CN110734298A - Brazing structure of ceramic and metal - Google Patents
Brazing structure of ceramic and metal Download PDFInfo
- Publication number
- CN110734298A CN110734298A CN201911268811.9A CN201911268811A CN110734298A CN 110734298 A CN110734298 A CN 110734298A CN 201911268811 A CN201911268811 A CN 201911268811A CN 110734298 A CN110734298 A CN 110734298A
- Authority
- CN
- China
- Prior art keywords
- metal
- welded
- brazing
- ceramic
- brazed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B37/00—Joining burned ceramic articles with other burned ceramic articles or other articles by heating
- C04B37/02—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles
- C04B37/023—Joining burned ceramic articles with other burned ceramic articles or other articles by heating with metallic articles characterised by the interlayer used
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/02—Aspects relating to interlayers, e.g. used to join ceramic articles with other articles by heating
- C04B2237/12—Metallic interlayers
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/52—Pre-treatment of the joining surfaces, e.g. cleaning, machining
-
- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B2237/00—Aspects relating to ceramic laminates or to joining of ceramic articles with other articles by heating
- C04B2237/50—Processing aspects relating to ceramic laminates or to the joining of ceramic articles with other articles by heating
- C04B2237/55—Pre-treatments of a coated or not coated substrate other than oxidation treatment in order to form an active joining layer
Abstract
The present disclosure provides brazing structures of ceramics and metals, including a to-be-brazed ceramic having a disk shape and a brazed surface subjected to surface grinding and metallization, a brazing filler metal having an annular sheet shape, an outer diameter of the brazing filler metal being smaller than an outer diameter of the to-be-brazed ceramic and disposed on the brazed surface, and a to-be-brazed metal having an outer diameter equal to that of the to-be-brazed ceramic, the annular to-be-brazed metal having an annular protrusion extending in an inner diameter direction, the inner diameter of the annular protrusion being smaller than an inner diameter of the brazing filler metal, the brazing structures being formed by horizontally stacking the to-be-brazed ceramic and the to-be-brazed metal, and applying pressures to the to-be-brazed ceramic and the to-be-brazed, respectively, heating the brazing filler metal to be melted and maintaining the melted state for a predetermined time, forming an interface between the brazing filler metal and the to-be-brazed ceramic into a brazed surface, and annealing and solidifying, thereby providing brazing structures brazed using brittle brazing filler metals.
Description
Technical Field
The present disclosure particularly relates to ceramic to metal brazed structures.
Background
In the existing micro device, the interconnection of metal and ceramic is realized by a plurality of new welding techniques besides the traditional brazing technique, such as diffusion welding, friction welding, hot-press welding and the like. However, the reliability of these new welding techniques is not comparable to that of conventional brazing techniques. Therefore, the traditional brazing method is still adopted in industries with high reliability requirements (such as aerospace, military industry, medical treatment and the like). In the existing welding technology, the welding difficulty is directly related to the welding area during brazing, and the smaller the welding area is, the lower the difficulty is.
For the brazed structure in the prior micro device, as shown in fig. 1, the brazed structure comprises ceramic, solder and metal. The whole brazing structure is vertically arranged; then processing the brazing filler metal into filaments to be wound around the ceramic, or processing the brazing filler metal into rings to be placed around the ceramic; and then heating to ensure that the temperature is higher than the melting point of the brazing filler metal, and dissolving the brazing filler metal and flowing downwards under the action of gravity to finish the brazing process. However, this brazing technique has several problems, such as the overall brazed structure profile is much larger than the ceramic profile, which is very disadvantageous for miniaturization; brazing filler metal filaments are wound outside the disc-shaped ceramic, so that the efficiency is low; if the ceramic plate is thicker, the brazing filler metal needs to be processed to be longer and thinner, the current processing method is difficult to achieve, and even if the processing method can be achieved, the cost is very high; further, if the brazing filler metal is brittle and is very easily broken or broken, it cannot be processed into a filament or a tube. The current welding structure can not meet the requirements.
Disclosure of Invention
The present disclosure has been made in view of the above-described state of the art, and an object thereof is to provide brazing structures that can be brazed using a relatively brittle brazing material.
To this end, the present disclosure provides kinds of ceramic-to-metal brazing structures, characterized by comprising a ceramic to be welded having a disk shape with a brazing surface subjected to surface grinding and metallization, a brazing filler metal having an annular sheet shape with an outer diameter smaller than that of the ceramic to be welded and disposed on the brazing surface, and a metal to be welded having an annular shape with an inner diameter smaller than that of the brazing filler metal and disposed on the brazing filler metal, the metal to be welded having an outer diameter equal to that of the ceramic to be welded, the annular metal to be welded having an annular protrusion extending in an inner diameter direction, the annular protrusion having an inner diameter smaller than that of the brazing filler metal, the metal to be welded being subjected to surface treatment, wherein the brazing filler metal is disposed between the ceramic to be welded and the metal to be welded, the brazing structure is formed horizontally, and pressures are applied to the ceramic to be welded and the metal to be welded, respectively, and in the brazing filler metal, the brazing filler metal is heated to a prescribed temperature profile, and the brazing filler metal is heated to be melted and is formed to be solidified with the brazing filler metal in a predetermined time.
In the present disclosure, a brazing structure of ceramics and metal includes a to-be-brazed ceramic having a surface to be brazed which is surface-ground and metallized, a sheet-like brazing filler metal disposed on the brazing surface, and a to-be-brazed metal disposed on the brazing filler metal, and the brazing structure is horizontally stacked, in which the brazing filler metal is disposed between the to-be-brazed ceramic and the to-be-brazed metal, and in the brazing process, the brazing filler metal is horizontally stacked and pressurized with a pressure respectively to the to-be-brazed ceramic and the to-be-brazed metal, and then the brazing filler metal is heated according to a prescribed temperature profile, and in the temperature profile, the brazing filler metal is rapidly heated to be molten and maintained in a molten state for a predetermined time, so that an interface between the brazing filler metal and the to-be-brazed ceramic is formed as a welding surface, and annealing and solidification are performed.
In the brazing structure according to the present disclosure, the metallization may be performed only at the edge position of the brazing surface. In this case, an intermediate metal layer can be formed on the edge position of the ceramic to be welded.
In addition, in the brazing structure according to the present disclosure, optionally, the edge position is formed with an annular intermediate metal layer having an annular width equal to that of the metal to be welded. Therefore, the brazing of the ceramic to be welded and the metal to be welded can be facilitated.
In addition, in the brazing structure according to the present disclosure, the brazing filler metal may be disposed at the edge position. In this case, brazing can be performed on the intermediate metal layer of the ceramic to be welded.
In addition, in the brazing structure according to the present disclosure, optionally, the brazing filler metal has biocompatibility, and the brazing filler metal is selected from at least of Au, Ag, Ti, Nb, and alloys thereof.
In addition, in the brazing structure to which the present disclosure relates, the to-be-welded ceramics may be composed of at least selected from the group consisting of alumina, zirconia, silica, a carbon material, silicon nitride, silicon carbide, titania, aluminosilicate, or calcium aluminum.
In addition, in the brazing structure according to the present disclosure, the metals to be welded may be at least selected from Ti, Nb, Ni, Zr, Ta, and alloys thereof, in which case, metals to be welded having biocompatibility can be obtained.
In the brazing structure according to the present disclosure, the metallization process may be sputtering, evaporation, PVD, CVD, plating, or high-temperature sintering. Thereby, a tightly bonded intermediate metal layer can be formed on the surface of the ceramic to be welded.
In addition, in the brazing structure according to the present disclosure, the roughness of the surface of the ceramic to be welded may be less than 0.05 μm. In this case, the surface of the ceramic to be welded can be smooth and flat, which is beneficial to the subsequent brazing between the ceramic and the metal.
In addition, in the brazing structure related to the disclosure, optionally, when brazing is performed, the temperature is raised to 1060 ℃ to 1150 ℃ at a heating rate of 1 ℃/min to 50 ℃/min, the temperature is kept for 1min to 30min, then the temperature is lowered to 200 ℃ to 400 ℃ at a cooling rate of 2 ℃/min to 20 ℃/min, and then the temperature is cooled to below 150 ℃ along with the furnace. Under the condition, the temperature is quickly raised during brazing, and the temperature is immediately lowered after the short molten state is kept, so that the flowing of the metal brazing filler metal can be controlled, the generation and distribution of brittle phases between interfaces can be improved, the strength is increased, the thermal stress and the thermal deformation of a base metal are reduced, cracks in a welding line are eliminated, and the air tightness and the shearing strength of an interface layer between the ceramic to be welded and the metal to be welded are improved.
