CN111230252B - Jig for vacuum brazing - Google Patents

Abstract

The utility model provides a tool that vacuum brazing used which characterized in that includes: the objective table is provided with a groove for placing a piece to be welded and a through hole communicated with the bottom of the groove; and the pressing block is matched with the groove of the objective table and used for covering the piece to be welded, wherein a vent hole is formed in the pressing block. According to the present disclosure, a jig for brazing that reduces contamination of a to-be-welded piece and improves uniformity of heating of the to-be-welded piece can be provided.

Description

Jig for vacuum brazing

The application is filed as31/12/2018Application No. is201811650730.0The invention is named asSoldering Used jigDivisional application of the patent application.

Technical Field

The present disclosure particularly relates to a jig for vacuum brazing.

Background

Ceramics are widely used in various fields as high-temperature structural materials because of their excellent biocompatibility, heat resistance, corrosion resistance, electrical insulation properties, and the like. However, in practical applications, in order to solve the problem of poor workability due to excessive hardness of the ceramic itself, it is necessary to form a metal-ceramic composite structure by joining the ceramic and the metal by a certain method.

Currently, the most common method of joining ceramic and metallic materials is brazing. The brazing has the advantages of small heat affected zone, reliable formed joint and the like, and is very suitable for connecting different materials. However, the ceramic itself has poor wettability, which makes it difficult to form a good connection between the ceramic and the metal material. Moreover, the thermal expansion coefficient difference between the ceramic and the metal is large, which causes the thermal stress in the joint to be too large, and affects the strength, the air tightness and other performances of the joint. However, in the conventional brazing of ceramic and metal materials, the problems that the workpieces to be brazed are heated unevenly and are easily polluted by impurities and the like often exist.

Disclosure of Invention

The present disclosure has been made in view of the above-mentioned state of the art, and an object of the present disclosure is to provide a jig for vacuum brazing, which can reduce contamination of a workpiece to be welded and improve uniformity of heat reception of the workpiece to be welded.

For this reason, this disclosure provides a tool that vacuum brazing used, it includes: the objective table is provided with a groove for placing a piece to be welded and a through hole communicated with the bottom of the groove; and the pressing block is a combination of a first cylinder and a second cylinder with different diameters and is matched with the groove, the pressing block covers the to-be-welded part to enable the to-be-welded part to be fixed on the groove, and is provided with a vent hole.

In the present disclosure, the stage has a through hole, and the press block has a vent hole, and the member to be welded is covered by the press block and fixed to the groove. Under the condition, gas flow can be formed in the through holes and the ventilation holes during vacuum brazing, so that the temperature of the jig can be uniformly distributed in the brazing process, the workpieces to be welded are heated uniformly, and impurities such as metal steam generated in the brazing process can be discharged, so that the workpieces to be welded are prevented from being polluted.

In addition, in the tool that this disclosure relates to, optionally, when the briquetting covers treat the weldment, first cylinder covers treat the weldment. Thereby, the to-be-welded piece can be fixed in the groove.

In addition, in the jig according to the present disclosure, optionally, a gap exists between the first cylinder and a sidewall of the groove. This enables further removal of impurities generated during the brazing process.

In the jig according to the present disclosure, the press block may have a plurality of vent holes, at least one of the plurality of vent holes may include a vent hole penetrating the press block in a longitudinal direction of the press block, and the through hole and the vent hole may form a gas flow. In this case, the uniformity with which the to-be-welded piece is heated can be improved, and the to-be-welded piece can be prevented from being contaminated.

In addition, in the jig according to the present disclosure, optionally, the groove has a cylindrical shape, and a bottom of the groove has a flat shape. Therefore, the matching of the groove and the pressing block can be facilitated, and the to-be-welded part can be stably placed in the groove of the objective table.

In addition, in the jig according to the present disclosure, optionally, the stage has a plurality of the grooves, and each of the grooves has a corresponding press block fitting. Therefore, the workpieces to be welded can be brazed at the same time.

