CN110817500B

CN110817500B - Film conveying device

Info

Publication number: CN110817500B
Application number: CN201811124020.4A
Authority: CN
Inventors: 朴焘冏
Original assignee: Hb Technology Co ltd
Current assignee: Hb Technology Co ltd
Priority date: 2018-08-13
Filing date: 2018-09-26
Publication date: 2021-08-20
Anticipated expiration: 2038-09-26
Also published as: CN110817500A; KR101924430B1

Abstract

The disclosed film conveying device is used for conveying a film placed on a substrate. The film transfer device is characterized by comprising: a first conveying part which fixes one side end of the film and pulls the film with a set force; and a second conveying part which fixes the other side end of the film and adjusts the tension formed on the film by applying a force in a direction opposite to the first conveying part.

Description

Film conveying device

Technical Field

The present invention relates to a film transfer apparatus that transfers a film so that the film is not damaged by adsorbing and clamping the film during transfer of the film.

Background

The matters described in this section (section) are merely background information for the present embodiment and do not constitute prior art.

Flexible materials such as films (films) and sheets (sheets) are widely used in packaging materials, electronic components, and the like. For example, a Flexible Circuit Board (FPCB) is manufactured by coating a conductive layer such as a copper foil on a thin insulating film and forming a fine Circuit pattern on the corresponding conductive layer. The flexible circuit board manufactured by such a method has problems such as circuit pattern failure, and therefore, it is necessary to perform accurate reliability detection.

Generally, Automated Optical Inspection (AOI) of flexible materials is performed as follows: that is, the flexible material supplied in a Roll (Roll) shape is continuously received, and the surface state is detected by a detection unit such as an image processing apparatus and then conveyed. In this case, a conveying device is required for supplying and conveying the flexible material.

Conventionally, as a method of conveying a flexible material, the following methods have been mainly used: that is, grooves are formed at a predetermined pitch in the edge of a flexible material such as a film or a sheet, and these grooves are engaged with a conveying means such as a gear and conveyed. However, this method requires an additional process for forming a groove in the flexible material, and has a high risk of damaging the flexible material itself during conveyance, and thus has a problem in that it is difficult to perform precise detection.

Recently, in order to compensate for the limitation of the gear engagement method, a method of conveying a thin film by vacuum suction has been developed.

Fig. 1 is a diagram illustrating a conventional film transport apparatus.

As shown in fig. 1, a conventional film feeding apparatus 100 feeds a film by vacuum suction using a plurality of suction type grippers (grippers) 110 provided on an upper portion of a base 120. The suction type clamp 110 is composed of a body 112 formed with a plurality of holes 114 and a pad (not shown) having an exhaust space. The hole 114 communicates with the exhaust space, and the hole 114 can be connected to a vacuum Ejector Pump (not shown). When high-speed compressed air passes through the vacuum pump while the mat is in contact with the object, the air in the mat is guided through the main body and the hose (hose) and discharged to the outside of the vacuum pump together with the compressed air. At this time, negative pressure is generated in the mat, and the object is sucked (ripping) on the mat by the negative pressure.

However, since the conventional film feeding apparatus 100 attaches the film to the apparatus only by the vacuum attachment method, the middle portion of the film, which is a flexible material, is bent downward by tension. Therefore, a problem of collision or contact between other devices and the film occurs during the conveyance. In addition, vibration may be applied to the film at the transport point and the end point of the transport, and at this time, the film adsorbed to the adsorption type gripper 110 depending on the negative pressure may be detached from the adsorption type gripper 110, and the surface of the film may be seriously damaged.

When the thus damaged film is conveyed and detected or measured, the reliability of the detection result is lowered, and it is difficult to perform precise measurement, and there is a limit in detecting a defective product.

Disclosure of Invention

(problems to be solved by the invention)

An object of one embodiment of the present invention is to provide a film feeding device that stably fixes a film to a device, minimizes sagging or bending due to tension, and feeds the film to a detection device.

(measures taken to solve the problems)

The present invention provides a thin film transfer apparatus for transferring a thin film mounted on a substrate, the thin film transfer apparatus comprising: a first conveying part which fixes one side end of the film and pulls the film with a set force; and a second conveying part which fixes the other side end of the film and applies force to the direction opposite to the first conveying part to adjust the tension formed on the film.

Further, according to one aspect of the present invention, the first conveying unit includes a plurality of suction units to fix one side end of the film.

