CN110319192B - Sealing structure for sealing inner quartz tube, process equipment and assembling method - Google Patents
Sealing structure for sealing inner quartz tube, process equipment and assembling method Download PDFInfo
- Publication number
- CN110319192B CN110319192B CN201910620816.7A CN201910620816A CN110319192B CN 110319192 B CN110319192 B CN 110319192B CN 201910620816 A CN201910620816 A CN 201910620816A CN 110319192 B CN110319192 B CN 110319192B
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- sealing
- quartz tube
- inner quartz
- annular
- ring
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- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/067—Split packings
Abstract
The invention provides a sealing structure, process equipment and an assembly method for sealing an inner quartz tube, wherein the sealing structure comprises the following components: the annular mounting piece is sleeved outside the inner quartz tube, and a first boss is arranged on the inner peripheral wall of the annular mounting piece; the first sealing assembly is arranged on the first boss and used for sealing a gap between the inner peripheral wall of the annular mounting piece and the outer peripheral wall of the inner quartz tube; the annular supporting piece is detachably arranged at the bottom of the annular mounting piece and comprises a bottom support part used for supporting the inner quartz tube and a lateral supporting part arranged above the bottom support part and sleeved outside the inner quartz tube; and the second sealing assembly is arranged on the lateral supporting part, is positioned between the bottom support part and the inner quartz tube and is used for sealing a gap between the inner peripheral wall of the annular supporting part and the outer peripheral wall of the inner quartz tube. The invention effectively avoids the problems of difficult assembly, low efficiency and the like caused by gravity when the sealing component is installed from top to bottom.
Description
Technical Field
The invention relates to the field of semiconductor manufacturing, in particular to a sealing structure, process equipment and an assembly method for sealing an inner quartz tube.
Background
At present, the processing equipment widely used for synthesizing semiconductor (such as silicon carbide and gallium nitride) single crystal materials is mainly a growth furnace, and a hearth of the growth furnace is used for providing an environment with high temperature, high vacuum and high cleanliness required for synthesizing semiconductors. The hearth comprises a plurality of sealing structures used for sealing the inner quartz tube, such as an outer quartz tube, an inner quartz tube, a sealing structure and the like, wherein the sealing structures (such as a lining, a sealing ring, a sealing gasket and the like) are used for preventing water and gas in the hearth from entering the quartz tube.
In the prior art, the sealing structure for sealing the inner quartz tube mainly comprises an annular mounting part sleeved on the outer side of the inner quartz tube, an annular supporting part abutting against the bottom of the inner quartz tube and a sealing assembly for sealing the inner quartz tube, wherein the sealing assembly is arranged in a sealing groove between the annular mounting part, the annular supporting part and the inner quartz tube. In order to reduce the requirement for the assembly space for assembling the double-layer quartz tube when assembling the sealing structure, an assembly sequence of preferentially assembling the outer quartz tube and then assembling the inner quartz tube is generally adopted. In this manner, the outer quartz tube and the ring mount are fixed in position prior to assembly of the inner quartz tube and seal assembly, so that the seal assembly can only install all seal assemblies in reverse from the opening below the seal groove. Because the seal assembly adopts the reverse mounting mode from top to bottom, because the effect of gravity, the unable snap-on of seal assembly in the seal groove can only provide the support for its fixed mounting through the packing tightly of the sealing washer among the seal assembly in the seal groove to the assembly degree of difficulty has been increased.
Disclosure of Invention
The invention aims to solve at least one technical problem in the prior art, and provides a sealing structure, process equipment and an assembly method for sealing an inner quartz tube.
