JPH0891968A - Ceramic structure material having copper alloy layer on surface - Google Patents

Ceramic structure material having copper alloy layer on surface

Info

Publication number
JPH0891968A
JPH0891968A JP6246799A JP24679994A JPH0891968A JP H0891968 A JPH0891968 A JP H0891968A JP 6246799 A JP6246799 A JP 6246799A JP 24679994 A JP24679994 A JP 24679994A JP H0891968 A JPH0891968 A JP H0891968A
Authority
JP
Japan
Prior art keywords
ceramic
layer
copper alloy
alloy layer
brass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6246799A
Other languages
Japanese (ja)
Other versions
JP3553157B2 (en
Inventor
Akihiro Shinpo
章弘 新保
Masanori Ueki
正憲 植木
Masato Inayoshi
正人 稲吉
Hidehiko Morita
英彦 森田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Steel Corp
Original Assignee
Nippon Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Steel Corp filed Critical Nippon Steel Corp
Priority to JP24679994A priority Critical patent/JP3553157B2/en
Publication of JPH0891968A publication Critical patent/JPH0891968A/en
Application granted granted Critical
Publication of JP3553157B2 publication Critical patent/JP3553157B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/009After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone characterised by the material treated
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/50Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements with inorganic materials
    • C04B41/51Metallising, e.g. infiltration of sintered ceramic preforms with molten metal
    • C04B41/5127Cu, e.g. Cu-CuO eutectic
    • CCHEMISTRY; METALLURGY
    • C04CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04BLIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/52Multiple coating or impregnating multiple coating or impregnating with the same composition or with compositions only differing in the concentration of the constituents, is classified as single coating or impregnation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Materials Engineering (AREA)
  • Structural Engineering (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Laminated Bodies (AREA)
  • Ceramic Products (AREA)

Abstract

PURPOSE: To obtain a ceramic material having an easily processable metallic layer on the surface useful as a precision machinery material which requires the characteristics of light weight, low thermal expansion and high stiffness. CONSTITUTION: This ceramic material for a precision machinery is obtained by forming a copper alloy layer of 10-500μm in thickness which can be processed by machining without using a processing liquid on the surface of the ceramic 1. The obtained ceramic material can be processed in high precision by machining and keeps the features characteristic to ceramics such as low thermal expansion, high stiffness and light weight. Especially, a material having a brass layer 3 of about 150μm in thickness on the surface of ceramics as the copper alloy layer has superior characteristics to a conventional brass bulk material as a precision machinery material. Further, the brass layer surface can be processed in high precision without using processing liquid.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】軽量、低熱膨張性、高剛性が要求
される精密機械用セラミックス部材に関するものであ
る。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a ceramic member for precision machinery, which is required to be lightweight, low in thermal expansion and highly rigid.

【0002】[0002]

【従来の技術】従来、金属材料が精密機械部材等に適用
されている。だが、温度変化や弾塑性変形による機械・
装置性能の劣化が問題となるため、金属材料よりも低熱
膨張性、耐熱性、高剛性に優れたセラミックス材料の使
用が試みられている。
2. Description of the Related Art Conventionally, metal materials have been applied to precision mechanical members and the like. However, due to temperature changes and elasto-plastic deformation
Since the deterioration of the device performance becomes a problem, it has been attempted to use a ceramic material having a lower thermal expansion property, heat resistance, and higher rigidity than a metal material.

【0003】これらの精密機械部材の形状は多岐に渡
り、さらに寸法も高精度が要求される。
The shapes of these precision machine members are various, and the dimensions are required to be highly accurate.

【0004】セラミックスは、難加工性材料のため、こ
れらの要求を満すことは技術的に難しく、そのため加工
コストも高くなってしまう問題がある。
Since ceramics are difficult-to-process materials, it is technically difficult to meet these requirements, and there is a problem that the processing cost becomes high.

【0005】セラミックス部材の加工を容易にする一方
策として、セラミックス表面に金属層を形成する試みが
なされている。
As one measure for facilitating the processing of ceramic members, attempts have been made to form a metal layer on the surface of ceramics.

【0006】ただし、金属層の材種として、特に易加工
性に注目して選定したものはなく、例えばセラミックス
の密着性のみに主眼をおいたCu,Ni,Fe等の純金
属の皮膜形成が主であった。
[0006] However, as the material of the metal layer, no one has been selected by paying particular attention to easy workability. For example, the formation of a pure metal film such as Cu, Ni, Fe or the like, which is focused only on the adhesion of ceramics, is preferable. Was the Lord.