Further, according to one aspect of the present invention, the first conveying unit includes a plurality of fixing units to fix one side end of the film.

Further, according to one aspect of the present invention, the first conveying section includes a moving unit including a moving member, and the moving unit obtains power from the power supply device to move the first conveying section in a predetermined direction.

Further, according to one aspect of the present invention, the second conveying unit includes a plurality of suction units to fix the other side end of the film.

Further, according to one aspect of the present invention, the second transport unit includes a plurality of fixing units to fix the other side end of the film.

Further, according to one aspect of the present invention, the second conveying section includes a moving unit including a moving member, and the moving unit obtains power from the power supply device to move the second conveying section in a predetermined direction.

Further, according to one aspect of the present invention, the film transfer device further includes a first suction portion that is coupled to one side end of the first transfer portion and the second transfer portion and sucks an upper end of the film.

Further, according to one aspect of the present invention, the film transfer device further includes a second suction portion which is coupled to the other side ends of the first transfer portion and the second transfer portion and sucks a lower end of the film.

(Effect of the invention)

As described above, according to the present invention, there are advantages as follows: that is, the thin film is stably fixed to the apparatus by the adsorption unit and the fixing unit, and the flatness of the thin film is maintained by the force measuring unit and the tension adjusting unit, whereby the thin film is conveyed to the detection apparatus in a state where the thin film is not damaged.

Drawings

Fig. 1 is a diagram illustrating a conventional film transport apparatus.

Fig. 2 is a structural view of a film feeding apparatus according to an embodiment of the present invention.

Fig. 3 is a structural view of a first conveyance section according to one embodiment of the present invention.

Fig. 4 is a structural view of an adsorption unit according to an embodiment of the present invention.

Fig. 5 is a structural view of a second conveyance section according to an embodiment of the present invention.

Fig. 6 is a view illustrating a process of fixing a film to a first conveying part and a second conveying part according to an embodiment of the present invention.

Fig. 7 is a view illustrating a process in which a film is adsorbed to a first adsorption part and a second adsorption part according to one embodiment of the present invention.

(description of reference numerals)

100: conventional film conveying apparatuses; 110: an adsorption type clamp; 120: a base; 112: a body; 114: an aperture;

200: a film conveying device; 210: a film; 220: a first conveying section; 230: a second conveying section;

240: a first adsorption part; 250: a second adsorption part; 310: a first mobile unit;

320: a first power supply device; 330: an adsorption unit; 340: a fixing unit; 350: a force measuring unit;

410: an adsorption pad; 420: a vacuum line; 510: a mobile unit; 520: a power supply device;

530: an adsorption unit; 540: a fixing unit; 550: a tension adjusting unit; 610: a second mobile unit;

620: second power supply device

Detailed Description

The present invention can be variously modified to have various embodiments, and specific embodiments are described in detail by reflecting them in the drawings. However, the present invention is not limited to the specific embodiments, and it should be understood that all modifications, equivalents, and alternatives falling within the spirit and scope of the present invention are included in the present invention. In the description of the drawings, like reference numerals are used for like components.

The terms "first", "second", "a", "B", and the like are used for describing various components, but the components are not limited by these terms. These terms are used to distinguish one constituent element from another constituent element. For example, a first component may be named as a second component, and similarly, a second component may be named as a first component without departing from the scope of the present invention. The term "and/or" includes a combination of a plurality of associated written items or one of a plurality of associated written items.

When a certain component is referred to as being "connected" or "connected" to another component, there are cases where the component is not directly connected or connected to the other component, and there are cases where another component is present in the middle. On the contrary, when a certain component is referred to as being "directly connected" or "directly connected" to another component, another component does not exist therebetween.

The terminology used in the description presented herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. Singular expressions include plural expressions unless the context clearly indicates otherwise. The terms "including" or "having" and the like as used in the present application do not exclude the presence or addition of features, numbers, stages, actions, constituent elements, components or combinations thereof described in the specification in advance.

Unless otherwise defined, all terms used herein including technical and scientific terms have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs.

Terms defined in commonly used dictionaries should be interpreted as having meanings identical to meanings provided in context of the related art, and will not be interpreted in an idealized or overly formal sense unless expressly so defined herein.

