CN110405354A - A kind of femtosecond laser processing method of optical fiber lens - Google Patents
A kind of femtosecond laser processing method of optical fiber lens Download PDFInfo
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- CN110405354A CN110405354A CN201910673089.0A CN201910673089A CN110405354A CN 110405354 A CN110405354 A CN 110405354A CN 201910673089 A CN201910673089 A CN 201910673089A CN 110405354 A CN110405354 A CN 110405354A
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- optical fiber
- lens
- femtosecond laser
- fiber lens
- hydrofluoric acid
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/50—Working by transmitting the laser beam through or within the workpiece
- B23K26/53—Working by transmitting the laser beam through or within the workpiece for modifying or reforming the material inside the workpiece, e.g. for producing break initiation cracks
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/02—Optical fibres with cladding with or without a coating
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Abstract
The invention discloses a kind of femtosecond laser processing methods of optical fiber lens, comprising the following steps: is scanned on optical fiber according to lens contour to be prepared using the femtosecond laser of focusing, laser spot irradiation zone generating material is modified or etching removes；By treated, hydrofluoric acid solution is immersed in fiber end face part, is removed by the selective etching to modification area material, the optical fiber outside lens contour is made to be detached to form optical fiber lens prototype；The control corrosion rate time makes the surface of the optical fiber lens prototype obtained tend to smooth, forms optical fiber lens.The method of the present invention manufacturing procedure is simple, the pattern for preparing optical fiber lens is flexible, fuel factor is not present in processing, convex surface and the concave surface optical fiber lens of various patterns can be prepared in fiber end face, it solves in existing preparation method that there are stress ruptures and thermal ablation problem on deformation, can be used for the field that fields such as Fibre Optical Sensor, optical fiber laser etc. need fiber coupling.
Description
Technical field
The invention belongs to optical fiber optics and field of laser processing, are related to a kind of processing method of optical fiber lens, and in particular to
One kind preparing optical fiber lens method based on femtosecond laser micro-nano technology technology in conjunction with chemical attack, in particular to a kind of optical fiber is saturating
The femtosecond laser processing method of mirror.
Background technique
Optical fiber lens are a kind of optical elements that fiber end face is fabricated to lens arrangement, are mainly used in fibre system
Optical coupling.Compared to external lenticule coupling process common in traditional optical coupling, lens fiber has flexibly and easily, is easily integrated envelope
The many merits of dress, processing and fabricating.Lens fiber has in the fields such as optic communication, light sensing, optical fiber laser widely answers
With.The lens fiber production for either showing strict control geometry from technical research or practical application, all to raising
Coupling efficiency plays an important role.
The principal mode of optical fiber lens has spherical surface, wedge surface, the conical surface and inclined-plane lens, makes the method for optical fiber lens at present
Main to be formed using high-precision grinder to fiber end face progress precise finiss, lens surface can achieve advanced geometric accuracy.
However due to needing to apply pressure to optical fiber to optical fiber in grinding, it is be easy to cause fibre strain, the optical fiber lens of preparation is caused to be deposited
In uncertain deviation and asymmetry.In addition, grinding technique is mainly for the preparation of convex surface optical fiber lens.Another is suitable for
The method that batch prepares optical fiber lens is by the way of Laser Micro-Machining.CO is mainly utilized at present2Long Pulse LASER ablation pair
Fiber end face carries out processing and forming.However due to long pulse or continuous laser processing optical fiber be mainly material to laser absorption after
The fuel factor of generation, the fuel factor generated in this laser processing easily cause the deformation of fiber end face.
To sum up, a kind of femtosecond laser processing method of new optical fiber lens is needed.
Summary of the invention
The purpose of the present invention is to provide a kind of femtosecond laser processing methods of optical fiber lens, to solve above-mentioned one
A or multiple technical problems.
In order to achieve the above objectives, the invention adopts the following technical scheme:
A kind of femtosecond laser processing method of optical fiber lens of the invention, comprising the following steps:
It is scanned on optical fiber according to lens contour to be prepared using the femtosecond laser of focusing, laser spot irradiation zone
Generating material is modified or etching removes；
By treated, hydrofluoric acid solution is immersed in fiber end face part, is gone by the selective etching to modification area material
It removes, the optical fiber outside lens contour is made to be detached to form optical fiber lens prototype；
The control corrosion rate time makes the surface of the optical fiber lens prototype obtained tend to smooth, forms optical fiber lens.
