JP2014115144A - Shape measurement apparatus, optical device, method of manufacturing shape measurement apparatus, structure manufacturing system, and structure manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a shape measurement apparatus which can acquire, with high accuracy, information indicating at least one of: a shape, size, unevenness distribution, and surface roughness of at least one portion of an object of a measurement target; and a position (coordinates) of a point on a surface of the measurement target.SOLUTION: A shape measurement apparatus includes: a diffracting optical component 25 which deflects a light beam L1 incident thereon; an imaging unit 18 which captures an image of a measurement region on which the light beam deflected by the diffracting optical component 25 is projected; and a shape information acquisition unit 12 which acquires shape information of a measurement object based on a result of capturing performed by the imaging unit.

Description

  The present invention relates to a shape measuring device, an optical device, a manufacturing method of a shape measuring device, a structure manufacturing system, and a structure manufacturing method.

  A shape measuring device capable of optically measuring the shape of a test object may be used for measuring the shape of a recess such as a hole or a groove (see, for example, Patent Document 1). Such a shape measuring device captures an image of the surface of the test object while illuminating it with illumination light, and acquires shape information of the test object based on the result of the imaging. In Patent Document 1, the illumination light emitted from the light source is reflected at the tip of the conical reflecting surface through the inside of the probe, propagates in the radial direction with respect to the conical rotation axis, and passes through the surface of the test object. Illuminate.

US Pat. No. 5,895,927

  By the way, the shape measuring apparatus may not obtain a desired light intensity distribution in the illumination area of the illumination light, and as a result, sufficient measurement accuracy may not be obtained. The present invention has been made in view of the above circumstances, and an object thereof is to improve the accuracy of shape measurement.

  According to the first aspect of the present invention, the diffractive optical member that deflects the incident light beam, the imaging unit that images the measurement region on which the light beam deflected by the diffractive optical member is projected, and the imaging result of the imaging unit And a shape information acquisition unit that acquires shape information of a measurement target.

  According to the second aspect of the present invention, a diffractive optical member that deflects the light beam different from the direction of the propagation path with respect to the propagation path until the light beam from the light source arrives, and the diffractive optical member deflects the light beam. An optical device is provided that includes an imaging unit that images a measurement region onto which a light beam is projected.

  According to the third aspect of the present invention, the optical unit includes an optical member that divides the light amount at each position of the light beam into a plurality of directions to form a ring-shaped line pattern, and projects the line pattern onto a measurement target. An optical device is provided that includes an imaging unit that images a pattern projected by the projection unit.

  According to the fourth aspect of the present invention, the light beam is propagated in the propagation path, the diffractive optical member that deflects the light beam is disposed at the position where the light beam propagated through the propagation path is incident, Measure the intensity distribution of the light beam deflected by the diffractive optical member, and adjust the relative position of the propagation path and the diffractive optical member based on the measurement result so that the intensity distribution has symmetry And a manufacturing method of the shape measuring device is provided.

  According to the fifth aspect of the present invention, a molding apparatus that molds the structure based on design information related to the shape of the structure, and a first aspect that measures the shape of the structure molded by the molding apparatus. There is provided a structure manufacturing system including: a shape measuring device; and a control device that compares the design information with shape information indicating the shape of the structure measured by the shape measuring device.

  According to the sixth aspect of the present invention, based on the design information related to the shape of the structure, the structure is formed, and the shape of the formed structure is determined by the shape measuring device according to the first aspect. There is provided a structure manufacturing method including measuring and comparing the design information with shape information indicating the shape of the structure measured by the shape measuring apparatus.

  According to the aspect of the present invention, the accuracy of shape measurement can be improved.

It is a figure which shows the external appearance of the shape measuring apparatus of this embodiment. It is a figure which shows schematic structure of the shape measuring apparatus of this embodiment. It is a figure which shows the optical path of the illumination light beam of the shape measuring apparatus of this embodiment. It is a figure which shows the 1st example of the diffractive optical member of this embodiment. It is a figure which shows the illumination method by the shape measuring apparatus of this embodiment. It is a figure which shows an example of light intensity distribution. It is a figure which shows the modification of the deflection | deviation member of this embodiment. It is a conceptual diagram which shows the example of a captured image. It is a figure for demonstrating the detection method of the surface by a shape information acquisition part. It is a figure which shows roughly an example of the manufacturing method of the shape measuring apparatus of this embodiment. It is a figure which shows schematically the other example of the manufacturing method of the shape measuring apparatus of this embodiment. It is a figure which shows the 2nd example of the diffractive optical member of this embodiment. It is a figure which shows the 3rd example of the diffractive optical member of this embodiment. It is a block diagram which shows the structure of the structure manufacturing system by this embodiment. It is a flowchart which shows the structure manufacturing method by this embodiment.

  This embodiment will be described. In the following description, an XYZ orthogonal coordinate system is set, and the positional relationship of each part will be described with reference to this XYZ orthogonal coordinate system. The Z-axis direction is set, for example, in the vertical direction, and the X-axis direction and the Y-axis direction are set, for example, in directions that are parallel to the horizontal direction and orthogonal to each other. Further, the rotation (inclination) directions around the X axis, Y axis, and Z axis are the θX, θY, and θZ directions, respectively.

  FIG. 1 is a diagram illustrating an appearance of a shape measuring apparatus 1 according to the present embodiment. FIG. 2 is a diagram showing a schematic configuration of the shape measuring apparatus 1 of the present embodiment. The shape measuring apparatus 1 can measure the three-dimensional shape of the object M to be measured using, for example, a light cutting method.

  The shape measuring apparatus 1 includes a scanning device 2, an optical probe 3, and a control device 4. In the shape measuring apparatus 1, the scanning device 2 holds the object M, and the optical probe 3 images the object M held by the scanning device 2. The scanning device 2 relatively moves the object M and the optical probe 3 so that the imaging range (field of view) of the optical probe 3 scans the object M. The control device 4 controls each part of the shape measuring device 1 and acquires shape information of the object M based on the imaging result of the optical probe 3.

  In the present embodiment, the shape information is information indicating at least one of the shape, size, uneven distribution, surface roughness, and position (coordinates) of a point on the measurement target surface regarding at least a part of the object M to be measured. including. The shape measuring apparatus 1 can acquire, for example, shape information related to the hole Ma (hole) of the object M to be measured.