FIG. 2 is a block diagram of a film feeding apparatus according to an embodiment of the present invention; FIG. 3 is a block diagram of a first conveying section according to an embodiment of the present invention; fig. 4 is a structural view of an adsorption unit according to an embodiment of the present invention. Fig. 5 is a structural view of a second conveyance unit according to an embodiment of the present invention.

The film feeding device 200 may be disposed above or below a detection device such as an automatic optical inspection device (AOI), a Flexible detection device (flexile) or a Lami-AOI, and the film feeding device 200 feeds a film 210, which is an object to be detected, to the detection device. Further, the film feeding device 200 can improve the wrinkling, twisting, and bending of the film 210, which may occur when the film 210 is fixed to the film feeding device 200 and fed. Accordingly, the film transport apparatus 200 can transport the film 210 to the detection apparatus without damaging the film 210, and can secure a range of Depth of Field (DOF) and the like when the detection apparatus detects the film 210, thereby improving the accuracy of the detection result.

Referring to fig. 2, a thin film transfer apparatus 200 according to an embodiment of the present invention includes: a first conveying part 220, a second conveying part 230, a first adsorption part 240, a second adsorption part 250, and a control part (not shown).

The thin film 210 is an object to be transferred by the thin film transfer apparatus 200, and the thin film 210 is transferred from a previous process onto a substrate (not shown) positioned below the thin film transfer apparatus 200 in the (-z-axis direction) by a robot or a Pin (Pin). Here, the substrate may be configured in the form of a vent Plate (Air Plate), and when the film 210 is mounted on the substrate, the film 210 exists in the form of being suspended from the substrate by several micrometers (μm).

The first transfer unit 220 moves in the + x-axis direction around the substrate positioned below the thin film transfer device 200 (in the (-z-axis direction) under the control of a control unit (not shown), and fixes one side end of the thin film 210. The first conveying unit 220 sucks the lower surface (-z-axis direction) of one side end of the film 210, and clamps (clamps) the upper surface (+ z-axis direction) of one side end of the film 210 to be firmly fixed, thereby preventing the film 210 from being detached from the film conveying apparatus 200 or the film 210 from being deformed.

The operation and method of fixing one side end of the film 210 by moving the first conveying part 220 in the direction of the film 210 will be described in detail with reference to fig. 3 to 4.

Referring to fig. 3, the first conveying part 220 includes: a first moving unit 310, a first power supply 320, an adsorption unit 330, a fixing unit 340, a force measuring unit 350, a second moving unit (not shown), and a second power device (not shown). Also, as shown in fig. 4, the adsorption unit 330 includes an adsorption pad 410 and a vacuum line (vacuum line) 420.

The first moving unit 310 moves the first conveying unit 220 in a predetermined direction under the control of a control unit (not shown). Before the film 210 is placed on the substrate, the first moving unit 310 moves in the-x-axis direction to move the first conveying part 220 by a predetermined distance, so as to prevent the first conveying part 220 from colliding with the film 210. When the film 210 is mounted on the substrate by a robot or a pin, the first moving unit 310 moves the first conveying unit 220 in the + x-axis direction to a position where the suction unit 330 can suction one side end of the film 210 under the control of a control unit (not shown).

The first moving means 310 has a rectangular horizontal flat plate shape, but is not limited thereto, and may have any shape as long as it can support the components of the first conveying unit 220 and stably move the components of the first conveying unit 220. The first moving unit 310 may include a plurality of moving members (not shown) on one surface. The plurality of moving members may be configured by a conveyor belt (conveyor belt) or a roller (roller), but is not limited thereto, and may have any configuration as long as it is a unit capable of moving the first conveying unit 220.

The first power supply device 320 supplies power to the first moving unit 310 so that the first moving unit 310 moves the first conveying part 220 in a set direction. The first power supply means 320 can be formed of any unit such as a motor that can supply power to the first moving unit 310.

As described above, the first conveying part 220 firmly fixes the one side end of the film 210 mounted on the substrate by sucking the lower surface (-z-axis direction) of the one side end of the film 210 by the sucking unit 330 and simultaneously clamping the upper surface (+ z-axis direction) of the one side end of the film 210 by the fixing unit 340.

Referring to fig. 3 to 4, the adsorption unit 330 includes an adsorption pad 410 and a vacuum line 420. Generally, the suction pad 410 sucks (nipping) the film 210 as the suction object. The adsorption pad 410 is formed in the form of a Flexible Tube (Flexible Tube) such as a Bellows Valve (Bellows Valve), but is not limited thereto. The suction pad 410 may be made of any material as long as it is made of a material that does not cause defects in the film 210. The vacuum line 420 is connected to a vacuum pump (not shown) through a vacuum hose (not shown), and the vacuum pump receives compressed air from the vacuum hose.

