CN115421254B - Optical fiber hole processing method and processing equipment based on same - Google Patents
Optical fiber hole processing method and processing equipment based on same Download PDFInfo
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- CN115421254B CN115421254B CN202211169853.9A CN202211169853A CN115421254B CN 115421254 B CN115421254 B CN 115421254B CN 202211169853 A CN202211169853 A CN 202211169853A CN 115421254 B CN115421254 B CN 115421254B
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- optical fiber
- acid solution
- hydrofluoric acid
- fiber hole
- hole
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 115
- 238000003672 processing method Methods 0.000 title claims abstract description 12
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims abstract description 159
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 50
- 239000011521 glass Substances 0.000 claims abstract description 45
- 239000006247 magnetic powder Substances 0.000 claims abstract description 43
- 239000000758 substrate Substances 0.000 claims abstract description 43
- 238000005498 polishing Methods 0.000 claims abstract description 39
- 230000004048 modification Effects 0.000 claims abstract description 38
- 238000012986 modification Methods 0.000 claims abstract description 38
- 239000000463 material Substances 0.000 claims abstract description 25
- 239000000835 fiber Substances 0.000 claims description 40
- 238000005260 corrosion Methods 0.000 claims description 27
- 230000007797 corrosion Effects 0.000 claims description 26
- 238000000034 method Methods 0.000 claims description 20
- 238000005530 etching Methods 0.000 claims description 19
- 230000005684 electric field Effects 0.000 claims description 13
- 239000008367 deionised water Substances 0.000 claims description 11
- 229910021641 deionized water Inorganic materials 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 7
- 239000002245 particle Substances 0.000 claims description 2
- 239000003082 abrasive agent Substances 0.000 abstract description 4
- 230000000694 effects Effects 0.000 description 17
- 238000000465 moulding Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/36—Mechanical coupling means
- G02B6/38—Mechanical coupling means having fibre to fibre mating means
- G02B6/3807—Dismountable connectors, i.e. comprising plugs
- G02B6/3833—Details of mounting fibres in ferrules; Assembly methods; Manufacture
- G02B6/3863—Details of mounting fibres in ferrules; Assembly methods; Manufacture fabricated by using polishing techniques
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Coupling Of Light Guides (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Grinding And Polishing Of Tertiary Curved Surfaces And Surfaces With Complex Shapes (AREA)
Abstract
The invention provides a processing method of an optical fiber hole and processing equipment based on the processing method, and the processing method of the optical fiber hole comprises the following steps: providing a glass substrate, wherein the glass substrate is provided with a first end face and a second end face which are opposite; at least one modified region is formed in the glass substrate, each modified region is formed by laser layering processing modification, and each modified region penetrates through the first end face and the second end face. The glass substrate was put into a hydrofluoric acid solution with magnetic powder. An alternating magnetic field is applied around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modified region is selectively corroded to form at least one optical fiber hole in the glass substrate. And (3) rotating and polishing the hole wall of each optical fiber hole by adopting a high-pressure water guide optical fiber with abrasive materials. The evenness of the wall of the optical fiber hole is improved, and the influence on the propagation of the subsequent light in the waveguide is reduced.
Description
Technical Field
The invention relates to the technical field of optical fibers, in particular to a processing method of an optical fiber hole and processing equipment based on the processing method.
Background
At present, after glass is modified by laser, a method for removing modified materials mainly adopts a corrosion method. The etching solution used in the etching method is hydrofluoric acid (HF), and the modified material is slowly etched away through the hydrofluoric acid solution, so that the etching penetration of the glass modified region is realized. However, this method is time consuming and the degree of corrosion varies from modified location to modified location as the corrosion area increases. If the corrosion process is directly applied to the processing procedure of the optical fiber hole, the wall of the processed optical fiber hole is rugged, and the subsequent light propagation in the waveguide is affected.
Disclosure of Invention
The invention provides a processing method and processing equipment based on the optical fiber hole, which can improve the evenness of the wall of the optical fiber hole and reduce the influence on the propagation of subsequent light in a waveguide.
