CN204495851U - A kind of high quartz flexure accelerometers servo circuit - Google Patents
A kind of high quartz flexure accelerometers servo circuit Download PDFInfo
- Publication number
- CN204495851U CN204495851U CN201520211969.3U CN201520211969U CN204495851U CN 204495851 U CN204495851 U CN 204495851U CN 201520211969 U CN201520211969 U CN 201520211969U CN 204495851 U CN204495851 U CN 204495851U
- Authority
- CN
- China
- Prior art keywords
- electric pressure
- pressure converter
- differential capacitor
- connects
- trsanscondutance amplifier
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Measuring Fluid Pressure (AREA)
Abstract
A kind of high quartz flexure accelerometers servo circuit, comprise the differential capacitor-electric pressure converter be integrated on Al2O3 substrate, trsanscondutance amplifier, bistable depressor and peripheral cell, differential capacitor-electric pressure converter connects with trsanscondutance amplifier and bistable depressor respectively, trsanscondutance amplifier accesses bistable depressor front end after resistance, trsanscondutance amplifier connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter, differential capacitor-electric pressure converter connects corrective network 1 and corrective network 2, corrective network 2 also connects with trsanscondutance amplifier.Be intended to improve Measurement Resolution, temperature tolerance, driving force, and reduce number of elements, improve processing facility.And make that measurement range increases, operating temperature range broadens, process convenience and to improve and reliability increases.Meanwhile, five the golden conduction band solder joints combined with sensor are changed into palladium-silver conduction band, and reinforce with soldering paste, add the reliability of circuit.
Description
Technical field
The utility model belongs to electronic technology field, relates to a kind of high quartz flexure accelerometers servo circuit.
Background technology
At present, existing accelerometer servo circuit generally adopts traditional differential capacitor-voltage transitions pattern, Measurement Resolution is low, peripheral cell is many, due to the backwardness of traditional servo circuit in design and processes, causes the shortcomings such as circuit operating temperature interval is narrow, current drive capability is little.In addition, drawing what adopt outside traditional circuit is golden conduction band, with easily produce " tin eats gold " phenomenon during sensor solder bond, have a strong impact on the fastness of solder joint.
Utility model content
The utility model, in order to solve the problems of the technologies described above, provides a kind of high quartz flexure accelerometers servo circuit, and Measurement Resolution and measurement range increase, operating temperature range is wide, processing convenience improves and reliability increases.
The utility model is achieved through the following technical solutions:
A kind of high quartz flexure accelerometers servo circuit, comprise the differential capacitor-electric pressure converter be integrated on Al2O3 substrate, trsanscondutance amplifier, bistable depressor and peripheral cell, differential capacitor-electric pressure converter connects with trsanscondutance amplifier and bistable depressor respectively, trsanscondutance amplifier accesses bistable depressor front end after resistance, trsanscondutance amplifier connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter, differential capacitor-electric pressure converter connects corrective network 1 and corrective network 2, corrective network 2 also connects with trsanscondutance amplifier.
Described differential capacitor-electric pressure converter also through capacitor with connect corrective network 1 and be connected, the signal input port end of corrective network 1 divides two-way, and a road connects outer signal after resistance, and a road is directly connected with differential capacitor-electric pressure converter.
Also connect after capacitor respectively between described differential capacitor-electric pressure converter and two inlet ends of trsanscondutance amplifier.
The bare chip of described differential capacitor-electric pressure converter to be model be C6201, the bare chip of trsanscondutance amplifier to be model be HJ64-HJ314.
Differential capacitor-electric pressure converter is ground connection after resistance also.
Described differential capacitor-electric pressure converter is point two-way after capacitor, and a road ground connection, a road connects with quartz flexible accelerometer gauge outfit.
Be integrated with the Al2O3 substrate micropackaging of differential capacitor-electric pressure converter, trsanscondutance amplifier, bistable depressor and peripheral cell in metal semitight cavity.
Al2O3 substrate micropackaging is in round metal shell.
Compared with prior art, the utility model has following useful technique effect:
The high quartz flexure accelerometers servo circuit that the utility model provides, is intended to improve Measurement Resolution, temperature tolerance, driving force, and reduces number of elements, improves processing facility.And make that measurement range increases, operating temperature range broadens, process convenience and to improve and reliability increases.Meanwhile, " C-, C+, L-, L+, " five the golden conduction band solder joints combined with sensor are changed into palladium-silver conduction band, and reinforces with soldering paste, add the reliability of circuit.
