CN110579626A - Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof - Google Patents
Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof Download PDFInfo
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- CN110579626A CN110579626A CN201911008464.6A CN201911008464A CN110579626A CN 110579626 A CN110579626 A CN 110579626A CN 201911008464 A CN201911008464 A CN 201911008464A CN 110579626 A CN110579626 A CN 110579626A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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Abstract
The invention provides a miniature metal fully-sealed quartz flexible accelerometer servo circuit and a processing method thereof, wherein the miniature metal fully-sealed quartz flexible accelerometer servo circuit comprises a capacitance-voltage converter, a transconductance/compensation amplifier and a feedback network, the capacitance-voltage converter comprises a differential capacitance detector and an integrating network, the differential capacitance detector is connected with a differential capacitance sensor of an accelerometer gauge outfit, the differential capacitance detector, the integrating network and the transconductance/compensation amplifier are sequentially connected, and the transconductance/compensation amplifier is connected with a torquer of the accelerometer gauge outfit; all components of the servo circuit are integrated on the ceramic substrate by adopting a thick film hybrid integration process, and the servo circuit is packaged in a metal full-sealed mode. The invention adopts the quartz flexible accelerometer servo circuit in the metal parallel seam welding packaging form, realizes the full sealing of the servo circuit, and solves the reliability problem and the heat dissipation problem of the servo circuit in the extreme environment.
Description
Technical Field
The invention relates to the design technology of a semiconductor hybrid integrated circuit, in particular to a miniature metal fully-sealed quartz flexible accelerometer servo circuit and a processing method thereof.
Background
The quartz flexible accelerometer is used as an inertia sensitive element, is one of key devices in an inertia navigation and guidance system, and is widely applied to navigation and guidance systems of carrier rockets, missiles, airships, ships and the like. The servo circuit of the quartz flexible accelerometer is an important component of the quartz flexible accelerometer, and the quality of the performance of the servo circuit directly influences the measurement precision and stability of the accelerometer system and the final navigation precision. Along with the fact that the inertial navigation system has higher and higher requirements on the aspects of light weight, large range, matching performance, high reliability and the like of the accelerometer, the traditional quartz flexible accelerometer servo circuit which is large in size and small in measuring range and adopts a non-fully-sealed packaging mode cannot meet the requirements of a novel accelerometer in performance, and cannot meet the use under special environmental conditions in a manufacturing process, the quartz flexible accelerometer servo circuit which is small in size, large in range output, fully sealed in metal and good in matching performance is designed, and therefore the quartz flexible accelerometer servo circuit has important significance for improving the performance and reliability of the inertial navigation system.
The traditional implementation mode of the quartz flexible accelerometer servo circuit has the following defects:
1. The circuit is large in size and cannot meet the light-weight requirement of the inertial navigation system.
The traditional quartz flexible accelerometer servo circuit has the advantages of large volume, large mass, phi 25.4mm multiplied by 5.7mm in overall dimension, 9 g in mass and low miniaturization degree of components, and limits the development of the light weight of the inertial navigation system.
2. The circuit has small capacity of outputting current and cannot meet the requirement of a large range of the acceleration sensor.
The traditional quartz flexible accelerometer servo circuit has weak current output capability and small acceleration measurement range, and cannot meet the development direction of the accelerometer in a large range. The transconductance amplification module built by adopting discrete elements can improve the output capability of circuit current, but has the advantages of large volume, low integration level and low reliability, and greatly limits the development of accelerometer miniaturization.
3. The sealing performance is poor, and the requirement of extreme environment cannot be met.
A traditional quartz flexible accelerometer servo circuit is packaged by a semicircular ceramic cover plate and epoxy glue, belongs to non-airtight packaging, and has high requirements on subsequent system-level packaging (an accelerometer sensor and a servo circuit) because the circuit has overhigh water vapor content in the internal atmosphere and influences the reliability if the circuit is directly in a humid environment for a long time.
4. The dynamic characteristic range adjustability is poor, and system adjustment cannot be achieved.
The servo circuit of the traditional quartz flexible accelerometer determines the dynamic parameters of the circuit by matching an integral network and a feedback network inside the circuit. For an inertial navigation system, the dynamic parameters of a traditional servo circuit are fixed, the matching range cannot be adjusted, the matching requirement with an acceleration sensor is high, the dynamic parameters cannot be adjusted outside the circuit, and the using condition of the circuit is restricted.