【0007】そのため加工時、セラミックスより加工が
優れるものの、加工液を使用しなければならず、金属層
の錆、部材の汚染等を嫌うクリーン度が要求される精密
部材としては不適当であった。
Therefore, during processing, although processing is superior to ceramics, a processing liquid must be used, and it is unsuitable as a precision member which requires cleanliness to avoid rusting of metal layers and contamination of members. .

【0008】[0008]

【発明が解決しようとする課題】本発明の目的は、
(1)高精度寸法で加工が出来、(2)セラミックスの
有する特性(低熱膨張性、高剛性、軽量等)を損なわ
ず、且つ(3)加工容易で加工に伴う汚染が少ないセラ
ミックス構造部材を提供することである。
SUMMARY OF THE INVENTION The object of the present invention is to
(1) A ceramic structural member that can be processed with high precision dimensions, (2) does not impair the characteristics of ceramics (low thermal expansion, high rigidity, light weight, etc.), and (3) is easy to process and has little pollution associated with processing. Is to provide.

【0009】[0009]

【課題を解決するための手段】本発明は、セラミックス
表面に銅合金層を10〜500μm厚さで形成させた高
精度加工性に優れたセラミックス構造部材、あるいはセ
ラミックス表面にメタライズ層を5〜20μm厚さで形
成し、該メタライズ層上に銅合金層を10〜500μm
厚さで形成させた高精度加工性に優れたセラミックス構
造部材を提供することである。
According to the present invention, a ceramic structure member having a copper alloy layer having a thickness of 10 to 500 μm formed on a ceramic surface and excellent in high precision workability, or a metallized layer having a thickness of 5 to 20 μm on the ceramic surface. Formed to a thickness, and a copper alloy layer having a thickness of 10 to 500 μm on the metallized layer.
It is an object of the present invention to provide a ceramics structural member formed in a thickness and excellent in high-precision workability.

【0010】セラミックス表面に形成させる銅合金層と
しては、黄銅あるいは青銅が望ましい。
Brass or bronze is desirable for the copper alloy layer formed on the ceramic surface.

【0011】これらの合金は、切削あるいは研削等の加
工性に優れた性質を有しており、そのため合金層の微修
正加工ならば水や油等の加工液を使用せずとも切削や研
削工具の焼きつきや目詰まりがなく高精度の加工が可能
である。
These alloys have excellent workability such as cutting or grinding. Therefore, if the alloy layer is finely modified, a cutting or grinding tool can be used without using a working fluid such as water or oil. Highly accurate processing is possible without seizing or clogging.

【0012】金属層の厚さの範囲を最低10μmとした
のは、寸法精度を追求する場合の加工に最低必要な厚さ
であること、また最高500μmとしたのは、これ以上
の厚さになると、セラミックス構造体として期待される
セラミックス特性の低熱膨張性あるいは高剛性等の特性
を損ってしまう恐れがあるためである。本発明の製造方
法を次に述べる。
The minimum thickness range of the metal layer is 10 μm, which is the minimum thickness required for processing in the case of pursuing dimensional accuracy, and the maximum thickness of 500 μm is more than this. In that case, there is a possibility that the properties such as low thermal expansion or high rigidity of the ceramic properties expected as the ceramic structure may be impaired. The manufacturing method of the present invention will be described below.

【0013】銅合金層を直接セラミックス表面に形成す
る他に、銅合金層とセラミックスの密着力が特に要求さ
れる部材には、セラミックス表面をメタライズ処理を施
すことが推奨できる。
In addition to forming the copper alloy layer directly on the surface of the ceramic, it is recommended to subject the surface of the ceramic to a metallizing treatment for a member for which the adhesion between the copper alloy layer and the ceramic is particularly required.

【0014】メタライズ層厚さは、5〜20μmが適正
である。5μm以下だと銅合金層とセラミックスの密着
力向上効果を発揮せず、20μm以上だと部材の特性
(易加工性、高剛性、低熱膨張性)を低下させるからで
ある。
The appropriate thickness of the metallized layer is 5 to 20 μm. This is because if it is 5 μm or less, the effect of improving the adhesion between the copper alloy layer and the ceramic is not exhibited, and if it is 20 μm or more, the characteristics of the member (easy workability, high rigidity, low thermal expansion) are deteriorated.

