CN111190394B - Raw material monitoring and management system - Google Patents
Raw material monitoring and management system Download PDFInfo
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- CN111190394B CN111190394B CN201811353875.4A CN201811353875A CN111190394B CN 111190394 B CN111190394 B CN 111190394B CN 201811353875 A CN201811353875 A CN 201811353875A CN 111190394 B CN111190394 B CN 111190394B
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- 238000012544 monitoring process Methods 0.000 title claims abstract description 124
- 239000002994 raw material Substances 0.000 title claims abstract description 91
- 239000000463 material Substances 0.000 claims abstract description 148
- 238000004064 recycling Methods 0.000 claims abstract description 17
- 238000007726 management method Methods 0.000 claims description 85
- 239000000126 substance Substances 0.000 claims description 65
- 239000007788 liquid Substances 0.000 claims description 28
- 239000012530 fluid Substances 0.000 claims description 19
- 238000003860 storage Methods 0.000 claims description 17
- 239000002002 slurry Substances 0.000 claims description 14
- 238000005498 polishing Methods 0.000 claims description 12
- 238000013523 data management Methods 0.000 claims description 8
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- 239000011159 matrix material Substances 0.000 claims description 4
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- 238000000034 method Methods 0.000 abstract description 4
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- 238000003908 quality control method Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B19/00—Programme-control systems
- G05B19/02—Programme-control systems electric
- G05B19/418—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM]
- G05B19/41875—Total factory control, i.e. centrally controlling a plurality of machines, e.g. direct or distributed numerical control [DNC], flexible manufacturing systems [FMS], integrated manufacturing systems [IMS] or computer integrated manufacturing [CIM] characterised by quality surveillance of production
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B2219/00—Program-control systems
- G05B2219/30—Nc systems
- G05B2219/32—Operator till task planning
- G05B2219/32368—Quality control
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Automation & Control Theory (AREA)
- General Factory Administration (AREA)
Abstract
The invention provides a raw material monitoring and managing system, which comprises: the system comprises a plurality of groups of identity information carrying units, a plurality of groups of first material information carrying units, a plurality of groups of second material information carrying units, a plurality of groups of third material information carrying units, a plurality of groups of machine station information carrying units, a plurality of portable electronic devices and at least one central monitoring system. Particularly, after the portable electronic device is used for reading the basic information carried by the information carrying units, the central monitoring system at the rear end can ensure that the operator can carry out raw material warehousing operation, raw material ex-warehouse operation, material using operation or recycling operation according to the standard operation program after confirming the authority of the operator, the state of the machine station and whether the data of the raw material are correct. In this way, all the operations can be ensured to be carried out under the electronic system management, any paper book record is eliminated, and the occurrence of artificial operation abnormity in the process of executing the related operation program of the raw material can be effectively avoided.
Description
Technical Field
The present invention relates to the field of semiconductor manufacturing technology, and more particularly, to a raw material monitoring and management system for assisting an operator of an integrated circuit manufacturing (IC foundry) to complete warehousing, ex-warehouse (return), use, and recycling of various raw materials under the monitoring of a back-end central monitoring system.
Background
Raw materials (Raw materials) generally refer to the main Raw materials, parts, or components that are directly put into production. The classification is carried out according to the operation mode, and the material management can be divided into transactional management and field management, and is characterized in that the transactional management comprises the following steps: material planning, material budget, stock control, quality control, price control, purchase procedure, material account arrangement and the like, and the field management comprises the following steps: warehousing, material acceptance, ex-warehouse, returning, inspection and test operation, checking and warehousing management, goods taking and the like. As can be seen from the above-listed classification details, the transactional management and the field management include both stock control (inventory and stock management) and quality control (material acceptance and inspection test work), and therefore, once the executive of the transactional management is the same as the executive of the field management, there is a high possibility that a work error occurs in the stock control and the quality control of the material.
For example, polishing slurry (slurry) or other Chemical liquids and filters (filter cores) are used in large quantities in Chemical Mechanical Polishing (CMP) equipment for semiconductor manufacturing processes, and special gases (e.g., NH3 or SiH 4) contained in special steel cylinders are also used in large quantities in diffusion equipment, chemical Vapor Deposition (CVD) equipment, atomic Layer Deposition (ALD) equipment, etching equipment, doping equipment, ion implantation equipment, and sputtering equipment for semiconductor manufacturing processes. Conceivably, the material container for the grinding fluid or other chemical fluid, the filter material, and the special gas is frequently subjected to operations such as material warehousing, material inspection, material return, material taking and use, and the like. Therefore, once the operations of material warehousing, material inspection, material return, material receiving and use and the like are not communicated with the stock control of the materials, the situation of insufficient stock of the materials has a great chance.
However, it can be known from the practical operation experience provided by the integrated circuit foundry (IC foundry) that the management of the stock and use of the raw material of the IC foundry is a major drawback; that is, the execution and history of the warehousing operation, the ex-warehouse (return) operation, the use operation, and the recovery operation of the raw material mostly pass through the paper book record. Although the content of the paper book records already covers important information such as the warehousing time of the material, the ex-warehousing time of the material, the name of an operator, the job number of the operator, the operation time, the material number for replacing the material, the on-machine time of the material, the off-machine time of the material and the like; however, once an abnormal manual operation occurs during the execution of the program, such as an operator replacing the material with an original material with a non-conforming material number, the manual operation error may cause a significant loss to the integrated circuit manufacturer (IC foundry) and its customers.
As is apparent from the above description, it is urgent for an integrated circuit manufacturing plant to synchronize and electronize operations of warehousing, shipping (returning), replacing, and using of various raw materials and operations of recycling operations with a history. In view of the above, the present inventors have made extensive research and creation, and finally have developed and completed a raw material monitoring and management system according to the present invention.
Disclosure of Invention
The invention mainly aims to provide a raw material monitoring and managing system, which comprises: the system comprises a plurality of groups of identity information carrying units, a plurality of groups of first material information carrying units, a plurality of groups of second material information carrying units, a plurality of groups of third material information carrying units, a plurality of groups of machine information carrying units, a plurality of portable electronic devices and at least one central monitoring system. Particularly, after the portable electronic device is used for reading the basic information carried by the information carrying units, the central monitoring system at the rear end can ensure that the operator can carry out raw material warehousing operation, raw material ex-warehouse operation, material using operation or recycling operation according to the standard operation program after confirming the authority of the operator, the state of the machine station and whether the data of the raw material are correct. In this way, all the operations can be ensured to be carried out under the electronic system management, any paper book record is eliminated, and the occurrence of artificial operation abnormity in the process of executing the program of the related operation of the raw material can be effectively avoided.
To achieve the above objective of the present invention, the present inventor provides an embodiment of the raw material monitoring and managing system, which includes:
the multiple groups of identity information carrying units are respectively arranged on the multiple operator identity cards;
the multiple groups of first material information carrying units are respectively arranged on the multiple groups of first material containers;
the multiple groups of second material information carrying units are respectively arranged on the multiple material conveying tools;
the multiple groups of third material information carrying units are respectively arranged on the multiple groups of second material containers;
multiple sets of machine information carrying units respectively arranged on the multiple sets of machines;
a plurality of portable electronic devices, each having a reading unit for reading the identity information carrying unit, the first material information carrying unit, the machine information carrying unit, and/or the second material information carrying unit; and
at least one central monitoring system, which is communicated with the portable electronic devices;
the portable electronic devices read the identification information carrying unit, the first material information carrying unit, the machine information carrying unit and/or the second material information carrying unit, and the central monitoring system can monitor and manage an operator holding the operator identification card to perform raw material warehousing operation, raw material ex-warehouse operation, material using operation or recycling operation.
The raw material monitoring and managing system further comprises: the multiple valve protection devices are respectively arranged on the multiple switching valve units.
The raw material monitoring and managing system further comprises: a transceiver device for communicating the central monitoring system with the portable electronic device; the control device is coupled between the central monitoring system and the plurality of sets of machines to enable the central monitoring system to monitor and control the operation states of the plurality of sets of machines; the control device is coupled between the plurality of groups of valve protection devices and the central monitoring system at the same time, so that the central monitoring system can start and stop any group of valve protection devices.
The raw material monitoring and managing system is characterized in that a specific material is accommodated in the first material accommodating device, and the specific material can be any one of the following materials: chemical fluid polishing slurry, abrasive slurry or other chemical liquid filter, chemical liquid, or chemical gas.
