CN110634372B - Optical system installation and adjustment strategy verification system - Google Patents
Optical system installation and adjustment strategy verification system Download PDFInfo
- Publication number
- CN110634372B CN110634372B CN201910936881.0A CN201910936881A CN110634372B CN 110634372 B CN110634372 B CN 110634372B CN 201910936881 A CN201910936881 A CN 201910936881A CN 110634372 B CN110634372 B CN 110634372B
- Authority
- CN
- China
- Prior art keywords
- optical element
- optical system
- optical
- actuating
- light source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
- G09B23/00—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes
- G09B23/06—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics
- G09B23/22—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics for optics
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Mathematical Optimization (AREA)
- Computational Mathematics (AREA)
- Mathematical Analysis (AREA)
- Algebra (AREA)
- Mathematical Physics (AREA)
- Pure & Applied Mathematics (AREA)
- Business, Economics & Management (AREA)
- Optics & Photonics (AREA)
- Educational Administration (AREA)
- Educational Technology (AREA)
- Theoretical Computer Science (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The invention discloses an optical system installation and adjustment strategy verification system, wherein a light source device, a first optical element and an imaging device are respectively arranged on a displacement device, the displacement device is used for respectively controlling the positions of the light source device, the first optical element and the imaging device, and simulating the introduction of a position error of an optical system by changing the position of the first optical element; the actuating device is used for applying torque to the first optical element to simulate the introduction of surface shape errors into the optical system, the imaging device is used for receiving light emitted by the light source device after passing through the first optical element and forming images, and the data processing device is used for verifying the adjusting strategy formulated for the optical system according to the position relation between the image point and the ideal image point in the imaging and the position errors or the surface shape errors introduced by the first optical element. The system is used for verifying the adjustment strategy aiming at the optical system, can overcome the defects in the prior art, and has very important significance for the field of optical system adjustment.
Description
Technical Field
The invention relates to the technical field of optical system installation and debugging, in particular to an optical system installation and debugging strategy verification system.
Background
For a large-aperture large-field telescope, in order to obtain a high-quality imaging result, aberration caused by system maladjustment needs to be corrected in real time, and deformation of an optical element needs to be considered, so that the large-aperture large-field telescope is adjusted through an active optical technology, and the burden is heavier. Specifically, the number of optical elements adopted by the large-aperture large-view-field optical system is often large, taking an 8-meter-level lsst (large synthetic surface lens) as an example, the equivalent VLT degree of freedom is 153, the lateral support system is passively supported, and the system degree of freedom is 446, so that the establishment of an active optical correction strategy under the complex condition of multiple degrees of freedom of the large-aperture large-view-field optical system has a very important meaning for realizing an active optical function.
The closed-loop active optics is a novel technology which combines the traditional active optics and computer-aided assembly and adjustment and aims at a large-caliber large-view-field telescope. In the prior art, the adjustment strategy for the large-aperture large-view-field telescope is established or verified through closed-loop active optics, one is carried out through an actual telescope or completely through simulation, the former has high cost and low efficiency, and the latter breaks away from the actual condition of an optical system, so that the accuracy is low.
Disclosure of Invention
In view of the above, an object of the present invention is to provide a system for verifying an optical system installation strategy, which is used for verifying an installation strategy for an optical system, can overcome the defects in the prior art, and has a very important meaning in the field of optical system installation.
In order to solve the technical problems, the invention provides the following technical scheme:
an optical system setup strategy verification system comprises a light source device, a first optical element for simulating an optical system, a displacement device, an actuating device, an imaging device and a data processing device, wherein the light source device, the first optical element and the imaging device are respectively arranged on the displacement device, and the displacement device is used for respectively controlling the positions of the light source device, the first optical element and the imaging device and simulating the optical system to introduce a position error by changing the position of the first optical element;
the actuating device is used for applying torque to the first optical element to simulate an optical system to introduce surface shape errors, the imaging device is used for receiving light emitted by the light source device after passing through the first optical element and forming images, and the data processing device is used for verifying a setup strategy formulated for the optical system according to the position relation between the image point and an ideal image point in the imaging and the position errors or the surface shape errors introduced by the first optical element.
Preferably, the actuation means comprises a number of actuation portions for connection with the transition portion of the first optical element to apply a torque to the first optical element.