Accompanying drawing explanation
Fig. 1 is the utility model electricity theory diagram;
The packing forms figure of the high quartz flexure accelerometers servo circuit that Fig. 2 provides for the utility model.
Wherein: 1 is differential capacitor-electric pressure converter; 2 is trsanscondutance amplifier; 3 is bistable depressor.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
See Fig. 1 to Fig. 2, a kind of high quartz flexure accelerometers servo circuit, comprise the differential capacitor-electric pressure converter 1 be integrated in by the mode of thick-film hybrid integration on Al2O3 substrate, trsanscondutance amplifier 2, bistable depressor 3 and peripheral cell, differential capacitor-electric pressure converter 1 connects with trsanscondutance amplifier 2 and bistable depressor 3 respectively, trsanscondutance amplifier 2 accesses bistable depressor 3 front end after resistance, trsanscondutance amplifier 2 connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter 1, differential capacitor-electric pressure converter 1 connects corrective network 1 and corrective network 2, corrective network 2 also connects with trsanscondutance amplifier 2, described differential capacitor-electric pressure converter 1 also through capacitor with connect corrective network 1 and be connected, the signal input port end of corrective network 1 divides two-way, and a road connects outer signal after resistance, and a road is directly connected with differential capacitor-electric pressure converter 1, also connect after capacitor respectively between described differential capacitor-electric pressure converter 1 and two inlet ends of trsanscondutance amplifier 2, differential capacitor-electric pressure converter 1 is ground connection after resistance also.Described differential capacitor-electric pressure converter 1 is point two-way after capacitor, and a road ground connection, a road connects with quartz flexible accelerometer gauge outfit.
Concrete, described differential capacitor-electric pressure converter 1 for model be the bare chip of C6201, trsanscondutance amplifier 1 for model be the bare chip of HJ64-HJ314; Bistable depressor 3 is bare chip.
Wherein, the Al2O3 substrate micropackaging of differential capacitor-electric pressure converter 1, trsanscondutance amplifier 2, bistable depressor 3 and peripheral cell is integrated with in metal semitight cavity.Concrete, Al2O3 substrate micropackaging is in round metal shell.
The function of each pin of servo circuit has been marked in Fig. 1, in actual use will at circuit 1 pin and the indirect sampling resistor Rs of 5 pin.
The dimensional drawing of circuit package shown in Fig. 2, and marked pin order.Wherein, L+ interior of bond pads connects with leading foot 2, and L-interior of bond pads connects with leading foot 1.On substrate, C+ interior of bond pads connects with leading foot 8, and C-interior of bond pads connects with leading foot 7." " interior of bond pads connects with leading foot 5.
The utility model belongs to a kind of energy and quartz flexible accelerometer gauge outfit combines, thus forms the servo circuit of complete closed-loop system.It is integrated circuit acceleration signal being converted to analog quantity.Specifically differential capacitor-electric pressure converter, trsanscondutance amplifier and bistable depressor three partial circuit are integrated in the circuit in a metal semitight cavity.
Concrete, because the flexible pendulum of quartz flexible accelerometer is made up of quartz material, structure is simple.Its good stability, adds the mixing servo circuit of miniaturization, and whole accelerometer is had, and volume is little, precision is high, shock resistance and the advantage such as price is low.Therefore its development in recent years is very fast, has been widely used in the fields such as aviation, guided missile, deviational survey, survey shake.Quartz flexible accelerometer is made up of magnet steel, quartz pendulous reed, torquer coil, servo circuit etc.Therefore the course of work of the present utility model is: quartz pendulous reed produces differential electrical capacity by acceleration effect, by differential capacitor-electric pressure converter, the electric capacity of change is converted to voltage signal, and by trsanscondutance amplifier, output current is added on torquer coil, torquer coil forms magnetic field by electric current, a power contrary with acceleration direction is formed with magnet steel, quartz pendulous reed is withdrawn into origin-location, thus the closed-loop system that formation one is complete.