【0015】メタライズ処理としては、例えば、市販さ
れている貴金属系のAg系粉末あるいは活性金属系のA
g―Cu―Ti系合金粉末と油を混ぜ合わせたペースト
をセラミックス表面に塗布し、Ag系ペーストの場合は
大気中、Ag―Cu―Ti系ペーストは真空中(10-6
torr)にてそれぞれ850℃の熱処理を施し、メタ
ライズ層を形成させることが適している。
Examples of the metallizing treatment include commercially available noble metal-based Ag-based powder or active metal-based A
A paste prepared by mixing g-Cu-Ti alloy powder and oil is applied to the ceramic surface. In the case of Ag paste, it is in the air, and in the case of Ag-Cu-Ti paste is in vacuum (10 -6
It is suitable to perform a heat treatment at 850 ° C. for each torr to form a metallized layer.

【0016】形成したメタライズ層は、セラミックス及
び銅合金を密着し、且つその成分が両材料へ拡散するこ
とにより、強固な密着力を有する銅合金層を形成でき
る。
The formed metallized layer is capable of forming a copper alloy layer having a strong adhesion by adhering ceramics and a copper alloy and diffusing the components thereof into both materials.

【0017】セラミックス表面あるいはメタライズ層表
面上に銅合金層を形成させる具体的手法として、接合
法、溶射法が挙げられる。
Specific methods for forming the copper alloy layer on the surface of the ceramics or the surface of the metallized layer include a joining method and a thermal spraying method.

【0018】例えば、接合法は予め用意した銅合金の薄
板(厚さ10〜500μm)を、セラミックス表面ある
いはメタライズ層表面上にのせ、熱処理により接合させ
る。溶射法は、銅合金成分のリード線を組み込んだ溶射
ガンを使用して、大気中にて溶射層(厚さ10〜500
μm)を形成させる。
For example, in the joining method, a thin plate of copper alloy (thickness: 10 to 500 μm) prepared in advance is placed on the surface of the ceramic or the surface of the metallized layer and joined by heat treatment. The thermal spraying method uses a thermal spraying gun incorporating a lead wire of a copper alloy component, and a thermal spraying layer (thickness 10 to 500
μm) is formed.

【0019】本発明のセラミックス構造部材の特徴は、
易加工性の金属層を表面に形成させるため、修正加工が
容易であること、且つ高精度の寸法を現出することがで
きることである。
The features of the ceramic structural member of the present invention are:
Since the easily processable metal layer is formed on the surface, the correction process is easy and the highly accurate dimension can be revealed.

【0020】このことから、本発明部材は寸法精度、複
雑形状及び低熱膨張性、高剛性そして軽量が要求される
精密機械用部材へ適用される。
From the above, the member of the present invention is applied to a member for precision machinery which is required to have dimensional accuracy, complicated shape, low thermal expansion property, high rigidity and light weight.

【0021】例えば、寸法精度に対しては、セラミック
ス表面の銅合金層を加工液を使わず簡便に機械加工処理
が施せ、難加工性のセラミックス部材を高寸法精度の部
材として低コストで提供できるメリットがあることを意
味する。
For example, with respect to dimensional accuracy, the copper alloy layer on the ceramic surface can be easily machined without using a working liquid, and a difficult-to-machine ceramic member can be provided as a member with high dimensional accuracy at low cost. Means that there are benefits.

【0022】また、複雑形状品に対しても、ニアネット
シェイプのセラミックス焼成体を粗加工した後、その表
面に銅合金層を形成し、この合金層を機械加工して複雑
形状に仕上げればよい。
Further, for a product having a complicated shape, if a near net shape ceramics fired body is roughly processed, a copper alloy layer is formed on the surface thereof, and the alloy layer is machined to have a complicated shape. Good.

【0023】いずれの加工要求に対しても、銅合金層は
加工液を使用しなくても表面の機械加工が可能なことか
ら、セラミックス部材を常に清浄な環境下に置くことが
できる。
With respect to any of the processing requirements, the surface of the copper alloy layer can be machined without using a machining liquid, so that the ceramic member can be always placed in a clean environment.

【0024】[0024]

【実施例】セラミックス1は、今日市場に出回っている
アルミナ、サイアロン、窒化珪素、炭化珪素、ジルコニ
ア等のファインセラミックスと呼ばれる材料である。
EXAMPLE Ceramics 1 is a material called fine ceramics such as alumina, sialon, silicon nitride, silicon carbide and zirconia which are on the market today.