Preferably, the actuator device further includes a driving motor connected to the actuator portion, the driving motor being configured to output a displacement, and the actuator portion being further configured to convert the displacement output by the driving motor into a torque to be applied to the first optical element.
Preferably, the actuating portion is a strip-shaped sheet, one end of the actuating portion is provided with a through hole for connecting with the transition portion of the first optical element, and the other end of the actuating portion is provided with a through hole for connecting with the driving motor.
Preferably, a through hole for connecting a driving motor to the actuator is provided in a portion extending to a hollow region of the actuator.
Preferably, the actuating device further comprises a plurality of connecting parts for fixing the first optical element, wherein the connecting parts are movably connected with the transition part of the first optical element so as to apply torque to the first optical element.
Preferably, the optical system comprises a plurality of light source devices, and the data processing device is specifically configured to verify a setup strategy formulated for the optical system according to a position relationship between each image point in the imaging and a corresponding ideal image point and a position error or a surface shape error introduced by the first optical element.
Preferably, the optical system further comprises a detection device for measuring the wavefront error of the light emitted by the light source device after passing through the first optical element.
Preferably, the optical system further comprises a second optical element, wherein the first optical element is used for simulating a primary mirror of the optical system, and the second optical element is used for simulating a secondary mirror of the optical system;
the second optical element is arranged on the displacement device, and the displacement device is also used for controlling the position of the second optical element and simulating the position error introduced by an optical system by changing the position of the first optical element or the position of the second optical element;
the imaging device is used for receiving light emitted by the light source device and passing through the first optical element and the second optical element and forming an image, and the data processing device is specifically used for verifying an adjustment strategy formulated for the optical system according to a position relation between an image point and an ideal image point in the image, a position error or a surface shape error introduced by the first optical element and a position error introduced by the second optical element.
Preferably, the first optical element is a transmissive element and the second optical element is a transmissive element.
According to the technical scheme, the optical system installation strategy verification system provided by the invention has the advantages that the first optical element is used for simulating the optical system, the light source device, the first optical element and the imaging device are respectively arranged on the displacement device, the displacement device is used for respectively controlling the positions of the light source device, the first optical element and the imaging device, and the displacement device is used for changing the position of the first optical element so as to simulate the position error introduced by the optical system; the actuating device is used for applying a moment to the first optical element to simulate surface shape errors introduced by the optical system; the imaging device receives light emitted by the light source device and passing through the first optical element and forms an image, and the data processing device verifies an adjustment strategy formulated for the optical system according to the position relation between the imaged image point and the ideal image point and the position error or the surface shape error introduced by the first optical element.
The optical system installation strategy verification system uses the optical element to simulate the optical system and simulate the error of the optical system to verify the installation strategy formulated aiming at the optical system, can overcome the defects of the prior optical system or complete simulation to verify the installation strategy of the optical system, and has very important significance to the field of optical system installation.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.
Fig. 1 is a schematic diagram of an optical system installation strategy verification system according to an embodiment of the present invention;
FIG. 2 is a schematic view of an arrangement of a first optical element and an actuation means in an embodiment of the invention;
FIG. 3 is a schematic view of an actuator portion in an embodiment of the invention;
fig. 4 is a schematic diagram of an optical system setup policy verification system according to another embodiment of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
The embodiment of the invention provides an optical system installation and adjustment strategy verification system, which comprises a light source device, a first optical element for simulating an optical system, a displacement device, an actuating device, an imaging device and a data processing device, wherein the first optical element is used for simulating the optical system; the light source device, the first optical element and the imaging device are respectively arranged on the displacement device, and the displacement device is used for respectively controlling the positions of the light source device, the first optical element and the imaging device and simulating an optical system to introduce a position error by changing the position of the first optical element.
The actuating device is used for applying torque to the first optical element to simulate the introduction of surface shape errors of an optical system, and the imaging device is used for receiving light emitted by the light source device after passing through the first optical element and forming images; the data processing device is used for verifying a setup strategy formulated for the optical system according to the position relation between the image point in imaging and the ideal image point and the position error or surface shape error introduced by the first optical element.
