CN203621730U

CN203621730U - High-power laser spot control system

Info

Publication number: CN203621730U
Application number: CN201320714721.XU
Authority: CN
Inventors: 麻树波
Original assignee: Xian Zhongke Maite Electronic Technology Equipment Co Ltd
Current assignee: Xian Zhongke Maite Electronic Technology Equipment Co Ltd
Priority date: 2013-11-12
Filing date: 2013-11-12
Publication date: 2014-06-04
Anticipated expiration: 2023-11-12

Abstract

The utility model discloses a high-power laser spot control system. The high-power laser spot control system comprises a high-power pulse laser and a low-power laser, wherein a deformable mirror 1, a collimator 1, a beam splitter 1 and an optical confocal system are sequentially arranged on the centerline of an output light path of the high-power pulse laser; a deformable mirror 2, a collimator 2, a beam splitter 2, an optical confocal system and a CCD (charge coupled device) are sequentially arranged on the centerline of an output light path of a continuous laser; an objective lens and a Z-axis slightly moving platform are arranged on a focusing light path of each optical confocal system; a light intensity sensor is arranged on a reflecting light path of each beam splitter; the two light intensity sensors and the CCD are connected with the input end of an FPGA (field programmable gate array) module; a Z-axis driver for driving a Z-axis motor is connected with the output end of FPGA module; the Z-axis motor is connected with the Z-axis slightly moving platform; and the output end of the FPGA module is further connected with the pulse laser and the continuous laser. The high-power laser spot control system is reasonable in design, simple in structure, precise in control and convenient to realize.

Description

A kind of high power laser light hot spot control system

Technical field

The utility model belongs to automatic control system field, especially relates to a kind of control system of high power laser light hot spot.

Background technology

Along with the development of laser technology, laser instrument is in laser medicine, laser chemistry, materials processing, be used widely in the fields such as scientific research, high power pulsed laser is in the cutting of metal material, in the industry such as welding, have a wide range of applications, it is very high to the requirement of constant energy density when high power pulsed laser is carried out micro-polishing, very high to the requirement of the lip-deep laser intensity of processing work and laser facula size especially, laser intensity is non-constant can affect the stability to workpiece processing, make process wayward, the size of laser facula does not meet processing request also can cause the defective of workpiece processing, and the real-time control monitoring to workpiece process is also very important, the micro-polishing technology of existing laser is not high to the Real-Time Monitoring of laser intensity aspect constant energy density, impact forms the effect of hot spot at surface of the work, control accuracy is not high, structure relative complex, cost is high.

Utility model content

Technical problem to be solved in the utility model is for above-mentioned deficiency of the prior art, and a kind of high power laser light hot spot control system is provided, and this Control System Design is reasonable, simple in structure, and production cost is low, and control accuracy is high, and it is convenient to realize.

For solving the problems of the technologies described above, the technical scheme that the utility model adopts is: a kind of high power laser light hot spot control system, it is characterized in that: comprise high power pulsed laser and low power laser, on the center line of described high power pulsed laser output light path, be disposed with distorting lens one, collimater one, beam splitter one and optical confocal system, on the center line of described continuous wave laser output light path, be disposed with distorting lens two, collimater two, beam splitter two, optical confocal system and CCD, object lens and the micro-platform that moves of Z axis with Chromatically compensated function are set in the focused light passages of described optical confocal system, light intensity sensor one is set on the reflected light path of described beam splitter one, light intensity sensor two is set on the reflected light path of described beam splitter two, described light intensity sensor one, light intensity sensor two and CCD all join with the input of FPGA module, the output of described FPGA module is connected to for controlling the micro-Z axis motor that moves platform of described Z axis, between described FPGA module and Z axis motor, be connected to Z axis driver, the output of described FPGA module also joins with pulse laser and continuous wave laser.

The utility model compared with prior art has the following advantages:

1, the utility model simplicity of design is reasonable, and production cost is low, controls accurately, and it is convenient to realize.

2, the utility model adopts FPGA module and light intensity sensor to carry out controlling in real time monitoring to laser intensity, has improved traditional structure, has improved laser facula quality.

Below by drawings and Examples, the technical solution of the utility model is described in further detail.

Brief description of the drawings

Fig. 1 is structural representation of the present utility model.

Description of reference numerals:

1-pulse laser; 2-continuous wave laser; 3-distorting lens one;

4-distorting lens two; 5-collimater one; 6-collimater two;

7-beam splitter one; 8-beam splitter two; 9-optical confocal system;

10-CCD; 11-FPGA module; 12-Z axis driver;

13-Z axis motor; The micro-platform that moves of 14-Z axis; 15-light intensity sensor one;

16-light intensity sensor two; 17-object lens; 18-test piece.

