CN111191745A - Chemical reloading system and method - Google Patents

Abstract

The invention discloses a chemical reloading system and a method, wherein the chemical reloading system comprises: at least one identity information carrying unit, at least one material information carrying unit, at least one machine information carrying unit and at least one portable electronic device. Particularly, after the portable electronic device reads the basic information carried by the plurality of information carrying units by the reading unit, the central monitoring system at the rear end can automatically remove the cabinet door of the machine after confirming whether the operator has the operation authority of the machine and whether the name, the batch number, the effective date and the serial number of the material contained in the material container are correct, so that the operator can perform old removal and new replacement operation on related materials. In such a way, the material replacement of all the machines can be ensured to be carried out under the electronic system management, any paper book record is omitted, and the occurrence of artificial operation abnormity in the process of executing the old material removal and new material replacement program can be effectively avoided.

Description

Chemical reloading system and method

Technical Field

The present invention relates to the field of semiconductor manufacturing, and more particularly, to a method and apparatus for assisting an integrated circuit manufacturing (ICfoundry) to safely complete a replacement operation of a chemical tank (chemical container) by on-line verification.

Background

Chemical Mechanical Polishing/Chemical liquid (CMP)/(Chemical fluid) is currently widely used in global planarization processes in semiconductor IC manufacturing processes. In performing a CMP process, the wafer must be placed between a wafer Carrier (Carrier/Head) and a rotating platen on which a polishing pad is laid. And, in the global planarization of the wafer by the rotary table having the polishing pad, a Chemical mechanical polishing slurry (cmp slurry) is continuously sprayed onto the surface of the wafer through a nozzle. It is contemplated that the polishing pad and chemical fluid slurry (referred to as "slurry") or other chemical fluids are consumables of the CMP process or other processes and must be replaced periodically or periodically by an on-site operator.

It should be added that as the line width of semiconductor IC fabrication technology continues to shrink, the process technology also changes. For example, the chemical mechanical polishing technique conventionally applied to the global planarization process is also applied to the High-K metal gate (HDM) manufacturing process. However, since the line width of the metal gate is usually less than 16 nm, the slurry or other chemical liquid must be filtered by a filter before being injected into the related fabrication platform, so as to remove particles with a size greater than 100 nm from the slurry or other chemical liquid. It is also conceivable that the filter element or filter material of the filter is naturally a consumable in the CMP process and must be replaced periodically or periodically by an on-site operator.

However, based on the practical experience provided by the integrated circuit manufacturer (IC foundry), it has been found that the currently used slurry and/or filter replacement procedures have a significant drawback, as described below. The replacement operation and history of the grinding fluid or other chemical fluid and/or the filter element are recorded by a paper book, and the content of the paper book at least comprises: the name of a replacing person, the job number of the replacing person, the replacing time, the material number of the replacing product, the material loading time, the material unloading time and the like. However, once an abnormal manual operation occurs during the execution of the program, such as an operator replacing the computer with a grinding fluid or other chemical liquid with a different material number, the manual operation error like this will cause a significant loss to the integrated circuit manufacturer (IC foundry) and its customers.

As can be seen from the above description, it is imperative for an integrated circuit manufacturer to synchronize the electronic management, replacement, process steps and records of the materials of the polishing slurry or other chemical solutions and/or filter elements. Therefore, the factory tube of the integrated circuit manufacturing factory can completely and comprehensively monitor whether the material replacement number of the grinding fluid or other chemical fluid and/or the filter element is correct and whether the operator has the replacement authority through the central control system. Accordingly, the present inventors have made extensive studies and studies, and finally, have developed a chemical reloading system and method according to the present invention.

Disclosure of Invention

Practical experience provided by the integrated circuit manufacturers (IC foundries) has indicated that the replacement of polishing slurry or other chemicals and/or filter elements is usually done only through a paper book. However, since the replacement operation and the notebook record are all completed by manpower, once an artificial operation abnormality occurs during the execution of the program, such as: human operator error in chemical conversion from non-compliant slurry or other chemical liquid, such as operator error, can result in significant loss to the integrated circuit manufacturer (ICfoundry) and its customers. The main objective of the present invention is to provide a chemical reloading system and method, wherein the chemical reloading system comprises: at least one identity information carrying unit, at least one material information carrying unit, at least one machine information carrying unit and at least one portable electronic device. Particularly, after the portable electronic device reads the basic information carried by the plurality of information carrying units by the reading unit, the central monitoring system at the rear end can automatically remove the cabinet door of the machine after confirming whether the operator has the operation authority of the machine and whether the name, the batch number, the effective date and the serial number of the material contained in the material container are correct, so that the operator can perform old removal and new replacement operation on related materials. In this way, the material replacement of all the machines can be ensured to be carried out under the electronic system management, any paper book record is omitted, and the occurrence of artificial operation abnormity in the process of executing the old material removal and new material replacement program can be effectively avoided.

