CN110527946B - Coating device - Google Patents
Coating device Download PDFInfo
- Publication number
- CN110527946B CN110527946B CN201910834157.7A CN201910834157A CN110527946B CN 110527946 B CN110527946 B CN 110527946B CN 201910834157 A CN201910834157 A CN 201910834157A CN 110527946 B CN110527946 B CN 110527946B
- Authority
- CN
- China
- Prior art keywords
- cover plate
- jacking
- rotating shaft
- coating
- rotary driving
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 239000011248 coating agent Substances 0.000 title claims abstract description 67
- 238000000576 coating method Methods 0.000 title claims abstract description 67
- 230000007246 mechanism Effects 0.000 claims abstract description 96
- 238000007789 sealing Methods 0.000 claims abstract description 22
- 238000000034 method Methods 0.000 claims abstract description 7
- 230000008569 process Effects 0.000 claims abstract description 6
- 239000013013 elastic material Substances 0.000 claims description 4
- 230000006835 compression Effects 0.000 claims description 3
- 238000007906 compression Methods 0.000 claims description 3
- 238000006073 displacement reaction Methods 0.000 claims description 3
- 238000007747 plating Methods 0.000 claims description 2
- 230000009471 action Effects 0.000 description 3
- 230000008859 change Effects 0.000 description 3
- 230000007306 turnover Effects 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000005240 physical vapour deposition Methods 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
Abstract
A coating device comprising a main body part with a coating cavity, a cover plate assembly and a sealing element, wherein the cover plate assembly comprises a cover plate and a rocker arm fixed on the cover plate; the coating device further comprises at least two groups of jacking mechanisms for jacking the cover plate assembly and a rotary driving mechanism for driving the rocker arm to drive the cover plate to rotate around a first rotating shaft; the rocker arm is provided with a fixing part which is positioned at one side of the first rotating shaft and is fixed with the cover plate, and a force application part which is positioned at the other side of the first rotating shaft; the rotary driving mechanism comprises a rotary driving piece and a position compensation mechanism, wherein the position compensation mechanism is connected with the force application part and is used for avoiding the rotary driving piece from being stressed in the process that the cover plate assembly is jacked up. The coating device provided by the invention has better performance and is easy to operate.
Description
Technical Field
The invention relates to a coating device which can be applied to the technical field of vapor deposition vacuum coating.
Background
The coating chambers of the coating apparatus all require at least one openable and closable cover plate in order to load and unload the products that have been coated into and from the coating chambers. The opening mode of the cover plate mainly comprises an upper opening mode and a side opening mode, wherein the upper opening mode mainly adopts a manual hoisting mechanism or a lifting mechanism driven by an air cylinder, and the degree of automation is low; because the opened cover plate needs to be translated to the side surface of the equipment, the occupied area of the equipment is large; in addition, the cleaning operation of the film layer on the inner side of the cover plate is inconvenient, and an operator has to squat down or move the heavy cover plate to another working area to clean the film layer. The opening mode of the turnover side opening mostly adopts manual operation, and the manual opening and closing operation is time-consuming, labor-consuming and unsafe due to the large weight of the cover plate, and can be completed only by the assistance of other mechanisms or tools.
Disclosure of Invention
The invention aims to provide a coating device which has better performance and is easy to operate.
In order to achieve the above purpose, the invention adopts the following technical scheme: a coating device comprising a body having a coating chamber, a cover plate assembly mounted on the body, and a sealing element between the body and the cover plate assembly, the cover plate assembly comprising a cover plate to seal the coating chamber and a rocker arm secured to the cover plate; the coating device further comprises at least two groups of jacking mechanisms used for jacking the cover plate assembly and a rotary driving mechanism used for driving the rocker arm to rotate around a first rotating shaft after the cover plate assembly is jacked so as to open the coating cavity, wherein the two groups of jacking mechanisms comprise jacking driving pieces used for jacking the cover plate assembly, and the first rotating shaft is connected with driving ends of the corresponding jacking driving pieces so as to be capable of moving between an initial position and a jacking position; the rocker arm is provided with a fixing part which is positioned at one side of the first rotating shaft and is fixed with the cover plate, and a force application part which is positioned at the other side of the first rotating shaft; the rotary driving mechanism comprises a rotary driving piece and a position compensation mechanism connected to the driving end of the rotary driving piece, the position compensation mechanism is connected with the force application part, and the position compensation mechanism is used for avoiding the rotary driving piece from being stressed in the process of jacking up the cover plate assembly; the coating device is also provided with a second rotating shaft parallel to the first rotating shaft, wherein the first rotating shaft can rotate around the second rotating shaft.
