CN110752167B - 芯片转移的方法及其芯片转移系统 - Google Patents
芯片转移的方法及其芯片转移系统 Download PDFInfo
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- CN110752167B CN110752167B CN201910100014.3A CN201910100014A CN110752167B CN 110752167 B CN110752167 B CN 110752167B CN 201910100014 A CN201910100014 A CN 201910100014A CN 110752167 B CN110752167 B CN 110752167B
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Abstract
一种芯片转移的方法及其芯片转移系统。芯片转移的方法包括以下步骤:提供晶圆以生成多个芯片;将多个芯片转移到透明基板的表面,以藉由光感应黏着层将多个芯片固定在透明基板的表面上;将透明基板与目标基板对位,其中目标基板具有落点处,至少一芯片的位置对应至落点处的位置;藉由放射光束照射透明基板,使光感应黏着层让至少一芯片掉落,藉此得以将至少一芯片转移到目标基板的落点处上;以及固定至少一芯片于落点处。
Description
技术领域
本发明关于一种芯片转移的方法及其芯片转移系统,特别是一种利用光感式进行转移的芯片转移的方法及其芯片转移系统。
背景技术
随着科技的进步,电子芯片已经的被大量地使用于各式电子装置上。而于先前技术中已经揭示了几种将电子芯片设置于基板上的方法,例如表面黏着技术(SMT)、晶圆转移(Wafer-to-Wafer Transfer)技术、静电转移(Electrostatic Transfer)技术、弹性印模(Elastomer stamp)微转印(μTP)技术、流体组装(Fluidic Assembly)等技术。
表面黏着技术为芯片需先经逐一封装为SMD(surface mount device)组件后,制作成卷带才完成组件阶段。卷带放入表面贴焊机(SMT)运用真空吸头逐一将SMD打在电路基板上,再经回焊炉固定于基板。但此种方式只能一次转移一个芯片,且能对应的芯片尺寸或电路基板形式有限。晶圆转移技术为将芯片的原生基板与目标基板贴合,再将原生基板剥离后使芯片转移到目标基板上。但此种方式的原生基板与目标基板尺寸必须相同,原生基板与目标基板上芯片设置的间距必须一致,芯片也无法选择性移转。静电转移技术为例用静电方式拾取、移转、放置芯片于目标基板上。但此种静电方式易造成芯片损坏,且移转时为硬碰硬接触,易损伤芯片,也受限于静电极的尺寸。弹性印模微转印技术以具微黏性的PDMS为拾取头(stamp),微调拾取头的速度及施力,破坏组件的弱结构而达成拾取的动作。移转至目标基板后,利用芯片两面分别与拾取头及目标基板上固着层的附着性差异而达成贴附的动作。但此种方式原生芯片须额外制作,且虽可以一次移转多个芯片,但无法作直接选择要移转的芯片。并且破坏组件时容易造成屑粒的产生。流体组装技术将芯片悬浮于液体中,运用滚筒在基板上的滚动使流体带动芯片,同时可利用上部矩阵状的喷嘴释出流体或气体,促进具悬浮芯片的流体扰动,使芯片进而落入基板上的对应井当中。但此种方式芯片外型须作特殊设计,且流体的控制不确定性高,完成的时间亦难以预测。
因此,有必要发明一种新的芯片转移的方法及其芯片转移系统,以解决先前技术的缺失。
发明内容
本发明的主要目的在于提供一种芯片转移的方法,其具有利用光感式进行转移的效果。
本发明的另一主要目的在于提供一种用于上述方法的芯片转移系统。
为达成上述的目的,本发明的芯片转移的方法包括以下步骤:提供晶圆以生成多个芯片;将多个芯片转移到透明基板的表面,以藉由光感应黏着层将多个芯片固定在透明基板的表面上;将透明基板与目标基板对位,其中目标基板具有落点处,至少一芯片的位置对应至落点处的位置;藉由放射光束照射透明基板,使光感应黏着层让至少一芯片掉落,藉此得以将至少一芯片转移到目标基板的落点处上;以及固定至少一芯片于落点处。
