CN110505159B - Data processing device, data processing method, recording medium, and data processing system - Google Patents
Data processing device, data processing method, recording medium, and data processing system Download PDFInfo
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- CN110505159B CN110505159B CN201910405887.5A CN201910405887A CN110505159B CN 110505159 B CN110505159 B CN 110505159B CN 201910405887 A CN201910405887 A CN 201910405887A CN 110505159 B CN110505159 B CN 110505159B
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
- G05B23/0262—Confirmation of fault detection, e.g. extra checks to confirm that a failure has indeed occurred
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
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- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L47/00—Traffic control in data switching networks
- H04L47/10—Flow control; Congestion control
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- H04L47/10—Flow control; Congestion control
- H04L47/24—Traffic characterised by specific attributes, e.g. priority or QoS
- H04L47/2425—Traffic characterised by specific attributes, e.g. priority or QoS for supporting services specification, e.g. SLA
- H04L47/2433—Allocation of priorities to traffic types
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L67/00—Network arrangements or protocols for supporting network services or applications
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Abstract
The present disclosure relates to a data processing apparatus, a data processing method, a recording medium, and a data processing system. The object is to provide a data processing device advantageous in terms of appropriate data transmission. The data processing apparatus includes a determination unit that determines transmission data based on an operation state of the lithography apparatus and a purpose of receiving data from the lithography apparatus.
Description
Technical Field
The invention relates to a data processing apparatus, a data processing method, a recording medium, and a data processing system.
Background
In the past, enterprises have used network communication such as the internet to provide support services (support services) to devices that are products of the enterprises from a remote location. In order to support a plurality of devices from a remote place, device data required for support needs to be transmitted to a support service implementation site. The data required for support differs depending on the purpose of support, and thus there is data that should be preferentially transmitted depending on the purpose.
In the equipment maintenance plan support system of japanese patent application laid-open No. 2009-181269, past operation conditions of respective equipment are collected as operation data, and the order of priority of the equipment to be maintained is presented based on the result of evaluation of the influence of the equipment on the environment when operating as environmental load performance. The communication control device of japanese patent No. 5915820 generates a discard list in which information capable of specifying services is arranged in order of priority from low to high, and controls the flow rate of communication data. Accordingly, when the communication quality of the network connecting a plurality of points connected through the communication network is lowered, the quality of service can be stably maintained.
Disclosure of Invention
Technical problem
However, in the inventions of japanese patent laid-open publication No. 2009-181269 and japanese patent No. 5915820, both the purpose of support and the current operation state of the device and the like are not considered, and therefore, appropriate data required for support may not be transmitted.
The present invention aims to provide a data processing apparatus which is advantageous, for example, in transmitting appropriate data.
Technical proposal
The present invention is a data processing apparatus communicably connected to a lithographic apparatus and transmitting data from the lithographic apparatus via a network, characterized by comprising a determination unit for determining transmission data based on an operation state of the lithographic apparatus and an object of receiving data from the lithographic apparatus.
Further features of the invention will become apparent from the following description of exemplary embodiments with reference to the attached drawings.
Drawings
Fig. 1 is a diagram showing an example of a schematic configuration of a data processing system including a data processing apparatus according to embodiment 1.
Fig. 2 is a diagram showing an example of a reference table of the operation states of the respective devices grasped by the judging unit of embodiment 1.
Fig. 3A to 3D are diagrams showing one example of a priority reference table for purpose of embodiment 1.
Fig. 4 is a diagram showing an example of a priority reference table based on communication speed according to embodiment 1.
Fig. 5A and 5B are diagrams showing an example of the entire transmission data list including the priority of embodiment 1.
Fig. 6 is a flowchart showing the transmission process of the device data according to embodiment 1.
Fig. 7A to 7C are diagrams showing one example of a priority reference table for purpose of embodiment 2.
Fig. 8A and 8B are diagrams showing one example of the entire transmission data list shown with the priority of embodiment 2.
Fig. 9 is a diagram showing an example of a reference table showing the operation states and error states of the respective devices grasped by the judging unit of embodiment 3.
Fig. 10A and 10B are diagrams showing an example of a priority reference table for each purpose according to embodiment 3.