To achieve the object of the present invention, there is provided, in one aspect, a sealing structure for sealing an inner quartz tube, the sealing structure comprising:
the annular mounting piece is sleeved outside the inner quartz tube, and a first boss is arranged on the inner peripheral wall of the annular mounting piece;
the first sealing assembly is arranged on the first boss and used for sealing a gap between the inner peripheral wall of the annular mounting piece and the outer peripheral wall of the inner quartz tube;
the annular supporting piece is detachably arranged at the bottom of the annular mounting piece and comprises a bottom support part used for supporting the inner quartz tube and a lateral supporting part arranged above the bottom support part and sleeved outside the inner quartz tube;
and the second sealing assembly is arranged on the bottom support part, is positioned between the lateral supporting part and the inner quartz tube and is used for sealing a gap between the inner peripheral wall of the annular supporting part and the outer peripheral wall of the inner quartz tube.
Optionally, the lateral surface of the lateral support portion is attached to the annular mounting member, and the top surface of the lateral support portion is attached to the bottom surface of the first boss.
Optionally, the abutment surface of the lateral support portion and the annular mounting member has a preset slight degree.
Optionally, a second boss is provided on an inner peripheral wall of the lateral support portion, the second seal assembly being provided on the second boss.
Optionally, the quartz tube assembly further comprises an inner quartz tube gasket, wherein the inner quartz tube gasket is located between the inner quartz tube and the second boss.
Optionally, the first sealing assembly includes an inner quartz tube bushing, a first sealing ring, and a first sealing gasket, which are sequentially disposed from bottom to top.
Optionally, the first sealing assembly further comprises an inner quartz tube baffle ring, and the inner quartz tube baffle ring is arranged between the annular mounting member and the inner quartz tube bushing.
Optionally, the second sealing assembly includes a second sealing washer, a sealing retainer ring, a third sealing washer and a third sealing washer, which are sequentially arranged from bottom to top.
To achieve the object of the present invention, in still another aspect, there is provided a process apparatus including an inner quartz tube, an outer quartz tube, and a sealing structure including the above sealing structure for sealing the inner quartz tube.
In order to achieve the object of the present invention, in a third aspect, there is provided a method of assembling process equipment, applied to the process equipment, the method including:
mounting a ring-shaped mounting piece on a support beam in the middle of the process equipment, and placing a ring-shaped support piece at a specified position below the ring-shaped mounting piece;
placing an inner quartz tube sleeved with a second sealing assembly on the annular supporting piece, sequentially press-fitting the second sealing assembly from bottom to top, and sequentially installing the first sealing assembly from the upper end of the inner quartz tube;
an outer quartz tube mounting piece and an outer quartz tube are sequentially mounted, the outer quartz tube mounting piece is detachably mounted on the annular mounting piece, and the outer quartz tube is mounted on the outer quartz tube mounting piece;
and moving the annular support piece and the inner quartz tube upwards to the mounting position of the annular support piece, and detachably connecting the annular support piece and the annular mounting piece.
The invention has the following beneficial effects:
the invention provides a sealing structure for sealing an inner quartz tube, which comprises an annular mounting piece, an annular supporting piece and a first sealing assembly, wherein the inner side surface of the annular mounting piece is provided with a boss, the annular supporting piece is provided with a bottom support part and a lateral supporting part, and the first boss is provided with the first sealing assembly for sealing a gap between the inner peripheral wall of the annular mounting piece and the outer peripheral wall of the inner quartz tube; and a second sealing assembly is arranged on the lateral supporting part and between the bottom support part and the inner quartz tube and used for sealing a gap between the inner peripheral wall of the annular supporting part and the outer peripheral wall of the inner quartz tube. Because the first boss support is arranged below the first sealing assembly, and the lateral support part support is arranged below the second sealing assembly, the sealing elements can be assembled from bottom to top when the first sealing assembly and the second sealing assembly are assembled, and the problems of difficult assembly and low efficiency caused by gravity when the sealing assemblies are assembled from top to bottom in the prior art are effectively solved; meanwhile, the compressing action of the second sealing assembly can be completed outside the annular mounting part, and the problem that the assembling space is narrow and small due to the fact that the compressing of all the sealing assemblies needs to be completed inside the annular mounting part in the prior art is solved.