As a further improved technical scheme of the invention, the two groups of jacking mechanisms are respectively provided with the jacking driving parts, and the first rotating shaft is connected with the driving end of one jacking driving part.
As a further improved technical scheme of the invention, the two groups of jacking mechanisms are respectively provided with rollers matched with the cover plate.
As a further improved technical scheme of the invention, the force application part comprises a first extension arm, a second extension arm and a cross rod connected between the first extension arm and the second extension arm, and the position compensation mechanism is connected with the cross rod.
As a further improved technical scheme of the invention, the coating device is further provided with a compensation mechanism for compensating the displacement of the cover plate caused by the compression of the sealing element when the cover plate covers the coating cavity.
As a further improved technical scheme of the invention, the compensation mechanism comprises the second rotating shaft and a connecting arm for connecting the first rotating shaft and the second rotating shaft.
As a further development of the invention, the compensation means comprise spring means or elastic material connected to the cover plate.
As a further improved technical scheme of the invention, the cover plate can rotate 90 degrees to a vertical position under the drive of the rotary driving mechanism, and the film plating device comprises a safety mechanism for fixing the cover plate at the vertical position.
As a further improved technical scheme of the invention, the cover plate can rotate 90 degrees to a vertical position under the drive of the rotary driving mechanism, and the coating device comprises a safety mechanism for fixing the cover plate at the vertical position, wherein the safety mechanism is a hook locked on the cross rod.
As a further improved technical scheme of the invention, the safety mechanism is a bolt.
As a further improved technical scheme of the invention, the position compensation mechanism is provided with a limiting end face buckled with the stressed end face of the rotary driving piece and an abutting end face opposite to the limiting end face, wherein the limiting end face is separated from the abutting end face by a compensation distance, the first rotating shaft moves relative to the jacking driving piece and has a jacking distance, and the compensation distance is larger than or smaller than the jacking distance.
Compared with the prior art, the cover plate assembly can be stably jacked by arranging at least two groups of jacking mechanisms; the position compensation mechanism is arranged, so that the rotary driving piece is prevented from being stressed in the process of jacking up the cover plate assembly, the horizontal state of the cover plate is not influenced, and the cover plate and the sealing element are ensured to be separated uniformly, and the sealing element has good performance; after the cover plate assembly is jacked up, the cover plate is enabled to rotate and open around the first rotating shaft through the rotary driving piece, so that the degree of automation is improved, and the operation is easier.
Drawings
FIG. 1 is a schematic perspective view of a coating apparatus according to the present invention.
Fig. 2 is a front view of fig. 1 with the cover plate in an initial position.
Fig. 3 is a front view of the closure assembly of fig. 2 in a raised position.
Fig. 4 is a front view of the cover assembly of fig. 3 rotated about a first axis of rotation.
Fig. 5 is a front view of the cover assembly of fig. 4 rotated about a first axis of rotation to an open position.
Fig. 6 is a partially exploded perspective view of fig. 1 with the cover plate assembly separated.
Fig. 7 is a perspective view of fig. 5.
Fig. 8 is a perspective view of the rotary drive mechanism.
Fig. 9 is a partial enlarged view of the circled portion in fig. 3.
Detailed Description
Referring to fig. 1 to 8, a coating apparatus 100 is disclosed, which can be applied to a Chemical Vapor Deposition (CVD) coating apparatus, a Physical Vapor Deposition (PVD) coating apparatus, or other vacuum coating apparatuses.