Fig. 11A and 11B are diagrams showing one example of the entire transmission data list showing the priority of embodiment 3.
Detailed Description
Hereinafter, modes for carrying out the present invention will be described with reference to the drawings.
(first embodiment)
Fig. 1 is a diagram showing an example of a schematic configuration of a data processing system including a data processing apparatus according to embodiment 1. In fig. 1, a data processing system 1 for remotely supporting a plurality of lithographic apparatuses provided at a different site P from a support service implementation site is shown. The data processing method of the present embodiment can be executed as a program by a computer. The data processing system 1 can include an apparatus 100 and a server 101 as a data processing apparatus. The plurality of apparatuses 100 are lithographic apparatuses such as an exposure apparatus or an imprint apparatus that form a pattern on a substrate. Further, a planarizing layer forming apparatus may be used to form a planarizing layer on a substrate. The plurality of devices 100 are disposed at a site P. The plurality of apparatuses 100 are connected through a network using a dedicated line such as the servers 101 and LAN (Local Area Network), a network using a general line, a network based on wireless communication, or the like. The device 100 is communicatively connected to a server 101.
The server 101 is connected to a receiving client 109 located at a site supporting service implementation via an internet line such as a virtual private network (hereinafter, sometimes referred to as "VPN"). The server 101 transmits data (device data 110) of the device 100 corresponding to a preset purpose (reception purpose) of receiving data from the device 100 by the reception client 109 to the reception client 109. Hereinafter, the case simply referred to as "data" refers to the device data 110. The server 101 may set the reception destination according to a request from the reception client 109. In this case, the reception client 109 decides a reception destination according to a support service to be implemented for each device 100, and transmits the reception destination to the server 101. The server 101 receives information on the reception destination from the reception client 109, and transmits data of the apparatus 100 corresponding to the destination of the received data to the reception client 109.
The server 101 may include a determination unit 102, a communication speed acquisition unit 103, a storage unit 108, and a transmission data determination unit 107. The determination unit 102 determines whether each device 100 is in an operation state such as a state in which a setting operation is performed, a state in which maintenance operation is performed, or a state in which manufacturing of a device is performed, generates a reference table, and supplies the reference table to the transmission data determination unit 107. The state in which the setting operation is performed is hereinafter referred to as "in-setting", the state in which the maintenance operation is performed is referred to as "in maintenance", and the state in which the manufacturing of the device is performed is referred to as "in production". Fig. 2 is a diagram showing an example of a reference table showing the operation states of the respective devices 100 determined by the determination unit 102 according to embodiment 1. In the reference table generated by the determination unit 102, for example, the current operation states of the respective devices 100 are shown as if the state of the device # 1 is "in production", the device # 2 is also "in production", the device # 3 is "in maintenance", the device # 4 is "in production", and the device # 5 is "in setting". Hereinafter, the reference table shown in fig. 2 is referred to as a reference table a. The determination unit 102 determines the operation state based on, for example, the manufacturing speed of the equipment of the apparatus 100, the operation state, and the like. The determination unit 102 may determine the operation state of the device 100 based on, for example, information on the operation state input to the device 100 or the receiving client 109.
The communication speed acquisition unit 103 acquires the communication speed from the data transfer time between the server 101 and the receiving client 109, and supplies the acquired communication speed to the transmission data determination unit 107.
The storage unit 108 stores information on the priorities for determining the data to be transmitted to the receiving client 109, such as the priority reference table 104 for each purpose, the priority reference table 105 based on the communication speed, and the entire transmission data list 106. The priority reference table 104 for each destination shows the transmission priority of each data corresponding to the operation state of the apparatus 100 and the receiving destination. Fig. 3A to 3D are diagrams showing one example of the priority reference table 104 for purpose of embodiment 1. Fig. 3A is an example of the priority reference table 104 for the purpose in the case where the operation state of the apparatus 100 is "in production", and the purpose of the received data is "problem solving". In the present figure, numerals shown beside the respective data types indicate priorities of data transmission to the receiving client 109. For example, when device data is required in the field as an emergency response such as problem resolution, all data types are set to a high priority.