In addition, in the brazing structure according to the present disclosure, the metal to be welded is optionally subjected to surface treatment using sand paper stepwise grinding so that the flatness of the metal to be welded is 8 μm to 10 μm. In this case, the brazing filler metal can be better attached to the metal brazing filler metal and the metal to be welded, and brazing is facilitated.
According to the present disclosure, brazing structures capable of brazing using a brittle brazing material can be provided.
Drawings
Fig. 1 shows a schematic view of a brazing structure in the prior art.
Fig. 2 shows a schematic view of a brazed structure to which examples of the present disclosure relate.
Fig. 3 shows a cross-sectional view of a brazed structure to which examples of the present disclosure relate.
Fig. 4 shows a schematic flow diagram of a ceramic to metal brazing method according to an example of the present disclosure.
Fig. 5 shows a cross-sectional view of a jig for brazing according to an example of the present disclosure.
Fig. 6 shows a cross-sectional view of a jig equipped with a brazing structure according to an example of the present disclosure.
Detailed Description
Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic and the ratio of the dimensions of the components and the shapes of the components may be different from the actual ones.
The present disclosure relates to ceramic to metal brazed structures, which may be referred to simply as brazed structures, in examples brazed structures may refer to micro brazed structures.
Fig. 2 shows a schematic view of a brazed structure to which examples of the present disclosure relate. Fig. 3 shows a cross-sectional view of a brazed structure to which examples of the present disclosure relate.
In the present embodiment, as shown in fig. 2 and 3, the ceramic-to-metal brazing structure 10 may include a ceramic to be welded 11, a brazing metal 12, and a metal to be welded 13, wherein the ceramic to be welded 11 may have a disk shape, the brazing metal 12 may have an annular sheet shape, and the metal to be welded 13 may have an annular shape, further, the brazing metal 12 may be disposed on the ceramic to be welded 11, the metal to be welded 13 may be disposed on the brazing metal 12, and the brazing metal 12 may be disposed between the ceramic to be welded 11 and the metal to be welded 13, in examples, the brazing structure 10 may be formed by being horizontally stacked, and pressure may be applied to the ceramic to be welded 11 and the metal to be welded 13, respectively, further, the shape of the brazing structure 10 is not particularly limited, and in examples, the brazing structure 10 may be cylindrical.
In examples, the to-be-welded ceramic 11 may have a surface-ground and metalized brazing surface, the to-be-welded metal 13 may have a surface treatment, and the metal filler 12 may be disposed on the brazing surface, further, in examples, the metal filler 12 may have an outer diameter smaller than the outer diameter of the to-be-welded ceramic 11, and the to-be-welded metal 13 may have an outer diameter equal to the to-be-welded ceramic 11, in examples, the annular to-be-welded metal 13 may have an annular projection 131 extending in an inner diameter direction, and an inner diameter of the annular projection 131 may be smaller than an inner diameter of the metal filler 12.
In examples, during soldering, the brazing filler metal 12 is heated according to a predetermined temperature profile in which the brazing filler metal 12 is heated to be molten and kept in a molten state for a predetermined time, and the interface between the brazing filler metal 12 and the ceramic 11 to be welded is formed as a soldering surface, and is annealed and solidified.
The brazing structure 10 according to the present embodiment includes a to-be-brazed ceramic 11 having a surface-ground and metallized brazing surface, a sheet-like brazing filler metal 12 disposed on the brazing surface, and a to-be-brazed metal 13 disposed on the brazing filler metal 12, and the brazing structure 10 is formed by horizontally stacking the brazing filler metal 12 between the to-be-brazed ceramic 11 and the to-be-brazed metal 13 in the brazing structure 10, the brazing structure 10 is horizontally stacked and applies pressure to the to-be-brazed ceramic 11 and the to-be-brazed metal 13, respectively, and then the brazing filler metal 12 is heated according to a prescribed temperature profile in which the brazing filler metal 12 is rapidly heated to be molten and maintained in a molten state for a predetermined time, so that an interface between the brazing filler metal 12 and the to-be-brazed ceramic 11 is formed as a welding surface, annealed and solidified, in this case, planar brazing can be performed in a horizontal direction, wettability of the to-be-brazed metal 13 to the to-be-brazed ceramic 11 and wettability of the to-be-brazed metal 13 to-be-to-brazed metal 11 can be increased, and a temperature of the brazing filler metal 13 and the brazing filler metal can be maintained in a stable flat, and a short-temperature-up, and thus, a temperature-decreasing temperature-increasing and a short-decreasing temperature-increasing effect of the brazing structure can be maintained in a short-maintaining a short.
In examples, the ceramic to be welded 11 may have biocompatibility, whereby the destruction to the human body can be reduced and the compatibility with the human tissue can be made, in addition, in examples, the ceramic to be welded 11 may be an oxide ceramic, whereby the ceramic to be welded 11 having stable chemical properties can be obtained.
In the present embodiment, the ceramic to be welded 11 may be made ofSelected from aluminium oxide (Al)2O3) Zirconium oxide (ZrO)2) Silicon oxide (SiO)2) Carbon material (C), silicon nitride (Si)3N4) Silicon carbide (SiC), titanium oxide (TiO)2) Aluminosilicate (Na)2O·Al2O3·SiO2) Or calcium-aluminum (CaO. Al)2O3) Thereby, the ceramics to be welded 11 having biocompatibility can be obtained.
In examples, the ceramic 11 to be welded may be alumina (Al)2O3) In examples, the ceramic to be welded 11 is preferably made of alumina (Al) with a mass fraction of 96% or more2O3) And (4) forming. More preferably, the ceramic to be welded 11 is composed of alumina (Al) with a mass fraction of 99% or more2O3) Most preferably, the ceramic to be welded 11 is composed of alumina (Al) of 99.99% by mass or more2O3) -alumina (Al) in the ceramic 11 to be welded2O3) It is considered that the mass fraction of alumina (Al) higher than the mass fraction is increased because the main crystal phase is increased and the physical properties of the to-be-welded ceramic 11, such as the pre-compression strength, the bending strength, and the elastic modulus are improved accordingly2O3) Will exhibit better biocompatibility and long term reliability in other examples, the ceramic to be welded 11 may also be zirconium oxide (ZrO)2) A ceramic.
In examples, the ceramic to be welded 11 may be a non-oxide ceramic, for example, the ceramic to be welded 11 may be a carbon material (C), silicon nitride (Si)3N4) And silicon carbide (SiC) of at least kinds.
In examples, the ceramic 11 to be welded may also be made of silicon oxide (SiO)2) Potassium oxide (K)2O), sodium oxide (Na)2O), calcium oxide (CaO), magnesium oxide (MgO), iron oxide (Fe)2O3) At least kinds of constitutions.
In some examples, the ceramic 11 to be welded may have a ground surface, in other examples, the ceramic 11 to be welded may include upper and lower surfaces, whereby a ground surface ground from at least of the upper and lower surfaces of the ceramic 11 to be welded can be obtained, in which case, since the object of grinding is at least of the upper and lower surfaces of the ceramic 11 to be welded, the difficulty of the grinding process can be reduced, it is facilitated to grind the surface of the ceramic 11 to be welded to be flat and smooth, thereby improving the surface wettability of the ceramic 11 to be welded.
In addition, in examples, the roughness of at least of the upper and lower surfaces of the ceramic 11 to be welded may be less than 0.05 μm in which case the surface of the ceramic 11 to be welded can be made smooth and even to facilitate subsequent brazing between the ceramic and the metal in examples, the roughness of the surface of the ceramic 11 to be welded may be 0.04 μm, 0.03 μm, 0.02 μm, 0.01 μm, and so on.
In examples, the ceramic to be welded 11 may be in a disk shape, but examples of the present disclosure are not limited thereto, and for example, the ceramic to be welded 11 may be in a square shape.
In , the ceramic 11 to be soldered may have a soldered surface that has been surface ground and metalized, that is, the ceramic 11 to be soldered may be surface ground and metalized to form a soldered surface, therefore, the metal solder 12 can well wet the ceramic 11 to be soldered whose surface has been metalized, and the intermediate metal layer can make the coefficient of thermal expansion of the soldered surface of the ceramic 11 to be soldered and the coefficient of thermal expansion of the metal 13 to be soldered exhibit gradient transition, so that the difference in coefficient of thermal expansion between interfaces due to different materials can be reduced, the thermal stress of the interface layer can be reduced, and the hermetic sealing performance can be improved.
