CN111066376A - Light source device, exposure device, and method for determining light source device - Google Patents
Light source device, exposure device, and method for determining light source device Download PDFInfo
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- CN111066376A CN111066376A CN201880058704.0A CN201880058704A CN111066376A CN 111066376 A CN111066376 A CN 111066376A CN 201880058704 A CN201880058704 A CN 201880058704A CN 111066376 A CN111066376 A CN 111066376A
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- Prior art keywords
- discharge lamp
- determination
- light source
- circuit
- product
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70483—Information management; Active and passive control; Testing; Wafer monitoring, e.g. pattern monitoring
- G03F7/70591—Testing optical components
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/44—Testing lamps
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70008—Production of exposure light, i.e. light sources
- G03F7/70016—Production of exposure light, i.e. light sources by discharge lamps
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/10—Controlling the light source
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B47/00—Circuit arrangements for operating light sources in general, i.e. where the type of light source is not relevant
- H05B47/20—Responsive to malfunctions or to light source life; for protection
Abstract
The invention provides a light source device which is used in an exposure device for exposure of a printed wiring substrate and the like and is provided with a circuit for judging whether a discharge lamp serving as a light source is a genuine product or not and whether the discharge lamp is a new product or an old product or not in a high-precision, short-time and low-cost manner. A light source device (100) is configured by a discharge lamp (110) serving as a light source, a determination circuit (200), and a reflector container (151) in which the discharge lamp (110) and the determination circuit (200) are mounted. The determination circuit (200) is configured by an RC parallel circuit (210) for detecting whether the discharge lamp (110) is a genuine product and a fuse (220) connected in series to the RC parallel circuit (210) for determining whether the discharge lamp (110) is a new product.
Description
Technical Field
The present invention relates to a light source device including a circuit for determining whether a discharge lamp serving as a light source is a genuine product or not, and whether the discharge lamp is a new product or an old product, in an exposure apparatus used for exposure of a printed circuit board or the like, an exposure apparatus using the light source device, and a determination method for the light source device.
Background
Conventionally, a printed wiring board in which a wiring pattern is formed of a metal such as copper on a substrate made of resin or glass epoxy material has been used in order to mount components on electronic devices. Photolithography is used to form wiring patterns on these printed wiring boards. Photolithography is performed by: a photoresist, which is a photosensitive chemical, is applied to the entire surface of a substrate on which a metal layer to be a wiring is formed, and irradiated light from an exposure device is irradiated through a photomask similar to the wiring pattern.
Among the photoresists, there are negative type photoresists in which the solubility of the photoresist is reduced by irradiation light, and conversely, positive type photoresists in which the solubility of the photoresist is increased by irradiation light. When a photoresist portion having a relatively increased solubility by irradiation with light is chemically treated and removed and the exposed metal layer is removed by etching, only the metal layer located under the portion where the photoresist remains, and the photoresist is removed to form a wiring pattern on the substrate. When irradiation light is irradiated to either a positive-type or negative-type photoresist, stable irradiation light irradiation needs to be performed for a fixed time at a uniform illuminance in order to ensure a uniform exposure amount over the entire irradiation surface.
In addition, in the manufacture of a printed wiring board, a large printed wiring board on which a plurality of circuits are formed is manufactured for the purpose of enhancing the efficiency of the manufacturing process, and after the completion of the board, the following processes are performed: by being divided into individual circuits for use in desired electronic devices.
With such an increase in size of the printed wiring board, manufacturers of exposure apparatuses desire to increase the size of a discharge lamp as a light source to obtain high illuminance or to provide a multi-lamp light source using a plurality of small discharge lamps with low illuminance to secure required illuminance. For example, instead of using one light source of a high-pressure discharge lamp of 8kW, four light sources of a high-pressure discharge lamp of 2kW are used. Low-intensity discharge lamps are advantageous in terms of manufacturing difficulty and manufacturing cost as compared with high-intensity discharge lamps, and a large number of exposure apparatuses having a multi-lamp light source have been sold.
However, with the increase in the number of lamps of such light sources, the necessity of ensuring a uniform exposure amount makes it more important to make the plurality of discharge lamps uniform. Therefore, in order to stabilize the performance of the exposure apparatus and manufacture a highly reliable printed wiring board, it is necessary to use only a discharge lamp of a genuine product manufactured by the same manufacturer from the same material and by the same process, and an apparatus and a method for determining whether or not the discharge lamp is a genuine product are required.
Not only exposure devices, but also optical devices are known to determine the discharge lamp or light source to be used (see, for example, patent documents 1 to 3). For example, in a lamp abnormality detection device described in patent document 1, a predetermined voltage is supplied to an incandescent bulb using a filament such as a halogen lamp, and a current value when the filament is in a half-cut state is compared with a current value when the filament is normal to detect a lamp having an abnormality. However, with this method, even if the life of the lamp can be detected, it is difficult to determine whether the lamp is genuine.
For example, in patent document 2, a light source such as an incandescent lamp or a fluorescent lamp is connected to a circuit in which a resistor and a capacitor are connected in parallel, and a time constant (product of a resistance value and a capacitance value) when a predetermined voltage is supplied to both ends of the light source is measured to detect whether the light source is the incandescent lamp or the fluorescent lamp. However, with this method, even if a large difference in time constant can be detected (the time constant of an incandescent lamp is largely different from that of a fluorescent lamp), it is difficult to determine whether or not the incandescent lamp is genuine between the same incandescent lamps.
