CN110361397B - AOI detection equipment capable of carrying out theta axis alignment in side double-clamp driving mode - Google Patents
AOI detection equipment capable of carrying out theta axis alignment in side double-clamp driving mode Download PDFInfo
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- CN110361397B CN110361397B CN201810426700.5A CN201810426700A CN110361397B CN 110361397 B CN110361397 B CN 110361397B CN 201810426700 A CN201810426700 A CN 201810426700A CN 110361397 B CN110361397 B CN 110361397B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8851—Scan or image signal processing specially adapted therefor, e.g. for scan signal adjustment, for detecting different kinds of defects, for compensating for structures, markings, edges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/89—Investigating the presence of flaws or contamination in moving material, e.g. running paper or textiles
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/956—Inspecting patterns on the surface of objects
- G01N21/95607—Inspecting patterns on the surface of objects using a comparative method
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N2021/0106—General arrangement of respective parts
- G01N2021/0112—Apparatus in one mechanical, optical or electronic block
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2201/00—Features of devices classified in G01N21/00
- G01N2201/02—Mechanical
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Abstract
The invention is an AOI (automated Optical inspection) inspection apparatus including a conveying device for moving an inspection object along a longitudinal direction of an inspection stage and an inspection device for inspecting a defect of the inspection object, the conveying device (10) including: a rail section (100) disposed along the longitudinal direction of the inspection stage (11); a sliding unit (200) that slides along the rail section (100); a gripper unit (500) formed at an upper portion of the slide unit (200) for mounting the detection object, and a 1 st rotation unit (300) that rotates the gripper unit (500) is further formed between the gripper unit (500) and the slide unit (200).
Description
Technical Field
The present invention relates to an AOI inspection apparatus, and more particularly, to an AOI inspection apparatus that performs theta alignment (theta alignment) adjustment for comparison of long period patterns when inspecting a touch screen in a side dual gripper (single grip) structure.
Background
As shown in fig. 1, the conventional AOI inspection apparatus having a side double gripper structure includes a transport device including: the detection device comprises a pair of rails arranged oppositely along the X-axis direction, a movable body formed on the rails and moving along the rails, and a clamper formed on the movable body and connected with two ends of a detection object.
Since the above-described conventional AOI inspection apparatus is a conveyance system that does not perform the θ -axis alignment correction, the inspection object mounted on the gripper is conveyed in a twisted state, and the squareness between the inspection apparatus and the inspection object is reduced.
Therefore, when the long-period pattern comparison is performed, the squareness between the detection object body and the detection device is reduced, and a False Defect phenomenon (False Defect) occurs.
Disclosure of the invention
Technical problem to be solved by the invention
In order to solve the above problems, the present invention provides an AOI inspection apparatus, which compensates for the conventional problem of False Defect occurrence by adjusting the θ axis alignment of a touch screen when performing a long period pattern comparison inspection of the touch screen in a side dual-gripper driving manner.
However, the parent of the present invention is not limited to the above-mentioned objects, and those skilled in the art of the present invention should understand other objects not to be mentioned.
Technical scheme for solving problems
In order to achieve the above object, the present invention provides an AOI (automated Optical inspection) inspection apparatus including a conveying device that moves an inspection object along a longitudinal direction of an inspection stage and an inspection apparatus that inspects a defect of the inspection object, the conveying device 10 including: a rail portion 100 arranged along a longitudinal direction of the inspection stage 11; a sliding unit 200 sliding along the rail part 100; and a clamper 500 formed at an upper portion of the slide unit 200, for mounting the detection object.
Further, a 1 st rotating unit 300 for rotating the clamper 500 to adjust the θ axis alignment of the detection object is formed between the clamper 500 and the sliding unit 200.
Thus, the θ axis of the detection target body is aligned and conveyed, and the detection target body is moved while being positioned at the center position.
The slide unit 200 is formed with an X-axis moving plate 210 that is moved along the rail part 100 by a predetermined driving means.
Also, the 1 st rotation unit 300 includes: a 1 θ -axis driving unit 310 formed on an upper portion of the X-axis moving plate 210; the 1 st θ -axis rotation plate 320 is formed above the 1 st θ -axis driving unit 310, and is rotated by the driving of the 1 st θ -axis driving unit 310.
The 1 st θ -axis driving unit 310 includes: a 1 st driving part 311 coupled to an upper surface of the X-axis moving plate 210 such that the 1 st θ -axis rotating plate 320 is driven in a longitudinal direction of the inspection stage 11; 1R guide rails 312 coupled to an upper surface of the X-axis moving plate 210, having a predetermined radius of curvature, and symmetrically formed at both sides of the 1 st driving part 311; a 1 st guide 313 coupled to a lower surface of the 1 st θ -axis rotation plate 320 and moved along the 1 st R guide 312 by the movement of the 1 st θ -axis rotation plate 320; the crosshead bearings 314 are formed in one or more number, and are coupled to an upper surface of the X-axis moving plate 210 to support a load.
