CN111129243A - GaN基紫外LED外延结构 - Google Patents
GaN基紫外LED外延结构 Download PDFInfo
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- CN111129243A CN111129243A CN201911210806.2A CN201911210806A CN111129243A CN 111129243 A CN111129243 A CN 111129243A CN 201911210806 A CN201911210806 A CN 201911210806A CN 111129243 A CN111129243 A CN 111129243A
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- 229910002704 AlGaN Inorganic materials 0.000 claims abstract description 47
- 230000004888 barrier function Effects 0.000 claims abstract description 46
- 230000007704 transition Effects 0.000 claims abstract description 14
- 239000000758 substrate Substances 0.000 claims abstract description 9
- 230000000737 periodic effect Effects 0.000 claims abstract description 6
- 229910052710 silicon Inorganic materials 0.000 claims description 6
- 239000010703 silicon Substances 0.000 claims description 6
- 230000008859 change Effects 0.000 claims description 5
- 230000005684 electric field Effects 0.000 abstract description 2
- 230000010287 polarization Effects 0.000 abstract description 2
- 230000005533 two-dimensional electron gas Effects 0.000 abstract description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 8
- JLTRXTDYQLMHGR-UHFFFAOYSA-N trimethylaluminium Chemical compound C[Al](C)C JLTRXTDYQLMHGR-UHFFFAOYSA-N 0.000 description 7
- 230000007480 spreading Effects 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910021529 ammonia Inorganic materials 0.000 description 4
- RGGPNXQUMRMPRA-UHFFFAOYSA-N triethylgallium Chemical compound CC[Ga](CC)CC RGGPNXQUMRMPRA-UHFFFAOYSA-N 0.000 description 4
- 230000005699 Stark effect Effects 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 3
- 239000002019 doping agent Substances 0.000 description 3
- XCZXGTMEAKBVPV-UHFFFAOYSA-N trimethylgallium Chemical compound C[Ga](C)C XCZXGTMEAKBVPV-UHFFFAOYSA-N 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 238000005034 decoration Methods 0.000 description 2
- 239000011777 magnesium Substances 0.000 description 2
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000006798 recombination Effects 0.000 description 2
- 238000005215 recombination Methods 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- IBEFSUTVZWZJEL-UHFFFAOYSA-N trimethylindium Chemical compound C[In](C)C IBEFSUTVZWZJEL-UHFFFAOYSA-N 0.000 description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
- H01L33/32—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen
- H01L33/325—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table containing nitrogen characterised by the doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/005—Processes
- H01L33/0062—Processes for devices with an active region comprising only III-V compounds
- H01L33/0075—Processes for devices with an active region comprising only III-V compounds comprising nitride compounds
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/04—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction
- H01L33/06—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies with a quantum effect structure or superlattice, e.g. tunnel junction within the light emitting region, e.g. quantum confinement structure or tunnel barrier
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L33/00—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L33/02—Semiconductor devices having potential barriers specially adapted for light emission; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by the semiconductor bodies
- H01L33/26—Materials of the light emitting region
- H01L33/30—Materials of the light emitting region containing only elements of Group III and Group V of the Periodic Table
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Led Devices (AREA)
Abstract
Description
Claims (5)
Priority Applications (1)
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CN201911210806.2A CN111129243B (zh) | 2019-12-02 | 2019-12-02 | GaN基紫外LED外延结构 |
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CN201911210806.2A CN111129243B (zh) | 2019-12-02 | 2019-12-02 | GaN基紫外LED外延结构 |
Publications (2)
Publication Number | Publication Date |
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CN111129243A true CN111129243A (zh) | 2020-05-08 |
CN111129243B CN111129243B (zh) | 2024-05-17 |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115036402A (zh) * | 2022-08-12 | 2022-09-09 | 江苏第三代半导体研究院有限公司 | 诱导增强型Micro-LED同质外延结构及其制备方法 |
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CN203192834U (zh) * | 2013-03-13 | 2013-09-11 | 扬州中科半导体照明有限公司 | 一种高亮度GaN基绿光LED中的外延结构 |
CN203850327U (zh) * | 2014-04-22 | 2014-09-24 | 同辉电子科技股份有限公司 | 具有二维电子气结构电子发射层的GaN基LED外延片 |