Detailed description of the invention

A kind of high power laser light hot spot control system as shown in Figure 1, comprise high power pulsed laser 1 and low power laser 2, on the center line of described high power pulsed laser 1 output light path, be disposed with distorting lens 1, collimater 1, beam splitter 1 and optical confocal system 9, on the center line of described continuous wave laser 2 output light paths, be disposed with distorting lens 24, collimater 26, beam splitter 28, optical confocal system 9 and CCD10, object lens 17 and the micro-platform 14 that moves of Z axis with Chromatically compensated function are set in the focused light passages of described optical confocal system 9, light intensity sensor 1 is set on the reflected light path of described beam splitter 1, light intensity sensor 2 16 is set on the reflected light path of described beam splitter 28, described light intensity sensor 1, light intensity sensor 2 16 and CCD10 all join with the input of FPGA module 11, the output of described FPGA module 11 is connected to for controlling the micro-Z axis motor 13 that moves platform 14 of described Z axis, between described FPGA module 11 and Z axis motor 13, be connected to Z axis driver 12, the output of described FPGA module 11 also joins with pulse laser 1 and continuous wave laser 2.

Operation principle of the present utility model is: the laser that high power pulsed laser 1 is exported sends collimater 1 to after proofreading and correct through distorting lens one 3 Wave-front phases, after the diameter of light beam being limited in to certain limit through collimater 1, send beam splitter 1 to, light beam is divided into folded light beam and transmitted light beam by beam splitter 1, folded light beam sends light intensity sensor 1 to, light intensity sensor 1 is converted to the signal of telecommunication by the light intensity signal sensing and sends FPGA module 11 to, and FPGA module 11 is according to the laser intensity of signal of telecommunication control impuls laser instrument 1, deflecting light beams sends optical confocal system 9 to and focuses on, and is incident upon and is put in the micro-test piece 18 moving on platform 14 of Z axis afterwards by having the object lens 17 of Chromatically compensated function, the laser that low-power continuous wave laser 2 is exported sends collimater 26 to after proofreading and correct through distorting lens 24 Wave-front phases, identical by the beam diameter of collimater 1 through the beam diameter of collimater 26 and the laser of high power pulsed laser 1, light beam by collimater 26 is divided into folded light beam and transmitted light beam through beam splitter 28, folded light beam sends light intensity sensor 2 16 to, light intensity sensor 2 16 is converted to the signal of telecommunication by the light intensity signal sensing and sends FPGA module 11 to, and FPGA module 11 is according to the laser intensity of signal of telecommunication control continuous wave laser 2, deflecting light beams sends optical confocal system 9 to and focuses on, be incident upon and be put in the micro-test piece 18 moving on platform 14 of Z axis by object lens 17 afterwards, in test piece 18, form the hot spot onesize with pulse laser 1 laser facula, deflecting light beams sends optical signal to CCD10 and imaging on CCD10 by optical confocal system 9, CCD10 is converted to the optical signal receiving binaryzation pulse signal and sends FPGA module 11 to, in the time that FPGA module 11 does not meet processing request by the information obtaining with the information contrast judgement spot size of in advance FPGA module being set, FPGA module 11 is controlled Z axis motor 13 by control Z axis driver 12 and is worked, Z axis motor 13 changes by controlling the micro-upper and lower micro-movement that moves platform 14 of Z axis the spot size forming in test piece 18.

The above; it is only preferred embodiment of the present utility model; not the utility model is imposed any restrictions; every any simple modification of above embodiment being done according to the utility model technical spirit, change and equivalent structure change, and all still belong in the protection domain of technical solutions of the utility model.

Claims

1. a high power laser light hot spot control system, it is characterized in that: comprise high power pulsed laser (1) and low power laser (2), on the center line of described high power pulsed laser (1) output light path, be disposed with distorting lens one (3), collimater one (5), beam splitter one (7) and optical confocal system (9), on the center line of described continuous wave laser (2) output light path, be disposed with distorting lens two (4), collimater two (6), beam splitter two (8), optical confocal system (9) and CCD(10), object lens (17) and the micro-platform (14) that moves of Z axis with Chromatically compensated function are set in the focused light passages of described optical confocal system (9), light intensity sensor one (15) is set on the reflected light path of described beam splitter one (7), light intensity sensor two (16) is set on the reflected light path of described beam splitter two (8), described light intensity sensor one (15), light intensity sensor two (16) and CCD(10) all join with the input of FPGA module (11), the output of described FPGA module (11) is connected to for controlling the micro-Z axis motor (13) that moves platform (14) of described Z axis, between described FPGA module (11) and Z axis motor (13), be connected to Z axis driver (12), the output of described FPGA module (11) also joins with pulse laser (1) and continuous wave laser (2).