CN104808268A - Multifocal lens and processing device and method thereof - Google Patents
Multifocal lens and processing device and method thereof Download PDFInfo
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- CN104808268A CN104808268A CN201410044664.8A CN201410044664A CN104808268A CN 104808268 A CN104808268 A CN 104808268A CN 201410044664 A CN201410044664 A CN 201410044664A CN 104808268 A CN104808268 A CN 104808268A
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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Abstract
The invention provides a multifocal lens and a processing device and method thereof. The processing device comprises a femto second laser generator 210, a parameter modulation optical path 220, an optical CCD 230, a semitransparent and semi-reflecting lens 240, an optical focusing lens 250, a hard substrate 260 and a 3D translation platform 270, wherein the femto second laser generator 210 generates femto second laser pulses 280, the femto second laser generator 210, the parameter modulation optical path 220 and the semitransparent and semi-reflecting lens 240 are placed in the same optical path successively, the optical CCD 230, the semitransparent and semi-reflecting lens 240, the optical focusing lens 250 and the hard substrate 260 are placed in the same optical path successively, and the hard substrate 260 is arranged on the 3D translation platform 270. According to the multifocal lens and the processing device and method thereof, technology is simple, and curved surfaces are controllable.
Description
Technical field
The present invention relates to micro-detection and Precision Machining field, particularly multi-focus lens and process equipment, job operation.
Background technology
Compared with traditional two dimensional image, 3-D view can reflect the more information of object to be detected: comprise three-D space structure distribution, three dimensions is organized into and grades.Particularly three-dimensional real-time micro-detection technique, the dynamic perfromance reflecting object to be detected that can be real-time; Particularly there is very important effect for fields such as living body biological cell detection, micro-fluidic chip detections.But existing micro-detection technique mainly based on the micro-detection technique of plane, comprises fluorescent microscope, ordinary optical microscope, optic Fiber Detecting Technology etc.But these micro-detection techniques can only detect target object and observe on two dimensional surface yardstick, or can only detect in the mode of adding up luminous flux.
Laser co-focusing 3 Dimension Image Technique, can to translucent object under quiescent conditions or slower metamorphosis time carry out three-dimensional imaging detection.The ultimate principle of its three-dimensional reconstruction is: the information that the motion scan making the pointwise by-line of X or Y-axis on microlens optical focal plane obtains, and obtains the two dimensional image of this XY plane; Then, can obtain a series of XY plane along Z axis scanning, these plane pictures " accumulation " can get up by the image procossing special software by means of computing machine, becomes three-dimensional 3-D view.But the three-dimensional imaging due to Laser Scanning Confocal Microscope is the principle based on dot matrix two dimensional image three-dimensional overlay, life period interval delta T between the acquisition carrying out each picture point in the plane
1, the acquisition also free poor Δ T of each plane picture
2.Therefore, the method is mainly applicable to the detection of static tissue, for time dependent form, cannot provide and describe accurately in real time, and common Laser Scanning Confocal Microscope, for the detected target of reaction and change at a high speed, exists the limitation that certain three-dimensional imaging detects.
In addition, for the Primary Component in micro imaging system---lens, existing main machining method is rubbing down technique: the method is mainly used in processing spherical lens; And be difficult to processing and there are multifocal complex-curved lens.In addition, there are multifocal complex-curved lens have than spherical lens and apply widely and act on: such as the eyeglass, high precision micro-imaging etc. of myopia correction.But, there are multifocal complex-curved lens and there is very large difficulty of processing always.To multifocal complex-curved lens, the following job operation of existing proposition: former lensed periphery or center again weld there is different curvature or optical characteristics material, use adhesives two pieces or the splicing of polylith lens to be bonded together, to use the glass material with different yield points temperature to carry out according to the order of sequence repeatedly pressure sintering to prepare complex-curved multi-focus lens.But there is the features such as optical alignment difficulty, rubbing down complex process, optical characteristics in these job operations.
Summary of the invention
In order to overcome the defect of above-mentioned prior art, the object of the invention is to propose a kind of multi-focus lens and process equipment, job operation, technique is simple, curved surface is controlled.