The optical system is simulated by the first optical element, the position of the light source device, the position of the first optical element and the position of the imaging device can be controlled and changed by the displacement device, the position error introduced by the optical system is simulated by changing the position of the first optical element, and the surface shape error introduced by the optical system is simulated by applying torque to the first optical element by the actuating device. The light source device emits light which passes through the first optical element and then forms an image on the imaging device, and the data processing device verifies an adjustment strategy formulated for the optical system according to the position relation between the imaged image point and the ideal image point and the position error or the surface shape error introduced by the first optical element.
The optical system installation strategy verification system of the embodiment uses the optical element to simulate the optical system and simulate the error of the optical system to verify the installation strategy formulated aiming at the optical system, can overcome the defects of the existing optical system or complete simulation to verify the installation strategy of the optical system, and has very important significance to the field of optical system installation.
The optical system installation strategy verification system is described in detail below with reference to the accompanying drawings and the detailed description. Referring to fig. 1, fig. 1 is a schematic diagram of an optical system installation strategy verification system provided in this embodiment, and as can be seen from the figure, the optical system installation strategy verification system includes a light source device 10, a first optical element 12, a displacement device 11, an actuating device 13, an imaging device 14, and a data processing device.
The first optical element 12 is used to simulate an optical system, and preferably, the first optical element 12 may be a transmissive element.
The light source device 10, the first optical element 12 and the imaging device 14 are respectively arranged on a displacement device 11, and the displacement device 11 can respectively control the positions of the light source device 10, the first optical element 12 and the imaging device 14. Alternative displacement means 11 may employ a displacement platform. And the position of the first optical element 12 is changed by the displacement means 11, whereas the analog optical system introduces a position error.
The actuating device 13 is used for applying a moment to the first optical element 12 to simulate the optical system to introduce surface shape errors, and the moment applied to the first optical element 12 by the actuating device 13 enables the surface shape of the first optical element to change, so that the surface shape errors introduced by the optical system are simulated. In one embodiment, the actuation means 13 comprises several actuation portions for connection with the transition portion of the first optical element for applying a torque to the first optical element. The transition of the optical element refers to the optically inactive portion at the edge of the optical element. Referring to fig. 2, fig. 2 is a schematic diagram of the arrangement of the first optical element and the actuating device in this embodiment, each actuating portion 130 of the actuating device 13 is connected to the first optical element 12 along the circumferential direction of the first optical element 12, and preferably, each actuating portion 13 of the actuating device 13 is uniformly distributed along the circumferential direction of the first optical element 12, so that the moment is uniformly applied to the optical element along the circumferential direction of the first optical element by each actuating portion to generate the surface shape error.
Further, the actuator 13 further includes a driving motor connected to the actuator 130, the driving motor being configured to output a displacement, and the actuator 130 being configured to convert the displacement output by the driving motor into a torque to be applied to the first optical element. Further specifically, referring to fig. 3, fig. 3 is a schematic view of the actuator part in this embodiment, the actuator part 130 is a strip-shaped sheet, one end of which is provided with a through hole 131 for connecting with the transition part of the first optical element, the other end of which is provided with a through hole 132 for connecting with the driving motor, and the through hole 132 for connecting with the driving motor on the actuator part 130 is provided on a portion extending to the hollow area of the actuator part 130. The actuating portion 130 may be a flexible element, and the driving motor is connected to the actuating portion 130 by a nut screw.
The actuating means 13 further comprises several connections for fixing said first optical element 12, which connections are intended to be in an articulated connection with a transition of said first optical element 12 so that an application torque can act on the first optical element 12. The actuator device 13 fixedly mounts the first optical element 12 by means of the respective connection portions, and applies a moment to the first optical element 12 by means of the respective actuator portions, the connection between the connection portions of the actuator device and the first optical element not affecting the application of the moment to the first optical element by the actuator portions.
The imaging device 14 is used for receiving the light emitted by the light source device 10 after passing through the first optical element 12 and forming an image. The data processing device is used for verifying the adjusting strategy formulated for the optical system according to the position relation between the image point in the imaging and the ideal image point and the position error or surface shape error introduced by the first optical element 12.