In a first aspect, the present invention provides a method for processing an optical fiber hole, where the optical fiber hole is an optical fiber hole in an MT ferrule, and the MT ferrule is applied to an MPO connector. The processing method of the optical fiber hole comprises the following steps: providing a glass substrate, wherein the glass substrate is provided with a first end face and a second end face which are opposite; at least one modified region is formed in the glass substrate, each modified region is formed by laser layering processing modification, and each modified region penetrates through the first end face and the second end face. The glass substrate was put into a hydrofluoric acid solution with magnetic powder. An alternating magnetic field is applied around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modified region is selectively corroded to form at least one optical fiber hole in the glass substrate. And (3) rotating and polishing the hole wall of each optical fiber hole by adopting a high-pressure water guide optical fiber with abrasive materials.
In the scheme, the magnetic powder is added into the hydrofluoric acid solution, after the modified glass substrate is placed into the hydrofluoric acid solution with the magnetic powder, an alternating magnetic field is externally applied to the periphery of the hydrofluoric acid solution bearing the magnetic powder, the hydrofluoric acid solution is driven to flow, and the materials in each modification region are selectively corroded, so that the corrosion molding rate of the modification region can be increased, the materials in the modification region are removed through rapid corrosion, and the influence degree of isotropy on the uneven wall of the optical fiber hole due to overlong corrosion time is improved. And then, the hole wall of each optical fiber hole is rotationally polished by adopting the high-pressure water guide optical fiber with the abrasive, so that the evenness of the hole wall of the optical fiber hole can be improved, the influence on the propagation of the subsequent light in the waveguide is reduced, and the polishing effect and efficiency are improved.
In a specific embodiment, the hydrofluoric acid solution has a mass concentration of between 30 and 50% to enhance the efficiency of the selective etching.
In a specific embodiment, the particle size of the magnetic powder is between 200 mesh and 600 mesh, so that the effect of driving the hydrofluoric acid solution to flow is improved.
In a specific embodiment, the water diameter of the high-pressure water guide fiber is smaller than 20um, and the auxiliary water guide liquid of the high-pressure water guide fiber is deionized water doped with abrasive materials, so that polishing precision is improved.
In one specific embodiment, spin polishing the walls of each fiber hole with an abrasive-laden high pressure water guide fiber comprises: the spiral motion platform for bearing the optical fiber laser head is controlled, and a spiral processing mode is adopted to carry out rotary polishing on the optical fiber hole with the set fiber diameter, so that the polishing effect is improved.
In a specific embodiment, the fiber diameter is set to be 30um-300um, so that the processed fiber hole can be finer, and the precision and the application scene adaptability are improved.
In a specific embodiment, an ac magnetic field is applied around a hydrofluoric acid solution carrying a magnetic powder, comprising: an alternating magnetic field is applied to the bottom of the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modification area is selectively corroded to form at least one optical fiber hole in the glass substrate. The effect of driving the hydrofluoric acid solution to flow is improved.
In a second aspect, the present invention further provides a device for processing an optical fiber hole, where the optical fiber hole is an optical fiber hole in an MT ferrule, and the MT ferrule is applied to an MPO connector. The optical fiber hole processing equipment is based on any one of the optical fiber hole processing methods, and comprises: a corrosion container, an alternating current electric field driving device and a high-pressure water guide optical fiber polishing device. The corrosion container is used for containing hydrofluoric acid solution with magnetic powder and also used for containing a glass substrate. The alternating current electric field driving device is used for externally applying an alternating current magnetic field around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and selectively corroding the material in each modification area to form at least one optical fiber hole in the glass substrate. The high-pressure water guide optical fiber polishing device is used for rotationally polishing the hole wall of each optical fiber hole by adopting the high-pressure water guide optical fiber with abrasive.
In the scheme, the magnetic powder is added into the hydrofluoric acid solution, after the modified glass substrate is placed into the hydrofluoric acid solution with the magnetic powder, an alternating magnetic field is externally applied to the periphery of the hydrofluoric acid solution bearing the magnetic powder, the hydrofluoric acid solution is driven to flow, and the materials in each modification region are selectively corroded, so that the corrosion molding rate of the modification region can be increased, the materials in the modification region are removed through rapid corrosion, and the influence degree of isotropy on the uneven wall of the optical fiber hole due to overlong corrosion time is improved. And then, the hole wall of each optical fiber hole is rotationally polished by adopting the high-pressure water guide optical fiber with the abrasive, so that the evenness of the hole wall of the optical fiber hole can be improved, the influence on the propagation of the subsequent light in the waveguide is reduced, and the polishing effect and efficiency are improved.