To achieve the above objective of the present invention, the present inventors provide an embodiment of the chemical reloading system, comprising:

at least one identity information carrying unit which is arranged on at least one operator identity card;

the material information carrying unit is arranged on the material container, and the material container contains a specific material;

at least one machine information carrying unit arranged on at least one machine for preprocessing or directly using the specific material; and

at least one portable electronic device, which is provided with a reading unit;

the portable electronic device can confirm the type and the operating state of the machine in a mode of reading the machine information carrying unit through the reading unit; meanwhile, through the reading unit, the portable electronic device can confirm whether an operator holding the operator identity card has the authority to operate the machine station or not in a mode of reading the identity information carrying unit;

the portable electronic device can confirm a plurality of basic information of the specific material accommodated by the material container in a manner of reading the material information carrying unit through the reading unit, so as to ensure that the material container is installed in the correct machine station under the condition that the specific material is in a normal state.

The chemical reloading system further comprises: and the central monitoring system is communicated with the portable electronic device through a transmitting-receiving device and monitors and controls the operation state of the machine through a control device.

The chemical reloading system, wherein the specific material is one of a chemical fluid polishing solution, a chemical liquid, a related material, an O-ring, a gasket or a filtering material.

The chemical reloading system, wherein the identity information carrying unit, the material information carrying unit and the machine information carrying unit can be any one of the following units: a figure, a character, a letter, a number, a one-dimensional barcode (1 dbracode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.

The chemical reloading system, wherein the portable electronic device can be any one of the following: a smart phone, personal digital assistant, laptop, tablet computer, smart glasses, or smart watch; the read unit may be any one of: an RFID tag reader, an NFC tag reader, an image identifier, a one-dimensional barcode reader, a two-dimensional barcode reader, a hanxin code reader, a QR code reader, or a matrix barcode reader.

In the chemical reloading system, the reading unit is an image capturing device, and the portable electronic device further has an image recognition unit; the portable electronic device can finish reading the identity information carrying unit, the material information carrying unit and/or the machine information carrying unit by matching the reading unit with the image identification unit.

The chemical reloading system, wherein the plurality of basic information carried by the material information carrying unit includes: name, batch number, effective date, and serial number, and a Central classification character (Central classification character) is inserted between two adjacent pieces of basic information.

The chemical reloading system, wherein the normal state may be any one of: the name of the specific material is correct, the batch number of the specific material is not forbidden, the batch number of the specific material has a warehousing record, or the storage date of the specific material does not exceed the effective date.

The chemical reloading system further comprises: an Electronic token unit (Electronic token unit) for communicating with the portable Electronic device;

after the portable electronic device finishes reading the identity information carrying unit, the electronic stick device is used for repeatedly confirming whether the operator holding the operator identity card has the authority to operate the machine.

The chemical reloading system, wherein the information separator can be any one of: %, $,/, |, |! @, # &, #, +), -, |, {, },? ", or +.

In order to achieve the above-mentioned objective of the present invention, the present inventors provide an embodiment of the chemical reloading method, which comprises the following steps:

(1) arranging at least one identity information carrying unit on at least one operator identity card, arranging at least one material information carrying unit on at least one material container, and arranging at least one machine station information carrying unit on at least one machine station; the machine table is used for preprocessing or directly using the specific material;

(2) providing at least one portable electronic device, wherein the portable electronic device is provided with a reading unit;

(3) through the reading unit, the portable electronic device confirms the type and the operating state of the machine in a mode of reading the machine information carrying unit;

(4) through the reading unit, the portable electronic device confirms whether an operator holding the operator identity card has the authority to operate the machine station or not in a mode of reading the identity information carrying unit;

(5) through the reading unit, the portable electronic device confirms a plurality of pieces of basic information of the specific material accommodated by the material accommodating device in a manner of reading the material information carrying unit so as to ensure that the material accommodating device is installed in a correct machine station when the specific material is in a normal state; and

(6) through the reading unit, the portable electronic device reads the identification information carrying unit again to finish the replacement operation of the specific material in the machine.