Technical solution of the present invention is:
The first multi-focus lens, its special character is: comprise center lens and the first outer shroud lens; The front end face of described center lens is curved surface, and end face is plane thereafter; The rear end face of described first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; Described first plane overlaps with the rear end face of center lens; The focal length of the focal distance ratio first ring curved surface of described center lens front end face is short.
The second multi-focus lens, its special character is: comprise center lens, the first outer shroud lens and the second outer shroud lens; The front end face of described center lens is curved surface, and end face is plane thereafter; The rear end face of described first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; Described first plane overlaps with the rear end face of center lens; The rear end face of described second outer shroud lens is plane, and its front end face comprises second plane at the center of being arranged on and is arranged on the second out-of-plane second ring curved surface; Described second plane overlaps with the rear end face of the first outer shroud lens; The focal length of the focal distance ratio first ring curved surface of described center lens front end face is short; The focal length of the focal distance ratio second ring curved surface of described first ring curved surface is short.
The third multi-focus lens, its special character is: comprise center lens, the first outer shroud lens, the second outer shroud lens and the 3rd outer shroud lens; The front end face of described center lens is curved surface, and end face is plane thereafter; The rear end face of described first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; Described first plane overlaps with the rear end face of center lens; The rear end face of described second outer shroud lens is plane, and its front end face comprises second plane at the center of being arranged on and is arranged on the second out-of-plane second ring curved surface; Described second plane overlaps with the rear end face of the first outer shroud lens; The rear end face of described 3rd outer shroud lens is plane, and its front end face comprises the 3rd plane at the center of being arranged on and is arranged on the 3rd out-of-plane 3rd ring curved surface; Described 3rd plane overlaps with the rear end face of the second outer shroud lens; The focal length of the focal distance ratio first ring curved surface of described center lens front end face is short; The focal length of the focal distance ratio second ring curved surface of described first ring curved surface is short; The focal length of focal distance ratio the 3rd ring curved surface of described second ring curved surface is short.
Prepare the process equipment of above-mentioned multi-focus lens, comprise the femtosecond laser generator 210, Parameter Modulation light path 220, optical CCD 230, semi-transparent semi-reflecting lens or the arrowband that produce femto-second laser pulse 280 high anti-sheet 240, optical focus camera lens 250, hard substrate 260 and D translation platform 270; The high anti-sheet 240 in described Parameter Modulation light path 220, semi-transparent semi-reflecting lens or arrowband is positioned on the emitting light path of femto-second laser pulse 280 successively; Described optical CCD 230 is positioned on the transmitted light path of the high anti-sheet 240 of semi-transparent semi-reflecting lens or arrowband; Described optical focus camera lens 250, hard substrate 260 are positioned on the reflected light path of the high anti-sheet 240 of semi-transparent semi-reflecting lens or arrowband; Described hard substrate 260 is arranged on D translation platform 270.
The material of above-mentioned hard substrate 260 can be fused quartz or K9 glass or silicon chip.
Above-mentioned optical focus camera lens 250 is micro objective, enlargement factor between 10-100, between numerical aperture NA value 0.5-0.95.
Prepare the job operation of above-mentioned multi-focus lens, comprise the following steps:
1) hard substrate material is cleaned;
2) femtosecond laser modification:
Femto-second laser pulse, after Parameter Modulation, focuses on hard substrate 260 surface;
Femto-second laser pulse carries out the surface modification in different depth, zones of different distribution to hard substrate 260;
Observe by optical CCD 230 pairs of femtosecond laser modifying process and detect;
3) hydrofluoric acid solution corrosion:
By step 2) the modified quartz glass hydrofluoric acid solution that is placed in ultrasonic environment carries out selective corrosion, forms the multifocal concave lens structure on hard substrate 260;
4) multi-focus lens copies:
With the multifocal concave lens structure on hard substrate 260 for mother matrix, by heat pressing process, turn over mould and copy multifocal convex lens.
Above-mentioned steps 2) in femtosecond laser 280 center pulsewidth be 30-150fs, wavelength is 325-1200nm, single pulse energy is 1-100 μ J, repetition frequency 10Hz-100KHz;
Above-mentioned steps 3) in hydrofluoric acid solution be the hydrofluorite lean solution of concentration 5%-10%, corrosion temperature is between 20-50 DEG C;
The material of above-mentioned hard substrate 260 is fused quartz or K9 glass or silicon chip.