Preferably, the verification system of this embodiment may include a plurality of light source devices 10, each light source device 10 emits light, and the light passes through the first optical element 12, and is then received and imaged by the imaging device 14, and the data processing device is specifically configured to verify the setup strategy formulated for the optical system according to the position relationship between each image point and the corresponding ideal image point in the imaging and the position error or the surface shape error introduced by the first optical element. Specifically, the data processing device can calculate the deviation amount of each image point and the corresponding ideal image point according to the position relationship between each image point and the corresponding ideal image point in the imaging process, and further comprises a detection device for measuring the wavefront error of the light emitted by the light source device after the light passes through the first optical element. In particular implementations, wavefront curvature errors of the optical system may be measured using a wavefront sensor, or may be measured using an interferometer.
For the generation of fixed corresponding aberrations using the actuation means, calibration is performed here using a 4D interferometer and a standard flat mirror. Specifically, the basic idea of the sensitivity matrix is also applied to keeping the positioning unit assembly still, controlling the component attitude, driving a single driving unit, recording the introduced aberration for a unit driving amount, and obtaining the added force required to obtain the required wavefront error and thus the movement amount of the driving unit.
Furthermore, the system described in this embodiment may include a first light source device and a second light source device, and two light sources are used for simultaneous imaging, so that the basic theory of curvature sensing of multi-field wavefront can be verified on an experimental level. The detuning condition of the system can be obtained from the geometrical position of the light spot, and the wavefront error of the system can be obtained from the energy distribution of the image spot according to the theory of Fourier optics.
The optical system adjustment strategy verification system can simulate the adjustment link of the large-caliber large-view-field telescope and verify the adjustment strategy of the large-caliber large-view-field telescope.
Referring to fig. 4, fig. 4 is a schematic diagram of an optical system installation strategy verification system according to yet another embodiment, which can be seen from the figure, and the optical system installation strategy verification system includes a light source device 20, a first optical element 21, a second optical element 22, a displacement device 23, an actuating device 24, an imaging device 25 and a data processing device. Wherein, the first optical element 21 simulates the primary mirror of the optical system, and the second optical element 22 simulates the secondary mirror of the optical system. Preferably, the first optical element 21 may be a transmissive element and the second optical element 22 may be a transmissive element.
The light source device 20, the first optical element 21, the second optical element 22 and the imaging device 25 are respectively disposed on a displacement device 23, and the displacement device 23 can respectively control the positions of the light source device 20, the first optical element 21, the second optical element 22 and the imaging device 25. And the position of the first optical element 21 or the position of the second optical element 22 is changed by the displacement device 25 to simulate the position error introduced by the optical system.
The actuating device 24 is used for applying a moment to the first optical element 21 to simulate the optical system to introduce surface shape errors, and the moment applied to the first optical element 21 by the actuating device 24 enables the surface shape of the first optical element to change, so that the surface shape errors introduced by the optical system are simulated. The detailed description of the actuator 24 can be referred to the detailed description of the actuator in the previous embodiment, and the detailed description of the embodiment is omitted.
The imaging device 25 is used for receiving the light emitted by the light source device 20 after passing through the first optical element 21 and the second optical element 22 and forming an image. The data processing device is used for verifying the adjustment strategy made for the optical system according to the position relation between the image point in the imaging and the ideal image point, the position error or surface shape error introduced by the first optical element 21 and the position error introduced by the second optical element 22.
Therefore, the optical system installation strategy verification system can be used for verifying the installation strategy formulated aiming at the optical system for the optical system comprising the primary mirror and the secondary mirror, and has very important significance for the field of optical system installation.
The optical system installation strategy verification system provided by the invention is described in detail above. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.
