CN111191743A - Fluid filling and extracting system and method - Google Patents

Fluid filling and extracting system and method Download PDF

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Publication number
CN111191743A
CN111191743A CN201811353177.4A CN201811353177A CN111191743A CN 111191743 A CN111191743 A CN 111191743A CN 201811353177 A CN201811353177 A CN 201811353177A CN 111191743 A CN111191743 A CN 111191743A
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China
Prior art keywords
information carrying
carrying unit
fluid
unit
electronic device
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CN201811353177.4A
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Chinese (zh)
Inventor
杨元凯
熊天林
林清海
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Yuchen Systems Technology Co ltd
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Yuchen Systems Technology Co ltd
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Priority to CN201811353177.4A priority Critical patent/CN111191743A/en
Publication of CN111191743A publication Critical patent/CN111191743A/en
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    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06KGRAPHICAL DATA READING; PRESENTATION OF DATA; RECORD CARRIERS; HANDLING RECORD CARRIERS
    • G06K17/00Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations
    • G06K17/0022Methods or arrangements for effecting co-operative working between equipments covered by two or more of main groups G06K1/00 - G06K15/00, e.g. automatic card files incorporating conveying and reading operations arrangements or provisious for transferring data to distant stations, e.g. from a sensing device

Abstract

The present invention provides a fluid filling and extraction system, comprising: the portable electronic device comprises at least one first identity information carrying unit, at least one second identity information carrying unit, at least one material information carrying unit, at least one groove area information carrying unit, at least one containing groove information carrying unit and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the plurality of information carrying units by the reading unit, the central monitoring system at the rear end can allow the operator to perform the fluid filling operation and/or the extraction (recycling) operation after confirming whether the operator has the operation authority to perform the fluid filling operation and/or the extraction (recycling) operation and whether the information of the materials contained in the material container 3 (i.e., the chemical tanker) is correct. In this way, the filling operation, the extraction operation and the related records can be ensured to be carried out under the electronic system management, any paper book record is eliminated, and the related operations can be effectively avoided being abnormally operated by any person or being completed in a mode of not meeting the standard operation program.

Description

Fluid filling and extracting system and method
Technical Field
The present invention relates to the field of semiconductor manufacturing technology, and more particularly, to a fluid filling and pumping system and method, which is used to assist an operator of an integrated circuit manufacturing (IC foundry) to complete the filling, recycling and pumping operations of Chemical containing tanks under the monitoring of a back-end central monitoring system.
Background
The process of semiconductor integrated circuit includes the basic semiconductor processes such as thin film deposition, diffusion, photolithography, ion implantation, etc.; in addition, in the process of manufacturing semiconductor integrated circuits, a large amount of chemicals must be used to meet the requirements of the manufacturing process. Specifically, the manufacture of semiconductor integrated circuits must keep the production flow uninterrupted at all times, and therefore the supply of these chemicals must also be maintained uninterrupted. For this reason, when an ic foundry plans, at least one specific chemical tank is specially planned to be used as a storage tank for storing various large chemicals.
Currently, chemical suppliers use large chemical tank trucks to load various chemicals to be manufactured. It is conceivable that, when the integrated circuit manufacturing plant supplements various chemicals, the chemical tank car is directly driven to the chemical tank plant area, and then the chemicals are supplemented to the designated large-scale chemical storage tank directly, so that the chemical supplementation operation is completed. However, chemicals used in semiconductor processes generally have high-risk properties such as flammability, toxicity, oxidation, corrosiveness, etc., and if an operator carelessness or a system failure occurs during a chemical replenishment operation, there is a high possibility that leakage of chemicals or a chemical reaction between different chemicals occurs, which may cause not only a huge financial loss but also casualties of the operator and environmental pollution.