Above-mentioned steps 2) and step 3) specific as follows:
Hard substrate 260 is fixed on D translation platform 270;
Carry out first time femtosecond laser fixed point multiple-pulse modification or scanning modification, carry out the concavees lens structure that step 3) obtains simple surface afterwards;
Repeat femtosecond laser fixed point multiple-pulse modification or scan modification and step 3), the concavees lens structure obtained last time repeats the concavees lens structure of processing compound, finally obtaining multifocal concavees lens structure.
Advantage of the present invention:
A kind of micro-imaging multi-focus lens and process equipment thereof and job operation are proposed in the present invention.Multi-focus lens has 2,3 or 4 focuses, for time dependent form, can provide and describe accurately in real time, and namely multi-focus lens is for the detected target of reaction and change at a high speed, can realize three-dimensional imaging and detect.Process equipment of the present invention is simple, and job operation has the advantages that job operation is flexible, working (machining) efficiency is high, can carry out accuracy controlling to the surface of multi-focus lens is complex-curved.
Accompanying drawing explanation
Fig. 1 is femtosecond laser modification process equipment schematic diagram.
The three focus convex lens that Fig. 2 is three femtosecond laser modifications, prepared by hydrofluorite corrosion and process program schematic diagram thereof.
The process program schematic diagram of the bifocal that Fig. 3 is twice femtosecond laser modification, prepared by hydrofluorite corrosion.
Embodiment
The object of the invention is to propose a kind of multi-focus lens and process equipment thereof and femtosecond laser processing method.
Multi-focus lens can have bifocal, three focuses and four focuses, also can more multifocal.But in micro-imaging, focus is many again, comparatively complicated or nonsensical in practical application.
Bifocal lens comprise center lens and the first outer shroud lens; The front end face of center lens is curved surface, and end face is plane thereafter; The rear end face of the first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; First plane overlaps with the rear end face of center lens (i.e. center lens and the first outer shroud lens integral structure); The focal length of the focal distance ratio first ring curved surface of center lens front end face is short.
Trifocal, comprises center lens, the first outer shroud lens and the second outer shroud lens; The front end face of center lens is curved surface, and end face is plane thereafter; The rear end face of the first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; First plane overlaps with the rear end face of center lens; The rear end face of the second outer shroud lens is plane, and its front end face comprises second plane at the center of being arranged on and is arranged on the second out-of-plane second ring curved surface; Second plane overlaps with the rear end face of the first outer shroud lens; The focal length of the focal distance ratio first ring curved surface of center lens front end face is short; The focal length of the focal distance ratio second ring curved surface of first ring curved surface is short.Center lens, the first outer shroud lens and the second outer shroud lens integral structure.
Trifocal, comprises center lens, the first outer shroud lens, the second outer shroud lens and the 3rd outer shroud lens; The front end face of center lens is curved surface, and end face is plane thereafter; The rear end face of the first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; First plane overlaps with the rear end face of center lens; The rear end face of the second outer shroud lens is plane, and its front end face comprises second plane at the center of being arranged on and is arranged on the second out-of-plane second ring curved surface; Second plane overlaps with the rear end face of the first outer shroud lens; The rear end face of the 3rd outer shroud lens is plane, and its front end face comprises the 3rd plane at the center of being arranged on and is arranged on the 3rd out-of-plane 3rd ring curved surface; 3rd plane overlaps with the rear end face of the second outer shroud lens; The focal length of the focal distance ratio first ring curved surface of center lens front end face is short; The focal length of the focal distance ratio second ring curved surface of first ring curved surface is short; The focal length of focal distance ratio the 3rd ring curved surface of the second ring curved surface is short.Center lens, the first outer shroud lens, the second outer shroud lens and the 3rd outer shroud lens integral structure.