Claims (5)
1. An optical system setup strategy verification system is characterized by comprising a light source device, a first optical element for simulating an optical system, a displacement device, an actuating device, an imaging device and a data processing device, wherein the light source device, the first optical element and the imaging device are respectively arranged on the displacement device, and the displacement device is used for respectively controlling the positions of the light source device, the first optical element and the imaging device and simulating the introduction of a position error of the optical system by changing the position of the first optical element;
the actuating device is used for applying torque to the first optical element to simulate an optical system to introduce surface shape errors, the imaging device is used for receiving light emitted by the light source device after passing through the first optical element and forming images, and the data processing device is used for verifying a setup strategy formulated for the optical system according to the position relation between the imaged image point and an ideal image point and the position errors or the surface shape errors introduced by the first optical element;
the actuating device comprises a plurality of actuating parts, each actuating part is used for being connected with the transition part of the first optical element to apply torque to the first optical element, the actuating device further comprises a driving motor connected with the actuating parts, each driving motor is used for outputting displacement, each actuating part is also used for converting the displacement output by the corresponding driving motor into the torque to be applied to the first optical element, each actuating part is in the shape of a strip-shaped sheet, a through hole used for being connected with the transition part of the first optical element is formed in one end of each actuating part, a through hole used for being connected with the corresponding driving motor is formed in the other end of each actuating part, and the through holes used for being connected with the driving motors on the actuating parts are formed in parts extending to the hollow areas of the actuating parts;
the actuating device further comprises a plurality of connecting parts used for fixing the first optical element, and the connecting parts are movably connected with the transition part of the first optical element so that the actuating part can apply an applying moment to the first optical element.
2. The system for verifying the setup strategy of an optical system according to claim 1, comprising a plurality of the light source devices, wherein the data processing device is specifically configured to verify the setup strategy formulated for the optical system according to the position relationship between each image point and the corresponding ideal image point in the imaging and the position error or the surface shape error introduced by the first optical element.
3. The optical system tuning strategy verification system of claim 1, further comprising a detection device for measuring a wavefront error of the light emitted by the light source device after passing through the first optical element.
4. The optical system installation strategy verification system of any one of claims 1-3, further comprising a second optical element, the first optical element for simulating a primary mirror of the optical system, the second optical element for simulating a secondary mirror of the optical system;
the second optical element is arranged on the displacement device, and the displacement device is also used for controlling the position of the second optical element and simulating the position error introduced by an optical system by changing the position of the first optical element or the position of the second optical element;
the imaging device is used for receiving light emitted by the light source device and passing through the first optical element and the second optical element and forming an image, and the data processing device is specifically used for verifying an adjustment strategy formulated for the optical system according to a position relation between an image point and an ideal image point in the image, a position error or a surface shape error introduced by the first optical element and a position error introduced by the second optical element.
5. The optical system installation strategy verification system of claim 4, wherein the first optical element is a transmissive element and the second optical element is a transmissive element.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910936881.0A CN110634372B (en) | 2019-09-29 | 2019-09-29 | Optical system installation and adjustment strategy verification system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910936881.0A CN110634372B (en) | 2019-09-29 | 2019-09-29 | Optical system installation and adjustment strategy verification system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110634372A CN110634372A (en) | 2019-12-31 |
| CN110634372B true CN110634372B (en) | 2021-12-07 |
Family
ID=68973780
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910936881.0A Active CN110634372B (en) | 2019-09-29 | 2019-09-29 | Optical system installation and adjustment strategy verification system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110634372B (en) |