Drawings

FIG. 1 is a block diagram showing a chemical reloading system according to the invention;

FIG. 2 is a perspective view illustrating the portable electronic device;

FIGS. 3A and 3B are flow charts illustrating the chemical reloading method of the invention;

FIG. 4A is a front view of a screen of the portable electronic device; and

fig. 4B is a front view showing a screen of the portable electronic device.

Reference numerals:

< present invention >

21 identity information carrying unit

31 material information carrying unit

41 machine information carrying unit

5 Portable electronic device

CSRC central monitoring system

2 operator identity card

3 Material container

4 machine table

5 Portable electronic device

51 read unit

6 transceiver router

7 programmable control device

8 electronic stick unit

S1-S6 steps

< publicly known >

Is free of

Detailed Description

In order to more clearly describe the chemical reloading system and method of the present invention, the following description will be made in detail with reference to the accompanying drawings.

FIG. 1 is a schematic diagram of a chemical reloading system according to the present invention. As shown in fig. 1, the chemical reloading system of the present invention mainly comprises: at least one identity information carrying unit 21, at least one material information carrying unit 31, at least one machine information carrying unit 41, at least one portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the identity information carrying unit 21 is disposed on an operator identity card 2. Briefly, the identity information carrying unit 21 is used for carrying basic data of an operator holding the operator identity card 2, and includes: name, job number, belonging unit, job level, and qualification (Qualify) whether to complete the machine operation. Specifically, the operator who completes the qualification of the machine operation is allowed to perform the machine operation; in addition, the higher the job level, the more kinds of machines are allowed to be operated by the operator. For example, a plant owner, a senior engineer, and a main engineer can operate machines of different units, but an Operator (OP) is limited to operate machines of the unit.

On the other hand, the material information carrying unit 31 is disposed on a corresponding material container (chemical container)3, and the material container 3 contains a specific material. The material information carrying unit 31 carries a plurality of pieces of basic information related to the specific material, including: name, lot number, expiration date, and serial number. For example, the designation may be used to indicate that the particular material is a Chemical fluid polishing slurry (Chemical mechanical polishing slurry), a Chemical slurry, a Chemical liquid, a related consumable material, an O-ring, a gasket, or a slurry filter. On the other hand, the machine information carrying unit 41 is disposed on the corresponding machine 4, and the machine 4 is used for preprocessing or directly using the specific material. For example, if the machine 4 is a slurry supply system, the material container 3 must contain a chemical fluid polishing slurry (referred to as "slurry"). Or, the machine table 4 is a polishing liquid filtering machine table, the specific material is a polishing liquid filtering material, and the material container 3 is a filter shell.

As can be seen from the above description, the unit "at least one" is used to indicate that the number of the three information carrying units (21,31,41) is one or more. In other words, the exact number of the three information carrying units (21,31,41) is determined by the number of the operator id cards 2, the material containers 3 and the machine base 4. On the other hand, the portable electronic device 5 has a reading unit 51. Through the reading unit 51, the portable electronic device 5 can confirm the operation status of the machine 4 by reading the machine information carrying unit 41. As shown in fig. 1, the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver device 6, a communication protocol between the transceiver device 6 and the portable electronic device 5 may be a wireless communication network including WIFI, 3G, 4G, bluetooth, Zigbee, etc., and a communication protocol between the transceiver device 6 and the central monitoring system CSRC may be a wireless communication network or a wired communication network, wherein the wireless communication network includes WIFI, 3G, 4G, bluetooth, Zigbee, etc. The central monitoring system CSRC controls the operation state of the machine 4 through a Control device 7, wherein the Control device 7 includes a Programmable Logic Controller (PLC), a Direct Digital Controller (DDC), an Object Linking and Embedding device (OLE) or an OLE device (OPC) for process Control. Therefore, after completing the reading of the machine information carrying unit 41, the portable electronic device 5 can know the type, setting parameters and operation condition of the machine 4 from the central monitoring system CSRC. In addition, through the reading unit 51, the portable electronic device 5 can further confirm whether the operator holding the operator identification card 2 has the authority to operate the machine platform 4 by reading the identification information carrying unit 21.

Specifically, before the material replacement, the basic information related to the specific material accommodated in the material container 3 can be confirmed by reading the material information carrying unit 31, so as to ensure that the material container 3 is loaded into the correct machine table 4 in a normal state of the specific material. For example, if the machine table 4 is a polishing liquid supply system, the reading of the material information carrying unit 31 can confirm whether the name of the specific material accommodated by the material container 3 is polishing liquid. In addition, the reading of the material information carrying unit 31 can confirm whether the lot number of the specific material has been disabled, whether the lot number of the specific material has a warehousing record, and whether the storage date of the specific material exceeds the effective date.