For example, in patent document 3, a defective product is detected by measuring discharge start voltages between a plurality of filaments sealed in a bulb of the same incandescent bulb while emitting ultraviolet rays to the filaments. However, with this method, even if a defective product can be detected, it is difficult to determine whether or not the lamp is a genuine product.
Prior art documents
Patent document
Patent document 1: JP examined Japanese patent publication No. 7-52677
Patent document 2: JP 2010-527504 (Japanese patent application laid-open)
Patent document 3: JP-A62-43059
Disclosure of Invention
(problems to be solved by the invention)
In order to determine whether a light source device is a genuine product or a similar product manufactured by another manufacturer, a determination device with higher accuracy is required than the determination device for identifying whether a light source is defective as in patent documents 1 and 3 or whether a light source is a different type of light source as in patent document 2. Further, there is a need to solve the problems of not greatly increasing the inspection time of the plurality of light sources over the start-up time of the exposure apparatus and not greatly increasing the cost of the entire exposure apparatus at the same time.
Further, from the viewpoint of ensuring a uniform exposure amount, it is not preferable to use a new product and an old product together even in a light source device of a genuine product manufactured by the same manufacturer. Therefore, a light source device capable of determining whether or not the light source device is an old product that has been used at least once is desired.
The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a light source device including a circuit for determining whether a discharge lamp serving as a light source is a genuine product or a new product or an old product, in an exposure device used for exposure of a printed circuit board or the like, with high accuracy, in a short time, and at low cost, and an exposure device using the light source device and a determination method thereof.
(means for solving the problems)
According to one aspect of the present invention, there is provided a light source device including:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes: the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and a fuse connected in series to the RC parallel circuit to determine whether the discharge lamp is a new product.
Further, according to another aspect of the present invention, there is provided a light source device including:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes: the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and a fuse connected in parallel to the RC parallel circuit to determine whether the discharge lamp is a new product.
Further, according to another aspect of the present invention, there is provided a light source device including:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes: the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and a diode connected in series with the RC parallel circuit to determine whether the discharge lamp is new.
Further, according to another aspect of the present invention, there is provided a light source device including:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes: the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and a diode connected in parallel to the RC parallel circuit to determine whether the discharge lamp is a new product.
Preferably, the determination circuit is housed in the reflector container.
Preferably, the fuse is a thermal fuse.
Further, according to another aspect of the present invention, there is provided an exposure apparatus including:
one or more of the light source devices;
a frame for mounting the light source device to an object to be irradiated;
a constant current power supply that supplies a current to the determination circuit;
a switch that switches on or off the current from the constant current power supply;
a control unit that turns on or off the switch to energize the determination circuit for a predetermined time;
a measurement unit that measures a voltage across the determination circuit during energization at least twice;
a comparison unit that compares a difference between the both-end voltage at the first measurement and the both-end voltage at the second measurement with a voltage range of a predetermined upper limit value and a predetermined lower limit value for determining whether or not the discharge lamp is a genuine product;
a determination unit that receives the signal from the comparison unit, determines that the discharge lamp to be inspected is genuine when the difference between the voltages at both ends is within a predetermined voltage range, and determines that the discharge lamp to be inspected is not genuine when the difference between the voltages at both ends is outside the predetermined voltage range;
after determining whether the discharge lamp is genuine or not,
a used product determination constant current power supply for supplying a current to the determination circuit;
a used article determination switch for turning on or off the current from the used article determination constant current power supply;
a used article determination control unit that turns on or off the used article determination switch to energize the determination circuit;
a measurement unit for determining a used product, which measures a voltage across the determination circuit during energization;
a used product determination unit that determines whether the discharge lamp is a new product or a used product based on whether the measured voltage across the terminals is within a voltage range of a predetermined upper limit value and a predetermined lower limit value; and
and a display unit for displaying the determination result.
A method for judging a light source device comprises the following steps:
the determination circuit of the light source device is electrified for a given time,
measuring the voltage across the determination circuit during the energization at least twice,
comparing the difference between the both-end voltage at the first measurement and the both-end voltage at the second measurement with a voltage range of a predetermined upper limit value and a predetermined lower limit value for determining whether or not the discharge lamp is genuine,
determining that the discharge lamp to be determined is a genuine product when the difference between the voltages at both ends is within a predetermined voltage range, determining that the discharge lamp to be determined is not a genuine product when the difference between the voltages at both ends is outside the predetermined voltage range,
further, after determining whether the discharge lamp is a genuine product,
the power is supplied to the circuit for determination,
measuring a voltage across the determination circuit during energization,
the discharge lamp to be determined is determined to be a new product when the measured end-to-end voltage is within a voltage range of a predetermined upper limit value and a predetermined lower limit value, and the discharge lamp to be determined is determined to be an old product when the measured end-to-end voltage is outside the voltage range of the predetermined upper limit value and the predetermined lower limit value.
(effect of the invention)
According to the present invention, it is possible to provide a light source device including a circuit for determining whether a discharge lamp serving as a light source is a genuine product or a new product or an old product in an exposure device for exposure of a printed circuit board or the like, and an exposure device using the light source device and a determination method thereof, with high accuracy, in a short time, and at a low cost.
Drawings
Fig. 1 is a diagram showing an example of an exposure apparatus 10 to which the present invention is applied.