The adsorption unit 330 is raised to a height at which the film 210 is positioned under the control of a control unit (not shown). The adsorption unit 330 may include a cylinder (not shown) or a Cam (Cam), and may be raised or lowered by hydraulic pressure or the like.

When the suction unit 330 rises according to the height of the film 210, the suction unit 330 sucks the lower surface (in the (-z-axis direction) of one side end of the film 210 by the suction pad 410. At this time, the vacuum line 420 discharges the compressed air to the outside. Due to the discharge of the compressed air, a negative pressure is formed between the suction pad 410 and the film 210 is fixed to the suction pad 410.

The suction units 330 are arranged in a row at the front end of the first moving unit 310 so as to be able to suck the lower surface (-z-axis direction) of one side end of the film 210. The suction unit 330 may be formed of a plurality of suction type grippers, and the arrangement form of the suction unit 330 may be changed according to the structure of the apparatus.

The fixing unit 340 is connected to the upper portion of the suction unit 330, and clamps and fixes the upper surface (+ z-axis direction) of one side end of the film 210. When the lower surface (-z-axis direction) of one side end of the film 210 is sucked by the suction unit 330, the fixing unit 340 is lowered in the-y-axis direction to fix the upper surface (+ z-axis direction) of one side end of the film 210. The fixing unit 340 may include a cylinder (not shown) connected to the adsorption unit 330, and may be raised or lowered by hydraulic pressure or the like. Similarly to the suction unit 330, the fixing unit 340 may be configured by a plurality of clips (clamps) or the like arranged in a row at the front end of the first moving unit 310 so as to be able to clamp the upper surface (+ z-axis direction) of one side end of the film 210.

The first conveying part 220 fixes one side end of the film 210 by the adsorption unit 330 and the fixing unit 340, and pulls the film 210 with a force of a set value. Since the film 210 has a very thin thickness, if the film 210 is fixed to the device, the surface of the film 210 may be deformed in the form of distortion, bending, or wrinkling. Accordingly, the first conveying unit 220 pulls the film 210 with a predetermined force by using a second moving unit (not shown), thereby reducing the occurrence of phenomena such as distortion, bending, or wrinkling of the surface of the film 210.

The second moving unit (not shown) receives power from a second power supply device (not shown) and moves in the-x-axis direction. More specifically, when the first conveying unit 220 is moved in the direction (+ x-axis direction) in which the film 210 is positioned by the first moving unit 310, the suction unit 330 and the fixing unit 340 fix one side end of the film 210, and the second moving unit (not shown) moves in the-x-axis direction. As the second moving unit (not shown) moves in the-x-axis direction, the film 210 is forced in the-x-axis direction. Thereby, the surface of the film 210 maintains a flat state.

The force measuring unit 350 serves as a kind of measurer for measuring the force applied to the film 210, one side end of the force measuring unit 350 is connected to the adsorption unit 330 and the fixing unit 340, and the other side end of the force measuring unit 350 is connected to a second moving unit (not shown) and a second power supply device (not shown). Accordingly, the force measuring unit 350 can measure the magnitude of the force applied to the film 210 as the film 210 is pulled in the-x-axis direction by the second moving unit (not shown). The force measuring cell 350 measures the force applied to the film 210 and transmits the force to a control unit (not shown), and the control unit (not shown) determines the value measured by the force measuring cell 350. When the measurement value of the force measuring cell 350 does not reach the set input value, the control unit (not shown) controls the operation of the second power supply device (not shown) so that the second moving unit (not shown) moves the force measuring cell 350 in the-x-axis direction and further moves the thin film 210 in the-x-axis direction. In contrast, when the measurement value of the force measuring unit 350 has reached the set input value, the control section (not shown) controls the operation of the second power supply device (not shown) so that the second moving unit (not shown) is not further driven.

Referring to fig. 2 again, the second transfer unit 230 moves in the-x-axis direction around the substrate positioned at the lower portion of the thin film transfer device 200 (in the (-z-axis direction)) under the control of the control unit (not shown). The second conveying unit 230 sucks the lower surface (-z-axis direction) of the other side end of the film 210, and clamps and firmly fixes the upper surface (+ z-axis direction) of the other side end of the film 210. The second conveying unit 230 faces the first conveying unit 220 at a predetermined interval. The interval between the second conveying part 230 and the first conveying part 220 may be different according to the specification of the film 210. The second conveyance section 230 is shown in detail in fig. 5.