As is clear from the above description, tank car operations are extremely dangerous to handle safely, and therefore, it is very important for an integrated circuit manufacturer to synchronize the filling and extraction operations of large chemical tanks for electronic purposes. Therefore, the factory management of the integrated circuit manufacturing factory can completely and comprehensively monitor whether the process of filling and extracting the large chemical tank is correct and whether the operator has the related execution authority through the central control system. Accordingly, the present inventors have made extensive studies and studies, and as a result, have developed a fluid filling and pumping system and method according to the present invention
Disclosure of Invention
The primary object of the present invention is to provide a fluid filling and extraction system, comprising: the portable electronic device comprises at least one first identity information carrying unit, at least one second identity information carrying unit, at least one material information carrying unit, at least one groove area information carrying unit, at least one containing groove information carrying unit and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the plurality of information carrying units by the reading unit, the central monitoring system at the rear end can allow the operator to perform the fluid filling operation and/or the extraction (recycling) operation after confirming whether the operator has the operation authority to perform the fluid filling operation and/or the extraction (recycling) operation and whether the information of the materials contained in the material container 3 (i.e., the chemical tanker) is correct. In this way, the filling operation, the extraction operation and the related records can be ensured to be carried out under the electronic system management, any paper book record is eliminated, and the related operations can be effectively avoided being abnormally operated by any person or being completed in a mode of not meeting the standard operation program.
To achieve the above objective, the present inventors provide an embodiment of the fluid filling and pumping system, comprising:
at least one first identity information carrying unit arranged on at least one operator identity card;
the material information carrying unit is arranged on the material container, and the material container contains a specific material;
at least one slot area information carrying unit arranged on the slot area control door;
the at least one accommodating groove information carrying unit is arranged on the at least one fluid accommodating groove, and the at least one fluid accommodating groove is arranged in the at least one fluid accommodating groove area positioned behind the groove area control door; and
at least one portable electronic device, which is provided with a reading unit;
the portable electronic device can determine whether the specific material accommodated by the material container needs to be filled by a filling operation in a manner of reading the material information carrying unit through the reading unit, so that the specific material is filled from the material container to the specific fluid accommodating groove area and the specific fluid accommodating groove;
through the reading unit, the portable electronic device can determine whether the specific material contained in the fluid containing groove needs to perform an extraction operation or not in a mode of reading the groove area information carrying unit and the containing groove information carrying unit;
through the reading unit, the portable electronic device can confirm whether an operator holding the operator identity card has the authority to execute the filling operation and the extraction operation or not in a mode of reading the first identity information carrying unit.
The fluid filling and extraction system further comprises: at least one second identity information carrying unit arranged on at least one personnel identity card of the material container; and at least one tank valve information carrying unit arranged on at least one switching valve unit for switching the fluid input and output of the fluid containing tank.
The fluid filling and extraction system further comprises: at least one valve protection device arranged on the at least one switching valve unit; and a central monitoring system, which is communicated with the portable electronic device through a transceiver, monitors and controls the access control management of the control door of the tank area through a control device, and is used for starting or releasing the starting and releasing of the valve protection device through the control device.
The fluid filling and extracting system may further include a fluid container, wherein the specific material is a chemical fluid, the material container is a chemical tank car, and the fluid container is a chemical container or a chemical waste container.
The fluid filling and extraction system, wherein the first identity information carrying unit, the second identity information carrying unit, the tank valve information carrying unit, the material information carrying unit, the tank zone information carrying unit, and the tank information carrying unit may be any one of: a figure, a character, a letter, a number, a one-dimensional barcode (1 dbracode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.
The fluid filling and extraction system, wherein the portable electronic device may be any one of: a smart phone, personal digital assistant, laptop, tablet computer, smart glasses, or smart watch; the reading unit 51 may be any one of the following: an RFID tag reader, an NFC tag reader, an image identifier, a one-dimensional barcode reader, a two-dimensional barcode reader, a hanxin code reader, a QR code reader, or a matrix barcode reader.
In the fluid filling and extracting system, the reading unit is an image capturing device, and the portable electronic device further has an image recognition unit; by using the reading unit and the image recognition unit in a matching manner, the portable electronic device can complete reading of the first identity information carrying unit, the second identity information carrying unit, the tank valve information carrying unit, the material information carrying unit, the tank area information carrying unit and/or the containing tank information carrying unit.
The fluid filling and extraction system, wherein the plurality of pieces of basic information carried by the material information carrying unit includes: name, batch number, material number, carrier number, expiration date, and serial number, and a Central classification chart (Central classification chart) is inserted between two adjacent basic information.
The fluid filling and extraction system, wherein the chemical fluid may be any one of: a chemical liquid or a chemical gas.
The fluid filling and extraction system, wherein the information separator can be any one of: %, $,/, |, |! @, # &, #, +), -, |, {, },? ", or +.