Referring to fig. 1, 2 and 6, the coating device 100 includes a main body 1 having a coating chamber 10, a cover plate assembly 2 mounted on the main body 1, a sealing element 3 disposed between the main body 1 and the cover plate assembly 2, at least two sets of jacking mechanisms 4 for jacking the cover plate assembly 2, a rotation driving mechanism 5 for driving the cover plate assembly 2 to rotate after the cover plate assembly 2 is jacked, and a safety mechanism 6 for fixing the cover plate assembly 2 in an open position. In the illustrated embodiment of the invention, the top of the body part 1 is provided with a chamber flange 11, and the sealing element 3 is mounted on the chamber flange 11.
The cover plate assembly 2 includes a cover plate 21 for sealing the coating chamber 10 and a rocker arm 22 fixed to the cover plate 21. The rocker arm 22 is rotatable about a first rotation axis 71 by a rotation drive mechanism 5 to open the coating chamber 10. In the illustrated embodiment of the invention, the coating chamber 10 has a cylindrical shape, and the cover 21 has a substantially circular shape. Of course, in other embodiments, the coating chamber 10 may have other shapes, and the cover 21 may have a square, rectangular or other shape, so long as the cover 21 can be guaranteed to completely cover the coating chamber 10 when in the closed state.
The sealing element 3 is in one embodiment of the invention a sealing ring, the sealing element 3 being arranged between the inner surface of the cover plate 21 and the top surface of the body part 1, which may be arranged on the inner surface of the cover plate 21 or the top surface of the body part 1. When the cover plate 21 is opened, the product can be loaded into the coating chamber 10 and the product which has been coated can be unloaded from the coating chamber 10. The sealing element 3 can ensure that the air tightness of the coating chamber 10 is not affected after the vacuum is drawn on the coating chamber 10.
In the illustrated embodiment of the present invention, the two sets of jacking mechanisms 4 are arranged horizontally at 180-degree symmetrical positions along the circumferential direction of the circular cover plate 21, that is, the two sets of jacking mechanisms 4 are located on opposite sides of the main body 1, and the heights of the two sets of jacking mechanisms 4 are identical. In other embodiments, the number of the jack-up mechanisms 4 may be three or more; preferably, the jacking mechanisms 4 are uniformly distributed in the circumferential direction of the cover plate 21 so as to evenly share the force of jacking the cover plate 21, and the cover plate 21 can be jacked up more smoothly. The two sets of jacking mechanisms 4 include, for example, jacking drivers 41 to jack the cover plate assembly 2 in a straight line. In the illustrated embodiment of the invention, the two sets of jacking mechanisms 4 jack the cover plate assembly 2 upward in a straight line. The first rotating shaft 71 is connected to the driving end of the jack-up driving member 41 so as to be movable between an initial position a and a jack-up position B (see fig. 3 and 9). In other words, the first rotating shaft 71 is a floating rotating shaft, and the position thereof can be changed by the jack-up mechanism 4. Referring to fig. 6, in the illustrated embodiment of the present invention, the two sets of jacking mechanisms 4 respectively have the jacking driving members 41, and the first rotating shaft 71 is connected to the driving end of one of the jacking driving members 41. Of course, in order to ensure the synchronization of the jack-up, in other embodiments, the jack-up driving member 41 may be provided as one. The jack-up drive 41 may be a cylinder, motor or other type of power source.
The two sets of jacking mechanisms 4 are respectively provided with rollers 42 matched with the cover plate 21. When the cover plate 21 is jacked up, the roller 42 with a certain length is contacted with the cover plate 21, and the design can reduce contact stress, so that the stress of the cover plate 21 is more uniform, and the tiny movement of the cover plate 21 in the horizontal direction can be compensated. Compared with the prior art, the invention has the advantages that the two groups of jacking mechanisms 4 act simultaneously, the acting force is larger, and the coating film layer formed at the contact part of the cover plate 21 and the sealing element 3 and the contact part of the cover plate and the main body part 1 can be quickly and uniformly separated.
Referring to fig. 1 and 6, the swing arm 22 is provided with a fixing portion 221 located at one side of the first rotating shaft 71 and fixed to the cover 21, and a force application portion 222 located at the other side of the first rotating shaft 71. In the illustrated embodiment of the invention, the force application portion 222 includes a first extension arm 2221, a second extension arm 2222, and a cross bar 2223 connected between the first extension arm 2221 and the second extension arm 2222.