CN104282808A (zh) * | 2014-10-08 | 2015-01-14 | 西安神光皓瑞光电科技有限公司 | 一种紫外led外延有源区结构生长方法 |
CN104868025A (zh) * | 2015-05-18 | 2015-08-26 | 聚灿光电科技股份有限公司 | 具有非对称超晶格层的GaN基LED外延结构及其制备方法 |
US9401455B1 (en) * | 2015-12-17 | 2016-07-26 | Bolb Inc. | Ultraviolet light-emitting device with lateral tunnel junctions for hole injection |
US20160276529A1 (en) * | 2015-03-20 | 2016-09-22 | Enraytek Optoelectronics Co., Ltd. | Gan-based led epitaxial structure and preparation method thereof |
WO2016197650A1 (zh) * | 2015-06-08 | 2016-12-15 | 中国科学院半导体研究所 | 无掺杂剂的AlGaN基紫外发光二极管及制备方法 |
WO2017077733A1 (ja) * | 2015-11-05 | 2017-05-11 | シャープ株式会社 | 窒化物半導体、窒化物半導体の製造方法、および電子デバイス |
US20180013033A1 (en) * | 2015-10-28 | 2018-01-11 | Xiamen Sanan Optoelectronics Technology Co., Ltd. | Light Emitting Diode and Fabrication Method Thereof |
CN108231965A (zh) * | 2018-02-06 | 2018-06-29 | 华南师范大学 | 一种提高光输出的AlGaN基深紫外LED外延结构 |
CN207731944U (zh) * | 2018-01-05 | 2018-08-14 | 广东省半导体产业技术研究院 | 一种铝镓氮基紫外光源器件的结构 |
CN208014724U (zh) * | 2018-02-06 | 2018-10-26 | 华南师范大学 | 一种AlGaN基深紫外LED外延结构 |
CN208014725U (zh) * | 2018-02-06 | 2018-10-26 | 华南师范大学 | 一种新型的深紫外led外延结构 |
CN109461799A (zh) * | 2018-09-19 | 2019-03-12 | 华中科技大学鄂州工业技术研究院 | 深紫外led的外延结构及其制备方法 |
CN110473940A (zh) * | 2019-08-09 | 2019-11-19 | 晶能光电(江西)有限公司 | 紫外led的外延结构 |
-
2019
- 2019-12-02 CN CN201911210806.2A patent/CN111129243B/zh active Active
Patent Citations (17)
Publication number | Priority date | Publication date | Assignee | Title |
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US20090236586A1 (en) * | 2006-08-15 | 2009-09-24 | Institute of Physics, Chinese Academy of Science | Epitaxial material used for gan based led with low polarization effect and manufacturing method thereof |
WO2009001888A1 (ja) * | 2007-06-27 | 2008-12-31 | Nec Corporation | 電界効果トランジスタ、ならびに、該電界効果トランジスタの作製に供される多層エピタキシャル膜 |
CN203192834U (zh) * | 2013-03-13 | 2013-09-11 | 扬州中科半导体照明有限公司 | 一种高亮度GaN基绿光LED中的外延结构 |
CN203850327U (zh) * | 2014-04-22 | 2014-09-24 | 同辉电子科技股份有限公司 | 具有二维电子气结构电子发射层的GaN基LED外延片 |
CN104282808A (zh) * | 2014-10-08 | 2015-01-14 | 西安神光皓瑞光电科技有限公司 | 一种紫外led外延有源区结构生长方法 |
US20160276529A1 (en) * | 2015-03-20 | 2016-09-22 | Enraytek Optoelectronics Co., Ltd. | Gan-based led epitaxial structure and preparation method thereof |
CN104868025A (zh) * | 2015-05-18 | 2015-08-26 | 聚灿光电科技股份有限公司 | 具有非对称超晶格层的GaN基LED外延结构及其制备方法 |
WO2016197650A1 (zh) * | 2015-06-08 | 2016-12-15 | 中国科学院半导体研究所 | 无掺杂剂的AlGaN基紫外发光二极管及制备方法 |
US20180013033A1 (en) * | 2015-10-28 | 2018-01-11 | Xiamen Sanan Optoelectronics Technology Co., Ltd. | Light Emitting Diode and Fabrication Method Thereof |
WO2017077733A1 (ja) * | 2015-11-05 | 2017-05-11 | シャープ株式会社 | 窒化物半導体、窒化物半導体の製造方法、および電子デバイス |
US9401455B1 (en) * | 2015-12-17 | 2016-07-26 | Bolb Inc. | Ultraviolet light-emitting device with lateral tunnel junctions for hole injection |
CN207731944U (zh) * | 2018-01-05 | 2018-08-14 | 广东省半导体产业技术研究院 | 一种铝镓氮基紫外光源器件的结构 |
CN108231965A (zh) * | 2018-02-06 | 2018-06-29 | 华南师范大学 | 一种提高光输出的AlGaN基深紫外LED外延结构 |
CN208014724U (zh) * | 2018-02-06 | 2018-10-26 | 华南师范大学 | 一种AlGaN基深紫外LED外延结构 |
CN208014725U (zh) * | 2018-02-06 | 2018-10-26 | 华南师范大学 | 一种新型的深紫外led外延结构 |
CN109461799A (zh) * | 2018-09-19 | 2019-03-12 | 华中科技大学鄂州工业技术研究院 | 深紫外led的外延结构及其制备方法 |
CN110473940A (zh) * | 2019-08-09 | 2019-11-19 | 晶能光电(江西)有限公司 | 紫外led的外延结构 |
Non-Patent Citations (1)
Title |
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V. V. LUNDIN;A. V. SAKHAROV;E. E. ZAVARIN;: "The Effect of the Method by Which a High-Resistivity GaN Buffer Layer Is Formed on Properties of InAlN/GaN and AlGaN/GaN Heterostructures with 2D Electron Gas", TECHNICAL PHYSICS LETTERS, vol. 44, no. 7, 20 July 2018 (2018-07-20), pages 577 - 580, XP036571093, DOI: 10.1134/S1063785018070106 * |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115036402A (zh) * | 2022-08-12 | 2022-09-09 | 江苏第三代半导体研究院有限公司 | 诱导增强型Micro-LED同质外延结构及其制备方法 |
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CN111129243B (zh) | 2024-05-17 |
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Address after: 330096 No. 699, Aixi Hubei Road, Nanchang High-tech Development Zone, Jiangxi Province Applicant after: Jingneng optoelectronics Co.,Ltd. Applicant after: JIANGXI JINGLIANG OPTICAL-ELECTRONIC SCIENCE AND TECHNOLOGY COOPERATIVE INNOVATION Co.,Ltd. Address before: 330096 No. 699, Aixi Hubei Road, Nanchang High-tech Development Zone, Jiangxi Province Applicant before: LATTICE POWER (JIANGXI) Corp. Applicant before: JIANGXI JINGLIANG OPTICAL-ELECTRONIC SCIENCE AND TECHNOLOGY COOPERATIVE INNOVATION Co.,Ltd. |
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