Drawings
FIG. 1 is a schematic diagram of an internal structure of a process apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic view of a portion A of FIG. 1;
FIG. 3 is a schematic structural view of a ring mount provided by an embodiment of the present invention;
FIG. 4 is a partial enlarged view of the structure at C in FIG. 3;
FIG. 5 is a schematic structural diagram of a ring support according to an embodiment of the present invention;
fig. 6 is a partially enlarged structural view at B in fig. 5.
Detailed Description
In order to make those skilled in the art better understand the technical solution of the present invention, the sealing structure for sealing an inner quartz tube, and the process equipment and the method for assembling the process equipment using the same according to the present invention will be described in detail below with reference to the accompanying drawings.
A sealing structure for sealing an inner quartz tube, as shown in fig. 1-6, includes an annular mounting member 110, a first seal assembly, an annular support member 140, and a second seal assembly. The annular mounting member 110 is sleeved outside the inner quartz tube 100, and a first boss 111 is arranged on the inner circumferential wall of the annular mounting member 110; a first sealing assembly provided on the first boss 111 for sealing a gap between an inner circumferential wall of the ring mount 110 and an outer circumferential wall of the inner quartz tube 100; the annular support 140 is detachably arranged at the bottom of the annular mounting part 110, and comprises a bottom support part 141 for supporting the inner quartz tube 100 and a lateral support part 142 arranged above the bottom support part 141 and sleeved outside the inner quartz tube 100; and a second sealing assembly provided on the shoe portion 142 between the lateral support portion 141 and the inner quartz tube 100 for sealing a gap between the inner circumferential wall of the ring-shaped supporter 140 and the outer circumferential wall of the inner quartz tube 100.
The sealing structure for sealing the inner quartz tube provided by the embodiment comprises an annular mounting member 110 provided with a boss on the inner side surface and an annular support member 140 provided with a bottom mounting part 141 and a lateral support part 142, and a first sealing component is arranged on the first boss 111 and used for sealing the gap between the inner peripheral wall of the annular mounting member 110 and the outer peripheral wall of the inner quartz tube 100; on the lateral support portion 142, between the base portion 141 and the inner quartz tube 100, a second sealing assembly is provided for sealing a gap between the inner circumferential wall of the annular support member 140 and the outer circumferential wall of the inner quartz tube 100. Because the first boss 111 is arranged below the first sealing assembly for supporting, and the lateral supporting part 142 is arranged below the second sealing assembly for supporting, the first sealing assembly and the second sealing assembly can be assembled with each sealing element from bottom to top, thereby effectively avoiding the problems of difficult assembly and low efficiency caused by gravity when the sealing assemblies are assembled from top to bottom in the prior art; meanwhile, the compressing action of the second sealing assembly can be completed outside the annular mounting part 110, so that the problem of narrow assembling space caused by the fact that all sealing assemblies need to be compressed inside the annular mounting part 110 in the prior art is solved.
In one embodiment, as shown in FIG. 2, the outer side of the lateral support 142 abuts the ring mount 110, and the top surface of the lateral support 142 abuts the bottom surface of the first boss 111. The outer side surface of the lateral support portion 142 is configured to be attached to the annular mounting member 110, so that the annular mounting member 110 can provide a lateral supporting force for the lateral support portion 142 and the second sealing element inside the lateral support portion, and the second sealing element can be more conveniently mounted. The top surface of the lateral support 142 is attached to the bottom surface of the first boss 111, so that the sealing effect of the inner quartz tube 100 can be enhanced, and water and gas are prevented from entering the inner quartz tube 100 from the gap between the ring-shaped mounting member 110 and the ring-shaped support member 140.
More specifically, as shown in fig. 2, 4 and 6, in order to further enhance the lateral supporting force of the annular mounting element 110 on the lateral supporting portion 142 and the second sealing assembly inside the lateral supporting portion 142, the abutting surface of the lateral supporting portion 142 and the annular mounting element 110 may be provided with a preset taper, that is, the outer wall of the lateral supporting portion 142 contacting the annular mounting element 110 has a certain taper, and is gradually inclined inward from bottom to top. Accordingly, the inner wall of the ring-shaped mounting member 110 contacting the lateral support 142 is also inclined inward from bottom to top, so that the lateral pressure of the ring-shaped mounting member 110 on the ring-shaped support 140 can be enhanced.