On the other hand, fig. 3B to 3D are one example of the priority reference table 104 by purpose in the case where the purpose of the received data is "operation rate monitoring". Here, it is assumed that the data reception for operation rate monitoring is in the form of stably receiving the device data at a fixed period. In addition, hereinafter, the reference table shown in fig. 3A to 3D is collectively referred to as a reference table B. In fig. 3B, transmission priority in the case where the operation state of the apparatus 100 is "in production" is shown. Similarly, fig. 3C shows a case where the operation state of the apparatus 100 is "in maintenance", and fig. 3D shows a transmission priority in a case where the operation state of the apparatus 100 is "in setting". Since the reception purpose is "operation rate monitoring", the priority of each device data is set to be low in "setting", and the priority of each device data is set to be higher in "production". In the reference table B, the priority of each device data is individually set according to the operation state of the device 100. Here, "problem solving" and "operation rate monitoring" are exemplified as examples of the reception destination, but the present invention is not limited to these, and a new reception destination may be input from the reception client 109, for example.
Fig. 4 is a diagram showing an example of the priority reference table 105 based on the communication speed of embodiment 1. The priority reference table 105 based on the communication speed is a reference table for associating the communication speed between the server 101 and the receiving client 109 with the priority of the device data. Further, hereinafter, referred to as a reference table C shown in fig. 4. In the example shown in fig. 4, when the communication speed acquired by the communication speed acquisition unit 103 is less than 300KB/sec, device data having a priority of "8" or more is set as a transmission target. Similarly, device data having a priority of "5" or more is a transmission target at 300KB/sec to 500KB/sec, device data having a priority of "3" or more is a transmission target at 500KB/sec to 800KB/sec, and all device data is a transmission target at a communication speed of 800KB/sec or more. The all-transmitted data list 106 is a data list in which all the device data required for the support service implemented by the receiving client 109 for each device 100 are listed. I.e. information of the required device data corresponding to the receiving destination.
The transmission data determining unit 107 determines, from all the device data (all transmission data list 106) required for the support service to be executed by each device 100 by the receiving client 109, the device data to be transmitted to the receiving client 109 based on the information of each reference table. The transmission data determination unit 107 transmits the device data to be transmitted to the reception client 109 via the internet.
Specifically, the transmission data determining unit 107 grasps the operation state of the target device 100 from the reference table a, and selects the reference table B corresponding to the operation state of the target device 100. The transmission data determining unit 107 determines transmission priorities of the respective device data based on the corresponding reference table B, and generates the entire transmission data list 106 including the priorities. Fig. 5A and 5B are diagrams showing an example of the entire transmission data list 106 including the priority of embodiment 1. In the entire transmission data list 106 shown in fig. 5A, all the device data required for the support service to be executed by the receiving client 109 for each device 100 are listed, and the priority corresponding to each device data is included. After determining the type of data of the required device data, the transmission data determining unit 107 determines the device data to be transmitted based on the communication speed based on the reference table C. For example, at this time, the communication speed is set to 290KB/sec. According to the reference table C shown in fig. 4, device data having a priority of "8" or more is a transmission target. As a result, as shown in fig. 5B, the transmission data determining unit 107 determines to transmit only the device data having a priority of "8" or more. The device data not selected as the transmission target may be deleted or the priority may be determined again at the next transmission timing.
Fig. 6 is a flowchart showing the transmission process of the device data according to embodiment 1. Each action (step) shown in the flowchart may be executed by the transmission data determination unit 107. In step S201, all data required for the support service to be executed for each device 100 is listed according to the set reception destination, and data to be transmitted is determined. That is, the entire transmission data list 106 is generated and stored in the storage unit 108. In step S202, the determination unit 102 determines the operation states of the respective devices 100, generates the reference table a, and supplies the operation states of the respective devices 100 to the transmission data determination unit 107. In step S203, the communication speed acquisition unit 103 acquires the communication speed from the data transfer time between the server 101 and the receiving client 109, and supplies the acquired communication speed to the transmission data determination unit 107.
In step S204, the transmission data determining unit 107 determines the priority of all transmission data based on the priority reference table 104 (reference table B) for each purpose set in advance. In step S205, the transmission data determining unit 107 that has received the provided communication speed in step S203 determines the priority to be transmitted based on the priority reference table 105 based on the communication speed, which is set in advance. In step S206, the transmission data determining unit 107 selects device data from all the transmission data lists 106 having the priorities, based on the priorities to be transmitted determined in step S205, and determines device data to be transmitted. In step S207, the transmission data determination unit 107 acquires the determined device data from each device 100, and transmits the device data to the receiving client 109.
