CN110768570A - Micro-nano stepping piezoelectric driving device - Google Patents
Micro-nano stepping piezoelectric driving device Download PDFInfo
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- CN110768570A CN110768570A CN201910291891.3A CN201910291891A CN110768570A CN 110768570 A CN110768570 A CN 110768570A CN 201910291891 A CN201910291891 A CN 201910291891A CN 110768570 A CN110768570 A CN 110768570A
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- 230000007246 mechanism Effects 0.000 claims abstract description 49
- 230000033001 locomotion Effects 0.000 claims abstract description 33
- 230000003071 parasitic effect Effects 0.000 claims abstract description 13
- 150000001875 compounds Chemical class 0.000 claims 1
- 230000008901 benefit Effects 0.000 abstract description 8
- 238000003754 machining Methods 0.000 abstract description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
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- 230000005540 biological transmission Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/04—Constructional details
- H02N2/043—Mechanical transmission means, e.g. for stroke amplification
Abstract
The invention relates to a micro-nano stepping piezoelectric driving device which mainly comprises a piezoelectric stack, an asymmetric thin-wall flexible hinge mechanism and a rotor. The piezoelectric stack is arranged in the asymmetric thin-wall flexible hinge mechanism, and the linear movement of the rotor is realized through the parasitic inertia motion of the asymmetric thin-wall flexible hinge mechanism; the initial pretightening force between the asymmetric thin-wall flexible hinge mechanism and the rotor is adjusted by the pretightening knob. The piezoelectric stack has the advantages that the main output direction and the rotor movement direction are obliquely designed, the asymmetric thin-wall flexible hinge mechanism has high rigidity, can bear larger load, simultaneously generates driving force and pretightening force in parasitic inertial movement, and improves the output load of the driving device. The device can realize stepping linear motion, can be applied to the fields of precise and ultra-precise machining, micro electro mechanical systems and micro operation robots, and has the advantages of simple structure, stable work and high output benefit.
Description
Technical Field
The invention relates to the field of precise and ultra-precise machining, micro-nano operation robots and micro electro mechanical systems, in particular to a micro-nano stepping piezoelectric driving device.
Background
The precise driving technology with micro/nano positioning precision is a key technology in high-end scientific and technical fields such as ultra-precision machining and measurement, optical engineering, modern medical treatment, aerospace technology and the like. In order to realize the micro/nano-scale output precision, the application of the modern precision driving technology puts higher requirements on the precision of the driving device. The traditional driving device has low output precision and large integral size, and cannot meet the requirements of a precision system in the modern advanced technology on micro/nano-scale high precision and small size of the driving device. The piezoelectric ceramic driver has the advantages of small volume size, high displacement resolution, large output load, high energy conversion rate and the like, can realize micro/nano-scale output precision, and is increasingly applied to micro positioning and precise ultra-precision machining. In the conventional piezoelectric inertia driving device, a piezoelectric element and a rotor mass block are usually arranged in parallel in the motion direction of the piezoelectric element, the pretightening force is perpendicular to the main output direction of the piezoelectric element, and the output load of the whole device mainly depends on the friction force generated by the pretightening force. However, a piezoelectric element such as a piezoelectric stack generally adopts a d33 operating mode, and the rigidity of the piezoelectric element on a cross section perpendicular to the main output direction is small, so that the generated pretightening force is small, the output load of the whole device is greatly reduced, and the large rigidity of the piezoelectric element in the main output direction is not fully utilized; the rollback phenomenon in motion further degrades output performance. Therefore, it is necessary to design a novel bionic creeping type piezoelectric precision driving device which fully utilizes the rigidity of the piezoelectric stack in the main output direction, eliminates the backspacing phenomenon, improves the output load, generates pretightening force and driving force simultaneously through the parasitic inertia motion of the asymmetric thin-wall type flexible hinge mechanism, and further improves the output load of the piezoelectric driving device.