In the raw material monitoring and management system, a specific material is accommodated in the second material container, and the second material container is a chemical fluid accommodating groove or a chemical gas accommodating groove; the material conveying tool is a chemical tank car.
The raw material monitoring and managing system is characterized in that the first material container can be any one of the following: a liquid storage barrel for chemical fluid polishing liquid, a housing shell for grinding liquid or other chemical liquid filter materials, or a gas steel cylinder.
The raw material monitoring and management system, wherein the plurality of sets of machines comprise: at least one slurry or other chemical supply system, at least one slurry or other chemical filter system, at least one chemical supply system, at least one chemical gas supply system, at least one liquid storage tank shaking table, and at least one control door.
The original material monitoring and managing system, wherein the identification information carrying unit, the first material information carrying unit, the second material information carrying unit, the third material information carrying unit, and the machine information carrying unit may be any one of the following units: a figure, a character, a letter, a number, a one-dimensional barcode (1D barcode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.
The raw material monitoring and managing system, wherein the central monitoring system comprises: the raw material reloading monitoring module is used for monitoring and managing the operation of the operator to perform the material using operation or the recycling operation through the portable electronic device; a working machine setting management module for monitoring and managing the operation states of the plurality of groups of machines; a raw material reloading record module for storing and managing the history of the material using operation or the recycling operation; the data exchange module is used for storing and managing data transmission between the central monitoring system and the portable electronic device; an alarm recording module for storing and managing information and time of operation errors generated when the operator executes the raw material warehousing operation, the raw material ex-warehouse operation, the material using operation or the recycling operation; the personnel data management module is used for storing and managing basic data and operation permission of the operator; and a portable electronic device management module for managing the use states of the portable electronic devices.
The raw material monitoring and managing system, wherein the portable electronic device comprises: the raw material reloading operation management module is used for providing a plurality of operation pictures on a display screen of the portable electronic device so as to enable the operator to complete the material using operation or the recycling operation according to a standard operation program; the stock operation management module is used for providing a plurality of operation pictures on the display screen of the portable electronic device so as to enable the operator to complete the raw material warehousing operation or the raw material ex-warehousing operation according to a standard operation program; and a shaking operation management module for providing a plurality of operation pictures on the display screen of the portable electronic device so as to enable the operator to complete a shaking operation of the liquid storage barrel of the chemical fluid polishing solution according to a standard operation program.
Drawings
FIG. 1 is a diagram showing the construction of a raw material monitoring and management system according to the present invention;
FIG. 2 is a diagram showing the control architecture of the central monitoring system;
FIG. 3 is a perspective view of a first material holder;
FIG. 4 is a functional block diagram of the central monitoring system and the portable electronic device;
FIG. 5 is a schematic diagram showing a monitoring screen of the central monitoring system;
FIG. 6 is a detailed functional block diagram of the raw material reloading operation management module of the portable electronic device;
FIG. 7 is a detailed functional block diagram of the inventory management module of the portable electronic device; and
FIG. 8 is a view showing an operation screen of the original material reloading recording interface.
Reference numerals:
identity information carrying unit 21
First material information carrying unit 31
Second material information carrying unit 61
Third material information carrying unit 71
Machine information carrying unit 41
Portable electronic device 5
Control device SP
Central monitoring system CSRC
Operator personal identification card 2
Machine table 4
Raw material reloading monitoring module 11
Working machine setting management module 12
Raw material reloading recording module 13
Personnel data management module 16
Portable electronic device management module 17
Raw material reloading operation management module 51
Inventory job management module 52
Shaking work management module 53
Setting module 54
Raw material reloading monitoring interface 11T
Working machine setting management interface 12T
Raw material reloading recording interface 13T
Personnel data management interface 16T
Portable electronic device management interface 17T
Monitoring picture MS
Chemical conversion work management unit 511
Gas reloading operation management unit 512
Tank car filling/extraction operation management unit 513
Filter element changing job management unit 514
Material warehousing operation management unit 521
Valve protection device AD
Detailed Description
In order to more clearly describe a raw material monitoring and management system of the present invention, a preferred embodiment of the present invention will be described in detail below with reference to the drawings.