Embodiment one:
See figures.1.and.2, prepare trifocal by a femtosecond laser modification, hydrofluorite corrosion process.Comprise following key step:
The cleaning of step one, hard substrate material: use acetone, ethanol, deionized water Ultrasonic Cleaning 5min respectively successively, hard substrate material 260 is effectively cleaned; Hard substrate 260 material, comprises the one in fused quartz, K9 glass, silicon chip;
Step 2, femtosecond laser modification: with reference to Fig. 1, the femto-second laser pulse 280 that femtosecond laser generator 210 produces, the high anti-sheet 240 through Parameter Modulation light path 220, semi-transparent semi-reflecting lens or arrowband, then focuses on hard substrate 260 surface by optical focus camera lens 250; Hard substrate 260 is fixed on PLC technology D translation platform 270.With reference to Fig. 2, three pieces of regions are resolved in the trifocal concave structure femtosecond laser zone of influence, femtosecond laser modification and hydrofluoric acid solution corrosion are carried out in circulation, and final formation has the femtosecond laser zone of influence of trifocal concave structure; The parameter that femtosecond laser modifying process wherein regulates comprises: the pulse number of optical focus camera lens 250 parameter, laser energy, single-point modification, the path of scanning modification.Femtosecond laser 280 is a kind of ultra-short pulse laser, and center pulsewidth is 30-150fs, wavelength is 325-1200nm, single pulse energy is 1-100 μ J, repetition frequency 10Hz-100KHz; Optical focus camera lens 250 is micro objective, enlargement factor between 10-100, between numerical aperture NA value 0.5-0.95;
Step 3, hydrofluoric acid solution corrode: the hydrofluoric acid solution that the quartz glass after scanning is placed in ultrasonic environment is carried out selective corrosion, the multifocal concave lens structure 261,261 ' formed on hard substrate 260 is the vertical view of three focus concave lens 261; Hydrofluoric acid solution is the hydrofluorite lean solution of concentration 5%-10%, and corrosion temperature requires to control between 20-50 DEG C according to the pattern of lens;
Step 4, multi-focus lens copy: with three focus concave lens structures 262 for mother matrix, by heat pressing process, comparatively low-heat yield temperature material turn over mould and copy the vertical view that three focus convex lens 291,291 ' are three focus convex lens 291 having.
Embodiment two:
With reference to Fig. 3 and Fig. 1, prepare bifocal by repeatedly femtosecond laser modification, hydrofluorite corrosion process.Comprise following key step:
The cleaning of step one, hard substrate material: use acetone, ethanol, deionized water Ultrasonic Cleaning 5min respectively successively, hard substrate material 260 is effectively cleaned; Hard substrate 260 material, comprises the one in fused quartz, K9 glass, silicon chip;
Step 2, femtosecond laser first time modification: with reference to Fig. 1, the femto-second laser pulse 280 that femtosecond laser generator 210 produces, the high anti-sheet 240 through Parameter Modulation light path 220, semi-transparent semi-reflecting lens or arrowband, then focuses on hard substrate 260 surface by optical focus camera lens 250; Hard substrate 260 is fixed on PLC technology D translation platform 270; The first block of material modified zone is formed, as a part of curved surface of bifocus concave lens by femtosecond laser modification; Femtosecond laser 280 in described step 2 is a kind of ultra-short pulse laser, and center pulsewidth is 30-150fs, wavelength is 325-1200nm, single pulse energy is 1-100 μ J, repetition frequency 10Hz-100KHz.Optical focus camera lens 250 is micro objective, enlargement factor between 10-100, between numerical aperture NA value 0.5-0.95;
Step 3, hydrofluoric acid solution first time corrosion: utilize hydrofluorite to the high rate of corrosion characteristic of quartz material femtosecond laser modified zone, the hydrofluoric acid solution that first time modified quartz glass is placed in ultrasonic environment is carried out selective corrosion, form the vertical view that the single focus concave lens structure 262,262 ' on hard substrate 260 is single focus concave lens 262; Hydrofluoric acid solution is the hydrofluorite lean solution of concentration 5%-10%, and corrosion temperature requires to control between 20-50 DEG C according to the pattern of lens;
Step 4, second laser alignment twice-modified: on established single focus concave lens structure 262 basis, again carry out femtosecond laser modification, form the second block of material modified zone, as the Part II curved surface of bifocus concave lens;
Step 5, hydrofluoric acid solution second time corrosion: the hydrofluoric acid solution that the modified quartz glass of second time is placed in ultrasonic environment is carried out selective corrosion, form the vertical view that the bifocus concave lens structure 263,263 ' on hard substrate 260 is bifocus concave lens 263;
Step 6, multi-focus lens copy: with the bifocus concave lens structure 263 on hard substrate 260 for mother matrix, pass through heat pressing process, comparatively low-heat yield temperature material turns over mould and copy the vertical view that bifocus convex lens 290,290 ' is bifocus convex lens 290 having.