Fig. 2 is a diagram showing an example of an exposure apparatus 50 to which the present invention is applied.
Fig. 3 is a plan view showing an example of an exposure apparatus 50 to which the present invention is applied.
Fig. 4 is a cross-sectional view showing an example of a light source device 100 to which the present invention is applied.
Fig. 5 is a cross-sectional view showing an example of the discharge lamp 110.
Fig. 6 is a diagram showing an example of a determination device 57 to which the present invention is applied.
Fig. 7 is a cross-sectional view showing an example of the light source device 100 according to modification 1 to which the present invention is applied.
Fig. 8 is a cross-sectional view showing an example of a light source device 100 according to modification 2 to which the present invention is applied.
Fig. 9 is a cross-sectional view showing an example of a light source device 100 according to modification 3 to which the present invention is applied.
Fig. 10 is a cross-sectional view showing another embodiment relating to the arrangement position of the determination circuit 200.
Fig. 11 is a cross-sectional view showing another embodiment relating to the arrangement position of the determination circuit 200.
Detailed Description
(example 1)
(Structure of Exposure machine 10)
Fig. 1 shows an exposure machine 10 to which embodiment 1 of the present invention is applied. The exposure apparatus 10 is generally configured by an exposure device 50, an integrator 12, a concave mirror 14, and an irradiation surface 16.
The exposure device 50 emits light having a wavelength suitable for exposure of the exposure object X. The exposure device 50 will be described in detail after the structure of the exposure machine 10 is described.
The integrator 12 has: an incident surface 18 that receives light from the exposure device 50; and an exit surface 20 that emits the received light after the uniformity of the light is improved. A plurality of fly-eye lenses 21 are formed on the incident surface 18 and the emission surface 20, respectively.
Concave mirror 14 has a reflective concave surface 22 on its inner side. The concave mirror 14 reflects the light emitted from the integrator 12 by the concave reflection surface 22 to be parallel light.
The irradiation surface 16 is a surface that receives the parallel light from the concave mirror 14, and is disposed in a direction substantially perpendicular to the parallel light. An exposure object X is placed on the irradiation surface 16. A photosensitive agent, for example, is applied to the surface of the exposure object X. A desired region in the exposure object X is irradiated with the parallel light from the concave mirror 14, and a desired circuit pattern or the like is formed on the surface of the exposure object X.
(construction of Exposure apparatus 50)
Fig. 2 is a diagram showing an exposure apparatus 50 according to embodiment 1 to which the present invention is applied. Fig. 3 is a plan view of the exposure device 50. The exposure device 50 includes: the light source devices 100, the frame 52, the lighting circuit 54, the switch 55, the constant current power supply 56, the determination device 57, the used-product determination constant current power supply 76, and the used-product determination switch 78. The switch 55 and the used product determination switch 78, and the constant current source 56 and the used product determination constant current source 76 may be set to have a function of sharing physically the same components, or may be provided with physically different components.
The light source device 100 emits light having a wavelength suitable for exposure of the exposure object X. As shown in fig. 4, the light source device 100 is roughly configured by a discharge lamp 110, a reflector 150, an insulating substrate 170, and a determination circuit 200. In addition, the reflector 150 and the insulating substrate 170 are sometimes collectively referred to as a reflector container 151.
As shown in fig. 5, the discharge lamp 110 includes: a light emitting tube portion 112 and a pair of sealing portions 114 extending from the light emitting tube portion 112. The light emitting tube part 112 and the pair of sealing parts 114 are integrally formed of quartz glass. Further, an internal space 116 sealed by the sealing portion 114 is formed in the light emitting tube portion 112.
In each sealing portion 114 of the discharge lamp 110, there are provided: an embedded molybdenum foil 118; a pair of electrodes 120 made of tungsten, one end of which is connected to one end of the foil 118 and the other end of which is disposed in the internal space 116; and a pair of guide rods 122 having one end connected to the other end of the foil 118 and the other end extending outward from the sealing part 114. Further, a predetermined amount of mercury 124 and halogen (e.g., bromine) are sealed in the internal space 116.
When a predetermined high voltage is applied to a pair of guide rods 122 provided in the discharge lamp 110, a glow discharge that starts between a pair of electrodes 120 provided in the internal space 116 of the bulb 112 is converted into an arc discharge, and light (mainly ultraviolet rays) is emitted by the mercury 124 evaporated and excited by the arc.
Returning to fig. 4, in the light source device 100 according to the present embodiment, one sealing portion 114 is inserted into the sealing portion insertion hole 156 of the reflector 150. The discharge lamp 110 may be used for ac lighting or dc lighting.
The reflector 150 has a bowl-shaped reflecting surface 152 on its inner side surface. The reflecting surface 152 reflects a part of the light from the discharge lamp 110, and the discharge lamp 110 is arranged such that the light-emitting tube part 112 is positioned inside the reflector 150. In the present embodiment, the reflecting surface 152 is defined by a paraboloid of revolution. The light emission point of the discharge lamp 110 (approximately the center of the arc formed between the pair of electrodes 120 in the internal space 116) coincides with the focal point of the paraboloid of revolution. Accordingly, light emitted from the light emitting point of the discharge lamp 110 and reflected by the reflecting surface 152 is substantially parallel to light emitted from the opening 154 of the reflector 150. Of course, the shape of the reflecting surface 152 is not limited to this, and may be a surface of revolution, another surface of revolution, or a shape other than a surface of revolution. Further, the light-emitting point does not necessarily have to be aligned with the focal point, and the light-emitting point may be shifted from the focal point as necessary.
