TWM575576U - Chemical fluid supplementing and recycling system - Google Patents

Abstract

The present invention provides a fluid filling and extracting system, comprising: at least a first identity message carrying unit, at least one second identity message carrying unit, at least one item message carrying unit, and at least one slot message carrying unit At least one accommodating slot message carrying unit and at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system of the back end can confirm whether the operator has the function of performing fluid filling and/or Allowing the operator to perform fluid filling and/or extraction after the operating authority of the extraction (recycling) operation and the information on the materials contained in the item contained in the item container 3 (ie, the chemical tanker) are correct. (Recycling) operations. In this way, it is ensured that the filling operation and the extraction operation and the related records are all carried out under the electronic system management, and any paper recording is exempted, so that it can effectively avoid any human operation abnormality or complete in a non-compliant standard operating procedure. Related work.

Description

Fluid filling and extraction system

The present invention relates to the technical field of semiconductor manufacturing, and more particularly to a fluid filling and extraction system and method for assisting an operator of an integrated circuit manufacturing plant (IC foundry) to complete chemical capacity under the supervision of a central monitoring system at the back end. Filling and recovery of the chemical containing tank.

The process of semiconductor integrated circuits includes basic semiconductor processes such as thin film deposition, diffusion, lithography, ion implantation, etc.; and in the process of fabricating semiconductor integrated circuits, a large amount of chemicals must be used to meet the process requirements. In particular, the manufacture of semiconductor integrated circuits must always keep the production process uninterrupted, so the supply of these chemicals must also be maintained uninterrupted. For this reason, at the time of plant planning, the integrated circuit manufacturer will specifically plan at least one specific chemical tank plant area to serve as a large-scale chemical storage tank.

Currently, chemical suppliers use a large chemical tanker to load the finished chemicals. It is conceivable that when the integrated circuit manufacturer replenishes various chemicals, it will drive the chemical tanker directly to the chemical tank plant area, thereby directly replenishing the chemical to the designated large chemical storage tank. Among them, the chemical replenishment work is completed. However, the chemicals used in semiconductor processes are often highly hazardous, such as flammability, toxicity, oxidation, and corrosive properties. Once the operator's job negligence or system failure occurs during chemical replenishment operations, it is extremely It may cause chemical leakage or chemical reaction between different chemicals. After the trigger, it is not only a huge financial loss, but also more likely to cause casualties and environmental pollution.

As can be seen from the above description, the operation safety of the tanker operation is extremely dangerous. Therefore, it is very important for the integrated circuit manufacturer to synchronize the filling and extraction operations of the large chemical tank. In this way, the factory tube of the integrated circuit manufacturer can completely and comprehensively monitor whether the process of filling and extracting large chemical tanks is correct and whether the operator has relevant execution authority through the central control system. In view of this, the creator of the present invention tries to research and create, and finally develops a fluid filling and extraction system and method of the present invention.

The main purpose of the present invention is to provide a fluid filling and extracting system, comprising: at least a first identity message carrying unit, at least one second identity message carrying unit, at least one item message carrying unit, at least one slot area The message carrying unit, the at least one receiving slot message carrying unit, and the at least one portable electronic device. In particular, after the portable electronic device reads the basic information carried by the message carrying units with its reading unit, the central monitoring system of the back end can confirm whether the operator has the function of performing fluid filling and/or Allowing the operator to perform fluid filling and/or extraction after the operating authority of the extraction (recycling) operation and the information on the materials contained in the item contained in the item container 3 (ie, the chemical tanker) are correct. (Recycling) operations. In this way, it is ensured that the filling operation and the extraction operation and the related records are all carried out under the electronic system management, and any paper recording is exempted, so that it can effectively avoid any human operation abnormality or complete in a non-compliant standard operating procedure. Related work.

In order to achieve the above-mentioned primary object of the present invention, the creator of the present invention provides an embodiment of the fluid filling and extracting system, comprising: at least one first identity message carrying unit disposed on at least one operator identity card At least one item message carrying unit is disposed on at least one item container, and the item container is provided with a specific item; at least one slot area message carrying unit is The at least one accommodating groove information carrying unit is disposed on the at least one fluid accommodating groove, and the at least one fluid accommodating groove is disposed at the regulating door of the sump area And the at least one portable electronic device has a reading unit; wherein the portable electronic device can read the item by the reading unit The message carrying unit confirms whether the specific item accommodated by the item container needs to be subjected to a filling operation to fill the specific item from the item container to the specific fluid The accommodating slot and the specific accommodating slot; wherein, by the reading unit, the portable electronic device can read the slot carrying unit and the accommodating slot carrying unit Determining whether the particular item contained in the fluid receiving tank needs to perform an extraction operation; wherein, by the reading unit, the portable electronic device can read the first identity message carrying unit Confirm that the operator holding one of the operator's identity cards has the authority to execute the fill job and the extract job.