In a specific embodiment, the etching container is located above the ac electric field driving device, so that the ac electric field driving device can apply an ac magnetic field around the hydrofluoric acid solution to drive the hydrofluoric acid solution to flow from the bottom of the hydrofluoric acid solution. The effect of driving the hydrofluoric acid solution to flow is improved.
In a specific embodiment, the high pressure water guide optical fiber polishing apparatus includes: an auxiliary water liquid guiding providing system, an optical fiber laser processing head and a spiral motion platform. Wherein, auxiliary water guide liquid supply system is used for providing deionized water doped with abrasive. The fiber laser processing head is used for receiving deionized water doped with abrasive and outputting a high-pressure water guide fiber with abrasive. The spiral motion platform is used for driving the optical fiber laser processing head to perform spiral motion so as to perform rotary polishing on the optical fiber hole with the set fiber diameter in a spiral processing mode, thereby improving polishing precision and effect.
Drawings
FIG. 1 is a flow chart of a method for processing an optical fiber hole according to an embodiment of the present invention;
FIG. 2 is a schematic view of a modified glass substrate according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of a corrosion container and an AC electric field driving apparatus according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of a polishing device for a high-pressure water-conducting optical fiber according to an embodiment of the present invention.
Reference numerals:
10-glass substrate 11-modified region 12-fiber holes
21-corrosion vessel 22-ac field drive 23-internal reflux unit
31-auxiliary water liquid guide providing system 32-optical fiber laser processing head 33-spiral motion platform
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In order to facilitate understanding of the method for processing an optical fiber hole provided by the embodiment of the present invention, an application scenario of the method for processing an optical fiber hole provided by the embodiment of the present invention is first described below, where the optical fiber hole is an optical fiber hole in an MT ferrule, and the MT ferrule is applied to an MPO connector. The method for processing the optical fiber hole will be described in detail with reference to the accompanying drawings.
Referring to fig. 1 to 4, the method for processing an optical fiber hole provided by the embodiment of the invention includes:
step10: providing a glass substrate 10, wherein the glass substrate 10 is provided with a first end face and a second end face which are opposite; at least one modification region 11 is formed in the glass substrate 10, each modification region 11 is formed by laser layering processing modification, and each modification region 11 penetrates through the first end face and the second end face;
step20: placing the glass substrate 10 in hydrofluoric acid solution with magnetic powder;
step30: applying an alternating magnetic field around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and selectively etching away the material in each modification region 11 to form at least one optical fiber hole 12 in the glass substrate 10;
step40: the walls of each fiber hole 12 are spin polished using a high pressure water guide fiber with abrasive.
In the above scheme, by adding the magnetic powder into the hydrofluoric acid solution, after the glass substrate 10 after modification is put into the hydrofluoric acid solution with the magnetic powder, an alternating magnetic field is applied around the hydrofluoric acid solution bearing the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modification region 11 is selectively corroded, so that the corrosion molding rate of the modification region 11 can be increased, the material in the modification region 11 is removed by rapid corrosion, and the influence degree of isotropy on the roughness of the wall of the optical fiber hole 12 due to overlong corrosion time is improved. And then, the hole wall of each optical fiber hole 12 is rotationally polished by adopting the high-pressure water guide optical fiber with the abrasive, so that the evenness of the hole wall of the optical fiber hole 12 can be improved, the influence on the transmission of the subsequent light in the waveguide is reduced, and the polishing effect and efficiency are improved. The steps are described in detail below with reference to the accompanying drawings.
First, referring to fig. 1 and 2, a glass substrate 10 is provided, wherein the glass substrate 10 has a first end face and a second end face opposite to each other; at least one modified region 11 is formed in the glass substrate 10, each modified region 11 is formed by laser layering processing modification, and each modified region 11 penetrates through the first end face and the second end face. Of course, the number of modified regions 11 is specifically related to the number of optical fiber cores supported by the MT ferrule, and when the MR ferrule supports a plurality of optical fiber cores, it is necessary to form a plurality of optical fiber holes 12 in the MT ferrule, and it is necessary to form a plurality of modified regions 11 on the glass substrate 10. The plurality of fiber holes 12 may be arranged in an array arrangement on the MT ferrule.
Next, as shown in fig. 1 and 3, the glass substrate 10 is put into a hydrofluoric acid solution with magnetic powder. The mass concentration of the hydrofluoric acid solution can be between 30 and 50 percent, and particularly, the mass concentration of the hydrofluoric acid solution can be any value between 30 and 50 percent, such as 30 percent, 35 percent, 40 percent, 45 percent, 50 percent and the like, so as to improve the efficiency of selective corrosion. The granularity of the magnetic powder can be between 200 meshes and 600 meshes, specifically, the granularity of the magnetic powder can be any value between 200 meshes, 300 meshes, 400 meshes, 500 meshes, 600 meshes and the like between 200 meshes and 600 meshes, so as to improve the effect of driving the hydrofluoric acid solution to flow.
Next, with continued reference to fig. 1 and 3, an alternating magnetic field is applied around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, selectively etching away the material in each modified region 11 to form at least one optical fiber hole 12 in the glass substrate 10. Specifically, an ac magnetic field may be applied to the bottom of the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modification region 11 is selectively etched away, so as to form at least one optical fiber hole 12 in the glass substrate 10. The effect of driving the hydrofluoric acid solution to flow is improved. It should be understood that the application of the ac magnetic field is not limited to the above-described manner at the bottom of the hydrofluoric acid solution, but other manners may be employed. In the above manner, by adding the magnetic powder into the hydrofluoric acid solution, after the glass substrate 10 after modification is put into the hydrofluoric acid solution with the magnetic powder, an alternating magnetic field is applied around the hydrofluoric acid solution bearing the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modification region 11 is selectively corroded, so that the corrosion molding rate of the modification region 11 can be increased, the material in the modification region 11 can be removed by rapid corrosion, and the degree of influence of isotropy on the roughness of the wall of the optical fiber hole 12 due to overlong corrosion time can be improved.
Next, referring to fig. 1 and 4, the walls of each fiber hole 12 are spin polished using a high pressure water guide fiber with an abrasive. The water diameter of the high-pressure water guide fiber can be smaller than 20um, and the auxiliary water guide liquid of the high-pressure water guide fiber is deionized water doped with abrasive materials, so that polishing precision is improved.
In addition, referring to fig. 4, when the high-pressure water guide optical fiber with abrasive is adopted to rotationally polish the hole wall of each optical fiber hole 12, the spiral motion platform 33 carrying the optical fiber laser head can be controlled, and the optical fiber hole 12 with the set fiber diameter can be rotationally polished in a spiral processing mode, so that the polishing effect is improved. The set fiber diameter can be 30um-300um, specifically, the set fiber diameter can be any value between 30um-300um, such as 30um, 50um, 70um, 80um, 100um, 130um, 150um, 170um, 180um, 200um, 230um, 250um, 270um, 280um, 300um, etc., so that the processed optical fiber hole 12 can be finer, and the precision and the application scene adaptability are improved. The hole wall of each optical fiber hole 12 is rotationally polished by adopting the high-pressure water guide optical fiber with the abrasive, so that the evenness of the hole wall of the optical fiber hole 12 can be improved, the influence on the propagation of subsequent light in the waveguide is reduced, and the polishing effect and efficiency are improved.
In the various embodiments shown above, by adding magnetic powder to the hydrofluoric acid solution, after the glass substrate 10 after modification is put into the hydrofluoric acid solution with magnetic powder, an alternating magnetic field is applied around the hydrofluoric acid solution bearing magnetic powder to drive the hydrofluoric acid solution to flow, and selectively etch away the material in each modification region 11, the etching rate of the modification region 11 can be increased, the material in the modification region 11 can be removed by rapid etching, and the degree of influence of isotropy on the roughness of the wall of the optical fiber hole 12 due to the excessive etching time can be improved. And then, the hole wall of each optical fiber hole 12 is rotationally polished by adopting the high-pressure water guide optical fiber with the abrasive, so that the evenness of the hole wall of the optical fiber hole 12 can be improved, the influence on the transmission of the subsequent light in the waveguide is reduced, and the polishing effect and efficiency are improved.