Disclosure of Invention
The invention aims to provide a micro-nano stepping piezoelectric driving device, which solves the problems in the prior art. The invention has the characteristics of simple and compact structure, high output precision, high output rigidity and output load and high output frequency, and can realize the linear motion output function.
The above object of the present invention is achieved by the following technical solutions:
a micro-nano stepping type piezoelectric driving device comprises a piezoelectric stack (3), an asymmetric thin-wall type flexible hinge mechanism (4), a rotor (5), a pre-tightening wedge block (2), a pre-tightening knob (1), a pre-tightening knob (7) and a base (6), and the micro-nano stepping type precise linear driving is realized by the aid of a parasitic inertia principle. The rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base (6) through a screw; the asymmetric thin-wall flexible hinge mechanism (4) is arranged on the base (6) through screws; the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4), and the piezoelectric stack (3) can be pre-tightened through the pre-tightening wedge block (2); the pre-tightening knob (1) and the pre-tightening knob (7) are fastened on the base (6) and are in contact with the lower end of the asymmetric thin-wall hinge mechanism (4); the asymmetric thin-wall hinge mechanism (4) is formed in an asymmetric mode by connecting four thin-wall flexible hinges, and an arc-shaped structure at the upper end of the asymmetric thin-wall hinge mechanism is in contact with the rotor (5); the base (6) plays a role in supporting, installing and fixing other parts; the piezoelectric stack (3) is arranged in the asymmetric thin-wall flexible hinge mechanism (4), the piezoelectric stack (3) is driven to drive the asymmetric thin-wall flexible hinge mechanism (4) to extend, the piezoelectric stack (3) is controlled and driven to realize stepping motion between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5), and then the rotor (5) is driven to perform linear precision motion.
The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) is adjusted through the pretightening knob (1) and the pretightening knob (7).
The contact part of the upper end of the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) is of an arc-shaped structure, and the contact stability is facilitated.
The main advantages of the invention are: the main output direction of the piezoelectric stack and the motion direction of the rotor are obliquely arranged by utilizing a parasitic inertial motion principle; the asymmetric flexible hinge mechanism is formed by connecting four thin-wall flexible hinges, and driven by the piezoelectric stack, the asymmetric thin-wall flexible hinge mechanism performs parasitic inertia motion. The invention can greatly improve the output performance of the device, realizes the linear motion of the rotor along a certain direction, has the advantages of high driving reliability, good stability, high working efficiency and the like, and can be applied to the important scientific engineering fields of precision ultra-precision machining, micro-operation robots, micro-electro-mechanical systems, large-scale integrated circuit manufacturing, biotechnology and the like. The invention has the advantages of simple structure, compact arrangement, stable movement, high efficiency, low investment, high benefit and the like, and has wider application prospect.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic front view of the present invention;
FIG. 3 is a schematic left side view of the present invention;
FIG. 4 is a schematic view of an asymmetric thin wall flexible hinge mechanism of the present invention.
Detailed Description
The details of the present invention and its embodiments are further described below with reference to the accompanying drawings.
Referring to fig. 1 to 4, a micro-nano stepping piezoelectric driving device mainly comprises a piezoelectric stack (3), an asymmetric thin-wall flexible hinge mechanism (4), a rotor (5), a pre-tightening wedge block (2), a pre-tightening knob (1), a pre-tightening knob (7) and a base (6), and the precise driving device realizes piezoelectric linear precise driving through a parasitic inertia principle. The rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw; the asymmetric thin-wall flexible hinge mechanism (4) is arranged on the base through screws; the piezoelectric stack (3) is arranged in the asymmetric thin-wall flexible hinge mechanism (4), and the main output direction of the piezoelectric stack and the motion direction of the rotor (5) are obliquely arranged; the pre-tightening wedge block (2) is arranged between the piezoelectric stack (3) and the asymmetric thin-wall flexible hinge mechanism (4) and can be pre-tightened through the pre-tightening wedge block (2); the pre-tightening knob (1) and the pre-tightening knob (7) are fastened on the base (6) and are in contact with the lower end of the asymmetric thin-wall type hinge mechanism (4), the asymmetric thin-wall type flexible hinge mechanism (4) is in an asymmetric thin-wall type, and the arc-shaped structure of the upper end of the asymmetric thin-wall type flexible hinge mechanism is in contact with the rotor (5); the base (6) plays a role in supporting, installing and fixing other parts, and the rotor (5) and the asymmetric thin-wall flexible hinge mechanisms (4) and (6) are installed on the base (6) through screws.