In an embodiment of the fluid filling and extracting system of the present invention, the method further includes: at least one second identity message carrying unit disposed on the at least one carrier personnel card of the item container; at least one The slot valve message carrying unit is disposed on the at least one switching valve unit, and the switching valve unit is configured to switch the fluid input and the fluid in and out of the fluid receiving slot; at least one valve protection device is mounted on the At least one switching valve unit; and a central monitoring system communicates with the portable electronic device through a transceiver device, and monitors and controls the access control of the control door of the slot through a control device, and transmits the control The device activates or deactivates the activation and release of the valve protection device.

In an embodiment of the fluid filling and extraction system of the present invention, the specific item is a chemical fluid (for example, a chemical liquid or a chemical gas), the material container is a chemical tanker, and the fluid volume is The tank is a chemical receiving tank or a chemical waste receiving tank.

In order to more clearly describe a fluid filling and extraction system and method proposed by the present invention, a preferred embodiment of the present invention will be described in detail below with reference to the drawings.

The process of semiconductor integrated circuits uses many chemicals, which are usually chemical fluids, including chemical liquids (or pure liquids) and chemical gases. The common chemical finishing is shown in Table (1) below. Table 1)  <TABLE border="1" borderColor="#000000" width="85%"><TBODY><tr><td> Process</td><td> Method</td><td> Chemicals</td ></tr><tr><td> Yellow light</td><td> lithography etching (positive photoresist) </td><td> Ortho-diazoketone, Polymethacrylate, Polyfluoroalkylmethacrylate, NaOH, KOH, Ethylene Glycol, IPA , Ethanolamine </td></tr><tr><td> lithography (negative photoresist) </td><td> Isoprene, Ethyl Acrylate, Xylene, n-Butyl, Acetone, IPA </td>< /tr><tr><td> Etch</td><td> Wet </td><td> H₂SO₄, H₂O₂, H₃PO₄, HNO₃, HF, HCl </td> </tr><tr><td> dry </td><td> Cl₂, HBr, CF₄, SF₆, CHF₃, F₂, CCl₄, H2, BCl₃, Freons </td></tr ><tr><td> Oxidation</td><td> - </td><td> Trichloroethane, Trichloroethylene </td></tr><tr><td> Deposition</td><td> - < /td><td> SiH₄, SiCl₄, NH₃, N₂O, WF<sub >6</sub>, AsH<sub>3</su> b>, PH₃, B₂H₆</td></tr><tr><td> thin film</td> <td> - </td><td> AsH₆, PH3, PF5, BF3, B2H6 </td></tr><tr><td> Clean</td><td> - </td><td> H₂O, IPA, Methanol, Acetone, H2O2, H2SO4, 1,1,1-Trichloroethane, C2F6, NF3, HCl </td></tr> </TBODY></TABLE>

The novel fluid filling and extraction system is used to manage the filling and extraction (recycling) of these chemicals. In particular, the term "chemical filling" means that the chemical tanker is driven to a designated chemical tank plant and the chemicals are replenished into a designated large chemical holding tank. The "chemical extraction (recycling)" means that the chemical tanker is driven to a designated chemical tank plant area, and the chemical waste liquid or chemical gas is extracted from the designated large-scale chemical waste storage tank (recycling). .

First embodiment

Referring to Figure 1, there is shown a block diagram of a first embodiment of a fluid filling and extraction system of the present invention. As shown in FIG. 1 , the fluid filling and extracting system of the present invention mainly comprises: at least a first identity message carrying unit 21, at least one second identity message carrying unit 81, and at least one item information carrying The loading unit 31, the at least one slot information carrying unit 41, the at least one receiving slot message carrying unit 61, the at least one portable electronic device 5, and a central monitoring system CSRC. According to the design of the present invention, the first identity message carrying unit 21 is disposed on an operator identity card 2, and the second identity message carrying unit 81 is disposed on at least one of the item receivers 3. The person is transported above the card 8, for example, the driver of the chemical tanker. It is conceivable that the item container 3 referred to herein is a chemical tanker as shown in FIG. It is added that the first identity message carrying unit 21 is used to carry basic information of an operator who holds the operator identity card 2, including: name, job number, belonging unit, rank, and whether the chemical is completed. Qualify for replenishment (filling) operations and waste extraction (recycling) operations. Of course, the operator who completes the qualification test will be allowed to perform related operations.