After the material container 3 is determined to be in a normal state, the central monitoring system CSRC automatically releases the cabinet door of the cabinet of the machine station 4, and at this time, the operator can take down the material container 3 that has exhausted the specific material from the machine station 4 and load a new material container 3 into the machine station 4. Moreover, after the material container 3 is loaded into the correct machine 4 under the condition that the specific material is in the normal state, the portable electronic device 5 must read the identification information carrying unit 21 again; then, the central monitoring system CSRC records the on-machine time of the new material container 3, and records that the state of the material container 3 is "In use". Conversely, the central monitoring system CSRC records the old material container 3 as an Empty bucket (Empty). Meanwhile, the central monitoring system CSRC displays data (such as name and job number) of the operator and the lot number (or material number) of the specific material accommodated by the material accommodating device 3 on a Human Machine Interface (HMI) of the machine 4 through the control device 7.

Although fig. 1 shows that the identity information carrying unit 21, the material information carrying unit 31 and the machine information carrying unit 41 are all one-dimensional bar codes (1D barcode), the implementation of the information carrying units (21,31,41) should not be limited thereto. In practical applications of the present invention, the identification information carrying unit 21, the material information carrying unit 31, and the machine information carrying unit 41 may be any one of the following units: a figure, a character, a letter, a number, a one-dimensional barcode (1 dbracode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.

Taking a one-dimensional bar Code (1D barcode) as an example, the material information carrying unit 31 can be manufactured by using a Code 39 barcode generator, and carries the name, lot number, expiration date, and serial number of the specific material contained in the material container 3. It should be noted that, in order to facilitate the clear reading of the name, lot number, expiration date, and serial number of the portable electronic device 5, when the one-dimensional barcode of the material information carrying unit 31 is manufactured, an information separator (e.g.,%, $,/, | and so on) must be inserted between two adjacent pieces of basic information! @, # &, #, +), -, |, {, },? ", or +.

It is understood that the reading unit 51 of the portable electronic device 5 may be any one of the following units, corresponding to the information carrying units (21,31,41) of different embodiments: an RFID tag reader, an NFC tag reader, an image identifier, a one-dimensional barcode reader, a two-dimensional barcode reader, a hanxin code reader, a QR code reader, a matrix barcode reader, or an image grabber. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capturing module built in the portable electronic device 5 can be directly used as the reading unit 51; thus, after the portable electronic device 5 is installed with an image (or barcode) recognition software, the portable electronic device 5 can complete the reading of the identification information carrying unit 21, the material information carrying unit 31, and/or the machine information carrying unit 41 by using the reading unit 51 and the image recognition unit in a matching manner. However, since most integrated circuit manufacturers (IC foundries) prohibit the use of any type of smart electronic device in the factory, a Personal Digital Assistant (PDA) with a barcode scanner (i.e., the reading unit 51) is the best mode for implementing the portable electronic device 5.

Continuing to refer to fig. 1 and also referring to fig. 2, a perspective view of the portable electronic device is shown. It should be noted that although the portable Electronic device 5 can determine whether the operator holding the operator identification card 2 has the authority to operate the machine 4 by reading the identification information carrying unit 21, the present invention adds a so-called Electronic stick unit (Electronic token unit)8 to the chemical reloading system in consideration of the possibility that the operator of the lower job level may borrow the operator identification card 2 of the higher job level manager or engineer to operate the plurality of machines 4 without replacing the materials; the electronic stick is characterized in that a One-time password (OTP) is stored in the electronic stick unit 8. Specifically, after the portable electronic device 5 finishes reading the identity information carrying unit 21, the central monitoring system CSRC may request the operator to communicate with the electronic wand unit 8 through the portable electronic device 5; then, the portable electronic device 5 may repeatedly determine whether the operator holding the operator identification card 2 has the authority to operate the machine 4 by accessing the one-time authentication code, so as to prevent the operator identification card 2 of a senior officer or engineer from being taken to operate the plurality of machines 4 without replacing the material. The present invention is not limited to the implementation of the electronic stick-weighting unit 8, and as shown in fig. 2, the electronic stick-weighting unit 8 may be: a bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. After the portable electronic device 5 completes accessing the one-time authentication code from the electronic wand unit 8, a wand code generating unit (not shown) inside the portable electronic device 5 regenerates a set of one-time authentication codes and writes the one-time authentication codes into the electronic wand unit 8, thereby increasing the operation authority of the machine 4.

Thus, the foregoing description has been presented to fully and clearly illustrate a chemical refill system in accordance with the present invention. Next, the following description will be continued to explain a chemical reloading method according to the present invention. Referring to fig. 2, and to fig. 3A and 3B, a flow chart of the chemical reloading method of the invention is shown. Please refer to fig. 4A and fig. 4B, which are front views showing a screen of the portable electronic device. As shown in fig. 2 and fig. 3A, the chemical reloading method first executes step S1, disposing at least one identification information carrying unit 21 on at least one operator identification card 2, disposing at least one product information carrying unit 31 on at least one product container 3, and disposing at least one machine information carrying unit 41 on at least one machine 4; it is characterized in that the material container 3 contains a specific material (such as grinding fluid or filter element), and the machine table 4 is used for preprocessing or directly using the specific material. In step S2, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (e.g., a barcode scanner).

The chemical reloading method of the present invention then executes step S3, and the reading unit 51 enables the portable electronic device 5 to confirm the operation status of the machine 4 by reading the machine information carrying unit 41. In step S4, the portable electronic device 5 determines whether the operator holding the operator identification card 2 has the right to operate the machine base 4 by reading the identification information carrying unit 21 through the reading unit 51. As shown in fig. 4A (a), after the Machine information carrying unit 41 is read, the Machine ID of the Machine 4 is displayed on the screen of the portable electronic device 5, and the portable electronic device 5 can know the setting parameters and the operation condition of the Machine 4 from the central monitoring system CSRC. As shown in fig. 4A (b), if the operator checks that the machine 4 is authorized to be operated, the central monitoring system CSRC automatically releases the cabinet door of the machine cabinet 4 through the control device 7. At this time, as shown in fig. 4 (c), the operator may start the operation of removing the old material from the material container 3 and replacing the new material from the material container on the click screen.

After the step S4 is completed, the chemical reloading method proceeds to step S5, and the portable electronic device 5 confirms a plurality of basic information of the specific material accommodated by the material container 3 by reading the material information carrying unit 31 through the reading unit 51, so as to ensure that the material container 3 is loaded into the correct machine 4 when the specific material is in a normal state. As shown in fig. 4B, before performing the old/new operation of the material container 3, the operator must use the portable electronic device 5 to read a plurality of basic information carried by the material information carrying unit 31, including: name, lot number, expiration date, and serial number. For example, if the machine 4 is a polishing liquid supply system, the reading of the material information carrying unit 31 can confirm whether the name of the specific material accommodated by the material container 3 is polishing liquid. In addition, the reading of the material information carrying unit 31 can also confirm whether the lot number of the specific material has been disabled, whether the lot number of the specific material has a warehousing record, and whether the storage date of the/specific material exceeds the effective date.

After confirming that the name, the lot number, the expiration date, and the serial number are all normal, the central monitoring system CSRC automatically releases the cabinet door of the cabinet of the machine station 4, and at this time, the operator can take down the product container 3 that has exhausted the specific product from the machine station 4, and load a new product container 3 into the machine station 4. On the contrary, if the system finds that any one of the product name, the lot number, the expiration date, and the serial number is abnormal, the central monitoring system CSRC does not release the cabinet door of the cabinet of the machine station 4. At this time, the operator must replace the article container 3 on which the correct article information carrying unit 31 is mounted, and repeatedly perform step S1. After completing step S5, the chemical reloading method then performs step S6: through the reading unit 51, the portable electronic device 5 reads the identification information carrying unit 21 again, and completes the operation of replacing the specific material in the machine platform 4 (as shown in fig. 4B (B) and (d)).

The chemical reloading method of the present invention confirms whether the operator holding the operator identification card 2 has the authority to operate the machine base 4 through step S4. However, it should be understood that the operator of the lower-level may operate the plurality of machines 4 without replacing the materials indiscriminately by using the identity card 2 of the operator of the higher-level factory or engineer, and therefore, the present invention adds a step 4A to the chemical reloading method, which is inserted between the step (4) and the step (5). In step 4A, the portable electronic device 5 requests to communicate with an electronic stick unit 8 (as shown in fig. 2) to repeatedly determine whether the operator holding the operator id card 2 has the authority to operate the machine 4. In short,

the portable electronic device 5 can repeatedly confirm whether the operator holding the operator id card 2 has the authority to operate the machine 4 by accessing the one-time authentication code in the electronic stick unit 8, thereby avoiding the caretaker of a senior officer or an engineer taking the operator id card 2 to operate the plurality of machines 4 without replacing the material.