【0025】形状を□50×5mm板とし、表面(50
×50の面)に黄銅膜2を形成することとした。
The shape is a □ 50 × 5 mm plate, and the surface (50
The brass film 2 was formed on the (× 50 surface).

【0026】それぞれのセラミックス表面にAg―Cu
―Ti系合金粉末と油を混ぜ合わせたペーストを塗布
し、真空中(10-6torr)にて850℃の熱処理を
施し、メタライズ層を形成させた。尚、メタライズ層の
厚さは約10μmとした。
Ag-Cu is formed on the surface of each ceramic.
— A paste obtained by mixing Ti-based alloy powder and oil was applied, and heat treatment was performed at 850 ° C. in vacuum (10 −6 torr) to form a metallized layer. The metallized layer had a thickness of about 10 μm.

【0027】次に、接合法あるいは溶射法により、黄銅
層(70wt%Cu―30wt%Zn)をメタライズ処
理面上形成させた(図1)。
Next, a brass layer (70 wt% Cu-30 wt% Zn) was formed on the metallized surface by a bonding method or a thermal spraying method (FIG. 1).

【0028】接合法は、150μmの黄銅薄板をメタラ
イズ表面にのせ、無荷重で、真空中(10-6torr)
最高温度900℃の熱処理を施し、黄銅層をセラミック
ス表面に形成させた。
The joining method was carried out by placing a 150 μm brass thin plate on the metallized surface and applying no load in a vacuum (10 −6 torr).
The brass layer was formed on the ceramic surface by heat treatment at a maximum temperature of 900 ° C.

【0029】溶射法においては、黄銅成分のリード線を
溶射ガンに組み込み、大気中にてアーク溶射により約1
50μmの黄銅溶射層を形成させた。
In the thermal spraying method, a brass component lead wire is installed in a thermal spray gun, and about 1 is obtained by arc thermal spraying in the atmosphere.
A brass sprayed layer of 50 μm was formed.

【0030】特に、アルミナセラミックスに対しては、
上述した接合法そして溶射法と同じ条件で、メタライズ
処理のないセラミックス表面に直接黄銅層(約150μ
m)を形成させた。
Particularly, for alumina ceramics,
Under the same conditions as the above-mentioned joining method and thermal spraying method, the brass layer (about 150 μm) was directly applied to the ceramic surface without metallization treatment.
m) was formed.

【0031】黄銅層を形成したセラミックス部材の密
度、熱膨張率、ヤング率をそれぞれ測定し、セラミック
ス単体あるいは黄銅単体のそれとそれぞれ比較した。そ
の結果を表1に示す。
The density, thermal expansion coefficient and Young's modulus of the ceramic member having the brass layer formed thereon were measured and compared with those of the ceramic alone or the brass alone. The results are shown in Table 1.

【0032】尚、表中のセラミックス部材の各値は、黄
銅層形成に採用した各種方法による部材の平均値とし
た。
Each value of the ceramic members in the table is an average value of the members by various methods adopted for forming the brass layer.

【0033】本発明のセラミックス部材の各特性は、黄
銅等の金属だけでできている部材(密度=8.55g/
cm3、熱膨張係数=16.0×10-6/℃、ヤング率
=1.03×104kg/mm2)に比べ、精密機械部材
に好適であることが判明した。
The characteristics of the ceramic member of the present invention are as follows. A member made of only metal such as brass (density = 8.55 g /
cm 3 , thermal expansion coefficient = 16.0 × 10 −6 / ° C., Young's modulus = 1.03 × 10 4 kg / mm 2 ), which proved to be suitable for precision machine parts.

【0034】さらに、黄銅層が形成した全てのセラミッ
クス部材に対して、加工液なしで平面研削加工を50μ
m施したところ、メタライズ層の有無を問わず、いずれ
の部材とも黄銅層の剥離や割れが発生せずに清浄な面が
得られた。
Further, surface grinding is performed at 50 μm on all the ceramic members on which the brass layer is formed without using a working liquid.
When the metal layer was applied, a clean surface was obtained without peeling or cracking of the brass layer regardless of the presence or absence of the metallized layer.

