CN211522037U

CN211522037U - Brazing structure of ceramic and metal

Info

Publication number: CN211522037U
Application number: CN201922231700.2U
Authority: CN
Inventors: 王蕾; 卢陆旺; 黄珑鑫
Original assignee: Shenzhen Sibionics Technology Co Ltd
Current assignee: Shenzhen Silicon Bionics Technology Co ltd
Priority date: 2018-12-31
Filing date: 2019-12-11
Publication date: 2020-09-18
Anticipated expiration: 2029-12-11
Also published as: CN110776329A; CN110734298A; CN109734469A; CN110776330A

Abstract

The utility model provides a structure of brazing of pottery and metal, include: the ceramic to be welded is disc-shaped and is provided with a brazing surface subjected to surface grinding and metallization treatment; the brazing filler metal is in a ring sheet shape, the outer diameter of the brazing filler metal is smaller than that of the ceramic to be welded, and the brazing filler metal is arranged on a brazing surface; and a metal to be welded, which is annular and is arranged on the brazing filler metal, wherein the metal to be welded has an outer diameter equal to that of the ceramic to be welded, the annular metal to be welded has an annular protrusion extending along an inner diameter direction, and the inner diameter of the annular protrusion is smaller than that of the brazing filler metal. This makes it possible to provide a soldering structure for soldering using a relatively brittle solder.

Description

Brazing structure of ceramic and metal

Technical Field

The utility model particularly relates to a structure of brazing of pottery and metal.

Background

In the existing micro device, the interconnection of metal and ceramic is realized by a plurality of new welding techniques besides the traditional brazing technique, such as diffusion welding, friction welding, hot-press welding and the like. However, the reliability of these new welding techniques is not comparable to that of conventional brazing techniques. Therefore, the traditional brazing method is still adopted in industries with high reliability requirements (such as aerospace, military industry, medical treatment and the like). In the existing welding technology, the welding difficulty is directly related to the welding area during brazing, and the smaller the welding area is, the lower the difficulty is.

For the brazed structure in the prior micro device, as shown in fig. 1, the brazed structure comprises ceramic, solder and metal. The whole brazing structure is vertically arranged; then processing the brazing filler metal into filaments to be wound around the ceramic, or processing the brazing filler metal into rings to be placed around the ceramic; and then heating to ensure that the temperature is higher than the melting point of the brazing filler metal, and dissolving the brazing filler metal and flowing downwards under the action of gravity to finish the brazing process. However, this brazing technique has several problems, such as the overall brazed structure profile is much larger than the ceramic profile, which is very disadvantageous for miniaturization; brazing filler metal filaments are wound outside the disc-shaped ceramic, so that the efficiency is low; if the ceramic plate is thicker, the brazing filler metal needs to be processed to be longer and thinner, the current processing method is difficult to achieve, and even if the processing method can be achieved, the cost is very high; further, if the brazing filler metal is brittle and is very easily broken or broken, it cannot be processed into a filament or a tube. The current welding structure can not meet the requirements.

Disclosure of Invention

The present invention has been made in view of the above-mentioned state of the art, and an object of the present invention is to provide a soldering structure capable of soldering using a brittle solder.

Therefore, the utility model provides a structure of brazing of pottery and metal, a serial communication port, include: the ceramic to be welded is disc-shaped, and the ceramic to be welded is provided with a brazing surface subjected to surface grinding and metallization treatment; the brazing filler metal is in an annular sheet shape, the outer diameter of the brazing filler metal is smaller than that of the ceramic to be brazed, and the brazing filler metal is arranged on the brazing surface; and the metal to be welded is annular and is arranged on the metal brazing filler metal, the metal to be welded has the outer diameter equal to that of the ceramic to be welded, the annular metal to be welded has an annular protrusion extending along the inner diameter direction, the inner diameter of the annular protrusion is smaller than the inner diameter of the metal brazing filler metal, the metal to be welded is subjected to surface treatment, and the metal to be welded is integrally formed, wherein the metal brazing filler metal is arranged between the ceramic to be welded and the metal to be welded.

The utility model discloses in, the structure of brazing of pottery and metal has included the brazing surface that has through surface grinding and metallization processing treats the brazing ceramic, arranges the lamellar brazing filler metal on the brazing surface, sets up on brazing filler metal and treats the brazing metal to the structure level of brazing stacks and forms. In the brazing structure, a brazing filler metal is provided between ceramics to be welded and metals to be welded. In the brazing process, the brazing structures are horizontally stacked, pressure is applied to the ceramic to be welded and the metal to be welded respectively, then the brazing filler metal is heated according to a specified temperature curve, the brazing filler metal is rapidly heated to be molten in the temperature curve, the molten state of preset time is kept, the interface between the brazing filler metal and the ceramic to be welded is formed into a welding surface, and annealing and solidification are carried out. Under the condition, plane brazing can be carried out in the horizontal direction, the wettability of the metal to be welded and the ceramic to be welded can be increased by processing the surface of the metal to be welded and the ceramic to be welded, the consistency of the width and the edge of a brazing seam can be controlled by applying pressure to the ceramic to be welded and the metal to be welded, a brazing structure can be fixed during brazing, and the metal brazing filler metal can be controlled to flow by rapidly heating during brazing and immediately cooling after keeping a transient molten state. Therefore, the planar brazing can be performed in the horizontal direction using a brittle brazing material.

In the brazing structure according to the present invention, the metallization may be performed only at the edge of the brazing surface. In this case, an intermediate metal layer can be formed on the edge position of the ceramic to be welded.

Further, in the brazing structure according to the present invention, optionally, the edge position is formed with an annular intermediate metal layer having an annular width equal to that of the metal to be welded. Therefore, the brazing of the ceramic to be welded and the metal to be welded can be facilitated.

In addition, in the brazing structure according to the present invention, the brazing filler metal may be disposed at the edge position. In this case, brazing can be performed on the intermediate metal layer of the ceramic to be welded.

In addition, in the brazing structure according to the present invention, optionally, the brazing filler metal has biocompatibility, and the brazing filler metal is Au, Ag, Ti, Nb, or an alloy thereof. In this case, a brazing layer having biocompatibility can be formed.

In the brazing structure according to the present invention, the ceramic to be brazed may be made of alumina, zirconia, silica, a carbon material, silicon nitride, silicon carbide, titanium oxide, aluminosilicate, or a calcium-aluminum system. In this case, a ceramic to be welded having biocompatibility can be obtained.

In the brazing structure according to the present invention, the metal to be welded may be Ti, Nb, Ni, Zr, Ta, or an alloy thereof. In this case, a metal to be welded having biocompatibility can be obtained.