Further, a bottomed neck portion 155 is provided projecting from the reflector 150 on the side opposite to the opening 154. Further, a sealing portion insertion hole 156 into which one sealing portion 114 of the discharge lamp 110 is inserted is formed in the reflection surface 152 of the reflector 150. The seal portion insertion hole 156 is formed from the bottom of the reflection surface 152 to the front end of the bottom neck portion 155.
As shown in fig. 1, by combining the reflector 150 with the discharge lamp 110, the light emitted from the discharge lamp 110 advances forward of the reflector 150 in a range having a predetermined angle (opening angle) around the light advancing along the center axis CL of the reflecting surface 152.
Returning to fig. 4, the insulating base 170 is formed of an electrical insulator such as ceramic, and is formed with a bottom neck portion 155 of the reflector 150 and a reflector insertion hole 172 of one sealing portion 114 of the discharge lamp 110 inserted in the sealing portion insertion hole 156. By inserting the bottom neck portion 155 and the sealing portion 114 into the reflector insertion hole 172, the insulating substrate 170 covers the sealing portion insertion hole 156 from the outside.
Further, an inner space 174 communicating with the reflector insertion hole 172 is formed in the insulating base 170, and a power cable insertion hole 176 for allowing the inner space 174 and the outside to communicate with each other and allowing the power cable a to be inserted therethrough is formed.
Further, the insulating base 170 and the discharge lamp 110 (in the case of the present embodiment, the determination circuit 200 as well) are fixed to each other by an inorganic adhesive C having electrical insulation and high thermal conductivity. Specifically, the end of the bottom neck portion 155 of the reflector 150 and one of the sealing portions 114 of the discharge lamp 110 are inserted into the reflector insertion hole 172 of the insulating base 170, and the inorganic adhesive C is filled in the inner space 174 of the insulating base 170 in a state where the determination circuit 200 and the power cable a are arranged in the inner space 174.
The determination circuit 200 includes an RC parallel circuit 210 and a fuse 220 in the present embodiment. The RC parallel circuit 210 is a circuit formed by connecting a resistor 212 and a capacitor 214 in parallel with each other.
The fuse 220 is a component connected in series with respect to the RC parallel circuit 210. In the present embodiment, the capacity of the fuse 220 is set so that it is not disconnected when a constant current for determining whether or not the discharge lamp 110 is genuine flows as described later, and is disconnected when a current larger than the constant current flows after the genuine determination by the fuse disconnection operation unit 67. Instead of this, a "temperature fuse" may be used, which is a fuse 220 disconnected by heat from the discharge lamp 110 being lit.
Returning to fig. 3, the frame 52 is a substantially rectangular parallelepiped member formed with a plurality of recesses 58 for mounting the plurality of light source devices 100.
Returning to fig. 2, the lighting circuit 54 is a circuit for supplying electric power necessary for the discharge lamp 110 of each light source device 100 mounted on the frame 52. The constant current source 56 and the used product determination constant current source 76 are power sources that supply a constant direct current to the determination circuit 200 of each light source device 100, and the switch 55 and the used product determination switch 78 are used to turn ON or OFF (ON/OFF) the constant direct current supplied to the determination circuit 200.
The determination device 57 is a device for determining whether each light source device 100 (discharge lamp 110) is a genuine product or not and whether each light source device 100 (discharge lamp 110) is a new product or an old product, and, as shown in fig. 6, includes approximately: the control unit 60, the measuring unit 62, the comparison unit 64, the determination unit 66, the fuse disconnection operation unit 67, the used product determination control unit 68, the used product determination measuring unit 70, and the used product determination unit 72. The control unit 60, the used product determination control unit 68, the measuring unit 62, the used product determination measuring unit 70, and the determining unit 66 and the used product determining unit 72 may be configured to share functions of physically identical components, or may be configured to prepare physically different components.
The control unit 60 has a function of turning on or off the current supplied from the constant current source 56 to the determination circuit 200 by operating the switch 55.
The measurement unit 62 has a function of measuring the voltage across the determination circuit 200. In the case of the present embodiment, the measuring unit 62 is configured to measure the voltage across the determination circuit 200 during energization at least twice.
The comparison unit 64 has the following functions: the difference between the voltage across the first measurement and the voltage across the second measurement of the determination circuit 200 measured by the measurement unit 62 is compared with a voltage range of a predetermined upper limit and a predetermined lower limit for determining whether or not the discharge lamp 110 is a genuine product. The comparison unit 64 records in advance the voltage distribution ranges of the plurality of RC parallel circuits for genuine product detection measured under predetermined conditions, and the comparison unit 64 transmits a signal of the result of the comparison to the determination unit 66.
The determination unit 66 receives the result signal transmitted from the comparison unit 64, and determines that the discharge lamp 110 to be inspected is genuine when the difference between the voltages at both ends is within the predetermined voltage range, and determines that the discharge lamp 110 to be inspected is not genuine when the difference between the voltages at both ends is outside the predetermined voltage range.
After the determination unit 66 determines whether or not the discharge lamp 110 is a genuine product, the fuse wire-breaking operation unit 67 causes a current larger than a constant current for genuine product determination to flow through the determination circuit 200. As a result, the fuse 220 is disconnected, the determination circuit 200 is Opened (OPEN), and the resistance value of both ends of the determination circuit 200 becomes infinite.
