CN110926380B - Method for measuring coaxiality of optical element of laser cutting head - Google Patents
Method for measuring coaxiality of optical element of laser cutting head Download PDFInfo
- Publication number
- CN110926380B CN110926380B CN201911387412.4A CN201911387412A CN110926380B CN 110926380 B CN110926380 B CN 110926380B CN 201911387412 A CN201911387412 A CN 201911387412A CN 110926380 B CN110926380 B CN 110926380B
- Authority
- CN
- China
- Prior art keywords
- optical element
- point
- target surface
- coaxiality
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/22—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes
- G01B21/24—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring angles or tapers; for testing the alignment of axes for testing alignment of axes
Abstract
The invention discloses a method for measuring the coaxiality of an optical element of a laser cutting head, which comprises the following steps: 1) arranging a light emitting point, an optical element to be detected and a target surface in sequence along an optical axis; 2) the optical element to be measured is placed at the position A by taking the light emitting point as a zero point position and the direction vertical to the target surface as an axis, and the axis is marked asObtaining a point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]]Wherein L is the distance from the light-emitting point to the target surface, and F is the focal length of the optical element to be measured; 3) the optical element to be measured is placed at position B, the axis is markedAcquiring a point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y'](ii) a 4) Calculating the deviation of the coaxiality of the optical axis of the optical element to be measured and the light emitting point as [ dx,dy]WhereinWherein the content of the first and second substances,is the distance between position a and position B. The invention can quickly measure the coaxiality of a single optical element or an optical system and the optical axis, and improves the reliability and the measuring efficiency of the measuring result.
Description
[ technical field ] A method for producing a semiconductor device
The invention belongs to the technical field of laser cutting, and particularly relates to a method for measuring coaxiality of an optical element of a laser cutting head.
[ background of the invention ]
The optical system of the cutting head is generally a finite distance conjugate optical system consisting of a collimating lens group and a focusing lens group. The optical design of the laser cutting head is a coaxial system, while the structural design of the cutting head needs to consider that various layouts of air paths and electric circuits are non-coaxial systems. Therefore, it is very difficult to measure the coaxiality of the cutting head in actual production.
The traditional method for detecting the coaxiality of the optical system of the cutting head is to utilize a mechanical method and respectively measure the distance between the excircle of the lens cone and a set reference through measuring tools such as a height gauge and the like so as to judge the coaxiality of each lens cone assembly. The method has two errors, namely, the first method is that the coaxiality of the lens is directly judged through the lens cone and is unscientific; the second method of mechanical measurement is an indirect measurement method, which cannot represent the coaxiality of the whole optical system to some extent.
Therefore, there is a need to provide a new method for measuring the coaxiality of optical elements of a laser cutting head to solve the above problems.
[ summary of the invention ]
The invention mainly aims to provide a method for measuring the coaxiality of an optical element of a laser cutting head, which can quickly measure the coaxiality of a single optical element or an optical system and an optical axis and improve the reliability and the measurement efficiency of a measurement result.
The invention realizes the purpose through the following technical scheme: a method of measuring the coaxiality of optical elements of a laser cutting head, comprising the steps of:
1) arranging a light emitting point, an optical element to be detected and a target surface in sequence along an optical axis;
2) placing an optical element to be measured at a position A by taking a light emitting point as a zero point position and a direction vertical to the target surface as an axis, wherein the axial coordinate of the position A isObtaining a clear point target clear image point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]]Wherein L is the distance between the light emergent point and the target surface, and F isThe focal length of the optical element to be measured;
3) placing an optical element to be measured at a position B, wherein the axial coordinate of the position B isAcquiring a clear point target clear image point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y'];
4) Calculating the deviation of the coaxiality of the optical axis of the optical element to be measured and the light emitting point as [ dx,dy]Wherein
further, the optical element to be measured is a single focusing lens or a positive focal lens group system.
Further, the target surface is provided by a camera target surface.
Further, the distance L between the light emergent point and the target surface is greater than or equal to 4F.
