CN110739271A - 一种阵列基板及其制造方法 - Google Patents
一种阵列基板及其制造方法 Download PDFInfo
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- CN110739271A CN110739271A CN201910980678.3A CN201910980678A CN110739271A CN 110739271 A CN110739271 A CN 110739271A CN 201910980678 A CN201910980678 A CN 201910980678A CN 110739271 A CN110739271 A CN 110739271A
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- metal oxide
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- 239000000758 substrate Substances 0.000 title claims abstract description 28
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 239000004065 semiconductor Substances 0.000 claims abstract description 57
- 229910044991 metal oxide Inorganic materials 0.000 claims abstract description 47
- 150000004706 metal oxides Chemical class 0.000 claims abstract description 47
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 239000002243 precursor Substances 0.000 claims description 25
- 239000000463 material Substances 0.000 claims description 15
- 238000000034 method Methods 0.000 claims description 12
- 238000005468 ion implantation Methods 0.000 claims description 11
- 238000005530 etching Methods 0.000 claims description 10
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 8
- 229910052802 copper Inorganic materials 0.000 claims description 8
- 239000010949 copper Substances 0.000 claims description 8
- 238000000151 deposition Methods 0.000 claims description 7
- 229910004205 SiNX Inorganic materials 0.000 claims description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- -1 hydrogen ions Chemical class 0.000 claims description 6
- 229910001182 Mo alloy Inorganic materials 0.000 claims description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 4
- 229910001257 Nb alloy Inorganic materials 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 4
- 239000004020 conductor Substances 0.000 claims description 4
- 239000011733 molybdenum Substances 0.000 claims description 4
- 239000010936 titanium Substances 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N argon Substances [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 3
- 229910052786 argon Inorganic materials 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- 238000009413 insulation Methods 0.000 claims description 2
- 238000009792 diffusion process Methods 0.000 description 11
- 239000010408 film Substances 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000003071 parasitic effect Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 101100353517 Caenorhabditis elegans pas-2 gene Proteins 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002304 perfume Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1222—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer
- H01L27/1225—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition, shape or crystalline structure of the active layer with semiconductor materials not belonging to the group IV of the periodic table, e.g. InGaZnO
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1259—Multistep manufacturing methods
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- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Liquid Crystal (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201910980678.3A CN110739271A (zh) | 2019-10-16 | 2019-10-16 | 一种阵列基板及其制造方法 |
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CN201910980678.3A CN110739271A (zh) | 2019-10-16 | 2019-10-16 | 一种阵列基板及其制造方法 |
Publications (1)
Publication Number | Publication Date |
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CN110739271A true CN110739271A (zh) | 2020-01-31 |
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CN201910980678.3A Pending CN110739271A (zh) | 2019-10-16 | 2019-10-16 | 一种阵列基板及其制造方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111180471A (zh) * | 2020-03-02 | 2020-05-19 | 南京中电熊猫平板显示科技有限公司 | 阵列基板及其制造方法 |
CN111668236A (zh) * | 2020-06-08 | 2020-09-15 | Tcl华星光电技术有限公司 | 阵列基板及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103208526A (zh) * | 2012-12-28 | 2013-07-17 | 南京中电熊猫液晶显示科技有限公司 | 一种半导体器件及其制造方法 |
CN103235458A (zh) * | 2013-04-27 | 2013-08-07 | 南京中电熊猫液晶显示科技有限公司 | Tft-lcd阵列基板及其制造方法 |
CN104576658A (zh) * | 2014-12-30 | 2015-04-29 | 上海天马微电子有限公司 | 一种阵列基板及其制作方法及显示器 |
CN107851668A (zh) * | 2015-07-27 | 2018-03-27 | 夏普株式会社 | 半导体装置及其制造方法 |
CN108417579A (zh) * | 2018-01-19 | 2018-08-17 | 南京中电熊猫液晶显示科技有限公司 | 一种显示基板及其制造方法 |
-
2019
- 2019-10-16 CN CN201910980678.3A patent/CN110739271A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN103208526A (zh) * | 2012-12-28 | 2013-07-17 | 南京中电熊猫液晶显示科技有限公司 | 一种半导体器件及其制造方法 |
CN103235458A (zh) * | 2013-04-27 | 2013-08-07 | 南京中电熊猫液晶显示科技有限公司 | Tft-lcd阵列基板及其制造方法 |
CN104576658A (zh) * | 2014-12-30 | 2015-04-29 | 上海天马微电子有限公司 | 一种阵列基板及其制作方法及显示器 |
CN107851668A (zh) * | 2015-07-27 | 2018-03-27 | 夏普株式会社 | 半导体装置及其制造方法 |
CN108417579A (zh) * | 2018-01-19 | 2018-08-17 | 南京中电熊猫液晶显示科技有限公司 | 一种显示基板及其制造方法 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111180471A (zh) * | 2020-03-02 | 2020-05-19 | 南京中电熊猫平板显示科技有限公司 | 阵列基板及其制造方法 |
CN111668236A (zh) * | 2020-06-08 | 2020-09-15 | Tcl华星光电技术有限公司 | 阵列基板及其制备方法 |
WO2021248676A1 (zh) * | 2020-06-08 | 2021-12-16 | Tcl华星光电技术有限公司 | 阵列基板及其制备方法 |
US11784191B2 (en) | 2020-06-08 | 2023-10-10 | Tcl China Star Optoelectronics Technology Co., Ltd. | Array substrate, manufacturing method thereof, and display device |
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TA01 | Transfer of patent application right |
Effective date of registration: 20200910 Address after: No.7 Tianyou Road, Qixia District, Nanjing City, Jiangsu Province Applicant after: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Address before: Nanjing Crystal Valley Road in Qixia District of Nanjing City Tianyou 210033 Jiangsu province No. 7 Applicant before: NANJING CEC PANDA FPD TECHNOLOGY Co.,Ltd. Applicant before: NANJING CEC PANDA LCD TECHNOLOGY Co.,Ltd. Applicant before: NANJING HUADONG ELECTRONICS INFORMATION & TECHNOLOGY Co.,Ltd. |
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Application publication date: 20200131 |