  The scanning device 2 is a stage device that can hold an object M to be measured, for example. The scanning device 2 includes a first holding unit 7 that holds the object M and a second holding unit 8 that holds the optical probe 3. The scanning device 2 can move the second holding unit 8 holding the optical probe 3 relative to the first holding unit 7 holding the object M. The directions that can be scanned by the scanning device 2 are the above-described X-axis direction, Y-axis direction, and Z-axis direction. The second holding unit 8 has a rotation axis parallel to the X direction shown in FIG. 1 and a rotation axis parallel to the Y direction, and the optical probe 3 can be moved in any direction with respect to the posture of FIG. Can be inclined to.

  The first holding unit 7 of the present embodiment holds the object M and can rotate in the θZ direction. The θZ direction indicates a rotation direction that rotates in the XY plane about a rotation axis parallel to the Z direction shown in FIG. The object M to be measured is held by the first holding unit 7 at the time of measurement inside the hole Ma, for example, with the opening of the hole Ma facing the + Z side. In the present embodiment, when the hole passes through the object, the depth direction (extending direction) of the hole is a direction connecting one opening and the other opening of the hole along the inside of the hole. Further, when the hole Ma does not penetrate the object M, the depth direction of the hole is a direction connecting the opening and the bottom of the hole along the inside of the hole. For example, the depth direction of the hole Ma of the object M is substantially parallel to the Z-axis direction when the object M is held by the first holding unit 7 with the opening of the hole Ma facing + Z side (upward). .

  The second holding unit 8 of the present embodiment is disposed on the + Z side (upward) with respect to the first holding unit 7. The second holding portion 8 is attached so that the longitudinal direction of the optical probe 3 and the Z-axis direction substantially coincide with each other. The second holding unit 8 holds the optical probe 3 and can move in each of the X-axis direction, the Y-axis direction, and the Z-axis direction. When the second holding portion 8 moves in the Z-axis direction during the measurement of the hole Ma, the optical probe 3 moves forward and backward with respect to the extending direction of the hole Ma formed in the object M. The scanning device 2 moves the second holding unit 8 so that at least a part of the optical probe 3 held by the second holding unit 8 is inserted into the hole Ma of the object M held by the first holding unit. Can move.

  As illustrated in FIG. 2, the scanning device 2 includes a drive unit 10 and a position information acquisition unit 11. The drive unit 10 includes an actuator such as an electric motor, and drives the first holding unit 7 and the second holding unit 8. The position information acquisition unit 11 includes a position measurement sensor such as an encoder, and acquires position information of the optical probe 3.

  In the present embodiment, the control device 4 controls each part of the shape measuring device 1. For example, the control device 4 controls the drive unit 10 of the scanning device 2 to control the relative position between the optical probe 3 and the object M and the attitude of the optical probe 3. Further, the control device 4 controls, for example, a drive circuit of an image sensor 18 described later in the optical probe 3 to cause the optical probe 3 to image a measurement region (the inner surface of the hole Ma) on the object M.

  In addition, the control device 4 includes a shape information acquisition unit 12 that acquires shape information of a measurement target. The shape information acquisition unit 12 acquires position information of the optical probe 3 from the position information acquisition unit 11 of the scanning device 2, and acquires data (captured image data) indicating an image obtained by imaging the measurement region from the optical probe 3. The shape information acquisition unit 12 associates the position of the surface of the object M obtained from the captured image data corresponding to the position of the optical probe 3 with the position of the optical probe 3, thereby obtaining shape information related to the three-dimensional shape of the measurement target. To get.

  The control device 4 of the present embodiment includes an interface capable of executing communication between a computer system having a CPU and the like and a device external to the computer system. The control device 4 can execute at least one of various processes such as image processing, interpolation processing, statistical processing, and display processing related to the measurement result.

  Note that the control device 4 may include a logic circuit such as an ASIC that performs various processes required for controlling each unit of the shape measuring device 1, and may not include a computer system. The control device 4 may be connected to an input device that can input a signal to the control device 4. This input device may be one type or two or more types of communication devices capable of inputting data from input devices such as a keyboard and a mouse, or a device external to the computer system. The control device 4 may include a display device such as a liquid crystal display, or may be connected to the display device. The control device 4 may be a device external to the shape measuring device 1.

  Next, the optical probe 3 will be described in detail. In the present embodiment, the optical probe 3 is an optical device for shape measurement, and images a measurement region on the measurement target object M (inner peripheral surface of the hole Ma) while incidentally illuminating. The optical probe 3 shown in FIG. 2 propagates the illumination light beam L1 emitted from the light source 14, the diffractive optical member 16 that deflects the illumination light beam L1 with respect to the propagation path 15, and the diffractive optical member 16 And an imaging unit 17 that captures an image of the measurement region on which the illumination light beam L1 is projected.

  In the present embodiment, the light source 14 includes a laser diode (solid light source), and emits laser light as the illumination light beam L1. The light source 14 may include a solid light source such as a light emitting diode (LED), or may include a lamp light source such as a high pressure mercury lamp. When the light intensity distribution of the light source 14 itself is different from the ideal distribution, for example, a pinhole may be arranged in addition to the light source 14 to form a light source unit including the pinhole. In this case, it is possible to improve the measurement accuracy by reflecting the intensity distribution obtained by the pinhole in the illumination intensity distribution in the measurement region described later. In addition to the technique using a pinhole, a technique can be used in which an image whose intensity distribution is corrected can be formed by light from a laser diode, and the corrected image is projected onto a measurement region. In addition, when the wavelength spectrum of the illumination light beam L1 emitted from the light source is wide, the diffracted light of the illumination light beam L1 can be spread in various directions by the diffractive optical member 16, so if the wavelength spectrum is wide, use a bandpass filter or the like. The band may be narrowed.

  In the present embodiment, the imaging unit 17 (imaging device) includes an imaging element 18 and an imaging optical system 19 (imaging lens).

  The image sensor 18 is constituted by, for example, a CCD sensor or a CMOS sensor. The image sensor 18 includes, for example, a photodiode that is disposed in each of a plurality of pixels and converts incident light into electric power (charge), and a readout circuit that reads out charges generated by the photodiode. For example, the photodiodes are two-dimensionally arranged on the light receiving surface 18 a of the image sensor 18.

  The imaging optical system 19 forms an object surface 19a conjugate with the light receiving surface 18a (image surface) of the image sensor 18. In the present embodiment, the object plane 19a includes a plane that is substantially orthogonal to the advancing / retreating direction (Z-axis direction) of the optical probe 3. A light beam emitted from each point on the object surface 19a (hereinafter referred to as an imaging light beam L2) converges on each point on the light receiving surface 18a of the image sensor 18. The imaging optical system 19 forms an image plane by condensing the light beams emitted from the respective points on the object surface 19a without using the diffractive optical member 16, and the illumination light beam L1 passes therethrough. The diffractive optical member 16 in the optical path is not on the optical path of the light beam condensed on the image plane.