As shown in fig. 3, the rotary driving mechanism 5 includes a rotary driving member 51 and a position compensating mechanism 52 connected to the driving end of the rotary driving member 51. In the illustrated embodiment of the invention, the rotary drive 51 is a pull rod cylinder. Of course, in other embodiments, the rotary driving member 51 may be other power sources, for example, a motor or a motor directly drives the cover plate 21 to automatically rotate through a speed reducer; or the cover plate 21 is driven to automatically turn over by adopting a hydraulic mode; or the cover plate 21 is driven by an electric push rod to automatically turn over. The position compensating mechanism 52 is connected to the cross bar 2223 of the urging portion 222. The position compensation mechanism 52 is used to avoid stressing the rotary drive member 51 during the lifting of the cover assembly 2. I.e. when the cover plate 21 is jacked up but before being turned over, the idle stroke inside the position compensation mechanism 52 can ensure that the rotary drive 51 is not stressed and does not affect the horizontal state of the cover plate 21, thereby ensuring that the cover plate 21 is evenly disengaged from the sealing element 3.
Referring to fig. 8, in the illustrated embodiment of the present invention, the rotary driving member 51 is provided with a force receiving end surface 511 at the end thereof, and the position compensating mechanism 52 is provided with a position limiting end surface 521 engaged with the force receiving end surface 511 and an abutting end surface 522 opposite to the position limiting end surface 521. The position compensation mechanism 52 is used for compensating the idle stroke of the pull rod cylinder when the cover plate 21 is jacked up. Specifically, the limiting end surface 521 is separated from the abutting end surface 522 by a compensating distance, and the first rotating shaft 71 moves by a lifting distance relative to the lifting driving member 41. The compensation distance is greater than or less than the lifting distance, so that the position compensation mechanism 52 can compensate the idle stroke of the pull rod cylinder. Of course, in other embodiments, the position compensation mechanism 52 may also adopt a two-cylinder serial connection mode to compensate for the position change of the first rotating shaft 71 (i.e. the fulcrum) when the cover 21 is lifted up; or compensates for the position change of the first rotation shaft 71 (i.e., fulcrum) when the cover 21 is lifted up using a different stroke of the electric putter.
In the illustrated embodiment of the present invention, the cover 21 can be driven by the rotation driving mechanism 5 to rotate 90 degrees from a horizontal position (initial position) to a vertical position (open position), so as to avoid the problems of physical consumption, inefficiency, safety, etc. caused by manual operation; the erected cover plate 21 is more convenient for an operator to stand and operate, so that a film layer attached to the inner side of the cover plate 21 is removed, and the equipment maintenance efficiency is improved. The safety mechanism 6 can reliably fix the cover plate 21 in the vertical position, and damage caused by accidental falling of the cover plate 21 is prevented.
Referring to fig. 7, in the illustrated embodiment of the invention, the safety mechanism 6 is a hook 61 that is locked to the cross bar 2223. The hooks 61 are rotatably mounted on the respective brackets. When the cover plate 21 is rotated to the open position, the safety mechanism 6 is clamped to the cross bar 2223 either manually or by an electronic control system; when it is desired to close the coating chamber 10, the safety mechanism 6 is rotated off of the cross bar 2223 either manually or by an electronic control system. It will be appreciated that the safety mechanism 6 may be of a variety of configurations, for example, a latch mechanism may be used to secure the cover 21 in the open position; or another fastening means for temporarily connecting the cover plate 21 to another fastening means is used as the securing means 6.
The coating device 100 is further provided with a compensation mechanism for compensating displacement of the cover plate 21 caused by compression of the sealing element 3 when the cover plate 21 is returned to cover the coating chamber 10. Referring to fig. 7, the compensation mechanism includes a second rotating shaft 72 parallel to the first rotating shaft 71 and a connecting arm 73 connecting the first rotating shaft 71 and the second rotating shaft 72, wherein the first rotating shaft 71 can rotate around the second rotating shaft 72. In the illustrated embodiment of the present invention, the first rotating shaft 71 and the second rotating shaft 72 form a double hinge structure.