In a preferred embodiment, as shown in fig. 2 and 6, a second boss is provided on the inner circumferential wall of the lateral support portion 142, and the second sealing assembly is provided on the second boss, so that when the second sealing assembly is installed, the second boss can play a certain role in supporting and compressing the second sealing assembly, and the installation of the second sealing assembly is further facilitated; and the second boss can also limit the position of the inner quartz tube 100, so that the inner quartz tube 100 can be conveniently installed.
Further, in order to protect the bottom of the inner quartz tube 100 and enhance the sealing effect, the sealing structure further includes an inner quartz tube gasket 150, and the inner quartz tube gasket 150 is located between the inner quartz tube 100 and the second boss 143. Specifically, the inner quartz tube gasket 150 may be compressed between the inner quartz tube 100 and the bottom base portion 141, and the outer edge abuts against the second boss. Therefore, the sealing effect of the bottom of the inner quartz tube 100 can be enhanced, in addition, the inner quartz tube gasket 150 is arranged between the inner quartz tube 100 and the annular support member 140, so that the acting force of the annular support member 140 on the inner quartz tube 100 can be buffered, the impact force caused by inertia when the annular support member 140 drives the inner quartz tube 100 to move up and down is reduced, and a certain protection effect on the inner quartz tube 100 can be achieved.
In another embodiment, the first sealing assembly includes a liner 123 of the inner quartz tube 100, a first sealing ring 122 and a first sealing washer 121, which are arranged in sequence from bottom to top. Therefore, the first sealing ring 122 is adopted to play a main sealing role, and the first sealing washer 121 is arranged at the opening at the upper end of the mounting groove for mounting the first sealing assembly, so that water and air can be effectively prevented from leaking from the opening; the provision of the bushing 123 allows for the provision of,
more specifically, the first seal assembly further includes an inner quartz tube baffle ring 124, the inner quartz tube baffle ring 124 being disposed between the ring mount 110 and the inner quartz tube 100 liner 123. An inner quartz tube baffle ring 124 is arranged between the ring-shaped mounting member 110 and the lining 123 of the inner quartz tube 100, and can play a certain limiting and protecting role on the lining 123.
In another embodiment, the second sealing assembly includes a second sealing washer 131, a second sealing washer 132, a sealing retainer ring 133, a third sealing washer, and a third sealing washer, which are sequentially disposed from bottom to top. The second sealing washer 131 and the second sealing washer 132 are similar to the first sealing washer 121 and the first sealing washer 122 in arrangement principle, and both are expected to achieve a better sealing effect; two groups of second sealing gaskets 131 and 132 are arranged, so that the sealing effect of the second sealing assembly can be further effectively enhanced; the sealing retainer ring 133 arranged between the two second sealing rings 132 can protect the second sealing rings 132 to a certain extent, and prevent the sealing rings from being damaged or even losing efficacy due to mutual extrusion caused by deformation when the two second sealing rings 132 are compressed at the same time.
As another technical solution, based on the same inventive concept of the above embodiments, an embodiment of the present invention further provides a process apparatus, which includes an upper hearth body, a lower hearth body, an inner quartz tube 100, an outer quartz tube 200, and the above sealing structure for sealing the inner quartz tube. In particular, the process equipment may be, but is not limited to, a growth furnace.