Thus, the foregoing is a complete and clear description of a chemical reloading system and method of the invention; moreover, the invention has the following advantages as can be seen from the above:

(1) the invention provides a chemical reloading system, comprising: at least one identity information carrying unit 21, at least one material information carrying unit 31, at least one station information carrying unit 41, and at least one portable electronic device 5. Particularly, after the portable electronic device 5 reads the basic information carried by the plurality of information carrying units (21,31,41) by the reading unit 51, the central monitoring system CSRC at the rear end can automatically remove the cabinet door of the machine after confirming whether the operator has the operation authority of the machine and whether the name, the batch number, the effective date and the serial number of the material contained in the material container 3 are correct, so that the operator can proceed the operation of removing the old material from the material container 3 and replacing the new material from the material container 3. In such a way, the material replacement of all the machines can be ensured to be carried out under the electronic system management, any paper book record is omitted, and the occurrence of artificial operation abnormity in the process of executing the old material removal and new material replacement program can be effectively avoided.

It should be emphasized that the above detailed description is specific to possible embodiments of the invention, but the embodiments are not intended to limit the scope of the invention, and all equivalent implementations or modifications that do not depart from the technical spirit of the invention are intended to be included within the scope of the present invention.

Claims (10)

1. A chemical refill system, comprising:

at least one identity information carrying unit arranged on at least one operator identity card;

the material information carrying unit is arranged on the material container, and the material container contains a specific material;

at least one machine information carrying unit arranged on at least one machine for preprocessing or directly using the specific material; and

at least one portable electronic device, which is provided with a reading unit;

the portable electronic device is characterized in that the portable electronic device can confirm the type and the operating state of the machine in a mode of reading the machine information carrying unit through the reading unit; meanwhile, through the reading unit, the portable electronic device can confirm whether an operator holding the operator identity card has the authority to operate the machine station or not in a mode of reading the identity information carrying unit;

through the reading unit, the portable electronic device can confirm a plurality of basic information of the specific material accommodated by the material container in a manner of reading the material information carrying unit, so as to ensure that the material container is loaded into the correct machine station when the specific material is in a normal state.

2. The chemical reloading system as recited in claim 1, further comprising:

and the central monitoring system is communicated with the portable electronic device through a transmitting-receiving device and monitors and controls the operation state of the machine through a control device.

3. The chemical reloading system of claim 1, wherein the specific material is one of a chemical fluid polishing solution, a chemical liquid, an associated consumable material, an O-ring, a gasket, or a filter.

4. The chemical reloading system of claim 1, wherein the identity information carrying unit, the material information carrying unit and the machine information carrying unit are any one of the following: a figure, a character, a letter, a number, a one-dimensional barcode (1D barcode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.

5. The chemical reloading system of claim 1, wherein the portable electronic device is any one of: a smart phone, personal digital assistant, laptop, tablet computer, smart glasses, or smart watch; the read unit may be any one of: an RFID tag reader, an NFC tag reader, an image identifier, a one-dimensional barcode reader, a two-dimensional barcode reader, a hanxin code reader, a QR code reader, or a matrix barcode reader.

6. The chemical reloading system as claimed in claim 1, wherein the reading unit is an image capturing device, and the portable electronic device further comprises an image recognition unit; by using the reading unit and the image recognition unit in a matching manner, the portable electronic device can complete reading of the identity information carrying unit, the material information carrying unit, and/or the machine information carrying unit 41.

7. The chemical reloading system as recited in claim 1, wherein said plurality of basic information carried by said material information carrying unit comprises: name, batch number, effective date, and serial number, and a Central classification character (Central classification character) is inserted between two adjacent pieces of basic information.

8. A chemical reloading system according to claim 1, wherein said normal condition is any one of: the name of the specific material is correct, the batch number of the specific material is not forbidden, the batch number of the specific material has a warehousing record, or the storage date of the specific material does not exceed the effective date.

9. The chemical reloading system as recited in claim 1, further comprising:

an Electronic token unit (Electronic token unit) for communicating with the portable Electronic device;

after the portable electronic device 5 finishes reading the identity information carrying unit, the electronic stick device is used for repeatedly confirming whether the operator holding the operator identity card has the authority to operate the machine.

10. The chemical reloading system of claim 7, wherein said message separator is any one of: %, $,/, |, |! @, # &, #, +), -, |, {, },? ", or +.

Images