The 1 st driving unit 311 includes: the 1 st motor is a power source; a 1 st linear motion unit 311a converting the power of the 1 st motor into a linear motion; a 1 st rotation unit 311c formed under the 1 st theta axis rotation plate 320 together with the 1 st R guide 312, and converting a linear motion into a rotational motion so that the 1 st theta axis rotation plate 320 moved in the longitudinal direction of the inspection stage 11 by the 1 st linear motion unit 311a is rotated; and a 1 st medium moving part 311b formed between the 1 st linear moving part 311a and the 1 st rotational moving part 311c, for smoothly rotating the 1 st θ -axis rotation plate 320 when the linear motion of the 1 st θ -axis rotation plate 320 is converted into a rotational motion.
The 1 st linear motion unit 311a includes: a 1 st ball screw coupled to the 1 st motor and driven to rotate by the motor; a 1 st ball nut coupled to the 1 st ball screw and moved by rotation of the 1 st ball screw; and a 1LM guide which is symmetrically arranged on both sides in parallel with the axial direction of the 1 st ball screw.
The 1 st medium moving unit 311b includes: a 1 st medium coupling plate coupled to upper portions of the 1 st ball nut and the 1 st LM guide; and a 1 st cross LM guide coupled to an upper portion of the 1 st medium coupling plate and arranged in a direction perpendicular to an axial direction of the 1 st ball screw.
Further, the 1 st rotation moving part 311c includes: a 1 st rotation coupling plate coupled with an upper portion of the 1 st cross LM guide; and a 1 st rotation circular plate coupled to an upper portion of the 1 st rotation coupling plate, coupled to a lower surface of the 1 st θ -axis rotation plate 320, and rotated when the 1 st θ -axis rotation plate 320 moves in a longitudinal direction of the inspection stage 11.
In addition, the 1 θ -axis rotation plate 320 has stepped portions 321 having different heights on one side and the other side with respect to the center of the 1 θ -axis rotation plate 320.
A 2 nd rotation unit 400 is formed on an upper lower surface 323 of the step 321, i.e., on the 1 θ -axis rotation plate 320 side.
At this time, the 2 nd rotation unit 400 includes: a 2 θ -axis driving unit 410 formed above the upper lower surface 323 of the 1 θ -axis rotation plate 320; the 2 θ -axis rotation plate 420 is formed above the 2 θ -axis driving unit 410, and is rotated by the driving of the 2 θ -axis driving unit 410.
The 2 θ -th axis driving unit 410 includes: a 2 nd driving unit 411 coupled to an upper lower surface 323 of the 1 theta axis rotation plate 320 such that the 2 theta axis rotation plate 420 is driven in a longitudinal direction of the inspection stage 11; a 2R guide rail 412 coupled to the upper lower surface 323 of the 1 θ -axis rotating plate 320, having a predetermined radius of curvature, and symmetrically formed at both sides of the 2 nd driving part 411; the 2 nd guide 413 is coupled to a lower surface of the 2 theta axis rotation plate 420, and moves along the 2R guide 412 by the movement of the 2 theta axis rotation plate 420.
The 2 nd driving unit 411 includes: the 2 nd motor is a power source; a 2 nd linear motion unit 411a for converting the power of the 2 nd motor into a linear motion; a 2 nd rotation unit 411c formed under the 2 theta axis rotation plate 420 together with the 2 nd guide rail 412, for converting a linear motion into a rotational motion so as to rotate the 2 theta axis rotation plate 420 moved in the longitudinal direction of the inspection stage 11 by the 2 nd linear motion unit 411 a; and a 2 nd medium moving part 411b formed between the 2 nd linear moving part 411a and the 2 nd rotational moving part 411c, for smoothly rotating the 2 theta axis rotating plate 420 when the linear motion of the 2 theta axis rotating plate 420 is converted into the rotational motion.
In this case, the 2 nd linear motion part 411a includes: a 2 nd ball screw coupled to the 2 nd motor and rotated by the motor drive; a 2 nd ball nut coupled to the 2 nd ball screw and moved by rotation of the 2 nd ball screw; and 2LM guides symmetrically arranged on both sides in parallel to the axial direction of the 2 nd ball screw.
