CN110505159A - Data processing equipment, data processing method, recording medium and data processing system - Google Patents
Data processing equipment, data processing method, recording medium and data processing system Download PDFInfo
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- CN110505159A CN110505159A CN201910405887.5A CN201910405887A CN110505159A CN 110505159 A CN110505159 A CN 110505159A CN 201910405887 A CN201910405887 A CN 201910405887A CN 110505159 A CN110505159 A CN 110505159A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B23/00—Testing or monitoring of control systems or parts thereof
- G05B23/02—Electric testing or monitoring
- G05B23/0205—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults
- G05B23/0259—Electric testing or monitoring by means of a monitoring system capable of detecting and responding to faults characterized by the response to fault detection
- G05B23/0262—Confirmation of fault detection, e.g. extra checks to confirm that a failure has indeed occurred
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67253—Process monitoring, e.g. flow or thickness monitoring
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L47/00—Traffic control in data switching networks
- H04L47/10—Flow control; Congestion control
- H04L47/24—Traffic characterised by specific attributes, e.g. priority or QoS
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L47/00—Traffic control in data switching networks
- H04L47/10—Flow control; Congestion control
- H04L47/24—Traffic characterised by specific attributes, e.g. priority or QoS
- H04L47/2425—Traffic characterised by specific attributes, e.g. priority or QoS for supporting services specification, e.g. SLA
- H04L47/2433—Allocation of priorities to traffic types
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- H—ELECTRICITY
- H04—ELECTRIC COMMUNICATION TECHNIQUE
- H04L—TRANSMISSION OF DIGITAL INFORMATION, e.g. TELEGRAPHIC COMMUNICATION
- H04L67/00—Network arrangements or protocols for supporting network services or applications
- H04L67/01—Protocols
- H04L67/12—Protocols specially adapted for proprietary or special-purpose networking environments, e.g. medical networks, sensor networks, networks in vehicles or remote metering networks
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- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
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- Microelectronics & Electronic Packaging (AREA)
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- Automation & Control Theory (AREA)
- Health & Medical Sciences (AREA)
- Computing Systems (AREA)
- General Health & Medical Sciences (AREA)
- Medical Informatics (AREA)
- Computer And Data Communications (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Accessory Devices And Overall Control Thereof (AREA)
Abstract
This disclosure relates to data processing equipment, data processing method, recording medium and data processing system.Project is to provide the advantageous data processing equipment in terms of appropriate data transmission.Data processing equipment, it can communicatedly be connect with lithographic equipment, the data from lithographic equipment are sent via network, which has determination section, which receives the purpose of data based on the operating condition of lithographic equipment and from lithographic equipment to determine to send data.
Description
Technical field
The present invention relates to data processing equipment, data processing method, recording medium and data processing systems.
Background technique
In the past, enterprise supported clothes from remotely providing the device as our company's product using network communications such as internets
It is engaged in (support service).In order to from the multiple devices of remote support, need needed for supporting that service enforcement place transmission is supported
Device data.Data needed for supporting are different due to the purpose of support, therefore exist and should preferentially be sent according to purpose
Data.
In the corrective maintenance plan assisting system of Japanese Unexamined Patent Publication 2009-181269 bulletin, the mistake of each equipment is collected
The operation conditions gone is carried out based on influence when running the equipment to environment as carrying capacity of environment performance as operation data
Assessment as a result, priority to prompt the equipment that should be maintained.The communication control unit that Japanese Patent Publication No. 5915820 is raw
List is discarded made of the information arrangement of service at that will determine with the sequence of priority from low to high, to control communication data
Flow.It accordingly, can when the communication quality decline of the network between multiple places that connection is connected by communication network
Stably keep the quality of service.
Summary of the invention
Technical problem
However, not examined in Japanese Unexamined Patent Publication 2009-181269 bulletin and Japanese Patent Publication No. 5915820 inventions
Consider purpose and the operating condition of current device etc. this both sides of support, it is thus possible to which there are appropriate needed for not sent support
Data the case where.
It is an object of that present invention to provide the advantageous data processing equipments for example in terms of sending appropriate data.
Technical solution
The present invention is can communicatedly to connect with lithographic equipment, and the number of the data from lithographic equipment is sent via network
According to processing unit, it is characterized in that having based on the operating condition of lithographic equipment and receives the purpose of data from lithographic equipment to determine
Send the determination section of data.
By the way that the description of exemplary embodiment, more features of the invention be will be apparent referring to the drawings.
Detailed description of the invention
Fig. 1 is one of the outline structure for the data processing system for showing the data processing equipment comprising the 1st embodiment
Exemplary figure.
Fig. 2 is the one of the master meter for the operating condition for showing each device grasped by the judging part of the 1st embodiment
A exemplary figure.
Fig. 3 A to Fig. 3 D is an exemplary figure for showing the priority master meter by purpose of the 1st embodiment.
Fig. 4 is an exemplary figure for showing the priority master meter based on communication speed of the 1st embodiment.
Fig. 5 A and Fig. 5 B are the whole examples for sending data list for showing the priority comprising the 1st embodiment
Figure.
Fig. 6 is the flow chart of the transmission processing for the device data for showing the 1st embodiment.
Fig. 7 A to Fig. 7 C is an exemplary figure for showing the priority master meter by purpose of the 2nd embodiment.
Fig. 8 A and Fig. 8 B are whole one for sending data list for showing the priority for being shown with the 2nd embodiment
Exemplary figure.
Fig. 9 is to show to show the operating condition and mistake of each device grasped by the judging part of the 3rd embodiment
An accidentally exemplary figure of the master meter of (error) state.
Figure 10 A and Figure 10 B are an exemplary figures for showing the priority master meter by purpose of the 3rd embodiment.
Figure 11 A and Figure 11 B are to show the whole of the priority for being shown the 3rd embodiment to send the one of data list
A exemplary figure.
Specific embodiment
Hereinafter, being illustrated referring to attached drawing etc. to mode of the invention is implemented.
(first embodiment)
Fig. 1 is one of the outline structure for the data processing system for showing the data processing equipment comprising the 1st embodiment
Exemplary figure.In fig. 1 it is shown that for servicing enforcement place in the place different from service enforcement place is supported from support
Multiple lithographic equipments of P setting carry out the data processing system 1 of remote support.The data processing method of present embodiment can be made
It is executed for program by computer.Data processing system 1 can include device 100 and the server 101 as data processing equipment.
Multiple devices 100 are the lithographic equipments such as exposure device or the imprinting apparatus that pattern is formed on substrate.Alternatively, it is also possible to being in base
The planarization layer that planarization layer is formed on plate forms device.Multiple devices 100 are set to place P.Multiple devices 100 by using
The network of special circuits such as server 101 and LAN (Local Area Network), using general route network or be based on
Network of wireless communication etc. and connect.Device 100 can communicatedly be connect with server 101.
Server 101 is supported via the Internet wires such as Virtual Private Network (hereinafter sometimes referred to " VPN ") with being located at
The reception client 109 for servicing enforcement place connects.Server 101 by it is preset, with receive client 109 from device
100 data (device data 110) for receiving purpose (receiving purpose) corresponding device 100 of data are sent out to client 109 is received
It send.Refer to device data 110 hereinafter, referred to simply as the case where " data ".In addition, server 101 can also be according to objective from receiving
The request at family end 109 sets reception purpose.In this case, client 109 is received according to implementing to each device 100
Support service come determine receive purpose, and to server 101 send.Server 101 is received and is received from client 109 is received
The relevant information of purpose sends the data of device 100 corresponding with the purpose of data is received to client 109 is received.
Server 101 can have judging part 102, communication speed acquisition unit 103, storage unit 108 and transmission data and determine
Determine portion 107.Judging part 102 judges that each device 100 is the state acted in implementation setting, putting maintenance into practice action state, goes back
It is to generate master meter under the operating conditions such as the state of manufacture in facilities and equipments, and be supplied to and send data determination section 107.
In addition, the state for implementing setting movement is hereafter known as " in setting ", the state of putting maintenance into practice movement is known as " in maintenance ", it will
The state of the manufacture of facilities and equipments is known as " in production ".Fig. 2 is to show to show to be sentenced by the judging part 102 of the 1st embodiment
One exemplary figure of the master meter of the operating condition of disconnected each device 100.By the master meter generated of judging part 102
In, such as the state of such as device #1 is " in production ", device #2 is also " in production " that device #3 is " in maintenance ", and device #4 is
" in production ", device #5 like that, show the respective current operating condition of device 100 for " in setting ".Hereafter, by Fig. 2 institute
The master meter shown is known as master meter A.Judging part 102 is sentenced according to such as manufacturing speed of the equipment of device 100 or operating conditions etc.
Disconnected operating condition.In addition, judging part 102 can also according to be for example input to device 100 or receive client 109 with operating shape
The relevant information of state carrys out the operating condition of judgment means 100.
Communication speed acquisition unit 103 is obtained according to the data transfer time between server 101, reception client 109
Communication speed, and be supplied to and send data determination section 107.
Storage unit 108 save by the priority master meter 104 of purpose, the priority master meter 105 based on communication speed with
And all send the letter relevant to the priority of data for determining to send to reception client 109 such as data list 106
Breath.It is shown by the priority master meter 104 of purpose and the operating condition of device 100 and receives that purpose is corresponding, data are each
From transmission priority.Fig. 3 A to Fig. 3 D is an example for showing the priority master meter 104 by purpose of the 1st embodiment
Figure.Fig. 3 A is that the operating condition of device 100 is " in production ", the purpose of reception data is " Resolving probiems (trouble
One example of the priority master meter 104 by purpose in the case where shooting) ".In detail in this figure, in each data class
The priority that digital representation shown in side is sent to the data for receiving client 109.Such as the conduct as Resolving probiems
In the case that urgent reply and scene just need device data, all data class are set high to priority.
On the other hand, Fig. 3 B to Fig. 3 D be receive data purpose be " running rate monitoring " in the case where by the excellent of purpose
First spend an example of master meter 104.In this, it is assumed that the data receiver for running rate monitoring was steadily connect with the fixed cycle
The form of receiving apparatus data.In addition, hereafter, master meter shown in Fig. 3 A to Fig. 3 D is collectively referred to as master meter B.In figure 3b, show
The operating condition of device 100 is gone out for the transmission priority in the case where " in production ".Similarly, Fig. 3 C shows device 100
Operating condition the case where being " in maintenance ", to show the operating condition of device 100 be hair in the case where " in setting " to Fig. 3 D
Send priority.It is " running rate monitoring " due to receiving purpose, is set in the priority of " in setting ", each device data
To be low, in " in production ", the priority of each device data is set to higher.In master meter B, according to the fortune of device 100
Turn state and individually sets the priority of each device data.In addition, here, being illustrated as an example for receiving purpose
" Resolving probiems " and " running rate monitoring ", but these are not limited to, such as new reception can also be inputted from client 109 is received
Purpose.
Fig. 4 is an exemplary figure for showing the priority master meter 105 based on communication speed of the 1st embodiment.Base
In communication speed priority master meter 105 be make server 101, receive client 109 between communication speed and device number
According to the corresponding master meter of priority.In addition, hereafter, the master meter C referred to as shown in Fig. 4.It shows in the example depicted in fig. 4
, it is " 8 " or more by priority in the case that the communication speed as acquired in communication speed acquisition unit 103 is less than 300KB/sec
Device data as sending object.Similarly, in 300KB/sec~500KB/sec, by the device number more than priority " 5 "
According to as sending object, in 500KB/sec~800KB/sec, using the device data more than priority " 3 " as sending object,
In the case where the communication speed of 800KB/sec or more, using all device data as sending object.All send data column
Table 106 is the data that device data needed for receiving the support service that client 109 implements each device 100 are all enumerated
List.That is, the information of required device data corresponding with purpose is received.
It sends data determination section 107 and required institute is serviced to the support that each device 100 is implemented from reception client 109
In some device data (all sending data list 106), being determined based on the information of each master meter will be to reception client 109
The device data of transmission.It sends data determination section 107 to send to reception client 109 via internet, the device of sending object
Data.
Specifically, sending the operating shape that data determination section 107 grasps the device 100 as object according to master meter A
State, selection master meter B corresponding with the operating condition of device 100 of object is become.Data determination section 107 is sent to be based on corresponding to
Master meter B determine the transmission priorities of each device data, generate comprising priority whole sends data lists 106.
Fig. 5 A and Fig. 5 B are the whole exemplary figures for sending data list 106 for showing the priority comprising the 1st embodiment.
It all sends in data list 106 shown in Fig. 5 A, lists and receive the support that client 109 implements each device 100
Whole device data needed for service include priority corresponding with each device data.Data determination section 107 is sent to determine
After the data class of required device data, it is also based on master meter C, it will as the dress of sending object according to communication speed decision
Set data.For example, at this point, setting communication speed as 290KB/sec.Master meter C according to Fig.4, dress more than priority " 8 "
Data are set as sending object.As a result, as shown in Figure 5 B, send data determination section 107 determine only send priority be " 8 " with
On device data.It about the device data for being not selected for sending object, can both delete, can also determine in next send
Shi Zaici judges priority.
Fig. 6 is the flow chart of the transmission processing for the device data for showing the 1st embodiment.It is each dynamic shown in the flow chart
Making (step) can be executed by transmission data determination section 107.It in step s 201, will be to each according to the reception purpose of setting
Data needed for the support service that device 100 is implemented all are enumerated, it is determined that the data sent.Number is all sent that is, generating
According to list 106, it is stored in storage unit 108.In step S202, judging part 102 judges the operating condition of each device 100,
Master meter A is generated, provides the operating condition of each device 100 to data determination section 107 is sent.In step S203, communication speed
Degree acquisition unit 103 obtains communication speed according to the data transfer time between server 101 and reception client 109, provides
Give transmission data determination section 107.
In step S204, data determination section 107 is sent based on the preset priority master meter 104 by purpose
(master meter B) determines the priority for all sending data.In step S205, received in step S203 provided logical
Believe that the transmission data determination section 107 of speed according to the preset priority master meter 105 based on communication speed, determines conduct
The priority of sending object.In step S206, data determination section 107 is sent from the whole of priority are shown and sends data column
Among table 106, according to the priority as sending object determined in step S205, carry out selection device data, and determine to answer
When the device data of transmission.In step S207, sends data determination section 107 and obtain determined device from each device 100
Data, to reception 109 sending device data of client.
According to the data processing equipment, even if in the case where becoming the insufficient state of communication speed, it also can be according to dress
100 operating condition is set, selector splice grafting receives the appropriate device data of purpose as sending object.Accordingly, it is supporting to service
Enforcement place can be implemented in the maximum support service that can implement at that time.
In addition, each master meter shown in present embodiment can also be according to from the request for receiving client 109 and by more
Newly.Such as each master meter can also be updated from the input unit that client 109 has is received.
(second embodiment)
Hereinafter, being illustrated to the data processing equipment of the 2nd embodiment of the invention.Do not have about the 2nd embodiment
The item referred to continues to use the 1st embodiment.In the 2nd embodiment, show in a priority master meter 104 by purpose
Multiple reception purposes out.
Fig. 7 A to Fig. 7 C is an exemplary figure for showing the priority master meter 104 by purpose of the 2nd embodiment.Figure
The operating condition that 7A shows device is " in production " that reception purpose is " Resolving probiems ", " running rate monitoring ", " precision is visited
Beg for ", " optical degradation assessment ", multiple purposes such as " foreign bodies detection " and " assessment of failure ".In present embodiment by purpose
In priority master meter 104, the priority of data class is set separately for multiple reception purposes.Similarly, Fig. 7 B is device
100 operating condition is the priority master meter 104 by purpose in the case where " in maintenance ", and Fig. 7 C is the operating of device 100
State is the priority master meter 104 by purpose in the case where " in setting ".Fortune of the priority of data class because of device 100
It is different with purpose is received to turn state.In addition, hereafter, master meter shown in Fig. 7 A to Fig. 7 C is collectively referred to as master meter D.
Send the operating condition that data determination section 107 grasps the device 100 of the device as object according to master meter A.
Also, the selection of data determination section 107 master meter D corresponding with the operating condition of device 100 of object is become is sent, determines to press
The priority of data class.Fig. 8 A and Fig. 8 B are the whole transmission data column for showing the priority of the 2nd embodiment and being shown
One exemplary figure of table 106.It all sends in data list 106 shown in Fig. 8 A, all lists and receive client 109
Device data needed for the support service implemented to each device 100, show priority corresponding with each device data.
Next, sending data determination section 107 is based on master meter C, according to communication speed, decision will be as sending object
Priority determines the data that should be sent.For example, at this point, communication speed be 350KB/sec in the case where, according to master meter
C, device data more than priority " 5 " become sending object, as shown in Figure 8 B, determine that only sending priority is " 5 " or more
Device data.In the present embodiment, for example, in device #3, by the real-time logs (real as identical data type
Time log) as it is different receive purposes " running rate monitorings " and " accuracy discussion " in respectively as sending object.Here,
Due to being determined as " 5 " or more according to communication speed priority to be sent, under the purpose of " running rate monitoring ", do not send out
Send real-time logs.However, from " accuracy discussion ", this then becomes sending object from the viewpoint of receiving purpose, therefore the result is that real
Shi Zhi is sent.Multiple reception purposes can also be based on, like this to be decided to become the device data of sending object.
According to the present embodiment, it can be determined to send data according to multiple reception purposes, therefore can sent more appropriate
Device data.
(3rd embodiment)
Hereinafter, being illustrated to the data processing equipment of the 3rd embodiment of the invention.Not as the 3rd embodiment
It is mentioned item, continues to use the 1st embodiment and the 2nd embodiment.In the present embodiment, the mistake also based on device 100
State determines the device data to be sent.
Fig. 9 is to show to show the operating condition of each device 100 judged by the judging part 102 of the 3rd embodiment
An and exemplary figure of the master meter of error condition.Hereafter, master meter shown in Fig. 9 is known as master meter E.In Fig. 9,
The operating condition of device #1 is shown " in production ", and error condition shows " technique (process) accuracy error ".Here, " work
The precision that skill accuracy error " shows production technology produces the state of deviation.The operating condition of device #3 is shown " in maintenance ",
Error condition shows " consumable part consumption ".Here, " consumable part consumption " shows the consumption in the device as object
The state that component is consuming, i.e. the replacement opportunity of consumable part close state.The operating condition of device #4 shows " production
In ", error condition shows " optical system deterioration ".Here, " optical system deterioration " is shown in the device as object
The state that optical system is deteriorating, i.e. the replacement opportunity of optical system close state.
So-called error condition refers to that the device 100 such as the craft precision of device 100 produces the state of deviation generates
The state that the state or consumable part that the optical system of abnormal state or device 100 is deteriorating are consuming etc.
Need replacing the state of component.Judging part 102 can also be according to the state of for example manufactured equipment or total operating of device
Time etc. is come the state of judging incorrectly.In addition, error condition above-mentioned is an example, it is not limited to these.In addition, hereafter, if " dress
The state set " such case includes the operating condition and error condition of device.
Figure 10 A and Figure 10 B are that one of the priority master meter 104 by purpose for showing the 3rd embodiment is exemplary
Figure.In detail in this figure, equally with the master meter D of the 2nd embodiment (Fig. 7 A to Fig. 7 C), data are shown by multiple received purposes
The priority of type.Figure 10 A shows the operating condition of device 100 as the priority base by purpose in the case where " in production "
One example of quasi- table 104.Figure 10 B show device 100 error condition be " craft precision deviation " in the case where by mesh
Priority master meter 104 an example.Hereafter, the master meter of Figure 10 A and Figure 10 B are collectively referred to as master meter F.
It sends data determination section 107 and grasps the state for becoming the device 100 of object according to master meter E.Data are sent to determine
The selection of portion 107 master meter F corresponding with the operating condition of the device 100 as object and error condition, determines to press data
The priority of type.Figure 11 A and Figure 11 B are the whole transmission data column for being shown priority for showing the 3rd embodiment
One exemplary figure of table 106.It all sends in data list 106 shown in Figure 11 A, all lists reception client
Device data needed for the support service that 109 pairs of each devices 100 are implemented are shown corresponding with each device data preferential
Degree.
Next, sending data determination section 107 is based on master meter C, according to communication speed, determine as the excellent of sending object
It first spends, determines the data to be sent.For example, in the case that communication speed is 700KB/sec at this moment, according to master meter C, preferentially
The device data for spending " 3 " or more become sending object.As a result, as shown in Figure 11 B, it sends data determination section 107 and determines that transmission is excellent
First degree is the device data of " 3 " or more.
In addition, for example, at this point, communication speed be 250KB/sec, according to the priority of master meter C be " 9 " the case where
Under, it sends data determination section 107 and determines only to send the device data that priority is " 9 " or more.In the present embodiment, for example,
In device #1, by as the real-time logs of identical data type in " in the production " of the state as different device and " technique
Accuracy error ", as it is different receive purposes " running rate monitorings " and " accuracy discussion " it is each in, as sending object.In
This, according to communication speed, priority to be sent is determined as " 9 " or more, therefore real-time logs are in the device shape of " in production "
It is not sent under state and the purpose of " running rate monitoring ".However, from the unit state and " accuracy discussion " of " craft precision deviation "
From the viewpoint of such reception purpose, then become sending object, therefore the result is that real-time logs are sent.
Like this, the device data to be sent can also be determined based on the state of multiple devices.Hereby it is possible to select more
Appropriate device data can implement appropriate support service as sending object.
In addition, can also determine only to send priority height in the case where having selected same data class in the same apparatus
Data.Hereby it is possible to avoid the transmission of duplicate data, therefore it can reduce data and send load.
Although describing the present invention referring to exemplary embodiment, it is to be understood that the present invention is not limited to disclosed examples
Property embodiment.The range of claims most should broadly be understood to include all deformation and equivalent structure and function.
This application claims Japanese patent application 2018-096087 equity submitted on May 18th, 2018, in whole
Appearance is incorporated by reference into this.
Claims (11)
1. a kind of data processing equipment can communicatedly be connect with lithographic equipment, sends via network and filled from the photoetching
The data set, the data processing equipment are characterized in that:
Have determination section, receives the purpose of data based on the operating condition of the lithographic equipment and from the lithographic equipment to determine
The data to be sent.
2. data processing equipment according to claim 1, which is characterized in that
The operating condition of the lithographic equipment include implementing setting movement state, just putting maintenance into practice movement state,
Just in the state of the manufacture of facilities and equipments.
3. data processing equipment according to claim 1, which is characterized in that
It is also equipped with judging part, which judges the operating condition of the lithographic equipment.
4. data processing equipment according to claim 3, which is characterized in that
The judging part judges the error condition of the lithographic equipment,
The determination section determines the data to be sent based on the error condition of the lithographic equipment.
5. data processing equipment according to claim 4, which is characterized in that
The error condition of the lithographic equipment includes that the craft precision of the lithographic equipment produces the state of deviation, the photoetching
The state that the consumable part of state and the lithographic equipment that the optical system of device is deteriorating is consuming.
6. data processing equipment according to claim 1, which is characterized in that
The determination section determines the data to be sent based on the communication speed of the network.
7. data processing equipment according to claim 1, which is characterized in that
Be also equipped with storage unit, the storage unit save the operating condition of the lithographic equipment, the error condition of the lithographic equipment,
The communication speed of the network or it is corresponding with the received purpose and with for determining the preferential of the data to be sent
Spend relevant information.
8. data processing equipment according to claim 7, which is characterized in that
The error condition of operating condition or the lithographic equipment of the determination section based on the lithographic equipment, the received mesh
, relevant to priority information, generate comprising required data corresponding with the received purpose and with it is described
The information of the corresponding priority of required data.
9. a kind of data processing method sends the data from lithographic equipment, the feature of the data processing method via network
It is,
It determines to send with the purpose of data is received based on the operating condition of the lithographic equipment and from the lithographic equipment
Data process.
10. a kind of computer-readable recording medium, being stored with, which executes computer, sends via network from lithographic equipment
Data data processing method program, the computer-readable storage medium is characterized in that,
The data processing method receives data with the operating condition based on the lithographic equipment and from the lithographic equipment
Purpose is come the process that determines the data to be sent.
11. a kind of data processing system, the data processing that has lithographic equipment and can communicatedly be connect with the lithographic equipment
Device sends the data from the lithographic equipment via network, and the data processing system is characterized in that,
The data processing equipment has a determination section, operating condition of the determination section based on the lithographic equipment and from the light
Engraving device receives the purpose of data to determine the data to be sent.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2018096087A JP7059105B2 (en) | 2018-05-18 | 2018-05-18 | Data processing equipment, data processing methods, programs, and data processing systems |
| JP2018-096087 | 2018-05-18 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110505159A true CN110505159A (en) | 2019-11-26 |
| CN110505159B CN110505159B (en) | 2023-05-16 |
Family
ID=68585470
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910405887.5A Active CN110505159B (en) | 2018-05-18 | 2019-05-16 | Data processing device, data processing method, recording medium, and data processing system |
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| JP (1) | JP7059105B2 (en) |
| KR (1) | KR102443300B1 (en) |
| CN (1) | CN110505159B (en) |
| TW (1) | TWI734098B (en) |
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Also Published As
| Publication number | Publication date |
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| KR20190132256A (en) | 2019-11-27 |
| JP7059105B2 (en) | 2022-04-25 |
| KR102443300B1 (en) | 2022-09-15 |
| TW202006472A (en) | 2020-02-01 |
| JP2019200377A (en) | 2019-11-21 |
| CN110505159B (en) | 2023-05-16 |
| TWI734098B (en) | 2021-07-21 |
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