Compared with the prior art, the method for measuring the coaxiality of the optical element of the laser cutting head has the advantages that: the coaxiality of a single optical element or an optical system and an optical axis can be rapidly measured, the reliability and the measuring efficiency of a measuring result are improved, the measuring time is shortened, and errors caused by human factors and indirect measurement are avoided.
[ description of the drawings ]
FIG. 1 is an optical path diagram of the present invention with an optical element coaxial with the optical axis;
FIG. 2 is a diagram of an optical path when an optical element is deviated from an optical axis in the present invention;
FIG. 3 is a schematic diagram of the positions of the light spots focused on the target surface of the camera by the optical element at the positions A and B.
[ detailed description ] embodiments
Example (b):
the embodiment of the invention provides a method for measuring the coaxiality of an optical element of a laser cutting head, which comprises the following steps:
1) a light emitting point 1, an optical element 2 to be detected and a target surface 3 are sequentially arranged along an optical axis; the light-emitting point can be emitted by a red light collimator, the optical element to be detected can be a single positive focal lens or a positive focal lens group system, and the target surface can be provided by a camera target surface;
wherein, the distance L between the light-emitting point and the target surface is required to be more than or equal to 4F, and F is the focal length of the optical element to be measured;
2) placing an optical element to be measured at a position A by taking a light emitting point as a zero point position and a direction vertical to the target surface as an axis, wherein the axial coordinate of the position A isObtaining a clear point target clear image point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]];
3) Placing an optical element to be measured at a position B, wherein the axial coordinate of the position B isAcquiring a clear point target clear image point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y']Please refer to fig. 3;
4) calculating the deviation of the coaxiality of the optical axis of the optical element to be measured and the light emitting point as [ dx,dy]Wherein
in this embodiment, the distance between the light exit point and the target surface is set to be greater than four times of the focal length of the optical element to be measured, so as to ensure that there are two positions between the light exit point and the target surface, so that the optical element to be measured can focus a light beam to the same light spot position theoretically, as shown in fig. 1. When the center of the optical element to be measured is not on the optical axis, the light spot A, B appears at the position a and the position B, respectively, and does not overlap with the light spot C when the optical element to be measured is coaxial, as shown in fig. 2.
After the coaxiality deviation of the optical element to be measured is obtained through measurement by the method, the optical element group in the laser cutting head can be coaxial with the laser optical fiber shaft by adjusting according to the deviation.
What has been described above are merely some embodiments of the present invention. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the inventive concept thereof, and these changes and modifications can be made without departing from the spirit and scope of the invention.
Claims (4)
1. A method for measuring the coaxiality of an optical element of a laser cutting head is characterized in that: which comprises the following steps:
1) arranging a light emitting point, an optical element to be detected and a target surface in sequence along an optical axis;
2) placing an optical element to be measured at a position A by taking a light emitting point as a zero point position and a direction vertical to the target surface as an axis, wherein the axial coordinate of the position A isObtaining a clear point target clear image point A on the target surface, wherein the barycentric coordinate of the point A is [ x, y ]]Wherein L is the distance between the light emergent point and the target surface, and F is the focal length of the optical element to be measured;
3) placing an optical element to be measured at a position B, wherein the axial coordinate of the position B isAcquiring a clear point target clear image point B on the target surface, wherein the barycentric coordinate of the point B is [ x ', y'];
4) Calculating the optical element to be measured and the light-emitting pointThe amount of deviation of the optical axis coaxiality is [ d ]x,dy]Wherein
2. the method of measuring the coaxiality of optical elements of a laser cutting head of claim 1, wherein: the optical element to be measured is a single focusing lens or a positive focal lens group system.
3. The method of measuring the coaxiality of optical elements of a laser cutting head of claim 1, wherein: the target surface is provided by a camera target surface.