The used product determination control unit 68 has the following functions: after the fuse disconnection operation unit 67 is operated, the used product determination switch 78 is operated to turn on or off the current supplied from the used product determination constant current power supply 76 to the determination circuit 200.
The used product determination measuring section 70 has a function of measuring a voltage across the determination circuit 200 during power supply.
The used product determination unit 72 has the following functions: whether the discharge lamp 110 is a new product or an old product is determined based on whether the voltage across the terminals measured by the measurement unit 70 for determining an old product is within the voltage range of the predetermined upper limit value and lower limit value. That is, when the voltage across the discharge lamp 110 measured by the used product determination measuring unit 70 is within the voltage range of the predetermined upper limit value and lower limit value, the used product determination unit 72 determines that the discharge lamp is a new product. Conversely, when the voltage across the terminals measured by the used product determination measuring unit 70 is outside the voltage range of the predetermined upper limit value and lower limit value, the used product determination unit 72 determines that the discharge lamp 110 is a used product.
(operation of Exposure device 50)
When a power switch (not shown) of the exposure apparatus 50 is turned on, the lighting circuit 54 supplies electric power to the discharge lamps 110 in all the light source apparatuses 100 mounted on the frame 52. Generally, it takes several minutes for the discharge lamp 110 to start completely.
For example, immediately after the power switch of the exposure apparatus 50 is turned on, the control unit 60 of the determination device 57 turns on the switch 55 connected to the determination circuit 200 of any one of the light source devices 100 attached to the frame 52, and supplies a constant current from the constant current source 56 to the determination circuit 200. Of course, the timing at which the determination device 57 operates is not limited to this.
The measurement unit 62 measures the voltage across the determination circuit 200 immediately after the switch 55 is turned on for the first time, and transmits the result (for the first time) to the comparison unit 64. Then, after a predetermined time (for example, after 10 seconds) has elapsed from the first measurement, the constant current is supplied again to the same determination circuit 200, and the measurement unit 62 measures the voltage across the determination circuit 200 and transmits the result (for the second time) to the comparison unit 64.
The comparison unit 64 that receives the results of the two-terminal voltage measurement, sends a result signal indicating whether the difference between the two measured voltages is within the range of the voltage difference recorded in advance to the determination unit 66. The determination unit 66 determines that the discharge lamp 110 to be inspected is genuine when the difference between the voltages at both ends is within the predetermined voltage range, and determines that the discharge lamp 110 to be inspected is not genuine when the difference between the voltages at both ends is outside the predetermined voltage range.
When a constant current of a direct current flows through the RC parallel circuit 210, a current flows through the capacitor 214 and the resistor 212 at a stage when no charge is accumulated in the capacitor 214 at the start, and therefore, a voltage across the RC parallel circuit 210 is determined by a combined impedance of the capacitor 214 and the resistor 212. The measurement unit 62 performs the first measurement of the voltage across the determination circuit 200 at this timing.
Immediately after the constant current of the direct current flows through the RC parallel circuit 210, the capacitor 214 is fully charged, and no current flows through the capacitor 214. When no current flows through the capacitor 214, the voltage across the RC parallel circuit 210 is determined only by the resistance value of the resistor 212. The measurement unit 62 performs the second measurement of the voltage across the determination circuit 200 at this timing. In general, the resistance value is larger when only the resistor 212 is provided than when the capacitor 214 and the resistor 212 are combined. Since a constant current flows through the RC parallel circuit 210, the voltage across the RC parallel circuit 210 (second measurement value) when the resistance value of only the resistor 212 is set is larger than the voltage across the RC parallel circuit 210 (first measurement value) when the resistance of the capacitor 214 and the resistor 212 is combined.
On the other hand, in the case of a non-genuine product, the first measurement result is the same as or almost the same as the second measurement result. Thus, by the above-described determination method, it is possible to determine whether or not the light source device 100 (discharge lamp 110) is genuine. Further, it is also possible to determine whether or not the product is genuine by measuring the both-end voltage only at the timing of the second measurement. In this case, whether the product is genuine or not is determined based on whether or not the measured value of the voltage across the terminals is within a predetermined voltage range.
After the determination of the genuine product in the first light source device 100 is completed, the control unit 60 starts the supply of the constant current to the determination circuit 200 in the other light source device 100. Thereafter, the quality judgment is performed in the same manner as in the first case, and the same judgment is repeated until the judgment of all the light source devices 100 is completed or the inspection of the light source devices 100 in a predetermined range is completed.
After the required quality judgment is completed, the fuse disconnection operation unit 67 in the judgment device 57 causes a current (for example, 30V, 1.4A) larger than the constant current for quality judgment to flow to the judgment circuit 200. As a result, the fuse 220 is disconnected, the determination circuit 200 is opened, and the resistance values at both ends of the determination circuit 200 become infinite.
Then, the used product determination control unit 68 in the determination device 57 turns on the used product determination switch 78 connected to the determination circuit 200 in any one of the light source devices 100, and supplies a constant current from the used product determination constant current source 76 to the determination circuit 200. Immediately after the old product determination switch 78 is turned on, the old product determination measuring section 70 measures the voltage across the determination circuit 200, and transmits the result to the old product determination section 72.