本发明的芯片转移系统适用于转移多个芯片。芯片转移系统包括透明基板、目标基板及光束射出模块。透明基板具有一表面,表面设置光感应黏着层,其中于晶圆生成多个芯片后,多个芯片移转到表面,以藉由光感应黏着层固定多个芯片。目标基板具有落点处,其中透明基板与目标基板对位时,至少一芯片的位置对应至落点处的位置。光束射出模块用以射出放射光束,放射光束照射至透明基板,使透明基板上的光感应黏着层让至少一芯片掉落,藉此得以将至少一芯片转移于目标基板的落点处上。
附图说明
图1为本发明的芯片转移系统的侧视示意图。
图2A-2C为本发明的芯片转移系统的转移顺序的示意图。
图3为本发明的芯片转移的方法的步骤流程图。
其中附图标记为:
芯片转移系统 1
晶圆 10
芯片 11
透明基板 20
表面 20a
光感应黏着层 21
目标基板 30
落点处 31
黏着层 311
光束射出模块 40
放射光束 B
具体实施方式
为能让贵审查委员能更了解本发明的技术内容,特举较佳具体实施例说明如下。
以下请先参考图1为本发明的芯片转移系统的侧视示意图及图2A-2C为本发明的芯片转移系统的转移顺序的示意图。
本发明的芯片转移系统1适用于转移多个芯片11,多个芯片11由一晶圆10所制成,由于利用晶圆10生成芯片11的技术已经被本发明所属技术领域中具通常知识者所熟悉,故在此不再赘述其原理。该芯片转移系统1包括透明基板20、目标基板30及光束射出模块40。该透明基板20具有一表面20a,该表面20a设置一光感应黏着层(Photosensitive AdhesiveLayer)21。该光感应黏着层21藉由一具黏性的高分子胶体构成,在吸收特定波长范围的能量后会产生相变而失去黏着力或分解气化。于晶圆10生成该多个芯片11后,该多个芯片11藉由晶圆转移(Wafer-to-Wafer Transfer)技术以移转到该表面20a上,并藉由该光感应黏着层(Photosensitive Adhesive)21固定该多个芯片11,使多个芯片11不易掉落,即如图2A到图2B所示。
目标基板30具有一落点处31,其中该透明基板20与该目标基板30对位时,表面20a上至少有一个芯片11的位置对应至该落点处31的位置。该目标基板30的该落点处31设置一对应井或一黏着层,以方便设置芯片11。于本发明的图1中,落点处31为黏着层311再加上对应井的结构,但本发明并不限于此。
光束射出模块40可射出一放射光束B。放射光束B的波长配合于光感应黏着层21的特性。因此当该放射光束B照射至该透明基板20,会使得该透明基板20上的该光感应黏着层21产生相变或分解。放射光束B可自由设定扫瞄范围,以透过单点对焦或扫描的方式选择性地对单一芯片11或多个芯片11作转置,放射光束B也可弹性调整以对应大小不同尺寸的芯片11,兼顾高效率与选择性的需求。如此一来,就可以让特定的单一芯片11或多个芯片11掉落,藉此得以将芯片11转移于该目标基板30的该落点处31上,最后再以黏胶固定芯片11于落点处31。举例来说,芯片11的电极朝上时,可用绝缘胶材经过光(通常为UV,但不以此为限)或热固定。而芯片11的电极朝下时,即覆晶(Flip chip),可用焊料类,如锡膏、球栅数组封装(Ball Grid Array,BGA)或异方性导电胶(ACF),再经热或光固着于目标基板30,并使芯片11与目标基板30的电极导通,但本发明并不限定芯片11的固定方式。就如图2C所示,芯片11已经完全转移到目标基板30。
并需注意的是,该目标基板30上不同落点处31的间距为该透明基板20上相邻芯片11的间距的M倍,其中M为正整数,但本发明并不限定M的大小。如此一来,芯片转移系统1可在透明基板20到位后以逐点选择性地将欲转置的芯片11一次巨量而快速地进行转置到目标基板30。透明基板20可再移动至下一区域,持续转置芯片11直到目标基板30上的落点处31都已转置完成芯片11。若有多个目标基板30,则可分区同步或同区依序将多个透明基板20的各芯片11巨量而高速地转置于目标基板30上。例如用于制造LED显示器时,可将多个透明基板20分别乘载的红色、蓝色及绿色的LED芯片,再大量且高速地转置到目标基板30,以制成LED显示器的面板。
接着请参考图3为本发明的芯片转移的方法的步骤流程图。此处需注意的是,以下虽以上述芯片转移系统1为例说明本发明的芯片转移的方法,但本发明的芯片转移的方法并不以使用在上述相同结构的芯片转移系统1为限。
首先进行步骤301:提供一晶圆以生成多个芯片。
首先利用晶圆10制成多个芯片11。
接着进行步骤302:将该多个芯片转移到一透明基板的一表面,以藉由一光感应黏着层将该多个芯片固定在该透明基板的该表面上。