Drawings
FIG. 1 is an architectural diagram illustrating a first embodiment of a fluid filling and extraction system of the present invention;
FIG. 2 is a perspective view of the portable electronic device;
FIGS. 3A and 3B are front views of the screen of the portable electronic device during a fluid filling operation;
FIGS. 4A and 4B are front views of a screen of the portable electronic device during fluid extraction (recovery) operation;
FIG. 5 is an architectural diagram illustrating a second embodiment of a fluid filling and extraction system of the present invention;
FIGS. 6A and 6B are front views of the screen of the portable electronic device during a fluid filling operation;
FIG. 7 is an architectural diagram illustrating a third embodiment of a fluid filling and extraction system of the present invention; and
fig. 8A and 8B are front views illustrating a screen of the portable electronic device when a fluid extraction (recovery) operation is performed.
Reference numerals:
< present invention >
21 first identity information carrying unit
81 second identity information carrying unit
31 material information carrying unit
41-slot zone information carrying unit
61 container information carrying unit
5 Portable electronic device
CSRC central monitoring system
2 operator identity card
8 transporting personnel identification card
3 Material container
4-groove area control door
6 fluid container
5 Portable electronic device
51 read unit
R transceiver
7 programmable control device
8 electronic stick unit
9 switching valve unit
91 tank valve information carrying unit
< publicly known >
Is free of
Detailed Description
In order to more clearly describe the fluid filling and pumping system and method of the present invention, a preferred embodiment of the present invention will be described in detail below with reference to the accompanying drawings.
The fabrication of semiconductor integrated circuits uses a number of chemicals, typically chemical fluids, including: chemical liquid (or pure liquid) and chemical gas. The general chemical finishing is shown in table (1) below.
Watch (1)
Figure BDA0001865401650000051
The fluid filling and extraction system of the present invention is applied to manage the filling and extraction (recovery) of these chemicals. Specifically, the term "chemical filling" refers to driving a chemical tank truck to a designated chemical tank plant area and replenishing chemicals into a designated large chemical storage tank. The chemical extraction (recovery) means that a chemical tank car is driven to a specified chemical tank factory area, and chemical waste liquid or chemical gas is extracted (recovered) from a specified large-scale chemical waste storage tank.
First embodiment
Referring to FIG. 1, a first embodiment of a fluid filling and extraction system according to the present invention is shown. As shown in fig. 1, the fluid filling and pumping system of the present invention mainly comprises: at least one first identity information carrying unit 21, at least one second identity information carrying unit 81, at least one material information carrying unit 31, at least one slot zone information carrying unit 41, at least one containing slot information carrying unit 61, at least one portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the first identity information carrying unit 21 is disposed on an operator identity card 2, and the second identity information carrying unit 81 is disposed on at least one carrier identity card 8 of the material container 3, such as a driver of a chemical tanker. It is contemplated that the product container 3 is referred to herein as a chemical tanker as shown in fig. 1. It should be noted that the first identity information carrying unit 21 is used for carrying basic data of an operator holding the operator identity card 2, and includes: name, job number, belonging unit, job level, and qualification (Qualify) as to whether or not the replenishment (filling) operation of chemicals and the extraction (recovery) operation of waste liquid are completed. Of course, the operator who has completed the qualification will be allowed to perform the relevant row operation.
On the other hand, the material information carrying unit 31 is disposed on a chemical tanker (i.e., the material container 3) for carrying a plurality of basic information of a specific material transported by the chemical tanker, including: name (or material number), lot number, carrier number (i.e., the number of the chemical tanker), expiration date, and serial number. For example, the name may be used to indicate that the particular material is a chemical liquid or a chemical gas. On the other hand, as can be seen from the above table (1), the types of chemical liquids and chemical gases used by the integrated circuit manufacturing plant (IC foundry) are various, and therefore, the present invention particularly uses at least one tank information carrying unit 41 disposed on at least one tank control gate 4. It is understood that at least one fluid containing tank area is planned behind the tank area control door 4, and different fluid containing tanks 6 are usually disposed in the fluid containing tank area according to the application process of the chemical. In the present invention, at least one container information carrying unit 61 is disposed above at least one fluid container 6.