In addition, in some examples, the metallization may be limited to only the edge of the braze surface, in other words, the metallization may be performed at the edge of the lapping surface to form a metallized braze surface that matches the metal solder 12. in this case, an intermediate metal layer can be formed at the location of the ceramic to be brazed 11 to which the metal to be brazed 13 is to be brazed.in some other examples, the metallization may be performed over the entire braze surface.in some other examples, the metallization may be performed only at the intermediate location of the braze surface.
In examples, the edge location may be formed with an intermediate metal layer, thereby facilitating welding between the ceramic 11 to be welded and the metal 13 to be welded, in examples, the intermediate metal layer may be annular, in examples, the intermediate metal layer may have an annular width equal to the metal 13 to be welded.
In examples, the ring width of the middle metal layer may be slightly larger than the ring width of the metal 13 to be welded additionally, in examples, the ring width of the middle metal layer may be slightly smaller than the ring width of the metal 13 to be welded.
In addition, in examples, the metallization process may be by sputtering, evaporation, plating, or high temperature sintering, whereby an intermediate metal layer can be formed on the surface of the ceramic 11 to be welded, and the metallization process is preferably by sputtering in examples.
In some examples, the metallization process may be PVD (physical vapor deposition) or CVD (chemical vapor deposition). in other examples, the metallization process may be magnetron sputtering.in some examples, the metallization process may be a low temperature process.
In examples, the intermediate metal layer may be composed of at least selected from Nb, Au, Ti and their alloys, whereby the brazing filler metal 12 can well wet the ceramic to be welded 11 having the intermediate metal layer on the surface thereof, in examples, the intermediate metal layer may be composed of Nb, in other words, the intermediate metal layer may be a niobium layer formed of Nb.
Additionally, in examples, the intermediate metal layer may be placed under a microscope at 500 to 1000 times magnification to observe the quality of the intermediate metal layer.
In the present embodiment, the brazing filler metal 12 may be in the form of a sheet, in some examples, the brazing filler metal 12 may be in the form of a ring-shaped sheet, as shown in FIG. 2, additionally, the brazing filler metal 12 may be disposed on the braze surface, in some examples, the brazing filler metal 12 may be disposed on an intermediate metal layer.
In examples, as shown in FIG. 3, the metal filler metal 12 may be placed at an edge location, in which case brazing can be performed on an intermediate metal layer of the ceramic 11 to be brazed, in other examples, the metal filler metal 12 may be placed across the entire brazing surface, in examples, the metal filler metal 12 may be placed at an intermediate location on the brazing surface.
In addition, in examples, the metal filler metal 12 may have biocompatibility, thereby reducing the destruction to the human body and being compatible with the human tissue, the metal filler metal 12 may be selected from at least of Au, Ag, Ti, Nb, and alloys thereof, in which case, a brazing layer having biocompatibility can be formed, for example, the metal filler metal 12 may be pure Au. and in examples, the molten pure Au has good wettability to the niobium layer, thereby contributing to the improvement of the reliability of the brazing of the ceramic 11 to be welded to the metal 13 to be welded.
In addition, in examples, the brazing filler metal 12 may be pretreated, in examples, the brazing filler metal 12 may be surface-treated using progressive sanding, thereby removing an oxide film on the surface and contributing to improvement of reliability of the interface layer, for example, in examples, the brazing filler metal 12 may be progressively sanded using #200, #400, #600, #1200, #2000, and #4000 sandpaper, in examples, the brazing filler metal 12 may be progressively sanded using #100, #300, #500, #1000, #1500, #2500, and #4000 sandpaper, in examples, the brazing filler metal 12 may be progressively sanded using #280, #400, #800, #1600, #2500, #3500, and # 5000.
In addition, in the present embodiment, the brazing filler metal 12 may be in the form of powder, paste, wire, or strip, for example, in the brazing filler metal 12 may be in the form of powder, in another the brazing filler metal 12 may be in the form of paste.
In addition, in examples, as shown in FIG. 3, the metal filler metal 12 may be disposed between the ceramic 11 to be welded and the metal 13 to be welded (described in detail later). in examples, the metal 13 to be welded may be in the shape of a ring.in another examples, the ceramic 11 to be welded, the metal filler metal 12, and the metal 13 to be welded may be horizontally stacked in this order to form the brazed structure 10.
In the present disclosure, as shown in FIG. 3, the metal to be welded 13 may be provided on the brazing metal 12, in examples, as shown in FIG. 3, the outer diameter of the ceramic to be welded 11 and the metal to be welded 13 may be substantially the same, in which case the fitting and fixing of the ceramic to be welded 11 and the metal to be welded 13 in the subsequent brazing process can be facilitated, in addition, since the outer diameter of the ceramic to be welded 11 and the metal to be welded 13 may be substantially the same, and the ceramic to be welded 11, the metal to be welded 13, and the brazing metal 12 may be horizontally stacked in order in the brazed structure 10, miniaturization of the brazed structure 10 can be facilitated, in addition, the outer diameter of the metal to be welded 13 may be smaller than the outer diameter of the ceramic to be welded 11.
In examples, the metal to be welded 13 is biocompatible, thereby reducing the risk of damage to the human body and providing compatibility with human tissue.
In examples, the metal to be welded 13 may be selected from at least of Ti (titanium), Nb (niobium), Ni (nickel), Zr (zirconium), Ta (tantalum), and alloys thereof in which case biocompatible metal to be welded 13 can be obtained in examples, the metal to be welded 13 may be pure Ti. in examples, the metal to be welded 13 may be a Ti alloy in examples, the metal to be welded 13 may be an iron-nickel alloy in examples.
Additionally, in examples, the metal to be welded 13 may have an annular protrusion 131, as shown in FIG. 3. in this case, subsequent mating of the brazed structure 10 to other components (not shown) is facilitated. in examples, the metal to be welded 13 may be body-formed .
In examples, the annular protrusion 131 may extend in an inner diameter direction, further, in examples, the inner diameter of the annular protrusion 131 may be less than the inner diameter of the braze metal 12, i.e., the inner diameter of the annular protrusion 131 may be less than the inner diameter of the braze metal 12.
In addition, in the present embodiment, the metal 13 to be welded may be surface-treated, in examples, the metal 13 to be welded may be surface-treated using progressive sanding so that the flatness of the metal 13 to be welded may be 8 μm to 10 μm, in which case it is better attached to the brazing filler metal 12 and the metal 13 to be welded, facilitating brazing, for example, in examples, the metal 13 to be welded may be progressively sanded with #200, #400, #600, #1200, #2000 and # 4000. in examples, the metal 13 to be welded may be progressively sanded with #100, #300, #500, #1000, #1500, #2500 and # 4000. in examples, the metal 13 to be welded may be progressively sanded with #280, #400, #800, #1600, #2500, #3500 and # 9, and # 4000. in examples, the flatness of the metal 13 to be 8 μm, 8.2 μm, 8.5, 8.9 μm, 9.9 μm, 9 μm, or 8.9 μm.
In addition, in examples, the amount of flatness of the metal 13 to be welded may be affected by the thickness of the braze metal 12 the thicker the braze metal 12 thickness, the greater the tolerance for flatness of the metal 13 to be welded, and conversely, the less tolerance for flatness of the metal 13 to be welded.
In addition, in examples, the metal to be welded 13 after grinding can be cleaned, thereby removing foreign matters on the surface of the metal to be welded 13 to facilitate subsequent brazing, in examples, the metal to be welded 13 after grinding can be cleaned with ethanol for 10min to 20min and then with isopropanol for 10min to 20 min.
In addition, in examples, pressure may be applied to the ceramic 11 to be brazed and the metal 13 to be brazed, respectively, in which case both the occurrence of displacement of the brazed structure 10 can be reduced and uniformity of the braze width and its edges can be assisted in control.
In some examples, the brazed structure 10 may be composed of only biocompatible materials, in addition, the device formed by brazing the brazed structure 10 may be used in the medical industry, for example, it may be implanted as an implant into the human body, in some examples, the brazed structure 10 may be a miniaturized brazed structure 10, in some other examples, the brazed structure 10 may include non-biocompatible materials, depending on the actual requirements.
In examples, in the brazing structure 10, the shapes of the ceramic to be welded 11, the metal to be welded 13, and the brazing filler metal 12 may be matched, for example, the ceramic to be welded 11 may have a disk shape, the metal to be welded 13 may have a ring shape, and the brazing filler metal 12 may have a ring-shaped sheet shape.