  The imaging optical system 19 of the present embodiment is a refractive optical system and includes a plurality of optical members (lenses). At least one of the optical members of the imaging optical system 19 is an axially symmetric optical member. Here, the symmetry axis (center axis) of the optical member is referred to as the optical axis AX of the imaging optical system 19. The imaging optical system 19 may be either a reflective optical system or a catadioptric optical system.

  In the present embodiment, the optical probe 3 projects (irradiates) the illumination light beam L1 emitted from the light source 14 onto the measurement region on the object M via the imaging optical system 19 and the diffractive optical member 16, thereby measuring the measurement region. Incident lighting. The optical probe 3 includes a light guide member 20 that guides the illumination light beam L1 emitted from the light source to the imaging optical system 19.

  The light guide member 20 includes, for example, a half mirror, and is disposed in the optical path between the image sensor 18 and the imaging optical system 19. The light guide member 20 has a surface 20a disposed at a position where the illumination light beam L1 emitted from the light source 14 enters. The surface 20 a is inclined with respect to the optical axis AX of the imaging optical system 19. The angle formed by the surface 20a and the optical axis AX of the imaging optical system 19 is set to 45 °, for example.

  The illumination light beam L1 emitted from the light source 14 is incident on the surface 20a of the light guide member 20, and at least part of the light is reflected by the surface 20a and is incident on the imaging optical system 19. The illumination light beam L1 incident on the imaging optical system 19 via the light guide member 20 travels along the optical axis AX of the imaging optical system 19. In the present embodiment, the propagation path 15 includes the optical path of the illumination light beam L <b> 1 in the imaging optical system 19. That is, the optical axis of the imaging optical system 19 is set on the propagation path 15.

  As shown in FIG. 2, the diffractive optical member 16 is disposed at a position where the illumination light beam L <b> 1 that has passed through the imaging optical system 19 enters. The optical probe 3 illuminates the measurement region with the illumination light beam L1 that is incident on the diffractive optical member 16 through the imaging optical system 19 and diffracted.

  Here, the optical path of the illumination light beam L1 from the imaging optical system 19 to the measurement region (illumination region) will be described. FIG. 3 is a perspective view showing an optical path of the illumination light beam L1 of the shape measuring apparatus 1 of the present embodiment. FIG. 4 is a side sectional view showing a first example of the diffractive optical member 16 of the present embodiment.

  In the present embodiment, the diffractive optical member 16 is disposed on the opposite side of the imaging optical system 19 with respect to the object plane 19 a of the imaging optical system 19. The diffractive optical member 16 is a plate-like member and is disposed so as to be orthogonal to the optical axis AX of the imaging optical system 19. The diffractive optical member 16 has a reflecting surface that reflects and diffracts the illumination light beam L1 emitted from the imaging optical system 19.

  The diffractive optical member 16 includes, for example, a diffractive optical element such as a surface relief type. As shown in FIGS. 3 and 4, the diffractive optical member 16 of the present embodiment has a plurality of irregularities (reliefs 16a) arranged on the surface on which the illumination light beam L1 is incident. The reliefs 16a are repeatedly arranged in a direction orthogonal to the optical axis AX of the imaging optical system 19 (hereinafter referred to as the radial direction R). In the present embodiment, the radial direction R is a direction parallel to the XY plane and corresponds to a radial direction with respect to the optical axis AX.

  Each of the plurality of reliefs 16 a has a rotationally symmetric shape with respect to the optical axis AX of the imaging optical system 19. In other words, the plurality of reliefs 16 a are provided concentrically with the optical axis AX of the imaging optical system 19 as the center. As shown in FIG. 4, the cross section of the diffractive optical member 16 on the surface including the optical axis AX of the imaging optical system 19 includes rectangular irregularities. The pitch p1 (the pitch of the convex portion or the pitch of the concave portion) of the plurality of reliefs 16a is substantially the same when the manufacturing error is ignored.

  Note that when the illumination light beam L1 illuminates the measurement region via the diffractive optical member 16, the imaging optical system 19 is configured so that the width of the pattern projected onto the measurement region is minimized by the illumination light beam L1 being illuminated. Thus, the light source 14 and the imaging optical system 19 may be arranged so that the light source 14 and the measurement region have a conjugate relationship. In that case, the light beam after exiting from the imaging optical system 19 is slightly converged. When the light beam that converges in this way reaches the diffractive optical member 16, the pitch of the reliefs 16a may be slightly shortened from the inside to the outside instead of being equally spaced. In the present embodiment, the case where the illumination light beam L1 is a parallel light beam will be described below.

  The illumination light beam L1 diffracted by such a diffractive optical member 16 propagates along a conical surface with the optical axis AX of the imaging optical system 19 as the rotation center.

  The diffractive optical member 16 may include a volume amplitude type diffractive optical element or a volume phase type diffractive optical element as long as it causes diffraction of the illumination light beam L1. For example, the diffractive optical member 16 may be a volume holographic grating (VGH), a computer generated hologram (CGH), or a photonic crystal.

  As shown in FIGS. 2 and 3, the optical probe 3 of the present embodiment has a deflecting member 21 that deflects the illumination light beam L1 so that the illumination light beam L1 diffracted by the diffractive optical member 16 propagates along the object plane 19a. Is provided. The deflecting member 21 is provided so that at least a part of the illumination light beam L1 passing through the deflecting member 21 passes through the object surface 19a or the vicinity thereof along the object surface 19a of the imaging optical system 19. The range in the vicinity of the object surface 19a is, for example, the subject of the optical probe 3 so that the image focused by the light beam reflected and scattered in the measurement region (imaging light beam L2 shown in FIG. 2) is on the light receiving surface 18a of the image sensor 18. It is determined according to the depth.

  The deflecting member 21 has a reflecting surface 21 a that is rotationally symmetric with respect to the optical axis AX of the imaging optical system 19. The reflection surface 21a is arranged so that a predetermined order of diffracted light (for example, ± 1st order diffracted light) out of ± nth order diffracted light diffracted by the diffractive optical member 16 is incident thereon. The reflecting surface 21a is arranged so that the illumination light beam reflected by the reflecting surface 21a after being diffracted by the diffractive optical member 16 propagates in a direction orthogonal to the optical axis AX.