As can be seen from the above description, the unit "at least one" is used to indicate that the number of the five information carrying units (21,81,31,41,61) is one or more. In other words, the exact number of the five information carrying units (21,81,31,41,61) is determined by the number of the operator identification card 2, the carrier identification card 8, the material container 3 (i.e., chemical tank car), the tank section control gate 4, and the fluid container 6. On the other hand, the portable electronic device 5 has a reading unit 51. Through the reading unit 51, the portable electronic device 5 can determine whether the specific material accommodated by the material container 3 needs to be filled by reading the material information carrying unit 31, so as to fill the specific material from the material container 3 to the specific fluid accommodating groove region and the specific fluid accommodating groove 6. In addition, through the reading unit 51, the portable electronic device 5 can determine whether the specific material accommodated in the fluid accommodating tank 6 needs to perform an extraction operation by reading the tank zone information carrying unit 41 and the accommodating tank information carrying unit 61. Of course, before the filling operation or the extraction (recycling) operation of the chemicals is performed, the portable electronic device 5 must first confirm whether the operator holding the operator identification card 2 has the authority to perform the filling operation and the extraction operation by reading the first identification information carrying unit 21.
As shown in fig. 1, the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver R, a communication protocol between the transceiver R and the portable electronic device 5 may be a wireless communication network including WIFI, 3G, 4G, bluetooth, Zigbee, etc., and a communication protocol between the transceiver R and the central monitoring system CSRC may be a wireless communication network or a wired communication network, wherein the wireless communication network includes WIFI, 3G, 4G, bluetooth, Zigbee, etc. The central monitoring system CSRC monitors and controls the access Control of the tank Control door 4 through a Control device 7, so as to prevent a service person, an operator, or a driver of a chemical tanker (i.e., a chemical delivery person) from opening the tank Control door 4 intentionally, wherein the Control device 7 includes one of a Programmable Process Controller (PLC), a Direct Digital Controller (DDC), an object link and Embedding device (OLE) or an OLE device (OLE for Process Control, OPC) for Process Control. It is conceivable that after the reading of the tank zone information carrying unit 41 and the material information carrying unit 31 is completed, the portable electronic device 5 can know from the central monitoring system CSRC whether the specific material transported by the chemical tank truck (i.e., the material container 3) and the chemical contained in the fluid containing tank 6 disposed behind the tank zone control door 4 are both the same chemical fluid or chemical gas. It is presumed that after the confirmation is completed, the chemical delivery personnel and the operators of the ic fab are allowed to start the subsequent process for the next chemical filling operation. This confirmation is to prevent the chemical conveyed by the tank car from being erroneously filled into the wrong fluid container 6 by the conveying person and the operator.
It should be noted that although fig. 1 shows that the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, the tank information carrying unit 41, and the tank information carrying unit 61 are all one-dimensional bar codes (1D barcode), the implementation of the information carrying units (21,31,41,61) should not be limited thereto. In practical applications of the present invention, the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, the tank information carrying unit 41, and the tank information carrying unit 61 may be any one of the following units: a figure, a character, a letter, a number, a one-dimensional barcode (1D barcode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above. Taking a one-dimensional bar Code (1D barcode) as an example, the material information carrying unit 31 can be manufactured by using a Code 39 barcode generator, and carries the name (material number), batch number, expiration date, and serial number of the specific material contained in the material container 3. It should be noted that, in order to facilitate the portable electronic device 5 to clearly read the name (material number), lot number, carrier number, expiration date, and serial number, when the one-dimensional barcode of the material information carrying unit 31 is manufactured, an information separator (e.g.%, $,/, |) must be inserted between two adjacent pieces of basic information! @, # &, #, +), -, |, {, },? ", or +.
It is understood that the reading unit 51 of the portable electronic device 5 may be any one of the following units, corresponding to the information carrying units (21,81,31,41,61) of different embodiments: an RFID tag reader, an NFC tag reader, an image identifier, a one-dimensional barcode reader, a two-dimensional barcode reader, a hanxin code reader, a QR code reader, a matrix barcode reader, or an image grabber. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capturing module built in the portable electronic device 5 can be directly used as the reading unit 51; thus, after the portable electronic device 5 is installed with an image (or barcode) recognition software, the portable electronic device 5 can complete the reading of the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, the tank information carrying unit 41, and/or the containing tank information carrying unit 61 by using the reading unit 51 and the image recognition unit in a matching manner. However, since most ic manufacturers prohibit the use of any type of smart electronic device in the factory, a Personal Digital Assistant (PDA) with a barcode scanner (i.e., the reading unit 51) is the best implementation of the portable electronic device 5.