As another technical solution, based on the same inventive concept of the above embodiments, an embodiment of the present invention further provides an assembling method of a process equipment, applied to the above process equipment, the method including: mounting the ring mount 110 on a support beam in the middle of the process equipment and placing the ring support 140 at a designated position below the ring mount 110; placing the inner quartz tube 100 sleeved with the second sealing assembly on the annular support member 140, press-fitting the second sealing assembly from bottom to top in sequence, and mounting the first sealing assembly from the upper end of the inner quartz tube 100 in sequence; the outer quartz tube mounting member 210 and the outer quartz tube 200 are sequentially mounted, the outer quartz tube mounting member 210 is detachably mounted on the ring-shaped mounting member 110, and the outer quartz tube 200 is mounted on the outer quartz tube mounting member 210; the ring support 140 and the inner quartz tube 100 are moved up to the installation position of the ring support 140, and the ring support 140 is detachably coupled to the ring mount 110.
Specifically, the ring-shaped mounting member 110 can be mounted on a support beam in the middle of the process equipment through the hearth fixing weldment 300, the ring-shaped supporting member 140 can be placed on the top end of the hearth elevating mechanism, and the ring-shaped supporting member 140 and the inner quartz tube 100 are driven to move upwards through the elevating mechanism.
Further, before placing the inner quartz tube 100 sheathed with the second sealing assembly on the ring-shaped support 140, the method further comprises: on the ring-shaped support 140, at a position below the inner quartz tube 100, an inner quartz tube gasket 150 is placed.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (9)
1. A sealing structure for sealing an inner quartz tube, the sealing structure comprising:
the annular mounting piece is sleeved outside the inner quartz tube, and a first boss is arranged on the inner peripheral wall of the annular mounting piece;
the first sealing assembly is arranged on the first boss and used for sealing a gap between the inner peripheral wall of the annular mounting piece and the outer peripheral wall of the inner quartz tube;
the annular supporting piece is detachably arranged at the bottom of the annular mounting piece and comprises a bottom support part used for supporting the inner quartz tube and a lateral supporting part arranged above the bottom support part and sleeved outside the inner quartz tube; the outer side face of the lateral supporting part is attached to the annular mounting part, and the top face of the lateral supporting part is attached to the bottom face of the first boss;
and the second sealing assembly is arranged on the bottom support part, is positioned between the lateral supporting part and the inner quartz tube and is used for sealing a gap between the inner peripheral wall of the annular supporting part and the outer peripheral wall of the inner quartz tube.
2. A sealing structure for sealing an inner quartz tube according to claim 1, wherein an abutting face of the lateral support portion and the ring mount has a preset slight degree.
3. A sealing structure for sealing an inner quartz tube according to claim 1, wherein a second boss is provided on an inner peripheral wall of the lateral support portion, the second seal assembly being provided on the second boss.
4. A sealing structure for sealing an inner quartz tube according to claim 3, further comprising an inner quartz tube gasket located between the inner quartz tube and the second boss.
5. A sealing structure for sealing an inner quartz tube according to claim 1, wherein the first sealing assembly comprises an inner quartz tube lining, a first sealing ring and a first sealing gasket which are arranged in sequence from bottom to top.
6. A seal arrangement for sealing an inner quartz tube according to claim 5, wherein the first seal assembly further comprises an inner quartz tube baffle ring disposed between the ring mount and the inner quartz tube liner.
7. A sealing structure for sealing an inner quartz tube according to claim 1, wherein the second sealing assembly comprises a second sealing washer, a second sealing ring, a sealing retainer ring, a third sealing washer and a third sealing washer which are arranged in sequence from bottom to top.
8. A process apparatus comprising an inner quartz tube, an outer quartz tube, and a sealing structure, wherein the sealing structure comprises the sealing structure for sealing the inner quartz tube according to any one of claims 1 to 7.