Also, the 2 nd medium moving part 411b includes: a 2 nd medium coupling plate coupled to upper portions of the 2 nd ball nut and the 2 nd LM guide; and a 2 nd cross LM guide coupled to an upper portion of the 2 nd medium coupling plate and arranged in a direction perpendicular to an axial direction of the 2 nd ball screw.
Also, the 2 nd rotation movement part 411c includes: a 2 nd rotation coupling plate coupled with an upper portion of the 2 nd cross LM guide; and a 2 nd rotation circular plate coupled to an upper portion of the 2 nd rotation coupling plate, coupled to a lower surface of the 2 theta axis rotation plate 420, and rotated when the 2 theta axis rotation plate 420 is moved in a longitudinal direction of the inspection station 11.
Also, the gripper section 500 includes: a 1 st clamper unit 510 formed on the upper surface 322 of the other side of the 1 st θ -axis rotation plate 320; and a 2 nd clamper 520 formed on the 2 nd theta axis rotation plate 420.
Accordingly, the object to be detected formed on the 1 st gripper unit 510 or the object to be detected formed on both the 1 st gripper unit 510 and the 2 nd gripper unit 520 is driven to perform the θ -axis alignment adjustment by the 1 st rotating unit 300.
Then, the 1 st object M1 and the 2 nd object M2 formed in the 1 st gripper unit 510 and the 2 nd gripper unit 520, respectively, are moved in a state where the 1 st object M1 and the 2 nd object M2 are positioned at the center positions by driving the 1 st rotating means 300 to adjust the θ -axis alignment of the 1 st object M1 and then driving the 2 nd rotating means 400 to adjust the θ -axis alignment of the 2 nd object M2.
The 1 st and 2 nd gripper units 510 and 520 are formed with vacuum plates VP that are coupled to the upper surface 322 of the 1 st and 2 nd axis- rotation plates 320 and 420 to vacuum-absorb the detection object.
The features and benefits of the present invention will become more apparent from the following detailed description, which proceeds with reference to the accompanying figures.
Further, the terms and words used in the present specification and claims cannot be interpreted in a general and dictionary meaning, and are interpreted in a meaning and concept conforming to the technical idea of the present invention based on the principle that the inventor can appropriately define the concept of the terms in order to explain his own invention in an optimal manner.
ADVANTAGEOUS EFFECTS OF INVENTION
As described above, the present invention has the following effects: when long-period pattern comparison detection of the touch screen is carried out in a side double-holder driving mode, the problem of False Defect in the prior art is solved through theta axis alignment adjustment of the touch screen, and therefore the productivity is improved through effective production management.
Drawings
FIG. 1 is a perspective view of an AOI inspection apparatus of a conventional side dual gripper configuration;
FIG. 2 is a plan view of an AOI inspection apparatus mounted with an inspection object according to the present invention;
fig. 3 is a plan view of an AOI inspection apparatus mounted with a 1 st inspection object and a 2 nd inspection object according to the present invention;
FIG. 4 is a perspective view of a conveyor formed in the AOI inspection apparatus of the present invention;
FIG. 5 is an exploded view of a conveyor formed in the AOI inspection apparatus of the present invention;
fig. 6 is an exploded view of a driving part formed at a rotating unit of the present invention;
FIG. 7 is a plan view schematically showing a 1 theta axis driving part according to the present invention;
fig. 8 is a plan view schematically showing a 2 theta axis driving part according to the present invention.
Description of the symbols
10 conveying device 100 track part
200 sliding unit 210X-axis moving plate
300 st rotation unit 310 st theta axis driving part
311 1 st drive part 311a 1 st linear motion part
311b 1 st Medium moving part 311c 1 st rotating part
312 1 st R guide rail 313 1 st guide block
314 crosshead bearing 320 1 theta axis rotation plate
321 step 322 on the upper part
323 upper and lower 400 nd rotation unit 2
410 2 theta axis driving part 411 2 nd driving part
412 nd 2R guide rail 413 nd 2 nd guide block
420: 2 theta axis rotating plate 500: clamper part
510 st gripper part 520 nd gripper part 2
M is motor GP is medium combination board
RP rotary combined plate TP rotary circular plate
BS ball screw VP vacuum plate
BSN ball nut LM 1LM guide
LM2 cross LM guide
Detailed Description
Preferred embodiments of the present invention are described below with reference to the accompanying drawings. In this process, the thickness of the lines or the size of the constituent elements illustrated in the drawings may be exaggerated for clarity and convenience of description.
The term to be described later is defined according to the function of the present invention, and varies according to the intention of the user or the operator or the convention. Therefore, the terms used above are to be defined based on the entire contents of the present specification.
