CN204556661U - A kind of quartz flexible accelerometer servo circuit - Google Patents

A kind of quartz flexible accelerometer servo circuit Download PDF

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Publication number
CN204556661U
CN204556661U CN201520216644.4U CN201520216644U CN204556661U CN 204556661 U CN204556661 U CN 204556661U CN 201520216644 U CN201520216644 U CN 201520216644U CN 204556661 U CN204556661 U CN 204556661U
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China
Prior art keywords
electric pressure
trsanscondutance amplifier
pressure converter
quartz flexible
flexible accelerometer
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CN201520216644.4U
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Chinese (zh)
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王宽厚
张宝奇
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SHAANXI HANGJING MICRO-ELECTRONICS Co Ltd
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SHAANXI HANGJING MICRO-ELECTRONICS Co Ltd
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Abstract

The utility model discloses a kind of quartz flexible accelerometer servo circuit, comprise the differential capacitor-electric pressure converter be integrated on multi-layer high-temperature pressing polyimide substrate, trsanscondutance amplifier, positive and negative bistable depressor and peripheral cell, differential capacitor-electric pressure converter exports termination trsanscondutance amplifier two ends, the two ends of the positive and negative bistable depressor of trsanscondutance amplifier power supply termination, the power end of positive and negative bistable depressor connects with differential capacitor-electric pressure converter, trsanscondutance amplifier output terminal connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter, two ends of corrective network 1 are received on differential capacitor-electric pressure converter, corrective network 2 one termination corrective network 1, the other end connects with trsanscondutance amplifier.Measurement Resolution and measurement range increase, operating temperature range are broadened, processes convenience improvement and reliability increase.And improve driving force, and decrease number of elements.