In addition, in the jig according to the present disclosure, optionally, the stage has a groove surrounding the plurality of grooves.

In addition, in the jig according to the present disclosure, optionally, a cover body covering the stage is further included, and an edge of the cover body is engaged with the groove. In this case, the fitting of the lid body and the stage at the time of brazing can contribute to protecting the atmosphere in the jig.

In addition, in the jig according to the present disclosure, optionally, the to-be-welded member is placed at the bottom of the groove, and a gap exists between the to-be-welded member and a side wall of the groove. This can contribute to the progress of brazing and to the removal of the member after brazing.

In the jig according to the present disclosure, the stage is made of at least one selected from the group consisting of graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide, and the compact is integrally molded. In this case, the stage and the compact can be made suitable for high-temperature brazing.

According to the present disclosure, a jig for brazing that reduces contamination of a to-be-welded piece and improves uniformity of heating of the to-be-welded piece can be provided.

Drawings

Fig. 1 is a schematic flow chart showing a brazing method of ceramics and metal according to an embodiment of the present invention. Fig. 2 is a perspective view of a jig according to an embodiment of the present invention.

Fig. 3 shows a cross-sectional view of the jig shown in fig. 2 along line a-a'.

Fig. 4 shows a cross-sectional view of a jig to which a weldment is fitted according to an embodiment of the present invention.

Fig. 5 shows an assembly structure view of a member to be welded according to an embodiment of the present invention.

Detailed Description

Hereinafter, preferred embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic and the ratio of the dimensions of the components and the shapes of the components may be different from the actual ones.

Fig. 1 is a schematic flow chart showing a brazing method of ceramics and metal according to an embodiment of the present invention.

The brazing method for ceramic and metal according to the present embodiment includes: preparing ceramics 31 to be welded and a metal 33 to be welded, and surface-treating the ceramics 31 to be welded so as to form the surface of the ceramics 31 to be welded into a smooth surface (step S10); performing metallization processing on the surface of the ceramic to be welded 31 to form an intermediate metal layer bonded to the ceramic to be welded 31, the coefficient of thermal expansion of the ceramic to be welded 31 matching that of the intermediate metal layer (step S20); the ceramics 31 to be welded, the brazing metal 32, and the metals 33 to be welded are stacked in this order and brazed (step S30). In the present embodiment, the parts to be welded 30 may include ceramics to be welded 31, a metal filler 32, and a metal to be welded 33. The shape of the to-be-welded member 30 is not particularly limited, and in some examples, the to-be-welded member 30 may be cylindrical.

In the method for brazing ceramic and metal according to the embodiment, the method for brazing ceramic and metal includes the steps of performing surface treatment on the ceramic 31 to be brazed, and performing metallization treatment on the surface of the ceramic 31 to be brazed to form an intermediate metal layer with a matched thermal expansion coefficient.

In addition, in the brazing method according to the embodiment, the generation and distribution of brittle phases between interfaces can be improved by selecting appropriate brazing temperature and heat preservation time during brazing, the strength is increased, the thermal stress and the thermal deformation of the base material are reduced, cracks in a weld joint are eliminated, and the air tightness and strength of the brazing interface of ceramics and metal are improved.

In the present embodiment, in step S10, the surface of the ceramic 31 to be soldered may be ground and polished to a surface roughness of less than 0.05 μm. In this case, the surface of the ceramic 31 to be welded is smooth and flat, facilitating the subsequent brazing between the ceramic and the metal. In some examples, the roughness of the surface of the ceramic to be welded 31 may be 0.04 μm, 0.03 μm, 0.02 μm, 0.01 μm, or the like.

In addition, in the present embodiment, in step S10, the to-be-welded ceramics 31 may be composed of at least one selected from alumina (Al2O3), zirconia (ZrO2), silica (SiO2), a carbon material (C), silicon nitride (Si3N4), silicon carbide (SiC), titanium oxide (TiO2), aluminosilicate (Na 2O. Al2O 3. SiO2), or calcium aluminum (CaO. Al2O 3). In this case, the ceramic to be welded 31 having biocompatibility can be obtained.