On the other hand, the item information carrying unit 31 is disposed on the chemical tanker (ie, the item container 3) for carrying a plurality of specific items transported by the chemical tanker. Basic information, including: product name (or item number), batch number, shipping tool number (ie, chemical tanker number), effective date, and serial number. For example, the product name can be used to indicate that the particular item is a chemical liquid or a chemical gas. On the other hand, it can be seen from the above table (1) that there are many types of chemical liquids and chemical gases used by IC foundry. Therefore, the present invention is particularly provided with at least one groove information carrying unit 41. A trough area is above the control door 4. It is conceivable that at least one fluid accommodating groove area is planned behind the tank control door 4, and the fluid accommodating groove area is usually provided with different fluid capacities according to the application process of the chemical type. Set slot 6. In the present invention, at least one accommodating slot message carrying unit 61 is disposed on at least one fluid accommodating groove 6.

As can be seen from the above description, the unit "at least one" is used to indicate that the number of the five message carrying units (21, 81, 31, 41, 61) is one or more. In other words, the exact number of the five message carrying units (21, 81, 31, 41, 61) is determined by the operator identity card 2, the carrier personnel card 8, the item container 3 (ie, the chemical tanker), the tank control door 4, and the number of the fluid receiving tank 6. On the other hand, the portable electronic device 5 has a reading unit 51. With the reading unit 51, the portable electronic device 5 can confirm whether the specific item accommodated by the item container 3 needs to be executed by reading the item information carrying unit 31. A filling operation is performed to fill the particular item from the item container 3 to a particular fluid containing tank zone and a particular fluid containing tank 6. In addition, the portable electronic device 5 can confirm whether the fluid receiving slot 6 is in the manner of reading the slot information carrying unit 41 and the receiving slot message carrying unit 61 by the reading unit 51. The specific item to be accommodated needs to perform an extraction operation. Of course, before performing the filling operation or the extracting (recycling) operation of the chemical, the portable electronic device 5 must first confirm the presence of the operator by reading the first identity message carrying unit 21. Whether the operator of the card 2 has the authority to execute the filling job and the extraction job.

Moreover, as shown in FIG. 1 , the portable electronic device 5 communicates with a central monitoring system CSRC through a transceiver R, and the communication protocol between the transceiver R and the portable electronic device 5 may be a wireless communication network. Including WIFI, 3G, 4G, Bluetooth, Zigbee, etc., the communication protocol between the transceiver R and the central monitoring system CSRC can be a wireless communication network or a wired communication network, wherein the wireless communication network includes WIFI, 3G, 4G, Bluetooth, Zigbee Wait. And the central monitoring system CSRC monitors and controls the access control of the control door 4 through a control device 7 to prevent the factory personnel, operators, or drivers of the chemical tanker (ie, the chemical carrier) The slot control door 4 is opened arbitrarily, wherein the control device 7 includes a Programmable Logic Controller (PLC) or a Direct Digital Controller (DDC) or an Object Linking and Embedding (Object Linking and Embedding, OLE) or one of OLE for Process Control (OPC) for process control. It is conceivable that after the reading of the slot information carrying unit 41 and the item message carrying unit 31 is completed, the portable electronic device 5 can learn the chemical tank truck from the central monitoring system CSRC. (that is, whether the specific item carried by the item container 3) and the chemical container tank 6 disposed behind the tank control door 4 are all the same chemical fluid or chemical gas. It can be inferred that after the above confirmation is completed, the chemical transporter and the operator of the integrated circuit manufacturer will be allowed to proceed to the subsequent procedure of the next chemical filling operation. This confirmation method is to prevent the transporter and the operator from accidentally filling the chemical transported by the tanker into the wrong fluid accommodating tank 6.