The used product determination unit 72 determines whether the discharge lamp 110 is a new product or a used product by determining whether the voltage is within a voltage range of a predetermined upper limit value and a predetermined lower limit value.
In the present embodiment, when the end-to-end voltage measured by the used product determination measuring unit 70 is within the voltage range of the predetermined upper limit value and lower limit value, the used product determination unit 72 determines that the discharge lamp 110 is a new product. Conversely, when the voltage across the terminals measured by the used product determination measuring unit 70 is outside the voltage range of the predetermined upper limit value and lower limit value, the used product determination unit 72 determines that the discharge lamp 110 is a used product. When the light source device 100 is a genuine product and has been used at least once (used), the fuse 220 in the determination circuit 200 is already disconnected by the fuse disconnection operation unit 67 as described above, and therefore the determination circuit 200 is in an open state (resistance value is infinite). Therefore, the maximum voltage of the old-product determination constant current power supply 76 is applied to the voltage across both ends of the determination circuit 200. By setting the predetermined upper limit value to be smaller than the "maximum voltage of the used product determination constant current power supply 76", the used product determination measuring unit 70 can determine that the determination circuit 200 is open.
Although the example has been described so far in which the genuine product determination is started after the genuine product determination is performed on all the light source apparatuses 100 mounted on the exposure apparatus 50, the genuine product determination and the old product determination may be continuously performed on one light source apparatus 100 and then the other light source apparatuses 100. Of course, the plurality of light source devices 100 may be grouped together to sequentially perform the genuine product determination, and then sequentially perform the old product determination. This is the same in the following modification. Further, after the genuine product is judged, the used product may be judged after about 2000 hours of use.
(features of Exposure apparatus 50)
According to the present embodiment, it is possible to provide a light source device 100 including a circuit 200 for determining whether a discharge lamp 110 serving as a light source is a genuine product or a new product or an old product, and an exposure apparatus 50 using the light source device 100 and a determination method thereof, with high accuracy, in a short time, and at low cost.
(modification 1)
In the determination circuit 200 of the light source device 100 in the above-described embodiment, the fuse 220 is connected in series to the RC parallel circuit 210, but the fuse 220 may be connected in parallel to the RC parallel circuit 210 as shown in fig. 7.
In this case, the genuine product of the light source device 100 is determined as follows. That is, after the control unit 60 operates the switch 55 to supply power from the constant current source 56 to the determination circuit 200, the measurement unit 62 measures the voltage across the determination circuit 200. At this time, since the current mainly flows through the fuse 220 in the case of a genuine product, the voltage across both ends is very small (for example, about 0.4V).
Then, the fuse wire-breaking operation unit 67 is operated to flow a large current and voltage (for example, 30V and 1.4A) to the determination circuit 200 (mainly, a fuse). Thus, the fuse 220 is disconnected, and the determination circuit 200 is substantially only the RC parallel circuit 210. Of course, the fuse 220 may be disconnected by heat from the discharge lamp 110 being lit, as in embodiment 1.
Subsequently, the control unit 60 turns on the switch 55 again, and supplies a constant current from the constant current source 56 to the determination circuit 200. The measurement unit 62 measures the voltage across the determination circuit 200 immediately after the switch 55 is turned on for the first time, and transmits the result (for the first time) to the comparison unit 64. Then, after a predetermined time (for example, after 10 seconds) has elapsed from the first measurement, the constant current is supplied again to the same determination circuit 200, and the measurement unit 62 measures the voltage across the determination circuit 200 and transmits the result (for the second time) to the comparison unit 64.
The comparison unit 64 that receives the results of the two-terminal voltage measurement, sends a result signal indicating whether the difference between the two measured voltages is within the range of the voltage difference recorded in advance to the determination unit 66. The determination unit 66 determines that the discharge lamp 110 to be inspected is genuine when the difference between the voltages at both ends is within the predetermined voltage range, and determines that the discharge lamp 110 to be inspected is not genuine when the difference between the voltages at both ends is outside the predetermined voltage range. Further, it is also possible to determine whether or not the product is genuine by measuring the voltage across the terminals only at the timing of the second measurement. In this case, whether the product is genuine or not is determined by whether or not the measured value of the voltage across the terminals is within a predetermined voltage range.
The old product was judged as follows. That is, the used product determination switch 78 is turned on by the used product determination control unit 68, and a constant current is supplied from the used product determination constant current source 76 to the determination circuit 200. Immediately after the old product determination switch 78 is turned on for the first time, the old product determination measurement unit 70 measures the voltage across the determination circuit 200, and transmits the result (for the first time) to the old product determination comparison unit 71. Then, after a predetermined time (for example, after 10 seconds) has elapsed since the first measurement, the constant current is supplied again to the same determination circuit 200, and the used product determination measurement unit 70 measures the voltage across the determination circuit 200 and transmits the result (for the second time) to the used product determination comparison unit 71.
The used product determination comparing unit 71 that receives the two-terminal voltage measurement results transmits a result signal indicating whether or not the difference between the two measurement voltages is within the voltage difference range recorded in advance to the used product determining unit 72. When the difference between the voltages at both ends is within the predetermined voltage range, the used product determination unit 72 determines that the discharge lamp 110 to be inspected is a used product, whereas when the difference between the voltages at both ends is outside the predetermined voltage range, the used product determination unit 72 determines that the discharge lamp 110 to be inspected is a new product. The reason is the same as that described in the case of the genuine product determination in example 1.
