CN111029240A - 具有反射光电阴极阵列的光电倍增管(pmt) - Google Patents

具有反射光电阴极阵列的光电倍增管(pmt) Download PDF

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Publication number
CN111029240A
CN111029240A CN201911284117.6A CN201911284117A CN111029240A CN 111029240 A CN111029240 A CN 111029240A CN 201911284117 A CN201911284117 A CN 201911284117A CN 111029240 A CN111029240 A CN 111029240A
Authority
CN
China
Prior art keywords
reflective
array
photocathodes
housing
pmt
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201911284117.6A
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English (en)
Chinese (zh)
Inventor
D·麦凯
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KLA Corp
Original Assignee
KLA Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KLA Tencor Corp filed Critical KLA Tencor Corp
Publication of CN111029240A publication Critical patent/CN111029240A/zh
Pending legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/10—Dynodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/08—Cathode arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J43/00—Secondary-emission tubes; Electron-multiplier tubes
    • H01J43/04—Electron multipliers
    • H01J43/06—Electrode arrangements
    • H01J43/18—Electrode arrangements using essentially more than one dynode

Landscapes

  • Electron Tubes For Measurement (AREA)
  • Common Detailed Techniques For Electron Tubes Or Discharge Tubes (AREA)
  • Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
CN201911284117.6A 2014-11-14 2015-11-13 具有反射光电阴极阵列的光电倍增管(pmt) Pending CN111029240A (zh)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201462079985P 2014-11-14 2014-11-14
US62/079,985 2014-11-14
US14/934,107 2015-11-05
US14/934,107 US9543130B2 (en) 2014-11-14 2015-11-05 Photomultiplier tube (PMT) having a reflective photocathode array
CN201580059985.8A CN107078016A (zh) 2014-11-14 2015-11-13 具有反射光电阴极阵列的光电倍增管(pmt)

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
CN201580059985.8A Division CN107078016A (zh) 2014-11-14 2015-11-13 具有反射光电阴极阵列的光电倍增管(pmt)

Publications (1)

Publication Number Publication Date
CN111029240A true CN111029240A (zh) 2020-04-17

Family

ID=55955153

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201580059985.8A Pending CN107078016A (zh) 2014-11-14 2015-11-13 具有反射光电阴极阵列的光电倍增管(pmt)
CN201911284117.6A Pending CN111029240A (zh) 2014-11-14 2015-11-13 具有反射光电阴极阵列的光电倍增管(pmt)

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201580059985.8A Pending CN107078016A (zh) 2014-11-14 2015-11-13 具有反射光电阴极阵列的光电倍增管(pmt)

Country Status (8)

Country Link
US (1) US9543130B2 (ko)
JP (2) JP2017534161A (ko)
KR (2) KR102463161B1 (ko)
CN (2) CN107078016A (ko)
IL (1) IL251415A0 (ko)
SG (1) SG11201703580UA (ko)
TW (1) TWI660396B (ko)
WO (1) WO2016077766A1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114093743B (zh) * 2021-11-25 2024-01-16 上海集成电路研发中心有限公司 一种光敏传感器及其制备方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5438191A (en) * 1992-08-10 1995-08-01 Hamamatsu Photonics K.K. Photomultiplier
US5481158A (en) * 1992-11-09 1996-01-02 Hamamatsu Photonics K.K. Electron multiplier with improved dynode geometry for reduced crosstalk
CN200979870Y (zh) * 2006-11-18 2007-11-21 深圳大学 一种大面积弱光探测器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5418126Y2 (ko) * 1972-10-05 1979-07-10
JPS5841617B2 (ja) * 1981-05-26 1983-09-13 工業技術院長 光電子増倍管
JPH05159740A (ja) * 1991-10-21 1993-06-25 Yasuki Nagai 光電子増倍管
US5336967A (en) 1992-06-22 1994-08-09 Burle Technologies, Inc. Structure for a multiple section photomultiplier tube
US5561347A (en) * 1993-05-27 1996-10-01 Hamamatsu Photonics K.K. Photomultiplier
JP4805043B2 (ja) * 2006-07-05 2011-11-02 浜松ホトニクス株式会社 光電陰極、光電陰極アレイ、および電子管
JP5563869B2 (ja) 2009-04-02 2014-07-30 浜松ホトニクス株式会社 光電陰極、電子管及び光電子増倍管
US8587196B2 (en) 2010-10-14 2013-11-19 Hamamatsu Photonics K.K. Photomultiplier tube
WO2013036576A1 (en) 2011-09-07 2013-03-14 Kla-Tencor Corporation Transmissive-reflective photocathode
US9184034B2 (en) * 2012-03-19 2015-11-10 Kla-Tencor Corporation Photomultiplier tube with extended dynamic range

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5438191A (en) * 1992-08-10 1995-08-01 Hamamatsu Photonics K.K. Photomultiplier
US5481158A (en) * 1992-11-09 1996-01-02 Hamamatsu Photonics K.K. Electron multiplier with improved dynode geometry for reduced crosstalk
CN200979870Y (zh) * 2006-11-18 2007-11-21 深圳大学 一种大面积弱光探测器

Also Published As

Publication number Publication date
SG11201703580UA (en) 2017-05-30
JP2021002531A (ja) 2021-01-07
KR20210131428A (ko) 2021-11-02
CN107078016A (zh) 2017-08-18
KR20170083599A (ko) 2017-07-18
TWI660396B (zh) 2019-05-21
IL251415A0 (en) 2017-05-29
US20160141161A1 (en) 2016-05-19
US9543130B2 (en) 2017-01-10
JP2017534161A (ja) 2017-11-16
TW201626430A (zh) 2016-07-16
KR102463161B1 (ko) 2022-11-03
WO2016077766A1 (en) 2016-05-19
JP7069268B2 (ja) 2022-05-17

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RJ01 Rejection of invention patent application after publication

Application publication date: 20200417