Referring to fig. 5, the second conveyance section 230 includes: a moving unit 510, a power supply device 520, an adsorption unit 530, a fixing unit 540, and a tension adjusting unit 550.

The moving unit 510 includes a plurality of moving members (not shown) on one side surface thereof, and receives power from the power supply device 520 under the control of the control unit (not shown) to move the second conveying unit 230 in a predetermined direction. The plurality of moving members can be constituted by a conveyor belt, a roller, or the like, but is not limited thereto. Before the thin film 210 is introduced onto the substrate, the moving unit 510 is moved in the + x-axis direction under the control of a control unit (not shown) to secure a sufficient distance so as to prevent the second conveying unit 230 from colliding with the thin film 210. On the contrary, if the film 210 is mounted on the substrate, the moving unit 510 moves a predetermined distance in the-x-axis direction to fix the other side end of the film 210 by the suction unit 530. The moving means 510 has a rectangular horizontal flat plate shape, but may have any shape as long as it can movably support each component of the second conveying unit 230.

The power supply device 520 supplies power to the moving unit 510 so that the moving unit 510 moves the second conveyance part 230 in a set direction. The power supply means 520 can be formed of any unit such as a motor that can supply power to the moving unit 510.

The suction unit 530 includes a cylinder (not shown) and sucks and holds the lower surface of the other side end of the film 210 (-z-axis direction) after being raised to the height of the film 210 by hydraulic pressure or the like. The adsorption unit 530 of the second transfer unit 230 includes an adsorption pad 410 and a vacuum line 420, like the adsorption unit 330 of the first transfer unit 220. When the suction pad 410 sucks the lower surface of the other side end of the film 210 (-z-axis direction), the vacuum line 420 discharges the compressed air to the outside by the vacuum pump. Accordingly, a negative pressure is formed between the adsorption pad 410 and the film 210, and the lower surface (-z-axis direction) of the other side end of the film 210 is fixed to the adsorption pad 410 by the negative pressure.

The suction units 530 are arranged in a row at the front end of the moving unit 510 so as to be able to suck the other side end of the film 210. The suction unit 530 is plural, and is constituted by any unit such as a suction type clamp or the like capable of sucking the film 210.

When the suction unit 530 sucks the lower surface (-z-axis direction) of the other side end of the film 210, the fixing unit 540 descends in the direction (-y-axis direction) of the film under the control of the control unit (not shown) to clamp and fix the upper surface (+ z-axis direction) of the other side end of the film 210. The fixing unit 540 includes a cylinder (not shown) and can be raised or lowered by means of oil pressure or the like. The fixing means 540 of the second conveying unit 230 is arranged in a row above the suction means 530, and is constituted by means such as a clip capable of fixing the film 210, as in the first conveying unit 220.

The second transporting unit 230 adjusts the tension formed in the film 210 pulled by the force measuring unit 350 with a set value. The film 210 receives a force of moving in the-x-axis direction by the first conveying unit 220, thereby maintaining a certain degree of flatness. However, since the first conveying unit 220 simply moves a predetermined distance in the-x-axis direction, a uniform tension cannot be applied to the surface of the film 210, and the surface of the film 210 is wrinkled. Accordingly, the second conveyance part 230 may improve the flatness of the film 210 by adjusting the tension of the film 210.

As shown in fig. 5, the tension adjusting unit 550 adjusts the balance between the force of the first conveying unit 220 pulling the film 210 in the-x-axis direction and the tension formed in the film 210, thereby maintaining the flatness of the film 210 by maintaining a constant tension on the entire film 210. More specifically, when the second moving unit (not shown) of the first conveying unit 220 moves in the-x-axis direction in proportion to the magnitude of the set force, the film 210 receives a force in the-x-axis direction. At this time, the tension adjusting unit 550 applies force to the film 210 in the + x-axis direction in order to balance the force of the film 210. In the case where a large force acts on the film 210 toward one side, since both sides are fixed, there is a risk that the film 210 may be broken. That is, the tension adjusting unit 550 adjusts the balance of the tension formed in the film 210, thereby maintaining the flatness of the film 210.