9. A method of assembling process equipment, for use in the process equipment of claim 8, the method comprising:
mounting a ring-shaped mounting piece on a support beam in the middle of the process equipment, and placing a ring-shaped support piece at a specified position below the ring-shaped mounting piece;
placing an inner quartz tube sleeved with a second sealing assembly on the annular supporting piece, sequentially press-fitting the second sealing assembly from bottom to top, and sequentially installing the first sealing assembly from the upper end of the inner quartz tube;
an outer quartz tube mounting piece and an outer quartz tube are sequentially mounted, the outer quartz tube mounting piece is detachably mounted on the annular mounting piece, and the outer quartz tube is mounted on the outer quartz tube mounting piece;
and moving the annular support piece and the inner quartz tube upwards to the mounting position of the annular support piece, and detachably connecting the annular support piece and the annular mounting piece.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910620816.7A CN110319192B (en) | 2019-07-10 | 2019-07-10 | Sealing structure for sealing inner quartz tube, process equipment and assembling method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910620816.7A CN110319192B (en) | 2019-07-10 | 2019-07-10 | Sealing structure for sealing inner quartz tube, process equipment and assembling method |
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| CN110319192A CN110319192A (en) | 2019-10-11 |
| CN110319192B true CN110319192B (en) | 2020-12-08 |
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Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1721587A (en) * | 2005-05-23 | 2006-01-18 | 西安理工大学 | High temperature crystal growth apparatus |
| CN102691109A (en) * | 2012-06-19 | 2012-09-26 | 东莞市天域半导体科技有限公司 | Vertical silicon carbide high-temperature oxidation device |
| CN102965724A (en) * | 2012-12-18 | 2013-03-13 | 福建福晶科技股份有限公司 | Single crystal furnace with double-layer quartz tube sealing structure by crystal pulling method |
| CN103628140A (en) * | 2013-10-09 | 2014-03-12 | 东莞市天域半导体科技有限公司 | Dual sealing structure for ultra high temperature double-layer water cooling quartz tube vacuum chamber |
| CN204874828U (en) * | 2015-08-04 | 2015-12-16 | 深圳市捷佳伟创新能源装备股份有限公司 | Double -deck thermal -insulated connection structure of quartz capsule |
| CN206072337U (en) * | 2016-08-29 | 2017-04-05 | 北京吉阳技术股份有限公司 | A kind of boiler tube sealing structure |
| CN106702345B (en) * | 2015-07-17 | 2019-02-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of high temperature CVD equipment |
| CN109852949A (en) * | 2018-11-01 | 2019-06-07 | 北京北方华创微电子装备有限公司 | A kind of reaction chamber and semiconductor processing equipment |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7648177B2 (en) * | 2003-09-02 | 2010-01-19 | Atomate Corporation | Apparatus and method for actuating or maintaining a seal by differential pressure |
| CN108613555B (en) * | 2013-12-20 | 2020-04-14 | 魁北克9282-3087公司（加钛顾问公司） | Metallurgical furnace for smelting minerals and method for retrofitting an existing refractory layer |
-
2019
- 2019-07-10 CN CN201910620816.7A patent/CN110319192B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1721587A (en) * | 2005-05-23 | 2006-01-18 | 西安理工大学 | High temperature crystal growth apparatus |
| CN102691109A (en) * | 2012-06-19 | 2012-09-26 | 东莞市天域半导体科技有限公司 | Vertical silicon carbide high-temperature oxidation device |
| CN102965724A (en) * | 2012-12-18 | 2013-03-13 | 福建福晶科技股份有限公司 | Single crystal furnace with double-layer quartz tube sealing structure by crystal pulling method |
| CN103628140A (en) * | 2013-10-09 | 2014-03-12 | 东莞市天域半导体科技有限公司 | Dual sealing structure for ultra high temperature double-layer water cooling quartz tube vacuum chamber |
| CN106702345B (en) * | 2015-07-17 | 2019-02-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of high temperature CVD equipment |
| CN204874828U (en) * | 2015-08-04 | 2015-12-16 | 深圳市捷佳伟创新能源装备股份有限公司 | Double -deck thermal -insulated connection structure of quartz capsule |
| CN206072337U (en) * | 2016-08-29 | 2017-04-05 | 北京吉阳技术股份有限公司 | A kind of boiler tube sealing structure |
| CN109852949A (en) * | 2018-11-01 | 2019-06-07 | 北京北方华创微电子装备有限公司 | A kind of reaction chamber and semiconductor processing equipment |
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| CN110319192A (en) | 2019-10-11 |
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