When the light source device 100 is a new product of good quality, the fuse 220 in the determination circuit 200 is connected in parallel to the RC parallel circuit 210 as described above, and therefore the voltage across the determination circuit 200 is almost zero even if the voltage is measured several times. Thus, since the difference between the first and second measured values of the voltages across the terminals is out of the predetermined voltage range (almost the same as zero), the used-product determining measuring section 70 can determine that the determining circuit 200 is a used product substantially only including the RC parallel circuit 210. Further, it is also possible to determine whether the product is new or old by measuring the voltage across the terminals only at the timing of the second measurement. In this case, whether the product is a new product or an old product is determined by whether the measured value of the voltage across the terminals is within a predetermined voltage range (almost zero).
(modification 2)
The determination circuit 200 of the light source device 100 in the above-described embodiment is configured by using the RC parallel circuit 210 and the fuse 220, but as shown in fig. 8, a diode 230 may be connected in series to the RC parallel circuit 210 instead of the fuse 220.
In this case, since the genuine judgment of the light source device 100 is the same as that of embodiment 1 (note that the current flowing from the constant current source 56 to the judgment circuit 200 is a direct current in the forward direction of the diode 230), the procedure of the genuine judgment of embodiment 1 is applied and the description thereof is omitted.
Next, in modification 2, a reverse voltage applying unit 80 is used instead of the fuse disconnection operating unit 67 in embodiment 1. The reverse voltage applying unit 80 has the following functions: a reverse voltage (direct current) is applied to the diode 230 (determination circuit 200) to such an extent that the diode 230 is broken. After the determination of the quality of the light source device 100 is completed, the reverse voltage applying unit 80 is operated to break the diode 230 by the reverse voltage. Thus, the diode 230 is short-circuited inside and loses its function, and the determination circuit 200 has the same configuration as that of the RC parallel circuit 210 alone.
When the light source device 100 is a genuine product, the determination circuit 200 after the reverse voltage applying unit 80 is operated has the same configuration as that of the RC parallel circuit 210 alone, and therefore, the determination of a genuine product of the light source device 100 according to modification 2 is performed by a method basically similar to that described in modification 1. The constant current of the direct current supplied from the old-product determination constant current source 76 to the determination circuit 200 needs to flow in the reverse direction of the diode 230 in the normal state.
(modification 3)
As shown in fig. 9, the diode 230 may be connected in parallel to the RC parallel circuit 210. In this case, since the genuine product determination of the light source device 100 is the same as that of embodiment 1 (note that the current flowing from the constant current source 56 to the determination circuit 200 is a direct current in the reverse direction of the diode 230), the order of the genuine product determination of embodiment 1 is applied and the description thereof is omitted.
After the light source device 100 is confirmed to be a genuine product, a large reverse voltage (direct current) is applied to the diode 230 by the reverse voltage applying unit 80, the diode 230 is short-circuited inside and loses its function, and the determination circuit 200 is in a short-circuited state.
Then, the used product determination control unit 68 in the determination device 57 turns on the used product determination switch 78, and supplies a constant current from the used product determination constant current source 76 to the determination circuit 200 (note that the current flowing from the used product determination constant current source 76 to the determination circuit 200 is a direct current in the reverse direction of the diode 230). Immediately after the old product determination switch 78 is turned on, the old product determination measuring section 70 measures the voltage across the determination circuit 200, and transmits the result to the old product determination section 72.
The used product determination unit 72 determines whether the discharge lamp 110 is a new product or a used product by determining whether the voltage is within a voltage range of a predetermined upper limit value and a predetermined lower limit value. In the present embodiment, when the voltage across the terminals measured by the used product determination measuring unit 70 is within the voltage range of the predetermined upper limit value and lower limit value, the used product determination unit 72 determines that the discharge lamp 110 is a new product. Conversely, when the voltage across the terminals measured by the used product determination measuring unit 70 is outside the voltage range of the predetermined upper limit value and lower limit value, the used product determination unit 72 determines that the discharge lamp 110 is a used product.
When the light source device 100 is a genuine product, the diode 230 in the determination circuit 200 is already in a short-circuited state by the reverse voltage applying unit 80 as described above, and thus the determination circuit 200 is in a short-circuited (a resistance value is considerably small) state. Therefore, in the case of an old product, the voltage across the determination circuit 200 becomes 1V or less. In case the light source device 100 is a new product, the diode 230 does not lose its function so that no current can flow in the reverse direction, and thus the current flows only through the RC parallel circuit 210. That is, since the determination circuit 200 is in the same state as the RC parallel circuit 210 alone, the voltage across the determination circuit 200 is larger than 1V (for example, 2.0V to 8.5V). This enables the determination of the old product of the light source device 100.
(modification 4)
In the above-described embodiment/modification, the determination circuit 200 is housed in the reflector container 151, but the position of disposing the determination circuit 200 is not limited to this, and may be disposed on the outer side of the reflector container 151 (fig. 10), or may be disposed on the outer side (back side) of the reflector 150 (fig. 11), for example.
It should be understood that the embodiments disclosed herein are illustrative and not restrictive in all respects. The scope of the present invention is defined not by the above description but by the claims, and is intended to include all modifications within the scope and meaning equivalent to the claims.
