CN110068418A - A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor - Google Patents
A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor Download PDFInfo
- Publication number
- CN110068418A CN110068418A CN201910215827.7A CN201910215827A CN110068418A CN 110068418 A CN110068418 A CN 110068418A CN 201910215827 A CN201910215827 A CN 201910215827A CN 110068418 A CN110068418 A CN 110068418A
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- Prior art keywords
- pressure
- vibration
- acceleration
- sensor
- assembly
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- 230000001133 acceleration Effects 0.000 title claims abstract description 20
- 239000000919 ceramic Substances 0.000 claims description 11
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 10
- 238000009413 insulation Methods 0.000 claims description 8
- 230000004044 response Effects 0.000 abstract description 10
- 238000009530 blood pressure measurement Methods 0.000 abstract description 7
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 230000008901 benefit Effects 0.000 abstract description 3
- 238000005538 encapsulation Methods 0.000 abstract description 2
- 238000005259 measurement Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000002360 explosive Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/16—Measuring force or stress, in general using properties of piezoelectric devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/09—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by piezoelectric pick-up
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
- Measurement Of Mechanical Vibrations Or Ultrasonic Waves (AREA)
Abstract
The pressure and acceleration Multifunction Sensor that can be worked in vibration environment the invention discloses one kind, including a hollow shell, the upper shell is provided with connector assembly, and vibration component and pressure assembly are provided in the shell, and the outer casing bottom is provided with pressure transmitting assembly；Vibration acceleration signal is provided using the piezoelectric element being integrated in the same encapsulation to compensate the vibratory response of pressure sensor, completely solving the vibration signal when piezo-electric pressure sensor makees dynamic pressure measurement influences, and piezoelectric element directly exports vibration monitoring signal simultaneously；Self compensation when i.e. the combined type trans had both realized dynamic pressure measurement to response of looking genuine is vibrated, again by the respective independent dynamic pressure and vibration acceleration real-time monitoring to sensor mounting location of dynamic pressure measurement component and vibration measurement component, have the advantages that be easily assembled to, demarcate facilitate, performance it is stable.
Description
Technical field
The present invention relates to sensor fields, specifically, in particular to a kind of pressure that can be worked in vibration environment
And acceleration Multifunction Sensor.
Background technique
Piezo-electric pressure sensor is usually associated with vibration when measuring dynamic pressure, and piezoelectric element also has response to vibration,
Look genuine response signal to be mixed into vibration acceleration in the output signal of sensor.Eliminate the routine side of vibration spurious signal
Method is to measure the acceleration sensitivity of piezoelectric pressure sensory package in advance in sensor assembling process, then make one with
The consistent piezoelectric pile of its acceleration sensitivity is placed to the acceleration responsive signal for going to offset it in piezo-electric pressure sensor.This
Calibration during a is comparatively laborious, and the device of completion only has response to dynamic pressure.
Use piezoelectric ceramics for the piezo-electric pressure sensor of sensing element, due to the inherent characteristic of piezoelectric ceramics, with pressure
The variation piezoelectric ceramics export ratio quantity of electric charge of electroceramics surface pressing, but also can be with vibration, to pressure when dynamic pressure generation
Force sensor module has an impact, and sensor is made to generate vibration response signal.The output for eventually leading to piezo-electric pressure sensor is
Vibration signal is superimposed with pressure signal, influences pressure measurement accuracy.
Summary of the invention
The pressure and acceleration Multifunction Sensor that can be worked in vibration environment the purpose of the present invention is to provide one kind
To solve problems of the prior art.
Technical problem solved by the invention can be realized using following technical scheme:
A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor, including a hollow shell, institute
It states upper shell and is provided with connector assembly, vibration component and pressure assembly are provided in the shell, the outer casing bottom is set
It is equipped with pressure transmitting assembly.
In one embodiment of the invention, the connector assembly includes 4 needle connector of high temperature and adapter.
In one embodiment of the invention, the vibration component include pedestal, high-temperature insulation piece, high-temperature piezoelectric ceramics,
Electrode, mass block and high-strength bolt.
In one embodiment of the invention, the pressure assembly include pedestal, high-temperature insulation piece, high-temperature piezoelectric ceramics,
Electrode, transmitting block and high-strength bolt.
Compared with prior art, beneficial effects of the present invention are as follows:
1) vibration sensitivity of pressure assembly is compensated using the signal decaying branch of built-in vibration component, it is practical dynamic
State pressure response signal has reduced the vibratory response of pressure assembly when exporting, effectively export accurate dynamic pressure signal；
2) due to using Independent Vibration component and pressure assembly, vibration acceleration can be measured simultaneously with dynamic pressure.
Detailed description of the invention
Fig. 1 is the explosive view of sensor of the present invention.
Fig. 2 is the sectional view of sensor of the present invention.
Fig. 3 is vibration component structural schematic diagram of the present invention.
Fig. 4 is pressure assembly structural schematic diagram of the present invention.
Specific embodiment
To be easy to understand the technical means, the creative features, the aims and the efficiencies achieved by the present invention, below with reference to
Specific embodiment, the present invention is further explained.
As shown in Figs. 1-2, the present invention relates to a kind of pressure that can be worked in vibration environment and acceleration multifunctional sensings
Device.Including a hollow shell 400, the upper shell is provided with connector assembly 100, vibration group is provided in the shell
Part 200 and pressure assembly 300, the outer casing bottom are provided with pressure transmitting assembly 500.
In the present invention, connector assembly 100 is made of 4 needle connector 110 of high temperature and adapter 120,4 needle connector of high temperature
In two needles connect with the electrode positive and negative anodes of vibration component 200 with high temperature wire and cut-in pressure component 300 vibrate it is self-complementary
It repays, while pressure assembly 300 is connect with other two needle of 4 needle connector of high temperature；As shown in figure 3, vibration component 200 by pedestal 210,
Electrode 220, high-temperature piezoelectric ceramics 230, high-temperature insulation piece 240, mass block 250 and high-strength bolt 600 form, by pedestal, electricity
Pole, high-temperature piezoelectric ceramics, high-temperature insulation piece and mass block sequentially pass through bolt and use tooling centering, and pass through pedestal and bolt
Additional certain torsion is locked；Electrode and conducting wire can be improved the resistance to shock of itself, guarantee that connection is strong by being welded to connect
Degree and reliability；As shown in figure 4, pressure assembly 300 is by pedestal 310, electrode 320, high-temperature piezoelectric ceramics 330, high-temperature insulation piece
340, it transmits block 350 and high-strength bolt 600 forms；By pedestal, electrode, high-temperature piezoelectric ceramics, high-temperature insulation piece and transmitting block
It sequentially passes through bolt and uses tooling centering, and locked by pedestal with the additional certain torsion of bolt；Electrode and conducting wire are logical
Welded connecting is crossed, can be improved the resistance to shock of itself, guarantees bonding strength and reliability；Using being integrated in the same encapsulation
Piezoelectric element provide vibration acceleration signal the vibratory response of pressure sensor is compensated, completely solve in piezoelectricity pressure
Vibration signal when force snesor makees dynamic pressure measurement influences, and piezoelectric element directly exports vibration monitoring signal simultaneously；I.e. should
Self compensation when combined type trans had not only realized dynamic pressure measurement to response of looking genuine is vibrated, but also by dynamic pressure measurement component
With vibration measurement component respectively independently to the dynamic pressure and vibration acceleration real-time monitoring of sensor mounting location, has and be easy to
Assembling, the advantage that calibration is convenient, performance is stable.
The above shows and describes the basic principles and main features of the present invention and the advantages of the present invention.The technology of the industry
Personnel are it should be appreciated that the present invention is not limited to the above embodiments, and the above embodiments and description only describe this
The principle of invention, without departing from the spirit and scope of the present invention, various changes and improvements may be made to the invention, these changes
Change and improvement all fall within the protetion scope of the claimed invention.The claimed scope of the invention by appended claims and its
Equivalent thereof.
Claims (4)
1. pressure and acceleration Multifunction Sensor that one kind can work in vibration environment, described including a hollow shell
Upper shell is provided with connector assembly, and vibration component and pressure assembly, the outer casing bottom setting are provided in the shell
There is pressure transmitting assembly.
2. pressure and acceleration Multifunction Sensor that one kind as described in claim 1 can work in vibration environment, special
Sign is that the connector assembly includes 4 needle connector of high temperature and adapter.
3. pressure and acceleration Multifunction Sensor that one kind as described in claim 1 can work in vibration environment, special
Sign is that the vibration component includes pedestal, high-temperature insulation piece, high-temperature piezoelectric ceramics, electrode, mass block and high-strength bolt.
4. pressure and acceleration Multifunction Sensor that one kind as described in claim 1 can work in vibration environment, special
Sign is that the pressure assembly includes pedestal, high-temperature insulation piece, high-temperature piezoelectric ceramics, electrode, transmitting block and high-strength bolt.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910215827.7A CN110068418A (en) | 2019-03-21 | 2019-03-21 | A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910215827.7A CN110068418A (en) | 2019-03-21 | 2019-03-21 | A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110068418A true CN110068418A (en) | 2019-07-30 |
Family
ID=67366478
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910215827.7A Pending CN110068418A (en) | 2019-03-21 | 2019-03-21 | A kind of pressure that can be worked in vibration environment and acceleration Multifunction Sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110068418A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112729526A (en) * | 2020-12-21 | 2021-04-30 | 苏州长风航空电子有限公司 | High-temperature piezoelectric vibration sensor and method for improving stability thereof |
| WO2022068150A1 (en) * | 2020-09-29 | 2022-04-07 | 麒盛科技股份有限公司 | Physiological signal detection sensor with environmental vibration compensation |
| CN114323364A (en) * | 2021-11-11 | 2022-04-12 | 浙江中控技术股份有限公司 | High-precision pressure sensor with vibration measurement function and correction method |
| CN116222713A (en) * | 2023-03-21 | 2023-06-06 | 深圳艾依灵科技有限公司 | Sanitation truck weighing sensor and control method thereof |
Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1698140A1 (en) * | 1967-06-14 | 1972-03-02 | List Hans | Piezoelectric transducer |
| US4052628A (en) * | 1976-04-19 | 1977-10-04 | Gulton Industries, Inc. | Dynamic, shear-mode piezoelectric pressure sensor |
| JPH03113337A (en) * | 1989-09-28 | 1991-05-14 | Yokogawa Electric Corp | Accelerometer integrated type pressure sensor |
| SU1778573A1 (en) * | 1990-04-24 | 1992-11-30 | Nii Mash | Pulsating pressure pickup |
| RU2043610C1 (en) * | 1992-11-12 | 1995-09-10 | Научно-исследовательский институт физических измерений | Acoustic pressure transducer |
| US6293154B1 (en) * | 1999-12-10 | 2001-09-25 | Kulite Semiconductor Products | Vibration compensated pressure sensing assembly |
| JP2007286013A (en) * | 2006-04-20 | 2007-11-01 | National Institute Of Advanced Industrial & Technology | Pressure sensor with disturbance compensating function |
| CN101806812A (en) * | 2009-02-17 | 2010-08-18 | 精工爱普生株式会社 | Compound sensor, electronic equipment |
| CN105519260B (en) * | 2012-02-15 | 2014-07-09 | 中国兵器工业第二〇二研究所 | A kind of coil type measures the sensor of breech pressure |
| CN104297520A (en) * | 2013-07-15 | 2015-01-21 | 苏州美仑凯力电子有限公司 | Monolithic embedded integrated silicon acceleration and pressure composite sensor |
| CN104793015A (en) * | 2015-02-03 | 2015-07-22 | 中国科学院上海微系统与信息技术研究所 | Single-silicon-wafer compound sensor structure with pressure sensor embedded in accelerometer and manufacturing method |
| CN106768593A (en) * | 2016-11-14 | 2017-05-31 | 广东合微集成电路技术有限公司 | A kind of compound sensor and its manufacture method |
-
2019
- 2019-03-21 CN CN201910215827.7A patent/CN110068418A/en active Pending
Patent Citations (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE1698140A1 (en) * | 1967-06-14 | 1972-03-02 | List Hans | Piezoelectric transducer |
| US4052628A (en) * | 1976-04-19 | 1977-10-04 | Gulton Industries, Inc. | Dynamic, shear-mode piezoelectric pressure sensor |
| JPH03113337A (en) * | 1989-09-28 | 1991-05-14 | Yokogawa Electric Corp | Accelerometer integrated type pressure sensor |
| SU1778573A1 (en) * | 1990-04-24 | 1992-11-30 | Nii Mash | Pulsating pressure pickup |
| RU2043610C1 (en) * | 1992-11-12 | 1995-09-10 | Научно-исследовательский институт физических измерений | Acoustic pressure transducer |
| US6293154B1 (en) * | 1999-12-10 | 2001-09-25 | Kulite Semiconductor Products | Vibration compensated pressure sensing assembly |
| JP2007286013A (en) * | 2006-04-20 | 2007-11-01 | National Institute Of Advanced Industrial & Technology | Pressure sensor with disturbance compensating function |
| CN101806812A (en) * | 2009-02-17 | 2010-08-18 | 精工爱普生株式会社 | Compound sensor, electronic equipment |
| CN105519260B (en) * | 2012-02-15 | 2014-07-09 | 中国兵器工业第二〇二研究所 | A kind of coil type measures the sensor of breech pressure |
| CN104297520A (en) * | 2013-07-15 | 2015-01-21 | 苏州美仑凯力电子有限公司 | Monolithic embedded integrated silicon acceleration and pressure composite sensor |
| CN104793015A (en) * | 2015-02-03 | 2015-07-22 | 中国科学院上海微系统与信息技术研究所 | Single-silicon-wafer compound sensor structure with pressure sensor embedded in accelerometer and manufacturing method |
| CN106768593A (en) * | 2016-11-14 | 2017-05-31 | 广东合微集成电路技术有限公司 | A kind of compound sensor and its manufacture method |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2022068150A1 (en) * | 2020-09-29 | 2022-04-07 | 麒盛科技股份有限公司 | Physiological signal detection sensor with environmental vibration compensation |
| CN112729526A (en) * | 2020-12-21 | 2021-04-30 | 苏州长风航空电子有限公司 | High-temperature piezoelectric vibration sensor and method for improving stability thereof |
| CN114323364A (en) * | 2021-11-11 | 2022-04-12 | 浙江中控技术股份有限公司 | High-precision pressure sensor with vibration measurement function and correction method |
| CN114323364B (en) * | 2021-11-11 | 2024-01-30 | 浙江中控技术股份有限公司 | High-precision pressure sensor with vibration measuring function and correction method |
| CN116222713A (en) * | 2023-03-21 | 2023-06-06 | 深圳艾依灵科技有限公司 | Sanitation truck weighing sensor and control method thereof |
| CN116222713B (en) * | 2023-03-21 | 2023-09-01 | 深圳艾依灵科技有限公司 | Sanitation truck weighing sensor and control method thereof |
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| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190730 |
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| RJ01 | Rejection of invention patent application after publication |