In addition, the embodiment of the invention also provides a processing device for the optical fiber hole, and referring to fig. 1-4, the optical fiber hole 12 is the optical fiber hole 12 in the MT ferrule, and the MT ferrule is applied to the MPO connector. The optical fiber hole processing equipment is based on any one of the optical fiber hole processing methods, and comprises: a corrosion container 21, an alternating current electric field driving device 22, and a high-pressure water-conducting fiber polishing device. The etching container 21 is used for containing hydrofluoric acid solution with magnetic powder and also for containing the glass substrate 10. The ac electric field driving device 22 is used for applying an ac magnetic field around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and selectively etching away the material in each modification region 11 to form at least one optical fiber hole 12 in the glass substrate 10. The high-pressure water-conducting optical fiber polishing device is used for rotationally polishing the hole wall of each optical fiber hole 12 by adopting the high-pressure water-conducting optical fiber with abrasive.
In the above scheme, by adding the magnetic powder into the hydrofluoric acid solution, after the glass substrate 10 after modification is put into the hydrofluoric acid solution with the magnetic powder, an alternating magnetic field is applied around the hydrofluoric acid solution bearing the magnetic powder to drive the hydrofluoric acid solution to flow, and the material in each modification region 11 is selectively corroded, so that the corrosion molding rate of the modification region 11 can be increased, the material in the modification region 11 is removed by rapid corrosion, and the influence degree of isotropy on the roughness of the wall of the optical fiber hole 12 due to overlong corrosion time is improved. And then, the hole wall of each optical fiber hole 12 is rotationally polished by adopting the high-pressure water guide optical fiber with the abrasive, so that the evenness of the hole wall of the optical fiber hole 12 can be improved, the influence on the transmission of the subsequent light in the waveguide is reduced, and the polishing effect and efficiency are improved.
Referring to fig. 3, when the etching container 21 and the ac electric field driving means 22 are placed, the etching container 21 may be positioned above the ac electric field driving means 22 so that the ac electric field driving means 22 can apply an ac magnetic field around the hydrofluoric acid solution to drive the flow of the hydrofluoric acid solution from the bottom of the hydrofluoric acid solution. The effect of driving the hydrofluoric acid solution to flow is improved. It should be understood that the corrosion vessel 21 is not limited to being placed above the ac field drive 22 as shown in fig. 3, but may be placed in other ways. In addition, referring to fig. 3, an internal reflux device 23 may be added inside the etching container 21 to guide the dynamic reflux of the hydrofluoric acid solution in the etching container 21, so as to improve the etching effect.
In providing the high-pressure water-guiding optical fiber polishing device, as shown in fig. 4, the high-pressure water-guiding optical fiber polishing device may include: an auxiliary water liquid guiding and providing system 31, a fiber laser processing head 32 and a spiral motion platform 33. Wherein the auxiliary water guide providing system 31 is used for providing deionized water doped with abrasive. The fiber laser processing head 32 is configured to receive deionized water doped with an abrasive and output a high pressure water guide fiber with an abrasive. The spiral motion platform 33 is used for driving the fiber laser processing head 32 to perform spiral motion so as to perform rotary polishing on the fiber hole 12 with the set fiber diameter in a spiral processing mode, thereby improving polishing precision and effect.
The foregoing is merely illustrative of the present invention, and the present invention is not limited thereto, and any changes or substitutions easily contemplated by those skilled in the art within the scope of the present invention should be included in the present invention. Therefore, the protection scope of the present invention should be subject to the protection scope of the claims.
Claims (9)
1. A method for processing an optical fiber hole, wherein the optical fiber hole is an optical fiber hole in an MT ferrule, and the MT ferrule is applied to an MPO connector, the method comprising:
providing a glass substrate, wherein the glass substrate is provided with a first end face and a second end face which are opposite; at least one modified region is formed in the glass substrate, each modified region is formed by laser layering processing modification, and each modified region penetrates through the first end face and the second end face;
placing the glass substrate into hydrofluoric acid solution with magnetic powder;
applying an alternating magnetic field around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and selectively corroding the material in each modification area to form at least one optical fiber hole in the glass substrate;
carrying out rotary polishing on the hole wall of each optical fiber hole by adopting a high-pressure water-guiding optical fiber polishing device;
the high-pressure water-guiding optical fiber polishing device comprises:
an auxiliary water guide providing system for providing deionized water doped with abrasive;
the fiber laser processing head is used for receiving the deionized water doped with the abrasive and outputting a high-pressure water guide fiber with the abrasive;
and the spiral motion platform is used for driving the optical fiber laser processing head to perform spiral motion so as to perform rotary polishing on the optical fiber hole with the set fiber diameter in a spiral processing mode.