Fig. 1 is a diagram showing an architecture of a raw material monitoring and managing system according to the present invention. As shown in fig. 1, the raw material monitoring and managing system of the present invention has a structure including: a plurality of groups of identity information carrying units 21, a plurality of groups of first material information carrying units 31, a plurality of groups of second material information carrying units 61, a plurality of groups of third material information carrying units 71, a plurality of groups of machine station information carrying units 41, a plurality of portable electronic devices 5, and at least one central monitoring system CSRC. Please refer to fig. 2, which shows a control architecture diagram of the central monitoring system. As shown in fig. 1 and fig. 2, the central monitoring system CSRC monitors and manages the operation states of a plurality of sets of machines 4 through at least one control device SP, and the plurality of sets of machines 4 include: at least one slurry or other chemical supply system, at least one slurry or other chemical filtration system, at least one chemical supply system, at least one chemical gas supply system, at least one liquid storage tank shaker table, and at least one control gate. For example, the central monitoring system CSRC may unlock or enable a door lock of a control door of a large chemical storage tank through the control device SP, and may also unlock or enable a cabinet lock of a slurry or other chemical supply system. It is worth mentioning that the Control device SP comprises one of a Programmable Logic Controller (PLC) or a Direct Digital Controller (DDC) or an Object link and Embedding device (OLE) or an OLE device for Process Control (OPC). Referring to fig. 1 again, in addition, the communication protocol between the transceiver R and the portable electronic device 5 may be a wireless communication network including WIFI, 3G, 4G, bluetooth, zigbee, etc., and the communication protocol between the transceiver R and the central monitoring system CSRC may be a wireless communication network or a wired communication network, which is characterized in that the wireless communication network includes WIFI, 3G, 4G, bluetooth, zigbee, etc.
It should be noted that, although fig. 1 shows that the multiple groups of identity information carrying units 21 are disposed on multiple operator identity cards 2, it is advantageous to further dispose the identity information carrying units 21 on the identity card of a transportation operator (e.g., a driver of a chemical tank car) and an inspector identity card to expand the management and monitoring range. On the other hand, the plurality of first product information carrying units 31 are disposed on the plurality of first product containers 3, the plurality of second product information carrying units 61 are disposed on the plurality of product carriers 6, and the plurality of third product information carrying units 71 are disposed on the plurality of second product containers 7. To facilitate understanding of the technical features of the present invention, the following table (1) is an exemplary unit or apparatus which arranges the first material container 3, the material conveying means 6 and the second material container 7.
Watch (1)
As shown in the upper table (1) and the perspective view of the different first material container shown in fig. 3, it can be seen that the first material container 3 belongs to a small-sized material container unit, such as a liquid storage barrel, a container shell of grinding liquid or other chemical liquid filter material, or a gas cylinder. On the other hand, it can be seen from the above table (1) and fig. 1 and 2 that the second material container 7 is a large material container unit, such as a chemical fluid container or a chemical gas container. It must be particularly emphasized that the exemplary units or devices listed in table (1) above are used to understand the technical features of the present invention, and are not intended to limit the technical scope of the present invention. Furthermore, the present invention further arranges a plurality of sets of tool information carrying units 41 on the plurality of sets of tools 4. With such an arrangement, the operator can know the current operating status of any machine 4 from the central monitoring system CSRC by reading any set of machine information carrying units 41 through a reading unit 51 of the portable electronic device 5. For example, if the machine 4 is currently in use, the operator is not allowed to open the cabinet door lock of the machine 4, and is not allowed to take out the first material container 3 from the machine 4.
The raw material monitoring and management system of the invention is mainly realized by reading any information carrying unit (21, 31,61,71, 41) by using the portable electronic device 5. In order to more clearly describe the operation architecture of the raw material monitoring and management system proposed by the present invention, the following description is continued with an appropriate diagram. With continuing reference to fig. 1 and fig. 2, and with further reference to fig. 4, functional block diagrams of the central monitoring system and the portable electronic device are shown. In particular, the present invention provides a raw material reloading monitoring module 11, a work station setting management module 12, a raw material reloading recording module 13, a data exchange module 14, an alarm recording module 15, a personnel data management module 16, and a portable electronic device management module 17 in the central monitoring system CSRC. Besides, the portable electronic device 5 is provided with a raw material reloading operation management module 51, a stock operation management module 52, a shaking operation management module 53 and a setting module 54.