Continuing to refer to fig. 1, and referring to fig. 2, a perspective view of the portable electronic device is shown. It should be noted that although the portable Electronic device 5 can confirm whether the operator having the operator identification card 2 has the operation authority for performing the filling operation and the extraction operation of the chemical by reading the first identification information carrying unit 21, the present invention adds a so-called Electronic token unit (Electronic token unit)8 to the fluid filling and extraction system in consideration of the fact that the operator of a low level may borrow the operator identification card 2 of a high level or an engineer and intentionally perform the relevant operations. As shown in fig. 2, the electronic stick unit 8 stores a One-time password (OTP). Specifically, after the portable electronic device 5 finishes reading the first identity information carrying unit 21, the central monitoring system CSRC can request the operator to provide the electronic wand unit 8 through the portable electronic device 5; then, the portable electronic device 5 can repeatedly confirm whether the operator holding the operator identification card 2 has the operation authority for performing the filling operation and the extraction operation of the chemicals by accessing the one-time authentication code, thereby avoiding the situation that the operator identification card 2 of a high-duty factory or an engineer is taken to perform the relevant operations arbitrarily. The present invention is not limited to the implementation of the electronic stick-weighting unit 8, and as shown in fig. 2, the electronic stick-weighting unit 8 may be: a bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. After the portable electronic device 5 completes accessing the one-time authentication code from the electronic wand unit 8, a token code generating unit (not shown) inside the portable electronic device 5 regenerates a set of one-time authentication codes and writes the one-time authentication codes into the electronic wand unit 8, thereby increasing the operation rights of the first machine 4 and the second machine 6.
Thus, the foregoing description has provided a complete and clear description of a fluid filling and extraction system of the present invention. Next, the operation of a fluid filling and pumping system according to the present invention will be described. Referring to fig. 1 repeatedly, and to fig. 3A and 3B simultaneously, a front view of a screen of the portable electronic device when performing a fluid filling operation is shown. As shown in fig. 1 and 3A, when performing a fluid filling operation, at least one first identity information carrying unit 21 is disposed on at least one operator identity card 2, at least one second identity information carrying unit 81 is disposed on at least one carrier identity card 8, at least one material information carrying unit 31 is disposed on at least one material container 3, at least one slot area information carrying unit 41 is disposed on at least one slot area control gate 4, and at least one receiving slot information carrying unit 61 is disposed on at least one fluid receiving slot 6; the chemical tank is characterized in that the material container 3 contains a specific chemical (such as chemical liquid or chemical gas), the fluid containing tank 6 is used for containing and storing the chemical, and the material container 3 is a chemical tank truck for transporting the chemical.
Further, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (e.g., a barcode scanner). In the actual operation flow of the fluid filling operation, as shown in fig. 3A (a), a fluid filling operation needs to be selectively performed by the portable electronic device 5. Next, as shown in fig. 3A (b), if the chemical transported by the chemical tank car is chemical fluid (or pure liquid), the operator must further select "chemical liquid tank car" on an operation interface of the portable electronic device 5. Continuously, as shown in fig. 3 (c), the operator must further select "fill operation start" on an operation interface of the portable electronic device 5, which is notified to the rear central monitoring system CSRC through the portable electronic device 5, so that the monitoring personnel can know that the specific tank control gate 4 is currently at the present time to prepare for starting the fluid fill operation.
Before the chemicals are supplied to the designated large-sized chemical container, as shown in fig. 3A (d), the portable electronic device 5 must read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the tank area information carrying unit 41 to determine the operator barcode, the driver barcode, the tank truck barcode, the material barcode, and the tank area barcode. Continuously, as shown in fig. 3B (a), the portable electronic device 5 of the central monitoring system CSRC requests the operator to input basic information of the chemical to be filled. The input of the basic information can be quickly completed by the way that the portable electronic device 5 reads the material information carrying unit 31. Meanwhile, as shown in fig. 3B (B), the operator must also use the portable electronic device 5 to read the first identity information carrying unit 21, the second identity information carrying unit 81, the tank information carrying unit 41, and the containing tank information carrying unit 61, so that the back-end central monitoring system CSRC can repeatedly confirm the capital data of the operator and the carrier who perform the chemical filling operation. Meanwhile, the central monitoring system CSRC may also repeatedly determine the chemical to be subjected to the chemical filling operation (i.e., the specific material transported by the chemical tank car), the fluid containing tank 6, and the fluid containing tank area to which the fluid containing tank 6 belongs.