Claims (9)
1. a multi-focus lens, is characterized in that:
Comprise center lens and the first outer shroud lens;
The front end face of described center lens is curved surface, and end face is plane thereafter;
The rear end face of described first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; Described first plane overlaps with the rear end face of center lens;
The focal length of the focal distance ratio first ring curved surface of described center lens front end face is short.
2. a multi-focus lens, is characterized in that:
Comprise center lens, the first outer shroud lens and the second outer shroud lens;
The front end face of described center lens is curved surface, and end face is plane thereafter;
The rear end face of described first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; Described first plane overlaps with the rear end face of center lens;
The rear end face of described second outer shroud lens is plane, and its front end face comprises second plane at the center of being arranged on and is arranged on the second out-of-plane second ring curved surface; Described second plane overlaps with the rear end face of the first outer shroud lens;
The focal length of the focal distance ratio first ring curved surface of described center lens front end face is short; The focal length of the focal distance ratio second ring curved surface of described first ring curved surface is short.
3. a multi-focus lens, is characterized in that:
Comprise center lens, the first outer shroud lens, the second outer shroud lens and the 3rd outer shroud lens;
The front end face of described center lens is curved surface, and end face is plane thereafter;
The rear end face of described first outer shroud lens is plane, and its front end face comprises first plane at the center of being arranged on and is arranged on the first out-of-plane first ring curved surface; Described first plane overlaps with the rear end face of center lens;
The rear end face of described second outer shroud lens is plane, and its front end face comprises second plane at the center of being arranged on and is arranged on the second out-of-plane second ring curved surface; Described second plane overlaps with the rear end face of the first outer shroud lens;
The rear end face of described 3rd outer shroud lens is plane, and its front end face comprises the 3rd plane at the center of being arranged on and is arranged on the 3rd out-of-plane 3rd ring curved surface; Described 3rd plane overlaps with the rear end face of the second outer shroud lens;
The focal length of the focal distance ratio first ring curved surface of described center lens front end face is short; The focal length of the focal distance ratio second ring curved surface of described first ring curved surface is short; The focal length of focal distance ratio the 3rd ring curved surface of described second ring curved surface is short.
4. prepare the process equipment of multi-focus lens described in claims 1 to 3, it is characterized in that:
Comprise the high anti-sheet (240) in the femtosecond laser generator (210), Parameter Modulation light path (220), optical CCD (230), semi-transparent semi-reflecting lens or the arrowband that produce femto-second laser pulse (280), optical focus camera lens (250), hard substrate (260) and D translation platform (270);
The high anti-sheet (240) in described Parameter Modulation light path (220), semi-transparent semi-reflecting lens or arrowband is positioned on the emitting light path of femto-second laser pulse (280) successively;
Described optical CCD (230) is positioned on the transmitted light path of the high anti-sheet (240) of semi-transparent semi-reflecting lens or arrowband;
Described optical focus camera lens (250), hard substrate (260) are positioned on the reflected light path of the high anti-sheet (240) of semi-transparent semi-reflecting lens or arrowband;
Described hard substrate (260) is arranged on D translation platform (270).
5. the process equipment of multi-focus lens according to claim 4, is characterized in that: the material of described hard substrate (260) is fused quartz or K9 glass or silicon chip.
6. the process equipment of the multi-focus lens according to claim 4 or 5, is characterized in that: described optical focus camera lens (250) is micro objective, enlargement factor between 10-100, between numerical aperture NA value 0.5-0.95.