In addition, in the present embodiment, the ceramic to be welded 31 may be an alumina (Al2O3) ceramic. In some examples, the ceramic to be welded 31 is preferably composed of alumina (Al2O3) with a mass fraction of 96% or more. More preferably, the ceramic to be welded 31 is composed of alumina (Al2O3) at a mass fraction of 99% or more, and most preferably, the ceramic to be welded 31 is composed of alumina (Al2O3) at a mass fraction of 99.99% or more. In general, in the to-be-welded ceramic 31, an increase in the mass fraction of alumina (Al2O3) can increase its main crystal phase, and the physical properties of the to-be-welded ceramic 31 can be improved, such as the pre-compression strength, the bending strength, and the elastic modulus, and thus it is considered that alumina (Al2O3) having a higher mass fraction exhibits better biocompatibility and long-term reliability. In other examples, the ceramic to be welded 31 may also be a zirconia (ZrO2) ceramic.

In addition, in some examples, the ceramic to be welded 31 may also be composed of at least one selected from the group consisting of silicon oxide (SiO2), potassium oxide (K2O), sodium oxide (Na2O), calcium oxide (CaO), magnesium oxide (MgO), and iron oxide (Fe2O3) depending on the use occasion.

In addition, in the present embodiment, in step S10, the metal to be welded 33 may be at least one selected from Ti (titanium), Nb (niobium), Ni (nickel), Zr (zirconium), Ta (tantalum), and alloys thereof. Thereby, the metal to be welded 33 having biocompatibility can be obtained. In addition, in one example, the metal 33 to be welded may be pure Ti. In another example, the metal to be welded 33 may be a Ti alloy. In addition, in yet another example, the metal to be welded 33 may be an iron-nickel alloy.

In addition, in some examples, the metal to be welded 33 may also be selected from metals that are not biocompatible. For example, the metal to be welded 33 may be made of at least one selected from copper (Cu), iron (Fe), magnesium (Mg), lead (Pb), aluminum (Al), and alloys thereof, and the like.

In addition, in the present embodiment, before step S20, a surface treatment may be performed on the metal to be welded 33. In some examples, the metal to be welded 33 may be surface-treated using sanding in stages to treat the metal to be welded 33. This makes it possible to polish the surface of the metal 33 to be welded to an appropriate roughness and increase the wettability of the metal 33 to be welded. For example, in one example, the metals 33 to be welded may be progressively ground with #200, #400, #600, #1200, #2000, and #4000 sandpaper. In another example, the metals to be welded 33 may be progressively ground with #100, #300, #500, #1000, #1500, #2500, and #4000 sandpaper. In addition, in yet another example, the metals 33 to be welded may be progressively ground with #280, #400, #800, #1600, #2500, #3500, and #5000 sandpaper.

In addition, in the present embodiment, before step S20, cleaning of the metal to be welded 33 after grinding may be included. In some examples, the ground metal to be welded 33 may be washed with ethanol for 10 to 20min and then with isopropanol for 10 to 20 min. For example, the metal 33 to be welded after polishing may be cleaned with ethanol for 15min and then with isopropanol for 15 min. Therefore, foreign matters on the surface of the technology to be welded can be removed, and the subsequent brazing is facilitated.

In this embodiment mode, in step S20, the metallization processing method may be sputtering, evaporation, PVD (physical vapor deposition), CVD (chemical vapor deposition), plating, or high-temperature sintering. This enables the formation of an intermediate metal layer bonded to the surface of the ceramic 31 to be welded. In some examples, the method of metallization is preferably sputtering.