After the repeated confirmation of the specific materials, the fluid containing tank area and the fluid containing tank 6 conveyed by the operator, the conveyor and the chemical tank car is completed, the central monitoring system CSRC at the rear end can open the door lock of the tank area control door 4, so that the operator and the conveyor can start to drive the chemical tank car to a specified chemical tank plant area and supplement chemicals into a specified large chemical containing tank, and the filling operation of the chemicals is completed. Thereafter, as shown in fig. 3B (c), after selecting an option for completing the filling operation via the portable electronic device 5, the system further requires the operator to repeatedly read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the sink information carrying unit 41 via the portable electronic device 5 (as shown in fig. 3B (d)). Thus, the central monitoring system CSRC at the rear end can know that the chemical filling operation is completed, and then the door lock of the control door 4 of the tank area is enabled.
Referring to fig. 1 again, and to fig. 4A and 4B, a front view of a screen of the portable electronic device is shown when fluid filling extraction (recovery) is performed. In the actual operation flow of the fluid extraction operation, as shown in fig. 4A (a), a fluid extraction operation needs to be selectively performed by the portable electronic device 5. Next, as shown in fig. 4A (b), if the chemical fluid to be extracted is chemical waste, the operator must further select "chemical waste tank car" on an operation interface of the portable electronic device 5. Continuously, as shown in fig. 4A (c), the operator must further select "extract operation start" on an operation interface of the portable electronic device 5, which is notified to the rear central monitoring system CSRC through the portable electronic device 5, so that the monitoring personnel can know that the operation is currently at the specific tank control gate 4 to prepare for starting the fluid extraction operation.
Before moving the chemical waste tank car to the designated large chemical container, as shown in fig. 4A (d), the portable electronic device 5 must first read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the tank area information carrying unit 41 to know the operator barcode, the driver barcode, the tank car barcode, the material barcode, and the tank area barcode. Continuously, the central monitoring system CSRC at the rear end opens the door lock of the tank control door 4, so that the operator and the transportation personnel can proceed to drive the chemical tank car to the designated chemical tank plant area, draw out the chemical waste liquid from the (chemical waste liquid) fluid storage tank 6, and fill the chemical waste liquid into the tank car. After the chemical filling operation is completed, as shown in fig. 4B (a), the operator must select an option of ending the extraction operation through the portable electronic device 5; thereafter, as shown in fig. 4B (B), the system further requires the operator to repeatedly read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the sink information carrying unit 41 by the portable electronic device 5. Then, the central monitoring system CSRC at the rear end can know that the chemical filling operation is completed, and then the door lock of the control door 4 of the tank area is activated.
Second embodiment
It should be apparent that fig. 1, 3A, 3B, and the above description describe how the fluid filling and extraction system of the present invention is used to perform the filling and extraction (recovery) of chemical liquid. Continuing on, the following will continue to describe how the chemical gas filling operation is accomplished using the fluid filling and extraction system of the present invention. FIG. 5 is a schematic diagram illustrating a second embodiment of a fluid filling and extraction system according to the present invention. Specifically, in the second embodiment, the central monitoring system CSRC, in addition to monitoring and controlling the access control of the slot control door 4 through the control device 7, also enables or disables a valve protection device AD through the control device 7. The valve protection device AD is known in the industry as Auto guard to prevent the gas valve from being opened arbitrarily without the approval of the central monitoring system CSRC. The main reason is that the filling operation or the pumping operation of the chemical gas, such as NH3 or SiH4, must be started after the central monitoring system CSRC releases the valve protection device AD.
Referring to fig. 5 in addition to fig. 6A and 6B, a front view of a screen of the portable electronic device after performing the fluid filling operation is shown. The specific material for performing the fluid filling operation is a chemical gas. In the actual operation flow of the (chemical gas) fluid filling operation, as shown in fig. 6A (a), a fluid filling operation needs to be selectively performed by the portable electronic device 5. Next, as shown in fig. 6A (b), since the chemicals transported by the chemical tanker are chemical gases, the operator must further select "chemical tanker" on an operation interface of the portable electronic device 5. Continuously, as shown in fig. 6A (c), the operator must further select "fill operation start" on an operation interface of the portable electronic device 5, which is notified to the rear central monitoring system CSRC through the portable electronic device 5, so that the monitoring personnel can know that the fluid fill operation is currently at the specific tank control gate 4 to be ready for starting.
