CN110690132B - 一种焊接一体键合劈刀 - Google Patents
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Abstract
本发明提供的一种焊接一体键合劈刀,包括劈刀主体,所述劈刀主体内部开设有引线腔,所述引线腔由上至下形成锥形,所述引线腔的上端缠绕第一电热丝,在所述引线腔的下端缠绕有第二电热丝,所述劈刀主体的中间连接臂部分开设有伸缩腔室,所述伸缩腔室内分别设置有劈刀嘴的连接臂,和劈刀嘴的连接臂固定连接的簧片,以及和簧片末端连接的压力传感器,所述劈刀嘴末端开设有焊线槽,所述焊线槽外端面设置有刀头。本发明在键合引线过程中,使第一键合点和第二键合点完全键合,且在第二键合点键合时施加较大的压力,使引线完全断开,以完成下一组键合工作,避免引线粘连。
Description
技术领域
本发明引线键合装置领域,尤其涉及一种焊接一体键合劈刀。
背景技术
在半导体设备的生产和封装中,引线键合一直是在封装内的两个位置之间提供电互连的主要方法。其中劈刀是引线键合过程中的重要工具,其结构与性能决定了键合的灵活性、可靠性与经济性。
然而,现有的键合劈刀在第一键合点和第二键合点上压力一致,且由于刀嘴部分温度不够,常出现引线键合强度不够、引线粘连等问题。
因此,对于引线键合工艺来说,有必要开发一种能够提高引线键合强度、减少键合失误率的劈刀。
发明内容
为解决以上问题,本发明提供一种焊接一体键合劈刀,该键合劈刀通过设置第一键合点和第二键合点压力不一致,使第一键合点和第二键合点完全键合,且在第二键合点键合时施加较大的压力,使引线完全断开,以完成下一组键合工作,避免引线粘连,通过刀嘴温度可控,使引线能够形成饱满的球星键合,键合强度更高。
本发明提供的一种焊接一体键合劈刀,包括劈刀主体,所述劈刀主体内部开设有引线腔,所述引线腔由上至下形成锥形,且在所述引线腔内穿过引线丝,所述引线腔的上端缠绕第一电热丝,在所述引线腔的下端缠绕有第二电热丝,所述劈刀主体的中间连接臂部分开设有伸缩腔室,所述伸缩腔室内分别设置有劈刀嘴的连接臂,和劈刀嘴的连接臂固定连接的簧片,以及和簧片末端连接的压力传感器,所述劈刀嘴末端开设有焊线槽,所述焊线槽外端面设置有刀头,所述压力传感器固定在伸缩腔室的内壁上,所述劈刀嘴的内侧安装有防氧化保护装置,所述劈刀嘴的末端设置有所述引线腔的末端外壁设置有温度传感器。
优选的,所述第一电热丝和第二电热丝分别均匀缠绕在引线腔的外壁上,且所述第一电热丝和第二电热丝串联连接,所述第二电热丝的缠绕密度是第一电热丝缠绕密度的二倍。
优选的,所述压力传感器、温度传感器和控制器电连接,所述第一电热丝和第二电热丝和电源模块电连接。
优选的,在键合引线过程中,所述刀头接触第一键合点时,压力传感器的压力反馈阈值为N1, 所述刀头(602)接触第二键合点时,压力传感器的压力反馈阈值为N2,且 3/2N1≤N2≤2N1。
优选的,在键合引线过程中,劈刀嘴的连接臂在伸缩腔室的伸缩量和引线丝直径一致。
优选的,所述防氧化保护装置通过在烧球过程和键合过程中氢气和氮气的混合还原性气体来保护铜球不被氧化,其中气体比例为:95%N2,5%H2。
优选的,所述引线腔末端口径和引线丝直径一致。
优选的,所述刀头的截面形状为圆弧形。
优选的,所述劈刀刀体采用陶瓷材质。
本发明的有益效果在于:
1. 本发明的一种焊接一体键合劈刀通过引线腔由上至下形成锥形,且在引线腔的上端缠绕第一电热丝,在引线腔的下端缠绕有第二电热丝,通过温度传感器和控制器控制调节加热温度,使引线腔内由上至下温度逐渐提高,使得引线至刀嘴末端完全烧结成球,避免了传统顶部加热或电火花加热造成底部烧结不透造成刀嘴堵塞的现象,使刀嘴吐球稳定连续。
2. 本发明通过劈刀主体的中间连接臂部分开设伸缩腔室,在伸缩腔室内分别设置有劈刀嘴的连接臂,和劈刀嘴的连接臂固定连接的簧片,以及和簧片末端连接的压力传感器,在键合引线过程中,使第一键合点和第二键合点完全键合,且在第二键合点键合时施加较大的压力,使引线完全断开,以完成下一组键合工作,避免引线粘连。
3. 本发明通过劈刀嘴的内侧安装防氧化保护装置,避免劈刀嘴长时间使用发生氧化,使得吐球不顺。
附图说明
下面结合附图,通过对本发明的具体实施方式详细描述,将使本发明的技术方案及其它有益效果显而易见。
图1为本发明一种焊接一体键合劈刀的剖面图;
图2为本发明为图1中A向的局部放大示意图;
图3为本发明为图1中B向的局部放大示意图。
具体实施方式
为更进一步阐述本发明所采取的技术手段及其效果,以下结合本发明的优选实施例及其附图进行详细描述。
实施例1
由图1-3所示,一种焊接一体键合劈刀,包括劈刀主体1,劈刀刀体1采用陶瓷材质,可以有效绝缘隔热,在劈刀主体1下端活动连接有劈刀嘴6,劈刀主体1内部开设有引线腔2,引线腔2由上至下形成锥形,且在引线腔2内穿过引线丝3,引线腔2末端口径和引线丝3口径一致,避免引线腔2末端口径过小或过大,导致吐球不顺或烧结球溢出,引线腔2的上端缠绕第一电热丝4,在引线腔2的下端缠绕有第二电热丝5,第一电热丝4和第二电热丝5分别均匀缠绕在引线腔2的外壁上,且第一电热丝4和第二电热丝5串联连接,第二电热丝5的缠绕密度是第一电热丝4缠绕密度的二倍,通过温度传感器10和控制器控制调节加热温度,使引线腔内由上至下温度逐渐提高,且使劈刀嘴6底部温度达到最大,使得引线至劈刀嘴6末端完全烧结成球,使刀嘴吐球稳定连续避免了传统顶部加热或电火花加热造成底部烧结不透造成刀嘴堵塞的现象。
劈刀嘴6的末端设置有引线腔2的末端外壁设置有温度传感器10,压力传感器8、温度传感器10和控制器电连接,第一电热丝4和第二电热丝5和电源模块电连接。
劈刀主体1的中间连接臂部分开设有伸缩腔室101,伸缩腔室101内分别设置有劈刀嘴6的连接臂,和劈刀嘴6的连接臂固定连接的簧片7,以及和簧片7末端连接的压力传感器8,劈刀嘴6末端开设有焊线槽601,焊线槽601外端面设置有刀头602,刀头602的截面形状为圆弧形,使键合更加充分,压力传感器8固定在伸缩腔室101的内壁上,在键合引线过程中,使第一键合点和第二键合点完全键合,且在第二键合点键合时施加较大的压力,使引线完全断开,以完成下一组键合工作,避免引线粘连。
劈刀嘴6的内侧安装有防氧化保护装置9,防氧化保护装置9通过在烧球过程和键合过程中氢气和氮气的混合还原性气体来保护铜球不被氧化,其中气体比例为:95%N2,5%H2,避免劈刀嘴长时间使用发生氧化,造成吐球不顺。
实施例2
由实施例1描述的一种焊接一体键合劈刀,在键合引线过程中,刀头602接触第一键合点时,压力传感器8的压力反馈阈值为N1,刀头602接触第二键合点时,压力传感器8的压力反馈阈值为N2,且 3/2N1≤N2≤2N1,劈刀主体1下降时,使烧结球接触晶片,刀头602键合第一键合点时对烧结球施加较小的力,就可使其充分焊接,当走线经过第二键合点时,施加较大的力,可以使第二键合点完全焊接,且一次切断,开始下一组键合过程。
在键合引线过程中,劈刀嘴6的连接臂在伸缩腔室101的伸缩量和引线丝3直径一致,以使第二次键合时完全切开引线,又不会压伤晶片。
以上所述,对于本领域的普通技术人员来说,可以根据本发明的技术方案和技术构思作出其他各种相应的改变和变形,而所有这些改变和变形都应属于本发明权利要求的保护范围。
Claims (7)
1.一种焊接一体键合劈刀,包括:劈刀主体(1),其特征在于,所述劈刀主体(1)内部开设有引线腔(2),所述引线腔(2)由上至下形成锥形,且在所述引线腔(2)内穿过引线丝(3),所述引线腔(2)的上端缠绕第一电热丝(4),在所述引线腔(2)的下端缠绕有第二电热丝(5),所述劈刀主体(1)的中间连接臂部分开设有伸缩腔室(101),所述伸缩腔室(101)内分别设置有劈刀嘴(6)的连接臂,和劈刀嘴(6)的连接臂固定连接的簧片(7),以及和簧片(7)末端连接的压力传感器(8),所述劈刀嘴(6)末端开设有焊线槽(601),所述焊线槽(601)外端面设置有刀头(602),所述压力传感器(8)固定在伸缩腔室(101)的内壁上,在键合引线过程中,所述刀头(602)接触第一键合点时,压力传感器(8)的压力反馈阈值为N1,所述刀头(602)接触第二键合点时,压力传感器(8)的压力反馈阈值为N2,且3/2N1≤N2≤2N1,在键合引线过程中,劈刀嘴(6)的连接臂在伸缩腔室(101)的伸缩量和引线丝(3)直径一致,所述劈刀嘴(6)的内侧安装有防氧化保护装置(9),所述劈刀嘴(6)的末端设置有所述引线腔(2)的末端外壁设置有温度传感器(10)。
2.根据权利要求1所述的一种焊接一体键合劈刀,其特征在于,所述第一电热丝(4)和第二电热丝(5)分别均匀缠绕在引线腔(2)的外壁上,且所述第一电热丝(4)和第二电热丝(5)串联连接,所述第二电热丝(5)的缠绕密度是第一电热丝(4)缠绕密度的二倍。
3.根据权利要求1所述的一种焊接一体键合劈刀,其特征在于,所述压力传感器(8)、温度传感器(10)和控制器电连接,所述第一电热丝(4)和第二电热丝(5)和电源模块电连接。
4.根据权利要求1所述的一种焊接一体键合劈刀,其特征在于,所述防氧化保护装置(9)通过在烧球过程和键合过程中氢气和氮气的混合还原性气体来保护铜球不被氧化,其中气体比例为:95%N2,5%H2。
5.根据权利要求1所述的一种焊接一体键合劈刀,其特征在于,所述引线腔(2)末端口径和引线丝(3)直径一致。
6.根据权利要求1所述的一种焊接一体键合劈刀,其特征在于,所述刀头(602)的截面形状为圆弧形。
7.根据权利要求1所述的一种焊接一体键合劈刀,其特征在于,所述劈刀主体(1)采用陶瓷材质。
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