A further improvement of the present invention is that carrying out figure in inside of optical fibre or surface using the femtosecond laser of focusing
Change scanning, forms the optical fiber lens profile being made of femtosecond laser modification area；
Two optical fiber of modification area is separated by hydrofluoric acid corrosion, forms the idiosome of optical fiber lens；It is relayed in hydrofluoric acid
Continuous corrosion, lens idiosome surface gradually tends to be smooth, ultimately forms the optical fiber lens of high quality；
Wherein, alternatively, the idiosome of optical fiber lens is etched using femtosecond laser by surface layer-by-layer scanning.
A further improvement of the present invention is that optical fiber uses quartz glass optical fiber.
A further improvement of the present invention is that using the femtosecond laser of focusing on optical fiber according to lens contour to be prepared into
When row scanning,
It is scanned, is formed by the change of femtosecond laser induced material structure or cavity in inside of optical fibre using femtosecond laser is focused
The lens contour of composition；
Alternatively, the surface layer-by-layer scanning that femtosecond laser focuses on optical fiber is etched optical fiber lens idiosome.
A further improvement of the present invention is that hydrofluoric acid mass concentration is 3%~10%, whole etching times used >=
5min。
A further improvement of the present invention is that specifically includes the following steps:
1) fiber end face is cut smooth, and optical fiber is fixed on five Wei electricity Dong Weiyitai；
2) femtosecond laser is focused into inside of optical fibre or surface using condenser lens, laser is controlled by scanning galvanometer and is swept
It retouches or by five dimension electricity driving displacement platform moving fibers, forms the lens wheel being made of laser modified region on fiber end face
It is wide；
3) by step 2), treated that optical fiber end is put into hydrofluoric acid solution carries out ultrasonic erosion, erosion removal femtosecond laser
Modified zone forms the idiosome of optical fiber lens；
4) continue to corrode in a solution of hydrofluoric acid, the further smooth formation optical fiber of idiosome lens surface for obtaining step 3)
Lens.
A further improvement of the present invention is that scanning galvanometer or five Wei electricity Dong Weiyitai are winged for controlling in step 2)
Focusing and scan position of the second laser on optical fiber, to form the profile of optical fiber lens by fixed point or scanning machining；
In step 2), the structure that the femtosecond laser induces in optical fiber is the change of fiber optic materials density or microcavity knot
Structure.
A further improvement of the present invention is that for the femtosecond laser when inside of optical fibre scans, hydrofluoric acid is rotten in step 3)
Optical fiber splits into two parts by line of demarcation of scanning profile part after erosion, and a portion is optical fiber lens idiosome；Femtosecond laser
Optical fiber lens idiosome is directly formed when optical fiber surface is scanned and etched.
A further improvement of the present invention is that the condenser lens is 5 times, 10 times, 20 times 50 times and 100 zoom and focus lens
One of with F-Theta scanning lens；
The repetition rate of femtosecond laser be 1kHz, power 0.5mW~10mW of femtosecond laser, laser scan rate be≤
100μm/s。
A further improvement of the present invention is that the optical fiber lens for processing acquisition are convex lens or concavees lens.
Compared with prior art, the invention has the following advantages:
The femtosecond laser processing method of optical fiber lens of the invention is made using the optical fiber induced laser spot of Gold Films Irradiated by Femtosecond Laser
It is modified with the fiber optic materials in region, optical fiber lens profile, then the method production of hydrofluoric acid chemical attack is constituted by scanning
Optical fiber lens idiosome out, and keep optical fiber lens end face smooth using hydrofluoric acid corrosion.Method operation machining accuracy of the invention is high,
Symmetry is good, and material removal is few.The present invention can prepare the conical surface, spherical surface, wedge surface and inclined-plane lens arrangement in fiber end face；This
Invention can make the lens of convex lens, lenticule and other complicated shapes, can be avoided the stress in grinding machine-tooled method
Damage and Long Pulse LASER fuel factor.