2. The process according to claim 1, wherein the hydrofluoric acid solution has a mass concentration of between 30 and 50%.
3. The process according to claim 2, wherein the magnetic powder has a particle size between 200 mesh and 600 mesh.
4. The method of claim 1, wherein the high pressure water conducting fiber has a water diameter of less than 20um and the auxiliary water conducting liquid of the high pressure water conducting fiber is deionized water doped with abrasive.
5. The method of claim 1, wherein the rotating polishing the walls of each fiber hole using a high pressure water-conducting fiber polishing device comprises:
the spiral motion platform for bearing the optical fiber laser head is controlled, and a spiral processing mode is adopted to carry out rotary polishing on the optical fiber hole with the set fiber diameter.
6. The method of claim 5, wherein the set fiber diameter is 30um to 300um.
7. The method according to claim 1, wherein the step of applying an alternating magnetic field around the hydrofluoric acid solution carrying the magnetic powder comprises:
and applying an alternating magnetic field to the bottom of the hydrofluoric acid solution carrying the magnetic powder, driving the hydrofluoric acid solution to flow, and selectively etching away the material in each modification area to form at least one optical fiber hole in the glass substrate.
8. A processing apparatus for an optical fiber hole, the optical fiber hole being an optical fiber hole in an MT ferrule, the MT ferrule being applied to an MPO connector, the processing apparatus being based on the processing method for an optical fiber hole according to any one of claims 1 to 7, the processing apparatus comprising:
the corrosion container is used for containing hydrofluoric acid solution with magnetic powder and also used for containing the glass substrate;
an alternating current electric field driving device for applying an alternating current magnetic field around the hydrofluoric acid solution carrying the magnetic powder to drive the hydrofluoric acid solution to flow, and selectively corroding the material in each modification area to form at least one optical fiber hole in the glass substrate;
the high-pressure water-guiding optical fiber polishing device is used for rotationally polishing the hole wall of each optical fiber hole;
the high-pressure water-guiding optical fiber polishing device comprises:
an auxiliary water guide providing system for providing deionized water doped with abrasive;
the fiber laser processing head is used for receiving the deionized water doped with the abrasive and outputting a high-pressure water guide fiber with the abrasive;
and the spiral motion platform is used for driving the optical fiber laser processing head to perform spiral motion so as to perform rotary polishing on the optical fiber hole with the set fiber diameter in a spiral processing mode.
9. The processing apparatus according to claim 8, wherein the etching container is located above the ac electric field driving means so that the ac electric field driving means can apply an ac magnetic field around the hydrofluoric acid solution to drive the flow of the hydrofluoric acid solution from the bottom of the hydrofluoric acid solution.
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Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010084787A (en) * | 2000-02-29 | 2001-09-06 | 구자홍 | Square-groove optical fiber block and manufacturing method thereof |
| JP2003226551A (en) * | 2002-02-05 | 2003-08-12 | Nippon Sheet Glass Co Ltd | Glass substrate having fine pore and production method therefor |
| CN102789884A (en) * | 2012-06-21 | 2012-11-21 | 西安交通大学 | Preparation method of solenoid micro-inductor inside quartz material |
| CN103769956A (en) * | 2012-10-25 | 2014-05-07 | 安瀚视特控股株式会社 | Method for manufacturing glass substrate and magnetic fluid for polishing glass substrate |
| CN104446008A (en) * | 2014-12-08 | 2015-03-25 | 山东海富光子科技股份有限公司 | Device for achieving smooth and tapered corrosion of surfaces of optical fibers |
| CN106270855A (en) * | 2016-09-19 | 2017-01-04 | 广东工业大学 | A kind of micropore processing device and processing method |
| CN109773662A (en) * | 2019-02-21 | 2019-05-21 | 上海理工大学 | Using the inner hole of workpiece burnishing device of abrasive water-jet |
| CN110405354A (en) * | 2019-07-24 | 2019-11-05 | 西安交通大学 | A kind of femtosecond laser processing method of optical fiber lens |
| CN110531468A (en) * | 2019-09-06 | 2019-12-03 | 安徽光纤光缆传输技术研究所(中国电子科技集团公司第八研究所) | A kind of forming method of fiber stub, fiber stub docking facilities and fiber stub |
| CN110653667A (en) * | 2019-10-28 | 2020-01-07 | 河南工业大学 | Laser-induced cavitation auxiliary liquid jet polishing device and nozzle for jet polishing |
| CN113770816A (en) * | 2021-09-09 | 2021-12-10 | 广东工业大学 | Magnetorheological elastomer and preparation method and application thereof |
| CN113953896A (en) * | 2021-10-29 | 2022-01-21 | 西北工业大学 | Planetary polishing method driven by mixing of magnetic nanoparticles and non-magnetic nanoparticles |
| CN114055257A (en) * | 2021-11-23 | 2022-02-18 | 大连理工大学 | Controlled magnetic field complex curved surface chemical mechanical polishing device |
| CN114656158A (en) * | 2022-04-26 | 2022-06-24 | 翔实光电科技(昆山)有限公司 | Device, method and transfer device for polishing AG glass |
| CN114815066A (en) * | 2022-03-18 | 2022-07-29 | 中山市精量光电子科技有限公司 | Technology for preparing optical fiber end face micro-lens array based on femtosecond laser assisted wet etching |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US9815175B2 (en) * | 2012-09-25 | 2017-11-14 | G.D.O. Inc | Abrasive entrainment waterjet cutting |
| CN105904333B (en) * | 2016-06-08 | 2018-01-30 | 广东工业大学 | A kind of double-sided polisher and method of cluster dynamic magnetic field control polishing pad rigidity |
-
2022
- 2022-09-23 CN CN202211169853.9A patent/CN115421254B/en active Active
Patent Citations (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20010084787A (en) * | 2000-02-29 | 2001-09-06 | 구자홍 | Square-groove optical fiber block and manufacturing method thereof |
| JP2003226551A (en) * | 2002-02-05 | 2003-08-12 | Nippon Sheet Glass Co Ltd | Glass substrate having fine pore and production method therefor |
| CN102789884A (en) * | 2012-06-21 | 2012-11-21 | 西安交通大学 | Preparation method of solenoid micro-inductor inside quartz material |
| CN103769956A (en) * | 2012-10-25 | 2014-05-07 | 安瀚视特控股株式会社 | Method for manufacturing glass substrate and magnetic fluid for polishing glass substrate |
| CN104446008A (en) * | 2014-12-08 | 2015-03-25 | 山东海富光子科技股份有限公司 | Device for achieving smooth and tapered corrosion of surfaces of optical fibers |
| CN106270855A (en) * | 2016-09-19 | 2017-01-04 | 广东工业大学 | A kind of micropore processing device and processing method |
| CN109773662A (en) * | 2019-02-21 | 2019-05-21 | 上海理工大学 | Using the inner hole of workpiece burnishing device of abrasive water-jet |
| CN110405354A (en) * | 2019-07-24 | 2019-11-05 | 西安交通大学 | A kind of femtosecond laser processing method of optical fiber lens |
| CN110531468A (en) * | 2019-09-06 | 2019-12-03 | 安徽光纤光缆传输技术研究所(中国电子科技集团公司第八研究所) | A kind of forming method of fiber stub, fiber stub docking facilities and fiber stub |
| CN110653667A (en) * | 2019-10-28 | 2020-01-07 | 河南工业大学 | Laser-induced cavitation auxiliary liquid jet polishing device and nozzle for jet polishing |
| CN113770816A (en) * | 2021-09-09 | 2021-12-10 | 广东工业大学 | Magnetorheological elastomer and preparation method and application thereof |
| CN113953896A (en) * | 2021-10-29 | 2022-01-21 | 西北工业大学 | Planetary polishing method driven by mixing of magnetic nanoparticles and non-magnetic nanoparticles |
| CN114055257A (en) * | 2021-11-23 | 2022-02-18 | 大连理工大学 | Controlled magnetic field complex curved surface chemical mechanical polishing device |
| CN114815066A (en) * | 2022-03-18 | 2022-07-29 | 中山市精量光电子科技有限公司 | Technology for preparing optical fiber end face micro-lens array based on femtosecond laser assisted wet etching |
| CN114656158A (en) * | 2022-04-26 | 2022-06-24 | 翔实光电科技(昆山)有限公司 | Device, method and transfer device for polishing AG glass |
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