In examples, in the brazed structure 10, the dimensions of the ceramic to be welded 11, the metal to be welded 13, and the braze 12 may be matched, for example, the outer diameter of the braze 12 may be slightly smaller than the outer diameter of the ceramic to be welded 11, and the outer diameter of the metal to be welded 13 may be approximately equal to the outer diameter of the ceramic to be welded 11.
Additionally, in examples, the outer diameter of the metal 13 to be welded may be slightly larger than the outer diameter of the ceramic 11 to be welded, in examples, the outer diameter of the metal 13 to be welded may be slightly smaller than the outer diameter of the ceramic 11 to be welded.
In examples, the difference between the outer diameter of the ceramic 11 to be welded and the outer diameter of the metallic filler 12 may not exceed 0.05mm, for example, the difference between the outer diameter of the ceramic 11 to be welded and the outer diameter of the metallic filler 12 may be 0.01mm, 0.02mm, 0.03mm, 0.04mm, 0.05mm, or the like.
In examples, the inside diameter of the metal filler metal 12 may be slightly smaller than the inside diameter of the metal 13 to be welded, in other words, the ring width of the metal filler metal 12 may be slightly smaller than the ring width of the metal 13 to be welded, in examples, the difference between the inside diameter of the metal filler metal 12 and the inside diameter of the metal 13 to be welded may not exceed 0.05mm, for example, the difference between the inside diameter of the metal filler metal 12 and the inside diameter of the metal 13 to be welded may be 0.01mm, 0.02mm, 0.03mm, 0.04mm, 0.05mm, etc., and further, the inside diameter of the metal 13 to be welded may refer to the inside diameter of the annular protrusion 131.
In examples, the inner diameter of the middle metal layer may be approximately equal to the inner diameter of the metal 13 to be welded additionally, in examples, the outer diameter of the middle metal layer may be approximately equal to the outer diameter of the metal 13 to be welded.
In examples, the outer diameter of the ceramic 11 to be welded may be 10mm to 9.9mm, for example, the outer diameter of the ceramic 11 to be welded may be 9.9mm, 9.91mm, 9.92mm, 9.93mm, 9.94mm, 9.95mm, 9.96mm, 9.97mm, 9.98mm, 9.99mm, or 10 mm.
In examples, the outer diameter of the metal 13 to be welded may be 10.1mm to 9.9mm, for example, the outer diameter of the metal 13 to be welded may be 9.9mm, 9.92mm, 9.95mm, 9.98mm, 10mm, 10.02mm, 10.05mm, 10.08mm, or 10.1 mm.
In examples, the inside diameter of the metal 13 to be welded may be 8.9mm to 8.7mm, for example, the inside diameter of the metal 13 to be welded may be 8.7mm, 8.72mm, 8.75mm, 8.78mm, 8.8mm, 8.82mm, 8.85mm, 8.88mm, or 8.9 mm.
In examples, the width of the ring of the metal 13 to be welded may be 0.5mm to 0.7mm, for example, the width of the ring of the metal 13 to be welded may be 0.5mm, 0.52mm, 0.55mm, 0.58mm, 0.6mm, 0.62mm, 0.65mm, 0.68mm, or 0.7 mm.
In still other examples, the thickness of the metallic filler metal 12 may be 80 μm to 120 μm, for example, the thickness of the metallic filler metal 12 may be 80 μm, 85 μm, 90 μm, 95 μm, 100 μm, 105 μm, 110 μm, 115 μm, or 120 μm.
In examples, the brazing structure 10 may be composed of an alumina ceramic, a titanium ring, and a pure gold brazing filler metal, and further, the ceramic 11 to be welded may have an outer diameter of 10mm, the metal 13 to be welded may have an outer diameter of 10mm, an inner diameter of 8.8mm, and a ring width of 0.6mm, and the brazing filler metal 12 may have an outer diameter of 9.98mm, an inner diameter of 8.883mm, and a ring width of 0.5485 mm.
In examples, the solder may have a thickness of 100 μm before soldering, 80 μm after soldering, 10mm outside diameter, 8.8mm inside diameter and 0.6mm ring width.
Additionally, in examples, brazed structure 10 may be used according to the applicationIs composed of non-biocompatible materials. For example, the ceramic 11 to be welded may also be made of a material selected from silicon oxide (SiO)2) Potassium oxide (K)2O), sodium oxide (Na)2O), calcium oxide (CaO), magnesium oxide (MgO), iron oxide (Fe)2O3) May be composed of at least kinds selected from copper (Cu), iron (Fe), magnesium (Mg), lead (Pb), aluminum (Al), and alloys thereof, etc.
Additionally, in the examples, regardless of the ceramic to metal dimensions, the braze structure 10 may be assembled in a horizontal orientation and the braze 12 may flow in a horizontal orientation.
Hereinafter, the assembly process and the brazing method of the brazed structure 10 according to the present embodiment will be described in detail.
Fig. 4 shows a schematic flow diagram of a ceramic to metal brazing method according to an example of the present disclosure. In the present embodiment, as shown in fig. 4, the brazing method of ceramics and metal may include preparing ceramics 11 to be welded and metal 13 to be welded, and performing surface treatment on the ceramics 11 to be welded so that the surface of the ceramics 11 to be welded is formed into a smooth surface (step S10); a metallizing process is performed on the surface of a ceramic 11 to be welded to form an intermediate metal layer bonded to the ceramic 11 to be welded, the coefficient of thermal expansion of the ceramic 11 to be welded is matched with that of the intermediate metal layer (step S20), and the ceramic 11 to be welded, a brazing filler metal 12 and a metal 13 to be welded are sequentially stacked and brazed, and in the process of brazing, the brazing filler metal 12 is heated according to a predetermined temperature profile in which the brazing filler metal 12 is heated to be molten and is kept in a molten state for a predetermined time, so that the interface between the brazing filler metal 12 and the ceramic 11 to be welded is formed as a welding surface, and annealing and solidification are performed (step S30).
In the disclosure, the brazing method of ceramic and metal includes performing surface treatment on the ceramic 11 to be brazed, and performing metallization treatment on the surface of the ceramic 11 to be brazed to form an intermediate metal layer with a matched thermal expansion coefficient, in this case, the metal solder 12 can well infiltrate the ceramic 11 to be brazed, the surface of which is subjected to metallization treatment, and the intermediate metal layer can enable the thermal expansion coefficients of the brazed surfaces of the ceramic 11 to be brazed and the metal 13 to be brazed to present gradient transition, so that the difference of the thermal expansion coefficients caused by different materials between interfaces can be reduced, the thermal stress of the interface layer is reduced, and the airtightness is improved.
In addition, in examples, the proper brazing temperature and holding time can be selected to improve the generation and distribution of interfacial brittle phases (brittle compounds), increase the strength, reduce the thermal stress and thermal deformation of the base metal (ceramic to be welded 11, metal to be welded 13), eliminate cracks in the weld joint, and improve the air tightness and shear strength of the interface layer between the ceramic to be welded and the metal to be welded.
In addition, in examples, in step S10, the surface of the ceramic 11 to be welded may be ground and polished to a surface roughness of less than 0.05 μm, in which case the surface of the ceramic 11 to be welded is smooth and flat, facilitating subsequent brazing between the ceramic and the metal, in examples, in step S10, the surface of the ceramic 11 to be welded may be ground to form a ground surface.
In examples, the ceramic 11 to be welded may include upper and lower surfaces, whereby a ground surface ground by at least of the upper and lower surfaces of the ceramic 11 to be welded can be obtained in this case, since the object of grinding is at least of the upper and lower surfaces of the ceramic 11 to be welded, the difficulty of the grinding process can be reduced, the surface of the ceramic 11 to be welded can be ground to be flat and smooth, and the wettability of the surface of the ceramic 11 to be welded can be improved.
In addition, in examples, the roughness of at least of the upper and lower surfaces of the ceramic 11 to be welded may be less than 0.05 μm in which case the surface of the ceramic 11 to be welded can be made smooth and even to facilitate subsequent brazing between the ceramic and the metal in examples, the roughness of the surface of the ceramic 11 to be welded may be 0.04 μm, 0.03 μm, 0.02 μm, 0.01 μm, and so on.
In examples, before step S20, surface treatment of the metal 13 to be welded may be further included, for example, surface treatment of the metal 13 to be welded may be performed using progressive sanding of #200, #400, #600, #1200, #2000, and # 4000.
In addition, in examples, the flatness of the metal to be welded 13 after surface treatment may be 8 to 10 μm, for example, the flatness of the metal to be welded 13 after surface treatment may be 8, 8.2, 8.5, 8.8, 9, 9.2, 9.5, 9.8, or 10 μm.
In addition, in examples, before step S20, cleaning of the ground metal to be welded 13 may be included, for example, the ground metal to be welded 13 may be cleaned with ethanol for 15min and then with isopropanol for 15 min.
In the present disclosure, the metallization process in step S20 may be referred to as the metallization process of the metal 13 to be welded in the above-described brazed structure 10.
In addition, in examples, in step S20, magnetron sputtering may be used to sputter Nb onto the to-be-brazed position of the to-be-brazed ceramic 11, and the sputtered Nb may become a flat intermediate metal layer on the to-be-brazed position, hi examples, as shown in fig. 3, the to-be-brazed position may be the edge position of the to-be-brazed ceramic 11 covered by the brazing filler metal 12.
In addition, in examples, in step S20, the thermal expansion coefficient of the ceramic to be welded 11 is matched with that of the intermediate metal layer, that is, the thermal expansion coefficient of the intermediate metal layer may be between that of the ceramic to be welded 11 and that of the metal to be welded 13, so that the thermal expansion coefficient of the interface between the ceramic to be welded 11 and the metal to be welded 13 can be made to have a gradient transition, the difference in thermal expansion coefficient between the interfaces due to different materials is reduced, the thermal stress of the interface is reduced, and the performance is improved.
In addition, in examples, in step S20, cleaning of the ceramic to be welded 11 having the intermediate metal layer may be included, whereby foreign matter on the surface of the ceramic to be welded 11 can be removed to facilitate the subsequent brazing, for example, in examples, the ceramic to be welded 11 having the intermediate metal layer may be cleaned with ethanol for 4min and then with isopropanol for 4 min.
In addition, in , in step S30, the ceramic 11 to be soldered may be placed in the fixture 1 (described in detail with reference to the drawings later), then the brazing filler metal 12 is placed, and then the metal 13 to be soldered is placed, so that the assembly of the soldering structure 10 in the fixture 1 is completed, and then soldering is performed.
In the examples, the brazing filler metal 12 is heated to be molten according to a predetermined temperature profile during the brazing, and the brazing filler metal 12 is heated to be molten for a predetermined time and is maintained in a molten state, so that the interface between the brazing filler metal 12 and the ceramic 11 to be welded is formed as a welding surface, and is annealed and solidified, whereby the flow of the brazing filler metal 12 can be favorably controlled, and the molten brazing filler metal 12 can be prevented from flowing outward on both sides.
In addition, in examples, in step S30, the temperature of the brazed structure 10 may be raised to 1060 ℃ to 1150 ℃ at a heating rate of 1 ℃/min to 50 ℃/min, held for 1min to 30min, then lowered to 200 ℃ to 400 ℃ at a cooling rate of 2 ℃/min to 20 ℃/min, and then furnace-cooled to 150 ℃ or below, where 1060 ℃ to 1150 ℃ may be the brazing temperature.
In addition, in cases, in step S30, the temperature may be raised to 1060 ℃ at a heating rate of 20 ℃/min, the temperature is maintained for 1min, then the temperature is lowered to 400 ℃ at a cooling rate of 10 ℃/min, and then the temperature is cooled to 150 ℃ with the furnace, in another cases, the temperature may be raised to 1065 ℃ at a heating rate of 15 ℃/min, the temperature is maintained for 3min, then the temperature is lowered to 250 ℃ at a cooling rate of 12 ℃/min, and then the temperature is cooled to 140 ℃ with the furnace, in addition, in cases, the temperature may be raised to 1100 ℃ at a heating rate of 30 ℃/min, the temperature is maintained for 5min, then the temperature is lowered to 300 ℃ at a cooling rate of 8 ℃/min, and then the temperature is cooled to 120 ℃ with the.
In examples, the brazing temperature may be 850 ℃, 900 ℃, 950 ℃, 1000 ℃, 1050 ℃, 1150 ℃, 1200 ℃, etc., depending on the brazing filler metal (i.e., brazing filler metal 12) selected.
In addition, in the brazing process, the brazing filler metal 12 can be annealed and solidified by rapidly heating until the brazing filler metal is melted, keeping the temperature for a short time and then immediately cooling, so that the outward flowing of the molten brazing filler metal 12 can be controlled by regulating and controlling the temperature.
In addition, in examples, the amount of the metal 13 to be welded is small, so the pressure applied to the molten metal filler metal 12 comes from the briquetting 30 (see fig. 5), i.e. the pressure applied to the molten metal filler metal 12 is equal to the gravity of the briquetting 30, in this case, the mass of the part of the molten metal filler metal 12 which is pressed to both sides is equal to the mass of the briquetting 30, i.e. the mass of the briquetting 30 is equal to the density of the metal filler metal 12 multiplied by the volume of the part which is discharged, therefore, the mass of the briquetting 30 can be obtained by a plurality of experiments, simulation calculations, etc., so the pressure applied to the molten metal filler metal 12 by the briquetting 30 does not flow.
The brazing jig 1 used in step S30 according to the present embodiment will be described in detail below with reference to the drawings. Fig. 5 shows a cross-sectional view of a jig 1 for brazing according to an example of the present disclosure. Fig. 6 shows a cross-sectional view of a jig 1 equipped with a brazed structure 10 according to an example of the present disclosure. In fig. 5, a cover body that engages with the stage 20 is omitted for convenience of illustration of the structure of the stage 20.
In the present embodiment, as shown in fig. 5 and 6, a jig for brazing (may be simply referred to as "jig") 1 may have a stage 20 and a compact 30 that fits to the stage 20. In step S30, the brazing structure 10 may be realized by sequentially placing the brazing structure 10 (the ceramics 11 to be welded, the metal filler 12, and the metal 13 to be welded) on the stage 20, and disposing the compact 30 engaged with the stage 20 on the brazing structure 10.
In addition, in examples, the stage 20 may be semi-cylindrical, in which case brazing is better performed, for example, the semi-cylindrical stage 20 may be placed in a brazing tube furnace (not shown) having a cylindrical furnace tube for brazing, in which case the stage 20 may have a shape that matches the shape of the furnace tube of the brazing tube furnace, in which case fixture 1 may be advantageously secured in the brazing tube furnace, and brazing may be better performed, for example, the furnace tube of the brazing tube furnace may have a prismatic shape, and the stage 20 may also have a prismatic shape.
In addition, in the present embodiment, a vacuum pump (not shown) may be connected to the brazing tube furnace, and in examples, the degree of vacuum in the brazing tube furnace (not shown) may be 10-4pa. in other examples, the vacuum level in a brazing tube furnace (not shown) may be 10-3pa. additionally, in examples, the vacuum level in a brazing tube furnace (not shown) may be 10-2pa。
In the examples, the degree of vacuum in the brazing tube furnace (not shown) may be 8 × 10 depending on the brazing filler metal (brazing filler metal 12) selected-3pa、5×10-3pa、3×10-3pa、7×10-2pa、5×10-2pa、2×10-2pa or 1 pa.
In addition, in the present embodiment, the stage 20 may have a groove 21. Wherein the groove 21 may be used for placing the brazed structure 10. As shown in fig. 6, the brazed structure 10 may be placed in the groove 21.
In addition, in examples, the stage 20 may have a through hole 22 (see fig. 6). additionally, the through hole 22 may pass through the bottom 21a of the groove 21. in examples, the stage 20 may have at least grooves (e.g., the groove 21 in fig. 5, fig. 5 shows an example of four grooves), and a through hole (the through hole 22) that passes through the stage 20 from the bottom 21a of the groove (the groove 21).
In examples, groove 21 may be used to hold brazing structure 10 (including ceramic 11 to be welded, metal braze 12, and metal 13 to be welded) and may be capable of cooperating with press block 30. additionally, in examples, press block 30 may have vent holes 31.
In addition, when the plurality of grooves 21 are provided in the stage 20, the plurality of brazed structures 10 can be simultaneously brazed in a batch manner, and the work efficiency can be improved. For example, in addition to the illustration of fig. 5, there may be 2, 8, 12, 16 or 20 grooves 21 in the stage 20.
In addition, in the present embodiment, the compact 30 can fix the brazed structure 10 during the brazing process, and prevent the brazed structure 10 from being displaced during the brazing process. The through holes 22 and the vent holes 31 of the jig 1 can form gas flow, so that the temperature distribution of the jig 1 can be uniform in the brazing process, the brazing structure 10 can be heated uniformly, and the vent holes 31 can discharge impurities such as metal vapor generated in the brazing process, so that the brazing structure 10 is prevented from being polluted.
In addition, in examples, the bottom 21a of the groove 21 may be flat (see fig. 5.) thus, the brazed structure 10 can be placed smoothly at the bottom 21a of the groove 21.
In , the groove 21 may be cylindrical, in which case it is particularly applicable to brazed structures 10 that are also cylindrical, but the present embodiment is not limited thereto, and in , the groove 21 may be prismatic, for example, in , the groove 21 may be rectangular, and in , the groove 21 may be square.
Additionally, in examples, the inner diameter of the groove 21 can be equal to the expansion dimension at the brazing temperature of the brazed structure 10 plus the expansion dimension at the brazing temperature of jig 1 plus the pre-set dimension in examples, the pre-set dimension can be 0.02mm to 0.03mm, for example, the pre-set dimension can be 0.02mm, 0.022mm, 0.025mm, 0.028mm, or 0.03 mm.
Additionally, in the examples, the through-holes 22 can have a flow of hot gas, which can provide a uniform temperature distribution within the stage 20 and thus uniform heating of the brazed structure 10 during the brazing process, additionally, the presence of the through-holes 22 can provide for easier cleaning of the grooves 21, additionally, the through-holes 22 can facilitate picking up the parts because the through-holes 22 can penetrate the bottom 21a of the grooves 21 and the grooves 21 can be used to hold the brazed structure 10.
In the examples, the jig 1 may further include a lid (not shown) covering the stage 20, and in this case, the atmosphere during brazing can be protected, and the degree of vacuum can be maintained well.
Additionally, in examples, the carrier 20 can have a groove 23 surrounding the recess 21. an edge of a cover (not shown) can engage the groove 23. thus, the cover (not shown) can cover the carrier 20. in examples, the edge of the cover can engage the groove 23.
In addition, in examples, the compact 30 may be a combination of two cylinders of different inside diameters, as shown in FIG. 5. in such a compact 30, the cylinder of smaller inside diameter is smaller in diameter and thus may fit into the groove 21, while the cylinder of larger inside diameter is larger in diameter and thus may cover the groove 21. in this case, the compression of the brazed structure 10 can be achieved by the compact 30.
In examples, the diameter of the cylinder with the smaller inner diameter may be smaller than the inner diameter of groove 21 in compact 30. additionally, in examples, the diameter of the cylinder with the smaller inner diameter may be larger than the inner diameter of metal 13 to be welded in compact 30. in another examples, the diameter of the cylinder with the larger inner diameter may be larger than the inner diameter of groove 21 in compact 30.
In other examples, the compact 30 may be a prism, in other examples, the compact 30 may be a circular truncated cone, in other examples, the compact 30 is shaped in a solid form, in other examples, the compact 30 may be used to apply pressure to the ceramic 11 to be welded and the metal 13 to be welded.
In examples, vent holes 31 may be provided in the pressure block 30. in examples, the pressure block 30 may have a plurality of vent holes 31, for example, the pressure block 30 may have 2 or 3 vent holes 31. in this case, since gas flows can be formed in the vent holes 31, the temperature distribution in the stage 20 can be made uniform during the brazing process, and the brazed structure 10 can be heated uniformly. in addition, the vent holes 31 can help to discharge impurities such as metal vapor generated during the brazing process, thereby preventing the brazed structure 10 from being contaminated.
In addition, in the present disclosure, the through direction of the plurality of vent holes 31 may be different in examples, as shown in FIG. 6, the through direction of the vent holes 31 may be the length direction of the compact 30. in this case, the uniformity of heat exposure of the brazed structure 10 can be further improved , and contamination of the brazed structure 10 can be better avoided.
In addition, in examples, compacts 30 may be used to apply pressure to ceramic 11 and metal 13 to be welded, respectively, hi this case, consistency of the braze joint width and its edges can be better controlled and brazed structure 10 secured during brazing.
In addition, in examples, brazed structure 10 may be located between bottom 21a of groove 21 and compact 30, thereby enabling brazed structure 10 to be better secured within groove 21.
In addition, in this embodiment, the material of the stage 20 may be at least selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide, in examples the material of the stage 20 may be graphite, in another examples the material of the stage 20 may be synthetic stone.
In addition, in the present embodiment, the material of the compact 30 may be at least species selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide, in instances, the material of the compact 30 may be graphite, in another instances, the material of the compact 30 may be synthetic stone.
In addition, in examples, the jig 1 and the groove 21 can be placed in a temperature zone with uniform temperature in the brazing tube furnace, thereby better brazing multiple brazed structures 10 simultaneously.
In addition, in the present embodiment, as shown in FIG. 6, the brazing structure 10 may be placed in the groove 21 of the stage 20 and the brazing structure 10 is pressed by the pressing block 30 at step S30, and then the assembled stage 20, pressing block 30 and brazing structure 10 are fed into, for example, a brazing tube furnace to be brazed, and in some examples , the assembled stage 20, pressing block 30 and brazing structure 10 are fed into a temperature zone of the brazing tube furnace where the temperature is uniform, whereby a plurality of brazing structures 10 can be brazed well at the same time.
Further, in examples, the components of the brazing structure 10 in FIG. 6 may be stacked from bottom to top in the groove 21 in the order of the ceramic 11 to be welded, the brazing metal 12, and the metal 13 to be welded (see FIG. 2). for example, the components of the brazing structure 10 may be stacked from bottom to top in the groove 21 in the order of disk-shaped Al2O3Ceramic, pure Au solder ring, pure Ti metal ring, and disc-shaped Al2O3The centers of the ceramic, pure Au solder ring and the pure Ti metal ring can be at the same points, and the disc-shaped Al2O3The outer diameter of the ceramic and the pure Ti metal ring are approximately the same, and the outer diameter of the pure Au solder ring is larger than that of the disc-shaped Al2O3The outer diameter of the ceramic is at most 0.05 mm.
In examples, there may be a gap between the pressing block 30 and the side wall of the groove 21 of the stage 20. in examples, the gap H between the pressing block 30 and the side wall of the groove 21 of the stage 20 may be 0.05mm to 0.06mm (see fig. 6), in which case the expansion dimension of the jig 1 and the soldering structure 10 can be reserved and the device can be smoothly taken out when the soldering is completed.
In cases, the fixture 1 may also have a collar 24. in cases, the collar 24 may be placed in the groove 21 and may surround the brazed structure 10. in this case, the drool of the brazing metal 12 after melting is reduced.
In examples, the inner diameter of the groove 21 may be equal to the expansion at the brazing temperature of the brazed structure 10 plus the expansion at the brazing temperature of the fixture 1 plus the thickness and the pre-set dimensions of the collar 24.
In the examples, the brazing filler metal 12 in the brazed structure 10 is not allowed to flow during the brazing process, and the amount of the brazing filler metal 12 used can be calculated, and the holding time and the surface state of the base material can be controlled.
In some examples, an interface layer may be formed between the interface of the ceramic to be welded 11 and the metal to be welded 13 after brazing in some examples, the interface layer may include a braze 12 and an IMC layer in some other examples, the IMC layer may be a continuous IMC layer in some other examples, the IMC layer may be a discontinuous IMC layer.
In examples, an IMC layer may be located between the metal 13 to be welded and the metal braze 12. additionally, in examples, the interface layer may include multiple IMC layers.
In some examples, the multilayer IMC layer may include a brittle phase layer, in some examples, the brittle phase layer may be an alloy layer having a high content of brittle phase (brittle compound). in some examples, the brittle phase layer may have a thickness of no more than 2 μm. for example, the brittle phase layer may have a thickness of 0.5 μm, 0.8 μm, 1 μm, 1.1 μm, 1.2 μm, 1.3 μm, 1.4 μm, 1.5 μm, 1.6 μm, 1.7 μm, 1.8 μm, or 2 μm.
According to the present disclosure, brazed structures 10 using a brittle brazing filler metal can be provided.
While the present disclosure has been described in detail above with reference to the drawings and the embodiments, it should be understood that the above description does not limit the present disclosure in any way. Those skilled in the art can make modifications and variations to the present disclosure as needed without departing from the true spirit and scope of the disclosure, which fall within the scope of the disclosure.
Claims (10)
1, A brazing structure of ceramic and metal, characterized in that,
the method comprises the following steps:
the ceramic to be welded is disc-shaped, and the ceramic to be welded is provided with a brazing surface subjected to surface grinding and metallization treatment;
the brazing filler metal is in an annular sheet shape, the outer diameter of the brazing filler metal is smaller than that of the ceramic to be brazed, and the brazing filler metal is arranged on the brazing surface; and
a metal to be welded which is annular and is arranged on the brazing filler metal, the metal to be welded has an outer diameter equal to that of the ceramic to be welded, the annular metal to be welded has an annular protrusion extending in an inner diameter direction, the inner diameter of the annular protrusion is smaller than the inner diameter of the brazing filler metal, the metal to be welded is subjected to surface treatment,
wherein the brazing filler metal is arranged between the ceramics to be welded and the metals to be welded, the brazing structure is formed by horizontally stacking, and pressure is respectively applied to the ceramics to be welded and the metals to be welded,
in the brazing process, the brazing filler metal is heated according to a predetermined temperature curve, in the temperature curve, the brazing filler metal is heated to be molten, the molten state is kept for a predetermined time, the interface between the brazing filler metal and the ceramic to be welded is formed into a welding surface, and annealing and solidification are carried out.
2. The brazing structure according to claim 1, wherein:
the metallization is limited to the edge position of the soldering surface.
3. The brazing structure according to claim 2, wherein:
the edge position is formed with an annular intermediate metal layer having an annular width equal to the metal to be welded.
4. The brazing structure according to claim 2 or 3, wherein:
the brazing filler metal is arranged at the edge position.
5. The brazing structure according to claim 1, wherein:
the metal solder has the advantages of biological compatibility,
the brazing filler metal is at least selected from Au, Ag, Ti, Nb and alloys thereof.
6. The brazing structure according to claim 1, wherein:
the ceramic to be welded is composed of at least kinds selected from alumina, zirconia, silica, titania, aluminosilicate, or calcium-aluminum series.
7. The brazing structure according to claim 1, wherein:
the metals to be welded are selected from at least of Ti, Nb, Ni, Zr, Ta and their alloys.
8. The brazing structure according to claim 1, wherein:
when brazing is carried out, the temperature is raised to 1060 ℃ to 1150 ℃ at the heating rate of 1 ℃ 11i 1-50 ℃ 11i1, the temperature is kept from 11i1 to 301i1, then the temperature is lowered to 200 ℃ to 400 ℃ at the cooling rate of 2 ℃ 11i 1-20 ℃ 11i1, and then the temperature is cooled to below 150 ℃ along with a furnace.
9. The brazing structure according to claim 1, wherein:
the roughness of the surface of the ceramic to be welded is less than 0.05 mu 1.
10. The brazing structure according to claim 1, wherein:
and carrying out surface treatment on the metal to be welded by using sand paper for gradual grinding so that the flatness of the metal to be welded is 8 mu 1 to 10 mu 1.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2018116507476 | 2018-12-31 | ||
| CN201811650747.6A CN109734469A (en) | 2018-12-31 | 2018-12-31 | The method for welding of ceramics and metal |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110734298A true CN110734298A (en) | 2020-01-31 |
Family
ID=66362937
Family Applications (5)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811650747.6A Pending CN109734469A (en) | 2018-12-31 | 2018-12-31 | The method for welding of ceramics and metal |
| CN201922231700.2U Active CN211522037U (en) | 2018-12-31 | 2019-12-11 | Brazing structure of ceramic and metal |
| CN201911268811.9A Pending CN110734298A (en) | 2018-12-31 | 2019-12-11 | Brazing structure of ceramic and metal |
| CN201911266054.1A Pending CN110776329A (en) | 2018-12-31 | 2019-12-11 | Brazing method of ceramic and metal |
| CN201911268867.4A Pending CN110776330A (en) | 2018-12-31 | 2019-12-11 | Brazing method of ceramic and metal |
Family Applications Before (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811650747.6A Pending CN109734469A (en) | 2018-12-31 | 2018-12-31 | The method for welding of ceramics and metal |
| CN201922231700.2U Active CN211522037U (en) | 2018-12-31 | 2019-12-11 | Brazing structure of ceramic and metal |
Family Applications After (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201911266054.1A Pending CN110776329A (en) | 2018-12-31 | 2019-12-11 | Brazing method of ceramic and metal |
| CN201911268867.4A Pending CN110776330A (en) | 2018-12-31 | 2019-12-11 | Brazing method of ceramic and metal |
Country Status (1)
| Country | Link |
|---|---|
| CN (5) | CN109734469A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112723899A (en) * | 2020-12-31 | 2021-04-30 | 淮安市浩远机械制造有限公司 | Aluminum oxide ceramic brazing alloy steel composite wear-resisting plate and preparation process thereof |
| CN116283337A (en) * | 2023-03-30 | 2023-06-23 | 中国科学院上海硅酸盐研究所 | Boron carbide ceramic-metal gradient connection structure and preparation method thereof |
Families Citing this family (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110369907B (en) * | 2019-08-01 | 2021-05-11 | 衢州学院 | Brazing filler metal for connecting high Nb-TiAl alloy and alumina ceramic and connecting method thereof |
| CN115056136B (en) * | 2019-12-17 | 2024-02-06 | 深圳硅基仿生科技股份有限公司 | Method for grinding surface of ceramic |
| CN113492255A (en) * | 2020-04-08 | 2021-10-12 | 昆山微电子技术研究院 | Sample welding method |
| CN112802732B (en) * | 2021-01-07 | 2023-04-07 | 上海奕瑞光电子科技股份有限公司 | Ceramic migration tube and manufacturing method thereof |
| CN112975032B (en) * | 2021-02-23 | 2022-09-27 | 浙江浙能兰溪发电有限责任公司 | Brazing method of silicon carbide ceramic |
| CN112851389B (en) * | 2021-04-14 | 2022-03-15 | 哈尔滨工业大学 | Method for connecting SiC ceramic material by using calcium oxide/aluminum oxide/silicon dioxide/lithium oxide glass solder |
| CN113732424B (en) * | 2021-09-14 | 2022-08-02 | 哈尔滨工业大学 | Method for improving connection quality of silicon carbide-niobium brazing by aid of low-expansion 4J42 alloy interlayer auxiliary brazing filler metal |
| CN114105669A (en) * | 2021-11-11 | 2022-03-01 | 南京理工大学 | Composite manufacturing and stress releasing method of ceramic-coated cylinder sleeve of engine |
| CN114014683B (en) * | 2021-11-16 | 2023-12-22 | 西安赛尔电子材料科技有限公司 | Brazing method for improving sealing strength of metal lead and ceramic insulator |
| CN114669816B (en) * | 2022-04-22 | 2023-08-22 | 湖南省新化县鑫星电子陶瓷有限责任公司 | Alumina ceramic-metal brazing method |
| CN114874024A (en) * | 2022-06-22 | 2022-08-09 | 衡阳凯新特种材料科技有限公司 | Composite material, manufacturing method of composite material and piston |
| CN115302033B (en) * | 2022-08-22 | 2023-11-21 | 哈尔滨工业大学（威海） | Low-temperature indirect brazing method for zirconia ceramic and titanium alloy |
| CN115625394A (en) * | 2022-12-21 | 2023-01-20 | 中国机械总院集团北京机电研究所有限公司 | Active brazing method for large-size graphite/copper dissimilar material joint |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102294528A (en) * | 2011-08-12 | 2011-12-28 | 江苏华昌工具制造有限公司 | Process for carrying out entire high-frequency brazing by welding jig |
| US20120270484A1 (en) * | 2009-12-22 | 2012-10-25 | Dai Nippon Toryo Co., Ltd | Rotary grinding tool and its production method |
| CN102825354A (en) * | 2012-09-20 | 2012-12-19 | 北京科技大学 | Composite-diffusion brazing method of Cf/SiC ceramic based composite materials and titanium alloy |
| JP2013053047A (en) * | 2011-09-05 | 2013-03-21 | Mitsui Mining & Smelting Co Ltd | Ceramic joined body and method for producing the same |
| CN104722955A (en) * | 2015-03-20 | 2015-06-24 | 江苏科技大学 | High-temperature brazing filler metal for brazing Si3N4 ceramic and stainless steel, preparing method and brazing process |
| US20150243810A1 (en) * | 2014-02-26 | 2015-08-27 | Heraeus Precious Metals North America Conshohocken Llc | Molybdenum-containing glass frit for electroconductive paste composition |
| CN105036783A (en) * | 2015-07-09 | 2015-11-11 | 清华大学 | Method for brazing ceramic and metal or ceramic and ceramic |
| CN105149717A (en) * | 2015-10-19 | 2015-12-16 | 哈尔滨工业大学 | Silicon-based ceramic surface metallization method |
| CN107457499A (en) * | 2017-08-09 | 2017-12-12 | 合肥工业大学 | A kind of high-temp solder preparation method and soldering processes for silicon carbide ceramics and its composite |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE2822627A1 (en) * | 1978-05-24 | 1979-11-29 | Volkswagenwerk Ag | CERANOX COMPOUND AND METHOD OF MANUFACTURING IT |
| JP2545087B2 (en) * | 1987-06-26 | 1996-10-16 | 株式会社フジクラ | How to join ceramics |
| JPH01179769A (en) * | 1988-01-11 | 1989-07-17 | Showa Denko Kk | Method for bonding ceramic material and metallic material |
| US4883218A (en) * | 1989-03-17 | 1989-11-28 | Gte Laboratories Incorporated | Method of brazing a ceramic article to a metal article |
| JP3575068B2 (en) * | 1994-08-02 | 2004-10-06 | 住友電気工業株式会社 | Ceramic metallized substrate having smooth plating layer and method of manufacturing the same |
| CN100532330C (en) * | 2006-08-02 | 2009-08-26 | 哈尔滨工业大学 | Method of connecting ceramic by low temperature active vacuum diffusion |
| CN101182230A (en) * | 2007-11-28 | 2008-05-21 | 哈尔滨工业大学 | Method for vacuum diffusion connecting ceramic |
| CN101786898B (en) * | 2010-01-15 | 2011-12-28 | 北京科技大学 | Method for connecting Cf/SiC composite material and Ni-based high-temperature alloy |
| CN105436643A (en) * | 2016-01-07 | 2016-03-30 | 上海电机学院 | Direct aluminum or aluminum alloy brazing method for aluminum oxide ceramics |
| CN106563861A (en) * | 2016-10-19 | 2017-04-19 | 哈尔滨工业大学（威海） | Ultrasonic soldering method for fast forming ceramic-metal interconnection |
| CN106493443B (en) * | 2016-10-25 | 2018-10-09 | 哈尔滨工业大学 | A kind of method of composite interlayer ceramic soldering or ceramic matric composite and metal |
| CN207186714U (en) * | 2017-03-06 | 2018-04-06 | 河北鼎瓷电子科技有限公司 | Multilayer ceramic substrate |
| CN107096994A (en) * | 2017-04-25 | 2017-08-29 | 南京云启金锐新材料有限公司 | The diffusion welding (DW) fitting and its production method of a kind of high-purity zirconia composite ceramics and red copper |
| CN106944698B (en) * | 2017-05-12 | 2019-12-10 | 哈尔滨工业大学 | SiC ceramic or SiC ceramic reinforced aluminum matrix composite material ultrasonic low-temperature direct brazing method based on thermal oxidation surface modification |
| CN107649758B (en) * | 2017-09-29 | 2019-08-02 | 哈尔滨工业大学 | A method of porous silicon nitride ceramic and invar alloy are brazed using composite soldering |
| CN108672965B (en) * | 2018-05-07 | 2020-08-28 | 中国工程物理研究院电子工程研究所 | Method for relieving residual stress of ceramic and metal soldered joint |
| CN108546095A (en) * | 2018-05-23 | 2018-09-18 | 广东工业大学 | A kind of method that oxide ceramics is welded to connect with metal |
-
2018
- 2018-12-31 CN CN201811650747.6A patent/CN109734469A/en active Pending
-
2019
- 2019-12-11 CN CN201922231700.2U patent/CN211522037U/en active Active
- 2019-12-11 CN CN201911268811.9A patent/CN110734298A/en active Pending
- 2019-12-11 CN CN201911266054.1A patent/CN110776329A/en active Pending
- 2019-12-11 CN CN201911268867.4A patent/CN110776330A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120270484A1 (en) * | 2009-12-22 | 2012-10-25 | Dai Nippon Toryo Co., Ltd | Rotary grinding tool and its production method |
| CN102294528A (en) * | 2011-08-12 | 2011-12-28 | 江苏华昌工具制造有限公司 | Process for carrying out entire high-frequency brazing by welding jig |
| JP2013053047A (en) * | 2011-09-05 | 2013-03-21 | Mitsui Mining & Smelting Co Ltd | Ceramic joined body and method for producing the same |
| CN102825354A (en) * | 2012-09-20 | 2012-12-19 | 北京科技大学 | Composite-diffusion brazing method of Cf/SiC ceramic based composite materials and titanium alloy |
| US20150243810A1 (en) * | 2014-02-26 | 2015-08-27 | Heraeus Precious Metals North America Conshohocken Llc | Molybdenum-containing glass frit for electroconductive paste composition |
| CN104722955A (en) * | 2015-03-20 | 2015-06-24 | 江苏科技大学 | High-temperature brazing filler metal for brazing Si3N4 ceramic and stainless steel, preparing method and brazing process |
| CN105036783A (en) * | 2015-07-09 | 2015-11-11 | 清华大学 | Method for brazing ceramic and metal or ceramic and ceramic |
| CN105149717A (en) * | 2015-10-19 | 2015-12-16 | 哈尔滨工业大学 | Silicon-based ceramic surface metallization method |
| CN107457499A (en) * | 2017-08-09 | 2017-12-12 | 合肥工业大学 | A kind of high-temp solder preparation method and soldering processes for silicon carbide ceramics and its composite |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112723899A (en) * | 2020-12-31 | 2021-04-30 | 淮安市浩远机械制造有限公司 | Aluminum oxide ceramic brazing alloy steel composite wear-resisting plate and preparation process thereof |
| CN116283337A (en) * | 2023-03-30 | 2023-06-23 | 中国科学院上海硅酸盐研究所 | Boron carbide ceramic-metal gradient connection structure and preparation method thereof |
| CN116283337B (en) * | 2023-03-30 | 2024-02-06 | 中国科学院上海硅酸盐研究所 | Boron carbide ceramic-metal gradient connection structure and preparation method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109734469A (en) | 2019-05-10 |
| CN110776329A (en) | 2020-02-11 |
| CN211522037U (en) | 2020-09-18 |
| CN110776330A (en) | 2020-02-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110734298A (en) | Brazing structure of ceramic and metal | |
| US10213858B2 (en) | Multi-layer plate device | |
| US11091397B2 (en) | Low temperature method for hermetically joining non-diffusing ceramic materials in multi-layer plate devices | |
| JP4467453B2 (en) | Ceramic member and manufacturing method thereof | |
| US10153183B2 (en) | High speed low temperature method for manufacturing and repairing semiconductor processing equipment and equipment produced using same | |
| JP6921306B2 (en) | Holding device and manufacturing method of holding device | |
| US6706428B2 (en) | Ceramic sintered bodies and a method of producing the same | |
| US5525432A (en) | Internal soldering in metal/ceramic composites | |
| US20220230905A1 (en) | Wafer placement table and method of manufacturing the same | |
| CN111230252B (en) | Jig for vacuum brazing | |
| JP4999983B2 (en) | Heat spreader and manufacturing method thereof | |
| US20230347436A1 (en) | Multi-layer ceramic plate device | |
| CN209532350U (en) | The jig of soldering with venthole | |
| JP3941542B2 (en) | Hermetic bonding structure of ceramics and metal and apparatus parts having the structure | |
| US11869796B2 (en) | Electrode-embedded member and method for manufacturing same, electrostatic chuck, and ceramic heater | |
| JP2023107337A (en) | Bonded body, method for producing the same, and electrode-embedded member | |
| CN116895588A (en) | joint structure | |
| JPH0243704B2 (en) | SERAMITSUKUSUTOKINZOKUTONOSETSUGOHOHO |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| CB02 | Change of applicant information |
Address after: 518000 area a, 4th floor, building 3, Tingwei Industrial Park, No.6 Liufang Road, Xin'an street, Shenzhen City, Guangdong Province Applicant after: Shenzhen Silicon Bionics Technology Co.,Ltd. Address before: 518000 area a, 4th floor, building 3, Tingwei Industrial Park, No.6 Liufang Road, Xin'an street, Shenzhen City, Guangdong Province Applicant before: SHENZHEN SIBIONICS TECHNOLOGY Co.,Ltd. |
|
| CB02 | Change of applicant information |