7. the job operation of multi-focus lens described in claims 1 to 3, is characterized in that: comprise the following steps:
1) hard substrate material is cleaned;
2) femtosecond laser modification:
Femto-second laser pulse, after Parameter Modulation, focuses on hard substrate (260) surface;
Femto-second laser pulse carries out the surface modification in different depth, zones of different distribution to hard substrate (260);
By optical CCD (230), femtosecond laser modifying process is observed and detected;
3) hydrofluoric acid solution corrosion:
By step 2) the modified quartz glass hydrofluoric acid solution that is placed in ultrasonic environment carries out selective corrosion, forms the multifocal concave lens structure on hard substrate (260);
4) multi-focus lens copies:
With the multifocal concave lens structure on hard substrate (260) for mother matrix, by heat pressing process, turn over mould and copy multifocal convex lens.
8. the job operation of multi-focus lens according to claim 7, is characterized in that:
Described step 2) in femtosecond laser (280) center pulsewidth be 30-150fs, wavelength is 325-1200nm, single pulse energy is 1-100 μ J, repetition frequency 10Hz-100KHz;
Hydrofluoric acid solution in described step 3) is the hydrofluorite lean solution of concentration 5%-10%, and corrosion temperature is between 20-50 DEG C;
The material of described hard substrate (260) is fused quartz or K9 glass or silicon chip.
9. the job operation of the multi-focus lens according to claim 7 or 8, is characterized in that:
Described step 2) and step 3) specific as follows:
Hard substrate (260) is fixed on D translation platform (270);
Carry out first time femtosecond laser fixed point multiple-pulse modification or scanning modification, carry out the concavees lens structure that step 3) obtains simple surface afterwards;
Repeat femtosecond laser fixed point multiple-pulse modification or scan modification and step 3), the concavees lens structure obtained last time repeats the concavees lens structure of processing compound, finally obtaining multifocal concavees lens structure.
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| CN106125166A (en) * | 2016-07-22 | 2016-11-16 | 中国工程物理研究院激光聚变研究中心 | The method that controlled material micro structure prepares fused quartz microlens array in situ |
| US10302822B1 (en) | 2017-12-27 | 2019-05-28 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Display and display panel thereof |
| WO2019127709A1 (en) * | 2017-12-27 | 2019-07-04 | 武汉华星光电技术有限公司 | Display and display panel thereof |
| CN110405354A (en) * | 2019-07-24 | 2019-11-05 | 西安交通大学 | A kind of femtosecond laser processing method of optical fiber lens |
| CN111822886A (en) * | 2020-06-11 | 2020-10-27 | 华东师范大学重庆研究院 | Multi-focus ultrafast laser preparation device and method for micro-fluidic chip micro-channel |
| CN115097651A (en) * | 2022-07-15 | 2022-09-23 | 西安交通大学 | Myopia-preventing glasses lens with symmetrical compound eye structure and preparation method thereof |
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Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106125166A (en) * | 2016-07-22 | 2016-11-16 | 中国工程物理研究院激光聚变研究中心 | The method that controlled material micro structure prepares fused quartz microlens array in situ |
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| US10302822B1 (en) | 2017-12-27 | 2019-05-28 | Wuhan China Star Optoelectronics Technology Co., Ltd. | Display and display panel thereof |
| WO2019127709A1 (en) * | 2017-12-27 | 2019-07-04 | 武汉华星光电技术有限公司 | Display and display panel thereof |
| CN110405354A (en) * | 2019-07-24 | 2019-11-05 | 西安交通大学 | A kind of femtosecond laser processing method of optical fiber lens |
| CN111822886A (en) * | 2020-06-11 | 2020-10-27 | 华东师范大学重庆研究院 | Multi-focus ultrafast laser preparation device and method for micro-fluidic chip micro-channel |
| CN111822886B (en) * | 2020-06-11 | 2022-11-22 | 华东师范大学重庆研究院 | Multi-focus ultrafast laser preparation device and method for micro-fluidic chip micro-channel |
| CN115097651A (en) * | 2022-07-15 | 2022-09-23 | 西安交通大学 | Myopia-preventing glasses lens with symmetrical compound eye structure and preparation method thereof |
| CN116430565A (en) * | 2023-04-25 | 2023-07-14 | 西安工业大学 | Microscopic imaging device and imaging method |
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