The following embodiments are not intended to limit the scope of the present invention, and are merely exemplary matters of the constituent elements presented in the claims of the present invention, and are included in the technical spirit of the present invention as a whole, and include the constituent elements that can be replaced with equivalents among the constituent elements of the claims.
FIG. 2 attached hereto is a plan view of an AOI inspection apparatus mounted with an inspection object according to the present invention; FIG. 3 is a plan view of an AOI inspection apparatus mounted with the 1 st inspection object M1 and the 2 nd inspection object M2 according to the present invention; FIG. 4 is a perspective view of a conveyor formed in the AOI inspection apparatus of the present invention; FIG. 5 is an exploded view of a conveyor formed in the AOI inspection apparatus of the present invention; fig. 6 is an exploded view of a driving part formed at a rotating unit of the present invention; FIG. 7 is a plan view schematically showing a 1 theta axis driving part according to the present invention; fig. 8 is a plan view schematically showing a 2 theta axis driving part according to the present invention.
The present invention relates to a detection apparatus and system for detecting defects by positioning an object to be detected at a correct position by forming a structure for adjusting a theta axis in a side double-gripper structure as a touch panel separation detection apparatus in an aoi (automated Optical inspection) apparatus.
As illustrated below in fig. 2, the AOI inspection apparatus according to the present invention is formed with a body transporting device that moves an inspection object along a longitudinal direction of an inspection stage and an inspection apparatus (not shown) that inspects a defect of the inspection object body.
In this case, the transport apparatus 10 includes: a rail portion 100 arranged along the longitudinal direction of the inspection stage 11; a sliding unit 200 sliding along the rail part 100; a clamper 500 formed at an upper portion of the slide unit 200 for mounting the detection object.
Further, a 1 st rotating unit 300 for rotating the clamper section 500 to adjust the θ axis alignment of the detection object is formed between the clamper section 500 and the sliding unit 200.
Thus, there is provided an AOI inspection apparatus that adjusts the θ -axis alignment and conveyance of the inspection object body so that the inspection object body moves in a state of being at the center position.
The rail portion 100 is formed with a pair of rails disposed to face each other along the upper outer contour of the inspection stage 11.
The slide unit 200 is formed with an X-axis moving plate 210 that moves along the rail unit 100 by a predetermined driving means (not shown).
Also, the 1 st rotation unit 300 includes: a 1 theta-axis driving part 310 formed on the upper part of the X-axis moving plate 210; and a 1 theta axis rotation plate 320 formed on the upper portion of the 1 theta axis driving part 310 and rotated by the driving of the 1 theta axis driving part 310.
The 1 st θ -axis driving unit 310 includes: a 1 st driving part 311, a 1 st R guide 312, a 1 st guide 313, and a crosshead bearing 314.
The 1 st driving unit 311 is coupled to the upper surface of the X-axis moving plate 210, and drives the 1 st θ -axis rotating plate 320 in the vertical direction of the inspection stage 11.
The 1 st R guide rails 312 are coupled to the upper surface of the X-axis moving plate 210, have a predetermined radius of curvature R1, and are symmetrically formed on both sides of the 1 st driving unit 311.
The 1 st guide 313 is coupled to a lower surface of the 1 st θ -axis rotating plate 320, and moves along the 1 st R guide 312 by the movement of the 1 st θ -axis rotating plate 320.
The crosshead bearing 314 is coupled to the upper surface of the X-axis moving plate 210, and preferably, at least one crosshead bearing is formed to support the load of each device disposed above the 1 st driving unit 311.
The 1 st driving unit 311 includes: the power sources include the 1 st motor, the 1 st linear motion unit 311a, the 1 st medium motion unit 311b, and the 1 st rotary motion unit 311 c.
The 1 st linear motion unit 311a converts the power of the 1 st motor into a linear motion.
The 1 st rotation unit 311c is formed under the 1 st θ -axis rotation plate 320 together with the 1 st R guide 312, and converts a linear motion into a rotational motion so that the 1 st θ -axis rotation plate 320 moved in the longitudinal direction of the inspection stage 11 by the 1 st linear motion unit 311a is rotated.
The 1 st medium moving part 311b is formed between the 1 st linear moving part 311a and the 1 st rotational moving part 311c, and allows the 1 st θ -axis rotation plate 320 to smoothly rotate when the linear motion of the 1 st θ -axis rotation plate 320 is converted into the rotational motion.
In this case, the 1 st linear motion unit 311a includes: a 1 st ball screw BS coupled to the 1 st motor M and rotated by the motor; a 1 st ball nut BSN coupled to the 1 st ball screw BS and moved by rotation of the 1 st ball screw BS; and a 1LM guide LM1 symmetrically arranged on both sides in parallel with the axial direction of the 1 st ball screw BS.