In this embodiment, in step S20, the intermediate metal layer may be at least one selected from Nb, Au, Ti, and alloys thereof. Thereby, the ceramics to be welded 31 having the intermediate metal layer on the surface can be well wetted. In some examples, the intermediate metal layer may be one selected from Nb (niobium), Au (gold), Ti (titanium). For example, in one example, the intermediate metal layer may be Nb. In addition. In another example, the intermediate metal layer may be Au or the like.

In addition, in this embodiment, in step S20, the thermal expansion coefficient of the ceramic to be welded 31 is matched with the thermal expansion coefficient of the intermediate metal layer, that is, the thermal expansion coefficient of the intermediate metal layer may be between the thermal expansion coefficient of the ceramic to be welded 31 and the thermal expansion coefficient of the metal to be welded 33, so that the thermal expansion coefficient between the interfaces of the ceramic to be welded 31 and the metal to be welded 33 can be in gradient transition, the difference in thermal expansion coefficient between the interfaces of the joint due to the difference in materials is reduced, the thermal stress of the interfaces is reduced, and the performance is improved.

In addition, in the present embodiment, in step S20, cleaning of the to-be-welded ceramic 31 having the intermediate metal layer may be included. This can remove foreign matter on the surface of the ceramic 31 to be welded, which is advantageous for the subsequent brazing. In some examples, the to-be-welded ceramic 31 having the intermediate metal layer may be cleaned with ethanol for 3 to 5min and then with isopropanol for 3 to 5 min. For example, in one example, the ceramic to be welded 31 with the intermediate metal layer may be cleaned with ethanol for 4min and then with isopropanol for 4 min.

In the present embodiment, in step S30, the brazing filler metal 32 may be at least one selected from Au, Ag, Ti, Nb, and any alloy thereof. In this case, wetting of the brazing filler metal to the ceramic 31 to be welded and the metal 33 to be welded can be achieved. Additionally, in some examples, the metal solder 32 may be at least one of Au-based solder, Ag-based solder. For example, in one example, the metallic solder 32 may be pure Au.

In addition, in the present embodiment, in step S30, the brazing filler metal 32 may be in a sheet shape. In this case, the brazing metal 32 is better able to wet the material to be welded. The present embodiment is not limited thereto, and in some examples, the brazing filler metal 32 may be in the form of powder, paste, wire, strip, or the like. For example, in one example, the braze metal 32 may be in powder form. In addition, in another example, the brazing filler metal 32 may be in the form of a paste.

In addition, in the present embodiment, the step S30 may include preprocessing the brazing filler metal 32. In some examples, the braze metal 32 may be surface treated using a sanding step-wise sanding of the braze metal 32. This can remove the oxide film on the surface. For example, in one example, the braze metal 32 may be sanded in stages with #200, #400, #600, #1200, #2000, and #4000 sandpaper. In another example, the brazing filler metal 32 may be sanded with #100, #300, #500, #1000, #1500, #2500, and #4000 sandpaper in stages. In addition, in yet another example, the brazing filler metal 32 may be sanded with #280, #400, #800, #1600, #2500, #3500, and #5000 sandpaper in stages.

The jig 1 for brazing used in step 30 according to the present embodiment will be described in detail below with reference to the drawings.

Fig. 2 is a perspective view of the jig 1 according to the embodiment of the present invention. Fig. 3 shows a cross-sectional view of the jig 1 shown in fig. 2 along the line a-a'. In fig. 3, a cover body that engages with the stage 10 is omitted for convenience of illustration of the structure of the stage 10.

In the present embodiment, the jig for brazing (hereinafter, sometimes referred to as "jig") 1 may include a stage 10 and a compact 20 fitted to the stage 10. In step S30, soldering of the to-be-soldered piece 30 can be achieved by sequentially placing the to-be-soldered pieces 30 (the to-be-soldered ceramics 31, the metal filler metal 32, and the to-be-soldered metal 33) on the stage 10 and disposing the compact 20 fitted to the stage 10 on the to-be-soldered piece 30.