  As shown in FIG. 2, the deflecting member 21 includes, for example, a cylindrical first portion 21b, and a truncated cone-shaped second portion 21c disposed on the same side as the diffractive optical member 16 with respect to the first portion 21b. Have The rotation center axis of the second portion 21 c and the rotation center axis of the second portion are both set substantially coaxial with the optical axis AX of the imaging optical system 19. For example, the first portion 21b and the second portion 21c are formed of a base material made of a material through which the illumination light beam L1 passes (transmits). The first portion 21b and the second portion 21c are integrally formed of the same forming material, for example. The reflective surface 21a is constituted by a reflective film formed by, for example, a vapor deposition method on the conical surface of the second portion 21c. The illumination light beam L1 emitted from the imaging optical system 19 enters the diffractive optical member 16 through the first portion 21b and the second portion 21c, is reflected and diffracted, and then enters the reflecting surface 21a of the second portion 21c.

  The structure of the deflecting member 21 can be changed as appropriate. For example, the deflecting member 21 may not include the first portion 21b. Further, one or both of the first portion 21b and the second portion 21c may be an annular shape having a gap around the rotation center axis, or may have a structure in which the illumination light beam L1 passes through the gap around the rotation center axis. . In this case, the annular portion of the first portion 21b and the second portion 21c may be made of a material that blocks the illumination light beam L1. Moreover, the reflective surface 21a may be configured such that the illumination light beam L1 is reflected by satisfying the total reflection condition. The first portion 21b and the second portion 21c are separate members and may be joined to each other.

  As shown in FIG. 2, the optical probe 3 of this embodiment includes a lens barrel 25 (holding body) that holds at least one of the optical members of the imaging optical system 19. In the lens barrel 25, a direction parallel to the optical axis AX (Z-axis direction) of the imaging optical system 19 is a long direction, and a direction orthogonal to the optical axis AX (XY direction) is a short direction. The lens barrel 25 is provided so as to surround the propagation path 15, and at least a portion around the propagation path 15 is a cylindrical shape that is axisymmetric with respect to the optical axis AX of the imaging optical system 19.

  In the present embodiment, the lens barrel 25 holds the diffractive optical member 16. That is, the imaging optical system 19 and the diffractive optical member 16 are held by the same holding body. For example, the diffractive optical member 16 is fixed to an end 25 a (tip) on the opposite side of the imaging element 18 in the lens barrel 25.

  In the present embodiment, the lens barrel 25 holds the deflection member 21. That is, the diffractive optical member 16 and the deflecting member 21 are held by the same holder. For example, the deflecting member 21 is fixed to the lens barrel 25 so that the columnar first portion 21 b contacts the inner peripheral surface of the cylindrical lens barrel 25.

  In the present embodiment, the lens barrel 25 includes a passage portion 25b through which the illumination light beam L1 passes (transmits). The passage part 25b is formed of, for example, a material that transmits the illumination light beam L1. The passage 25b is a light beam (hereinafter referred to as image forming) that connects an optical path of the illumination light beam L1 from the inside of the optical probe 3 (lens barrel 25) to the measurement region and the light receiving surface 18a of the image sensor 18 via the measurement region. And the optical path of the light beam L2. The passage portion 25b has, for example, a cylindrical shape that is axisymmetric with respect to the optical axis AX of the imaging optical system 19.

  In the present embodiment, the lens barrel 25 includes a light shielding portion 25c that shields the illumination light beam L1. The light shielding part 25c is arranged so as to suppress generation of stray light. The light shielding unit 25 c is disposed, for example, around the imaging optical system 19 and suppresses one or both of generation of stray light from the imaging optical system 19 and incidence of stray light on the imaging optical system 19. The light shielding unit 25c is disposed, for example, around the diffractive optical member 16, and shields diffracted light other than desired diffracted light (for example, ± 1st order diffracted light) among ± nth diffracted light diffracted by the diffractive optical member 16.

  The structure of the lens barrel 25 can be changed as appropriate. For example, the lens barrel 25 may have a structure in which one or both of the diffractive optical member 16 and the deflecting member 21 are held by a support column. In this case, at least a part of the passage portion 25b may be a gap. Further, the lens barrel 25 may not hold one or both of the diffractive optical member 16 and the deflecting member 21. In this case, one or both of the diffractive optical member 16 and the deflecting member 21 may be held by a member different from the lens barrel 25, and at least a part of the passage portion 25b may be a gap. . Further, the lens barrel 25 may not include the light shielding portion 25c.

  FIG. 5 is a diagram showing an illumination method by the shape measuring apparatus 1 of the present embodiment. FIG. 6 is a diagram illustrating an example of the light intensity distribution of the illumination light beam L1. The light intensity distribution shown in FIG. 6A is an example of the light intensity distribution of the illumination light beam L1 when entering the diffractive optical member 16, and is assumed to be a Gaussian distribution for convenience of explanation. The light intensity distribution shown in FIGS. 6B and 6C is an example of the light intensity distribution of the illumination light beam L1 that is diffracted by the diffractive optical member 16 and travels in different directions.

  In the present embodiment, the illumination light beam L1 emitted from the imaging optical system 19 is a light beam derived from the laser light emitted from the light source 14, and is closer to a parallel light beam than the light emitted from the LED or lamp light source. Here, the illumination light beam L1 emitted from the imaging optical system 19 is assumed to be a parallel light beam for convenience of explanation.

  As shown in FIG. 5, the + first-order diffracted light L1a of the illumination light beam L1 diffracted by the diffractive optical member 16 is on one side with respect to the optical axis AX (for example, the XZ plane) of the imaging optical system 19 including the optical axis AX ( + X side) and is reflected by the reflecting surface 21a of the deflecting member 21. At least a portion of the + 1st order diffracted light L1a reflected by the reflecting surface 21a travels along the object surface 19a and illuminates the measurement region A1. As shown in FIG. 6B, the light intensity distribution of the + 1st-order diffracted light L1a is such that the light intensity at each position has a diffraction efficiency or the like relative to the light intensity distribution of the illumination light beam L1 when entering the diffractive optical member 16. The distribution is reduced by a corresponding coefficient. That is, for example, the symmetry of the light intensity distribution of the illumination light beam L1 with respect to the optical axis AX in the XZ plane is substantially maintained in the light intensity distribution of the + 1st order diffracted light L1a.

  Further, the −1st order diffracted light L1b of the illumination light beam L1 diffracted by the diffractive optical member 16 propagates to the other side (−X side) with respect to the optical axis AX on the XZ plane, for example, and is reflected by the reflecting surface 21a of the deflecting member 21. At least a part of the first-order diffracted light L1b reflected by the reflecting surface 21a travels along the object surface 19a and illuminates the measurement region A2. As shown in FIG. 6C, the light intensity distribution of the −1st order diffracted light L1b is similar to the light intensity distribution of the + 1st order diffracted light L1a shown in FIG. This is a distribution in which the symmetry of the light intensity distribution of L1 is substantially maintained.