It should be particularly noted that although FIG. 1 shows the first identity message carrying unit 21, the second identity message carrying unit 81, the item message carrying unit 31, the slot information carrying unit 41, and The accommodating slot message carrying unit 61 is a 1D barcode. However, the implementation of the message carrying unit (21, 31, 41, 61) should not be limited. The first identity message carrying unit 21, the second identity message carrying unit 81, the item message carrying unit 31, the slot information carrying unit 41, and the receiving device are used in the actual application of the present invention. The slot message carrying unit 61 can be any of the following: graphics, text, letters, numbers, 1D barcode, 2D barcode, Chinese-sensible code, QR code, A matrix barcode (Maxicode), an RFID tag, an NFC tag, a combination of any two of the above, or a combination of any two or more of the above. Taking a 1D barcode as an example, the item message carrying unit 31 can be manufactured by using a Code 39 barcode generator and carrying the product name of the specific item contained in the item container 3 ( Item number), batch number, effective date, and serial number. It should be particularly noted that, in order to facilitate the portable electronic device 5 to clearly read the product name (item number), batch number, shipping tool number, expiration date, and serial number, the one-dimensional barcode of the item information carrying unit 31 is prepared. A central seperating character must be inserted between two adjacent basic messages, for example: %, $, /, ~, !, @, #, ^, &, *, (,), -, _, |, {, }, ?, <, >, \, [,] or +.

It is conceivable that the message carrying unit (21, 81, 31, 41, 61) corresponding to different implementations, the reading unit 51 of the portable electronic device 5 can be any of the following: RFID tag reading , NFC tag reader, image recognizer, 1D barcode reader, 2D barcode reader, Hanxin code reader, QR code reader, matrix barcode reader, or image capturer . If the portable electronic device 5 is a smart phone, a personal digital assistant, a notebook computer, a tablet computer, a smart glasses, or a smart watch, the image capturing module built in the portable electronic device 5 can be directly used as the smart phone. The reading unit 51; after the image (or barcode) recognition software is installed in the portable electronic device 5, the portable electronic device can be used by using the reading unit 51 and the image recognition unit. The device 5 completes the first identity message carrying unit 21, the second identity message carrying unit 81, the item message carrying unit 31, the slot message carrying unit 41, and/or the receiving slot message carrying The reading of the loading unit 61. However, in view of the fact that most integrated circuit manufacturers prohibit the use of any type of smart electronic device in the factory, a personal digital assistant (PDA) equipped with a barcode scanner (ie, reading unit 51) is provided. This is the preferred embodiment of the portable electronic device 5.

With continued reference to FIG. 1, and also to FIG. 2, a perspective view of the portable electronic device is shown. It should be noted that although the portable electronic device 5 can read the first identity message carrying unit 21, it is confirmed whether the operator holding the operator identity card 2 has the filling operation and the extraction operation of the chemical. Operational authority, but considering that the lower-ranking operator may borrow the operator's identity card 2 of the higher rank or the engineer to perform the relevant operations, the new type is added to the fluid filling and extraction system. Electronic token unit 8. As shown in FIG. 2, the electronic token unit 8 stores a One-time password (OTP). In particular, after the portable electronic device 5 completes the reading of the first identity message carrying unit 21, the central monitoring system CSRC can request the operator to provide the electronic token unit 8 through the portable electronic device 5; The portable electronic device 5 can repeatedly confirm whether the operator holding the operator identity card 2 has the operation authority of performing the filling and extracting operations of the chemical by accessing the one-time authentication code, thereby avoiding The operator's identity card 2 of the factory director or engineer of the higher vocational level is used to carry out related operations. The present invention does not limit the implementation of the electronic token unit 8. As shown in FIG. 2, the electronic token unit 8 may be: a Bluetooth electronic device, a USB electronic device, an NFC tag, or an RFID tag. And after the portable electronic device 5 completes the access of the one-time authentication code from the electronic token unit 8, a token code generating unit (not shown) inside the portable electronic device 5 A set of one-time authentication codes is regenerated and written into the electronic token unit 8, thereby improving the operation authority of the first machine 4 and the second machine 6.

Thus, the above description has fully and clearly described a fluid filling and extraction system of the present invention. Next, the operation flow of a fluid filling and extracting system of the present invention will be further described below. Referring to FIG. 1 repeatedly, and referring to FIG. 3A and FIG. 3B simultaneously, a front view of the screen of the portable electronic device at the time of performing the fluid filling operation is shown. As shown in FIG. 1 and FIG. 3A, when the fluid filling operation is performed, at least one first identity message carrying unit 21 is first disposed on at least one operator identity card 2, and at least one second identity message carrying unit is disposed. The at least one item message carrying unit 31 is disposed on the at least one item container 3, and the at least one slot information carrying unit 41 is disposed on the at least one unit. The container control unit 3 is disposed on the at least one fluid accommodating tank 6; wherein the material container 3 houses a specific chemical (for example: The chemical liquid or chemical gas is used to accommodate the chemical storage, and the material container 3 is a chemical tanker that transports the chemical.