(description of reference numerals)
10 … exposure machine, 12 … integrator, 14 … concave mirror, 16 … irradiation surface,
A 50 … exposure apparatus, a 52 … frame, a 54 … lighting circuit, a 55 … switch, a 56 … constant current power supply, a 57 … determination device, a 58 … recess, a 60 … control unit, a 62 … measurement unit, a 64 … comparison unit, a 66 … determination unit, a 67 … fuse disconnection operation unit, a 68 … used product determination control unit, a 70 … used product determination measurement unit, a 71 … used product determination comparison unit, a 72 … used product determination unit, a 76 … used product determination constant current power supply, a 78 … used product determination switch, a light source, a,
80 … reverse voltage applying part,
100 … light source device,
110 … discharge lamp, 112 … bulb portion, 114 … sealing portion, 116 … internal space, 118 … foil, 120 … electrode, 122 … guide rod, 124 … mercury,
150 … reflector, 151 … reflector container, 152 … reflecting surface, 154 … opening, 155 … bottom neck, 156 … sealing part insertion hole,
170 … insulating substrate, 172 … reflector insertion hole, 174 … inner space, 176 … power cable insertion hole,
200 … decision circuit,
210 … RC parallel circuit, 212 … resistor, 214 … capacitor,
220 … fuse,
230 … diode.
Claims (8)
1. A light source device is provided with:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes:
the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and
and a fuse connected in series to the RC parallel circuit to determine whether the discharge lamp is new.
2. A light source device is provided with:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes:
the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and
and a fuse connected in parallel to the RC parallel circuit to determine whether the discharge lamp is new.
3. A light source device is provided with:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes:
the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and
and a diode connected in series with the RC parallel circuit to determine whether the discharge lamp is new.
4. A light source device is provided with:
a discharge lamp as a light source;
a circuit for determination; and
a reflector container on which the discharge lamp and the determination circuit are mounted,
the determination circuit includes:
the RC parallel circuit is used for detecting whether the discharge lamp is a genuine product or not; and
and a diode connected in parallel to the RC parallel circuit to determine whether the discharge lamp is new.
5. The light source device according to any one of claims 1 to 4,
the determination circuit is housed in the reflector container.
6. The light source device according to claim 1 or 2,
the fuse is a temperature fuse.
7. An exposure apparatus includes:
the light source device of claim 1;
a frame for mounting the light source device to an object to be irradiated;
a constant current power supply that supplies a current to the determination circuit;
a switch that switches on or off the current from the constant current power supply;
a control unit that turns on or off the switch to energize the determination circuit for a predetermined time;
a measurement unit that measures a voltage across the determination circuit during energization at least twice;
a comparison unit that compares a difference between the both-end voltage at the first measurement and the both-end voltage at the second measurement with a voltage range of a predetermined upper limit value and a predetermined lower limit value for determining whether or not the discharge lamp is a genuine product;
a determination unit that receives the signal from the comparison unit, determines that the discharge lamp to be inspected is genuine when the difference between the voltages at both ends is within a predetermined voltage range, and determines that the discharge lamp to be inspected is not genuine when the difference between the voltages at both ends is outside the predetermined voltage range;
a used-product determination constant current source for supplying a current to the determination circuit after determining whether or not the discharge lamp is a genuine product;
a used article determination switch for turning on or off the current from the used article determination constant current power supply;
a used article determination control unit that turns on or off the used article determination switch to energize the determination circuit;
a measurement unit for determining a used product, which measures a voltage across the determination circuit during energization; and
and a used product determination unit for determining whether the discharge lamp is a new product or a used product based on whether the measured voltage across the terminals is within a voltage range of a predetermined upper limit value and a predetermined lower limit value.
8. A method for judging a light source device comprises the following steps:
the circuit for determination of the light source device according to claim 1 is electrically connected for a given time,
measuring the voltage across the determination circuit during the energization at least twice,
comparing the difference between the both-end voltage at the first measurement and the both-end voltage at the second measurement with a voltage range of a predetermined upper limit value and a predetermined lower limit value for determining whether or not the discharge lamp is genuine,
determining that the discharge lamp to be determined is a genuine product when the difference between the voltages at both ends is within a predetermined voltage range, determining that the discharge lamp to be determined is not a genuine product when the difference between the voltages at both ends is outside the predetermined voltage range,
further, after determining whether the discharge lamp is a genuine product,
the power is supplied to the circuit for determination,
measuring a voltage across the determination circuit during energization,
the discharge lamp to be determined is determined to be a new product when the measured end-to-end voltage is within a voltage range of a predetermined upper limit value and a predetermined lower limit value, and the discharge lamp to be determined is determined to be an old product when the measured end-to-end voltage is outside the voltage range of the predetermined upper limit value and the predetermined lower limit value.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2017-178425 | 2017-09-16 | ||
| JP2017178425 | 2017-09-16 | ||
| PCT/JP2018/032883 WO2019054250A1 (en) | 2017-09-16 | 2018-09-05 | Light source device, exposure apparatus, and determination method for light source device |
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| CN111066376A true CN111066376A (en) | 2020-04-24 |
| CN111066376B CN111066376B (en) | 2022-12-23 |
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| JP (1) | JPWO2019054250A1 (en) |
| KR (1) | KR102611865B1 (en) |
| CN (1) | CN111066376B (en) |
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- 2018-09-05 WO PCT/JP2018/032883 patent/WO2019054250A1/en active Application Filing
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| CN111066376B (en) | 2022-12-23 |
| WO2019054250A1 (en) | 2019-03-21 |
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