In the present invention, inside of optical fibre is focused on using femtosecond laser and is processed, processed relative to surface is focused on,
Induce the size of micro-structure can be smaller.Femtosecond laser can induce inside quartz material generates the knots such as density increase and microcavity
Structure.By the modified quartz glass of Gold Films Irradiated by Femtosecond Laser compared to unmodified quartz glass, have in hydrofluoric acid faster
Corrosion rate.Therefore, when the optical fiber lens profile sample that production has femtosecond laser modified zone to constitute being placed on hydrofluoric acid, femtosecond swashs
Light modified zone corrosion rate is very fast, so that optical fiber be made to become two parts along scanning profile division, a portion is convex surface
Optical fiber lens idiosome.When quartz glass corrodes in the hydrofluoric acid of concentration 5% or so, surface can gradually tend to be smooth, reach mirror
The effect in face.Therefore optical fiber lens idiosome forms after 5% or so hydrofluoric acid of concentration continues corrosion with optical quality surface
Optical fiber lens.Specific etching time is related to hydrofluoric acid concentration and temperature.
In the present invention, femtosecond laser micro-nano technology technology have machining accuracy is high, Three-dimension process can be carried out to transparent material,
The advantage not selective to rapidoprint, and hydrofluoric acid carries out selective corrosion to femtosecond laser modified zone.The present invention utilizes
Femtosecond laser scans to form optical fiber lens profile in inside of optical fibre, or etched from surface layer-by-layer using femtosecond laser to be formed it is micro-
Mirror idiosome can neatly prepare various shapes by hydrofluoric acid selective corrosion removal and smooth formation optical fiber lens
Looks optical fiber lens cut unstressed destruction in processing.The concave lens knot that polishing is difficult preparation can be prepared using this method
Structure, relative to existing CO2Laser preparation method is influenced without fuel factor.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, below to embodiment or existing
Attached drawing needed in technical description does simple introduction；It should be evident that the accompanying drawings in the following description is of the invention
Some embodiments to those skilled in the art without creative efforts, can also be according to this
A little attached drawings obtain other attached drawings.
Fig. 1 is the material using femtosecond laser in fiber end face processing with lens contour of use in the embodiment of the present invention
Expect modified zone apparatus structure schematic diagram；
Fig. 2 is to corrode to form optical fiber lens using hydrofluoric acid to the optical fiber after femtosecond laser processing in the embodiment of the present invention
Apparatus structure schematic diagram；
Fig. 3 is the procedure of processing schematic diagram that optical fiber lens are prepared in the embodiment of the present invention；Wherein Fig. 3 (a) is light to be processed
Fine schematic diagram, Fig. 3 (b) are to form the modified plot structure of optical fiber with lens contour distribution after optical fiber scanning using femtosecond laser
Schematic diagram, Fig. 3 (c) is through material outside hydrofluoric acid erosion removal modified zone but the not yet smooth optical fiber lens in formation surface are illustrated
Figure, Fig. 3 (d) are through material outside hydrofluoric acid erosion removal modified zone and to form the smooth optical fiber lens schematic diagram in surface；
Fig. 4 is that embodiment 1 prepares the structural schematic diagram in spherical optical fibre lens process；Wherein Fig. 4 (a) is through femtosecond laser
The optical fiber structure schematic diagram of modification area is formed after irradiation, Fig. 4 (b) is the optical fiber lens idiosome knot formed after hydrofluoric acid corrodes
Structure schematic diagram；Fig. 4 (c) is the optical fiber lens schematic diagram with smooth surface formed after hydrofluoric acid further corrodes；
Fig. 5 is conical fiber lens schematic diagram prepared by embodiment 2；Wherein Fig. 5 (a) is successively to be scanned using femtosecond laser
In the conical fiber lens idiosome schematic diagram of fiber end face preparation, Fig. 5 (b) is to be formed after hydrofluoric acid corrodes with smooth
The conical fiber lens schematic diagram on surface；
Fig. 6 is optical fiber concave mirror structural schematic diagram prepared by embodiment 3；Wherein Fig. 6 (a) is the shape after Gold Films Irradiated by Femtosecond Laser
At the optical fiber structure schematic diagram for having structurally-modified area, Fig. 6 (b) is that the optical fiber concave mirror structure formed after hydrofluoric acid corrodes is shown
It is intended to；
Fig. 1 is into Fig. 6, and 1 is optical fiber, and 2 be condenser lens, and 3 be five Wei electricity Dong Weiyitai, and 4 be femtosecond laser, and 5 be scanning
Galvanometer, 6 be imaging CCD, and 7 be shutter, and 8 be variable attenuator, and 9 be fiber clamp, and 10 be computer, and 11 be hydrofluoric acid solution,
12 be supersonic wave cleaning machine, and 14 be modification area, and 15 be idiosome, and 16 be erosion removal part, and 17 is saturating for the smooth optical fiber in surface
Mirror.