Further, at least one portable electronic device 5 is provided, and the portable electronic device 5 has a reading unit 51 (for example, a barcode scanner). In the actual operation flow of the fluid filling operation, as shown in FIG. 3A (a), it is necessary to selectively perform a fluid filling operation through the portable electronic device 5. Then, as shown in FIG. 3A (b), if the chemical transported by the chemical tanker is a chemical fluid (or pure liquid), the operator must further operate an interface of the portable electronic device 5. Select "Chemical Liquid Tanker" on it. Continuing, as shown in FIG. 3A (c), the operator must further select "filling operation start" on an operation interface of the portable electronic device 5, and the action is notified through the portable electronic device 5. The rear central monitoring system, CSRC, has its supervisors know that it is currently at a specific tank gate 4 in preparation for fluid filling.

Before the chemical is replenished to the designated large chemical storage tank, as shown in FIG. 3A (d), the first identity message carrying unit 21 and the second must be read by the portable electronic device 5 first. The identity message carrying unit 81, the item message carrying unit 31, and the slot information carrying unit 41 are used to determine the operator bar code, the driving bar code, the tank bar code and the item barcode, and the slot bar code. Continuing, as shown in (a) of FIG. 3B, the central monitoring system CSRC is the portable electronic device 5 requiring the operator to input basic information of the chemical to be filled. The input of the basic information can be quickly completed by the portable electronic device 5 reading the item message carrying unit 31. At the same time, as shown in FIG. 3B (b), the operator must also read the first identity message carrying unit 21, the second identity message carrying unit 81, and the slot information by the portable electronic device 5. The carrying unit 41 and the accommodating slot message carrying unit 61 are configured to enable the central monitoring system CSRC at the back end to repeatedly confirm the capital information of the operator and the transporting person performing the chemical filling operation. At the same time, the central monitoring system CSRC can also repeatedly confirm the chemical to be chemically filled (ie, the specific item transported by the chemical tanker), the fluid receiving tank 6 and the fluid to which the fluid receiving tank 6 belongs. Slot area.

After completing the repeated confirmation of the operator, the transporter, the specific item transported by the chemical tanker, the fluid receiving tank area, and the fluid receiving tank 6, the central monitoring system CSRC of the rear end opens the tank gate 4 The door lock allows the operator and the transporter to proceed to the chemical tanker to the designated chemical tank plant area and replenish the chemical into the designated large chemical holding tank to complete the chemical filling operation. Then, as shown in FIG. 3B (c), after selecting the option of ending the filling operation through the portable electronic device 5, the system will again ask the operator to repeatedly read the first electronic device 5. The identity message carrying unit 21, the second identity message carrying unit 81, the item message carrying unit 31, and the slot information carrying unit 41 (shown in (d) of FIG. 3B). In this way, the central monitoring system CSRC of the back end can know that the chemical filling operation has been completed, thereby enabling the door lock of the tank control door 4.

Referring again to FIG. 1, and referring to FIG. 4A and FIG. 4B simultaneously, a front view of the screen of the portable electronic device at the time of performing a fluid filling extraction (recycling) operation is shown. In the actual operation flow of the fluid extraction operation, as shown in FIG. 4A (a), it is necessary to selectively perform a fluid extraction operation through the portable electronic device 5. Next, as shown in FIG. 4A(b), if the chemical fluid to be subjected to the extraction operation is chemical waste liquid, the operator must further select "chemical waste liquid" on an operation interface of the portable electronic device 5. Tank truck". Continuing, as shown in FIG. 4A (c), the operator must further select "extraction start" on an operation interface of the portable electronic device 5, and the action is notified through the portable electronic device 5. The rear central monitoring system, CSRC, has its supervisors know that it is currently at a specific tank control gate 4 in preparation for fluid extraction operations.