  As described above, the illumination light beam L1 emitted from the optical probe 3 is a diffractive optical member as long as the intensity distribution at the position where the optical axis AX of the imaging optical system 19 and the diffractive optical member 16 intersect is symmetric. 16 is distributed to both ± first-order lights while maintaining the intensity distribution. Therefore, if the intensity distribution of the illumination light beam L1 is a symmetric intensity distribution, the intensity distribution in the direction parallel to the optical axis AX with respect to the object plane 19a is a light beam having a symmetric light intensity distribution.

  Although the propagation of the diffracted light on the XZ plane has been described here, the + 1st order diffracted light L1a and the −1st order diffracted light L1b are similarly propagated in any plane including the optical axis AX, and the axis is related to the optical axis AX. Propagate symmetrically. As a result, the illumination light beam emitted from the optical probe 3 has an annular line pattern in which the direction parallel to the optical axis AX is the short direction and the circumferential direction around the optical axis AX is the long direction. In the present embodiment, the dimension in the short direction of the ring-shaped line pattern is referred to as a spot width SB.

  In this way, the diffractive optical member 16 divides the illumination light beam L1 into partial light beams (+ 1st order diffracted light L1a and −1st order diffracted light L1b) traveling in a plurality of directions. A line pattern like this is projected onto the measurement area.

  Although the illumination light beam L1 is shown as a parallel light beam in the optical path from the imaging optical system 19 to the measurement areas A1 and A2 in FIG. 5, the illumination light beam L1 extends from the imaging optical system 19 to the measurement areas A1 and A2. It may be a convergent light beam or a divergent light beam in at least a part of the optical path.

  The optical probe 3 may be configured such that the illumination light beam L1 is emitted from the imaging optical system 19 as a convergent light beam, and the spot width SB is minimized at any position on the object plane 19a. For example, there may be a case where a point light source image as small as possible is desired to be formed on the inner surface of the measurement object in accordance with the size of the inner diameter of the measurement object. In this case, as in the present embodiment, when the light source 14 is a laser light source and substantially forms a point light source image, the optical probe 3 has a position optically conjugate with the light source 14 at the object plane 19a. The position of the light source 14 may be adjusted so as to be arranged above. In that case, both the object plane 19a and the image sensor 18 may be in a conjugate position.

  When the illumination light beam L1 travels from the light source 14 to the object plane 19a, the optical path passes through the diffractive optical member 16. On the other hand, the optical path from the object surface 19a to the imaging optical system 19 out of the optical path followed by the light beam traveling from the object surface 19a to the image sensor 18 does not pass through the diffractive optical member 16, and the imaging optical system 21 of the illumination light beam L1. Compared to the optical path from to the object surface 19a, it is shorter. In order to cancel out this shortening, the optical path length of the illumination light beam L1 from the light source 14 to the imaging optical system 17 is shorter than the optical path length of the imaging light beam L2 from the imaging optical system 17 to the imaging device 18. It has become.

  When the illumination light beam L1 directed from the imaging optical system 19 toward the diffractive optical member 16 is a substantially parallel light beam, the optical probe 3 converges the illumination light beam L1 diffracted by the diffractive optical member 16 on the object surface 19a. The optical member for making it may be included. Such an optical member can be realized, for example, by making the reflecting surface 21a of the deflecting member 21 a concave mirror, and can also be realized by giving the diffractive optical member 16 a lens effect.

  Further, when the illumination light beam L1 from the diffractive optical member 16 toward the object surface is a convergent light beam, and the pitch of the annular zone of the diffractive optical member 16a is made very fine to increase the diffraction angle by the diffractive optical member 16, The light beam L1 is greatly focused in the in-plane direction of FIG. 5 by the diffractive action of the diffractive optical member 16a, and the diffractive action of the diffractive optical member 16a remains almost zero in the direction orthogonal to the paper surface of FIG. Therefore, when an arbitrary one-point circular pattern is placed at the position of the light source 14, the circular pattern image formed on the object surface 19a may be elliptical. This is a kind of so-called astigmatism. For example, the shape of the reflecting surface 21a can be adjusted as shown in FIG. 7 so as to reduce such aberration.

  FIG. 7 is a view showing a modification of the deflection member 21. In the deflection member 21 of FIG. 7, the shape of the reflecting surface 21a is a free-form surface shape in which the cylindrical shape is an annular shape. In other words, the reflecting surface 21a has a shape in which a conical surface rotationally symmetric about a predetermined axis is convex outward. The reflecting surface 21a may not have a circular outline in cross section including the Z axis and the X axis, and may have a convex reflecting surface on the object plane side.

  The reflecting area of the reflecting surface 21a of the deflecting member 21 is provided at a position where a light beam having a predetermined diffraction order generated by the diffractive action of the diffractive optical member 16a arrives and a light beam having an order different from the predetermined diffraction order does not reach. You can also. For example, in the optical probe 3 of the present embodiment, the first-order diffracted light propagates along the object plane 19a by the diffractive optical member 16a. At this time, second-order or higher-order diffracted light may be generated in the diffractive optical member 16a. The reflecting surface 21a of the deflecting member 21 may be arranged so as to avoid a position where second-order or higher-order diffracted light is incident. Thereby, it is suppressed that the light flux of the order different from a predetermined diffraction order goes to a measurement area. In addition, a light absorbing member that absorbs a light beam of an order different from the predetermined diffraction order may be disposed. This light absorbing member can also be realized, for example, by providing a light absorbing film at a position where the light beam enters the deflecting member 21 when a light beam having an order different from a predetermined diffraction order reaches the deflecting member 21.

  Next, a detection method for detecting the surface of the object M based on a captured image captured by the image sensor 18 will be described. FIG. 8 is a conceptual diagram illustrating an example of the captured image Im.

  As shown in FIG. 2, the illumination light beam L1 (annular line pattern) propagated along the object surface 19a is reflected and scattered in the measurement region. The imaging light beam L2 reflected and scattered in the measurement region enters the imaging optical system 19 through the passage portion 25b of the lens barrel 25. At least a part of the imaging light beam L2 incident on the imaging optical system 19 enters the light receiving surface 18a of the image sensor 18 through the light guide member 20 (half mirror).

  Here, since the light receiving surface 18a and the object surface 19a are optically conjugate, the image of the intersection line 26 between the object surface 19a and the surface of the object M is focused on the light receiving surface 18a. Therefore, an intersection line 26 between the object surface 19a and the surface of the object M becomes a bright line 27 in the captured image Im shown in FIG. Each point on the bright line 27 corresponds one-to-one with any point on the intersection line 26. For example, when the intersection line 26 has an annular shape, the bright line 27 has an annular shape. The shape information acquisition unit 12 illustrated in FIG. 2 calculates the position information of each point on the bright line 27 in the captured image Im as illustrated in FIG. 8, thereby the position of the point on the object M corresponding to each point. Calculate information. Note that the width B of the bright line 27 becomes narrower as the spot width SB shown in FIG. As the width B of the bright line 27 becomes narrower, the position of each point on the bright line 27 can be specified with higher accuracy.

  FIG. 9 is a diagram for explaining a surface detection method by the shape information acquisition unit 12. FIG. 9 schematically illustrates the brightness distribution in the radial direction R2 in the captured image Im. Here, the radial direction R2 is a radial direction related to the point C on the captured image Im shown in FIG. The point C is, for example, a point on the captured image Im corresponding to a point on the light receiving surface 18a of the image sensor 18 that is optically conjugate with the intersection of the optical axis AX of the imaging optical system 19 and the object surface 19a. It is.

  The brightness at each position on the captured image Im is a value (tone value) corresponding to the output from each pixel of the image sensor 18, and has a discrete distribution as indicated by reference numeral 28 (solid line) in FIG. It is represented by The shape information acquisition unit 12 calculates a continuous light intensity distribution as indicated by reference numeral 29 (broken line) in FIG. 9 by performing an interpolation calculation using, for example, gradation values. In the present embodiment, the shape information acquisition unit 12 calculates the light intensity distribution 29 so as to have a distribution (for example, a Gaussian distribution) having the same symmetry as the light intensity distribution of the illumination light beam L1 as shown in FIG. To do. The shape information acquisition unit 12 calculates the position information of the peak 30 of the light intensity distribution 29 as information indicating the position of the point on the object M.

  The shape information acquisition unit 12 calculates the position information of each point on the bright line 27 of the captured image Im as described above, so that the portion of the surface of the object M that intersects the object plane 19a (the intersection shown in FIG. 2). The position information of the line 26) is calculated. Similarly, the shape information acquisition unit 12 calculates the position information of the surface of the object M in the measurement region corresponding to the position of the optical probe 3 for each of the plurality of captured images captured by the optical probe 3 while changing the position. To do. The shape information acquisition unit 12 indicates the three-dimensional shape of the object M by associating the position of the optical probe 3 with the position information of the object M calculated based on the captured image captured at this position. Get shape information.

  By the way, in a general shape measuring apparatus, a conical surface mirror may be used instead of a diffractive optical member to form a ring-shaped line pattern. In this case, the light intensity distribution in the width direction of the ring-shaped line pattern is, for example, a distribution on one side with respect to the optical axis AX in the Gaussian distribution shown in FIG. The symmetry is also reduced. Since the imaging light beam is a light beam derived from an annular line pattern, the symmetry of the light intensity distribution on the light receiving surface is lowered. As a result, the detection accuracy of the point position on the surface of the object shown in the captured image is lowered, and the measurement accuracy may be lowered.

  In the present embodiment, the optical probe 3 suppresses a decrease in symmetry in the width direction of the illumination light beam L1 (line pattern), and images a measurement region illuminated by such an illumination light beam L1, so that shape measurement is performed. Accuracy can be improved. In addition, since the shape measuring apparatus 1 includes such an optical probe 3, for example, the position information of the peak 30 of the light intensity distribution 29 can be accurately calculated, and the accuracy of the shape measurement can be improved. .

  Next, a manufacturing method of the shape measuring apparatus 1 (optical probe 3) will be described. The optical probe 3 as described above is manufactured by assembling each part while adjusting the position of each part of the optical probe 3. For example, the diffractive optical member 16 shown in FIG. 2 has a relative position to the imaging optical system 19 so that the light intensity distribution of the illumination light beam L1 emitted from the optical probe 3 has symmetry in the width direction of the line pattern. It is adjusted and fixed with respect to the imaging optical system 19.

  FIG. 10 is a diagram schematically illustrating an example of the manufacturing method of the shape measuring apparatus according to the present embodiment. In the example shown in FIG. 10, the diffractive optical member 16 is arranged such that the position with respect to the imaging optical system 19 is variable. In FIG. 10, an optical sensor 31 capable of measuring the light intensity distribution is disposed at the position of the reflecting surface 21 a of the deflecting member 21 shown in FIG. 5.

  In this example, the manufacturing apparatus of the shape measuring apparatus 1 emits the illumination light beam L1 by the light source 14 shown in FIG. 2 in the same manner as the shape measurement, for example, and this illumination light beam L1 is transmitted through the imaging optical system 19. The diffractive optical member 16 is irradiated. This manufacturing apparatus measures the light intensity distribution of the illumination light beam L1 diffracted by the diffractive optical member 16 by the optical sensor 31 while moving the diffractive optical member 16 in a direction parallel to the XY plane. This manufacturing apparatus determines the relative positions of the imaging optical system 19 and the diffractive optical member 16 in the XY plane so that the light intensity distribution measured by the optical sensor 31 has symmetry. The relative position of the diffractive optical member 16 with respect to the imaging optical system 19 is fixed in the state of being positioned in this way.

  For adjusting the inclination between the imaging optical system 19 and the diffractive optical member 16, for example, another optical sensor 31 is added in a direction orthogonal to the XZ plane (the paper plane in FIG. 10). If the optical sensor 31 and the optical sensor 31 arranged on the left and right with respect to the optical axis of the imaging optical system 19 shown in FIG. And the inclination of the diffractive optical member 16 can be adjusted.

  FIG. 11 is a diagram schematically illustrating another example of the manufacturing method of the shape measuring apparatus according to the present embodiment. In the example shown in FIG. 11, the same optical sensor 31 as in the example shown in FIG. 10 measures the light intensity distribution of the illumination light beam L1 diffracted by the diffractive optical member 16 and then reflected by the reflecting surface 21a of the deflecting member 21. The relative position of the diffractive optical member 16 with respect to the imaging optical system 19 is determined and positioned with respect to the imaging optical system 19 so that the light intensity distribution measured by the optical sensor 31 has symmetry. The relative position with respect to the imaging optical system 19 is fixed. Further, in this example, the position of the light source 14 shown in FIG. 2 is based on the light intensity distribution detected by the optical sensor 31, and the width of the illumination light beam L1 (line pattern) is minimized on the object surface 19a. To be adjusted.