The 1 st medium moving unit 311b includes: a 1 st dielectric coupling plate GP coupled to the 1 st ball nut BSN and the 1 st LM guide LM1 at an upper portion thereof; and a 1 st cross LM guide LM2 coupled to an upper portion of the 1 st medium coupling plate GP and arranged in a direction perpendicular to an axial direction of the 1 st ball screw BS.
Further, the 1 st rotation moving part 311c includes: a 1 st rotation coupling plate RP coupled with an upper portion of the 1 st cross LM guide LM 2; and a 1 st rotation circular plate TP coupled to an upper portion of the 1 st rotation coupling plate RP, coupled to a lower surface of the 1 st θ -axis rotation plate 320, and rotated when the 1 st θ -axis rotation plate 320 moves in the longitudinal direction of the inspection stage 11.
The 1 θ -axis rotation plate 320 has a stepped portion 321 formed therein, the stepped portion having a different height from one side of the 1 θ -axis rotation plate 320 with respect to a center thereof.
A 2 nd rotation unit 400 is formed on an upper lower surface 323 of the step 321 on a lower side, i.e., the 1 θ -axis rotation plate 320 side.
At this time, the 2 nd rotation unit 400 includes: a 2 theta axis driving part 410 formed on an upper lower surface 323 of the 1 theta axis rotation plate 320; and a 2 theta axis rotation plate 420 formed on the upper portion of the 2 theta axis driving part 410 and rotated by the driving of the 2 theta axis driving part 410.
The 2 θ -th axis driving unit 410 includes: a 2 nd driving part 411, a 2 nd R guide rail 412, and a 2 nd guide block 413.
The 2 nd driving part 411 is coupled to the upper lower surface 323 of the 1 theta axis rotating plate 320 such that the 2 theta axis rotating plate 420 is driven along the longitudinal direction of the inspection stage 11.
The 2R guide rails 412 are coupled to the upper lower surface 323 of the 1 θ -axis rotating plate 320, have a predetermined radius of curvature R2, and are symmetrically formed on both sides of the 2 nd driving unit 411.
The 2 nd guide 413 is coupled to a lower surface of the 2 theta axis rotation plate 420, and moves along the 2R guide 412 by the movement of the 2 theta axis rotation plate 420.
The 2 nd driving unit 411 includes: the power sources include a 2 nd motor, a 2 nd linear motion part 411a, a 2 nd medium motion part 411b, and a 2 nd rotary motion part 411 c.
The 2 nd linear motion unit 411a converts the power of the 2 nd motor into a linear motion.
The 2 nd rotation unit 411c is formed under the 2 theta axis rotation plate 420 together with the 2 nd guide rail 412, and converts a linear motion into a rotational motion so that the 2 theta axis rotation plate 420 moved in the longitudinal direction of the inspection stage 11 by the 2 nd linear motion unit 411a is rotated.
The 2 nd medium moving part 411b is formed between the 2 nd linear moving part 411a and the 2 nd rotational moving part 411c, and allows the 2 theta axis rotating plate 420 to smoothly rotate when the linear motion of the 2 theta axis rotating plate 420 is converted into the rotational motion.
In this case, the 2 nd linear motion part 411a includes: a 2 nd ball screw coupled to the 2 nd motor and rotated by the motor drive; a 2 nd ball nut coupled to the 2 nd ball screw and moved by rotation of the 2 nd ball screw; and 2LM guides symmetrically arranged on both sides in parallel to the axial direction of the 2 nd ball screw.
Also, the 2 nd medium moving part 411b includes: a 2 nd medium coupling plate coupled to upper portions of the 2 nd ball nut and the 2 nd LM guide; and a 2 nd cross LM guide coupled to an upper portion of the 2 nd medium coupling plate and arranged in a direction perpendicular to an axial direction of the 2 nd ball screw.
Also, the 2 nd rotation movement part 411c includes: a 2 nd rotation coupling plate coupled with an upper portion of the 2 nd cross LM guide; and a 2 nd rotation circular plate coupled to an upper portion of the 2 nd rotation coupling plate, coupled to a lower surface of the 2 theta axis rotation plate 420, and rotated when the 2 theta axis rotation plate 420 is moved in a longitudinal direction of the inspection station 11.
That is, when the 1 st motor M of the 1 st driving part 311 is driven, the 1 st LM guide LM1 linearly moves by the rotation of the 1 st ball screw BS, and the 1 st medium coupling plate GP coupled to the 1 st LM guide LM1 also linearly moves.
At this time, the 1 st θ -axis rotation plate 320 is acted by the longitudinal direction of the inspection stage 11, and the 1 st guide 313 moves along the 1 st R guide 312.
The 1 st guide 313 moves along the 1 st R guide 312, so that the 1 st rotation disk TP rotates, and the 1 st θ -axis rotation plate 320 rotates accordingly.
Meanwhile, the 1 st cross LM guide LM2 is driven in a direction perpendicular to the traveling direction of the 1 st media coupling plate GP so as to buffer the linear force acting on the 1 st θ -axis rotation plate 320.
Accordingly, the 1 st θ -axis rotation plate 320 is rotated by the driving of the 1 st driving unit 311, and the θ -axis alignment of the detection target body is adjusted.
The operation principle of the 2 θ -axis rotation plate 420 is also the same as the rotation driving method of the 1 θ -axis rotation plate 320 described above, and thus a detailed description thereof is omitted.
Also, the gripper section 500 includes: a 1 st clamper part 510 formed on the upper surface 322 of the other side of the 1 st theta axis rotation plate 320; a 2 nd clamper 520 formed on the 2 nd theta axis rotation plate 420.
The 1 st and 2 nd gripper units 510 and 520 are formed with vacuum plates VP that are coupled to the upper surface 322 of the 1 st and 2 nd axis- rotation plates 320 and 420 to vacuum-adsorb the detection object.
Then, the 1 st rotating unit 300 is driven to perform the θ -axis alignment adjustment on the detection object formed in the 1 st gripper unit 510 or the detection object formed in both the 1 st gripper unit 510 and the 2 nd gripper unit 520.
The 1 st object M1 and the 2 nd object M2 formed on the 1 st gripper unit 510 and the 2 nd gripper unit 520, respectively, drive the 1 st rotating unit 300 to adjust the θ -axis alignment of the 1 st object M1
After the adjustment, the 2 nd rotating unit 400 is driven to move the 2 nd object M2 by adjusting the θ -axis alignment, whereby the 1 st object M1 and the 2 nd object M2 move at the center position.
That is, the image of the mark (mark) (not shown) engraved on the 1 st detection object M1 is acquired by a photoconductive camera (not shown) of the detection unit, and the θ -axis alignment of the 1 st detection object M1 is adjusted to a degree of distortion.
Similarly, a mark (mark) (not shown) image engraved on the 2 nd detection object M2 is acquired, and the θ -axis alignment of the 2 nd detection object M1 is adjusted by the degree of distortion so that the 1 st detection object M1 and the 2 nd detection object M2 move after being located at the center position.
That is, the 1 st gripper section 510 and the 2 nd gripper section 520 are rotated by the driving of the 1 st rotating unit 300, and the 2 nd gripper section 520 is rotated by the driving of the 2 nd rotating unit 400.
Accordingly, if the size of the object to be detected is large, one object to be detected is mounted on the 1 st gripper unit 510 and the 2 nd gripper unit 520, and the 1 st rotation unit 300 is driven to adjust the θ -axis alignment.
If the size of the object to be inspected is small, the 1 st object to be inspected M1 and the 2 nd object to be inspected M2 are attached to the 1 st gripper unit 510 and the 2 nd gripper unit 520, respectively, the 1 st rotating means 300 is driven to perform the 1 st object to be inspected M1 θ alignment adjustment, and then the 2 nd rotating means 400 is driven to perform the 2 nd object to be inspected M2 θ alignment adjustment.
This allows various sizes of detection objects to be accommodated.
Further, when the 1 st gripper unit 510 and the 2 nd gripper unit 520 are rotated by the driving of the 1 st rotating means 300 and the 2 nd rotating means 400, the 1 st detection object M1 and the 2 nd detection object M2 may collide with each other.
Therefore, the 1 st rotating means 300 is driven to rotate the 1 st gripper 510 and the 2 nd gripper 520, and the 2 nd rotating means 400 is driven to rotate the 2 nd gripper 520, whereby the 1 st detection object M1 and the 2 nd detection object M2 can be prevented from colliding with each other.
Also, the detecting apparatus according to the present invention is formed with the 1 st theta axis driving part 310 and the 2 nd theta axis driving part 410 at the upper portion of the X axis moving plate 210 at both sides, and the 1 st driving part 311 and the 2 nd driving part 411 at only one position of both sides.
The present invention has been described in detail with reference to the specific embodiments, but the present invention is not limited thereto, and those skilled in the art of the present invention can modify or improve the present invention within the technical spirit of the present invention.
The scope of the present invention is defined by the claims, and all changes and modifications that fall within the scope of the present invention are intended to be embraced therein.
Claims (8)
1. An AOI inspection apparatus as an AOI (automated Optical inspection) inspection apparatus including a conveying device that moves an inspection object body along a longitudinal direction of an inspection stage and an inspection apparatus that inspects a defect of the inspection object body,
the conveying device (10) comprises:
a rail section (100) disposed along the longitudinal direction of the inspection stage (11);
a sliding unit (200) that slides along the rail section (100);
a gripper unit (500) formed on the upper part of the slide unit (200) and used for mounting the detection object body,
a 1 st rotating unit (300) that rotates the gripper unit (500) to adjust the alignment of the theta axis of the detection target object, and that moves the detection target object while the detection target object is positioned at the center position by conveying the detection target object after adjusting the alignment of the theta axis of the detection target object is further formed between the gripper unit (500) and the sliding unit (200);
the slide unit (200) is formed with an X-axis moving plate (210) which moves along the rail part (100) by a predetermined driving means,
and, the 1 st rotation unit (300) includes:
a 1 theta-axis driving unit (310) formed on the upper portion of the X-axis moving plate (210);
a 1 theta axis rotation plate (320) formed above the 1 theta axis driving unit (310) and rotated by the driving of the 1 theta axis driving unit (310);
the 1 theta axis driving unit (310) includes:
a 1 st driving unit (311) coupled to an upper surface of the X-axis moving plate (210) such that the 1 st theta-axis rotating plate (320) is driven in a longitudinal direction of the inspection stage (11);
a 1R guide rail (312) coupled to an upper surface of the X-axis moving plate (210), having a predetermined radius of curvature, and symmetrically formed on both sides of the 1 st driving unit (311);
a 1 st guide block (313) coupled to a lower surface of the 1 st theta axis rotation plate (320) and moved along the 1 st R guide rail (312) by the movement of the 1 st theta axis rotation plate (320);
and one or more crosshead bearings (314) coupled to an upper surface of the X-axis moving plate (210) to support a load.
2. The AOI inspection apparatus of claim 1,
the 1 st drive unit (311) includes:
the 1 st motor is a power source;
a 1 st linear motion unit (311a) for converting the power of the 1 st motor into a linear motion;
a 1 st rotation unit (311c) which is formed under the 1 st theta axis rotation plate (320) together with the 1 st R guide rail (312), and converts a linear motion into a rotational motion so that the 1 st theta axis rotation plate (320) moved in a longitudinal direction of the inspection stage (11) by the 1 st linear motion unit (311a) is rotated;
and a 1 st medium moving part (311b) formed between the 1 st linear moving part (311a) and the 1 st rotational moving part (311c) to smoothly rotate the 1 st theta axis rotation plate (320) when the linear motion of the 1 st theta axis rotation plate (320) is converted into the rotational motion.
3. The AOI inspection apparatus of claim 2,
a step portion (321) having different heights on one side and the other side with respect to the center portion of the 1 theta axis rotation plate (320) is formed on the 1 theta axis rotation plate (320),
a2 nd rotation unit (400) is formed on an upper lower surface (323) of the step portion (321), that is, on the 1 theta axis rotation plate (320) side.
4. The AOI inspection apparatus of claim 3,
the 2 nd rotation unit (400) includes:
a 2 theta axis driving part (410) formed on the upper lower surface (323) of the 1 theta axis rotation plate (320);
and a 2 theta axis rotation plate (420) formed above the 2 theta axis drive unit (410) and rotated by the drive of the 2 theta axis drive unit (410).
5. The AOI inspection apparatus of claim 4,
the 2 theta axis driving unit (410) includes:
a 2 nd driving part 411 coupled to an upper lower surface 323 of the 1 theta axis rotation plate 320 so that the 2 theta axis rotation plate 420 is driven in a longitudinal direction of the inspection stage 11;
a 2R guide rail (412) coupled to an upper lower surface (323) of the 1 theta axis rotating plate (320), having a predetermined radius of curvature, and symmetrically formed on both sides of the 2 nd driving part (411);
and a 2 nd guide block (413) coupled to a lower surface of the 2 theta axis rotation plate (420), and moved along the 2R guide rail (412) by the movement of the 2 theta axis rotation plate (420).
6. The AOI inspection apparatus of claim 5,
the 2 nd driving part (411) includes:
the 2 nd motor is a power source;
a 2 nd linear motion unit (411a) for converting the power of the 2 nd motor into a linear motion;
a 2 nd rotation unit (411c) formed under the 2 theta axis rotation plate (420) together with the 2 nd guide rail (412) and converting a linear motion into a rotational motion so as to rotate the 2 theta axis rotation plate (420) moved in the longitudinal direction of the inspection stage (11) by the 2 nd linear motion unit (411 a);
and a 2 nd medium moving part (411b) formed between the 2 nd linear moving part (411a) and the 2 nd rotational moving part (411c) to smoothly rotate the 2 theta axis rotating plate (420) when the linear motion of the 2 theta axis rotating plate (420) is converted into the rotational motion.
7. The AOI inspection apparatus of claim 6,
the gripper section (500) comprises:
a 1 st clamper unit (510) formed on the upper surface (322) of the other side of the 1 theta axis rotation plate (320);
a 2 nd clamper part (520) formed at an upper portion of the 2 theta axis rotation plate (420),
and, the object to be detected formed on the 1 st gripper part (510) or the object to be detected formed on both the 1 st gripper part (510) and the 2 nd gripper part (520) drives the 1 st rotating means (300) to perform the theta axis alignment adjustment,
a 1 st object to be inspected (M1) and a 2 nd object to be inspected (M2) respectively formed on the 1 st gripper unit (510) and the 2 nd gripper unit (520) are moved in a state where the 1 st object to be inspected (M1) and the 2 nd object to be inspected (M2) are positioned at the center positions by driving the 1 st rotating means (300) to adjust the θ -axis alignment of the 1 st object to be inspected (M1) and then driving the 2 nd rotating means (400) to adjust the θ -axis alignment of the 2 nd object to be inspected (M2) to move.
8. The AOI inspection apparatus of claim 7,
the 1 st gripper unit (510) and the 2 nd gripper unit (520) are formed with Vacuum Plates (VP) that are coupled to the upper surface (322) of the 1 st θ -axis rotating plate (320) and the upper surface of the 2 nd θ -axis rotating plate (420) and vacuum-adsorb the detection target object.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR1020180041130A KR102052135B1 (en) | 2018-04-09 | 2018-04-09 | AOI inspection equipment that can adjust θ axis alignment of side dual gripper drive system |
| KR10-2018-0041130 | 2018-04-09 |
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| Publication Number | Publication Date |
|---|---|
| CN110361397A CN110361397A (en) | 2019-10-22 |
| CN110361397B true CN110361397B (en) | 2021-11-30 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201810426700.5A Active CN110361397B (en) | 2018-04-09 | 2018-05-07 | AOI detection equipment capable of carrying out theta axis alignment in side double-clamp driving mode |
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| Country | Link |
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| KR (1) | KR102052135B1 (en) |
| CN (1) | CN110361397B (en) |
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| KR20240007493A (en) | 2022-07-08 | 2024-01-16 | 디아이티 주식회사 | Alignment apparatus for flat-type inspection objects |
| KR20240009593A (en) | 2022-07-14 | 2024-01-23 | 디아이티 주식회사 | UVW stage apparatus |
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|---|---|---|---|---|
| CN101203354A (en) * | 2005-06-30 | 2008-06-18 | 株式会社安川电机 | Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same |
| KR20160085740A (en) * | 2016-07-07 | 2016-07-18 | 삼성디스플레이 주식회사 | Improved fault detection capability in-line Stage |
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| JP2602303B2 (en) * | 1987-10-30 | 1997-04-23 | 東京エレクトロン株式会社 | Moving table equipment |
| JP5061569B2 (en) * | 2006-10-12 | 2012-10-31 | 株式会社安川電機 | Alignment stage |
| KR100769034B1 (en) * | 2007-07-24 | 2007-10-22 | 유진디스컴 주식회사 | Alignment unit for display panel |
| KR101117526B1 (en) * | 2009-09-25 | 2012-03-06 | 유진디스컴 주식회사 | Apparatus for aligning lcd panel |
| KR101654819B1 (en) * | 2014-12-05 | 2016-09-06 | (주)자비스 | A Moving Stage for X-ray Inspection and An Apparatus with the Same |
| KR101827313B1 (en) * | 2017-09-19 | 2018-02-08 | 주식회사 에이치비테크놀러지 | AOI In-line stage with transport device capable of θ-axis alignment |
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2018
- 2018-04-09 KR KR1020180041130A patent/KR102052135B1/en active IP Right Grant
- 2018-05-07 CN CN201810426700.5A patent/CN110361397B/en active Active
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101203354A (en) * | 2005-06-30 | 2008-06-18 | 株式会社安川电机 | Translating/turning 2-degree-of-freedom stage device and 3-degree-of-freedom stage device using the same |
| KR20160085740A (en) * | 2016-07-07 | 2016-07-18 | 삼성디스플레이 주식회사 | Improved fault detection capability in-line Stage |
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| KR20190118025A (en) | 2019-10-17 |
| CN110361397A (en) | 2019-10-22 |
| KR102052135B1 (en) | 2019-12-04 |
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