Before moving the chemical waste tank truck to the designated large chemical storage tank, as shown in FIG. 4A (d), the first identity message carrying unit 21 must be read by the portable electronic device 5, The second identity message carrying unit 81, the item message carrying unit 31, and the slot information carrying unit 41 are used to determine the operator bar code, the driving bar code, the tank bar code and the item barcode, and the slot bar code. . Continuing, the back-end central monitoring system CSRC will open the door lock of the tank control door 4, allowing operators and transport personnel to proceed to drive the chemical tanker to the designated chemical tank plant and chemical waste (chemical The waste liquid is taken out from the fluid accommodating tank 6, and is filled into the chemical waste liquid toward the tank truck. After the filling operation of the chemical is completed, as shown in (a) of FIG. 4B, the operator must select an option of the end of the extraction operation through the portable electronic device 5; thereafter, as shown in (b) of FIG. 4B. The system further requires the operator to repeatedly read the first identity message carrying unit 21, the second identity message carrying unit 81, the item message carrying unit 31, and the slot area by the portable electronic device 5. The message carries unit 41. Thereafter, the central monitoring system CSRC of the back end can know that the chemical filling operation has been completed, thereby enabling the door lock of the tank control door 4.

Second embodiment

Apparently, Figures 1, 3A, 3B, and the above description describe how to perform a chemical liquid filling operation and a drawing (recycling) operation using the fluid filling and extraction system of the present invention. Continuing, the following describes how to complete the chemical gas filling operation using the fluid filling and extraction system of the present invention. Referring to Figure 5, there is shown a block diagram of a second embodiment of a fluid filling and extraction system of the present invention. In particular, in the second embodiment, the central monitoring system CSRC monitors and controls the access control of the slot control door 4 through the control device 7, and simultaneously activates or deactivates a valve through the control device 7. The activation and release of the protection device AD. The valve protection device AD is known in the industry as an Auto guard to prevent the gas valve from being arbitrarily opened without the approval of the central monitoring system CSRC. The main reason is that the chemical gas used in the semiconductor process, such as NH ₃ or SiH ₄ , therefore, the filling or extraction of the chemical gas must be started after the central monitoring system CSRC releases the valve protection device AD. .

Referring to FIG. 5 repeatedly, and referring to FIG. 6A and FIG. 6B simultaneously, a front view of the screen of the portable electronic device at the time of performing the fluid filling operation is shown. The specific item for fluid filling operations here is a chemical gas. In the actual operation flow of the (chemical gas) fluid filling operation, as shown in FIG. 6A (a), it is necessary to selectively perform a fluid filling operation through the portable electronic device 5. Next, as shown in FIG. 6A(b), since the chemical transported by the chemical tanker is a chemical gas, the operator must further select "chemical gas" on an operation interface of the portable electronic device 5. Tank truck". Continuing, as shown in FIG. 6A (c), the operator must further select "filling operation start" on an operation interface of the portable electronic device 5, and the action is notified through the portable electronic device 5. The rear central monitoring system, CSRC, has its supervisors know that it is currently at a specific tank gate 4 in preparation for fluid filling.

Before the chemical gas is filled into the designated large chemical storage tank, as shown in FIG. 6A (d), the first identity message carrying unit 21 must be read by the portable electronic device 5, and the first The two-part message carrying unit 81, the item message carrying unit 31, and the slot information carrying unit 41 are used to determine the operator bar code, the driving bar code, the tank bar code and the item barcode, and the slot bar code. After the central monitoring system CSRC of the back end confirms that the capital information of the operator and the transport personnel performing the chemical filling operation is correct, the tank control door 4 is opened, so that the operator and the transport personnel can proceed to drive the chemical tanker to the designated Chemical tank factory area. Further, after the central monitoring system CSRC of the rear end releases the valve guard AD (Auto guard), the operator and the transporter can start filling the chemical gas into the designated large chemical storage tank to complete the chemical. Filling job. Then, as shown in (a) and (b) of FIG. 6B, after selecting the option of ending the filling operation through the portable electronic device 5, the system will again ask the operator to repeat the portable electronic device 5. The first identity message carrying unit 21, the second identity message carrying unit 81, the item message carrying unit 31, and the slot information carrying unit 41 are read. In this way, the central monitoring system CSRC of the back end can know that the chemical filling operation has been completed, thereby enabling the door guard of the valve guard AD (Auto guard) and the tank control door 4.

Third embodiment

Obviously, Figures 5, 6A, 6B, and the above description describe how to complete the chemical gas filling operation using the fluid filling and extraction system of the present invention. Continuing, the following describes how to perform a chemical gas extraction (recovery) operation using the fluid filling and extraction system of the present invention. Referring to Figure 7, there is shown a block diagram of a third embodiment of a fluid filling and extraction system of the present invention. Specifically, in the third embodiment, at least one slot valve message carrying unit 91 is simultaneously disposed on at least one switching valve unit 9, and the switching valve unit 9 is used to switch the fluid receiving slot. 6 fluid input and fluid in and out. At the same time, the central monitoring system CSRC monitors and controls the access control of the tank control door 4 through the control device 7, and simultaneously activates or deactivates the activation and release of a valve protection device AD through the control device 7.

Referring to FIG. 7 again, and referring to FIG. 8A and FIG. 8B simultaneously, a front view of the screen of the portable electronic device at the time of performing a fluid filling extraction (recycling) operation is shown. In the actual operation flow of the (chemical gas) fluid extraction operation, as shown in FIG. 8A (a), it is necessary to selectively perform a fluid extraction operation through the portable electronic device 5. Then, as shown in FIG. 8A(b), if the chemical to be extracted is a chemical gas, the operator must further select a chemical gas tanker on an operation interface of the portable electronic device 5. ". Continuing, as shown in FIG. 8A (c), the operator must further select "extraction start" on an operation interface of the portable electronic device 5, and the action is notified through the portable electronic device 5. The rear central monitoring system, CSRC, has its supervisors know that it is currently at a specific tank control gate 4 in preparation for fluid extraction operations.

Before moving the chemical gas tanker to the designated large chemical storage tank, as shown in FIG. 8A (d), the first identity message carrying unit 21 must be read by the portable electronic device 5, The second identity message carrying unit 81, the item message carrying unit 31, and the slot information carrying unit 41 are used to determine the operator bar code, the driving bar code, the tank bar code and the item barcode, and the slot bar code. The central monitoring system CSRC at the back end opens the tank control door 4 after confirming that the capital information of the operator and the transport personnel performing the chemical extraction operation is correct, so that the operator and the transport personnel can proceed to drive the chemical gas tanker to Designated chemical tank plant area. Further, after the central monitoring system CSRC of the rear end releases the valve guard AD (Autoguard), the operator and the transporter can start to extract the chemical gas in the fluid receiving tank 6, and then fill the chemical gas tanker. Among them. After the chemical extraction (recycling) operation is completed, as shown in (a) and (b) of FIG. 8B, after selecting the option of ending the filling operation through the portable electronic device 5, the system will request the operation again. The person repeats reading the first identity message carrying unit 21, the second identity message carrying unit 81, the item message carrying unit 31, and the slot message carrying unit 41 by the portable electronic device 5. In this way, the central monitoring system CSRC of the back end can know that the chemical filling operation has been completed, thereby enabling the door guard of the valve guard AD (Auto guard) and the tank control door 4.

Thus, the above system has completely and clearly illustrated a fluid filling and extraction system and method of the present invention; and, as described above, the present invention has the following advantages:

(1) The present invention provides a fluid filling and extracting system, comprising: at least a first identity message carrying unit 21, at least a second identity message carrying unit 81, at least one item message carrying unit 31, at least one The slot information carrying unit 41, the at least one receiving slot message carrying unit 61, and the at least one portable electronic device 5. In particular, after the portable electronic device 5 reads the basic information carried by the message carrying units (21, 81, 31, 41, 61) with its reading unit 51, the central monitoring system CSRC of the back end It is possible to confirm whether the operator has the operational authority to perform the fluid filling operation and/or the extraction (recycling) operation and whether the information of the materials contained in the item container 3 (ie, the chemical tanker) is in compliance with the information. After the error, the operator is allowed to perform fluid filling operations and/or extraction (recycling) operations. In this way, it is ensured that the filling operation and the extraction operation and the related records are all carried out under the electronic system management, and any paper recording is exempted, so that it can effectively avoid any human operation abnormality or complete in a non-compliant standard operating procedure. Related work.

It is to be understood that the foregoing detailed description of the preferred embodiments of the present invention is not intended to limit the scope of the invention, Both should be included in the scope of the patent in this case.

