silicon rod of the workpiece, certain pressing force exists between the lower end face of the grinding head and the workpiece, the workpiece can be prevented from shaking in feeding, the ground end face is improved, in addition, after the grinding wheel and the end face of the workpiece are inclined, the grinding wheel and the end face of the workpiece can be better combined in a cutting and rubbing mode, and the repaired end face is smoother through the bidirectional action of an X axis and a Y axis.
It should be noted that the workpiece holding table 40 of the present application may be configured in a horizontal manner, and the corresponding grinding assembly 20 may be configured in a longitudinal manner, which may facilitate the operation and increase the range of products that the apparatus can process;
it should be noted that the grinding head portion (the grinding component 20) is an X axis, the workpiece machining seat 41 is a Y axis, the grinding wheel base is inclined by 1 ° to 3 ° based on the Y axis, the workpiece machining seat 41 is stationary with reference, and the grinding head portion grinds the end face of the silicon rod on the workpiece machining seat 41 in a rubbing manner. In the X-axis reciprocating motion process, the Y-axis rapidly retracts by 5mm after feeding and grinding once, and advances by the distance of retraction when feeding next time; the X-axis runs at a low speed when the Y-axis is fed, and runs at a high speed when the Y-axis is withdrawn (the feeding speed is 50-100mm/s, the effect of products less than 50mm/s is not changed greatly but the efficiency is reduced, the effect of products more than 100mm/s is reduced but the efficiency is improved; the no-load running speed of each axis is less than 250mm/s when the withdrawal speed is 250mm/s-400mm/s, the efficiency is reduced, and the maximum withdrawal speed is set to 400mm/s for safety when the maximum operation speed of an axis motor is 500 mm/s); the grinding wheel loss is reduced, and the grinding efficiency is improved.
The operation steps of the silicon rod end face repair equipment provided by the application can comprise tool setting, tool setting confirmation, automatic grinding, tool withdrawal after grinding, waiting for manual tool setting again, and repeating the grinding process after tool setting again until repair is completed.
Optionally, in an embodiment of the present application, a grinding wheel motor mounting plate is disposed on the grinding motor 22, the grinding motor 22 is connected to the grinding head support seat 21 through the grinding wheel motor mounting plate, the grinding wheel motor mounting plate is hollow between the grinding head support seat 21, a plurality of round holes are disposed on the grinding head support seat 21, and each round hole is filled with a steel spring.
In this application embodiment, the setting of emery wheel motor mounting panel is used for the motor main part, behind the fretwork and set up steel spring between emery wheel motor mounting panel and the bistrique supporting seat 21, can cushion effectively that the emery wheel motor starts the vibration that produces and guarantee emery wheel and silicon rod terminal surface shake in predetermineeing the within range, for example shake and reduce to within 2 silks (1 silk ═ 0.01 mm).
It should be noted that, a plurality of circular holes may be provided, and the specific number of circular holes may be determined according to actual use. The steel springs are filled through the round holes, and the steel springs and the corresponding round holes are matched to buffer vibration generated by starting of the grinding wheel motor, so that the end face of the grinding wheel and the end face of the silicon rod can shake within a certain range. The size of the circular hole can also be determined according to actual use.
Further, a damping nylon block can be additionally arranged between the grinding wheel motor mounting plate and the grinding head supporting seat 21 according to requirements so as to further reduce shaking generated by the grinding wheel motor. The grinding wheel motor can be changed into a mode that a transmission shaft is driven by a traditional belt to be integrated with a flange plate and the transmission shaft as required, an axle box 23 is additionally arranged outside, and the motor drives the axle box 23 to be transmitted to a flange plate grinding wheel through the axle box 23; the processing precision and stability of the equipment are improved.
It should be noted that the frequency converter can be added to the equipment of the application according to the needs, the belt axle box 23 in the existing equipment is eliminated, and the grinding wheel motor can adopt a novel long-axis type to be directly connected with the grinding wheel of the grinding head. The rotating speed of the grinding wheel motor can reach 5000 revolutions as required, and the problems of shaking and burrs are further improved.
Optionally, in the embodiment of the present application, the clamping structure 42 includes at least one air cylinder, and the at least one air cylinder is matched to clamp the silicon rod 80 to be repaired. In the embodiment of the present application, the air cylinder is configured to hold the silicon rod 80 to be repaired.
It should be noted that two air cylinders may be further provided, and the two air cylinders are matched to clamp the silicon rod 80 to be repaired. The arrangement of the two cylinders can enable the clamping of the clamping structure 42 to be more stable and controllable, and the secondary positioning of the silicon rod 80 to be repaired can be realized by the extension of different lengths of the two different cylinders, so that the reference surface of the clamped silicon rod 80 to be repaired can be adjusted. The transverse face of the clamping structure 42 can be specifically facing the operator as required, so that the reference surface can be observed and adjusted more conveniently, the processing range of the silicon rod 80 to be repaired can be larger through the two cylinders, and for example, the maximum processing range can be adjusted to 700mm as required.
It should be noted that the two cylinders are independent of each other.
In the embodiment of the present application, an organ shield is further disposed on the first transmission assembly 30, and the organ shield includes a first organ shield 32 and a second organ shield 52, where the first organ shield 32 is used for shielding the first transmission assembly 30, and the second organ shield 52 is used for shielding the second transmission assembly 50. The cover plates also include two cover plates, namely a first cover plate 33 and a second cover plate 53, wherein the first cover plate 33 is used for protecting the first transmission assembly 30, and the second cover plate 53 is used for protecting the second transmission assembly 50. The transmission assembly includes the first transmission assembly 30 and the second transmission assembly 50 described above. Specifically, the organ protective cover can protect the corresponding transmission assembly for the first time, the cover plate can protect the corresponding transmission assembly for the second time, and the transmission assembly can be safer and more reliable through two layers of protection.
It should be noted that the cover plate may be a stainless steel cover plate, and the device body 10 may be provided with a detachable hole at a position corresponding to the organ protection cover and the cover plate as required, so as to facilitate maintenance.
In the embodiment of the subject application, the first housing 60 is configured to protect the abrasive assembly 20 and the second housing 70 is configured to protect the workpiece holding stage 40. By providing the first housing 60 and the second housing 70 separately, maintenance and replacement of the grinding wheel can be facilitated. After the grinding wheel chamber is communicated with the processing chamber, the grinding component 20 and the workpiece processing component can be matched under the protection of the protective cover, so that the silicon rod 80 to be repaired is repaired and ground.
It should be noted that hinge doors may be left on the side and the rear side (the front side is the operating direction of the worker) of the first housing 60, and waterproof measures are taken, so that the grinding wheel chamber can be conveniently opened through the hinge doors, and the grinding assembly 20 can be maintained or replaced, thereby saving a lot of time during maintenance.
In this application embodiment, the setting of observation window 61 can make things convenient for the workman to observe grinding unit 20 in the grinding wheel chamber, can know grinding unit 20's behavior more carefully, can in time carry out emergency stop when grinding unit 20 breaks down. The viewing window 61 may be configured in an openable configuration as desired, and maintenance of the grinding assembly 20 may be performed through the viewing window 61. The silicon rod 80 to be repaired can be conveniently arranged on the workpiece clamping table 40 by being processed into the safety door, and after the processing position safety door 71 is driven by the hydraulic rod, the safety door can be more conveniently opened and closed and has higher reliability.
According to the silicon rod end face repair equipment, the CANopen communication can be carried out by adopting a PLC (programmable logic controller), the servo motors are used for controlling the movement of each shaft respectively, the processing data can be collected by communicating with a field workshop data network, and the precision is higher. The CANopen is a high-level communication protocol structured on a Control Area Network (CAN), includes a communication sub-protocol and a device sub-protocol, is often used in an embedded system, and is also a field bus commonly used for industrial control.
Before starting the grinding function, manual tool setting is needed, namely, all shafts are restored to the initial positions; clicking a 'one-key tool setting' function on an HMI (HMI is an abbreviation of a Human Machine Interface, also called a Human-Machine Interface), and pausing to wait for a next command after the X-axis and the Y-axis move to specified coordinates.
It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other like elements in a process, method, article, or apparatus that comprises the element. Further, it should be noted that the scope of the methods and apparatus of the embodiments of the present application is not limited to performing the functions in the order illustrated or discussed, but may include performing the functions in a substantially simultaneous manner or in a reverse order based on the functions involved, e.g., the methods described may be performed in an order different than that described, and various steps may be added, omitted, or combined. In addition, features described with reference to certain examples may be combined in other examples.
While the present embodiments have been described with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise embodiments described above, which are meant to be illustrative and not restrictive, and that various changes may be made therein by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.
Claims (10)
1. A method for repairing an end face of a silicon rod, the method comprising:
clamping a silicon rod to be repaired on a workpiece clamping table;
moving the first transmission component and the second transmission component, and aligning the silicon rod to be repaired on the workpiece clamping table with the grinding component;
and controlling the first transmission component to drive the grinding component to perform reciprocating motion for a preset number of times along an X axis and controlling the second transmission component to drive the workpiece clamping table to perform reciprocating motion for a preset number of times along a Y axis in cooperation with the movement of the first transmission component, so that the grinding component grinds the end surface of the silicon rod to be repaired for a preset number of times to obtain the silicon rod with the repaired end surface.