Before filling the chemical gas into the designated large chemical container, as shown in fig. 6A (d), the portable electronic device 5 must read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the tank area information carrying unit 41 to determine the operator barcode, the driver barcode, the tank truck barcode, the material barcode, and the tank area barcode. After confirming that the capital data of the operator and the carrier performing the chemical filling operation is correct, the central monitoring system CSRC at the back end opens the cell control gate 4, so that the operator and the carrier can proceed to transport the chemical cell to the designated chemical cell plant. Further, after the central monitoring system CSRC at the back end releases the valve protection device ad (auto guard), the operator and the transportation personnel can start to fill the chemical gas into the designated large chemical container, thereby completing the chemical filling operation. Thereafter, as shown in fig. 6B (a) and (B), after selecting an option for completing the filling operation via the portable electronic device 5, the system further requires the operator to repeat reading the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the sink information carrying unit 41 via the portable electronic device 5. Thus, the central monitoring system CSRC at the back end can know that the chemical filling operation is completed, and then the door lock of the valve protection device ad (auto guard) and the tank control door 4 is activated.
Third embodiment
It should be apparent that fig. 5, 6A, 6B, and the above description describe how the fluid filling and extraction system of the present invention can be used to fill chemical gas. Continuously, the following will continue to describe how the extraction (recovery) of the chemical gas is accomplished using the fluid filling and extraction system of the present invention. FIG. 7 is a schematic diagram illustrating a third embodiment of a fluid filling and extraction system according to the present invention. Specifically, in the third embodiment, at least one tank valve information carrying unit 91 is disposed on at least one switching valve unit 9, and the switching valve unit 9 is used for switching the fluid input and output of the fluid containing tank 6. Meanwhile, the central monitoring system CSRC, in addition to monitoring and controlling the access control of the control gate 4 of the tank area through the control device 7, also enables or disables the activation and deactivation of a valve protection device AD through the control device 7.
Referring to fig. 7 again, and referring to fig. 8A and 8B, a front view of the screen of the portable electronic device when performing fluid-filled extraction (recovery) operation is shown. In the actual operation flow of the (chemical gas) fluid extraction operation, as shown in fig. 8A (a), a fluid extraction operation needs to be selectively performed by the portable electronic device 5. Next, as shown in fig. 8A (b), if the chemical to be extracted is chemical gas, the operator must further select "chemical gas tanker" on an operation interface of the portable electronic device 5. Continuously, as shown in fig. 8 (c), the operator must further select "extract operation start" on an operation interface of the portable electronic device 5, which is notified to the rear central monitoring system CSRC through the portable electronic device 5, so that the monitoring personnel can know that the operation is currently at the specific tank control gate 4 to prepare for starting the fluid extraction operation.
Before moving the chemical gas tanker to the designated large chemical container, as shown in fig. 8A (d), the portable electronic device 5 must first read the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31, and the tank area information carrying unit 41 to ascertain the operator barcode, the driver barcode, the tanker barcode, the material barcode, and the tank area barcode. After the back-end CSRC confirms that the capital data of the operators and the shippers who perform the chemical extraction operation is correct, the cell bay doors 4 are opened so that the operators and the shippers can proceed to transport the chemical gas tanker to the designated chemical cell bay. Further, after the central monitoring system CSRC at the rear end releases the valve protection device ad (auto guard), the operator and the transportation personnel can start to pump out the chemical gas in the fluid containing tank 6 and further fill the chemical gas into the chemical gas tank car. After the chemical extraction (recovery) operation is completed, as shown in fig. 8B, the system requires the operator to repeat the reading of the first identity information carrying unit 21, the second identity information carrying unit 81, the material information carrying unit 31 and the sink information carrying unit 41 by the portable electronic device 5 after selecting an option to complete the filling operation by the portable electronic device 5. Thus, the central monitoring system CSRC at the back end can know that the chemical filling operation is completed, and then the door lock of the valve protection device ad (auto guard) and the tank control door 4 is activated.
Thus, the foregoing has been a complete and clear description of the present invention of a fluid filling and extraction system and method; moreover, the invention has the following advantages as can be seen from the above:
(1) the present invention provides a fluid filling and extraction system, comprising: at least one first identity information carrying unit 21, at least one second identity information carrying unit 81, at least one material information carrying unit 31, at least one slot information carrying unit 41, at least one containing slot information carrying unit 61, and at least one portable electronic device 5. In particular, after the portable electronic device 5 reads the basic information carried by the plurality of information carrying units (21,81,31,41,61) by the reading unit 51 thereof, the central monitoring system CSRC at the rear end can allow the operator to perform the fluid filling operation and/or the extraction (recycling) operation after confirming whether the operator has the operation authority to perform the fluid filling operation and/or the extraction (recycling) operation and whether the information of the materials contained in the material container 3 (i.e., the chemical tank truck) is correct. In this way, the filling operation, the extraction operation and the related records can be ensured to be carried out under the electronic system management, any paper book record is eliminated, and the related operations can be effectively avoided being abnormally operated by any person or being completed in a mode of not meeting the standard operation program.
It should be emphasized that the above detailed description is specific to possible embodiments of the invention, but the embodiments are not intended to limit the scope of the invention, and all equivalent implementations or modifications that do not depart from the technical spirit of the invention are intended to be included within the scope of the present invention.

Claims (10)

1. A fluid filling and extraction system, comprising:
at least one first identity information carrying unit arranged on at least one operator identity card;
the material information carrying unit is arranged on the material container, and the material container contains a specific material;
at least one slot area information carrying unit arranged on the slot area control door;
the at least one accommodating groove information carrying unit is arranged on the at least one fluid accommodating groove, and the at least one fluid accommodating groove is arranged in the at least one fluid accommodating groove area positioned behind the groove area control door; and
at least one portable electronic device, which is provided with a reading unit;
the portable electronic device can determine whether the specific material accommodated by the material container needs to be filled by a filling operation in a manner of reading the material information carrying unit through the reading unit, so that the specific material is filled from the material container to the specific fluid accommodating groove area and the specific fluid accommodating groove;
through the reading unit, the portable electronic device can determine whether the specific material contained in the fluid containing groove needs to perform an extraction operation or not in a mode of reading the groove area information carrying unit and the containing groove information carrying unit;
through the reading unit, the portable electronic device can confirm whether an operator holding the operator identity card has the authority to execute the filling operation and the extraction operation or not in a mode of reading the first identity information carrying unit.
2. The fluid filling and extraction system of claim 1, further comprising:
at least one second identity information carrying unit arranged on at least one personnel identity card of the material container; and
the tank valve information carrying unit is arranged on at least one switching valve unit, and the switching valve unit is used for switching the fluid input and output of the fluid containing tank.
3. The fluid filling and extraction system of claim 1, further comprising:
at least one valve protection device arranged on the at least one switching valve unit; and
and the central monitoring system is communicated with the portable electronic device through a transceiver, monitors and controls the access control management of the control door of the tank area through a control device, and is used for starting or releasing the starting and releasing of the valve protection device through the control device.
4. The fluid filling and extraction system of claim 1, wherein the particular product is a chemical fluid, the product holder is a chemical tanker, and the fluid holding tank is a chemical holding tank or a chemical waste holding tank.
5. The fluid filling and extraction system of claim 2, wherein the first identity information carrying unit, the second identity information carrying unit, the tank valve information carrying unit, the material information carrying unit, the tank zone information carrying unit, and the tank information carrying unit are any one of: a figure, a character, a letter, a number, a one-dimensional barcode (1D barcode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.
6. The fluid filling and extraction system of claim 1, wherein the portable electronic device is any one of: a smart phone, personal digital assistant, laptop, tablet computer, smart glasses, or smart watch; the reading unit 51 may be any one of the following: an RFID tag reader, an NFC tag reader, an image identifier, a one-dimensional barcode reader, a two-dimensional barcode reader, a hanxin code reader, a QR code reader, or a matrix barcode reader.
7. The fluid filling and extraction system of claim 2, wherein the reading unit is an image capturing device, and the portable electronic device further comprises an image recognition unit; by using the reading unit and the image recognition unit in a matching manner, the portable electronic device can complete reading of the first identity information carrying unit, the second identity information carrying unit, the tank valve information carrying unit, the material information carrying unit, the tank area information carrying unit and/or the containing tank information carrying unit.
8. The fluid filling and extraction system of claim 1, wherein the plurality of base information carried by the material information carrying unit includes: name, batch number, material number, carrier number, expiration date, and serial number, and a Central classification chart (Central classification chart) is inserted between two adjacent basic information.
9. The fluid filling and extraction system of claim 4, wherein the chemical fluid may be any one of: a chemical liquid or a chemical gas.
10. The fluid filling and extraction system of claim 8, wherein the information separator can be any one of: %, $,/, |, |! @, # &, #, +), -, |, {, },? ", or +.
CN201811353177.4A 2018-11-14 2018-11-14 Fluid filling and extracting system and method Pending CN111191743A (en)

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