Specific embodiment
To keep the purpose, technical effect and technical solution of the embodiment of the present invention clearer, implement below with reference to the present invention
Attached drawing in example, technical scheme in the embodiment of the invention is clearly and completely described；Obviously, described embodiment
It is a part of the embodiment of the present invention.Based on embodiment disclosed by the invention, those of ordinary skill in the art are not making creation
Property labour under the premise of other embodiments obtained, all should belong to the scope of protection of the invention.
It please refers to Fig.1 to Fig.3, a kind of femtosecond laser processing method of optical fiber lens of the embodiment of the present invention utilizes focusing
Femtosecond laser, be patterned scanning in inside of optical fibre or surface, form the optical fiber being made of femtosecond laser modification area
Lens contour；Two optical fiber of modification area further is separated by hydrofluoric acid corrosion, forms the idiosome of optical fiber lens.In hydrogen fluorine
Continue to corrode in acid, lens idiosome surface gradually tends to be smooth, ultimately forms the optical fiber lens of high quality.Wherein, optical fiber lens
Idiosome also can use femtosecond laser and be etched by surface layer-by-layer scanning.The step process that Fig. 3 is shown can by Fig. 1 and
The device of Fig. 2 is realized.
A kind of femtosecond laser processing method of optical fiber lens of the embodiment of the present invention, specifically includes the following steps:
1) using optical fiber cutter 1 ends cutting of optical fiber is smooth, and by fiber clamp 9 optical fiber 1 is fixed on it is high-precision
In five dimensions electricity driving displacement platform 3 (namely five axis electricity driving displacement platforms) of degree；
2) femtosecond laser 4 is focused into 1 inside of optical fiber or surface using condenser lens 2, is controlled and is swashed by scanning galvanometer 5
Optical scanning or five axis electricity driving displacement platform moving fibers 1 make focusing femtosecond laser scan to be formed by laser modified in inside of optical fibre
The lens contour that area is constituted, or successively scanned using femtosecond laser, it etches in fiber end face with optical fiber lens shape
Optical fiber lens idiosome；The lens contour being made of laser modified region 14 is formed on fiber end face；Modification area 14 is femtosecond
Induced with laser fiber optic materials modification area；
3) it will be put into hydrofluoric acid solution 11 using the optical fiber after femtosecond laser scanning machining and carry out ultrasonic erosion, femtosecond swashs
Light modified zone 14 is since corrosion rate is faster corroded removal relative to unmodified area, to keep scanning profile two side portions de-
From a portion forms the idiosome 15 (being at this time shaggy optical fiber lens idiosome) of optical fiber lens, and another part is corruption
Etching off removes part 16；
4) continuing corrosion in hydrofluoric acid keeps the continuation of idiosome lens surface smooth, forms the smooth optical fiber lens 17 in surface.
Further, optical fiber can be silica fibre in step 1).
Further, step 2) femtosecond laser can be by surface sweeping vibration mirror scanning laser to the scanning of optical fiber, or utilizes
Five axis electricity driving displacement platform moving fibers or the two cooperation are completed, and the optical fiber being made of femtosecond laser modified zone is formed after scanning
Lens contour.
Further, it is scanned in optical fiber in step 2) using femtosecond laser, what formation was made of laser modified area
Optical fiber lens profile, or successively scanned using femtosecond laser from optical fiber surface and form optical fiber lens idiosome.
Further, the repetition rate 1kHz of the femtosecond laser, power 0.5mW~10mW of femtosecond laser, laser are swept
Retouching rate is≤100 μm/s.
Further, when selecting scanning galvanometer to be scanned, condenser lens is selected as F-Theta scanning lens.Utilize five
When axis translation stage is scanned, condenser lens is selected as F-Theta or is 5 times, and 10 times, 20 times 50 times and 100 show speck
Mirror.
Further in step 3) behind the laser modified area of hydrofluoric acid selective corrosion, if optical fiber lens idiosome surface
Smooth enough (smoothness of preset need) does not need progress step 4) and further corrodes.
In conclusion the present invention is occurred using the fiber optic materials of the optical fiber induced laser spot zone of action of Gold Films Irradiated by Femtosecond Laser
It is modified, optical fiber lens profile is constituted by scanning, then the method for hydrofluoric acid chemical attack produces optical fiber lens idiosome, and utilizes
Hydrofluoric acid corrosion keeps optical fiber lens end face smooth.This method operates machining accuracy height, and material removal is few.The present invention can be in optical fiber
The conical surface, spherical surface, wedge surface and inclined-plane lens arrangement are prepared in end face, in addition, the present invention can make convex lens, lenticule and other
The lens of complicated shape avoid the stress damage and Long Pulse LASER fuel factor covered in grinding machine-tooled method.
In the embodiment of the present invention, focus on inside of optical fibre using femtosecond laser and processed, relative to focus on surface into
Row processing, induces the size of micro-structure can be smaller.Femtosecond laser can be induced inside quartz material generate density increase and
The structures such as microcavity.By the modified quartz glass of Gold Films Irradiated by Femtosecond Laser compared to unmodified quartz glass, have in hydrofluoric acid
There is faster corrosion rate.Therefore, the optical fiber lens profile sample that production has femtosecond laser modified zone to constitute is placed on hydrofluoric acid
When, femtosecond laser modified zone corrosion rate is very fast, so that optical fiber be made to become two parts along scanning profile division, a portion is
For the optical fiber lens idiosome on convex surface.When quartz glass corrodes in the hydrofluoric acid of concentration 5% or so, surface can gradually tend to light
It is sliding, achieve the effect that mirror surface.Therefore optical fiber lens idiosome forms after 5% or so hydrofluoric acid of concentration continues corrosion with light
Learn the optical fiber lens on quality surface.Specific etching time is related to hydrofluoric acid concentration and temperature.
In the embodiment of the present invention, femtosecond laser micro-nano technology technology has machining accuracy height, can carry out three to transparent material
Dimension processing, the advantage not selective to rapidoprint, and hydrofluoric acid carries out selective corrosion to femtosecond laser modified zone.This hair
It is bright to scan to form optical fiber lens profile in inside of optical fibre using femtosecond laser, or shape is etched from surface layer-by-layer using femtosecond laser
It can neatly be prepared at lenticule idiosome by hydrofluoric acid selective corrosion removal and smooth formation optical fiber lens
Various pattern optical fiber lens cut unstressed destruction in processing.The concave surface that polishing is difficult preparation can be prepared using this method
Lens arrangement, relative to existing CO2Laser preparation method is influenced without fuel factor.
It carries out combined with specific embodiments below and with reference to attached drawing to specific structure of the invention and operating procedure further
It is described in detail.
The working principle of the invention:
Using the femtosecond laser focused in the embodiment of the present invention, it is patterned scanning in inside of optical fibre, is formed by laser
The lens contour that modified zone is constituted, further carries out chemical attack to sample after laser processing, in hydrogen fluorine in a solution of hydrofluoric acid
Laser modified area's structure on two sides separates to form laser idiosome under sour selective corrosion, or femtosecond laser can also be used and successively scan
Optical fiber lens idiosome is etched, optical fiber lens idiosome is further corroded in hydrofluoric acid, optical fiber lens idiosome surface is made to become
It is bordering on smooth, optical fiber lens of the formation with smooth end face.
Fig. 1 to realize the present invention used by for optical fiber inscribe femtosecond processing unit (plant) schematic diagram, by condenser lens
2, the automatically controlled dynamic displacement platform 3 of five dimensions, femtosecond laser 4, scanning galvanometer 5, imaging CCD6, shutter 7, the composition of variable attenuator 8, fibre clip
Tool 9 and computer 10 form, and optical fiber is fixed on five dimension electricity driving displacement platforms 3 by fiber clamp 9, computer 10 and the five electronic positions of dimension
Moving stage 3 and the imaging CCD 6 being arranged in above microcobjective connection, femtosecond laser 4 are gathered after the reflection of scanning galvanometer 5 by lens
Coke is radiated on optical fiber 1.Light is controlled by scanning galvanometer 5 or five dimension electricity driving displacement platforms 3 drive optical fiber 1 mobile, is realized and is focused
Scanning machining or fixed point irradiation of the femtosecond laser 4 on optical fiber 1.What formation preparatory processing went out after laser irradiation has optical fiber
The optical fiber of lens contour structure.
Fig. 2 is that the optical fiber after femtosecond laser scanning machining carries out hydrofluoric acid corrosion device schematic diagram.Light after processing
Fibre is immersed in hydrofluoric acid solution 11, and ultrasonic erosion is carried out under the auxiliary of supersonic wave cleaning machine 12.Being formed has smooth surface
Optical fiber lens.
Fig. 3 is to be scanned the process that processing carries out hydrofluoric acid corrosion production optical fiber lens again to optical fiber using femtosecond laser
Schematic diagram.Wherein Fig. 3 (b) is the optical fiber being made of induced with laser modified zone formed after being scanned in optical fiber using femtosecond laser
Lens contour is split into two parts, wherein one after under hydrofluoric acid ultrasonic wave added to laser modified area's selective corrosion removal
It is divided into optical fiber lens idiosome, when corroding insufficient, optical fiber lens idiosome surface is still coarse, as shown in Fig. 3 (c).Through hydrofluoric acid
It further corrodes to form the smooth optical fiber lens in surface, as shown in Fig. 3 (d).
Using Fig. 1 and device shown in Fig. 2, specific processing provides several implementations of the invention below with reference to Fig. 3 to Fig. 6
Example:
Embodiment 1
The ball that the embodiment of the present invention is prepared with the femtosecond laser combination hydrofluoric acid chemical attack using repetition rate for 1kHz
Shape optical fiber lens, specific as follows:
Original material: single-mode quartz optical fibers.
The preparation step of conical fiber convex lens is elaborated as follows:
(1) single-mode quartz optical fibers 1 are cut out into smooth fiber end face using cutter, is then attached to five dimension electricity driving displacements
On platform 3, as shown in Figure 1；
(2) repetition rate of femtosecond laser 4 is 1kHz, pulse width 50fs, power setting 5mW.Selection 20 ×, number
It is worth the microcobjective 2 in aperture 0.3, focuses on femtosecond laser 4 inside optical fiber 1 by microcobjective 2.It is swept by scanning galvanometer 5
Focal position of the control femtosecond laser 4 in optical fiber is retouched, the tapered profiles being made of structurally-modified area, laser scan rate are formed
For 50 μm/s.
(3) hydrofluoric acid solution of concentration 5%, supersonic wave cleaning machine will be placed in using the sample after femtosecond laser scanning machining
Assisting ultrasonic, after corroding in about 30min, optical fiber is split from laser modification area for two parts, and a portion is that conical fiber is convex
Lens idiosome.
(4) after optical fiber lens idiosome being further corroded 20min in hydrofluoric acid, conical fiber convex lens structures are formed.
(a) is to go to constitute lens wheel by laser modified using what femtosecond laser scanned in 1 step of embodiment (2) in Fig. 4
Exterior feature, (b) is the two parts divided out after the corrosion of mirror hydrofluoric acid in Fig. 4, and middle and lower part is divided into spherical optical fibre lens idiosome, in Fig. 4
(c) for through hydrofluoric acid corrode it is smooth after the spherical optical fibre convex lens that finally makes.
Embodiment 2
The embodiment of the present invention is corroded again with etching optical fiber lens idiosome by successively scanning using femtosecond laser, is made
Make optical fiber lens.
Original material: single-mode quartz optical fibers.
(1) respective process of the fixed reference embodiment 1 of silica fibre 1.
(2) femtosecond laser 4 is existed through F-theta lens focus on fiber end face using scanning galvanometer control femtosecond laser
Fiber end face is scanned processing, and fiber end face is successively removed, and forms conical fiber lens idiosome, sees Fig. 5 (a), retouch speed
For 50 μm/s, cone angle is set as 30 °, laser power 10mW, repetition rate 1kHz.
(3) conical fiber lens idiosome surface is still coarse, and conical fiber lens idiosome is placed in 5% hydrofluoric acid, rotten
20min is lost, the tapered lens with smooth surface is formed, sees Fig. 5 (b).
(a) is spherical optical fibre lens idiosome schematic diagram prepared by embodiment 2 in Fig. 5.(b) is by chemical attack in Fig. 5
The spherical optical fibre lens arrangement schematic diagram with smooth end face formed afterwards.
Embodiment 3
The embodiment of the present invention after fiber end face fixed point irradiation using femtosecond laser to utilize hydrofluoric acid corrosion processing recessed
Lens arrangement, specific as follows:
Original material: single-mode quartz optical fibers.
(1) respective process of the fixed reference embodiment 1 of silica fibre 1.
(2) femtosecond laser 4 is irradiated to the end face of optical fiber 1 after the focusing of 20 x Microscope Objectives 2, passes through the five electronic position of dimension of control
Moving stage makes femtosecond focus on the end face surface of optical fiber 1 to be processed, and femtosecond laser focuses in fiber core in transverse plane
The heart controls fixed point irradiation 10s by shutter 7, and 4 power setting of femtosecond laser is 10mW, the numerical aperture of 20 x Microscope Objectives 2
0.3.Groove is formed in fiber core after femtosecond laser fixed point irradiation.Fig. 6 (a) be Gold Films Irradiated by Femtosecond Laser optical fiber after end face etch
The structural schematic diagram in micro- hole out.
(3) optical fiber for etching micro- hole through femtosecond laser is placed in 5% hydrofluoric acid solution, under ultrasonic wave added, is impregnated
In 30min, groove part forms the concave surface optical fiber lens with smooth end face after being gradually corroded.Fig. 6 (b) is through hydrofluoric acid corruption
The structural schematic diagram of concave surface optical fiber lens is formed after erosion.
In conclusion the invention discloses a kind of preparation method of optical fiber lens, using the femtosecond laser of focusing in optical fiber
One section of inner scanning forms the lens contour being made of laser modified area, recycles hydrofluoric acid corrosion, makes optical fiber along profile
Two parts are split into, a portion is the idiosome of optical fiber lens to be prepared, and continuing corrosion using hydrofluoric acid to idiosome makes its table
Face region is smooth, ultimately forms the optical fiber lens with smooth surface.The method of the present invention manufacturing procedure is simple, prepares optical fiber lens
Pattern it is flexible, fuel factor is not present in processing, convex surface and the concave surface optical fiber lens of various patterns can be prepared in fiber end face, solution
There are stress ruptures and thermal ablation problem on deformation in existing preparation method of having determined, and can be used for the neck such as Fibre Optical Sensor, optical fiber laser
Domain etc. needs the field of fiber coupling.
The above embodiments are merely illustrative of the technical scheme of the present invention and are not intended to be limiting thereof, although referring to above-described embodiment pair
The present invention is described in detail, those of ordinary skill in the art still can to a specific embodiment of the invention into
Row modification perhaps equivalent replacement these without departing from any modification of spirit and scope of the invention or equivalent replacement, applying
Within pending claims of the invention.
Claims (10)
1. a kind of femtosecond laser processing method of optical fiber lens, which comprises the following steps:
It is scanned on optical fiber according to lens contour to be prepared using the femtosecond laser of focusing, laser spot irradiation zone occurs
Material modification or etching removal；
By treated, hydrofluoric acid solution is immersed in fiber end face part, is removed, is made by the selective etching to modification area material
Optical fiber outside lens contour is detached to form optical fiber lens prototype；
The control corrosion rate time makes the surface of the optical fiber lens prototype obtained tend to smooth, forms optical fiber lens.
2. a kind of femtosecond laser processing method of optical fiber lens according to claim 1, which is characterized in that utilize what is focused
Femtosecond laser is patterned scanning in inside of optical fibre or surface, it is saturating to form the optical fiber being made of femtosecond laser modification area
Mirror wheel is wide；
Two optical fiber of modification area is separated by hydrofluoric acid corrosion, forms the idiosome of optical fiber lens；Continue in hydrofluoric acid rotten
Erosion, lens idiosome surface gradually tends to be smooth, ultimately forms the optical fiber lens of high quality；
Wherein, alternatively, the idiosome of optical fiber lens is etched using femtosecond laser by surface layer-by-layer scanning.
3. a kind of femtosecond laser processing method of optical fiber lens according to claim 1, which is characterized in that optical fiber uses stone
English glass optical fiber.
4. a kind of femtosecond laser processing method of optical fiber lens according to claim 1, which is characterized in that utilize what is focused
Femtosecond laser when being scanned on optical fiber according to lens contour to be prepared,
It is scanned using femtosecond laser is focused in inside of optical fibre, is formed and be made of the change of femtosecond laser induced material structure or cavity
Lens contour；
Alternatively, the surface layer-by-layer scanning that femtosecond laser focuses on optical fiber is etched optical fiber lens idiosome.
5. a kind of femtosecond laser processing method of optical fiber lens according to claim 1, which is characterized in that hydrofluoric acid quality
Concentration is 3%~10%, whole etching time >=5min used.
6. a kind of femtosecond laser processing method of optical fiber lens according to any one of claim 1 to 5, feature exist
In, specifically includes the following steps:
1) fiber end face is cut smooth, and optical fiber is fixed on five Wei electricity Dong Weiyitai；
2) femtosecond laser is focused into inside of optical fibre or surface using condenser lens, by scanning galvanometer control laser scanning or
Person forms the lens contour being made of laser modified region by five dimension electricity driving displacement platform moving fibers on fiber end face；
3) by step 2), treated that optical fiber end is put into hydrofluoric acid solution carries out ultrasonic erosion, and erosion removal femtosecond laser is modified
Area forms the idiosome of optical fiber lens；
4) continue to corrode in a solution of hydrofluoric acid, further smooth formation optical fiber is saturating for the idiosome lens surface for obtaining step 3)
Mirror.
7. a kind of femtosecond laser processing method of optical fiber lens according to claim 6, which is characterized in that in step 2),
Scanning galvanometer or five Wei electricity Dong Weiyitai, for controlling focusing and scan position of the femtosecond laser on optical fiber, to pass through
Fixed point or scanning machining form the profile of optical fiber lens；
In step 2), the structure that the femtosecond laser induces in optical fiber is the change of fiber optic materials density or micro-cavity structure.
8. a kind of femtosecond laser processing method of optical fiber lens according to claim 6, which is characterized in that in step 3),
For the femtosecond laser when inside of optical fibre scans, optical fiber splits into two by line of demarcation of scanning profile part after hydrofluoric acid corrosion
Point, a portion is optical fiber lens idiosome；Femtosecond laser directly forms optical fiber lens idiosome when optical fiber surface is scanned and etched.
9. a kind of femtosecond laser processing method of optical fiber lens according to claim 6, which is characterized in that described to focus thoroughly
Mirror is 5 times, 10 times, 20 times 50 times and one of 100 zoom and focus lens and F-Theta scanning lens；
The repetition rate of femtosecond laser be 1kHz, power 0.5mW~10mW of femtosecond laser, laser scan rate be≤100 μm/
s。
10. a kind of femtosecond laser processing method of optical fiber lens according to claim 6, which is characterized in that processing obtains
Optical fiber lens be convex lens or concavees lens.
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