During the evacuation of the coating chamber 10, the sealing element 3 between the cover plate 21 and the chamber flange 11 is compressed, and the gap between the cover plate 21 and the chamber flange 11 becomes smaller as the pressure in the coating chamber 10 decreases. The compensation mechanism is capable of compensating for the gap variation generated when the sealing member 3 is compressed and released, thereby ensuring the air tightness of the coating chamber 10. I.e. by the free rotation of the first rotation shaft 71 relative to the second rotation shaft 72, the gap between the cover plate 21 and the chamber flange 11 is compensated, thereby ensuring that the air tightness of the coating chamber 10 is not affected during the vacuum pumping process. Of course, in other embodiments, the compensation mechanism may also use a spring mechanism or an elastic material connected to the cover plate 21, and the gap change generated when the sealing element 3 is compressed and released is compensated by elastic deformation of the spring mechanism or the elastic material.
The main working principle of the coating device 100 of the present invention is as follows:
when the coating chamber 10 needs to be opened, firstly, the cover plate 21 is jacked up by the two groups of jacking mechanisms 4, so that the first rotating shaft 71 moves from the initial position a to the jacking position B (please refer to fig. 3); then, the swing arm 22 of the cover plate assembly 2 is pulled by the rotation driving mechanism 5, and the cover plate 21 is erected 90 degrees to an open position (see fig. 5) by turning over along the first rotating shaft 71 (see fig. 4) according to the lever principle; then, the safety mechanism 6 is caught to the cross bar 2223 (see fig. 7) manually or by an electronic control system, ensuring that the erected state of the cover 21 is stably and securely fixed.
When it is desired to close the coating chamber 10, first, the safety mechanism 6 is unlocked from the cross bar 2223 manually or by an electronic control system; then, the cover plate 21 stretches the rotary driving mechanism 5 under the action of the electric control system, and the cover plate 21 is turned over and falls for 90 degrees to be parallel to the chamber flange 11; at this time, the first rotating shaft 71 is located at the jacking position B, the cover 21 and the chamber flange 11 are kept at a certain distance, and the cover 21 is in contact with the jacking mechanism 4; because the weight of the cover plate 21 is large, the action of the rotary driving piece 51 is slow, and the stressed end face 511 of the rotary driving piece 51 is always in contact with the limiting end face 521 of the position compensation mechanism 52, so that the stable falling process of the cover plate 21 is ensured, and no vibration exists; then, the jacking mechanism 4 falls down to close the cover plate 21 and the chamber flange 11; at this time, the cover plate 21 is in an unsupported free state, and its own weight ensures uniform contact with the sealing element 3, so as to ensure smooth subsequent vacuuming action. At this time, the force receiving end surface 511 of the rotary driver 51 is separated from the limit end surface 521 of the position compensating mechanism 52, and the idle stroke is reformed. The compensation mechanism is capable of compensating for the gap variation generated when the sealing member 3 is compressed and released during the evacuation of the coating chamber 10, thereby ensuring the air tightness of the coating chamber 10.
It should be noted that the terms "first," "second," and "third" are used herein merely to distinguish element names from each other, and are not logically sequential.
The above embodiments are only for illustrating the present invention and not for limiting the technical solutions described in the present invention, and the understanding of the present specification should be based on the description of the directivity of the present invention such as "front", "rear", "left", "right", "upper", "lower", etc., and although the present specification has been described in detail with reference to the above embodiments, it should be understood by those skilled in the art that the present invention may be modified or equivalent by those skilled in the art, and all the technical solutions and improvements that do not depart from the spirit and scope of the present invention should be covered by the claims of the present invention.