The high quartz flexure accelerometers servo circuit that the utility model provides, is intended to improve Measurement Resolution, temperature tolerance, driving force, and reduces number of elements, improves processing facility.And make that measurement range increases, operating temperature range broadens, process convenience and to improve and reliability increases.Meanwhile, " C-, C+, L-, L+, " five the golden conduction band solder joints combined with sensor are changed into palladium-silver conduction band, and reinforces with soldering paste, add the reliability of circuit.
More than show and describe ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; what describe in above-described embodiment and instructions just illustrates principle of the present utility model; under the prerequisite not departing from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.
Claims (8)
1. a high quartz flexure accelerometers servo circuit, it is characterized in that, comprise the differential capacitor-electric pressure converter (1) be integrated on Al2O3 substrate, trsanscondutance amplifier (2), bistable depressor (3) and peripheral cell, differential capacitor-electric pressure converter (1) connects with trsanscondutance amplifier (2) and bistable depressor (3) respectively, trsanscondutance amplifier (2) accesses bistable depressor (3) front end after resistance, trsanscondutance amplifier (2) connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter (1), differential capacitor-electric pressure converter (1) connects corrective network 1 and corrective network 2, corrective network 2 also connects with trsanscondutance amplifier (2).
2. high quartz flexure accelerometers servo circuit according to claim 1, it is characterized in that, described differential capacitor-electric pressure converter (1) also through capacitor with connect corrective network 1 and be connected, the signal input port end of corrective network 1 divides two-way, one tunnel connects outer signal after resistance, and a road is directly connected with differential capacitor-electric pressure converter (1).
3. high quartz flexure accelerometers servo circuit according to claim 1, it is characterized in that, also connect after capacitor respectively between described differential capacitor-electric pressure converter (1) and two inlet ends of trsanscondutance amplifier (2).
4. high quartz flexure accelerometers servo circuit according to claim 1, it is characterized in that, described differential capacitor-electric pressure converter (1) for model be the bare chip of C6201, trsanscondutance amplifier (1) for model be the bare chip of HJ64-HJ314.
5. high quartz flexure accelerometers servo circuit according to claim 1, is characterized in that, differential capacitor-electric pressure converter (1) also ground connection after resistance.
6. high quartz flexure accelerometers servo circuit according to claim 1, is characterized in that, described differential capacitor-electric pressure converter (1) is point two-way after capacitor, and a road ground connection, a road connects with quartz flexible accelerometer gauge outfit.
7. high quartz flexure accelerometers servo circuit according to claim 1, it is characterized in that, be integrated with the Al2O3 substrate micropackaging of differential capacitor-electric pressure converter (1), trsanscondutance amplifier (2), bistable depressor (3) and peripheral cell in metal semitight cavity.
8. high quartz flexure accelerometers servo circuit according to claim 7, is characterized in that, Al2O3 substrate micropackaging is in round metal shell.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520211969.3U CN204495851U (en) | 2015-04-09 | 2015-04-09 | A kind of high quartz flexure accelerometers servo circuit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520211969.3U CN204495851U (en) | 2015-04-09 | 2015-04-09 | A kind of high quartz flexure accelerometers servo circuit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204495851U true CN204495851U (en) | 2015-07-22 |
Family
ID=53575156
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520211969.3U Active CN204495851U (en) | 2015-04-09 | 2015-04-09 | A kind of high quartz flexure accelerometers servo circuit |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204495851U (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105866457A (en) * | 2016-05-06 | 2016-08-17 | 武汉航空仪表有限责任公司 | Accelerometer circuit |
| CN107561314A (en) * | 2016-06-30 | 2018-01-09 | 航天科工惯性技术有限公司 | A kind of quartz flexible accelerometer and its frock |