In the brazing structure according to the present invention, the metallization may be performed by sputtering, vapor deposition, plating, or high-temperature sintering. Thereby, a tightly bonded intermediate metal layer can be formed on the surface of the ceramic to be welded.

In addition, in the brazing structure according to the present invention, the roughness of the surface of the ceramic to be welded may be less than 0.05 μm. In this case, the surface of the ceramic to be welded can be smooth and flat, which is beneficial to the subsequent brazing between the ceramic and the metal.

In addition, in the utility model relates to a structure of brazing, optionally, it is right to use abrasive paper to polish step by step the metal of treating carries out surface treatment, makes the flatness of the metal of treating is 8 mu m to 10 mu m. In this case, the brazing filler metal can be better attached to the metal brazing filler metal and the metal to be welded, and brazing is facilitated.

According to the utility model discloses can provide one kind and can use more fragile brazing filler metal to carry out the structure of brazing.

Drawings

Fig. 1 shows a schematic view of a brazing structure in the prior art.

Fig. 2 shows a schematic view of a brazed structure according to an example of the present invention.

Fig. 3 shows a cross-sectional view of a brazed structure according to an example of the present invention.

Fig. 4 shows a schematic flow chart of a brazing method of ceramic and metal according to an example of the present invention.

Fig. 5 is a cross-sectional view of a soldering jig according to an example of the present invention.

Fig. 6 shows a cross-sectional view of a jig equipped with a brazing structure according to an example of the present invention.

Detailed Description

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic and the ratio of the dimensions of the components and the shapes of the components may be different from the actual ones.

The utility model relates to a structure of brazing of pottery and metal. The brazed ceramic to metal structure may be referred to simply as a brazed structure. In some examples, the brazed structure may refer to a micro-brazed structure.

Fig. 2 shows a schematic view of a brazed structure according to an example of the present invention. Fig. 3 shows a cross-sectional view of a brazed structure according to an example of the present invention.

In the present embodiment, as shown in fig. 2 and 3, the ceramic-to-metal brazing structure 10 may include ceramics to be welded 11, a metal filler metal 12, and metals to be welded 13. The ceramic 11 to be welded may be disk-shaped, the brazing metal 12 may be ring-shaped sheet-shaped, and the metal 13 to be welded may be ring-shaped. In addition, a metal filler 12 may be disposed on the ceramics to be welded 11, a metal to be welded 13 may be disposed on the metal filler 12, and the metal filler 12 may be disposed between the ceramics to be welded 11 and the metal to be welded 13. In some examples, the brazed structure 10 may be formed by stacking horizontally and applying pressure to the ceramic 11 to be welded and the metal 13 to be welded, respectively. In addition, the shape of the brazed structure 10 is not particularly limited, and in some examples, the brazed structure 10 may be cylindrical.

In some examples, the ceramic to be welded 11 may have a brazing surface that is surface-ground and metallized, the metal to be welded 13 may be surface-treated, and the metal filler 12 may be disposed on the brazing surface. In addition, in some examples, the outer diameter of the metal filler 12 may be smaller than the outer diameter of the ceramics 11 to be welded, and the metal 13 to be welded may have the same outer diameter as the ceramics 11 to be welded. In other examples, the ring-shaped metal 13 to be welded may have a ring-shaped protrusion 131 extending in the inner diameter direction, and the inner diameter of the ring-shaped protrusion 131 may be smaller than the inner diameter of the brazing filler metal 12. In addition, the metal to be welded 13 may be integrally formed.

In some examples, in the brazing, the interface between the brazing filler metal 12 and the ceramics 11 to be welded is formed as a welding surface, and annealing and solidification are performed by heating the brazing filler metal 12 in a prescribed temperature profile in which the brazing filler metal 12 is heated to be molten and is maintained in a molten state for a predetermined time.

The soldering structure 10 according to the present embodiment includes a ceramic material to be soldered 11 having a soldering surface subjected to surface polishing and metallization, a sheet-like brazing material 12 disposed on the soldering surface, and a metal material to be soldered 13 provided on the brazing material 12, and the soldering structure 10 is formed by horizontally stacking. In this brazing structure 10, a brazing filler metal 12 is provided between a ceramic 11 to be welded and a metal 13 to be welded. In the brazing process, the brazing structure 10 is horizontally stacked, pressure is applied to the ceramic 11 to be welded and the metal 13 to be welded respectively, then the brazing filler metal 12 is heated according to a specified temperature curve, in the temperature curve, the brazing filler metal 12 is rapidly heated to be molten, and the molten state is kept for a predetermined time, so that the interface between the brazing filler metal 12 and the ceramic 11 to be welded is formed into a welding surface, and annealing and solidification are performed. In this case, planar brazing can be performed in the horizontal direction, wettability of the metal 13 to be welded and the ceramic 11 to be welded can be increased by processing the surfaces of the metal 13 to be welded and the ceramic 11 to be welded, consistency of the width of a brazing seam and the edge thereof can be controlled by applying pressure to the ceramic 11 to be welded and the metal 13 to be welded, the brazed structure 10 can be fixed at the time of brazing, and sagging of the brazing filler metal 12 can be controlled by rapidly raising the temperature at the time of brazing and immediately lowering the temperature after maintaining a short molten state. Therefore, the planar brazing can be performed in the horizontal direction using a brittle brazing material.

In some examples, the ceramic to be welded 11 may be biocompatible. This can reduce the destruction to the human body and can adapt to the human tissue. In addition, in some examples, the ceramic to be welded 11 may be an oxide ceramic. Thereby, the ceramics to be welded 11 having stable chemical properties can be obtained.

In some examples, the ceramic to be welded 11 may be made of alumina (Al)₂O₃) Zirconium oxide (ZrO)₂) Silicon oxide (SiO)₂) Titanium oxide (TiO)₂) Aluminosilicate (Na)₂O·Al₂O₃·SiO₂) Or calcium-aluminum (CaO. Al)₂O₃) And (4) forming. Thereby, the to-be-welded ceramic 11 having biocompatibility can be obtained.

In some examples, the ceramic to be welded 11 may be alumina (Al)₂O₃) A ceramic. In some examples, the ceramic to be welded 11 is preferably made of alumina (Al) with a mass fraction of 96% or more₂O₃) And (4) forming. More preferably, the ceramic to be welded 11 is composed of alumina (Al) with a mass fraction of 99% or more₂O₃) Most preferably, the ceramic to be welded 11 is composed of alumina (Al) of 99.99% by mass or more₂O₃) And (4) forming. In general, among the ceramics 11 to be welded, alumina (Al)₂O₃) Mass fractionThe increase in the number of the alumina particles increases the main crystal phase, and the physical properties of the to-be-welded ceramic 11, such as the pre-compression strength, the bending strength, and the elastic modulus, are improved, whereby it is considered that the alumina (Al) has a higher mass fraction₂O₃) Better biocompatibility and long-term reliability are exhibited. In other examples, the ceramic to be welded 11 may also be zirconium oxide (ZrO)₂) A ceramic.