接着该多个芯片11藉由晶圆转移技术以移转到透明基板20的该表面20a上,并藉由透明基板20的该光感应黏着层21固定该多个芯片11,如图2A到2B所示。
再进行步骤303:将该透明基板与一目标基板对位,其中该目标基板具有一落点处,至少一芯片的位置对应至该落点处的位置。
让该透明基板20与该目标基板30对位,使得透明基板20的表面20a上至少有一个芯片11的位置对应至该落点处31的位置。
接着执行步骤304:藉由一放射光束照射该透明基板,使该光感应黏着层让该至少一芯片掉落,藉此得以将该至少一芯片转移到该目标基板的该落点处上。
当该放射光束B照射至该透明基板20,会使得该透明基板20上的该光感应黏着层21产生相变或分解。如此一来,就可以让芯片11掉落,藉此得以将芯片11转移于该目标基板30的该落点处31上。
最后执行步骤305:固定该芯片于该落点处。
最后以黏胶固定芯片11于落点处31,但本发明并不限定黏胶的材质或固定的方法。
此处需注意的是,本发明的芯片转移的方法并不以上述的步骤次序为限,只要能达成本发明的目的,上述的步骤次序亦可加以改变。
如此一来,藉由本发明的芯片转移系统1及芯片转移的方法可以完全在室温下制造,且目标基板30无尺寸、材料的限制。本发明的芯片转移的方法用于群组式的巨量移转时,可提高效率,缩短工艺时间。用于单点或小区域的高选择性移转时也可用于修复不良区域,提高转置良率。
需注意的是,上述实施方式仅例示本发明的较佳实施例,为避免赘述,并未详加记载所有可能的变化组合。然而,本领域的通常知识者应可理解,上述各模块或组件未必皆为必要。且为实施本发明,亦可能包含其他较细节的现有模块或组件。各模块或组件皆可能视需求加以省略或修改,且任两模块间未必不存在其他模块或组件。只要不脱离本发明基本架构者,皆应为本专利所主张之权利范围,而应以专利申请范围为准。
Claims (8)
1.一种芯片转移的方法,其特征在于,包括以下步骤:
提供一晶圆以生成多个芯片;
将该多个芯片转移到一透明基板的一表面,以藉由一光感应黏着层将该多个芯片固定在该透明基板的该表面上;
将该透明基板与一目标基板对位,其中该目标基板具有一落点处,至少一芯片的位置对应至该落点处的位置,且芯片与该目标基板不接触;
藉由一放射光束照射该透明基板,使该光感应黏着层让该至少一芯片掉落,藉此得以将该至少一芯片转移到该目标基板的该落点处上;以及
固定该至少一芯片于该落点处。
2.如权利要求1所述的芯片转移的方法,其特征在于,更包括以下步骤:藉由一具黏性的高分子胶体构成该光感应黏着层。
3.如权利要求1所述的芯片转移的方法,其特征在于,更包括以下步骤:设置一对应井或一黏着层于该目标基板的该落点处。
4.如权利要求1所述的芯片转移的方法,其特征在于,该目标基板上不同落点处的间距为该透明基板上相邻芯片的间距的M倍,其中M为正整数。
5.一种芯片转移系统,适用于转移多个芯片,其特征在于,该芯片转移系统包括:
一透明基板,具有一表面,该表面设置一光感应黏着层,其中于一晶圆生成该多个芯片后,该多个芯片移转到该表面,以藉由该光感应黏着层固定该多个芯片;
一目标基板,具有一落点处,其中该透明基板与该目标基板对位时,至少一芯片的位置对应至该落点处的位置,且芯片与该目标基板不接触;以及
一光束射出模块,用以射出一放射光束,该放射光束照射至该透明基板,使该透明基板上的该光感应黏着层让该至少一芯片掉落,藉此得以将该至少一芯片转移于该目标基板的该落点处上。
6.如权利要求5所述的芯片转移系统,其特征在于,该光感应黏着层藉由一具黏性的高分子胶体构成。
7.如权利要求5所述的芯片转移系统,其特征在于,该目标基板的该落点处设置一对应井或一黏着层。
8.如权利要求5所述的芯片转移系统,其特征在于,该目标基板上不同落点处的间距为该透明基板上相邻芯片的间距的M倍,其中M为正整数。
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CN113314453A (zh) * | 2021-05-20 | 2021-08-27 | 湘潭大学 | 一种Micro-LED的转移方法和装置 |
TWI766699B (zh) * | 2021-05-25 | 2022-06-01 | 台灣愛司帝科技股份有限公司 | 轉移電子元件之方法 |
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