4. The method of measuring the coaxiality of optical elements of a laser cutting head of claim 1, wherein: the distance L between the light-emitting point and the target surface is greater than or equal to 4F.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911387412.4A CN110926380B (en) | 2019-12-30 | 2019-12-30 | Method for measuring coaxiality of optical element of laser cutting head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201911387412.4A CN110926380B (en) | 2019-12-30 | 2019-12-30 | Method for measuring coaxiality of optical element of laser cutting head |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110926380A CN110926380A (en) | 2020-03-27 |
CN110926380B true CN110926380B (en) | 2021-07-09 |
Family
ID=69862477
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201911387412.4A Active CN110926380B (en) | 2019-12-30 | 2019-12-30 | Method for measuring coaxiality of optical element of laser cutting head |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110926380B (en) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005164267A (en) * | 2003-11-28 | 2005-06-23 | Canon Inc | Eccentricity measuring method |
EP1872085A1 (en) * | 2005-03-11 | 2008-01-02 | Forschungszentrum Karlsruhe GmbH | Method and device for measuring structures of an object |
CN101210805A (en) * | 2007-12-20 | 2008-07-02 | 哈尔滨工业大学 | Transmission modules coaxiality measurement method based on focal plane imaging method |
CN101514894A (en) * | 2009-04-01 | 2009-08-26 | 镇江晶鑫电子科技有限公司 | Collimator for detecting the collimated light of laser heads |
CN102519402A (en) * | 2012-01-06 | 2012-06-27 | 昆山海大数控技术有限公司 | Light guiding cylinder device |
CN105091798A (en) * | 2015-09-14 | 2015-11-25 | 福州腾图光电技术有限公司 | Novel transmission type eyeglass center-deflection measurement device and measurement method |
CN105737766A (en) * | 2016-03-02 | 2016-07-06 | 南通永明光纤材料有限公司 | Single optical fiber capillary concentricity fast measurement method |
CN107429994A (en) * | 2015-03-27 | 2017-12-01 | 奥林巴斯株式会社 | Measure head and the eccentric measure device for possessing the measure head |
CN109443253A (en) * | 2018-10-25 | 2019-03-08 | 北京国泰蓝盾科技有限公司 | A kind of laser coaxial degree detection device and its method |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN85200044U (en) * | 1985-04-01 | 1985-12-20 | 清华大学 | Photoeectric target for testing the alignment of high-aperture axes |
JP2935554B2 (en) * | 1990-10-17 | 1999-08-16 | キヤノン株式会社 | Light head |
US5546214A (en) * | 1995-09-13 | 1996-08-13 | Reliant Technologies, Inc. | Method and apparatus for treating a surface with a scanning laser beam having an improved intensity cross-section |
CN2352975Y (en) * | 1998-09-03 | 1999-12-08 | 中国科学院光电技术研究所 | Optical grating diffraction coaxial alignment device of submillimeter photoetching machine |
CN101551451B (en) * | 2008-04-03 | 2011-09-21 | 南京理工大学 | Adjustment and installation device for optical antenna of semiconductor laser range instrument |
CN102506835B (en) * | 2011-12-15 | 2014-01-29 | 中国科学院西安光学精密机械研究所 | Telescope and laser coaxial measuring system |
EP2762832B1 (en) * | 2013-01-30 | 2018-06-13 | Hexagon Technology Center GmbH | Optical single-point measurement |
CN105137415B (en) * | 2015-05-25 | 2017-08-29 | 北京空间机电研究所 | The apparatus and method that laser range finder field of view of receiver is demarcated and parallelism of optical axis is measured |
CN204831226U (en) * | 2015-08-14 | 2015-12-02 | 西安工业大学 | A optics light path for detection lens center is inclined to one side and optical detection device thereof |
-
2019
- 2019-12-30 CN CN201911387412.4A patent/CN110926380B/en active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005164267A (en) * | 2003-11-28 | 2005-06-23 | Canon Inc | Eccentricity measuring method |
EP1872085A1 (en) * | 2005-03-11 | 2008-01-02 | Forschungszentrum Karlsruhe GmbH | Method and device for measuring structures of an object |
CN101210805A (en) * | 2007-12-20 | 2008-07-02 | 哈尔滨工业大学 | Transmission modules coaxiality measurement method based on focal plane imaging method |