With continuing reference to fig. 1, fig. 2 and fig. 4, please also refer to fig. 5, which shows a schematic view of the monitoring screen of the central monitoring system. As shown in the figure, in the monitoring picture MS of the central monitoring system CSRC, the raw material reloading monitoring module 11, the work machine setup management module 12, the raw material reloading recording module 13, the data exchange module 14, the alarm recording module 15, the personnel data management module 16, and the portable electronic device management module 17 are all presented with interface options that can be clicked by the monitoring personnel at the rear, and include the raw material reloading monitoring interface 11T, the work machine setup management interface 12T, the raw material reloading recording interface 13T, the data exchange interface 14T, the alarm recording interface 15T, the personnel data management interface 16T, and the portable electronic device management interface 17T.
Specifically, fig. 5 shows that the raw material reloading monitoring interface 11T has been clicked by a monitoring person; that is, the current monitoring picture MS displays a raw material reloading monitoring picture. Further, the monitoring personnel can directly click any machine 4 displayed in the monitoring picture MS, and then directly enter the operation picture for the monitoring personnel to execute the setting and management of the working machine. Or, after the monitoring personnel selects the working machine setting management interface 12T, the monitoring screen MS is switched to the next operation screen, so that the monitoring personnel can set and manage the working machine on the operation screen. Similarly, after the personnel data management interface 16T is clicked, the monitoring personnel behind can perform maintenance management of the personnel data on the operation screen. The personnel data referred to herein are the identity data and the authority range of the aforementioned operators, transporters (e.g., drivers of chemical tankers) and inspectors.
Since the raw material monitoring and management system of the present invention is mainly implemented based on reading any information carrying unit (21, 31,61,71, 41) by using the portable electronic devices 5, the plurality of portable electronic devices 5 must be uniformly managed by a monitoring center. In short, before an operator uses any one of the portable electronic devices 5, the portable electronic device 5 must read the identity information carrying unit 21 on the operator identity card 2 held by the operator, so as to complete the borrowing application of the portable electronic device 5. Then, the portable electronic device management module 17 of the central monitoring system CSRC manages the usage statuses of all the portable electronic devices 5. Of course, a monitoring person behind can click the portable electronic device management interface 17 on the monitoring screen MS shown in fig. 5, so that the monitoring screen MS is switched to an operation management screen of the portable electronic device management interface 17. Thus, in the operation management screen, a rear monitoring person can query the borrowing record and the use state of any portable electronic device 5.
Please refer to fig. 6 and fig. 7, which are detailed functional block diagrams respectively showing the raw material reloading operation management module and the stock operation management module of the portable electronic device. As can be seen from fig. 4 and 6, the raw material reloading operation management module 51 of the portable electronic device 5 has a plurality of detailed functional units, including: a chemical reloading operation management unit 511, a gas reloading operation management unit 512, a tank car filling/extracting operation management unit 513, and a filter core reloading operation management unit 514. The inventory management module 52 of the portable electronic device 5 also has a plurality of detailed functional units, including: a material warehousing operation management unit 521 and a material returning operation 522.
For example, when performing a chemical replacement operation on any one of the slurry or other chemical supply systems, the operator needs to confirm that the slurry or other chemical supply system has been stopped by reading the machine information carrying unit 41 with the portable electronic device 5, and then read the operator identification card 2 held by the operator and the first material information carrying unit 31 marked on the tank (i.e., the first material container 3) of the chemical fluid polishing solution with the portable electronic device 5. After the above operations are completed, the monitoring frame MS will alert the slurry or other chemical supply system with a specific color that a material (replacement) operation is being performed. Of course, only when the data of the operator, the data of the machine and the data of the material meet the specifications at the same time, the central monitoring system CSRC releases the lock of the cabinet of the grinding fluid or other chemical fluid supply system through the control device SP, so that the operator can take out the exhausted liquid storage barrel from the cabinet of the grinding fluid or other chemical fluid supply system and then replace the exhausted liquid storage barrel with a new liquid storage barrel.
In order to facilitate the portable electronic device 5 to read the information carried by any one of the information carrying units (21, 31,61,71, 41), the present invention particularly makes the identity information carrying unit 21, the first material information carrying unit 31, the second material information carrying unit 61, the third material information carrying unit 71, and the machine information carrying unit 41 all present with a specific code, and the specific code can be any one of the following: a figure, a character, a letter, a number, a one-dimensional barcode (1D barcode), a two-dimensional barcode (2D barcode), a Chinese-sensible code (Chinese-sensible code), a QR code, a matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.