The micro-nano stepping piezoelectric driving device realizes piezoelectric linear precise driving by utilizing a parasitic inertia principle. The main output direction of the piezoelectric stack (3) and the motion direction of the rotor (5) are obliquely arranged, so that the larger rigidity of the main output direction of the piezoelectric stack (3) is fully utilized; the asymmetric thin-wall flexible hinge mechanism (4) is good in rigidity output performance, the upper end of the asymmetric thin-wall flexible hinge mechanism (4) can bear larger pretightening force, the movement is stable and efficient, the piezoelectric stack (3) is electrified to transmit the driving force of the linear movement of the rotor (5) and the pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) through the asymmetric thin-wall flexible hinge mechanism (4), so that the output load of the piezoelectric driving device is greatly improved, and the linear movement along a certain direction is realized.
The initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) is adjusted through the pretightening knob (1) and the pretightening knob (7).
The piezoelectric stack (3) adopts a piezoelectric ceramic stack PZT with a controllable surface shape, and the parasitic inertial motion is realized by controlling the voltage of the piezoelectric stack (3).
Referring to fig. 1 to 4, the specific working process of the present invention is as follows:
realizing linear motion of the rotor, and in an initial state: the contact distance between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5), namely the initial pretightening force in the parasitic motion process, is adjusted by adjusting the pretightening knob (1) and the pretightening knob (7); the piezoelectric stack (3) is controlled by adopting a piezoelectric signal in a sawtooth wave or triangular wave form; the piezoelectric stack (3) is not electrified, and the system is in a free state; when the piezoelectric stack (3) is electrified, the piezoelectric stack is extended through the inverse piezoelectric effect to push the asymmetric thin-wall flexible hinge mechanism (4) to deform, the rotor (5) is pressed by the asymmetric thin-wall flexible hinge mechanism (4), and the rotor (5) is driven to move by the asymmetric thin-wall flexible hinge mechanism (4) under the action of the static friction force between the rotor (5) and the rotor; when the piezoelectric stack (3) is de-energized and rapidly retreats to the initial position, the asymmetric thin-wall flexible hinge mechanism (4) also restores to the initial state, and the mover (5) is still kept at the moved position under the action of inertia force. By repeating the steps, the driving device can realize linear motion in the required direction, and large output displacement is obtained.
The micro-nano stepping piezoelectric driving device has the characteristics of small heat, stable driving, reliability and high efficiency due to the adoption of the piezoelectric stack as a driving source and the adoption of the asymmetric thin-wall flexible hinge mechanism as a power transmission element, and can realize the functions of linear precise motion and the like.
Claims (4)
1. The utility model provides a little nanometer marching type piezoelectricity drive arrangement, includes piezoelectric stack (3), flexible hinge mechanism of asymmetric thin wall formula (4), active cell (5), pretension voussoir (2), pretension knob (1), pretension knob (7), base (6), its characterized in that: the piezoelectric stack (3) is arranged in the asymmetric thin-wall flexible hinge mechanism (4), the piezoelectric stack (3) is driven to drive the asymmetric thin-wall flexible hinge mechanism (4) to extend, the piezoelectric stack (3) is controlled to drive the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5) to move in a stepping mode, and then the rotor (5) is driven to move linearly and precisely; the rotor (5) adopts a high-precision linear guide rail with a slide block, and the guide rail is fixed on the base through a screw to realize high-precision linear motion; the asymmetric thin-wall flexible hinge mechanism (4) is arranged on the base through screws; the piezoelectric stack (3) can be pre-tightened through the pre-tightening wedge block (2); the pretightening screws (1) and (7) can adjust the initial pretightening force between the asymmetric thin-wall flexible hinge mechanism (4) and the rotor (5).