CN101514894A (en) * | 2009-04-01 | 2009-08-26 | 镇江晶鑫电子科技有限公司 | Collimator for detecting the collimated light of laser heads |
CN102519402A (en) * | 2012-01-06 | 2012-06-27 | 昆山海大数控技术有限公司 | Light guiding cylinder device |
CN107429994A (en) * | 2015-03-27 | 2017-12-01 | 奥林巴斯株式会社 | Measure head and the eccentric measure device for possessing the measure head |
CN105091798A (en) * | 2015-09-14 | 2015-11-25 | 福州腾图光电技术有限公司 | Novel transmission type eyeglass center-deflection measurement device and measurement method |
CN105737766A (en) * | 2016-03-02 | 2016-07-06 | 南通永明光纤材料有限公司 | Single optical fiber capillary concentricity fast measurement method |
CN109443253A (en) * | 2018-10-25 | 2019-03-08 | 北京国泰蓝盾科技有限公司 | A kind of laser coaxial degree detection device and its method |
Non-Patent Citations (3)
Title |
---|
多视场红外成像系统同轴度检测研究;范芸,程达,霍晓江,郭肇敏;《第三届红外成像系统仿真、测试与评价技术研讨会论文集》;20110926;全文 * |
视觉准直在线测量技术研究;卢荣胜;《中国博士学位论文全文数据库 工程科技Ⅰ辑》;20070315(第3期);全文 * |
透镜胶合光轴同轴的校正;彭巍;《宁波职业技术学院学报》;20080430;第12卷(第2期);全文 * |
Also Published As
Publication number | Publication date |
---|---|
CN110926380A (en) | 2020-03-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6286148B2 (en) | Image sensor positioning apparatus and method | |
US7830609B2 (en) | Laser light beam coupling apparatus | |
CN106932173B (en) | The measurement method of high-precision heavy-caliber optical grating five degree of freedom splicing precision | |
JP2007142425A (en) | Photonic device having integrated hybrid microlens array | |
CN104979749A (en) | High-power semiconductor fiber-coupled laser and coupling method thereof | |
WO2014020713A1 (en) | Light quantity measuring device and light quantity measuring method | |
CN110926380B (en) | Method for measuring coaxiality of optical element of laser cutting head | |
CN111272083B (en) | Measuring device and measuring method for off-axis quantity of off-axis parabolic mirror | |
CN116447988B (en) | Triangular laser measurement method adopting wide-spectrum light source | |
JP2014115144A (en) | Shape measurement apparatus, optical device, method of manufacturing shape measurement apparatus, structure manufacturing system, and structure manufacturing method | |
JP2006258863A (en) | Method for mounting optical module | |
CN106873112A (en) | A kind of dual camera assemble method | |
CN113686793B (en) | Spectrum confocal scanning displacement sensor device and application method thereof | |
CN102213585A (en) | Single-light-source dual-light-path parallel confocal measurement system | |
CN101634723B (en) | Device and method for debugging emitter position of ceilometer | |
US7601949B2 (en) | Optical scanner device | |
CN211477573U (en) | Pyramid auto-collimation scanning device for collimator focus detection | |
CN101625423A (en) | Device and method for debugging emitter position of ceilometer | |
CN102760678A (en) | System and method for actively correcting offset drift and wire bonder | |
CN104897372A (en) | Near-field nonlinear automatic test method for multi-light-emitting-unit semiconductor laser, and device thereof | |
CN108286937A (en) | Contact type scanning gauge head, coordinate measuring set, system and method | |
US10436636B2 (en) | Optical measuring device | |
TW201341754A (en) | On-axis focus sensor and method | |
JP7075831B2 (en) | Light source module and alignment method of light source module | |
JP2002335033A (en) | Apparatus and method of adjusting laser diode unit and optical unit manufacturing method |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20230918 Address after: 226000 group 18, Taobei village, Chengnan sub district office, Rugao City, Nantong City, Jiangsu Province Patentee after: Jiangsu xunlai Laser Technology Co.,Ltd. Address before: 215100 No.58, Dongfu Road, Loufeng Town, Suzhou Industrial Park, Suzhou City, Jiangsu Province Patentee before: SUZHOU QUICK LASER TECHNOLOGY Co.,Ltd. |
|
TR01 | Transfer of patent right |