In some examples, the ceramic to be welded 11 may be a non-oxide ceramic. For example, the ceramic to be welded 11 may be a carbon material (C), silicon nitride (Si)₃N₄) And silicon carbide (SiC).

In some examples, the ceramic to be welded 11 may also be made of silicon oxide (SiO), depending on the application₂) Potassium oxide (K)₂O), sodium oxide (Na)₂O), calcium oxide (CaO), magnesium oxide (MgO), iron oxide (Fe)₂O₃) At least one of (1). In some examples, the ceramic to be welded 11 may have a ground surface. In other examples, the ceramic to be welded 11 may include upper and lower surfaces. This makes it possible to obtain a polished surface obtained by polishing at least one of the upper and lower surfaces of the ceramic 11 to be welded. In this case, since the object to be ground is at least one of the upper and lower surfaces of the ceramic 11 to be welded, the difficulty of the grinding process can be reduced, and it is facilitated to grind the surface of the ceramic 11 to be welded to be flat and smooth, thereby improving the wettability of the surface of the ceramic 11 to be welded. In addition, the polishing surface is metallized to form an intermediate metal layer. That is, an intermediate metal layer may be formed on the polished surface.

In addition, in some examples, the roughness of at least one of the upper and lower surfaces of the ceramic to be welded 11 may be less than 0.05 μm. In this case, the surface of the ceramic 11 to be welded can be made smooth and flat, facilitating subsequent brazing between the ceramic and the metal. In some examples, the roughness of the surface of the ceramic to be welded 11 may be 0.04 μm, 0.03 μm, 0.02 μm, 0.01 μm, or the like.

In some examples, the ceramic to be welded 11 may be disk-shaped. However, examples of the present invention are not limited thereto, and for example, the ceramic to be welded 11 may be square.

In some examples, the ceramic to be welded 11 may have a brazed surface that has been surface ground and metallized. That is, the surface of the ceramic 11 to be soldered can be polished and metallized to form a soldered surface. Therefore, the metal solder 12 can well infiltrate the ceramic 11 to be soldered with metalized surface, and the intermediate metal layer can make the thermal expansion coefficient of the soldered surface of the ceramic 11 to be soldered and the soldered surface of the metal 13 to be soldered present gradient transition, thereby reducing the thermal expansion coefficient difference between interfaces caused by different materials, reducing the interface layer thermal stress and improving the air tightness.

Additionally, in some examples, the metallization may be limited to only the edge locations of the braze face. In other words, a metalized braze surface may be formed at the edge of the ground surface to match the braze 12. In this case, the intermediate metal layer can be formed at the position of the ceramic to be welded 11 that is brazed with the metal to be welded 13. In other examples, the metallization may be performed over the entire braze surface. In other examples, the metallization may be performed only in the middle of the brazing surface.

In some examples, the edge locations may be formed with an intermediate metal layer. Thereby, the welding between the ceramic 11 to be welded and the metal 13 to be welded can be facilitated. Additionally, in some examples, the intermediate metal layer may be ring-shaped. Additionally, in some examples, the middle metal layer may have a ring width equal to the metal to be welded 13. Therefore, the welding between the ceramic to be welded and the metal to be welded can be facilitated.

In some examples, the loop width of the middle metal layer may be slightly larger than the loop width of the metal to be welded 13. Additionally, in some examples, the loop width of the middle metal layer may be slightly less than the loop width of the metal to be welded 13.

Additionally, in some examples, the metallization process may be by sputtering, evaporation, plating, or high temperature sintering. This enables the formation of an intermediate metal layer bonded to the surface of the ceramic 11 to be welded. In some examples, the method of metallization is preferably sputtering.

In some examples, the method of metallization may be PVD (physical vapor deposition) or CVD (chemical vapor deposition). In other examples, the metallization process may be magnetron sputtering. Additionally, in some examples, the method of metallization may be a low temperature processing method. For example, the temperature of magnetron sputtering may not exceed 300 ℃.

In some examples, the intermediate metal layer may be composed of at least one selected from Nb, Au, Ti, and alloys thereof. Thus, the brazing filler metal 12 can well wet the ceramics to be welded 11 having the intermediate metal layer on the surface. In addition, in some examples, the intermediate metal layer may be composed of Nb, in other words, the intermediate metal layer may be a niobium layer formed of Nb. Further, the intermediate metal layer made of Nb has good bonding ability with the alumina ceramic, and thus can contribute to improvement in the reliability of brazing the ceramics to be welded 11 and the metal to be welded 13.

In some examples, the intermediate metal layer may be placed under a microscope to observe the intermediate metal layer mass at 500 x to 1000 x magnification. For example, it is observed whether the intermediate metal layer is tight, whether the appearance is flat, or the like.

In the present embodiment, the brazing filler metal 12 may be in a sheet shape. In some examples, as shown in fig. 2, the brazing filler metal 12 may be in the form of a ring-shaped sheet. In addition, a metal filler 12 may be disposed on the brazing surface. In some examples, the metallic filler metal 12 may be disposed on an intermediate metal layer.

In some examples, as shown in fig. 3, the metallic filler metal 12 may be disposed on an edge location. In this case, brazing can be performed on the intermediate metal layer of the ceramic 11 to be welded. In other examples, the metal filler 12 may be disposed over the entire brazing surface. In some examples, the metal filler metal 12 may be disposed at an intermediate position of the brazing surface.

Additionally, in some examples, the metallic filler metal 12 may be biocompatible. This can reduce the destruction to the human body and can adapt to the human tissue. The braze metal 12 may be Au, Ag, Ti, Nb, or alloys thereof. In this case, a brazing layer having biocompatibility can be formed. For example, the metallic solder 12 may be pure Au. In addition, in some examples, the molten pure Au has good wettability to the niobium layer, and thus can contribute to improvement in the reliability of soldering the ceramic 11 to be soldered and the metal 13 to be soldered.

Additionally, in some examples, the braze metal 12 may be pre-treated. In some examples, the braze metal 12 may be surface treated using progressive sanding. This makes it possible to remove the oxide film on the surface, which contributes to improvement in reliability of the interface layer. For example, in some examples, the braze metal 12 may be sanded in stages with #200, #400, #600, #1200, #2000, and #4000 sandpaper. In some examples, the brazing filler metal 12 may be sanded with #100, #300, #500, #1000, #1500, #2500, and #4000 sandpaper in stages. In some examples, the brazing filler metal 12 may be sanded with #280, #400, #800, #1600, #2500, #3500, and #5000 sandpaper in stages.