2. The micro-nano stepping piezoelectric driving device according to claim 1, wherein a parasitic inertia driving principle of the asymmetric thin-wall flexible hinge mechanism (4) is adopted, when the piezoelectric stack (3) is powered on, the asymmetric thin-wall flexible hinge mechanism (4) is pushed to generate compound motion in two directions, namely main motion and parasitic motion, the main motion is linear motion of the mover (5), and the parasitic motion is that the asymmetric thin-wall flexible hinge mechanism (4) applies pretightening force to the mover (5).
3. The micro-nano stepped piezoelectric actuator according to claim 1, wherein the asymmetric thin-walled flexible hinge mechanism (4) and the mover (5) are designed to have an arc-shaped structure for stable contact.
4. The micro-nano stepping piezoelectric actuator according to claim 1, wherein the mover (5) can be a ball linear guide, a roller linear guide, a V-groove linear guide, a dovetail groove linear guide, or the like, and has a simple and reliable structure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910291891.3A CN110768570B (en) | 2019-04-08 | 2019-04-08 | Micro-nano stepping piezoelectric driving device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910291891.3A CN110768570B (en) | 2019-04-08 | 2019-04-08 | Micro-nano stepping piezoelectric driving device |
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| CN110768570A true CN110768570A (en) | 2020-02-07 |
| CN110768570B CN110768570B (en) | 2022-09-27 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030185592A1 (en) * | 2002-03-29 | 2003-10-02 | Tetsuo Ohara | Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge |
| KR20060097723A (en) * | 2003-10-01 | 2006-09-14 | 피에조모터 웁살라 에이비 | Flat resonating electromechanical drive unit |
| CN102237818A (en) * | 2011-06-29 | 2011-11-09 | 南京航空航天大学 | Tower-like ultrasonic motor with asymmetrical structure and asymmetrical modes thereof as well as electric excitation mode of asymmetrical modes |
| CN104734559A (en) * | 2015-03-17 | 2015-06-24 | 西安交通大学 | Marching type piezoceramic actuator and method having displacement measurement function and large push-pull force |
| CN205051600U (en) * | 2015-07-17 | 2016-02-24 | 南京航空航天大学 | Symmetry formula biped driven off -resonance piezoelectricity linear electric motor |
| CN109217717A (en) * | 2018-09-26 | 2019-01-15 | 吉林大学 | Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement |
-
2019
- 2019-04-08 CN CN201910291891.3A patent/CN110768570B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030185592A1 (en) * | 2002-03-29 | 2003-10-02 | Tetsuo Ohara | Method and apparatus for a low cost, high speed, and compact nanometer precision motion stage using friction drive and flexure hinge |
| KR20060097723A (en) * | 2003-10-01 | 2006-09-14 | 피에조모터 웁살라 에이비 | Flat resonating electromechanical drive unit |
| CN102237818A (en) * | 2011-06-29 | 2011-11-09 | 南京航空航天大学 | Tower-like ultrasonic motor with asymmetrical structure and asymmetrical modes thereof as well as electric excitation mode of asymmetrical modes |
| CN104734559A (en) * | 2015-03-17 | 2015-06-24 | 西安交通大学 | Marching type piezoceramic actuator and method having displacement measurement function and large push-pull force |
| CN205051600U (en) * | 2015-07-17 | 2016-02-24 | 南京航空航天大学 | Symmetry formula biped driven off -resonance piezoelectricity linear electric motor |
| CN109217717A (en) * | 2018-09-26 | 2019-01-15 | 吉林大学 | Arcuate structure hinge inhibits the apparatus and method of parasitic piezoelectric actuator rollback movement |
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| CN110768570B (en) | 2022-09-27 |
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