Additionally, in some examples, the stage 10 may be semi-cylindrical. In this case, brazing can be performed better. For example, the semi-cylindrical stage 10 may be placed in a brazing tube furnace (not shown) having a cylindrical furnace tube and brazed. In addition, the shape of the stage 10 can be matched to the shape of the furnace tube of the brazing tube furnace. In this case, the fixture 1 is advantageously fixed in the brazing tube furnace, and the brazing can be performed better. For example, the furnace tube of the brazing tube furnace may be prismatic, and the stage 10 may also be prismatic.

In the present embodiment, a vacuum pump (not shown) may be connected to the brazing tube furnace. In some examples, the vacuum within the brazing tube furnace (not shown) may be 10-4 pa. In other examples, the vacuum within the brazing tube furnace (not shown) may be 10-3 pa. In addition, in yet another example, the vacuum within the brazing tube furnace (not shown) may be 10-2 pa.

In addition, in some examples, the degree of vacuum in the brazing tube furnace (not shown) may also be 8X 10-3Pa, 5X 10-3Pa, 3X 10-3Pa, 7X 10-2Pa, 5X 10-2Pa, 2X 10-2Pa, or 1Pa, depending on the selected brazing filler metal (brazing filler metal 32).

In addition, in the present embodiment, the stage 10 may have a recess 11 for placing the to-be-welded member 30, and a through hole 12 (see fig. 4) penetrating a bottom 11a of the recess 11. In addition, in some examples, the stage 10 may have at least one groove (e.g., the groove 11 in fig. 3, fig. 3 showing an example of four grooves), and a through-hole 12 (through-hole 12) penetrating the stage 10 from a bottom 11a of the groove (groove 11). The groove 11 can be used for placing a part to be welded 30 (including a ceramic 31 to be welded, a metal solder 32 and a metal 33 to be welded) and can be matched with the pressing block 20. When the stage 10 is provided with a plurality of grooves, batch brazing can be performed, and the work efficiency can be improved.

In the jig 1 according to the present disclosure, as described above, the stage 10 has the groove 11 for placing the to-be-welded member 30 and the through hole 12 penetrating the bottom 11a of the groove 11, and further the pressing block 20 is fitted to the groove 11 in the stage 10, and the pressing block 20 has the vent hole 21. In this case, gas flows can be formed in the through holes 12 and the vent holes 21, so that the temperature distribution of the jig 1 can be uniform in the brazing process, the to-be-welded piece 30 can be heated uniformly, and the vent holes 21 can discharge impurities such as metal vapor generated in the brazing process, thereby preventing the to-be-welded piece 30 from being polluted.

In some examples, the bottom 11a of the groove 11 may be flat (see fig. 3). Thereby, the member to be welded 30 can be smoothly placed on the bottom 11a of the recess 11.

In some examples, the groove 11 may be cylindrical. In this case, it can be applied particularly to the same cylindrical member to be welded 30. However, the present embodiment is not limited thereto, and in some examples, the groove 11 may have a prism shape or the like. For example, in one example, the groove 11 may have a rectangular parallelepiped shape. In another example, the groove 11 may be square.

In addition, in some examples, there can be a flow of hot gas in the through-holes 12, so that the temperature distribution in the stage 10 can be made uniform during the brazing process, and thus the to-be-welded piece 30 is heated uniformly. In addition, the presence of the through-holes 12 also enables easier cleaning of the grooves 11. In addition, since the through hole 12 can penetrate through the bottom 11a of the groove 11, the groove 11 can be used for placing the to-be-welded part 30, and therefore the through hole 12 can facilitate taking out the part.

In addition, in some examples, the jig 1 may further include a cover (not shown) covering the stage 10. In this case, the atmosphere during brazing can be protected, and the degree of vacuum can be maintained well.

Additionally, in some examples, the stage 10 may have a groove 13 surrounding the recess 11, and an edge of a cover (not shown) may mate with the groove 13. Thereby, the cover (not shown) can cover the stage 10. In some examples, the edge of the cover may snap into the groove 13.

In the present embodiment, as shown in fig. 2 and 3, the compact 20 may be a combination of two cylinders having different inner diameters. In this compact 20, the cylinder having a small inner diameter has a small diameter and thus can be fitted into the groove 11, while the cylinder having a large inner diameter has a large diameter and thus can cover the groove. In this case, the pressing of the workpiece to be welded 30 can be achieved by the pressing block 20. In another example, the compact 20 may be a prism. Additionally, in yet another example, the compact 20 may be a circular truncated cone. Additionally, in some examples, the compact 20 is integrally formed.

In the present embodiment, the pressure block 20 may be provided with a vent hole 21. Additionally, in some examples, the compact 20 may have a plurality of vent holes 21, for example, the compact 20 may have 2, 3 vent holes 21. In this case, since a gas flow can be formed in the vent hole 21, the temperature distribution in the stage 10 can be made uniform during the brazing process, and the to-be-welded member 30 can be heated uniformly. In addition, the vent holes 21 can also help to discharge impurities such as metal vapor generated during the brazing process, thereby preventing the member to be welded 30 from being contaminated.

In some examples, among the plurality of vent holes 21, there may be a vent hole 21 penetrating in the length direction. In this case, the uniformity of heating of the to-be-welded member 30 can be further improved, and contamination of the to-be-welded member 30 can be better avoided.

In addition, in some examples, the to-be-welded piece 30 may be located between the bottom 11a of the groove 11 and the compact 20. Thereby, the to-be-welded piece 30 can be well fixed in the groove 11.

In the present embodiment, the material of the stage 10 may be at least one selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide. In one example, the material of the stage 10 may be graphite. In another example, the material of the stage 10 may be synthetic stone.

In the present embodiment, the material of the compact 20 may be at least one selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide. In one example, the material of the compact 20 may be graphite. In another example, the material of the compact 20 may be synthetic stone.

In addition, in some examples, the length of the jig 1 and the grooves 11 may be distributed in a temperature zone of the brazing tube furnace where the temperature is uniform. Thereby, the plurality of members to be welded 30 can be brazed well at the same time.

Fig. 4 shows a cross-sectional view of a jig 1 to which a member to be soldered 30 is fitted according to an embodiment of the present invention. Fig. 5 shows an assembly structure view of a to-be-welded member 30 according to an embodiment of the present invention.

In addition, in the present embodiment, in step S30, as shown in fig. 4, the to-be-welded part 30 may be placed in the groove 11 on the stage 10, and the to-be-welded part 30 may be pressed by the pressing block 20, so that the assembly may be completed. The assembled stage 10, compact 20 and piece to be welded 30 are then fed into, for example, a brazing tube furnace for brazing. In some examples, the assembled stage 10, compact 20, and part 30 to be welded are fed into a temperature uniform zone of a brazing tube furnace. Thereby, the plurality of members to be welded 30 can be brazed well at the same time.

In addition, in some examples, the clearance H between the compact 20 and the side wall of the groove 11 of the stage 10 may be 0.05mm to 0.06mm (see fig. 4), in which case the weldment can be smoothly taken out at the time of completion of brazing. In addition, as described above, the stage 10 may have a plurality of grooves 11, thereby enabling brazing of a plurality of pieces to be brazed 30 at the same time. For example, there may be 4, 12, 16 or 20 grooves in the stage 10 in addition to the illustrations of fig. 2 and 3.

In addition, in some examples, the components of the parts to be welded 30 may be stacked from below to above in the groove 11 in the order of the ceramics to be welded 31, the brazing metal 32, and the metal to be welded 33 (see fig. 5). For example, the parts of the to-be-welded member 30 may be stacked from below to above in the groove 11 in the order of a circular Al2O3 ceramic substrate, a pure Au solder ring, and a pure Ti metal ring, and the outer diameters of the circular Al2O3 ceramic substrate, the pure Au solder ring, and the pure Ti metal ring are substantially the same.

In addition, in the present embodiment, in step S30, the temperature of the to-be-welded part 30 may be raised to 1060 ℃ to 1150 ℃ at a heating rate of 1 ℃/min to 50 ℃/min, and the temperature is maintained for 1min to 30min, and then the temperature is lowered to 200 ℃ to 400 ℃ at a cooling rate of 2 ℃/min to 20 ℃/min, and then the to-be-welded part is furnace-cooled to 150 ℃ or below. Wherein 1060 ℃ to 1150 ℃ can be used as the brazing temperature. Under the condition, the generation and distribution of brittle phases between interfaces can be improved, the strength is increased, the thermal stress and the thermal deformation of a base material are reduced, cracks in a welding seam are eliminated, and the air tightness and the strength of a brazing interface of ceramics and metals are improved.

In addition, in some examples, in step S30, the temperature may be raised to 1060 ℃ at a heating rate of 20 ℃/min, held for 1min, then lowered to 400 ℃ at a cooling rate of 10 ℃/min, and then furnace-cooled to 150 ℃. In other examples, the temperature may be increased to 1065 ℃ at a heating rate of 15 ℃/min, held for 3min, then decreased to 250 ℃ at a cooling rate of 12 ℃/min, and then furnace cooled to 140 ℃. In addition, in yet another example, the temperature may be raised to 1100 ℃ at a heating rate of 30 ℃/min, held for 5min, then lowered to 300 ℃ at a cooling rate of 8 ℃/min, and then furnace cooled to 120 ℃.

Depending on the brazing material (brazing filler metal 32) selected, the brazing temperature may be 850 ℃, 900 ℃, 950 ℃, 1000 ℃, 1050 ℃, 1150 ℃, 1200 ℃, or the like.

While the present disclosure has been described in detail above with reference to the drawings and the embodiments, it should be understood that the above description does not limit the present disclosure in any way. Those skilled in the art can make modifications and variations to the present disclosure as needed without departing from the true spirit and scope of the disclosure, which fall within the scope of the disclosure.

Claims (8)

1. The utility model provides a tool that vacuum brazing used which characterized in that:

the method comprises the following steps:

the welding device comprises an object stage and a welding device, wherein the object stage is provided with a groove for placing a piece to be welded and a through hole communicated with the bottom of the groove, and the object stage is provided with a groove surrounding the groove; the cover body covers the objective table, and the edge of the cover body is matched with the groove to maintain the vacuum degree; and

a pressing block which is a combination of a first cylinder and a second cylinder with different diameters and is matched with the groove, the pressing block covers the piece to be welded to fix the piece to be welded on the groove, the pressing block is provided with a vent hole,

wherein, in the pressing block, the diameter of the first cylinder is smaller than the groove, the diameter of the second cylinder is larger than the groove, and the sum of the heights of the piece to be welded and the first cylinder is larger than the depth of the groove.

2. The jig of claim 1, wherein:

when the pressing block covers the to-be-welded part, the first cylinder covers the to-be-welded part.

3. The jig of claim 2, wherein:

a gap exists between the first cylinder and the side wall of the groove.

4. The jig of claim 1, wherein:

the pressure block has a plurality of vent holes, and at least one of the vent holes includes a vent hole penetrating the pressure block in a longitudinal direction of the pressure block, and the through hole and the vent hole form a gas flow.

5. The jig of claim 1, wherein:

the groove is cylindrical, and the bottom of the groove is flat.

6. The jig of claim 1, wherein:

the objective table is provided with a plurality of grooves, and each groove is provided with a corresponding pressing block fit.

7. The jig of claim 1 or 3, wherein:

the to-be-welded part is placed at the bottom of the groove, and a gap exists between the to-be-welded part and the side wall of the groove.

8. The jig of claim 1, wherein:

the object stage is composed of at least one selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide and silicon phosphide,

the compact is composed of at least one selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide, and is integrally molded.

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