In the present embodiment, the brazing filler metal 12 may be in the form of powder, paste, wire, or strip. For example, in some examples, the braze metal 12 may be in powder form. In other examples, the brazing filler metal 12 may be in the form of a paste.

In addition, in some examples, as shown in fig. 3, a metal filler 12 may be provided between the ceramics 11 to be welded and a metal 13 to be welded (described later in detail). In some examples, the metal to be welded 13 may be annular. In other examples, the ceramic to be welded 11, the brazing filler metal 12, and the metal to be welded 13 may be horizontally stacked in this order to form the brazed structure 10.

In the present invention, as shown in fig. 3, the metal 13 to be welded may be provided on the brazing filler metal 12. In some examples, as shown in FIG. 3, the outer diameters of the ceramic to be welded 11 and the metal to be welded 13 may be substantially the same. In this case, the fitting and fixing of the ceramics to be welded 11 and the metal to be welded 13 in the subsequent brazing process can be facilitated. In addition, since the outer diameters of the ceramics to be welded 11 and the metals to be welded 13 can be substantially the same, and the ceramics to be welded 11, the metals to be welded 13, and the brazing filler metal 12 can be horizontally stacked in this order in the brazed structure 10, it is possible to facilitate miniaturization of the brazed structure 10. In addition, the outer diameter of the metal to be welded 13 may be smaller than the outer diameter of the ceramic to be welded 11.

In some examples, the metal to be welded 13 is biocompatible. This can reduce the destruction to the human body and can adapt to the human tissue.

In some examples, the metal to be welded 13 may be Ti (titanium), Nb (niobium), Ni (nickel), Zr (zirconium), Ta (tantalum), or an alloy thereof. In this case, the metal to be welded 13 having biocompatibility can be obtained. In addition, in some examples, the metal to be welded 13 may be pure Ti. In other examples, the metal to be welded 13 may be a Ti alloy. Additionally, in some examples, the metal to be welded 13 may be an iron-nickel alloy.

In addition, in some examples, as shown in fig. 3, the metal to be welded 13 may have an annular protrusion 131. In this case, subsequent mating of the brazed structure 10 with other components (not shown) is facilitated. In some examples, the metal to be welded 13 may be formed integrally.

In some examples, the annular protrusion 131 may extend in the inner diameter direction. In addition, in some examples, the inner diameter of the annular protrusion 131 may be smaller than the inner diameter of the brazing filler metal 12. That is, the inner diameter of the annular protrusion 131 may be smaller than the inner diameter of the brazing filler metal 12.

In addition, in the present embodiment, the metal 13 to be welded may be surface-treated. In some examples, the metal to be welded 13 may be surface-treated using sand paper stepwise sanding so that the flatness of the metal to be welded 13 may be 8 μm to 10 μm. In this case, the brazing filler metal 12 and the metal 13 to be welded can be bonded better, and brazing is facilitated. For example, in some examples, the metal 13 to be welded may be progressively ground with #200, #400, #600, #1200, #2000, and #4000 sandpaper. In some examples, the metal 13 to be welded may be progressively ground with #100, #300, #500, #1000, #1500, #2500, and #4000 sandpaper. In some examples, the metal 13 to be welded may be progressively ground with #280, #400, #800, #1600, #2500, #3500, and #5000 sandpaper. In addition, in some examples, the flatness of the metal 13 to be welded may be 8 μm, 8.2 μm, 8.5 μm, 8.8 μm, 9 μm, 9.2 μm, 9.5 μm, 9.8 μm, or 10 μm.

In addition, in some examples, the amount of flatness of the metal 13 to be welded may be affected by the thickness of the metal filler 12. The thicker the thickness of the metal filler metal 12, the greater the tolerance of the flatness of the metal 13 to be welded, and conversely, the smaller the tolerance of the flatness of the metal 13 to be welded.

In addition, in some examples, the metal to be welded 13 after grinding may be cleaned. This can remove foreign matter on the surface of the metal to be welded 13, which is advantageous for the subsequent brazing. In some examples, the ground metal to be welded 13 may be washed with ethanol for 10 to 20min and then with isopropanol for 10 to 20 min. For example, the metal to be welded 13 after polishing may be cleaned with ethanol for 15min and then with isopropanol for 15 min.

In addition, in some examples, pressure may be applied to the ceramic 11 to be welded and the metal 13 to be welded, respectively, in which case both the occurrence of displacement of the brazed structure 10 can be reduced and the uniformity of the seam width and its edges can be assisted in control.

In some examples, the brazed structure 10 may consist of only biocompatible materials. In addition, the device formed by brazing the brazed structure 10 can be applied to the medical industry. For example, it can be implanted in the human body as an implant. Additionally, in some examples, the brazed structure 10 implanted as an implant in the human body may be a miniaturized brazed structure 10. For example, the miniaturized brazed structure 10 may be implanted as an implant in a human eyeball, ear, or the like. In other examples, the brazed structure 10 may include a non-biocompatible material, depending on practical requirements.

In some examples, in the brazing structure 10, the shapes of the ceramics to be welded 11, the metals to be welded 13, and the brazing filler metal 12 may be matched. For example, the ceramic to be welded 11 may have a disk shape, the metal to be welded 13 may have a ring shape, and the brazing filler metal 12 may have a ring-shaped sheet shape.

In some examples, the dimensions of the ceramic to be welded 11, the metal to be welded 13, and the brazing filler metal 12 may be matched in the brazed structure 10. For example, the outer diameter of the metal filler 12 may be slightly smaller than the outer diameter of the ceramics 11 to be welded, and the outer diameter of the metal 13 to be welded may be approximately equal to the outer diameter of the ceramics 11 to be welded.

In addition, in some examples, the outer diameter of the metal to be welded 13 may be slightly larger than the outer diameter of the ceramic to be welded 11. In other examples, the outer diameter of the metal to be welded 13 may be slightly smaller than the outer diameter of the ceramic to be welded 11.

In some examples, the difference between the outer diameter of the ceramic 11 to be welded and the outer diameter of the metallic filler 12 may not exceed 0.05 mm. For example, the difference between the outer diameter of the ceramic 11 to be welded and the outer diameter of the brazing filler metal 12 may be 0.01mm, 0.02mm, 0.03mm, 0.04mm, 0.05mm, or the like.

In some examples, the inner diameter of the metal filler metal 12 may be slightly smaller than the inner diameter of the metal 13 to be welded. In other words, the ring width of the brazing metal 12 may be slightly smaller than the ring width of the metal 13 to be welded. In other examples, the difference between the inner diameter of the metal filler 12 and the inner diameter of the metal 13 to be welded may not exceed 0.05 mm. For example, the difference between the inner diameter of the brazing metal 12 and the inner diameter of the metal 13 to be welded may be 0.01mm, 0.02mm, 0.03mm, 0.04mm, 0.05mm, or the like. In addition, the inner diameter of the metal to be welded 13 may refer to the inner diameter of the annular protrusion 131.