Taking a one-dimensional bar Code (1D barcode) as an example, the first material information carrying unit 31 can be manufactured by using a Code 39 barcode generator, and carries the name, lot number, expiration date, and serial number of the specific material contained in the material container 3. It should be noted that, in order to facilitate the portable electronic device 5 to clearly read the name, lot number, expiration date, and serial number, when the one-dimensional bar code of the first material information carrying unit 31 is manufactured, a Central separating character (e.g.%, $,/, | and | is inserted between two adjacent basic information! @, # &, #, +), -, |, {, },? ", or +.
It is understood that the reading unit 51 of the portable electronic device 5 may be any one of the following units, corresponding to the information carrying units (21, 31,61,71, 41) of different embodiments: an RFID tag reader, an NFC tag reader, an image identifier, a one-dimensional barcode reader, a two-dimensional barcode reader, a hanseng code reader, a QR code reader, a matrix barcode reader, or an image grabber. If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or a smart watch, the image capturing module built in the portable electronic device 5 can be directly used as the reading unit 51; thus, after the portable electronic device 5 is installed with an image (or barcode) recognition software, the portable electronic device 5 can complete the reading of the identity information carrying unit 21, the first material information carrying unit 31, the second material information carrying unit 61, the third material information carrying unit 71, and/or the machine information carrying unit 41 by using the reading unit 51 and the image recognition unit in a matching manner. However, since most integrated circuit manufacturers (IC foundries) prohibit the use of any type of smart electronic device in the factory, a Personal Digital Assistant (PDA) with a barcode scanner (i.e., the reading unit 51) is the best mode for implementing the portable electronic device 5.
After the material (replacement) use operation is completed, a rear monitoring person can select the original material reloading recording interface 13T on the monitoring picture MS shown in fig. 5, so that the monitoring picture MS switches and displays the operation picture of the original material reloading recording interface shown in fig. 8. Thus, in the operation screen of the raw material change record interface 13T, the rear monitoring personnel can inquire the raw material change record of any machine 4, including the machine name, the material number, the material batch number, the change status, the operator, the material on-machine time, the material off-machine time, and other important information records. On the other hand, it should be added that, since the material monitoring management system of the present invention is mainly implemented by using the portable electronic device 5 to read any kind of information carrying units (21, 31,61,71, 41), after clicking the data exchange interface 14T of the monitoring screen MS shown in fig. 5, the following monitoring personnel can view each data transmission record between the central monitoring system CSRC and the portable electronic device 5. After clicking the alarm recording interface 15T of the monitoring screen MS shown in fig. 5, the rear monitoring personnel can inspect the information and time of the operation error of the operator while performing the raw material warehousing operation, the raw material ex-warehousing operation, the material using operation, or the recycling operation.
It is inferred that before the operator enters/exits the warehouse, the operator must hold the portable electronic device 5 to complete the reading of the identification information carrying unit 21 and the first material information carrying unit 31; then, the inventory operation management module 52 of the portable electronic device 5 provides a plurality of operation screens to enable the operator to complete the stock-in operation or the stock-out operation of the raw material according to a standard operation procedure. Similarly, before the operator performs the shaking operation of the liquid storage barrel of the chemical fluid polishing solution, the operator must hold the portable electronic device 5 to complete the reading of the identity information carrying unit 21 and the first material information carrying unit 31; then, the swing operation management module 53 of the portable electronic device 5 provides a plurality of operation screens to enable the operator to complete a swing operation of the liquid storage tank of the chemical fluid polishing solution according to a standard operation procedure.
It should be noted that, when the tank car filling/draining operation is managed, as shown in fig. 1 and fig. 2, the control device SP must be coupled between the plurality of sets of valve protection devices AD and the central monitoring system CSRC, so that the central monitoring system CSRC activates and deactivates any one set of valve protection devices AD. The main reason is that most of the chemicals (including chemical liquid and chemical gas) transported by the material transport means 6 (i.e. chemical tanker) are highly dangerous, so that when the operator performs the filling operation or the extraction (recycling) operation of the chemicals according to the standard operation procedure provided by the tanker filling/extraction operation management unit 513, the central monitoring system CSRC will release the valve protection device AD after confirming that all the data are correct, and at this time, the operator and the transport personnel can proceed to move the chemical tanker (i.e. material transport means 6) to the designated chemical tank plant area and replenish the chemicals into the designated large chemical storage tank (i.e. second material storage container 7). Or the operator and the transport personnel can start to drive the chemical tank car to a specified chemical tank plant area and draw out the chemical waste liquid from the large chemical containing tank.
Similarly, when the gas replacement work is managed, the activation and deactivation of the valve protection device AD is also controlled by the central monitoring system CSRC. The main reason is that since most of the special gases (e.g., NH3 or SiH 4) used in the semiconductor manufacturing process are highly dangerous, when the operator performs the replacement of the special gas cylinder according to the standard operation procedure provided by the gas replacement operation management unit 512, the central monitoring system CSRC will release the valve protection device AD after confirming that all data are correct, and at this time, the operator and the carrier can proceed with the replacement of the gas cylinder.
Thus, the above is a complete and clear description of the present invention of a raw material monitoring and management system; moreover, the invention has the following advantages by the above description:
(1) The invention provides a raw material monitoring and managing system, which comprises: a plurality of groups of identity information carrying units 21, a plurality of groups of first material information carrying units 31, a plurality of groups of second material information carrying units 61, a plurality of groups of third material information carrying units 71, a plurality of groups of machine station information carrying units 41, a plurality of portable electronic devices 5, and at least one central monitoring system CSRC. Particularly, after the portable electronic device is used for reading the basic information carried by the information carrying units (21, 31,61,71, 41), the central monitoring system CSRC at the back end can ensure that the operator can carry out a raw material warehousing operation, a raw material ex-warehouse operation, a material using operation or a recycling operation according to standard operation programs after confirming the authority of the operator, the state of the machine and whether the data of the raw materials are correct. In this way, all the operations can be ensured to be carried out under the electronic system management, any paper book record is eliminated, and the occurrence of artificial operation abnormity in the process of executing the program of the related operation of the raw materials can be effectively avoided.
It should be emphasized that the above detailed description is specific to possible embodiments of the invention, but the embodiments are not intended to limit the scope of the invention, and all equivalent implementations or modifications that do not depart from the technical spirit of the invention are intended to be included within the scope of the present invention.
Claims (9)
1. A raw material monitoring and management system is characterized by comprising:
the multiple groups of identity information carrying units are respectively arranged on the multiple operator identity cards;
the multiple groups of first material information carrying units are respectively arranged on the multiple groups of first material containers, wherein a specific material is contained in each first material container;
the multiple groups of second material information carrying units are respectively arranged on the multiple material conveying tools, wherein the material conveying tools are chemical tank cars;
the multiple groups of third material information carrying units are respectively arranged on the multiple groups of second material containers;
the second material container stores a specific material;
multiple sets of machine information carrying units arranged on the multiple sets of machines;
the portable electronic devices are provided with a reading unit for reading the identity information carrying unit, the first material information carrying unit, the machine station information carrying unit and/or the second material information carrying unit; and
at least one central monitoring system, which is communicated with the portable electronic devices;
the central monitoring system can monitor and manage an operator holding the operator identity card to perform raw material warehousing operation, raw material ex-warehouse operation, material using operation or recycling operation;
wherein, the central monitoring system includes:
the raw material reloading monitoring module is used for monitoring and managing the operation personnel to carry out the material using operation or the recycling operation through the portable electronic device;
a working machine setting management module for monitoring and managing the operation states of the plurality of groups of machines;
a raw material reloading record module for storing and managing the history of the material using operation or the recycling operation;
the data exchange module is used for storing and managing data transmission between the central monitoring system and the portable electronic device;
an alarm recording module for storing and managing information and time of operation errors of the operator when the operator performs the raw material warehousing operation, the raw material ex-warehouse operation, the material using operation or the recycling operation;
the personnel data management module is used for storing and managing basic data and operation permission of the operator; and
and the portable electronic device management module is used for managing the use states of the plurality of portable electronic devices.
2. The raw material monitoring and managing system according to claim 1, further comprising:
the multiple groups of valve protection devices are respectively arranged on the multiple groups of switching valve units.
3. The raw material monitoring and managing system according to claim 2, further comprising:
a transceiver device for communicating the central monitoring system with the portable electronic device; and
the control device is coupled between the central monitoring system and the plurality of sets of machines to enable the central monitoring system to monitor and control the operating states of the plurality of sets of machines; the control device is coupled between the plurality of groups of valve protection devices and the central monitoring system at the same time, so that the central monitoring system can start and stop any group of valve protection devices.
4. The raw material monitoring and management system according to claim 1, wherein the specific material is any one selected from the group consisting of a chemical fluid polishing liquid, a grinding liquid, a chemical liquid filter material, a chemical liquid, and a chemical gas.
5. The raw material monitoring and managing system according to claim 1, wherein the second material container is a chemical fluid container or a chemical gas container.
6. The raw material monitoring and managing system according to claim 4, wherein the first material container is any one selected from the group consisting of a liquid storage tank for chemical polishing fluid, a liquid storage tank for polishing fluid, a housing for chemical filtering material, and a gas cylinder.
7. The raw material monitoring and management system according to claim 4, wherein the plurality of sets of machines include: at least one slurry or other chemical supply system, at least one slurry or other chemical filter system, at least one chemical supply system, at least one chemical gas supply system, at least one liquid storage tank shaking table, and at least one control door.
8. The raw material monitoring and managing system according to claim 1, wherein the identification information carrying unit, the first material information carrying unit, the second material information carrying unit, the third material information carrying unit, and the machine information carrying unit are any one of: a graphic, a text, a letter, a number, a one-dimensional barcode, a two-dimensional barcode, a han-xin code, a QR code, a matrix barcode, an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above.
9. The raw material monitoring and management system of claim 6, wherein the portable electronic device comprises:
the raw material reloading operation management module is used for providing a plurality of operation pictures on a display screen of the portable electronic device so as to enable the operator to complete the material using operation or the recycling operation according to a standard operation program;
the stock operation management module is used for providing a plurality of operation pictures on the display screen of the portable electronic device so as to enable the operator to complete the stock-in operation or the stock-out operation of the raw materials according to a standard operation program; and
and the swinging operation management module is used for providing a plurality of operation pictures on the display screen of the portable electronic device so as to enable the operator to complete the swinging operation of the liquid storage barrel of the chemical fluid polishing solution according to a standard operation program.
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Citations (1)
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| JP2003071660A (en) * | 2001-09-03 | 2003-03-12 | Matsushita Electric Ind Co Ltd | Material exchange monitoring method and its system |
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| JP2001171935A (en) * | 1999-12-16 | 2001-06-26 | Hitachi Building Systems Co Ltd | Maintenance work management device |
| US7136832B2 (en) * | 2000-12-07 | 2006-11-14 | Savi Technology, Inc. | Supply chain visibility for real-time tracking of goods |
| TWI237210B (en) * | 2003-09-08 | 2005-08-01 | Kinetics Taiwan Co Ltd | Barrel barcodes recognition system |
| JP2005251032A (en) * | 2004-03-05 | 2005-09-15 | Chugoku Electric Power Co Inc:The | Equipment operation management method, equipment operation management system and portable electronic apparatus |
| TWI251161B (en) * | 2004-12-24 | 2006-03-11 | Ind Tech Res Inst | A system and method for providing accurate, real-time, and synchronize view of supply chain information using RFID technologies |
| US20080011839A1 (en) * | 2005-10-03 | 2008-01-17 | Joseph David Noll | Material hauling and delivery monitoring system |
| CN106326953A (en) * | 2016-08-31 | 2017-01-11 | 深圳市玖坤信息技术有限公司 | Production information recording system and method for product |
| WO2018133013A1 (en) * | 2017-01-19 | 2018-07-26 | 深圳市兰洋科技有限公司 | Management system for filling restriction using gas cylinder valve |
| CN107270118A (en) * | 2017-07-27 | 2017-10-20 | 沈阳科汇生产力促进中心有限公司 | A kind of liquid gas storage tank filling and anti-leak remote monitoring system and application method safely |
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| JP2003071660A (en) * | 2001-09-03 | 2003-03-12 | Matsushita Electric Ind Co Ltd | Material exchange monitoring method and its system |
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