<This new type>

21‧‧‧First identity message carrying unit

81‧‧‧Second identity message carrying unit

31‧‧‧Site message carrying unit

41‧‧‧Slot message carrying unit

61‧‧‧ 容 槽 message carrying unit

5‧‧‧Portable electronic devices

CSRC‧‧‧Central Monitoring System

2‧‧‧Operator ID card

8‧‧‧Transportation staff identity card

3‧‧‧ Item Holder

4‧‧‧Slot control door

6‧‧‧Fluid accommodating tank

5‧‧‧Portable electronic devices

51‧‧‧Reading unit

R‧‧‧ transceiver

7‧‧‧Control device

8‧‧‧Electronic Scepter Unit

9‧‧‧Switching valve unit

91‧‧‧Slot valve message carrying unit

<知知>

no

1 is a perspective view showing a first embodiment of a fluid filling and extracting system of the present invention; FIG. 2 is a perspective view showing a portable electronic device; and FIGS. 3A and 3B are diagrams showing the portability when a fluid filling operation is performed. 4A and 4B are front views of the screen of the portable electronic device when performing a fluid extraction (recovery) operation; and FIG. 5 is a view showing a fluid filling and extraction system of the present invention. FIG. 6A and FIG. 6B are front views showing the screen of the portable electronic device when the fluid filling operation is performed; FIG. 7 is a third view showing a fluid filling and extracting system of the present invention. An architectural diagram of an embodiment; and Figures 8A and 8B are front elevational views of the screen of the portable electronic device at the time of performing a fluid extraction (recovery) operation.

Claims (10)

A fluid filling and extracting system includes: at least one first identity message carrying unit disposed on at least one operator identity card; at least one item message carrying unit disposed in at least one item Above the device, the item container is provided with a specific item; at least one slot area message carrying unit is disposed on at least one slot area control door; at least one receiving slot message carrying unit, Provided on at least one fluid receiving groove, and the at least one fluid receiving groove is disposed in at least one fluid receiving groove region behind the groove control door; and at least one portable electronic device, The reading unit has a reading unit, and the portable electronic device can confirm whether the item is accommodated by the item container by reading the item information carrying unit. The product needs to be subjected to a filling operation to fill the specific item from the item container to a specific fluid receiving groove area and a specific fluid receiving groove; wherein, by the reading unit, Portable electronic device can read through The slot information carrying unit and the accommodating slot message carrying unit confirm whether the specific item accommodated by the fluid receiving slot needs to perform an extraction operation; wherein the portable unit is capable of performing the extraction operation; The electronic device can confirm whether the operator holding the operator identity card has the right to execute the filling operation and the extraction operation by reading the first identity message carrying unit. The fluid filling and extracting system of claim 1, further comprising: at least one second identity message carrying unit disposed on the at least one transporter identity card of the item container; And at least one slot valve message carrying unit is disposed on the at least one switching valve unit, and the switching valve unit is configured to switch the fluid input and the fluid in and out of the fluid receiving groove. The fluid filling and extracting system of claim 2, further comprising: at least one valve protection device mounted on the at least one switching valve unit; and a central monitoring system through a transceiver The device communicates with the portable electronic device, and monitors and controls the access control of the control door of the slot through a control device, and is used to enable or disable the activation and release of the valve protection device through the control device. The fluid filling and extracting system of claim 1, wherein the specific material is a chemical fluid, the material container is a chemical tanker, and the fluid receiving tank is a chemical tank. Slot or a chemical waste containment tank. The fluid filling and extracting system of claim 2, wherein the first identity message carrying unit, the second identity message carrying unit, the slot valve message carrying unit, and the item message carrying unit The slot information carrying unit and the receiving slot message carrying unit can be any of the following: graphics, text, letters, numbers, and one-dimensional barcodes. (1D barcode), 2D barcode, Chinese-sensible code, QR code, matrix barcode (Maxicode), RFID tag, NFC tag, a combination of the above, or both The combination of the above. The fluid filling and extracting system of claim 1, wherein the portable electronic device can be any of the following: a smart phone, a personal digital assistant, a notebook computer, a tablet computer, smart glasses, or Smart watch; the reading unit can be any of the following: RFID tag reader, NFC tag reader, image recognizer, one-dimensional bar code reader, two-dimensional bar code reader, Hanxin code reader , QR code reader, or matrix bar code reader. The fluid filling and extracting system of claim 2, wherein the reading unit is an image capturing device, and the portable electronic device further has an image recognition unit; wherein The reading unit and the image recognition unit, the portable electronic device can complete the first identity message carrying unit, the second identity message carrying unit, the slot valve message carrying unit, and the item message carrying unit The slot information carrying unit and/or the receiving slot message carrying unit are read. The fluid filling and extracting system of claim 1, wherein the plurality of basic messages carried by the item information carrying unit comprise: a product name, a batch number, a item number, a shipping tool number, and an effective number. The date, the serial number, and the Central seperating character are inserted between the two adjacent basic messages. The fluid filling and extraction system of claim 4, wherein the chemical fluid can be any of the following: a chemical liquid or a chemical gas. The fluid filling and extraction system of claim 8, wherein the message separator can be any of the following: %, $, /, ~, ! , @,#,^,&,*, (,), -, _, |, {,},? , <, >, \, [,] or +.