In some examples, the inner diameter of the intermediate metal layer may be approximately equal to the inner diameter of the metal to be welded 13. Additionally, in some examples, the outer diameter of the middle metal layer may be approximately equal to the outer diameter of the metal 13 to be welded.

In some examples, the outer diameter of the ceramic to be welded 11 may be 10mm to 9.9 mm. For example, the outer diameter of the ceramic 11 to be welded may be 9.9mm, 9.91mm, 9.92mm, 9.93mm, 9.94mm, 9.95mm, 9.96mm, 9.97mm, 9.98mm, 9.99mm, or 10 mm.

In some examples, the outer diameter of the metal to be welded 13 may be 10.1mm to 9.9 mm. For example, the outer diameter of the metal 13 to be welded may be 9.9mm, 9.92mm, 9.95mm, 9.98mm, 10mm, 10.02mm, 10.05mm, 10.08mm, or 10.1 mm.

In some examples, the inner diameter of the metal to be welded 13 may be 8.9mm to 8.7 mm. For example, the inner diameter of the metal 13 to be welded may be 8.7mm, 8.72mm, 8.75mm, 8.78mm, 8.8mm, 8.82mm, 8.85mm, 8.88mm or 8.9 mm.

In some examples, the ring width of the metal to be welded 13 may be 0.5mm to 0.7 mm. For example, the ring width of the metal 13 to be welded may be 0.5mm, 0.52mm, 0.55mm, 0.58mm, 0.6mm, 0.62mm, 0.65mm, 0.68mm, or 0.7 mm.

In other examples, the thickness of the brazing filler metal 12 may be 80 μm to 120 μm. For example, the thickness of the brazing filler metal 12 may be 80 μm, 85 μm, 90 μm, 95 μm, 100 μm, 105 μm, 110 μm, 115 μm, or 120 μm.

In some examples, the brazed structure 10 may be composed of alumina ceramic, titanium rings, and pure gold braze. In addition, the outer diameter of the ceramic 11 to be welded may be 10 mm; the metal to be welded 13 may have an outer diameter of 10mm, an inner diameter of 8.8mm and a ring width of 0.6 mm; the braze metal 12 may have an outer diameter of 9.98mm, an inner diameter of 8.883mm, and a ring width of 0.5485 mm.

In some examples, the thickness of the solder before soldering may be 100 μm. The thickness after soldering may be 80 μm. In addition, the metallization forming the intermediate layer may have an outer diameter of 10mm, an inner diameter of 8.8mm and a ring width of 0.6 mm.

Additionally, in some examples, the brazed structure 10 may be composed of a non-biocompatible material, depending on the application. For example, the ceramic 11 to be welded may also be made of a material selected from silicon oxide (SiO)₂) Potassium oxide (K)₂O), sodium oxide (Na)₂O), calcium oxide (CaO), magnesium oxide (MgO), iron oxide (Fe)₂O₃) At least one of (1). The metal to be welded 13 may be made of at least one selected from copper (Cu), iron (Fe), magnesium (Mg), lead (Pb), aluminum (Al), and alloys thereof, and the like.

In addition, in some examples, the direction of assembly of the brazed structure 10 may tend to be horizontal regardless of the shape and size of the ceramic and metal, and the direction of flow of the braze metal 12 may be horizontal.

Hereinafter, the assembly process and the brazing method of the brazed structure 10 according to the present embodiment will be described in detail.

Fig. 4 shows a schematic flow chart of a brazing method of ceramic and metal according to an example of the present invention. In the present embodiment, as shown in fig. 4, the brazing method of ceramics and metal may include preparing ceramics 11 to be welded and metal 13 to be welded, and performing surface treatment on the ceramics 11 to be welded so that the surface of the ceramics 11 to be welded is formed into a smooth surface (step S10); a metallizing process is performed on the surface of a ceramic 11 to be welded to form an intermediate metal layer bonded to the ceramic 11 to be welded, the coefficient of thermal expansion of the ceramic 11 to be welded is matched with that of the intermediate metal layer (step S20), and the ceramic 11 to be welded, a brazing filler metal 12 and a metal 13 to be welded are sequentially stacked and brazed, and in the process of brazing, the brazing filler metal 12 is heated according to a predetermined temperature profile in which the brazing filler metal 12 is heated to be molten and is kept in a molten state for a predetermined time, so that the interface between the brazing filler metal 12 and the ceramic 11 to be welded is formed as a welding surface, and annealing and solidification are performed (step S30).

The utility model discloses in, the method of brazing of pottery and metal has included treating to weld pottery 11 and has carried out surface treatment, and treat the surface of welding pottery 11 through metallization, form the intermediate metal layer that has the matching coefficient of thermal expansion, under this condition, infiltration surface that brazing filler metal 12 can be fine treats welding pottery 11 through metallization, and intermediate metal layer can make treat welding pottery 11 and treat that the brazing surface coefficient of thermal expansion of weld metal 13 presents the gradient transition, thereby can reduce the difference of the coefficient of thermal expansion that leads to because of the material difference between the interface, reduce interface layer thermal stress and improve gas tightness performance.

In addition, in some examples, the generation and distribution of interfacial brittle phases (brittle compounds) can be improved by selecting proper brazing temperature and holding time during brazing, the strength is increased, the thermal stress and the thermal deformation of base materials (ceramic to be welded 11 and metal to be welded 13) are reduced, cracks in a weld joint are eliminated, and the air tightness and the shear strength of an interface layer between the ceramic to be welded 11 and the metal to be welded 13 are improved.

In addition, in some examples, in step S10, the surface of the ceramic to be soldered 11 may be ground and polished to a surface roughness of less than 0.05 μm. In this case, the surface of the ceramic 11 to be welded is smooth and flat, facilitating the subsequent brazing between the ceramic and the metal. In some examples, in step S10, the surface of the ceramic to be welded 11 may be subjected to a grinding process to form a ground surface.

In some examples, the ceramic to be welded 11 may include upper and lower surfaces. This makes it possible to obtain a polished surface obtained by polishing at least one of the upper and lower surfaces of the ceramic 11 to be welded. In this case, since the object to be ground is at least one of the upper and lower surfaces of the ceramic 11 to be welded, the difficulty of the grinding process can be reduced, which contributes to grinding the surface of the ceramic 11 to be welded to be flat and smooth, thereby improving the surface wettability of the ceramic 11 to be welded.

In some examples, before step S20, a surface treatment may be further included on the metal to be welded 13. For example, the metals 13 to be welded may be surface-treated by stepwise sanding using #200, #400, #600, #1200, #2000 and #4000 sandpapers.

In addition, in some examples, the flatness of the metal to be welded 13 after surface treatment may be 8 to 10 μm. For example, the flatness of the metal 13 to be welded after surface treatment may be 8, 8.2, 8.5, 8.8, 9, 9.2, 9.5, 9.8, or 10 μm.

In addition, in some examples, before step S20, cleaning of the ground metal 13 to be welded may be included. For example, the metal to be welded 13 after polishing may be cleaned with ethanol for 15min and then with isopropanol for 15 min.

In the present invention, the metallization process in step S20 can be referred to as the metallization process of the metal 13 to be welded in the above-described brazed structure 10.

In addition, in some examples, in step S20, magnetron sputtering may be used to sputter Nb onto the positions to be brazed of the ceramics 11 to be brazed, and the sputtered Nb may become a flat intermediate metal layer on the positions to be brazed. In some examples, as shown in fig. 3, the position to be brazed may be an edge position of the ceramic to be brazed 11 covered with the brazing metal 12.

In addition, in some examples, in step S20, the thermal expansion coefficient of the ceramic to be welded 11 is matched with the thermal expansion coefficient of the intermediate metal layer, that is, the thermal expansion coefficient of the intermediate metal layer may be between the thermal expansion coefficient of the ceramic to be welded 11 and the thermal expansion coefficient of the metal to be welded 13, so that the thermal expansion coefficient of the interface between the ceramic to be welded 11 and the metal to be welded 13 can be in a gradient transition, the difference in the thermal expansion coefficients of the interfaces due to the difference in materials is reduced, the thermal stress of the interface is reduced, and the performance is improved.

In addition, in some examples, in step S20, cleaning of the ceramic to be welded 11 with the intermediate metal layer may be included. This can remove foreign matter on the surface of the ceramic 11 to be welded, which is advantageous for the subsequent brazing. For example, in some examples, the ceramic to be welded 11 with the intermediate metal layer may be cleaned with ethanol for 4min and then with isopropanol for 4 min.

In addition, in some examples, in step S30, the ceramic 11 to be welded may be first placed in the jig 1 (described in detail with reference to the drawings later), then the brazing metal 12 is placed, and then the metal 13 to be welded is placed, so that the assembly of the brazed structure 10 in the jig 1 may be completed, and then the brazing process may be performed.

In addition, in some examples, in the process of performing brazing, the brazing filler metal 12 may be heated by a prescribed temperature profile in which the brazing filler metal 12 is heated to be molten and kept in a molten state for a predetermined time, the interface between the brazing filler metal 12 and the ceramics 11 to be welded is formed as a welding surface, and annealing and solidification are performed. This facilitates control of the flow of the brazing filler metal 12, and prevents the molten brazing filler metal 12 from flowing outward to both sides.

In addition, in some examples, in step S30, the temperature of the brazed structure 10 may be raised to 1060 ℃ to 1150 ℃ at a heating rate of 1 ℃/min to 50 ℃/min, held for 1min to 30min, then lowered to 200 ℃ to 400 ℃ at a cooling rate of 2 ℃/min to 20 ℃/min, and then furnace-cooled to below 150 ℃. Wherein 1060 ℃ to 1150 ℃ can be used as the brazing temperature. In this case, by rapidly raising the temperature during brazing and maintaining the molten state for a short time and then immediately lowering the temperature, it is possible to control the flow of the brazing filler metal 12, improve the generation and distribution of brittle phases between interfaces, increase the strength, reduce the thermal stress and the thermal deformation of the base metal, eliminate cracks in the weld, and improve the airtightness and the shear strength of the interface layer between the ceramic 11 to be welded and the metal 13 to be welded.

In addition, in some examples, in step S30, the temperature may be raised to 1060 ℃ at a heating rate of 20 ℃/min, held for 1min, then lowered to 400 ℃ at a cooling rate of 10 ℃/min, and then furnace-cooled to 150 ℃. In other examples, the temperature may be increased to 1065 ℃ at a heating rate of 15 ℃/min, held for 3min, then decreased to 250 ℃ at a cooling rate of 12 ℃/min, and then furnace cooled to 140 ℃. In addition, in some examples, the temperature may be raised to 1100 ℃ at a heating rate of 30 ℃/min, held for 5min, then lowered to 300 ℃ at a cooling rate of 8 ℃/min, and then furnace cooled to 120 ℃.

In some examples, the brazing temperature may also be 850 ℃, 900 ℃, 950 ℃, 1000 ℃, 1050 ℃, 1150 ℃, 1200 ℃, etc., depending on the selected brazing filler metal (i.e., the metallic brazing filler metal 12).

In addition, in the brazing process, the brazing filler metal 12 can be annealed and solidified by rapidly heating until the brazing filler metal is melted, keeping the temperature for a short time and then immediately cooling, so that the outward flowing of the molten brazing filler metal 12 can be controlled by regulating and controlling the temperature.

In addition, during the brazing process, the molten brazing filler metal 12 is discharged to both sides by the pressure but does not flow out, so that the volume of the brazing filler metal 12 before and after brazing is not changed. In addition, in some examples, the amount of the metal 13 to be welded is small, so the pressure to which the molten metal filler metal 12 is subjected is derived from the compacts 30 (see fig. 5), that is, the pressure to which the molten metal filler metal 12 is subjected is equal to the gravity of the compacts 30, and in this case, the mass of the portion of the molten metal filler metal 12 discharged to both sides due to the pressure to which it is subjected may be equal to the mass of the compacts 30, that is, the mass of the compacts 30 may be equal to the density of the metal filler metal 12 multiplied by the volume of the discharged portion. Therefore, the mass of the compact 30 can be obtained through a plurality of experiments, simulation calculations, and the like, so that the molten metal filler metal 12 does not flow outward under the pressure applied by the compact 30.

The brazing jig 1 used in step S30 according to the present embodiment will be described in detail below with reference to the drawings. Fig. 5 is a cross-sectional view of a soldering jig 1 according to an example of the present invention. Fig. 6 shows a cross-sectional view of a jig 1 equipped with a brazed structure 10 according to an example of the present invention. In fig. 5, a cover body that engages with the stage 20 is omitted for convenience of illustration of the structure of the stage 20.

In the present embodiment, as shown in fig. 5 and 6, a jig for brazing (may be simply referred to as "jig") 1 may have a stage 20 and a compact 30 that fits to the stage 20. In step S30, the brazing structure 10 may be realized by sequentially placing the brazing structure 10 (the ceramics 11 to be welded, the metal filler 12, and the metal 13 to be welded) on the stage 20, and disposing the compact 30 engaged with the stage 20 on the brazing structure 10.

Additionally, in some examples, the stage 20 may be semi-cylindrical. In this case, brazing can be performed better. For example, the semi-cylindrical stage 20 may be placed in a brazing tube furnace (not shown) having a cylindrical furnace tube and brazed. In addition, the shape of the stage 20 may match the shape of the furnace tube of the brazing tube furnace. In this case, the fixture 1 is advantageously fixed in the brazing tube furnace, and the brazing can be performed better. For example, the furnace tube of the brazing tube furnace may be prismatic, and the stage 20 may also be prismatic.

In the present embodiment, a vacuum pump (not shown) may be connected to the brazing tube furnace. In some examples, the vacuum level within a brazing tube furnace (not shown) may be 10^-4pa. In other examples, the vacuum level in a brazing tube furnace (not shown) may be 10^-3pa. Additionally, in some examples, the vacuum within a brazing tube furnace (not shown) may be 10 degrees f^-2pa。

Additionally, in some examples, the vacuum within the brazing tube furnace (not shown) may also be 8 × 10 depending on the braze (braze metal 12) selected^-3pa、5×10^-3pa、3×10^-3pa、7×10^-2pa、5×10^-2pa、 2×10^-2pa or 1 pa.

In addition, in the present embodiment, the stage 20 may have a groove 21. Wherein the groove 21 may be used for placing the brazed structure 10. As shown in fig. 6, the brazed structure 10 may be placed in the groove 21.

In addition, in some examples, the stage 20 may have a through hole 22 (see fig. 6). In addition, the through-hole 22 may penetrate the bottom 21a of the groove 21. In some examples, the stage 20 may have at least one groove (e.g., the groove 21 in fig. 5, fig. 5 showing an example of four grooves), and a through-hole (through-hole 22) penetrating the stage 20 from a bottom 21a of the groove (groove 21).

In some examples, the groove 21 may be used to place the brazing structure 10 (including the ceramic to be welded 11, the metal filler 12, and the metal to be welded 13) and may be capable of cooperating with the compact 30. Additionally, in some examples, the compact 30 may have a vent 31.

In addition, when the plurality of grooves 21 are provided in the stage 20, the plurality of brazed structures 10 can be simultaneously brazed in a batch manner, and the work efficiency can be improved. For example, in addition to the illustration of fig. 5, there may be 2, 8, 12, 16 or 20 grooves 21 in the stage 20.

In addition, in the present embodiment, the compact 30 can fix the brazed structure 10 during the brazing process, and prevent the brazed structure 10 from being displaced during the brazing process. The through holes 22 and the vent holes 31 of the jig 1 can form gas flow, so that the temperature distribution of the jig 1 can be uniform in the brazing process, the brazing structure 10 can be heated uniformly, and the vent holes 31 can discharge impurities such as metal vapor generated in the brazing process, so that the brazing structure 10 is prevented from being polluted.

In addition, in some examples, the bottom 21a of the groove 21 may be flat (see fig. 5). Thereby, the brazing structure 10 can be smoothly placed at the bottom 21a of the groove 21.

In some examples, the groove 21 may be cylindrical. In this case, the same cylindrical brazing structure 10 can be applied in particular. However, the present embodiment is not limited thereto, and in some examples, the groove 21 may have a prism shape or the like. For example, in some examples, the groove 21 may also have a rectangular parallelepiped shape. In other examples, the groove 21 may be square.

In addition, in some examples, the inner diameter of the groove 21 may be equal to the expansion size of the brazed structure 10 at the brazing temperature plus the expansion size of the jig 1 at the brazing temperature plus the reserved size. In some examples, the reserved size may be 0.02mm to 0.03 mm. For example, the reserved size may be 0.02mm, 0.022mm, 0.025mm, 0.028mm, or 0.03 mm.

In addition, in some examples, there can be a flow of hot gas in the through-holes 22, which can provide a uniform temperature distribution within the stage 20 during the brazing process, and thus uniform heating of the brazed structure 10. In addition, the presence of the through-hole 22 also enables easier cleaning of the recess 21. In addition, since the through-hole 22 can penetrate the bottom 21a of the groove 21, the groove 21 can be used for placing the brazing structure 10, and therefore the through-hole 22 can facilitate taking out.

In addition, in some examples, the jig 1 may further include a cover (not shown) covering the stage 20. In this case, the atmosphere during brazing can be protected, and the degree of vacuum can be maintained well.

Additionally, in some examples, the stage 20 may have a groove 23 surrounding the recess 21. The edge of the cover (not shown) may engage with the groove 23. Thereby, the cover (not shown) can cover the stage 20. In some examples, the edge of the cover may snap into the groove 23.

Additionally, in some examples, as shown in fig. 5, the compact 30 may be a combination of two cylinders having different inner diameters. In this compact 30, the cylinder having a small inner diameter has a small diameter and can thus fit into the groove 21, while the cylinder having a large inner diameter has a large diameter and can thus cover the groove 21. In this case, the pressing of the brazing structure 10 can be achieved by the compact 30.

In some examples, the diameter of the cylinder having a small inner diameter may be smaller than the inner diameter of the groove 21 in the pressing block 30. In addition, in some examples, in the compact 30, the diameter of the cylinder having a small inner diameter may be larger than the inner diameter of the metal 13 to be welded. In other examples, the diameter of the cylinder having a large inner diameter may be larger than the inner diameter of the groove 21 in the pressing block 30.

In other examples, compact 30 may be a prism. Additionally, in some examples, the compact 30 may be a circular truncated cone. Additionally, in some examples, the compact 30 is integrally formed. In addition, in some examples, the pressing block 30 may be used to apply pressure to the ceramic 11 to be welded and the metal 13 to be welded.

In some examples, a vent 31 may be provided in the compact 30. Additionally, in some examples, the compact 30 may have a plurality of vent holes 31, for example, the compact 30 may have 2, 3 vent holes 31. In this case, since the gas flow can be formed in the vent hole 31, the temperature distribution in the stage 20 can be made uniform during the brazing process, and the brazed structure 10 can be heated uniformly. In addition, the vent holes 31 can also help to discharge impurities such as metal vapor generated during the brazing process, thereby preventing the brazed structure 10 from being contaminated.

In addition, in the present invention, the plurality of vent holes 31 may have different penetrating directions. In some examples, as shown in fig. 6, the penetrating direction of the vent hole 31 may be a length direction of the compact 30. In this case, the uniformity of heating of the brazed structure 10 can be further improved, and contamination of the brazed structure 10 can be better avoided.

In addition, in some examples, the pressing block 30 may be used to apply pressure to the ceramic to be welded 11 and the metal to be welded 13, respectively. In this case, the uniformity of the width of the brazing seam and its edges can be better controlled and the brazed structure 10 can be secured during brazing.

In addition, in some examples, the brazing structure 10 may be located between the bottom 21a of the groove 21 and the compact 30. This enables the brazed structure 10 to be fixed in the groove 21 well.

In the present embodiment, the material of the stage 20 may be at least one selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide. In some examples, the material of the stage 20 may be graphite. In other examples, the material of the stage 20 may be synthetic stone.

In the present embodiment, the material of the compact 30 may be at least one selected from graphite, silicon, synthetic stone, boron carbide, silicon carbide, boron nitride, silicon nitride, boron phosphide, and silicon phosphide. In some examples, the material of the compact 30 may be graphite. In other examples, the material of the compact 30 may be synthetic stone.

In addition, in some examples, the jig 1 and the groove 21 may be placed in a temperature zone where the temperature in the brazing tube furnace is uniform. This enables a plurality of brazed structures 10 to be brazed favorably at the same time.

In addition, in the present embodiment, as shown in fig. 6, the brazed structure 10 may be placed in the groove 21 on the stage 20 and the press block 30 may be used to press the brazed structure 10 in step S30, thereby completing the assembly. The assembled stage 20, compact 30 and brazed structure 10 are then fed into, for example, a brazing tube furnace for brazing. In some examples, the assembled stage 20, compact 30, and brazing structure 10 are fed into a temperature uniform zone of a brazing tube furnace. This enables a plurality of brazed structures 10 to be brazed favorably at the same time.

In addition, in some examples, the components of the brazing structure 10 in fig. 6 may be stacked from below to above in the groove 21 in the order of the ceramic 11 to be welded, the brazing metal 12, and the metal 13 to be welded (see fig. 2). For example, the order in which the components of the brazed structure 10 are stacked from bottom to top in the groove 21 may be disk-shaped Al₂O₃Ceramic, pure Au solder ring, pure Ti metal ring, and disc-shaped Al₂O₃The centers of the ceramic, pure Au solder ring and the pure Ti metal ring can be at the same point, and the disc-shaped Al₂O₃The outer diameter of the ceramic and the pure Ti metal ring are approximately the same, and the outer diameter of the pure Au solder ring is larger than that of the disc-shaped Al₂O₃The outer diameter of the ceramic is at most 0.05 mm.

In some examples, there may be a gap between the compact 30 and the side wall of the recess 21 of the stage 20. In addition, in some examples, the gap H between the pressing block 30 and the side wall of the groove 21 of the stage 20 may be 0.05mm to 0.06mm (see fig. 6), in which case the expansion dimension of the jig 1 and the soldering structure 10 can be reserved, and the device can be smoothly taken out when the soldering is completed. In addition, a gap is formed between the pressing block and the side wall of the groove, so that impurities such as metal vapor generated in the brazing process can be further discharged.

In some examples, the jig 1 may also have a collar 24. In other examples, the collar 24 may be placed within the groove 21 and may surround the brazed structure 10. In this case, the flow of the brazing filler metal 12 after melting can be reduced.

In some examples, the inner diameter of the groove 21 may be equal to the expansion at the brazing temperature of the brazed structure 10 plus the expansion at the brazing temperature of the jig 1 plus the thickness and the pre-set dimensions of the collar 24.

In addition, in some examples, in order to prevent the brazing filler metal 12 in the brazed structure 10 from flowing during the brazing process, the method can be implemented by calculating the usage amount of the brazing filler metal 12, controlling the heat preservation time and the surface state of the base material, and the like.

In some examples, after brazing, an interfacial layer may be formed between the interface of the ceramic 11 to be welded and the metal 13 to be welded. Additionally, in some examples, the interface layer may include the braze metal 12 and the IMC layer. In other examples, the IMC layer may be a continuous IMC layer. In some examples, the IMC layer may be a discontinuous IMC layer.

In some examples, the IMC layer may be located between the metal 13 to be welded and the braze metal 12. Additionally, in some examples, the interface layer may include multiple layers of IMC. For example, there may be 2, 3, 4 or 5 IMC layers in the interface layer. Additionally, in some examples, multiple layers of IMC layers may each be located between the metal 13 to be welded and the braze metal 12.

In some examples, the multilayer IMC layer may include a brittle phase layer. In addition, in some examples, the brittle phase layer may refer to an alloy layer having a large content of a brittle phase (brittle compound). In other examples, the thickness of the brittle phase layer may not exceed 2 μm. For example, the brittle phase layer may have a thickness of 0.5 μm, 0.8 μm, 1 μm, 1.1 μm, 1.2 μm, 1.3 μm, 1.4 μm, 1.5 μm, 1.6 μm, 1.7 μm, 1.8 μm, or 2 μm.

According to the utility model discloses, can provide one kind and use more fragile brazing filler metal to carry out the structure of brazing 10 brazed.

While the present invention has been described in detail in connection with the drawings and the embodiments, it is to be understood that the above description is not intended to limit the present invention in any way. The present invention may be modified and varied as necessary by those skilled in the art without departing from the true spirit and scope of the invention, and all such modifications and variations are intended to be included within the scope of the invention.

Claims

1. A ceramic to metal brazing structure comprising: the ceramic to be welded is disc-shaped, and the ceramic to be welded is provided with a brazing surface subjected to surface grinding and metallization treatment; the brazing filler metal is in an annular sheet shape, the outer diameter of the brazing filler metal is smaller than that of the ceramic to be brazed, and the brazing filler metal is arranged on the brazing surface; and the metal to be welded is annular and is arranged on the brazing metal, the metal to be welded has the outer diameter equal to that of the ceramic to be welded, the annular metal to be welded has an annular protrusion extending along the inner diameter direction, the inner diameter of the annular protrusion is smaller than that of the brazing metal, the metal to be welded is subjected to surface treatment, and the metal to be welded is integrally formed.

2. The brazing structure according to claim 1, wherein:

the metallization is limited to the edge position of the soldering surface.

3. The brazing structure according to claim 2, wherein:

the edge position is formed with an annular intermediate metal layer having an annular width equal to the metal to be welded.

4. The brazing structure according to claim 2 or 3, wherein:

the brazing filler metal is arranged at the edge position.

5. The brazing structure according to claim 1, wherein:

the metal solder has the advantages of biological compatibility,

the metal solder is Au, Ag, Ti, Nb or the alloy thereof.

6. The brazing structure according to claim 1, wherein:

the ceramic to be welded is composed of alumina, zirconia, silica, titania, aluminosilicate or calcium-aluminum system.

7. The brazing structure according to claim 1, wherein:

the metal to be welded is Ti, Nb, Ni, Zr, Ta or their alloy.

8. The brazing structure according to claim 1, wherein:

the roughness of the surface of the ceramic to be welded is less than 0.05 μm.

9. The brazing structure according to claim 1, wherein:

the flatness of the metal to be welded is 8 μm to 10 μm.