Disclosure of Invention
The invention provides a servo circuit of a miniature metal fully-sealed quartz flexible accelerometer and a processing method thereof for solving the problems in the prior art, and the method adopts a thick film process-based hybrid integrated circuit technology to integrate all components of the servo circuit on a ceramic substrate with the diameter phi of 17.2mm, thereby realizing the miniaturization of the servo circuit. By improving the manufacturing process and optimizing the chip layout design, the saturation voltage drop of the output-stage triode of the transconductance/compensation amplifier is reduced, the power output is increased, and the current output capability of the circuit and the accelerometer measuring range can be improved. The circuit adopts a metal circular full-sealed packaging form and a parallel seam welding packaging process, so that the heat dissipation and the reliability of the circuit are greatly improved. By reserving a system PID control port, dynamic parameter adjustment can be carried out on the circuit according to system feedback, so that the circuit can realize good matching of the servo and the acceleration sensor due to the characteristic that the dynamic parameters are configurable.
In order to achieve the purpose, the invention adopts the following technical scheme to realize the purpose:
A miniature metal fully-sealed quartz flexible accelerometer servo circuit comprises a capacitance-voltage converter, a transconductance/compensation amplifier and a feedback network, wherein the capacitance-voltage converter comprises a reference triangular wave generator, a differential capacitance detector and an integrating network; the feedback network is connected with the transconductance/compensation amplifier; the capacitance-voltage converter and the transconductance/compensation amplifier are all integrated circuits, the integrating network and the feedback network are discrete devices, all the devices of the servo circuit are integrated on the ceramic substrate by adopting a thick-film hybrid integration process, and the servo circuit is packaged in a metal full-sealed mode.
the voltage-capacitance converter is provided with working voltage by a positive three-terminal voltage stabilizer and a negative three-terminal voltage stabilizer; the positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance voltage converter and the transconductance/compensation amplifier all adopt integrated circuits.
The ceramic substrate has the size of
The type of the capacitance-voltage converter is LZF15, and the type of the transconductance/compensation amplifier is LB 314.
The positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance-voltage converter and the transconductance/compensation amplifier are adhered to the ceramic substrate by using insulating glue.
The servo circuit has the size ofThe capacitor in the servo circuit adopts a 0603-size miniature chip monolithic capacitor.
The processing method of the miniature metal fully-sealed quartz flexible accelerometer servo circuit comprises the following steps:
The servo circuit adopts a thick film hybrid integration process, carries out multilayer layout wiring on a circuit layout, manufactures a passive network on a substrate through thick film processes such as screen printing, sintering and the like, and assembles a semiconductor device and a micro element on the passive network; the integrated circuit chip is bonded on the ceramic substrate by using an insulating adhesive, and the integrated circuit chip is electrically interconnected with the passive network on the thick film substrate by a bonding technology.
The method also comprises a deep phosphorus diffusion process of the output power tube of the transconductance/compensation amplifier, the transistor area of the output power tube of the transconductance/compensation amplifier is increased on the integrated circuit layout design, and an annular collector is adopted.
The servo circuit is packaged by metal circular parallel seam welding, and an inner cavity of the circuit is heated, baked and vacuumized before packaging; in the circuit screening process, leak detection screening is carried out; the capacitor in the servo circuit is a miniature chip monolithic capacitor, and the capacitor assembly adopts a reflow soldering process.
and the servo circuit is also reserved with a system PID control port for carrying out dynamic parameter adjustment on the circuit.
Compared with the prior art, the invention has the following beneficial effects:
The invention adopts the miniaturization design of a hybrid integrated circuit based on a thick film process, the positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance-voltage converter and the transconductance/compensation amplifier all adopt special integrated circuits, the chip circuit adopts a 0603-sized miniature chip monolithic capacitor, after integration, the circuit volume and weight are greatly reduced compared with a basic quartz flexible accelerometer servo circuit, and the servo circuit can form a miniature accelerometer with a matched quartz flexible acceleration sensor, thereby realizing the miniaturization of an accelerometer system. By adding a deep phosphorus diffusion process of the output power tube of the transconductance/compensation amplifier on the manufacturing process, the transistor area of the output power tube of the transconductance/compensation amplifier is increased on the integrated circuit layout design, and the series resistance from the collector to the buried layer is reduced by adopting the annular collector, so that the saturation voltage drop of the output stage triode of the transconductance/compensation amplifier is reduced, the power output is increased, and the current output capacity of the circuit and the accelerometer range are improved. Through the design of the output-stage power tube of the chip of the circuit transconductance amplifier, the current output capability of the circuit is improved, the measuring range can reach 70g (g is gravity acceleration), and the requirement of the accelerometer on large-range measurement is met. The quartz flexible accelerometer servo circuit adopting the metal parallel seam welding packaging form realizes the full sealing of the servo circuit and solves the reliability problem and the heat dissipation problem of the servo circuit in an extreme environment. By reserving a system PID control port, dynamic parameter adjustment can be carried out on the circuit according to system feedback, so that the circuit has the characteristic of configurable dynamic parameters, and good matching of the servo and the acceleration sensor is ensured.
drawings
FIG. 1 is a block diagram of a quartz flexure accelerometer of the present invention;
FIG. 2 is a circuit block diagram of the present invention;
FIG. 3 is a circuit diagram of the present invention;
FIG. 4 is a longitudinal structure diagram of the transconductance/compensation amplifier NPN transistor of the circuit of the present invention;
FIG. 5 is a schematic diagram of the circuit of the present invention.
Detailed Description
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the following description of the embodiments of the present invention with reference to the accompanying drawings and examples is given by way of illustration and not limitation.
As shown in figure 1, the micro metal full-sealed quartz flexible accelerometer servo circuit comprises a gauge head and a servo circuit, wherein the gauge head comprises a torquer, a pendulum component dynamic module and a differential capacitance sensor which are sequentially connected, and the servo circuit comprises a capacitance-voltage converter and a transconductance/compensation amplifier which are sequentially connected. The capacitance-voltage converter is connected with a differential capacitance sensor of the accelerometer head, the transconductance/compensation amplifier is connected with a torquer of the accelerometer head, and the integrating network and the feedback network are connected with the capacitance-voltage converter and the transconductance/compensation amplifier. The positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance voltage converter and the transconductance/compensation amplifier all adopt integrated circuits, the integrating network and the feedback network adopt discrete devices, all components of the servo circuit are integrated on a ceramic substrate by adopting a thick film hybrid integration process, and the servo circuit adopts metal full-sealed packaging.
The servo circuit of the quartz flexible accelerometer mainly comprises a capacitance-voltage converter, a transconductance/compensation amplifier and the like. Quartz scratcherThe structure of the accelerometer is shown in figure 1. When there is an acceleration a along the input axis of the accelerometeriwhen the differential capacitance sensor pendulous reed deviates from the center position, the capacitance variation is 2 delta C, the capacitance voltage converter (LZF15) in the servo circuit detects the variation and outputs current, the current is integrated by the integrating network to output voltage, then the voltage is amplified by the transconductance/compensation amplifier (LB314) and converted into current, the magnitude of the current is proportional to the input acceleration, the polarity depends on the direction of the input acceleration, the output current is added to the torquer of the meter head, so as to generate rebalancing torque, the pendulum assembly is used for balancing the factor aiThe resulting moment of inertia.
In the circuit, a positive three-terminal regulator 7809 and a negative three-terminal regulator 7909 provide working voltage for a capacitance voltage converter LZF15, and the structure diagram of a quartz flexible accelerometer servo circuit is shown in FIG. 2.
The circuit adopts thick film hybrid integration technology, electronic plate making software is used for carrying out multilayer layout wiring on a circuit layout to form technology manufacturing data, the technology manufacturing data is converted into a photo-drawing negative film, a thick film printing stencil is manufactured according to the photo-drawing negative film, a passive network is manufactured on a substrate through thick film technologies such as screen printing, sintering and the like, and a semiconductor device chip and a micro element are assembled on the passive network. The positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance voltage converter and the transconductance/compensation amplifier are special integrated circuits, are adhered on a ceramic substrate by using insulating glue, realize the electrical interconnection of a chip pressure welding point and a passive network on a thick film substrate by a bonding technology, use a 0603-size miniature chip monolithic capacitor, adopt a reflow soldering process for capacitor assembly, print and sinter a resistor paste on the ceramic substrate by a resistor, and ensure the resistance precision by laser value adjustment.
The integrated optimized circuit substrate has the size ofThe external dimension is as follows:The circuit outline is shown in fig. 3. The volume is more traditional quartzThe servo circuit of the flexible accelerometer is reduced by 52%; the mass of the circuit is 5.5g, which is reduced by 40% compared with the servo circuit of the traditional quartz flexible accelerometer.
The invention improves the output current of the servo circuit by reducing the saturation voltage drop of the output stage triode of the transconductance/compensation amplifier and increasing the power output. An important factor influencing the saturation voltage drop of the triode is a collector series resistor, and the saturation voltage drop is reduced by adopting the following measures in layout design and manufacturing process. The longitudinal structure of the output power tube is shown in fig. 4 (a), and the collector series resistance mainly has three: a collector to buried layer series resistor R1, a buried layer resistor R2, a buried layer to base series resistor R3. The resistance of the resistor R1 is the largest and is more than twice of the sum of the other two resistors. Therefore, the saturation voltage drop of the output stage triode of the power amplification module can be effectively reduced by reducing the resistance value of the R1. The method for reducing the resistance value of R1 is as follows: a deep phosphorus (DN) diffusion procedure is added on the manufacturing process, and the difference between the sheet resistance of the deep phosphorus and the sheet resistance of the epitaxial layer (N-) is tens of times, so that the collector series resistance can be effectively reduced by adding the deep phosphorus process, the resistance value can be reduced by 75-85%, and the improved process is shown as (b) in figure 4; in layout design, the area of a transistor is increased, an annular collector is adopted, the series resistance of the collector is reduced, and the purposes of reducing saturation voltage drop and increasing output power are achieved, wherein a planar structure diagram of an NPN tube is shown in fig. 5. The improved power amplification integrated circuit is used, the performance of the servo circuit is effectively improved, the range of the accelerometer is improved, and the output range can reach 70 g.
The output current of the servo circuit is improved by increasing the deep phosphorus diffusion process of the output power tube of the transconductance/compensation amplifier on the manufacturing process, increasing the transistor area of the output power tube of the transconductance/compensation amplifier on the integrated circuit layout design, reducing the series resistance from a collector to a buried layer by adopting an annular collector, reducing the saturation voltage drop of the output grade triode of the transconductance/compensation amplifier and increasing the power output.
The principle of the invention is as follows: and a hybrid integration technology based on a thick film process is adopted to integrate all components of the servo circuit on a ceramic substrate with the diameter phi of 17.2mm, so that the miniaturization of the servo circuit is realized. By optimizing the chip layout design and improving the manufacturing process, the saturation voltage drop of the output-stage triode of the power amplification circuit is reduced, the power output is increased, and the current output capability of the circuit and the accelerometer measuring range can be improved. The circuit adopts the circular totally enclosed packaging form of metal, has greatly improved the thermal diffusivity and the reliability of circuit. By reserving a system PID control port, dynamic parameter adjustment can be carried out on the circuit according to system feedback, so that the circuit has the characteristic of configurable dynamic parameters, and good matching of the servo and the acceleration sensor is ensured.
The invention relates to a processing method of a miniature metal fully-sealed quartz flexible accelerometer servo circuit, which comprises the following steps: the circuit layout is subjected to multilayer layout and wiring by adopting a thick film hybrid integration process, a passive network is manufactured on a substrate by thick film processes such as screen printing, sintering and the like, and a semiconductor device and a micro element are assembled on the passive network. The application-specific integrated circuit chip is adhered to the ceramic substrate by using an insulating adhesive, and is electrically interconnected with the passive network on the thick film substrate by using a bonding technology, a 0603-size micro chip monolithic capacitor is used, and the capacitor is assembled by adopting a reflow soldering process. The output power tube of the transconductance amplification module in the circuit is added with a deep phosphorus diffusion procedure in the manufacturing process, the area of a transistor is increased in the integrated circuit layout design, and the collector series resistance can be reduced by adopting the annular collector, so that the aims of reducing the saturation voltage drop and increasing the output power are fulfilled, and the output current of the circuit is increased. The circuit adopts the circular parallel seam welding encapsulation of metal, belongs to the totally enclosed packaging form, heats and the evacuation to the circuit inner chamber before the encapsulation, reduces the steam content and the oxygen molecule content of circuit intracavity, and the screening of hunting leak is carried out in the circuit screening process, can improve circuit reliability, and the metal package circuit heat dissipation of being convenient for.
And the servo circuit is packaged by adopting a parallel seam welding process. Parallel seam welding is used as a high-reliability air tightness packaging method and is widely applied to packaging of metal ceramic tube shells and metal tube shells. Parallel seam welding is resistance welding, generally, a closed loop is formed after two conical roller electrodes are contacted with a metal cover plate, a pulse current formed by a welding power supply forms a loop through the electrodes and the cover plate, a large contact resistance exists at the contact part of the electrodes and the cover plate in the whole loop, and the electrifying resistance generates heat to enable the contact position to generate a large amount of joule heat. The basic process flow of parallel seam welding comprises vacuum baking pretreatment, spot welding pre-fixing and parallel seam welding. In the circuit screening process, leakage detection screening is carried out on the circuit according to a microelectronic device test method and a microelectronic device program of the national military standard, and the sealing performance of the circuit is ensured. The circuit adopts the totally enclosed encapsulation of circular metal, and this packaging form has improved the thermal diffusivity of circuit, has improved the reliability of circuit.
The dynamic parameters of the circuit are important for matching the acceleration sensor and the servo circuit, and influence the circuit matching. The dynamic parameters of the circuit comprise the resonant frequency, the bandwidth, the oscillation degree, the overshoot and the half-wave oscillation frequency of the circuit. By reserving a system PID control port, the dynamic parameters of the circuit can be adjusted. Wherein, 1, 2, 3, 14, 15, 16 are reserved control ports, and the leading-out ends are shown in table 1. If 1 and 2 are on, 15 and 16 are on, and 3 and 14 are floating, the state is the basic state in which no external system control is required if the servo circuit is well matched to the acceleration sensor.
TABLE 1
| Serial number | symbol | Terminal function |
| 1 | Rext1-1 | Feedback network control port 1 |
| 2 | Rext1-2 | Feedback network control port 2 |
| 3 | Rext1-3 | Feedback network control port 3 |
| 4 | MH | connect the high end of the torque device |
| 5 | ML | connect the high end of the torque device |
| 6 | VS+ | Positive power supply terminal |
| 7 | GND | Ground |
| 8 | VS- | Negative power supply terminal |
| 9 | VO+ | Positive output terminal of voltage stabilizer |
| 10 | VO- | Positive output terminal of voltage stabilizer |
| 11 | Tesf | Self-checking terminal |
| 12 | C+ | differential capacitance detection terminal 1 |
| 13 | C- | Differential capacitance detection terminal 2 |
| 14 | Rext2-1 | Integral network control port 1 |
| 15 | Rext2-2 | Integral network control port 2 |
| 16 | Rext2-3 | Integral network control port 3 |
Due to the problem of consistency of process parameters of the acceleration sensors, the basic state servo circuit cannot be matched with some acceleration sensors, the state of an integrating network and the state of a feedback network can be changed through PID control according to system feedback, and dynamic parameter adjustment is carried out on the circuit, wherein the state of the integrating network can be adjusted between a 14 end and a 16 end in a parallel capacitance mode, and the state of the integrating network can be adjusted between a 15 end and a 16 end in a series resistance mode; the feedback network state is changed in a mode of connecting capacitors in parallel between the end 1 and the end 7, a mode of connecting resistors in parallel between the end 2 and the end 3 and a mode of connecting resistors in series between the end 1 and the end 2.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the embodiments of the invention without departing from the spirit and scope of the invention, which is to be covered by the claims.
Claims (10)
1. A miniature metal fully-sealed quartz flexible accelerometer servo circuit is characterized by comprising a capacitance-voltage converter, a transconductance/compensation amplifier and a feedback network, wherein the capacitance-voltage converter comprises a reference triangular wave generator, a differential capacitance detector and an integrating network; the feedback network is connected with the transconductance/compensation amplifier; the capacitance-voltage converter and the transconductance/compensation amplifier are all integrated circuits, the integrating network and the feedback network are discrete devices, all the devices of the servo circuit are integrated on the ceramic substrate by adopting a thick-film hybrid integration process, and the servo circuit is packaged in a circular metal full-sealed mode.
2. The servo circuit of claim 1, wherein the voltage-to-capacitance converter is supplied with operating voltage by a positive three-terminal regulator and a negative three-terminal regulator; the positive three-terminal voltage stabilizer, the negative three-terminal voltage stabilizer, the capacitance voltage converter and the transconductance/compensation amplifier all adopt integrated circuits.
3. The miniature metal omniseal stone of claim 1the servo circuit of the quartz flexible accelerometer is characterized in that the ceramic substrate has the size of
4. The servo circuit of claim 1, wherein the capacitance-to-voltage converter is of the type LZF15 and the transconductance/compensation amplifier is of the type LB 314.
5. The micro metal hermetically sealed quartz flexure accelerometer servo circuit of claim 4, wherein the positive three terminal regulator, the negative three terminal regulator, the capacitive voltage converter, the transconductance/compensation amplifier are bonded to the ceramic substrate using an insulating glue.
6. The miniature metal hermetically sealed quartz flexure accelerometer servo circuit of claim 1, wherein the servo circuit is dimensioned to beThe capacitor in the servo circuit adopts a 0603-size miniature chip monolithic capacitor.
7. The method for processing the servo circuit of the miniature metal fully-sealed quartz flexible accelerometer according to claim 1, comprising the steps of:
The servo circuit adopts a thick film hybrid integration process, carries out multilayer layout wiring on a circuit layout, manufactures a passive network on a substrate through thick film processes such as screen printing, sintering and the like, and assembles a semiconductor device and a micro element on the passive network; the integrated circuit chip is bonded on the ceramic substrate by using an insulating adhesive, and the integrated circuit chip is electrically interconnected with the passive network on the thick film substrate by a bonding technology.
8. The method for processing the servo circuit of the micro metal fully-sealed quartz flexible accelerometer according to claim 7, further comprising a deep phosphorus diffusion process of an output power tube of the transconductance/compensation amplifier, wherein the area of the output power tube transistor of the transconductance/compensation amplifier is increased on the integrated circuit layout design, and a ring-shaped collector is adopted.
9. The method for processing the servo circuit of the micro metal full-sealed quartz flexible accelerometer according to claim 7, wherein the servo circuit is packaged by metal circular parallel seam welding, and an inner cavity of the circuit is heated, baked and vacuumized before packaging; in the circuit screening process, leak detection screening is carried out; the capacitor in the servo circuit is a miniature chip monolithic capacitor, and the capacitor assembly adopts a reflow soldering process.
10. The method for processing the servo circuit of the micro metal full-sealed quartz flexible accelerometer according to claim 7, wherein a system PID control port is reserved in the servo circuit and is used for carrying out dynamic parameter adjustment on the circuit.
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| CN111024982A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | High-temperature quartz flexible accelerometer servo circuit |
| CN111024983A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | Method for realizing servo circuit of high-temperature quartz flexible accelerometer |
| CN111983259A (en) * | 2020-08-24 | 2020-11-24 | 西安微电子技术研究所 | Servo control circuit, quartz flexible accelerometer based on servo control circuit and manufacturing method |
| CN112394195A (en) * | 2020-11-13 | 2021-02-23 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
| CN113009182A (en) * | 2021-02-26 | 2021-06-22 | 西安微电子技术研究所 | Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof |
| CN113063965A (en) * | 2021-03-23 | 2021-07-02 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and quartz flexible accelerometer |
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| CN111024982A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | High-temperature quartz flexible accelerometer servo circuit |
| CN111024983A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | Method for realizing servo circuit of high-temperature quartz flexible accelerometer |
| CN111024983B (en) * | 2019-12-18 | 2023-12-29 | 青岛航天半导体研究所有限公司 | Realization method of high-temperature quartz flexible accelerometer servo circuit |
| CN111024982B (en) * | 2019-12-18 | 2024-01-30 | 青岛航天半导体研究所有限公司 | Servo circuit of high-temperature quartz flexible accelerometer |
| CN111983259A (en) * | 2020-08-24 | 2020-11-24 | 西安微电子技术研究所 | Servo control circuit, quartz flexible accelerometer based on servo control circuit and manufacturing method |
| CN112394195A (en) * | 2020-11-13 | 2021-02-23 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
| CN112394195B (en) * | 2020-11-13 | 2023-04-07 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
| CN113009182A (en) * | 2021-02-26 | 2021-06-22 | 西安微电子技术研究所 | Integrated zero-offset adjustable accelerometer servo circuit and manufacturing method and application thereof |
| CN113063965A (en) * | 2021-03-23 | 2021-07-02 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and quartz flexible accelerometer |
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