Family Cites Families (17)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0721869B2 (en) * | 1990-04-20 | 1995-03-08 | シャープ株式会社 | Optical pickup device |
| JPH09282453A (en) * | 1996-04-09 | 1997-10-31 | Matsushita Electric Ind Co Ltd | Position recognizing method |
| CN1885097A (en) * | 2005-06-22 | 2006-12-27 | 中国科学院长春光学精密机械与物理研究所 | Method for adjusting aspherical detection optical system by computer |
| CN102243067A (en) * | 2011-04-15 | 2011-11-16 | 中国科学院长春光学精密机械与物理研究所 | Surface shape detection device for solar condensing mirror |
| CN102368114A (en) * | 2011-11-15 | 2012-03-07 | 中国科学院西安光学精密机械研究所 | Adjusting method of surface shape compensation of optical system based on wave aberration detection |
| CN202948188U (en) * | 2012-11-02 | 2013-05-22 | 上海微电子装备有限公司 | Fixing device for fixing long strip-shaped mirror |
| CN103345059B (en) * | 2013-06-28 | 2015-07-15 | 中国科学院西安光学精密机械研究所 | Method and system for zoom of reflection type deformable mirror |
| CN103335816B (en) * | 2013-06-28 | 2015-05-20 | 中国科学院国家天文台南京天文光学技术研究所 | Optical turbulence sensor and method for combining multi-aperture glitter and differential image motion |
| KR101652356B1 (en) * | 2015-03-30 | 2016-08-31 | (주)넥스틴 | optical apparatus for examining pattern image of semiconductor device |
| CN105467545A (en) * | 2015-12-21 | 2016-04-06 | 中国科学院长春光学精密机械与物理研究所 | Optical component supporting device with surface shape adjustment function |
| CN105425389B (en) * | 2015-12-21 | 2017-10-31 | 中国科学院长春光学精密机械与物理研究所 | It is a kind of to realize the multi-point flexibly support meanss of active surface shape adjustment |
| CN107036554B (en) * | 2017-05-25 | 2019-05-17 | 中国科学院上海光学精密机械研究所 | The absolute surface shape detection apparatus of planar optical elements |
| CN107783249B (en) * | 2017-09-30 | 2019-11-05 | 中国科学院长春光学精密机械与物理研究所 | A kind of space active thermal optical system |
| CN107943123A (en) * | 2017-11-02 | 2018-04-20 | 中国科学院长春光学精密机械与物理研究所 | The control system and control method of a kind of force actuator |
| CN109031659B (en) * | 2018-06-20 | 2020-11-24 | 湖北三江航天红峰控制有限公司 | Computer-aided installation and adjustment method of coaxial optical system |
| CN109188648B (en) * | 2018-09-11 | 2020-05-15 | 中国科学院长春光学精密机械与物理研究所 | Floating support device for unloading space optical load ground gravity |
| CN109633857A (en) * | 2019-01-18 | 2019-04-16 | 长春奥普光电技术股份有限公司 | The symmetrical secondary mirror flexible installing structure of outer circle |
-
2019
- 2019-09-29 CN CN201910936881.0A patent/CN110634372B/en active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CN110634372A (en) | 2019-12-31 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4843272B2 (en) | Optical system for microlithographic projection exposure apparatus | |
| CN106104360B (en) | For compensating the adjustable deformable mirror of the scrambling of beam | |
| CN104236856A (en) | Wave aberration detection device of objective lens imaging system and system error correction method of wave aberration detection device | |
| CN111025618B (en) | Method, device and equipment for adjusting reflection telescope and storage medium | |
| US20090296062A1 (en) | Method of measuring position error of beam of exposure apparatus and exposure apparatus using the same | |
| CN112577446A (en) | In-place surface shape splicing measuring device and method for large-caliber planar optical element | |
| CN109522573A (en) | A kind of emulation mode of optical remote sensing camera active optics system | |
| TW201005452A (en) | Positioning apparatus, positioning method, exposure apparatus, device manufacturing method, and methods of manufacturing positioning apparatus and exposure apparatus | |
| CN102236260B (en) | Wave aberration correction system and method | |
| CN115235414A (en) | Large-aperture telescope pointing change detection and correction method | |
| CN110634372B (en) | Optical system installation and adjustment strategy verification system | |
| CN103630330A (en) | Adjustable-light-intensity wave-front tilt disturbance error simulator | |
| CN109002567B (en) | Computer-aided debugging method based on actual optical system debugging detection optical path | |
| Paufique et al. | Status of the GRAAL system development: very wide-field correction with 4 laser guide-stars | |
| CN107783249B (en) | A kind of space active thermal optical system | |
| US8876306B2 (en) | Mirror comprising mechanical means for generating primary geometrical aberrations | |
| Mendillo et al. | The PICTURE-C exoplanetary imaging balloon mission: laboratory coronagraph demonstrations of high-contrast imaging and low-order wavefront control | |
| CN110824697A (en) | Self-adaptive optical system combining artificial beacon and wavefront-free detection | |
| CN114543835B (en) | Star simulation system vibration suppression system and method adopting laser interference detection | |
| Noyes et al. | The decadal survey testbed two: a technology development facility for future exo-Earth observatories | |
| CN111983799B (en) | Surface shape correction device and method for grazing optical element | |
| CN114034470A (en) | Telescope wavefront rotation angle calculation method and device and telescope | |
| Di Filippo et al. | Laboratory testing of the Ingot WFS | |
| KR102197977B1 (en) | Telescope comprising an active mirror and internal means for monitoring said active mirror | |
| CN112985453A (en) | Simulation method for error term of active optical system of optical remote sensing camera |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |