CN106624389A - Optical fiber cutting device and method based on ultra-short pulse lasers - Google Patents
Optical fiber cutting device and method based on ultra-short pulse lasers Download PDFInfo
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- CN106624389A CN106624389A CN201710097592.7A CN201710097592A CN106624389A CN 106624389 A CN106624389 A CN 106624389A CN 201710097592 A CN201710097592 A CN 201710097592A CN 106624389 A CN106624389 A CN 106624389A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/082—Scanning systems, i.e. devices involving movement of the laser beam relative to the laser head
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- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
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Abstract
Provided is an optical fiber cutting device and method based on ultra-short pulse lasers. The cutting device comprises an angle rotation platform arranged on a three-dimensional electric translation stage, an optical fiber is fixed on the angle rotation platform; the upper portion of the optical fiber is provided with a microobjective, a laser emitted from a laser device is reflected to the microobjective through a dichroscope, and the microobjective cuts the surface of the optical fiber after conducting focusing on the laser; the upper portion of the dichroscope is provided with an imaging lens and a CCD detector used for observing the focusing position of the microobjective; the laser device is provided with an optical shutter, the optical shutter and the three-dimensional electric translation stage are connected to a computer through a controller respetively, and an input end of the computer receives focusing position data observed by the CCD detector. The method comprises the steps of firstly forming a microgroove in the optical fiber, then exerting stress from the opposite face of the microgroove to make the optical fiber crack along the microgroove and completing cutting. The optical fiber cutting device based on the ultra-short pulse lasers is simple in structure, high in cutting precision and capable of achieving high-precision angle cutting.
Description
Technical field
The invention belongs to optical fiber processing field, and in particular to a kind of optical fiber cleaver based on ultra-short pulse laser and cut
Segmentation method.
Background technology
Fused fiber splice or coupling are the key technologies in optical fiber engineer applied, and both need fiber end face light as far as possible
It is sliding.Additionally, in order to reduce reflection during heterogeneous fiber coupling, in addition it is also necessary to carry out angle cutting to optical fiber.At present using most extensive
Fiber cut technology be to be cut using machinery knives.This method is easily caused due to optical fiber and cutter directly contact
Fiber end face bursts apart.Especially, for the Hollow-Core Photonic Crystal Fibers for rising in recent years, its structure is periodicity micropore group
Into the microcellular structure being easily destroyed using machinery knives cutting on end face.Stress when cutting in order to avoid machinery knives, laser
Cutting technique becomes another important selection.Generally adopt CO in laser cutting optical fiber technology at present2The heat that irradiation optical fiber is produced
Effect fuses optical fiber, and the method is easily deformed fiber end face.For photonic crystal fiber, thin-wall construction therein is more
It is more easily damaged.
Ultra-short pulse laser has high peak power, any materials can be carried out based on nonlinear effect after focusing adding
Work.Additionally due to its pulse width is extremely narrow, relative to long pulse processing fuel factor can be greatly reduced.Ultrashort pulse in recent years
Laser micro/nano process technology has caused everybody and has widely paid close attention to.There is researcher to directly cutting light using ultrashort pulse ablation
Fibre is studied, but is difficult to obtain the fiber end face with machine cuts phase same level.This is because ultra-short pulse laser burns
Erosion is a kind of strong interaction, and the high temperature chip produced during ablation usually causes the two of fiber end face when being re-depositing on fiber end face
Secondary damage, it is difficult to obtain smooth end face.And adopt step-by-step movement Multiple-Scan to be then difficult to eliminate connection vestige.Patent
201110001367.1 propose a kind of method that utilization ultra-short pulse laser pinpoints cutting optical fibre, but the method cannot be to light
Fibre carries out beveling and cuts.
The content of the invention
Present invention aims to above-mentioned the problems of the prior art, there is provided a kind of light based on ultra-short pulse laser
Fine cutter sweep and cutting method, can cut out with light on the special optical fiber such as common silica fibre and photonic crystal fiber
Learn the vertical of flatness or incline fiber end face, the cutting angle of optical fiber can freely be adjusted and control.
To achieve these goals, the technical scheme that optical fiber cleaver of the present invention based on ultra-short pulse laser is adopted
For：Including the angle rotation platform being arranged on three-D electric translation stage, on angle rotation platform optical fiber is fixed；The optical fiber
Top is provided with microcobjective, and the laser that laser instrument is launched reflexes to microcobjective through dichroscope, and microcobjective is to laser
It is focused the surface of rear cutting optical fibre；Dichroscope top be provided with for observe the imaging len of microcobjective focal position with
And ccd detector；Optical shutter is installed, optical shutter is connected meter with three-D electric translation stage respectively through controller on laser instrument
Calculation machine, the input of computer receives the focus location data that ccd detector observes and output display on its screen.
Described three-D electric translation stage and angle rotation platform has the objective table with light hole, and the lower section of objective table
It is provided with the lighting source for being illuminated when imaging fiber is observed.
V-groove optical fiber magnetic fixture for fixing optical fiber is installed on described angle rotation platform, and in optical fiber table
The position both sides to be cut in face are separately installed with a V-groove optical fiber magnetic fixture.
Laser instrument launches the femtosecond laser of 1000Hz repetition rates, the sweep speed of three-D electric translation stage<2000μm/s.
The multiplication factor of microcobjective is 5～100, and the laser being focused has the power of 1mW～8mW.
The multiplication factor of the microcobjective is 20.
The laser that laser instrument is launched is thrown to dichroscope through variable attenuator.
The positioning precision of the three-D electric translation stage is better than 1 μm.
The present invention is comprised the following steps based on the cutting method of the optical fiber cleaver of ultra-short pulse laser：
Microflute, Ran Houcong are formed on optical fiber by fixed point irradiation or along set angle scanning first with the laser for focusing on
The opposite face of microflute applies stress perpendicular to fiber axis makes optical fiber split along microflute, completes cutting.
Specifically comprise the following steps：Step one, on three-D electric translation stage setting angle rotation platform, and by optical fiber
It is fixed on angle rotation platform；Step 2, the focal position that microcobjective is observed by imaging len and ccd detector, will
The position to be cut of optical fiber is moved to focus；Step 3, open laser instrument make Laser emission, using microcobjective by Laser Focusing extremely
On optical fiber, make laser that microflute is cut out on optical fiber along set angle scanning laser or moving three dimension motorized precision translation stage；Step 4,
The opposite side that beam is moved to microflute is broken by band is reeded, make microflute alignment break beam upper groove center and with the side of microflute
To parallel, pushed perpendicular to fiber axis jacking row using beam is broken, make optical fiber fracture, complete cutting.
Compared with prior art, cutter sweep of the present invention and cutting method can realize micron amount on various material optical fiber
Level measured length and the cutting of high accuracy special angle, including the glass optical fiber such as single mode or multimode silica fibre, tellurate, active light
Fine, real core or Hollow-Core Photonic Crystal Fibers, sapphire fiber etc..When can avoid machine cuts to Hollow-Core Photonic Crystal Fibers
Pressure so as to protecting micro-structural.Laser ablation depth of mini longitudinal channels is far smaller than fibre cladding radius, away from fibre core, without ablation resultant
Fiber end face is affected such that it is able to cut out the fiber end face of cleaning；Performed etching using ultra-short pulse laser, without the need for as long
Need to select optical maser wavelength according to material during pulse laser machining, it is often more important that long pulse or continuous laser can be avoided to add
Because the fiber end face that fuel factor causes deforms in work.Seen using high accuracy three-dimensional motorized precision translation stage and imaging system auxiliary
Examine, can accurately set the cutting position of optical fiber, angle rotation platform can arbitrarily adjust fiber angle, the apparatus structure letter
It is single, it is easy to operate.
Description of the drawings
The structural representation of Fig. 1 optical fiber cleavers of the present invention；
Laser scanning schematic diagram during Fig. 2 fiber cuts of the present invention；
Schematic diagram is broken after Fig. 3 fiber cuts of the present invention；
Fig. 4 (a) present invention breaks part overall structure diagram；
Fig. 4 (b) present invention breaks the left view of beam；
Fig. 4 (c) present invention breaks the top view of beam；
The fiber end face scanning electron microscopy SEM image that Fig. 5 perpendicular cuts SMF-28 silica fibres of the present invention are obtained；
The SEM image of the fiber end face that Fig. 6 perpendicular cuts reality core photonic crystal fibers of the present invention are obtained；
The SEM image of the fiber end face that Fig. 7 perpendicular cuts Hollow-Core Photonic Crystal Fibers of the present invention are obtained；
Processing end face result optical microphotograph side of Fig. 8 (a) present invention cutting Hollow-Core Photonic Crystal Fibers with 15 ° of inclinations angle
View；
Processing end face result optical microphotograph of Fig. 8 (b) present invention cutting Hollow-Core Photonic Crystal Fibers with 15 ° of inclinations angle is just
View.
In accompanying drawing：1. laser instrument；2. laser；3. optical shutter；4. variable attenuator；5. dichroscope；6. microcobjective；
7.V type groove optical fiber magnetic fixtures；8. optical fiber；9. angle rotation platform；10. three-D electric translation stage；11. controllers；12. imagings
Lens；13.CCD detectors；14. computers；15. microflutes；16. break beam；17. break beam console；18. lighting sources.
Specific embodiment
Below in conjunction with the accompanying drawings the present invention is described in further detail.
Referring to Fig. 1, optical fiber cleaver of the present invention based on ultra-short pulse laser includes being arranged on three-D electric translation stage
Angle rotation platform 9 on 10, fixes optical fiber 8 on angle rotation platform 9, be provided with angle rotation platform 9 for fixing light
Fine 8 V-groove optical fiber magnetic fixture 7, and it is separately installed with a V-groove optical fiber in the position both sides to be cut on the surface of optical fiber 8
Magnetic fixture 7.The top of optical fiber 8 is provided with microcobjective 6, and the laser 2 that laser instrument 1 is launched is reflexed to through dichroscope 5
Microcobjective 6, microcobjective 6 is focused the surface of rear cutting optical fibre 8 to laser 2.The laser 2 that laser instrument 1 is launched is passed through
Variable attenuator 4 is thrown to dichroscope 5.The top of dichroscope 5 is provided with the imaging len for observing the focal position of microcobjective 6
12 and ccd detector 13, the measurement data of ccd detector 13 is connected to the input of computer 14 and exports to its display end and shows
Show, constitute imaging system；Optical shutter 3 is installed, optical shutter 3 is with three-D electric translation stage 10 respectively through control on laser instrument 1
Device processed 11 connects computer 14, and the input of computer 14 receives the focal position imaging data that ccd detector 13 is observed.Three
Dimension motorized precision translation stage 10 and angle rotation platform 9 have the objective table with light hole, and be provided with below objective table for
The lighting source 18 that imaging fiber is illuminated when observing.The laser 2 that the cutter sweep laser instrument 1 is launched is 1000Hz repetitions
The femtosecond laser of frequency, the sweep speed of three-D electric translation stage 10<2000μm/s.The multiplication factor of microcobjective 6 be 5～
100,20 times are typically selected, the laser 2 that laser instrument 1 is launched power with 1mW～8mW after variable attenuator 4.Three
The positioning precision of dimension motorized precision translation stage 10 is better than 1 μm.
Referring to Fig. 2,3, fiber angle cutting method of the present invention based on ultra-short pulse laser is comprised the following steps：
1) optical fiber 8 is fixed on three-D electric translation stage 10；The two ends of optical fiber 8 are consolidated using V-groove optical fiber magnetic fixture 7
It is scheduled on three-D electric translation stage 10, two ends slightly firmly make optical fiber 8 not bend when fixed, are fixed with free state.
2) fiber position is observed using imaging system, moving fiber 8 makes laser 2 focus on the upper surface of optical fiber 8, utilizes three
The dimension moving fiber 8 of motorized precision translation stage 10 makes laser 2 be directed at position to be cut.The focus of laser 2 is in vertical laser transmission direction plane
The demarcation in advance in two-dimentional field of view of interior position, depth of focus position with the top of optical fiber 8 in imaging systems clearly into
Image position is set to reference, according to processing result adjusting and optimizing.Damage threshold of the energy of laser 2 less than optical fiber 8 in aforesaid operations.
3) laser instrument 1 of ultrashort pulse is opened, ultra-short pulse laser is focused on optical fiber 8 using microcobjective 6, set
Good platform rate travel and laser power, optical fiber 8 is moved to the starting point of microflute to be etched 15 using three-D electric translation stage 10,
Automatically controlled optical shutter 3 is opened, the irradiation of laser 2 is made on optical fiber 8, while three-D electric translation stage 10 is entered along the direction of setting
Row scanning, in the surface etch of optical fiber 8 microflute 15, scanned closing optical shutter 3 are gone out.
4) microflute 15 will be carried and will break the opposite face of microflute 15 that beam 16 is moved to optical fiber, using breaking beam 16 from microflute 15
Opposite face it is vertically fine with fiber axis press polish, make optical fiber fracture, complete cutting；
Referring to Fig. 4 (a), Fig. 4 (b), Fig. 4 (c), the beam 16 that breaks of cutter sweep of the present invention is mounted in and breaks beam console 17
On, it is miniature five axles control platform to break beam console 17, and the beam 16 that breaks with microflute 15 is moved into optical fiber microflute 15
Opposite side, rotation breaks the angle of beam 16 makes the microflute 15 that optical fiber 8 cuts out parallel with the groove for breaking beam 16, and regulation breaks beam
16 position is directed at the etching microflute 15 on optical fiber 8 and breaks beam near center location, and movement breaks beam 16 makes its top pressure optical fiber 8
Until optical fiber 8 disconnects, aforesaid operations are completed under the auxiliary of imaging system.
Embodiment 1
It is specific as follows as a example by the present embodiment is to cut quartzy SMF-28 optical fiber：
Original material：Silica fibre SMF-28；
Ultra-short pulse laser：50fs, 800nm, 1000Hz；
What SMF-28 fiber perpendiculars cut is elaborated as follows：
(1) optical fiber 8 is fixed on motorized precision translation stage 10, using fixing with V-groove optical fiber magnetic fixture 7；
(2) select 20 ×, the microcobjective 6 of numerical aperture 0.45, in imaging len 12 and the auxiliary observation of ccd detector 13
Under, the starting point of optical fiber cutting position is moved into the focal position of the Jing microcobjectives 6 of femtosecond laser 2, adjust three-D electric and put down
Moving stage 10, determines the top of optical fiber 8 blur-free imaging in imaging systems, and the coordinate by the position in Laser Transmission axial direction Z axis
Justice is 0, is defined as bearing near microcobjective direction, is defined as just away from microcobjective direction.
(3) optical fiber 8 is set into 20 μm in Z axis position using three-D electric translation stage 10, is made according to scanning mobile platform
Laser alignment groove location starting point to be etched.Laser power is set to 2mW, and sweep speed is set to 100 μm/s.Open optical shutter 3
Femtosecond laser 2 is set to focus on optical fiber 8 through microcobjective 6, while driving optical fiber 8 by programme-control three-D electric translation stage 10
Along the movement of the axial direction of vertical fiber 8, the microflute 15 that length is 60 μm is etched on optical fiber 8.
(4) break beam console 17 and make to break groove on beam 16 from laser ablation by adjusting under imaging system auxiliary
The microflute 15 of the opposite face alignment etching of position, groove is parallel with the direction of microflute 15, and the centre bit of the alignment indentation of microflute 15
Put.Movement breaks the top pressure optical fiber of beam 16 makes it fracture, and completes the cutting of optical fiber 8.
Referring to Fig. 5, it can be seen that the fiber end face for cutting out is smooth from figure, without ablation debris pollution.Edge
Place's etching depth is less than 20 μm, and ablated area will not be produced away from fibre core transmission mould field region to the mould field for transmitting laser in optical fiber
It is raw to affect.
Embodiment 2
Original material：Real core photonic crystal fiber；
Ultra-short pulse laser：50fs, 800nm, 1000Hz；
(1) respective process of the fixed reference embodiment 1 of optical fiber.
(2) respective process of the relative position method of adjustment reference implementation example 1 of optical fiber 8 and the focus point of laser 2.
(3) optical fiber 8 is set into 20 μm in Z axis position using three-D electric translation stage 10, is made according to scanning mobile platform
The starting point of laser alignment groove location to be etched.Laser power is set to 2mW, and sweep speed is set to 100 μm/s.Open optical shutter
3 make femtosecond laser 2 focus on optical fiber through microcobjective, while driving optical fiber along vertical by programme-control three-D electric translation stage
The axial direction of straight optical fiber 8 is moved, and the microflute 15 that length is 60 μm is etched on optical fiber.
(4) break beam console 17 and make to break groove on beam 16 from laser ablation by adjusting under imaging system auxiliary
The microflute 15 of the opposite face alignment etching of position, groove 15 is parallel with the direction of microflute, and the centre bit of microflute alignment indentation 15
Put.Movement breaks the top pressure optical fiber 8 of beam 16 makes it fracture, and completes fiber cut.
Referring to Fig. 6, it can be seen that the fiber end face for cutting out is smooth from figure, without ablation debris pollution.Edge
Place's etching depth is less than 20 μm, will not produce impact to the mould field for transmitting laser in optical fiber.Emptying aperture structure not damaged on end face.
Embodiment 3
Original material：Hollow-Core Photonic Crystal Fibers；
Ultra-short pulse laser：50fs, 800nm, 1000Hz；
(1) respective process of the fixed reference embodiment 1 of optical fiber 8.
(2) respective process of the relative position method of adjustment reference implementation example 1 of optical fiber 8 and the focus point of laser 2.
(3) optical fiber is set into 20 μm in Z axis position using three-D electric translation stage 10, makes to swash according to scanning mobile platform
Optical registration groove location starting point to be etched.Laser power is set to 1.5mW, and sweep speed is set to 100 μm/s.Open optical shutter 3
Femtosecond laser 2 is set to focus on optical fiber 8 through microcobjective 6, while driving light by programme-control three-D electric translation stage 10
Fine 8, along the movement of the axial direction of vertical fiber 8, etch the microflute 15 that length is 60 μm on optical fiber 8.
(4) break beam console 17 and make to break groove on beam 16 from laser ablation by adjusting under imaging system auxiliary
The microflute 15 of the opposite face alignment etching of position, groove is parallel with the direction of microflute 15, and the centre bit of the alignment indentation of microflute 15
Put.Movement breaks the top pressure optical fiber 8 of beam 16 makes it fracture, and completes the cutting of optical fiber 8.
Referring to Fig. 7, it can be seen that the fiber end face for cutting out is smooth from figure, without ablation debris pollution.Edge
Place's etching depth is less than 20 μm, will not produce impact to the mould field for transmitting laser in optical fiber.Emptying aperture structure not damaged on end face.
Embodiment 4
Original material：Hollow-Core Photonic Crystal Fibers, incline 15 ° of cuttings；
Ultra-short pulse laser：50fs, 800nm, 1000Hz；
(1) respective process of the fixed reference embodiment 1 of optical fiber 8, fixation is rotated after completing using angle rotation platform 9
Optical fiber 8 so that the axis direction of optical fiber 8 and X-axis angle are 15 °.
(2) respective process of the relative position method of adjustment reference implementation example 1 of optical fiber 8 and the focus point of laser 2.
(3) optical fiber 8 is set into 20 μm in Z axis position using three-D electric translation stage 10, is made according to scanning mobile platform
Laser alignment groove location starting point to be etched.Laser power is set to 1.5mW, and sweep speed is set to 100 μm/s.Open optical shutter
3 make femtosecond laser 2 focus on optical fiber 8 through microcobjective, while driving optical fiber 8 by programme-control three-D electric translation 10
Along direction initialization movement, the microflute 15 that length is 60 μm is etched on optical fiber 8.
(4) angle for breaking beam 16 by rotation under imaging system auxiliary makes to break groove on beam 16 from laser ablation
The microflute 15 of the opposite face alignment etching of position, groove is parallel with the direction of microflute 15, and the centre bit of the alignment indentation of microflute 15
Put.Movement breaks the top pressure optical fiber 8 of beam 16 makes it fracture, and completes the cutting of optical fiber 8.
Referring to Fig. 8 (a), Fig. 8 (b), optical fiber cutting method of the present invention is set using the femtosecond laser for focusing on optical fiber surface edge
Determine angle and cut out microflute, then using beam is broken from microflute opposite side top pressure optical fiber, make optical fiber split along microflute direction, it is real
Now vertical or angle cutting.The method is capable of achieving the micron dimension measured length and high accuracy special angle of various material optical fiber and cuts
Cut.The fiber end face obtained using the method cutting is smoothed, and without ablation resultant, is particularly well-suited to the special fiber with micro-structural
Cutting.
The above, is only presently preferred embodiments of the present invention, and not the present invention is imposed any restrictions, every according to the present invention
Any simple modification, change and equivalent structure transformation that technical spirit is made to above example, still fall within skill of the present invention
Within the protection domain of art scheme.
Claims (10)
1. a kind of optical fiber cleaver based on ultra-short pulse laser, it is characterised in that：Including being arranged on three-D electric translation stage
(10) the angle rotation platform (9) on, fixes optical fiber (8) on angle rotation platform (9)；It is provided with aobvious above the optical fiber (8)
Speck mirror (6), the laser (2) that laser instrument (1) is launched reflexes to microcobjective (6), microcobjective through dichroscope (5)
(6) surface of rear cutting optical fibre (8) is focused to laser (2)；Dichroscope (5) top is provided with for observing microcobjective
(6) imaging len (12) and ccd detector (13) of focal position；Optical shutter (3) is installed, optics is fast on laser instrument (1)
Door (3) is connected computer (14), the input of computer (14) with three-D electric translation stage (10) respectively through controller (11)
Receive ccd detector (13) focus location data that observes and output display on its screen.
2. the optical fiber cleaver of ultra-short pulse laser is based on according to claim 1, it is characterised in that：Described three-dimensional electricity
Dynamic translation stage (10) and angle rotation platform (9) with the objective table with light hole, and be provided with below objective table for
The lighting source (18) that imaging fiber is illuminated when observing.
3. the optical fiber cleaver of ultra-short pulse laser is based on according to claim 1, it is characterised in that：Described angle rotation
Turn that V-groove optical fiber magnetic fixture (7) for fixing optical fiber (8) is installed on platform (9), and in the to be cut of optical fiber (8) surface
Cut position both sides and be separately installed with V-groove optical fiber magnetic fixture (7).
4. the optical fiber cleaver of ultra-short pulse laser is based on according to claim 1, it is characterised in that：Laser instrument (1) is sent out
The laser (2) of injection for 1000Hz repetition rates femtosecond laser, the sweep speed of three-D electric translation stage (10)<2000μm/
s。
5. the optical fiber cleaver of ultra-short pulse laser is based on according to claim 1, it is characterised in that：Microcobjective (6)
Multiplication factor be 5～100, the power of (2) with 1mW～8mW laser being focused.
6. the optical fiber cleaver of ultra-short pulse laser is based on according to claim 5, it is characterised in that：Microcobjective (6)
Multiplication factor be 20.
7. the optical fiber cleaver of ultra-short pulse laser is based on according to claim 1, it is characterised in that：Laser instrument (1) is sent out
The laser (2) of injection is thrown to dichroscope (5) through variable attenuator (4).
8. the optical fiber cleaver of ultra-short pulse laser is based on according to claim 1, it is characterised in that：The three-D electric
The positioning precision of translation stage (10) is better than 1 μm.
9. a kind of usage right requires the cutting method of the optical fiber cleaver described in 1 based on ultra-short pulse laser, and its feature exists
In, including：First with the laser (2) for focusing on by pinpointing irradiation or forming microflute on optical fiber (8) along set angle scanning
(15), then applying stress perpendicular to fiber axis from the opposite face of microflute (15) makes optical fiber (8) split along microflute, completes cutting.
10. cutting method according to claim 9, it is characterised in that comprise the following steps：
Step one, on three-D electric translation stage (10) setting angle rotation platform (9), and by optical fiber (8) be fixed on angle rotation
Turn on platform (9)；Step 2, the focal position that microcobjective (6) is observed by imaging len (12) and ccd detector (13),
The position to be cut of optical fiber (8) is moved into focus；Step 3, opening laser instrument (1) launch laser (2), using microcobjective
(6) laser (2) is focused on optical fiber (8), makes to swash along set angle scanning laser (2) or moving three dimension motorized precision translation stage (10)
Light (2) cuts out microflute (15) on optical fiber (8)；Step 4, microflute (15) will be moved to the reeded beam (16) that breaks
Opposite side, makes microflute (15) alignment break the center of beam (16) upper groove and parallel with the direction of microflute (15), using breaking beam
(16) push perpendicular to fiber axis jacking row, make optical fiber fracture, complete cutting.
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| CN201710097592.7A CN106624389A (en) | 2017-02-22 | 2017-02-22 | Optical fiber cutting device and method based on ultra-short pulse lasers |
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