According to this data processing apparatus, even when the communication speed is insufficient, appropriate apparatus data suited to the reception destination can be selected as the transmission target according to the operation state of the apparatus 100. Accordingly, the maximum support service that can be implemented at the time can be implemented at the support service implementation site.
The reference tables shown in the present embodiment may be updated according to a request from the receiving client 109. For example, each reference table may be updated from an input unit provided in the receiving client 109.
(second embodiment)
A data processing apparatus according to embodiment 2 of the present invention will be described below. The item not mentioned in embodiment 2 is the item described in embodiment 1. In embodiment 2, a plurality of reception destinations are shown in one destination-oriented priority reference table 104.
Fig. 7A to 7C are diagrams showing one example of the priority reference table 104 for purpose of embodiment 2. Fig. 7A shows that the operation state of the apparatus is "in production", and the reception purposes are for a plurality of purposes such as "problem solving", "operation rate monitoring", "precision investigation", "optical degradation evaluation", "foreign matter detection", and "failure evaluation". In the priority reference table 104 for each purpose of the present embodiment, priorities of data types are set for a plurality of reception purposes. Similarly, fig. 7B is a destination priority reference table 104 in the case where the operation state of the apparatus 100 is "in maintenance", and fig. 7C is a destination priority reference table 104 in the case where the operation state of the apparatus 100 is "in setting". The priority of the data type varies depending on the operation state of the apparatus 100 and the receiving purpose. In addition, hereinafter, the reference table shown in fig. 7A to 7C is collectively referred to as a reference table D.
The transmission data determination unit 107 grasps the operation state of the device 100 of the target device from the reference table a. The transmission data determining unit 107 selects the reference table D corresponding to the operation state of the target device 100, and determines the priority for each data type. Fig. 8A and 8B are diagrams showing an example of the entire transmission data list 106 in which the priority is shown in embodiment 2. In the entire transmission data list 106 shown in fig. 8A, device data required for the support service to be implemented by the receiving client 109 for each device 100 is listed in its entirety, and priorities corresponding to the respective device data are shown.
Next, the transmission data determining unit 107 determines the priority to be the transmission target based on the reference table C according to the communication speed, and determines the data to be transmitted. For example, at this time, when the communication speed is 350KB/sec, the device data having a priority of "5" or more is the transmission target based on the reference table C, and as shown in fig. 8B, it is determined to transmit only the device data having a priority of "5" or more. In the present embodiment, for example, in the device # 3, real-time logs (real time logs) that are the same data type are each targeted for transmission in "operation rate monitoring" and "accuracy discussion" that are different reception purposes. Here, since the priority to be transmitted is determined to be "5" or more according to the communication speed, the real-time log is not transmitted for the purpose of "operation rate monitoring". However, since the reception destination is the "accuracy discussion", the real-time log is transmitted as a result. In this way, the device data to be transmitted may be determined based on a plurality of reception purposes.
According to the present embodiment, since transmission data can be determined according to a plurality of reception purposes, more appropriate device data can be transmitted.
(third embodiment)
A data processing apparatus according to embodiment 3 of the present invention will be described below. As embodiment 3, which is not mentioned, embodiments 1 and 2 are used. In the present embodiment, the device data to be transmitted is also determined based on the error state of the device 100.
Fig. 9 is a diagram showing an example of a reference table showing the operation states and error states of each device 100 judged by the judgment unit 102 according to embodiment 3. Hereinafter, the reference table shown in fig. 9 is referred to as a reference table E. In fig. 9, the operation state of the apparatus # 1 shows "in production", and the error state shows "process (process) accuracy deviation". Here, "process accuracy deviation" shows a state in which the accuracy of the production process is deviated. The operating state of the device # 3 shows "in maintenance", and the error state shows "consumable part consumption". Here, "consumable part consumption" indicates a state in which the consumable part in the target apparatus is being consumed, that is, a state in which the timing of replacement of the consumable part is near. The operating state of the device # 4 shows "in production", and the error state shows "optical system degradation". Here, "optical system degradation" indicates a state in which an optical system in a target apparatus is being degraded, that is, a state in which the timing of replacement of the optical system is near.
The error state refers to, for example, a state in which the device 100 is abnormal, such as a state in which the process accuracy of the device 100 is deviated, a state in which the optical system of the device 100 is being deteriorated, or a state in which the consumable part is being consumed, and the like, in which the part needs to be replaced. The determination unit 102 may determine the error state based on, for example, the state of the manufactured device or the total operation time of the apparatus. In addition, the foregoing error state is one example, and is not limited to these. Further, hereinafter, the "state of the device" is set to include the operation state of the device and the error state.
Fig. 10A and 10B are diagrams showing an example of the priority reference table 104 for each purpose according to embodiment 3. In this figure, similarly to the reference table D (fig. 7A to 7C) of embodiment 2, the priority of the data types is shown for a plurality of reception purposes. Fig. 10A shows an example of the priority reference table 104 by purpose in the case where the operation state of the apparatus 100 is "in production". Fig. 10B shows an example of the priority reference table 104 by purpose in the case where the error state of the apparatus 100 is "process accuracy deviation". Hereinafter, the reference table of fig. 10A and 10B is collectively referred to as a reference table F.
The transmission data determining unit 107 grasps the state of the target device 100 from the reference table E. The transmission data determining unit 107 selects the reference table F corresponding to the operation state and the error state of the target device 100, and determines the priority for each data type. Fig. 11A and 11B are diagrams showing an example of the all-transmission data list 106 of embodiment 3 in which the priority is shown. In the entire transmission data list 106 shown in fig. 11A, device data required for the support service to be implemented by the receiving client 109 for each device 100 is listed in its entirety, and priorities corresponding to the respective device data are shown.
Next, the transmission data determining unit 107 determines the priority of the transmission target based on the reference table C according to the communication speed, and determines the data to be transmitted. For example, when the communication speed is 700KB/sec at this time, device data having a priority of "3" or more is a transmission target based on the reference table C. As a result, as shown in fig. 11B, the transmission data determining unit 107 determines the device data having a transmission priority of "3" or more.
In this case, for example, when the communication speed is 250KB/sec and the priority is "9" based on the reference table C, the transmission data determining unit 107 determines to transmit only the device data having the priority of "9" or more. In the present embodiment, for example, in the device # 1, real-time logs of the same data type are sent as the transmission target in each of "in-process" and "process accuracy deviation" which are states of different devices, and "operation rate monitoring" and "accuracy discussion" which are different reception purposes. Here, since the priority to be transmitted is determined to be "9" or more in accordance with the communication speed, the real-time log is not transmitted for the purpose of "in-production" device status and "operation rate monitoring". However, from the viewpoint of the device state of "process accuracy deviation" and the receiving purpose of "accuracy discussion", the device state is the transmission target, and thus the real-time log is transmitted as a result.
In this way, the device data to be transmitted may be determined based on the states of the plurality of devices. Accordingly, more appropriate device data can be selected as a transmission target, and appropriate support services can be implemented.
In addition, when the same data type is selected in the same device, it may be determined that only data having a high priority is transmitted. Accordingly, repeated data transmission can be avoided, and thus the data transmission load can be reduced.
While the invention has been described with reference to exemplary embodiments, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. The scope of the claims is to be accorded the broadest interpretation so as to encompass all such modifications and equivalent structures and functions.
The present application claims the benefit of japanese patent application No. 2018-096087 filed 5-18, 2018, the entire contents of which are incorporated herein by reference.
Claims (11)
1. A data processing apparatus communicably connected to a lithographic apparatus, for transmitting data from the lithographic apparatus via a network, the data processing apparatus comprising:
a judging unit that judges an operation state of the lithography apparatus and acquires the operation state;
an acquisition unit that acquires a communication speed of the network;
a determination unit configured to determine data to be transmitted based on the operation state acquired by the determination unit, the communication speed acquired by the acquisition unit, and the priority of the data,
the priority of the data is preset for each purpose of receiving the data from the lithographic apparatus and each operation state of the lithographic apparatus.
2. The data processing apparatus according to claim 1, wherein,
the operating state of the lithographic apparatus includes a state in which a setting operation is being performed, a state in which a maintenance operation is being performed, and a state in which manufacturing of the device is being performed.
3. The data processing apparatus according to claim 1, wherein,
the priority of the data is preset for each type of the data received from the lithographic apparatus.
4. The data processing apparatus according to claim 1, wherein,
the judging section judges an error state of the lithographic apparatus and acquires the error state,
the determination unit determines the data to be transmitted based on the error state acquired by the determination unit.
5. The data processing apparatus according to claim 4, wherein,
the error state of the lithographic apparatus includes a state in which a deviation in process accuracy of the lithographic apparatus occurs, a state in which an optical system of the lithographic apparatus is deteriorating, and a state in which a consumable part of the lithographic apparatus is consuming.
6. The data processing apparatus according to claim 1, wherein,
the determination unit determines the data to be transmitted based on information set to be higher in priority as the communication speed of the network is lower.
7. The data processing apparatus according to claim 1, wherein,
the system further includes a storage unit that stores information related to the priority in accordance with an operation state of the lithography apparatus, an error state of the lithography apparatus, a communication speed of the network, or a purpose of the reception.
8. The data processing apparatus of claim 7, wherein,
the determination unit generates information including required data corresponding to the received destination and the priority corresponding to the required data based on an operation state of the lithography apparatus or an error state of the lithography apparatus, the received destination, and the information related to the priority.
9. A data processing method of transmitting data from a lithographic apparatus via a network, the data processing method comprising:
a first step of judging an operation state of the lithography apparatus and acquiring the operation state;
a second step of acquiring a communication speed of the network; and
a third step of determining data to be transmitted based on the operation state acquired in the first step, the communication speed acquired in the second step, and the priority of the data,
the priority of the data is preset for each purpose of receiving the data from the lithographic apparatus and each operation state of the lithographic apparatus.
10. A computer-readable recording medium storing a program for causing a computer to execute a data processing method of transmitting data from a lithographic apparatus via a network, the computer-readable recording medium characterized in that,
the data processing method comprises the following steps:
a first step of judging an operation state of the lithography apparatus and acquiring the operation state;
a second step of acquiring a communication speed of the network; and
a third step of determining data to be transmitted based on the operation state acquired in the first step, the communication speed acquired in the second step, and the priority of the data,
the priority of the data is preset for each purpose of receiving the data from the lithographic apparatus and each operation state of the lithographic apparatus.
11. A data processing system comprising a lithographic apparatus and a data processing apparatus communicably connected to the lithographic apparatus, the data processing system being characterized in that data from the lithographic apparatus is transmitted via a network,
the data processing device is provided with:
a judging unit that judges an operation state of the lithography apparatus and acquires the operation state;
an acquisition unit that acquires a communication speed of the network; and
a determination unit configured to determine data to be transmitted based on the operation state acquired by the determination unit, the communication speed acquired by the acquisition unit, and the priority of the data,
the priority of the data is preset for each purpose of receiving the data from the lithographic apparatus and each operation state of the lithographic apparatus.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018096087A JP7059105B2 (en) | 2018-05-18 | 2018-05-18 | Data processing equipment, data processing methods, programs, and data processing systems |
| JP2018-096087 | 2018-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110505159A CN110505159A (en) | 2019-11-26 |
| CN110505159B true CN110505159B (en) | 2023-05-16 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910405887.5A Active CN110505159B (en) | 2018-05-18 | 2019-05-16 | Data processing device, data processing method, recording medium, and data processing system |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP7059105B2 (en) |
| KR (1) | KR102443300B1 (en) |
| CN (1) | CN110505159B (en) |
| TW (1) | TWI734098B (en) |
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Also Published As
| Publication number | Publication date |
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| KR20190132256A (en) | 2019-11-27 |
| JP7059105B2 (en) | 2022-04-25 |
| CN110505159A (en) | 2019-11-26 |
| KR102443300B1 (en) | 2022-09-15 |
| TW202006472A (en) | 2020-02-01 |
| JP2019200377A (en) | 2019-11-21 |
| TWI734098B (en) | 2021-07-21 |
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