JP3553157B2 - Ceramic structural members for precision machinery with excellent high-precision workability - Google Patents

Description

【００３６】
【発明の効果】
セラミックス表面に形成した被削性に優れる黄銅あるいは青銅の層が、加工液なしの加工を可能とすることにより、セラミックス部材を常に清浄な環境下に置くことができ、錆び・汚染を心配することなく、セラミックス特性を必要とする精密機械部材に適用できた。
【図面の簡単な説明】
【図１】黄銅層を形成したセラミックス部材の断面概略図。
【符号の説明】
１ セラミックス
２ メタライズ層
３ 黄銅[0001]
[Industrial applications]
The present invention relates to a ceramic member for a precision machine requiring light weight, low thermal expansion, and high rigidity.
[0002]
[Prior art]
Conventionally, metal materials have been applied to precision mechanical members and the like. However, deterioration of machine and device performance due to temperature change and elasto-plastic deformation poses a problem. Therefore, use of ceramic materials having lower thermal expansion properties, heat resistance, and higher rigidity than metal materials has been attempted.
[0003]
The shapes of these precision machine members vary widely, and furthermore, high dimensions are required.
[0004]
Since ceramics are difficult-to-process materials, it is technically difficult to satisfy these demands, and therefore, there is a problem that processing costs increase.
[0005]
As one measure for facilitating the processing of ceramic members, attempts have been made to form a metal layer on the ceramic surface.
[0006]
However, there is no material selected for the material of the metal layer with particular attention to ease of workability. For example, the formation of a pure metal film such as Cu, Ni, or Fe mainly focuses on the adhesion of ceramics. Was.
[0007]
Therefore, at the time of processing, although processing is superior to ceramics, a processing liquid must be used, and it is not suitable as a precision member that requires a clean degree that dislikes rust on the metal layer and contamination of the member.
[0008]
[Problems to be solved by the invention]
It is an object of the present invention to (1) work with high precision dimensions, (2) maintain the properties of ceramics (low thermal expansion, high rigidity, light weight, etc.), and (3) easily process and contaminate with processing. It is an object of the present invention to provide a ceramic structural member having a small number of components.
[0009]
[Means for Solving the Problems]
The present invention is directed to a ceramic structural member for precision machinery having a high precision workability in which a brass or bronze layer having a thickness of 10 to 500 μm is formed directly on a ceramic surface, or an Ag-based or Ag-Cu-Ti-based By providing a metallized layer with a thickness of 5 to 20 μm and a brass or bronze layer formed on the metallized layer with a thickness of 10 to 500 μm to provide a ceramic structural member for precision machinery excellent in high precision workability. is there.
[0011]
These alloys have excellent workability such as cutting or grinding. Therefore, if fine-tuning of the alloy layer is performed, the cutting or grinding tool burn-in can be performed without using a working fluid such as water or oil. High-precision processing without clogging.
[0012]
The minimum range of the thickness of the metal layer is 10 μm because it is the minimum thickness required for processing when pursuing dimensional accuracy, and the maximum thickness is 500 μm when the thickness is more than this. This is because there is a possibility that characteristics such as low thermal expansion property or high rigidity of ceramic properties expected as a structural body may be impaired. The manufacturing method of the present invention will be described below.
[0013]
In addition to forming the brass or directly ceramic surface a layer of bronze, the member brass or layer and adhesion of the ceramic bronze is particularly required, it is recommended that applying metallized ceramic surface.
[0014]
The appropriate thickness of the metallized layer is 5 to 20 μm. When the thickness is 5 μm or less, the effect of improving the adhesion between the copper alloy layer and the ceramic is not exhibited, and when the thickness is 20 μm or more, the characteristics (easy workability, high rigidity, low thermal expansion) of the member are deteriorated.
[0015]
As the metallizing process, for example, a paste obtained by mixing a commercially available noble metal-based Ag powder or an active metal-based Ag-Cu-Ti-based alloy powder and oil on the ceramic surface is used. In the atmosphere, the Ag—Cu—Ti paste is preferably subjected to a heat treatment at 850 ° C. in a vacuum (10 ⁻⁶ torr) to form a metallized layer.
[0016]
The formed metallized layer adheres ceramics and brass or bronze , and a component of the brass or bronze diffuses into both materials, so that a brass or bronze layer having strong adhesion can be formed.
[0017]
Specific methods for forming a brass or bronze layer on a ceramic surface or a metallized overall evaluation surface include a bonding method and a thermal spraying method.
[0018]