2. The method for repairing the end surface of the silicon rod according to claim 1, wherein the controlling the first transmission assembly to drive the grinding assembly to perform reciprocating motion for a preset number of times along an X axis comprises:
the grinding assembly does reciprocating translation motion along the X-axis direction, and the speed of the grinding assembly when the grinding assembly is close to the end face of the silicon rod to be repaired is less than the speed of the grinding assembly when the grinding assembly departs from the end face of the silicon rod to be repaired;
the speed range of the grinding assembly close to the end face of the silicon rod to be repaired is 50/s-100 mm/s;
the speed of the grinding assembly when the grinding assembly departs from the end face of the silicon rod to be repaired ranges from 250/s to 400 mm/s.
3. The method for repairing the end surface of the silicon rod according to claim 2, wherein the controlling the second transmission assembly to drive the workpiece holding table to reciprocate along the Y-axis for a preset number of times comprises:
when the silicon rod to be repaired moves towards the direction close to the grinding component along the Y-axis direction, the grinding component grinds the end face of the silicon rod to be repaired;
when the silicon rod to be repaired moves along the Y-axis direction to the direction away from the grinding component, the end face of the silicon rod to be repaired deviates from the grinding component;
when the workpiece clamping table moves along the Y axis direction and close to the X axis direction, the grinding assembly moves along the X axis direction and close to the end face of the silicon rod to be repaired under the driving of the first transmission mechanism;
when the workpiece clamping table moves along the Y axis in the direction deviating from the X axis, the grinding assembly moves along the X axis in the direction deviating from the end face of the silicon rod to be repaired under the driving of the first transmission mechanism.
4. The method for repairing the end surface of the silicon rod according to claim 3, wherein the grinding of the end surface of the silicon rod to be repaired by the grinding component for a preset number of times to obtain the repaired end surface silicon rod comprises:
a grinding wheel arranged on the grinding component is driven by the axle box to rotate, and the grinding surface of the grinding wheel is in rotary butt joint with the end surface of the silicon rod to be repaired, so that the grinding wheel grinds the end surface of the silicon rod to be repaired;
determining the preset times according to the A ═ a/b;
wherein A is a preset number of times, a is used for representing the grinding total amount of the silicon rod to be repaired, and b is used for representing the unit feeding amount.
5. The silicon rod end surface repair apparatus as set forth in claim 4, wherein an included angle between the grinding surface and the end surface of the silicon rod to be repaired ranges from 1 ° to 3 °.
6. The silicon rod end face repairing equipment is characterized by comprising an equipment main body, a grinding assembly, a workpiece clamping table, a first transmission assembly and a second transmission assembly, wherein the equipment main body is movably connected with the grinding assembly through the first transmission assembly;
the workpiece clamping table is movably connected to the equipment main body through the second transmission assembly and used for fixing the silicon rod to be repaired;
the first transmission assembly drives the grinding assembly to move in a translation mode along the X-axis direction, and the second transmission assembly drives the workpiece clamping table to move in a translation mode along the Y-axis direction.
7. The silicon rod end face rework apparatus according to claim 6, wherein the first transmission assembly comprises a first drive motor, a first speed reducer, and a first ball screw mechanism, the first drive motor being connected to the first speed reducer, the first speed reducer being connected to the first ball screw mechanism, the first ball screw mechanism being connected to the grinding assembly;
the second transmission assembly comprises a second driving motor, a second speed reducer and a second ball screw mechanism, the second driving motor is connected with the second speed reducer, the second speed reducer is connected with the second ball screw mechanism, and the second ball screw mechanism is connected with the workpiece clamping table.
8. The silicon rod end face reworking apparatus according to claim 7, wherein the grinding assembly comprises a grinding head support, a grinding motor, an axle box and a grinding wheel, the grinding head support is connected to the first transmission assembly, the grinding motor is fixedly connected to the grinding support, and the grinding wheel is connected to the grinding motor through the axle box;
the workpiece clamping table comprises a workpiece processing seat and a clamping structure, the workpiece processing seat is connected with the second transmission assembly, the clamping structure is installed on the workpiece processing seat, and the clamping structure is used for clamping the silicon rod to be repaired.
9. The silicon rod end surface repairing apparatus according to claim 8, wherein a grinding wheel motor mounting plate is arranged on the grinding motor, the grinding motor is connected with the grinding head support seat through the grinding wheel motor mounting plate, the grinding wheel motor mounting plate and the grinding head support seat are hollow, a plurality of round holes are formed in the grinding head support seat, and each round hole is filled with a steel spring.
10. The silicon rod end face repair apparatus as set forth in claim 9, wherein the clamping structure comprises at least one air cylinder, at least one air cylinder cooperating to clamp the silicon rod to be repaired.
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| CN202111631136.9A CN114473670A (en) | 2021-12-27 | 2021-12-27 | Silicon rod end face repairing method and device |
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Application publication date: 20220513 |