The tension adjusting unit 550 is connected to the rear ends of the suction unit 530 and the fixing unit 540. The tension adjusting unit 550 may be formed of an elastic member such as rubber, other than the spring, and may be formed of any material as long as it has inherent elasticity.

Referring again to fig. 2, the film feeding device 200 according to the embodiment of the present invention not only fixes one side end and the other side end of the film 210, but also fixes the upper surface (+ Z-axis direction) of the upper end (+ y-axis direction) and the lower end (-y-axis direction) of the film 210 by suction.

As shown in fig. 2, the first adsorption part 240 adsorbs the upper surface (+ z-axis direction) of the upper end of the film 210 to prevent the film 210 from drooping downward (-z-axis direction) by gravity. The first suction unit 240 moves in the-y-axis direction to a position where the film 210 can be sucked, and sucks the upper surface (+ z-axis direction) of the upper end of the film 210, under the control of a control unit (not shown). On the other hand, before the thin film 210 is placed on the substrate, the first suction part 240 is moved in the + y-axis direction under the control of the control part (not shown) to avoid collision with the thin film 210 drawn toward the substrate. The first adsorption part 240 includes a plurality of adsorption units (not shown) on the lower surface thereof (in the z-axis direction), and the first adsorption part 240 adsorbs the upper surface (+ z-axis direction) of the upper end of the film 210 by the adsorption units. The suction means may be in any form as long as it is a means for sucking the film 210 without damaging it.

The first adsorption part 240 is formed in a frame shape extending long in the x-axis direction, and is detachably coupled to one side ends of the first and second conveying

parts

220 and 230. The first suction unit 240 sucks the film 210 by vacuum suction, but is not limited thereto.

The second suction unit 250 sucks the upper surface (+ z-axis direction) of the lower end of the film 210 by using a plurality of suction units (not shown) provided on the lower surface (-z-axis direction). The second suction portion 250 sucks the upper surface (+ z-axis direction) of the lower end of the film 210, so that the film 210 is maintained in a flat state without being hung or stretched in the lower direction (-z-axis direction). The second suction unit 250 is moved in the-y-axis direction under the control of a control unit (not shown) to prevent interference with the thin film 210 drawn toward the substrate. When the film 210 is mounted on the substrate, the second suction unit 250 moves in the + y-axis direction to a position where the film 210 can be sucked under the control of the control unit (not shown), and sucks the upper surface (+ z-axis direction) of the lower end of the film 210 by a plurality of suction units (not shown). Similarly to the first suction unit 240, the second suction unit 250 is formed in a linear rack shape extending long in the x-axis direction, and is detachably coupled to the other side ends of the first and second conveying

units

220 and 230.

The controller (not shown) controls the operation of each component in the film transport apparatus 200.

The control unit (not shown) receives a sensing value sensed by the position sensing sensor for sensing the position of the film 210 and controls the operation of each component. The sensor is provided on the substrate or another device to sense the position of the film 210, but may be provided at any position as long as the sensor can sense the position of the film 210. When the film 210 is transferred from the previous step to the upper portion of the substrate by a robot or a pin, the position sensor senses the transfer and provides a sensed value to a control unit (not shown). When the position sensor senses that the film 210 is mounted on the substrate, a controller (not shown) controls the operation of each member based on the sensed value so that each member is positioned to be capable of adsorbing the film 210, thereby adsorbing the film 210. That is, when the film 210 is mounted on the substrate, the control unit (not shown) controls the first transfer unit 220, the second transfer unit 230, the first suction unit 240, and the second suction unit 250 to move in a predetermined direction so as to be movable to a position where the film 210 can be sucked.

Fig. 6 is a diagram illustrating a process of fixing a film to a first conveying unit and a second conveying unit according to an embodiment of the present invention.

When the film 210 is placed on the substrate by another tool (e.g., a robot or a roller, not shown), the first conveying unit 220 moves in the + x-axis direction to a position where the film 210 can be sucked under the control of the control unit (not shown), and the second conveying unit 230 moves in the-x-axis direction. The

suction units

330 and 530 of the first and

second transfer units

220 and 230 are raised in the + y-axis direction to reach the height of the film 210, and respectively suck and hold the lower portion (-z-axis direction) of one side end and the lower portion (-z-axis direction) of the other side end of the film 210 by the suction members. At the same time, the fixing

units

340 and 540 of the first and

second conveyors

220 and 230 are lowered in the-y-axis direction to clamp the upper portion of one side end (+ z-axis direction) and the upper portion of the other side end (+ z-axis direction) of the film 210, respectively, thereby fixing the film 210.