For example, in the joining method, a thin plate (thickness: 10 to 500 μm) of brass or bronze prepared in advance is placed on a ceramic surface or a metallized layer surface and joined by heat treatment. In the thermal spraying method, a thermal spraying layer (thickness: 10 to 500 μm) is formed in the air using a thermal spray gun incorporating a lead wire of brass or bronze .
[0019]
The features of the ceramic structural member of the present invention are that, since a metal layer which is easy to process is formed on the surface, it is easy to carry out a correction process, and a highly accurate dimension can be exhibited.
[0020]
For this reason, the member of the present invention is applied to a member for precision machinery which requires dimensional accuracy, complicated shape, low thermal expansion, high rigidity and light weight.
[0021]
For example, with respect to dimensional accuracy, there is an advantage that a brass or bronze layer on the ceramic surface can be easily machined without using a processing liquid, and difficult-to-process ceramic members can be provided as high dimensional accuracy members at low cost. It means there is.
[0022]
Also, for products with complex shapes, after roughly processing a ceramic sintered body of near net shape, a brass or bronze layer is formed on the surface, and this brass or bronze layer is machined to finish it into a complex shape. Just do it.
[0023]
Regardless of the processing requirements, the surface of the brass or bronze layer can be machined without using a processing liquid, so that the ceramic member can always be placed in a clean environment.
[0024]
【Example】
The ceramics 1 is a material called fine ceramics, such as alumina, sialon, silicon nitride, silicon carbide, and zirconia, which are on the market today.
[0025]
The shape was a □ 50 × 5 mm plate, and the brass film 2 was formed on the surface (50 × 50 surface).
[0026]
A paste in which an Ag—Cu—Ti alloy powder and an oil were mixed was applied to each ceramic surface, and subjected to a heat treatment at 850 ° C. in a vacuum (10 ⁻⁶ torr) to form a metallized layer. In addition, the thickness of the metallized layer was set to about 10 μm.
[0027]
Next, a brass layer (70 wt% Cu-30 wt% Zn) was formed on the metallized surface by a joining method or a thermal spraying method (FIG. 1).
[0028]
In the joining method, a 150-μm brass thin plate was placed on the metallized surface, and a heat treatment was performed at a maximum temperature of 900 ° C. in a vacuum (10 ⁻⁶ torr) under no load to form a brass layer on the ceramic surface.
[0029]
In the thermal spraying method, a brass component lead wire was incorporated into a thermal spray gun, and an approximately 150 μm brass thermal sprayed layer was formed in the atmosphere by arc spraying.
[0030]
In particular, for alumina ceramics, a brass layer (about 150 μm) was formed directly on the ceramic surface without metallization under the same conditions as those of the above-mentioned joining method and thermal spraying method.
[0031]
The density, coefficient of thermal expansion, and Young's modulus of the ceramic member on which the brass layer was formed were measured and compared with those of the ceramics alone or brass alone. Table 1 shows the results.
[0032]
In addition, each value of the ceramic member in the table was an average value of the member by various methods adopted for forming the brass layer.
[0033]
The characteristics of the ceramic member of the present invention are as follows: a member made of only metal such as brass (density = 8.55 g / cm ³ , coefficient of thermal expansion = 16.0 × 10 ⁻⁶ / ° C., Young's modulus = 1.03) × 10 ⁴ kg / mm ² ), which proved to be more suitable for precision mechanical members.
[0034]
Furthermore, when all the ceramic members on which the brass layer was formed were subjected to a surface grinding process of 50 μm without a working fluid, the brass layer was not peeled off or cracked on any member regardless of the presence of the metallized layer. A clean surface was obtained.
[0035]
[Table 1]

[0036]
【The invention's effect】
The brass or bronze layer with excellent machinability formed on the ceramic surface enables machining without machining fluid, so that ceramic members can always be placed in a clean environment, and there is no worry about rust and contamination. And could be applied to precision machine parts requiring ceramic properties.
[Brief description of the drawings]
FIG. 1 is a schematic sectional view of a ceramic member having a brass layer formed thereon.
[Explanation of symbols]
1 ceramics 2 metallized layer 3 brass

Claims (2)

A ceramic structural member for precision machinery with excellent precision workability, in which a layer of brass or bronze is formed directly on the ceramic surface with a thickness of 10 to 500 µm. Excellent in high-precision workability by forming an Ag-based or Ag-Cu-Ti-based metallized layer with a thickness of 5 to 20 µm on the ceramic surface and forming a brass or bronze layer with a thickness of 10 to 500 µm on the metallized layer. Ceramic structural members for precision machinery .

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