  Next, a modified example of the diffractive optical member 16 will be described. FIG. 12 is a diagram illustrating a second example of the diffractive optical member 16 of the present embodiment. FIG. 13 is a diagram illustrating a second example of the diffractive optical member 16 of the present embodiment.

  In the second example and the third example, the diffractive optical member 16 includes irregularities having a triangular cross section on the plane including the optical axis AX of the imaging optical system 19 shown in FIG. In the second example shown in FIG. 12, each of the irregularities on the surface of the diffractive optical member 16 has an isosceles triangle shape that is symmetric with respect to a plane orthogonal to the radial direction R. Further, in the third example shown in FIG. 13, each of the irregularities on the surface of the diffractive optical member 16 has an asymmetric triangular shape (right triangular shape) with respect to a plane orthogonal to the radial direction R. When such a diffractive optical member 16 is used, the orientation characteristics of diffraction by the diffractive optical member 16 can be adjusted. In addition, since the diffraction efficiency is better than that of the rectangular unevenness, it is possible to irradiate the measurement region with the illumination light beam L1 having a high intensity.

  Next, a structure manufacturing system including the above-described shape measuring device will be described.

  FIG. 14 is a block configuration diagram of the structure manufacturing system 200. The structure manufacturing system 200 of the present embodiment includes the shape measuring device, the design device 110, the molding device 120, the control device (inspection device) 130, and the repair device 140 as described in the above embodiment. . The control device 130 includes a coordinate storage unit 131 and an inspection unit 132.

  The design device 110 creates design information related to the shape of the structure, and transmits the created design information to the molding device 120. In addition, the design device 110 stores the created design information in the coordinate storage unit 131 of the control device 130. The design information includes information indicating the coordinates of each position of the structure.

  The forming apparatus 120 produces the above structure based on the design information input from the design apparatus 110. The molding of the molding apparatus 120 includes, for example, casting, forging, cutting, and the like. The shape measuring device measures the coordinates of the manufactured structure (measurement object) and transmits information (shape information) indicating the measured coordinates to the control device 130.

  The coordinate storage unit 131 of the control device 130 stores design information. The inspection unit 132 of the control device 130 reads design information from the coordinate storage unit 131. The inspection unit 132 compares information (shape information) indicating coordinates received from the shape measuring apparatus with design information read from the coordinate storage unit 131. The inspection unit 132 determines whether or not the structure has been molded according to the design information based on the comparison result. In other words, the inspection unit 132 determines whether or not the created structure is a non-defective product. The inspection unit 132 determines whether or not the structure can be repaired when the structure is not molded according to the design information. When the structure can be repaired, the inspection unit 132 calculates a defective part and a repair amount based on the comparison result, and transmits information indicating the defective part and information indicating the repair amount to the repair device 140.

  The repair device 140 processes the defective portion of the structure based on the information indicating the defective portion received from the control device 130 and the information indicating the repair amount.

  FIG. 15 is a flowchart showing the flow of processing by the structure manufacturing system 200. In the structure manufacturing system 200, first, the design apparatus 110 creates design information related to the shape of the structure (step S101). Next, the molding apparatus 120 produces the structure based on the design information (step S102). Next, the shape measuring apparatus measures the shape of the manufactured structure (step S103). Next, the inspection unit 132 of the control device 130 compares the shape information obtained by the shape measuring device with the design information described above to inspect whether or not the structure is created according to the integrity design information (step). S104).

  Next, the inspection unit 132 of the control device 130 determines whether or not the created structure is a non-defective product (step S105). When the inspection unit 132 determines that the created structure is a non-defective product (YES in step S105), the structure manufacturing system 200 ends the process. If the inspection unit 132 determines that the created structure is not a good product (NO in step S105), the inspection unit 132 determines whether the created structure can be repaired (step S106).

  In the structure manufacturing system 200, when the inspection unit 132 determines that the created structure can be repaired (YES in step S106), the repair device 140 performs reworking of the structure (step S107), and processing in step S103 Return to. When the inspection unit 132 determines that the created structure cannot be repaired (No in step S106), the structure manufacturing system 200 ends the process. As described above, the structure manufacturing system 200 ends the processing of the flowchart shown in FIG.

  The structure manufacturing system 200 of the present embodiment can determine whether or not the created structure is a non-defective product because the shape measuring apparatus in the above embodiment can accurately measure the coordinates of the structure. it can. In addition, the structure manufacturing system 200 can repair the structure by reworking the structure when the structure is not a good product.

  In addition, the repair process which the repair apparatus 140 in this embodiment performs may be replaced with the process in which the shaping | molding apparatus 120 re-executes a shaping | molding process. In that case, when it determines with the test | inspection part 132 of the control apparatus 130 being able to repair, the shaping | molding apparatus 120 re-executes a shaping | molding process (forging, cutting, etc.). Specifically, for example, the molding apparatus 120 cuts a portion that is originally to be cut and is not cut in the structure. Thereby, the structure manufacturing system 200 can create a structure correctly.

  The technical scope of the present invention is not limited to the above-described embodiment or modification. For example, one or more of the requirements described in the above embodiments or modifications may be omitted. In addition, the requirements described in the above embodiments or modifications can be combined as appropriate.

  The shape measuring device 1 is not limited to the hole Ma, and can also measure the inner surface (measurement region) of the groove (recess). The shape measuring apparatus 1 can also move the optical probe 3 in the groove extending direction when measuring the inner surface of the groove with respect to an object in which a groove extending in a predetermined direction is formed. The extending direction of the grooves may be, for example, a direction parallel to the XY plane or a direction intersecting the XY plane. Moreover, the shape measuring apparatus according to the above-described embodiment can measure, for example, a cliff portion of a step. Moreover, the measuring method by the shape measuring apparatus 1 is not limited to the light cutting method, For example, the confocal method or the SFF method may be used.

  The shape measuring apparatus 1 may not include the deflection member 21. In this case, the shape measuring apparatus 1 may correct defocus due to a deviation between the conical surface through which the illumination light beam A diffracted by the diffractive optical member 16 propagates and the object surface 19a. For example, the shape information acquisition unit 12 detects the aberration of the imaging light beam L2 based on the imaging result of the imaging element 18, and determines whether the defocus amount is positive or negative (front pin or rear pin) based on the aberration detection result. It is possible to correct the defocusing.

  In the above-described embodiment, the diffractive optical member 16 has a concentric repeating structure, but the repeating structure may not be concentric. For example, the repeating structure may be a regular polygon centered on the intersection between the optical axis AX and the diffractive optical member 16. In the above-described embodiment, the pitch p1 of the reliefs 16a having a repetitive structure is substantially uniform, but the pitch p1 may be non-uniform. For example, the light intensity distribution of the illumination light beam L1 diffracted by the diffractive optical member 16 may be adjusted by changing the pitch p1 of the relief 16a in the radiation direction with respect to the optical axis AX. In addition, the cross section of the diffractive optical member 16 on the surface including the optical axis AX may include rectangular irregularities and triangular irregularities, or may include irregularities other than the rectangular shape and the triangular shape. .

DESCRIPTION OF SYMBOLS 1 Shape measuring device, 2 Scanning device, 3 Optical probe, 4 Control apparatus, 12 Shape information acquisition part, 14 Light source, 15 Propagation path, 16 Diffractive optical member, 16a Relief, 17 Imaging optical system, 17 Imaging part, 18 Imaging Element, 18a Light receiving surface, 19 Imaging optical system, 19a Object surface, 21 Deflection member, 21a Reflecting surface, AX optical axis, L1 illumination light beam, L2 imaging light beam

Claims (34)

A diffractive optical member that deflects an incident light beam;
An imaging unit for imaging a measurement region onto which the light beam deflected by the diffractive optical member is projected;
A shape measurement apparatus comprising: a shape information acquisition unit that acquires shape information of a measurement target based on a result of imaging by the imaging unit. The shape measuring apparatus according to claim 1, wherein the diffractive optical member has a concentric repeating structure. The shape measuring apparatus according to claim 2, wherein pitches of the repetitive structures are substantially the same. The imaging unit
An image sensor;
The shape measuring apparatus according to claim 1, further comprising: an imaging optical system that forms an image of a measurement region onto which the light beam is projected on the imaging element.   The shape measuring apparatus according to claim 4, wherein the imaging optical system is arranged so that the light beam incident on the diffractive optical member passes therethrough.   The shape measuring apparatus according to claim 4, wherein the imaging optical system is configured to guide a light beam from a light source to the diffractive optical member as a light beam incident on the diffractive optical member. The shape measuring apparatus according to claim 4, wherein the diffractive optical member has a rotationally symmetric structure with respect to an optical axis of the imaging optical system. The shape measuring apparatus according to claim 7, wherein the structure of the diffractive optical member is repeatedly arranged in a direction orthogonal to the optical axis of the imaging optical system. The shape measuring device according to any one of claims 4 to 8, wherein the diffractive optical member has a reflecting surface so as to reflect and diffract the light flux, and a repeating structure is disposed on the reflecting surface. The shape measuring apparatus according to any one of claims 4 to 9, wherein a cross section of the diffractive optical member on a surface including the optical axis of the imaging optical system includes a rectangular unevenness. The shape measuring apparatus according to any one of claims 4 to 9, wherein a cross section of the diffractive optical member on a plane including the optical axis of the imaging optical system includes triangular irregularities. The shape measurement according to any one of claims 4 to 11, further comprising a deflecting member that deflects the light beam emitted from the diffractive optical member so that the light beam propagates along an object plane of the imaging optical system. apparatus. The shape measuring apparatus according to claim 12, wherein the deflection member has a reflection surface that is rotationally symmetric with respect to the optical axis of the imaging optical system. The shape measuring device according to any one of claims 4 to 13, wherein the light source that emits the light beam is disposed at a position conjugate with an object plane of the imaging optical system. The shape measuring apparatus according to claim 14, wherein the light source emits laser light as the light flux. The shape measuring apparatus according to claim 14 or 15, wherein an optical path length from the light source to the imaging optical system is shorter than an optical path length from the imaging optical system to the imaging element. A diffractive optical member that deflects the light flux different from the direction of the propagation path with respect to the propagation path until the light flux from the light source reaches;
An imaging unit for imaging a measurement region onto which the light beam deflected by the diffractive optical member is projected;
An optical device comprising:   The optical device according to claim 17, wherein the diffractive optical member has a concentric repeating structure. The optical device according to claim 18, wherein the pitch of the repeating structure of the diffractive optical member is substantially the same. The imaging unit includes: an imaging element; and an imaging optical system that forms an image of a measurement region in which an optical axis is set on the propagation path and the light beam is projected on the imaging element. The optical device according to any one of the above. The optical device according to claim 20, wherein the diffractive optical member has a rotationally symmetric structure with respect to an optical axis of the imaging optical system. The optical device according to claim 21, wherein the diffractive optical member has the structure repeatedly arranged in a direction orthogonal to an optical axis of the imaging optical system. The optical device according to any one of claims 20 to 22, wherein the diffractive optical member has a reflective surface so as to reflect and diffract the light flux, and a repetitive structure is disposed on the reflective surface. The optical device according to claim 22, wherein a cross section of the diffractive optical member on a surface including an optical axis of the imaging optical system includes a rectangular unevenness. The optical device according to claim 22, wherein a cross section of the diffractive optical member in a plane including the optical axis of the imaging optical system includes triangular irregularities. The optical device according to any one of claims 20 to 25, further comprising a deflecting member that deflects the light beam emitted from the diffractive optical member so that the light beam propagates along an object plane of the imaging optical system. . 27. The optical device according to claim 26, wherein the deflection member has a reflection surface that is rotationally symmetric with respect to the optical axis of the imaging optical system. The optical apparatus according to any one of claims 20 to 26, wherein the light source that emits the light beam is disposed at a position conjugate with an object plane of the imaging optical system. The optical device according to claim 28, wherein the light source emits laser light as the light flux. 30. The optical device according to claim 28, wherein an optical path length from the light source to the imaging optical system is shorter than an optical path length from the imaging optical system to the imaging element. An optical member that divides the light quantity at each position of the light beam into a plurality of directions to form a ring-shaped line pattern, and projects the line pattern onto a measurement target;
And an imaging unit that images the pattern projected by the projection unit. Propagating the light flux in the propagation path;
Disposing a diffractive optical member for deflecting the light beam at a position where the light beam propagated through the propagation path is incident;
Measuring an intensity distribution of the light beam deflected by the diffractive optical member;
Adjusting a relative position between the propagation path and the diffractive optical member so that the intensity distribution has symmetry based on a result of the measurement. A molding apparatus for molding the structure based on design information relating to the shape of the structure;
The shape measuring device according to any one of claims 1 to 16, which measures the shape of the structure formed by the forming device,
A structure manufacturing system comprising: a control device that compares shape information indicating the shape of the structure measured by the shape measuring device with the design information. Molding the structure based on design information regarding the shape of the structure;
Measuring the shape of the molded structure with the shape measuring device according to any one of claims 1 to 16,
A structure manufacturing method comprising: comparing shape information indicating the shape of the structure measured by the shape measuring apparatus with the design information.

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