Fig. 7 is a diagram showing a process of adsorbing the thin film to the first adsorption part and the second adsorption part according to one embodiment of the present invention.

When one side end and the other side end of the film 210 are fixed by the first conveying unit 220 and the second conveying unit 230, the first suction unit 240 and the second suction unit 250 respectively suck the upper end (+ y-axis direction) and the lower end (-y-axis direction) of the film 210 by a suction unit provided on the lower surface (-z-axis direction) under the control of a control unit (not shown).

When the film 210 is fixed to the film feeding device 200 through the above-described process, the first feeding unit 220 pulls the film 210 in the-x-axis direction at a predetermined force value under the control of the control unit (not shown). The force measuring unit 350 is connected to the second moving unit 610, and the second moving unit 610 receives power from the second power supply device 620 and moves in the-x-axis direction. Accordingly, the film 210 is pulled in the moving direction of the second moving unit 610, so that the surface of the film 210 maintains a flat state. Since the second moving unit 610 pulls the film 210, the film 210 can avoid interference or interference with a detection device such as an optical detection device provided at a lower portion (-z-axis direction) or a portion of the film feeding device 200. However, the tension formed on the surface of the film 210 is not uniformly dispersed, and fine wrinkles and the like may be generated on the surface of the film 210. Therefore, the tension adjusting unit 550 balances the tension formed in the film 210 and the force with which the force measuring unit 350 pulls the film 210, and thereby the film 210 maintains a constant tension as a whole, thereby improving the flatness of the film 210.

The above description is merely an exemplary description of the technical idea of the present invention, and a person having ordinary skill in the art can make various modifications and alterations without departing from the scope of the essential characteristics of the present invention. Therefore, the above-described embodiments are intended to illustrate the embodiments, and do not limit the technical spirit of the present invention, and the scope of the technical spirit of the present invention is not limited by these embodiments. The scope of the invention is to be construed in accordance with the substance defined by the following claims, and all technical equivalents thereof are intended to be embraced therein.

Claims

1. A film feeding apparatus for feeding a film mounted on a substrate, comprising:

a first transfer part including a first suction unit, a first fixing unit, and a second moving unit, fixing one side end of the film by the first suction unit and the first fixing unit, and pulling the film by a set force by the second moving unit; and

a second conveying section including a second suction unit, a second fixing unit, and a tension adjusting unit, the second suction unit and the second fixing unit fixing the other side end of the film, the tension adjusting unit including an elastic member applying a force in a direction opposite to the first conveying section to adjust a tension formed in the film,

the first transfer part firmly fixes one side end of the film placed on the substrate by sucking a lower surface of one side end of the film by the first sucking unit and clamping an upper surface of one side end of the film by the first fixing unit,

the second conveying part sucks a lower surface of the other side end of the film by the second sucking unit, and clamps an upper surface of the other side end of the film by the second fixing unit, thereby firmly fixing the other side end of the film mounted on the substrate.

2. The film conveying apparatus according to claim 1,

the first conveying unit includes a plurality of first suction units to fix one side end of the film.

3. The film conveying apparatus according to claim 1,

the first transport unit includes a plurality of first fixing units to fix one side end of the film.

4. The film conveying apparatus according to claim 1,

the first conveying section includes a first moving means including a moving member, and the first moving means obtains power from a power supply device to move the first conveying section in a predetermined direction.

5. The film conveying apparatus according to claim 1,

the second conveying unit includes a plurality of second suction units to fix the other side end of the film.

6. The film conveying apparatus according to claim 1,

the second transport unit includes a plurality of second fixing units to fix the other side end of the film.

7. The film conveying apparatus according to claim 1,

the second conveying section includes a first moving means including a moving member, and the first moving means obtains power from a power supply device to move the second conveying section in a predetermined direction.

8. The film conveying apparatus according to claim 1,

the film conveying device further comprises a first adsorption part which is combined with one side end of the first conveying part and one side end of the second conveying part and adsorbs the upper end of the film.

9. The film conveying apparatus according to claim 1,

the film conveying device further comprises a second adsorption part which is combined with the other side ends of the first conveying part and the second conveying part and adsorbs the lower end of the film.