CN111076836A - 一种金属-氧化物型薄膜热电偶及其制备方法 - Google Patents
一种金属-氧化物型薄膜热电偶及其制备方法 Download PDFInfo
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- CN111076836A CN111076836A CN201911288910.3A CN201911288910A CN111076836A CN 111076836 A CN111076836 A CN 111076836A CN 201911288910 A CN201911288910 A CN 201911288910A CN 111076836 A CN111076836 A CN 111076836A
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- thin film
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- rhenium
- oxide
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
- G01K7/04—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples the object to be measured not forming one of the thermoelectric materials
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/08—Oxides
- C23C14/086—Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
- C23C14/14—Metallic material, boron or silicon
- C23C14/18—Metallic material, boron or silicon on other inorganic substrates
- C23C14/185—Metallic material, boron or silicon on other inorganic substrates by cathodic sputtering
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
Abstract
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Claims (8)
Priority Applications (1)
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CN201911288910.3A CN111076836B (zh) | 2019-12-12 | 2019-12-12 | 一种金属-氧化物型薄膜热电偶及其制备方法 |
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CN201911288910.3A CN111076836B (zh) | 2019-12-12 | 2019-12-12 | 一种金属-氧化物型薄膜热电偶及其制备方法 |
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CN111076836A true CN111076836A (zh) | 2020-04-28 |
CN111076836B CN111076836B (zh) | 2020-10-27 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113959574A (zh) * | 2021-09-26 | 2022-01-21 | 西安交通大学 | 一种基于氧化铟复合材料的薄膜热电偶及其制备方法 |
CN114531748A (zh) * | 2022-02-24 | 2022-05-24 | 西安交通大学 | 一种陶瓷叶片基薄膜热电偶用电磁感应热处理装置 |
CN115522163A (zh) * | 2022-10-09 | 2022-12-27 | 中国工程物理研究院总体工程研究所 | 一种三维异面结构陶瓷基薄膜热电偶的保护层制备方法 |
Citations (8)
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US4969956A (en) * | 1989-12-19 | 1990-11-13 | The United States Of America As Represented By The Secretary Of Commerce | Transparent thin film thermocouple |
CN1235273A (zh) * | 1999-05-05 | 1999-11-17 | 中国科学院上海冶金研究所 | 硅-金属双层结构薄膜热电堆 |
CN102522490A (zh) * | 2011-11-21 | 2012-06-27 | 上海交通大学 | 玻璃微针热电偶的制备方法 |
CN103900728A (zh) * | 2014-04-23 | 2014-07-02 | 大连交通大学 | 一种陶瓷薄膜热电偶及其制备方法 |
CN104089717A (zh) * | 2014-07-23 | 2014-10-08 | 电子科技大学 | 一种热电堆 |
CN107101735A (zh) * | 2017-06-13 | 2017-08-29 | 北京卫星环境工程研究所 | 用于测量表面瞬态温度的片状薄膜热电偶测温系统及应用 |
CN110004410A (zh) * | 2019-04-18 | 2019-07-12 | 大连交通大学 | 具有(400)晶面择优的铟锡氧化物在透明薄膜热电偶上的应用 |
CN110042355A (zh) * | 2019-05-08 | 2019-07-23 | 中国航发北京航空材料研究院 | 一种具有一维纳米阵列结构的薄膜热电偶及其制造方法 |
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2019
- 2019-12-12 CN CN201911288910.3A patent/CN111076836B/zh active Active
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4969956A (en) * | 1989-12-19 | 1990-11-13 | The United States Of America As Represented By The Secretary Of Commerce | Transparent thin film thermocouple |
CN1235273A (zh) * | 1999-05-05 | 1999-11-17 | 中国科学院上海冶金研究所 | 硅-金属双层结构薄膜热电堆 |
CN102522490A (zh) * | 2011-11-21 | 2012-06-27 | 上海交通大学 | 玻璃微针热电偶的制备方法 |
CN103900728A (zh) * | 2014-04-23 | 2014-07-02 | 大连交通大学 | 一种陶瓷薄膜热电偶及其制备方法 |
CN104089717A (zh) * | 2014-07-23 | 2014-10-08 | 电子科技大学 | 一种热电堆 |
CN107101735A (zh) * | 2017-06-13 | 2017-08-29 | 北京卫星环境工程研究所 | 用于测量表面瞬态温度的片状薄膜热电偶测温系统及应用 |
CN110004410A (zh) * | 2019-04-18 | 2019-07-12 | 大连交通大学 | 具有(400)晶面择优的铟锡氧化物在透明薄膜热电偶上的应用 |
CN110042355A (zh) * | 2019-05-08 | 2019-07-23 | 中国航发北京航空材料研究院 | 一种具有一维纳米阵列结构的薄膜热电偶及其制造方法 |
Non-Patent Citations (1)
Title |
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XIMING CHEN: "Thin-Film Thermocouples Based on the System In2O3-SnO2", 《AMERICAN CERAMIC SOCIETY》 * |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113959574A (zh) * | 2021-09-26 | 2022-01-21 | 西安交通大学 | 一种基于氧化铟复合材料的薄膜热电偶及其制备方法 |
CN114531748A (zh) * | 2022-02-24 | 2022-05-24 | 西安交通大学 | 一种陶瓷叶片基薄膜热电偶用电磁感应热处理装置 |
CN114531748B (zh) * | 2022-02-24 | 2022-11-25 | 西安交通大学 | 一种陶瓷叶片基薄膜热电偶用电磁感应热处理装置 |
CN115522163A (zh) * | 2022-10-09 | 2022-12-27 | 中国工程物理研究院总体工程研究所 | 一种三维异面结构陶瓷基薄膜热电偶的保护层制备方法 |
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Inventor after: Tian Bian Inventor after: Liu Yan Inventor after: Zhang Zhongkai Inventor after: Liu Zhaojun Inventor after: Liu Jiangjiang Inventor after: Wang Cunfeng Inventor after: Shi Peng Inventor after: Lin Qijing Inventor after: Jiang Zhuangde Inventor before: Tian Bian Inventor before: Liu Yan Inventor before: Zhang Zhongkai Inventor before: Liu Zhaojun Inventor before: Liu Jiangjiang Inventor before: Wang Cunfeng Inventor before: Shi Peng Inventor before: Lin Qijing Inventor before: Jiang Zhuangde |
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