Claims (11)
1. A coating device (100) comprising a body part (1) with a coating chamber (10), a cover plate assembly (2) mounted on the body part (1) and a sealing element (3) located between the body part (1) and the cover plate assembly (2), the cover plate assembly (2) comprising a cover plate (21) to seal the coating chamber (10) and a rocker arm (22) fixed on the cover plate (21); the method is characterized in that: the coating device (100) further comprises at least two groups of jacking mechanisms (4) for jacking the cover plate assembly (2) and a rotary driving mechanism (5) for driving the rocker arm (22) to rotate around a first rotating shaft (71) to open the coating cavity (10) after the cover plate assembly (2) is jacked, wherein the two groups of jacking mechanisms (4) comprise jacking driving pieces (41) for jacking the cover plate assembly (2), and the first rotating shaft (71) is connected with driving ends of the corresponding jacking driving pieces (41) so as to be capable of moving between an initial position (A) and a jacking position (B); the rocker arm (22) is provided with a fixing part (221) which is positioned at one side of the first rotating shaft (71) and is fixed with the cover plate (21), and a force application part (222) which is positioned at the other side of the first rotating shaft (71); the rotary driving mechanism (5) comprises a rotary driving piece (51) and a position compensation mechanism (52) connected with the driving end of the rotary driving piece (51), the position compensation mechanism (52) is connected with the force application part (222), and the position compensation mechanism (52) is used for avoiding stressing the rotary driving piece (51) in the process of jacking the cover plate assembly (2); the coating device (100) is further provided with a second rotation axis (72) parallel to the first rotation axis (71), wherein the first rotation axis (71) is rotatable about the second rotation axis (72).
2. The coating apparatus (100) according to claim 1, wherein: the two groups of jacking mechanisms (4) are respectively provided with the jacking driving parts (41), and the first rotating shaft (71) is connected with the driving end of one jacking driving part (41).
3. The coating apparatus (100) according to claim 2, wherein: the two groups of jacking mechanisms (4) are respectively provided with rollers (42) matched with the cover plate (21).
4. The coating apparatus (100) according to claim 1, wherein: the force application part (222) comprises a first extension arm (2221), a second extension arm (2222) and a cross rod (2223) connected between the first extension arm (2221) and the second extension arm (2222), and the position compensation mechanism (52) is connected with the cross rod (2223).
5. The coating apparatus (100) according to claim 1, wherein: the coating device (100) is further provided with a compensation mechanism for compensating displacement of the cover plate (21) caused by compression of the sealing element (3) when the cover plate (21) covers the coating chamber (10).
6. The coating apparatus (100) according to claim 5, wherein: the compensation mechanism comprises the second rotating shaft (72) and a connecting arm (73) for connecting the first rotating shaft (71) and the second rotating shaft (72).
7. The coating apparatus (100) according to claim 5, wherein: the compensating means comprises spring means or an elastic material associated with the cover plate (21).
8. The coating apparatus (100) according to claim 1, wherein: the cover plate (21) can rotate 90 degrees to a vertical position under the drive of the rotary driving mechanism (5), and the coating device (100) comprises a safety mechanism (6) for fixing the cover plate (21) at the vertical position.
9. The coating apparatus (100) according to claim 4, wherein: the cover plate (21) can rotate 90 degrees to a vertical position under the drive of the rotary driving mechanism (5), the film plating device (100) comprises a safety mechanism (6) for fixing the cover plate (21) at the vertical position, and the safety mechanism (6) is a hook (61) locked on the cross rod (2223).
10. The coating apparatus (100) according to claim 8, wherein: the safety mechanism (6) is a bolt.
11. The coating apparatus (100) according to claim 1, wherein: the position compensation mechanism (52) is provided with a limiting end face (521) buckled with the stress end face (511) of the rotary driving piece (51) and an abutting end face (522) opposite to the limiting end face (521), the limiting end face (521) is separated from the abutting end face (522) by a compensation distance, the first rotating shaft (71) moves relative to the jacking driving piece (41) and has a jacking distance, and the compensation distance is larger than or smaller than the jacking distance.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910834157.7A CN110527946B (en) | 2019-09-04 | 2019-09-04 | Coating device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910834157.7A CN110527946B (en) | 2019-09-04 | 2019-09-04 | Coating device |
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| CN110527946A CN110527946A (en) | 2019-12-03 |
| CN110527946B true CN110527946B (en) | 2024-03-19 |
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| CN114141568A (en) * | 2021-11-28 | 2022-03-04 | 盛吉盛(宁波)半导体科技有限公司 | Electric switch device of film growth equipment cavity |
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