【0035】[0035]

【表1】 [Table 1]

【0036】[0036]

【発明の効果】セラミックス表面に形成した被削性に優
れる銅合金層が、加工液なしの加工を可能にすることに
より、セラミックス部材を常に清浄な環境下に置くこと
ができ、錆び・汚染を心配することなく、セラミックス
特性を必要とする精密機械部材に適用できた。
EFFECTS OF THE INVENTION The copper alloy layer formed on the surface of the ceramics, which has excellent machinability, enables machining without a machining fluid, so that the ceramics member can always be placed in a clean environment, and rust and contamination can be prevented. It was possible to apply to precision mechanical parts that require ceramic characteristics without worry.

【図面の簡単な説明】[Brief description of drawings]

【図1】黄銅層を形成したセラミックス部材の断面概略
図。
FIG. 1 is a schematic sectional view of a ceramic member having a brass layer formed thereon.

【符号の説明】[Explanation of symbols]

1 セラミックス 2 メタライズ層 3 黄銅 1 Ceramics 2 Metallized layer 3 Brass

───────────────────────────────────────────────────── フロントページの続き (72)発明者 森田 英彦 東京都千代田区大手町2―6―3 新日本 製鐵株式会社内 ─────────────────────────────────────────────────── ─── Continuation of front page (72) Inventor Hidehiko Morita 2-6-3 Otemachi, Chiyoda-ku, Tokyo Shin Nippon Steel Corporation

Claims (2)

【特許請求の範囲】[Claims] 【請求項1】 セラミックス表面に銅合金層を10〜5
00μm厚さで形成させた高精度加工性に優れたセラミ
ックス構造部材。
1. A copper alloy layer having a thickness of 10 to 5 on the ceramic surface.
A ceramic structure member with a high precision workability formed with a thickness of 00 μm.
【請求項2】 セラミックス表面にメタライズ層を5〜
20μm厚さで形成し、該メタライズ層上に銅合金層を
10〜500μm厚さで形成させた高精度加工性に優れ
たセラミックス構造部材。
2. A metallized layer of 5 to 5 is formed on the surface of ceramics.
A ceramic structural member excellent in high-precision workability, which is formed to a thickness of 20 μm, and a copper alloy layer is formed to a thickness of 10 to 500 μm on the metallized layer.
JP24679994A 1994-09-16 1994-09-16 Ceramic structural members for precision machinery with excellent high-precision workability Expired - Fee Related JP3553157B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24679994A JP3553157B2 (en) 1994-09-16 1994-09-16 Ceramic structural members for precision machinery with excellent high-precision workability

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24679994A JP3553157B2 (en) 1994-09-16 1994-09-16 Ceramic structural members for precision machinery with excellent high-precision workability

Publications (2)

Publication Number Publication Date
JPH0891968A true JPH0891968A (en) 1996-04-09
JP3553157B2 JP3553157B2 (en) 2004-08-11

Family

ID=17153857

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184304A (en) * 1984-09-29 1986-04-28 Kyocera Corp Method for joining metallic member to ceramic member
JPS61183178A (en) * 1985-02-06 1986-08-15 株式会社東芝 Method of joining silicon nitride ceramic to metal
JPH0280382A (en) * 1988-07-28 1990-03-20 Lilliwyte Sa Method for bonding metal element and ceramic element and processed product bonded by said method
JPH03137069A (en) * 1989-10-23 1991-06-11 Sumitomo Electric Ind Ltd Insulated substrate having high thermal conductivity and its production
JPH04367575A (en) * 1991-04-04 1992-12-18 Internatl Business Mach Corp <Ibm> Improvement in bonding glass ceramics to copper
JPH06329481A (en) * 1993-05-20 1994-11-29 Noritake Co Ltd Ceramics-metal composite and its production

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6184304A (en) * 1984-09-29 1986-04-28 Kyocera Corp Method for joining metallic member to ceramic member
JPS61183178A (en) * 1985-02-06 1986-08-15 株式会社東芝 Method of joining silicon nitride ceramic to metal
JPH0280382A (en) * 1988-07-28 1990-03-20 Lilliwyte Sa Method for bonding metal element and ceramic element and processed product bonded by said method
JPH03137069A (en) * 1989-10-23 1991-06-11 Sumitomo Electric Ind Ltd Insulated substrate having high thermal conductivity and its production
JPH04367575A (en) * 1991-04-04 1992-12-18 Internatl Business Mach Corp <Ibm> Improvement in bonding glass ceramics to copper
JPH06329481A (en) * 1993-05-20 1994-11-29 Noritake Co Ltd Ceramics-metal composite and its production

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