Description

A kind of quartz flexible accelerometer servo circuit
Technical field
The utility model belongs to electronic technology field, relates to a kind of quartz flexible accelerometer servo circuit.
Background technology
At present, existing accelerometer servo circuit generally adopts traditional differential capacitor-voltage transitions pattern, and Measurement Resolution is low, peripheral cell is many.And due to the backwardness of traditional circuit in design and processes, cause the shortcomings such as circuit operating temperature interval is narrow, current drive capability is little.
Utility model content
The utility model, in order to solve the problems of the technologies described above, provide a kind of quartz flexible accelerometer servo circuit, improves Measurement Resolution, temperature tolerance, driving force, and decrease number of elements, and the reliability and the processing that improve circuit are convenient.
The utility model is achieved through the following technical solutions:
A kind of quartz flexible accelerometer servo circuit, comprise the differential capacitor-electric pressure converter be integrated on multi-layer high-temperature pressing polyimide substrate, trsanscondutance amplifier, positive and negative bistable depressor and peripheral cell, differential capacitor-electric pressure converter exports termination trsanscondutance amplifier two ends, the two ends of the positive and negative bistable depressor of trsanscondutance amplifier power supply termination, the power end of positive and negative bistable depressor connects with differential capacitor-electric pressure converter, trsanscondutance amplifier output terminal connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter, two ends of corrective network 1 are received on differential capacitor-electric pressure converter, corrective network 2 one termination corrective network 1, the other end connects with trsanscondutance amplifier.
The model of described differential capacitor-electric pressure converter is HJ115S.
The model of described trsanscondutance amplifier is HJ114S.
The model of described positive and negative bistable depressor is HJ80L09.
Be integrated with the multi-layer high-temperature pressing polyimide substrate micropackaging of differential capacitor-electric pressure converter, trsanscondutance amplifier, positive and negative bistable depressor and peripheral cell in metal semitight cavity.
Multi-layer high-temperature pressing polyimide substrate micropackaging is in round metal shell.
The power end also ground connection after capacitor of described trsanscondutance amplifier.
The entrance of described corrective network 1 connects outer signal after resistance.
Compared with prior art, the utility model has following useful technique effect:
The quartz flexible accelerometer servo circuit that the utility model provides, makes Measurement Resolution and measurement range increase, operating temperature range broaden, processes convenience improvement and reliability increase.And improve driving force, and decrease number of elements.
Accompanying drawing explanation
The electric theory diagram of the quartz flexible accelerometer servo circuit that Fig. 1 provides for the utility model;
The packing forms figure of the quartz flexible accelerometer servo circuit that Fig. 2 provides for the utility model.
Wherein: 1 is differential capacitor-electric pressure converter; 2 is trsanscondutance amplifier; 3 is positive and negative bistable depressor.
Embodiment
Below in conjunction with accompanying drawing, the utility model is described in further detail:
See Fig. 1 to Fig. 2, a kind of quartz flexible accelerometer servo circuit, comprise differential capacitor-electric pressure converter 1 that the model be integrated on multi-layer high-temperature pressing polyimide substrate is HJ115S, model is the trsanscondutance amplifier 2 of HJ114S, model is positive and negative bistable depressor 3 and the peripheral cell of HJ80L09, differential capacitor-electric pressure converter 1 exports termination trsanscondutance amplifier 2 two ends, the two ends of the positive and negative bistable depressor 3 of trsanscondutance amplifier 2 power supply termination, the power end also ground connection after capacitor of described trsanscondutance amplifier 2, the power end of positive and negative bistable depressor 3 connects with differential capacitor-electric pressure converter 1, trsanscondutance amplifier 2 output terminal connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter 1, two ends of corrective network 1 are received on differential capacitor-electric pressure converter 1, corrective network 2 one termination corrective network 1, the other end connects with trsanscondutance amplifier 2, the entrance of described corrective network 1 connects outer signal after resistance.
Wherein, the multi-layer high-temperature pressing polyimide substrate micropackaging of differential capacitor-electric pressure converter 1, trsanscondutance amplifier 2, positive and negative bistable depressor 3 and peripheral cell is integrated with in metal semitight cavity.Especially, multi-layer high-temperature pressing polyimide substrate micropackaging is in round metal shell.
The function of each pin of servo circuit has been marked in Fig. 1, in actual use will at circuit 1 pin and the indirect sampling resistor Rs of 5 pin.
The dimensional drawing of circuit package shown in Fig. 2, and marked pin order.Wherein, L+ interior of bond pads connects with leading foot 2, and L-interior of bond pads connects with leading foot 1.On substrate, C+ interior of bond pads connects with leading foot 8, and C-interior of bond pads connects with leading foot 7." " interior of bond pads connects with leading foot 5.
The utility model belongs to a kind of energy and quartz flexible accelerometer gauge outfit combines, thus forms the servo circuit of complete closed-loop system.It is integrated circuit acceleration signal being converted to analog quantity.Specifically differential capacitor-electric pressure converter, trsanscondutance amplifier and bistable depressor three partial circuit are integrated in the circuit in a metal semitight cavity.
Concrete, because the flexible pendulum of quartz flexible accelerometer is made up of quartz material, structure is simple.Its good stability, adds the mixing servo circuit of miniaturization, and whole accelerometer is had, and volume is little, precision is high, shock resistance and the advantage such as price is low.Therefore its development in recent years is very fast, has been widely used in the fields such as aviation, guided missile, deviational survey, survey shake.
Because quartz flexible accelerometer is made up of magnet steel, quartz pendulous reed, torquer coil, servo circuit etc.Therefore the course of work of the present utility model is: quartz pendulous reed produces differential electrical capacity by acceleration effect, by differential capacitor-electric pressure converter, the electric capacity of change is converted to voltage signal, and by trsanscondutance amplifier, output current is added on torquer coil, torquer coil forms magnetic field by electric current, a power contrary with acceleration direction is formed with magnet steel, quartz pendulous reed is withdrawn into origin-location, thus the closed-loop system that formation one is complete.
The quartz flexible accelerometer servo circuit that the utility model provides, makes Measurement Resolution and measurement range increase, operating temperature range broaden, processes convenience improvement and reliability increase.And improve driving force, and decrease number of elements.
More than show and describe ultimate principle of the present utility model and principal character and advantage of the present utility model.The technician of the industry should understand; the utility model is not restricted to the described embodiments; what describe in above-described embodiment and instructions just illustrates principle of the present utility model; under the prerequisite not departing from the utility model spirit and scope; the utility model also has various changes and modifications, and these changes and improvements all fall within the scope of claimed the utility model.The claimed scope of the utility model is defined by appending claims and equivalent thereof.

Claims (8)

1. a quartz flexible accelerometer servo circuit, it is characterized in that, comprise the differential capacitor-electric pressure converter (1) be integrated on multi-layer high-temperature pressing polyimide substrate, trsanscondutance amplifier (2), positive and negative bistable depressor (3) and peripheral cell, differential capacitor-electric pressure converter (1) exports termination trsanscondutance amplifier (2) two ends, the two ends of the positive and negative bistable depressor (3) of trsanscondutance amplifier (2) power supply termination, the power end of positive and negative bistable depressor (3) connects with differential capacitor-electric pressure converter (1), trsanscondutance amplifier (2) output terminal connects with quartz flexible accelerometer gauge outfit, quartz flexible accelerometer gauge outfit connects with differential capacitor-electric pressure converter (1), two ends of corrective network 1 are received on differential capacitor-electric pressure converter (1), corrective network 2 one termination corrective network 1, the other end connects with trsanscondutance amplifier (2).
2. quartz flexible accelerometer servo circuit according to claim 1, is characterized in that, the model of described differential capacitor-electric pressure converter (1) is HJ115S.
3. quartz flexible accelerometer servo circuit according to claim 1, is characterized in that, the model of described trsanscondutance amplifier (2) is HJ114S.
4. quartz flexible accelerometer servo circuit according to claim 1, is characterized in that, the model of described positive and negative bistable depressor (3) is HJ80L09.
5. quartz flexible accelerometer servo circuit according to claim 1, it is characterized in that, be integrated with the multi-layer high-temperature pressing polyimide substrate micropackaging of differential capacitor-electric pressure converter (1), trsanscondutance amplifier (2), positive and negative bistable depressor (3) and peripheral cell in metal semitight cavity.
6. quartz flexible accelerometer servo circuit according to claim 5, is characterized in that, multi-layer high-temperature pressing polyimide substrate micropackaging is in round metal shell.
7. quartz flexible accelerometer servo circuit according to claim 1, is characterized in that, the power end also ground connection after capacitor of described trsanscondutance amplifier (2).
8. quartz flexible accelerometer servo circuit according to claim 1, is characterized in that, the entrance of described corrective network 1 connects outer signal after resistance.
CN201520216644.4U 2015-04-09 2015-04-09 A kind of quartz flexible accelerometer servo circuit Active CN204556661U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201520216644.4U CN204556661U (en) 2015-04-09 2015-04-09 A kind of quartz flexible accelerometer servo circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201520216644.4U CN204556661U (en) 2015-04-09 2015-04-09 A kind of quartz flexible accelerometer servo circuit

Publications (1)

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CN204556661U true CN204556661U (en) 2015-08-12

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110579626A (en) * 2019-10-22 2019-12-17 西安微电子技术研究所 Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof
CN112394195A (en) * 2020-11-13 2021-02-23 西安微电子技术研究所 Quartz flexible accelerometer servo circuit and assembling method
CN115932326A (en) * 2023-01-09 2023-04-07 保定开拓精密仪器制造有限责任公司 Quartz flexible accelerometer servo circuit

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110579626A (en) * 2019-10-22 2019-12-17 西安微电子技术研究所 Miniature metal full-sealed quartz flexible accelerometer servo circuit and processing method thereof
CN112394195A (en) * 2020-11-13 2021-02-23 西安微电子技术研究所 Quartz flexible accelerometer servo circuit and assembling method
CN115932326A (en) * 2023-01-09 2023-04-07 保定开拓精密仪器制造有限责任公司 Quartz flexible accelerometer servo circuit
CN115932326B (en) * 2023-01-09 2023-08-11 保定开拓精密仪器制造有限责任公司 Quartz flexible accelerometer servo circuit

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