| CN109186638A (en) * | 2018-10-17 | 2019-01-11 | 西安微电子技术研究所 | A kind of accelerometer servo circuit that electric current constant multiplier is controllable and its manufacturing process |
| CN110579626A (en) * | 2019-10-22 | 2019-12-17 | 西安微电子技术研究所 | Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof |
| CN111024983A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | Method for realizing servo circuit of high-temperature quartz flexible accelerometer |
| CN112394195A (en) * | 2020-11-13 | 2021-02-23 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
| CN113030512A (en) * | 2019-12-25 | 2021-06-25 | 航天科工惯性技术有限公司 | Accelerometer and accelerometer gauge head and servo circuit connection method |
| CN115932326A (en) * | 2023-01-09 | 2023-04-07 | 保定开拓精密仪器制造有限责任公司 | Quartz flexible accelerometer servo circuit |
-
2015
- 2015-04-09 CN CN201520211969.3U patent/CN204495851U/en active Active
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105866457A (en) * | 2016-05-06 | 2016-08-17 | 武汉航空仪表有限责任公司 | Accelerometer circuit |
| CN105866457B (en) * | 2016-05-06 | 2018-11-06 | 武汉航空仪表有限责任公司 | A kind of accelerometer circuit |
| CN107561314A (en) * | 2016-06-30 | 2018-01-09 | 航天科工惯性技术有限公司 | A kind of quartz flexible accelerometer and its frock |
| CN109186638A (en) * | 2018-10-17 | 2019-01-11 | 西安微电子技术研究所 | A kind of accelerometer servo circuit that electric current constant multiplier is controllable and its manufacturing process |
| CN110579626A (en) * | 2019-10-22 | 2019-12-17 | 西安微电子技术研究所 | Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof |
| CN111024983A (en) * | 2019-12-18 | 2020-04-17 | 青岛航天半导体研究所有限公司 | Method for realizing servo circuit of high-temperature quartz flexible accelerometer |
| CN111024983B (en) * | 2019-12-18 | 2023-12-29 | 青岛航天半导体研究所有限公司 | Realization method of high-temperature quartz flexible accelerometer servo circuit |
| CN113030512A (en) * | 2019-12-25 | 2021-06-25 | 航天科工惯性技术有限公司 | Accelerometer and accelerometer gauge head and servo circuit connection method |
| CN112394195A (en) * | 2020-11-13 | 2021-02-23 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
| CN112394195B (en) * | 2020-11-13 | 2023-04-07 | 西安微电子技术研究所 | Quartz flexible accelerometer servo circuit and assembling method |
| CN115932326A (en) * | 2023-01-09 | 2023-04-07 | 保定开拓精密仪器制造有限责任公司 | Quartz flexible accelerometer servo circuit |
| CN115932326B (en) * | 2023-01-09 | 2023-08-11 | 保定开拓精密仪器制造有限责任公司 | Quartz flexible accelerometer servo circuit |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN204495851U (en) | A kind of high quartz flexure accelerometers servo circuit | |
| CN109186638B (en) | Accelerometer servo circuit with controllable current scale factor and manufacturing process thereof | |
| CN204556661U (en) | A kind of quartz flexible accelerometer servo circuit | |
| CN110579625A (en) | High-temperature-resistant quartz flexible accelerometer servo circuit and processing method thereof | |
| CN110068418A (en) | A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor | |
| CN201311294Y (en) | MEMS gyroscope with programmable slice system | |
| CN101493367A (en) | Miniature dynamical stress sensor based on MEMS technology and method of producing same | |
| CN204302389U (en) | A kind of electric power components and parts measuring instrument | |
| CN206362818U (en) | A kind of quartz flexibility acceleration sensor with flexible PCB | |
| CN201605163U (en) | High-capacitance micro inertial sensor with comb-shaped damping holes | |
| CN104568261A (en) | Digital strain torque sensor on basis of multifunctional signal conditioning system | |
| CN207675218U (en) | A kind of pressure and temperature sensor based on PCB encapsulation | |
| CN100462723C (en) | Miniature mechanical three-axis angular rate sensor | |
| CN102809670A (en) | Monolithic open-loop integrated circuit of acceleration sensor | |
| CN203069764U (en) | Electric parameter measurement circuit of battery pack | |
| CN2828821Y (en) | Micromechanical triaxial angle rate sensor | |
| CN209043234U (en) | High-precision capacitance-grid type angular transducer | |
| CN207147499U (en) | A kind of inertia measuring module | |
| CN203396501U (en) | Pointer type electronic thermometer | |
| CN209692712U (en) | Highly integrated charge amplifier circuit | |
| CN203744982U (en) | Outer shell for fiber optic gyroscope | |
| CN202350782U (en) | Intrinsic safety type simulative inclination angle sensor for mining | |
| CN206353049U (en) | A kind of intelligent electronic-scale system | |
| CN206905960U (en) | A kind of more device for pressure measurement of centralization | |
| CN205785276U (en) | Multifunctional intellectual procedure inspection instrument |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |