CN104808268B - Multi-focus lenss and its process equipment, processing method - Google Patents
Multi-focus lenss and its process equipment, processing method Download PDFInfo
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- CN104808268B CN104808268B CN201410044664.8A CN201410044664A CN104808268B CN 104808268 B CN104808268 B CN 104808268B CN 201410044664 A CN201410044664 A CN 201410044664A CN 104808268 B CN104808268 B CN 104808268B
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- G—PHYSICS
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Abstract
The present invention proposes a kind of multi-focus lenss and process equipment and method, including femtosecond laser generator 210, Parameter Modulation light path 220, optical CCD 230, semi-transparent semi-reflecting lens 240, optical focus camera lens 250, hard substrate 260 and the D translation platform 270 for producing femto-second laser pulse 280；The high anti-piece of femtosecond laser generator 210, Parameter Modulation light path 220, arrowband 240 is sequentially located at same light path；Optical CCD 230, semi-transparent semi-reflecting lens 240, optical focus camera lens 250, hard substrate 260 are located at same light path, and hard substrate 260 is arranged on D translation platform 270.The process equipment and its processing method of multi-focus lenss of the present invention, process is simple, curved surface are controllable.
Description
Technical field
The present invention relates to micro measurement and Precision Machining field, more particularly to multi-focus lenss and its process equipment, processing
Method.
Background technology
Compared with traditional two dimensional image, 3-D view can reflect the more information of object to be detected：Including three-dimensional space
Between structure distribution, three dimensions be organized into and grade.Particularly three-dimensional micro measurement technology in real time, can be reflected tested in real time
Survey the dynamic characteristic of object；Have particularly significant especially for fields such as living body biological cell detection, micro-fluidic chip detections
Effect.It is however, existing micro measurement technology is mainly based upon plane micro measurement technology including fluorescence microscope, common
Optical microscope, optic Fiber Detecting Technology etc..But these micro measurement technologies can only be on two dimensional surface yardstick to target object
Detected and observed, or can only be detected in the way of counting luminous flux.
Laser co-focusing 3 Dimension Image Technique, can be to translucent object under quiescent conditions or during slower metamorphosis
Carry out three-dimensional imaging detection.The ultimate principle of its three-dimensional reconstruction is：Make on microlens optical focal plane X or Y-axis by
The information obtained by the motion scan of point by-line, obtains the two dimensional image of the X/Y plane；It is then possible to obtain along Z axis scanning
These plane pictures " can be piled up " by means of the image procossing special-purpose software of computer, be become by a series of X/Y planes
Three-dimensional 3-D view.However, as the three-dimensional imaging of Laser Scanning Confocal Microscope is the original based on dot matrix two dimensional image three-dimensional overlay
Reason, carries out existence time interval delta T between the acquisition of each picture point in the plane1, the acquisition of each plane picture is also sometimes
Between difference Δ T2.Therefore, the method is primarily adapted for use in the detection of static tissue, for time dependent form, it is impossible to provide reality
When accurately describe, common Laser Scanning Confocal Microscope for high speed react and change detected target, exist certain three-dimensional into
As the limitation of detection.
In addition, for the Primary Component in micro imaging system --- lens, existing main machining method are rubbing down work
Skill：The method is mainly used in processing spherical lenss；And it is difficult to multifocal complex-curved lens.In addition, having
Multifocal complex-curved lens have widely application than spherical lenss and act on：For example it is used for the eyeglass of myopia correction
Piece, high accuracy micro-imaging etc..But, there is very big difficulty of processing always with multifocal complex-curved lens.To many
The complex-curved lens of focus, the following processing method of existing proposition：Welded in former lensed periphery or center again
Material with different curvature or optical characteristics, using adhesivess by two or more pieces of lens splicing be bonded together,
Sequentially multiple pressure sintering is carried out using the glass material with different yield points temperature and prepares complex-curved multi-focus lenss.But
The features such as there are optical alignment difficulty, rubbing down complex process, optical characteristics in these processing methods.
The content of the invention
In order to overcome the defect of above-mentioned prior art, it is an object of the invention to propose a kind of multi-focus lenss and its processing
Equipment, processing method, process is simple, curved surface are controllable.
The present invention technical solution be：
The first multi-focus lens, which is characterized in that：Including center lens and the first outer shroud lens；The center lens
Front end face be curved surface, thereafter end face be plane；The rear end face of the first outer shroud lens be plane, its front end face include arrange
Center the first plane and be arranged on the first out-of-plane first ring curved surface；The rear end of first plane and center lens
Face overlaps；The focal length of focal distance ratio the first ring curved surface of the center lens front end face is short.
Second multi-focus lens, which is characterized in that：It is saturating including center lens, the first outer shroud lens and the second outer shroud
Mirror；The front end face of the center lens is curved surface, and end face is plane thereafter；The rear end face of the first outer shroud lens is plane,
Its front end face includes the first centrally disposed plane and is arranged on the first out-of-plane first ring curved surface；First plane
Overlap with the rear end face of center lens；The rear end face of the second outer shroud lens is plane, and its front end face includes centrally disposed
The second plane and be arranged on the second out-of-plane second ring curved surface；The rear end face of second plane and the first outer shroud lens
Overlap；The focal length of focal distance ratio the first ring curved surface of the center lens front end face is short；The focal distance ratio second of the first ring curved surface
The focal length of ring curved surface is short.
The third multi-focus lens, which is characterized in that：Including center lens, the first outer shroud lens, the second outer shroud lens
With the 3rd outer shroud lens；The front end face of the center lens is curved surface, and end face is plane thereafter；After the first outer shroud lens
End face is plane, and its front end face includes the first centrally disposed plane and is arranged on the first out-of-plane first ring curved surface；
First plane is overlapped with the rear end face of center lens；The rear end face of the second outer shroud lens be plane, its front end bread
Include the second centrally disposed plane and be arranged on the second out-of-plane second ring curved surface；Second plane and the first outer shroud
The rear end face of lens overlaps；The rear end face of the 3rd outer shroud lens is plane, and its front end face includes centrally disposed the 3rd
Plane and it is arranged on the 3rd out-of-plane 3rd ring curved surface；3rd plane is overlapped with the rear end face of the second outer shroud lens；
The focal length of focal distance ratio the first ring curved surface of the center lens front end face is short；Focal distance ratio the second ring curved surface of the first ring curved surface
Focal length it is short；The focal length of the 3rd ring curved surface of focal distance ratio of the second ring curved surface is short.
Prepare the process equipment of above-mentioned multi-focus lenss, including the femtosecond laser generator for producing femto-second laser pulse 280
210th, the high anti-piece 240 in Parameter Modulation light path 220, optical CCD 230, semi-transparent semi-reflecting lens or arrowband, optical focus camera lens 250, hard
Substrate 260 and D translation platform 270；The position successively of the high anti-piece in the Parameter Modulation light path 220, semi-transparent semi-reflecting lens or arrowband 240
On the emitting light path of femto-second laser pulse 280；The optical CCD 230 is located at the saturating of the high anti-piece in semi-transparent semi-reflecting lens or arrowband 240
Penetrate in light path；The optical focus camera lens 250, hard substrate 260 are located at the reflected light of the high anti-piece in semi-transparent semi-reflecting lens or arrowband 240
Lu Shang；The hard substrate 260 is arranged on D translation platform 270.
The material of above-mentioned hard substrate 260 can be vitreous silica or K9 glass or silicon chip.
Above-mentioned optical focus camera lens 250 be microscope objective, amplification between 10-100, numerical aperture NA value 0.5-
Between 0.95.
The processing method for preparing above-mentioned multi-focus lenss, comprises the following steps：
1）Cleaning hard substrate material；
2）Femtosecond laser is modified：
Femto-second laser pulse focuses on 260 surface of hard substrate after Parameter Modulation；
Femto-second laser pulse hard substrate 260 is carried out different depth, zones of different distribution on surface be modified；
Femtosecond laser modifying process is observed and detected by optical CCD 230；
3）Hydrofluoric acid solution corrodes：
By step 2）Modified quartz glass is placed in the hydrofluoric acid solution of ultrasonic environment carries out selective corrosion, shape
Into the multifocal concave lens structure on hard substrate 260；
4）Multi-focus lenss are replicated：
With the multifocal concave lens structure on hard substrate 260 as mother matrix, by heat pressing process, overmolded replicates multifocal
Convex lens.
Above-mentioned steps 2）In 280 center pulsewidth of femtosecond laser be 30-150fs, wavelength be 325-1200nm, single pulse energy
Measure as 1-100 μ J, repetition rate 10Hz-100KHz；
Above-mentioned steps 3）In hydrofluoric acid solution for concentration 5%-10% Fluohydric acid. weak solution, corrosion temperature is at 20-50 DEG C
Between；
The material of above-mentioned hard substrate 260 is vitreous silica or K9 glass or silicon chip.
Above-mentioned steps 2）With step 3）It is specific as follows：
Hard substrate 260 is fixed on D translation platform 270；
Carry out first time femtosecond laser fixed point multiple-pulse modified or scan modified, carry out step 3 afterwards）Obtain simple bent
The concavees lens structure in face；
Repeat femtosecond laser fixed point multiple-pulse to be modified or scan modified and step 3）, in the concavees lens that last time obtains
Compound concavees lens structure is processed in structure repeatedly, it is final to obtain multifocal concavees lens structure.
Advantages of the present invention：
A kind of micro-imaging multi-focus lenss and its process equipment and processing method are proposed in the present invention.Multi-focus lenss
There are 2,3 or 4 focuses, for time dependent form, can be given and accurately describe in real time, i.e., multi-focus lenss are for height
Speed reaction and the detected target for changing, it is possible to achieve three-dimensional imaging is detected.Process equipment of the present invention is simple, and processing method has
Processing method is flexible, it is high in machining efficiency the characteristics of, complex-curved to the surface of multi-focus lenss can carry out accuracy controlling.
Description of the drawings
Fig. 1 is the modified process equipment schematic diagram of femtosecond laser.
Fig. 2 is that three femtosecond lasers are modified, three focus convex lens prepared by Fluohydric acid. corrosion and its process program are illustrated
Figure.
Fig. 3 is the process program schematic diagram that femtosecond laser is modified twice, Fluohydric acid. corrodes the bifocal lenses for preparing.
Specific embodiment
It is an object of the invention to propose a kind of multi-focus lenss and its process equipment and femtosecond laser processing method.
Multi-focus lenss can have bifocal, three focuses and four focuses, it is also possible to more multifocal.But in micro-imaging side
Face, focus are more again, complex or nonsensical in practical application.
Bifocal lens include center lens and the first outer shroud lens；The front end face of center lens is curved surface, thereafter end face
For plane；The rear end face of the first outer shroud lens is plane, and its front end face includes the first centrally disposed plane and be arranged on
First out-of-plane first ring curved surface；First plane is overlapped with the rear end face of center lens（I.e. center lens and the first outer shroud are saturating
Mirror integral structure）；The focal length of focal distance ratio the first ring curved surface of center lens front end face is short.
Trifocal, including center lens, the first outer shroud lens and the second outer shroud lens；The front end face of center lens is
Curved surface, end face is plane thereafter；The rear end face of the first outer shroud lens is plane, and its front end face includes that centrally disposed first is flat
Face and it is arranged on the first out-of-plane first ring curved surface；First plane is overlapped with the rear end face of center lens；Second outer shroud is saturating
The rear end face of mirror is plane, and its front end face includes the second centrally disposed plane and be arranged on the second out-of-plane second ring
Curved surface；Second plane is overlapped with the rear end face of the first outer shroud lens；Jiao of focal distance ratio the first ring curved surface of center lens front end face
Away from short；The focal length of focal distance ratio the second ring curved surface of the first ring curved surface is short.Center lens, the first outer shroud lens and the second outer shroud lens
Integral structure.
Trifocal, including center lens, the first outer shroud lens, the second outer shroud lens and the 3rd outer shroud lens；Center
The front end face of lens is curved surface, and end face is plane thereafter；The rear end face of the first outer shroud lens be plane, its front end face include arrange
Center the first plane and be arranged on the first out-of-plane first ring curved surface；The rear end face weight of the first plane and center lens
Close；The rear end face of the second outer shroud lens is plane, and its front end face includes the second centrally disposed plane and be arranged on second
Out-of-plane second ring curved surface；Second plane is overlapped with the rear end face of the first outer shroud lens；The rear end face of the 3rd outer shroud lens is
Plane, its front end face include the 3rd centrally disposed plane and are arranged on the 3rd out-of-plane 3rd ring curved surface；3rd is flat
Face is overlapped with the rear end face of the second outer shroud lens；The focal length of focal distance ratio the first ring curved surface of center lens front end face is short；First ring
The focal length of focal distance ratio the second ring curved surface of curved surface is short；The focal length of the 3rd ring curved surface of focal distance ratio of the second ring curved surface is short.Center lens,
First outer shroud lens, the second outer shroud lens and the 3rd outer shroud lens integral structure.
Embodiment one：
See figures.1.and.2, by femtosecond laser is modified, Fluohydric acid. corrosion process prepares trifocal.Including with
Lower key step：
The cleaning of step one, hard substrate material：Successively using acetone, ethanol, deionized water difference ultrasound wave cleaning
5min, is effectively cleaned to hard substrate material 260；In 260 material of hard substrate, including vitreous silica, K9 glass, silicon chip
One kind；
Step 2, femtosecond laser are modified：With reference to the femto-second laser pulse 280, Jing that Fig. 1, femtosecond laser generator 210 are produced
The high anti-piece 240 of Parameter Modulation light path 220, semi-transparent semi-reflecting lens or arrowband is crossed, hard is focused on by optical focus camera lens 250 then
260 surface of substrate；Hard substrate 260 is fixed on PLC technology D translation platform 270.It is with reference to Fig. 2, trifocal is recessed
Three pieces of regions are resolved in the face structure femtosecond laser zone of influence, and circulation carries out femtosecond laser and is modified and hydrofluoric acid solution corrosion, finally
Form the femtosecond laser zone of influence with trifocal concave structure；The parameter bag that femtosecond laser modifying process therein is adjusted
Include：The modified path of the modified pulse number of 250 parameter of optical focus camera lens, laser energy, single-point, scanning.Femtosecond laser 280
For a kind of ultra-short pulse laser, center pulsewidth is 30-150fs, wavelength is 325-1200nm, single pulse energy is 1-100 μ J, weight
Complex frequency 10Hz-100KHz；Optical focus camera lens 250 be microscope objective, amplification between 10-100, numerical aperture NA
Between value 0.5-0.95；
Step 3, hydrofluoric acid solution corrosion：Quartz glass after scanning is placed in the hydrofluoric acid solution of ultrasonic environment
Selective corrosion is carried out, the multifocal concave lens structure 261,261 ' formed on hard substrate 260 is three focus concave lens
261 top view；Hydrofluoric acid solution, is the Fluohydric acid. weak solution of concentration 5%-10%, and corrosion temperature will according to the pattern to lens
Control is asked between 20-50 DEG C；
Step 4, multi-focus lenss are replicated：With three focus concave lens structures 262 as mother matrix, by heat pressing process, in tool
Have the vertical view that three focus convex lens 291,291 ' are three focus convex lens 291 is replicated compared with overmolded on low grade fever yield temperature material
Figure.
Embodiment two：
With reference to Fig. 3 and Fig. 1, by multiple femtosecond laser is modified, Fluohydric acid. corrosion process prepares bifocal lenses.Including with
Lower key step：
The cleaning of step one, hard substrate material：Successively using acetone, ethanol, deionized water difference ultrasound wave cleaning
5min, is effectively cleaned to hard substrate material 260；In 260 material of hard substrate, including vitreous silica, K9 glass, silicon chip
One kind；
Step 2, femtosecond laser are modified for the first time：With reference to the femto-second laser pulse that Fig. 1, femtosecond laser generator 210 are produced
280, through the high anti-piece 240 of Parameter Modulation light path 220, semi-transparent semi-reflecting lens or arrowband, then focused on by optical focus camera lens 250
To 260 surface of hard substrate；Hard substrate 260 is fixed on PLC technology D translation platform 270；It is modified by femtosecond laser
The first block of material modified zone is formed, as a part of curved surface of bifocuses concave lens；Femtosecond laser in described step two
280 is a kind of ultra-short pulse laser, and center pulsewidth is 30-150fs, wavelength is 325-1200nm, single pulse energy is 1-100 μ
J, repetition rate 10Hz-100KHz.Optical focus camera lens 250 be microscope objective, amplification between 10-100, numerical aperture
Between NA values 0.5-0.95 of footpath；
Step 3, hydrofluoric acid solution corrode for the first time：It is rotten to the height of quartz material femtosecond laser modified zone using Fluohydric acid.
Erosion rate characteristic, quartz glass modified for the first time is placed in the hydrofluoric acid solution of ultrasonic environment carries out selective corrosion,
Form the top view that the single focus concave lens structure 262,262 ' on hard substrate 260 is single focus concave lens 262；Hydrogen fluorine
Acid solution, is the Fluohydric acid. weak solution of concentration 5%-10%, corrosion temperature according to the pattern to lens require control 20-50 DEG C it
Between；
Step 4, second laser alignment are twice-modified：Carried out on the basis of established single focus concave lens structure 262 again
Femtosecond laser is modified, and forms the second block of material modified zone, as the Part II curved surface of bifocuses concave lens；
Step 5, hydrofluoric acid solution corrode for second：Second modified quartz glass is placed in into ultrasonic environment
Selective corrosion is carried out in hydrofluoric acid solution, the bifocuses concave lens structure 263,263 ' formed on hard substrate 260 is double
The top view of focus concave lens 263；
Step 6, multi-focus lenss are replicated：With the bifocuses concave lens structure 263 on hard substrate 260 as mother matrix, lead to
Heat pressing process being crossed, bifocuses convex lens 290 being replicated with compared with overmolded on low grade fever yield temperature material, 290 ' is convex for bifocuses
The top view of face lens 290.
Claims (9)
1. a kind of multi-focus lenss for three-dimensional imaging, it is characterised in that prepared using following steps：
1) clean hard substrate material；
2) femtosecond laser is modified：
Femto-second laser pulse focuses on hard substrate (260) surface after Parameter Modulation；
Femto-second laser pulse hard substrate (260) is carried out different depth, zones of different distribution on surface be modified；
Femtosecond laser modifying process is observed and detected by optical CCD (230)；
3) hydrofluoric acid solution corrosion：
By step 2) modified quartz glass is placed in the hydrofluoric acid solution of ultrasonic environment carries out selective corrosion, forms hard
Multifocal concave lens structure on matter substrate (260)；
The multifocal concave lens structure includes center lens and the first outer shroud lens；
The front end face of the center lens is curved surface, and end face is plane thereafter；
The rear end face of the first outer shroud lens is plane, and its front end face includes the first centrally disposed plane and be arranged on
First out-of-plane first ring curved surface；First plane is overlapped with the rear end face of center lens；
The focal length of focal distance ratio the first ring curved surface of the center lens front end face is short；
4) multi-focus lenss for three-dimensional imaging are replicated：
With the multifocal concave lens structure on hard substrate (260) as mother matrix, by heat pressing process, it is convex that overmolded replicates multifocal
Face lens.
2. multi-focus lenss for three-dimensional imaging according to claim 1, it is characterised in that：
The step 2) in femtosecond laser (280) center pulsewidth be 30-150fs, wavelength be 325-1200nm, single pulse energy
For 1-100 μ J, repetition rate 10Hz-100KHz；
The step 3) in hydrofluoric acid solution for concentration 5%-10% Fluohydric acid. weak solution, corrosion temperature 20-50 DEG C it
Between；
The material of described hard substrate (260) is vitreous silica or K9 glass or silicon chip.
3. multi-focus lenss for three-dimensional imaging according to claim 1 and 2, it is characterised in that：
The step 2) and step 3) specific as follows：
Hard substrate (260) is fixed on D translation platform (270)；
Carry out first time femtosecond laser fixed point multiple-pulse modified or scan modified, carry out step 3 afterwards) obtain simple surface
Concavees lens structure；
Repeat femtosecond laser fixed point multiple-pulse to be modified or scan modified and step 3), in the concavees lens structure that last time obtains
It is upper to repeat to process compound concavees lens structure, it is final to obtain multifocal concavees lens structure.
4. a kind of multi-focus lenss for three-dimensional imaging, it is characterised in that prepared using following steps：
1) clean hard substrate material；
2) femtosecond laser is modified：
Femto-second laser pulse focuses on hard substrate (260) surface after Parameter Modulation；
Femto-second laser pulse hard substrate (260) is carried out different depth, zones of different distribution on surface be modified；
Femtosecond laser modifying process is observed and detected by optical CCD (230)；
3) hydrofluoric acid solution corrosion：
By step 2) modified quartz glass is placed in the hydrofluoric acid solution of ultrasonic environment carries out selective corrosion, forms hard
Multifocal concave lens structure on matter substrate (260)；
The multifocal concave lens structure includes center lens, the first outer shroud lens and the second outer shroud lens；
The front end face of the center lens is curved surface, and end face is plane thereafter；
The rear end face of the first outer shroud lens is plane, and its front end face includes the first centrally disposed plane and be arranged on
First out-of-plane first ring curved surface；First plane is overlapped with the rear end face of center lens；
The rear end face of the second outer shroud lens is plane, and its front end face includes the second centrally disposed plane and be arranged on
Second out-of-plane second ring curved surface；Second plane is overlapped with the rear end face of the first outer shroud lens；
The focal length of focal distance ratio the first ring curved surface of the center lens front end face is short；Second ring of focal distance ratio of the first ring curved surface
The focal length of curved surface is short；
4) multi-focus lenss for three-dimensional imaging are replicated：
With the multifocal concave lens structure on hard substrate (260) as mother matrix, by heat pressing process, it is convex that overmolded replicates multifocal
Face lens.
5. multi-focus lenss for three-dimensional imaging according to claim 4, it is characterised in that：
The step 2) in femtosecond laser (280) center pulsewidth be 30-150fs, wavelength be 325-1200nm, single pulse energy
For 1-100 μ J, repetition rate 10Hz-100KHz；
The step 3) in hydrofluoric acid solution for concentration 5%-10% Fluohydric acid. weak solution, corrosion temperature 20-50 DEG C it
Between；
The material of described hard substrate (260) is vitreous silica or K9 glass or silicon chip.
6. multi-focus lenss for three-dimensional imaging according to claim 4 or 5, it is characterised in that：
The step 2) and step 3) specific as follows：
Hard substrate (260) is fixed on D translation platform (270)；
Carry out first time femtosecond laser fixed point multiple-pulse modified or scan modified, carry out step 3 afterwards) obtain simple surface
Concavees lens structure；
Repeat femtosecond laser fixed point multiple-pulse to be modified or scan modified and step 3), in the concavees lens structure that last time obtains
It is upper to repeat to process compound concavees lens structure, it is final to obtain multifocal concavees lens structure.
7. a kind of multi-focus lenss for three-dimensional imaging, it is characterised in that prepared using following steps：
1) clean hard substrate material；
2) femtosecond laser is modified：
Femto-second laser pulse focuses on hard substrate (260) surface after Parameter Modulation；
Femto-second laser pulse hard substrate (260) is carried out different depth, zones of different distribution on surface be modified；
Femtosecond laser modifying process is observed and detected by optical CCD (230)；
3) hydrofluoric acid solution corrosion：
By step 2) modified quartz glass is placed in the hydrofluoric acid solution of ultrasonic environment carries out selective corrosion, forms hard
Multifocal concave lens structure on matter substrate (260)；
The multifocal concave lens structure includes that center lens, the first outer shroud lens, the second outer shroud lens and the 3rd outer shroud are saturating
Mirror；
The front end face of the center lens is curved surface, and end face is plane thereafter；
The rear end face of the first outer shroud lens is plane, and its front end face includes the first centrally disposed plane and be arranged on
First out-of-plane first ring curved surface；First plane is overlapped with the rear end face of center lens；
The rear end face of the second outer shroud lens is plane, and its front end face includes the second centrally disposed plane and be arranged on
Second out-of-plane second ring curved surface；Second plane is overlapped with the rear end face of the first outer shroud lens；
The rear end face of the 3rd outer shroud lens is plane, and its front end face includes the 3rd centrally disposed plane and be arranged on
3rd out-of-plane 3rd ring curved surface；3rd plane is overlapped with the rear end face of the second outer shroud lens；
The focal length of focal distance ratio the first ring curved surface of the center lens front end face is short；Second ring of focal distance ratio of the first ring curved surface
The focal length of curved surface is short；The focal length of the 3rd ring curved surface of focal distance ratio of the second ring curved surface is short；
4) multi-focus lenss for three-dimensional imaging are replicated：
With the multifocal concave lens structure on hard substrate (260) as mother matrix, by heat pressing process, it is convex that overmolded replicates multifocal
Face lens.
8. multi-focus lenss for three-dimensional imaging according to claim 7, it is characterised in that：
The step 2) in femtosecond laser (280) center pulsewidth be 30-150fs, wavelength be 325-1200nm, single pulse energy
For 1-100 μ J, repetition rate 10Hz-100KHz；
The step 3) in hydrofluoric acid solution for concentration 5%-10% Fluohydric acid. weak solution, corrosion temperature 20-50 DEG C it
Between；
The material of described hard substrate (260) is vitreous silica or K9 glass or silicon chip.
9. multi-focus lenss for three-dimensional imaging according to claim 7 or 8, it is characterised in that：
The step 2) and step 3) specific as follows：
Hard substrate (260) is fixed on D translation platform (270)；
Carry out first time femtosecond laser fixed point multiple-pulse modified or scan modified, carry out step 3 afterwards) obtain simple surface
Concavees lens structure；
Repeat femtosecond laser fixed point multiple-pulse to be modified or scan modified and step 3), in the concavees lens structure that last time obtains
It is upper to repeat to process compound concavees lens structure, it is final to obtain multifocal concavees lens structure.
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| CN111822886B (en) * | 2020-06-11 | 2022-11-22 | 华东师范大学重庆研究院 | Multi-focus ultrafast laser preparation device and method for micro-fluidic chip micro-channel |
| CN115097651A (en) * | 2022-07-15 | 2022-09-23 | 西安交通大学 | Myopia-preventing glasses lens with symmetrical compound eye structure and preparation method thereof |
| CN116430565A (en) * | 2023-04-25 | 2023-07-14 | 西安工业大学 | Microscopic imaging device and imaging method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202447811U (en) * | 2012-02-16 | 2012-09-26 | 上海劲科智能科技发展有限公司 | Laser equipment and laser lens thereof |
| CN102759763A (en) * | 2012-06-21 | 2012-10-31 | 西安交通大学 | Micronano manufacturing method of compound eye structure micro lens array |
| CN103018799A (en) * | 2012-12-17 | 2013-04-03 | 西安交通大学 | Method for preparing quasi-periodic micro-lens arrays through femtosecond laser wet etching |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2290647A1 (en) * | 2009-08-24 | 2011-03-02 | Thomson Licensing | Objective lens and optical pickup comprising the objective lens |
-
2014
- 2014-01-29 CN CN201410044664.8A patent/CN104808268B/en active Active
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN202447811U (en) * | 2012-02-16 | 2012-09-26 | 上海劲科智能科技发展有限公司 | Laser equipment and laser lens thereof |
| CN102759763A (en) * | 2012-06-21 | 2012-10-31 | 西安交通大学 | Micronano manufacturing method of compound eye structure micro lens array |
| CN103018799A (en) * | 2012-12-17 | 2013-04-03 | 西安交通大学 | Method for preparing quasi-periodic micro-lens arrays through femtosecond laser wet etching |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111001942A (en) * | 2019-12-11 | 2020-04-14 | 西安交通大学 | Flexible circuit printing method based on super-hydrophobic liquid metal surface |
| CN111001942B (en) * | 2019-12-11 | 2020-12-04 | 西安交通大学 | Flexible circuit printing method based on super-hydrophobic liquid metal surface |
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