CN202081192U - Crystal growth furnace and safety exhaust valve of same - Google Patents
Crystal growth furnace and safety exhaust valve of same Download PDFInfo
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- CN202081192U CN202081192U CN2011201637061U CN201120163706U CN202081192U CN 202081192 U CN202081192 U CN 202081192U CN 2011201637061 U CN2011201637061 U CN 2011201637061U CN 201120163706 U CN201120163706 U CN 201120163706U CN 202081192 U CN202081192 U CN 202081192U
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- blind plate
- safety exhaust
- flange
- exhaust valve
- sealing
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Abstract
The utility model discloses a safety exhaust valve that is used for exhausting gas in a crystal growing furnace and comprises a blind plate and a sealing ring, wherein one end of the blind plate is hinged with a flange on a vacuum pipeline of the crystal growing furnace; and the sealing ring is arranged between the blind plate and the flange. When the over-filling phenomenon occurs, the ultra-fine oxide dust in a furnace chamber move to the sealing ring; as the safety exhaust valve is sealed by the self-gravity of the blind plate, the safety exhaust valve can be switched on easily so that the ultra-fine oxide dust can be discharged, thus achieving the aim of natural releasing pressure. When water leaks after the ignition damage occurs to the vacuum chamber, the water is evaporated at high temperature and the safety exhaust valve can exhaust the gas quickly. Furthermore, the safety exhaust valve has the advantages that the vacuum pipeline can be cleaned conveniently as the pipeline can be cleaned by just opening the blind plate and can be sealed by putting down the blind plate; furthermore, the pipeline can be tightly sucked after the vacuum is started. The utility model also discloses a crystal growing furnace with the safety exhaust valve.
Description
Technical field
The utility model relates to technical field of polysilicon production, particularly a kind of crystal growing furnace and safety exhaust thereof.
Background technology
The crystalline manufacturing processed is under the condition of high temperature, the thermal field structure more complicated, and owing to crystal installation reason may cause contacting with the furnace chamber inwall of crystal growing furnace, the sparking of generation electric shock damages cavity and leaks.Also have a kind of situation to be because quartz crucible leaks silicon, damage cavity material and leak.Owing to cavity damages the water sharply evaporation expansion in high temperature that spills, extremely dangerous, therefore need discharge the water vapour of High Temperature High Pressure by vent valve, to alleviate the pressure in the crystal growing furnace.
As shown in Figure 1, present vent valve generally comprises blind plate 3, blind plate 3 slidably is arranged on the flange 2 of vacuum pipe 1 by bolt 6, and blind plate 3 is pressed on compression spring 6 on the flange 2 being arranged with on the bolt 6, also is provided with sealing-ring 4 between flange 2 and blind plate 3.The furnace chamber of crystal growing furnace need often vacuumize and inflate, to keep being in vacuum and atmospheric pressure state respectively in the stove.When vacuum state charges into gas with the recovery normal pressure, furnace pressure is equal to or greater than under the normal pressure situation, to the migration of the outlet side of vent valve, the deadweight of the deformation of spring 6 and spring pressure and blind plate 3 by compression makes vent valve effectively not open to oxide compound ultrafine dust in the furnace chamber under pressure.In the migration of oxide compound ultrafine dust during to sealing-ring 4 places, because vent valve do not open, and make the trip of oxide compound ultrafine dust not discharge, will cover on the outside surface of sealing-ring 4, cause sealing property to descend.When vacuumizing, owing to be coated with the oxide compound ultrafine dust on the outside surface of sealing-ring 4, make poorly sealedly, produce gas leakage, can't guarantee the vacuum tightness in the furnace chamber.
Therefore, how making things convenient for the unlatching that realizes vent valve, reduce the failure rate of vacuum leak, is those skilled in the art's problem demanding prompt solutions.
The utility model content
In view of this, the utility model provides a kind of crystal growing furnace and safety exhaust thereof, with the convenient unlatching that realizes vent valve, reduces the failure rate of vacuum leak.
For achieving the above object, the utility model provides following technical scheme:
A kind of safety exhaust is used for the exhaust of crystal growing furnace, comprises blind plate and sealing-ring, and the flange on an end of described blind plate and the vacuum pipe of described crystal growing furnace is hinged, and described sealing-ring is arranged between described blind plate and the described flange.
Preferably, in above-mentioned safety exhaust, also comprise hinging pin shaft;
Described blind plate is provided with first fixing part, and this first fixing part is provided with first hinge hole;
Described flange is provided with second fixing part, and this second fixing part is provided with second hinge hole, and described hinging pin shaft is inserted on described first hinge hole and described second hinge hole successively.
Preferably, in above-mentioned safety exhaust, first fixing part and described second fixing part are fixed on described blind plate and the described flange by holding bolt respectively.
Preferably, in above-mentioned safety exhaust,, offering the groove that holds described sealing-ring on the end face of described flange, described sealing-ring places in this groove.
Preferably, in above-mentioned safety exhaust, described sealing-ring is the O RunddichtringO.
Preferably, in above-mentioned safety exhaust, described blind plate level places on the described flange.
Preferably, in above-mentioned safety exhaust, described blind plate is obliquely installed on described flange.
Preferably, in above-mentioned safety exhaust, the angle of described blind plate and horizontal plane is 30～50 degree.
A kind of crystal growing furnace comprises vent valve, and described vent valve is as above each described safety exhaust.
From above-mentioned technical scheme as can be seen, the safety exhaust that the utility model provides, be used for the exhaust of crystal growing furnace, comprise blind plate and sealing-ring, wherein, flange on one end of blind plate and the vacuum pipe of described crystal growing furnace is hinged, and sealing-ring is arranged between described blind plate and the described flange.The utility model has saved compression spring and bolt, only relies on the sealing of the gravity maintenance furnace chamber of blind plate.When furnace chamber is inflated to normal pressure by vacuum state, if overcharge phenomenon, oxide compound ultrafine dust in the furnace chamber under pressure to the migration of the outlet side of safety exhaust, in the migration of oxide compound ultrafine dust during to the sealing-ring place, because safety exhaust only relies on the deadweight of blind plate to seal, therefore can make safety exhaust open easily, and the oxide compound ultrafine dust is emitted, play the purpose of nature row pressure.Run into sparking at vacuum cavity and damage to cause and leak, after water at high temperature evaporated, safety exhaust can rapid exhaust.And the utility model cleaning vacuum-lines is very convenient, starts blind plate and just can carry out the pipeline cleaning, puts down back natural enclosing pipeline, sucks fully after the unlatching vacuum.
Description of drawings
In order to be illustrated more clearly in the utility model embodiment or technical scheme of the prior art, to do to introduce simply to the accompanying drawing of required use in embodiment or the description of the Prior Art below, apparently, accompanying drawing in describing below only is embodiment more of the present utility model, for those of ordinary skills, under the prerequisite of not paying creative work, can also obtain other accompanying drawing according to these accompanying drawings.
Fig. 1 is the structural representation of existing vent valve;
The structural representation of the safety exhaust that Fig. 2 provides for the utility model embodiment;
The structural representation of the safety exhaust that another embodiment of Fig. 3 the utility model provides.
Embodiment
The utility model discloses a kind of crystal growing furnace and safety exhaust thereof,, reduce the failure rate of vacuum leak with the convenient unlatching that realizes vent valve.
Below in conjunction with the accompanying drawing among the utility model embodiment, the technical scheme among the utility model embodiment is clearly and completely described, obviously, described embodiment only is the utility model part embodiment, rather than whole embodiment.Based on the embodiment in the utility model, those of ordinary skills are not making the every other embodiment that is obtained under the creative work prerequisite, all belong to the scope of the utility model protection.
See also Fig. 2 and Fig. 3, the structural representation of the safety exhaust that Fig. 2 provides for the utility model embodiment, the structural representation of the safety exhaust that another embodiment of Fig. 3 the utility model provides.
The safety exhaust that the utility model provides is used for the exhaust of crystal growing furnace, comprises blind plate 13 and sealing-ring 14, and wherein, the flange 12 on an end of blind plate 13 and the vacuum pipe 11 of crystal growing furnace is hinged, and sealing-ring 14 is arranged between blind plate 13 and the flange 12.Blind plate 13 is close to sealing-ring 14 under the effect of gravity, thereby guarantees the sealing in the vacuum pipe 11.Air pressure in vacuum pipe 11 is during greater than external pressure, and blind plate 13 rotates along the jointed shaft between itself and the flange 2 under the effect of air pressure inside, thereby and produce exhaust clearance between the sealing-ring 14, internal gas is discharged.
The utility model has saved compression spring and bolt, only relies on the sealing of the gravity maintenance furnace chamber of blind plate 13.When furnace chamber is inflated to normal pressure by vacuum state, if overcharge phenomenon, oxide compound ultrafine dust in the furnace chamber under pressure to the migration of the outlet side of safety exhaust, in the migration of oxide compound ultrafine dust during to sealing-ring 14 places, because safety exhaust only relies on the deadweight of blind plate 13 to seal, therefore can make safety exhaust open easily, and the oxide compound ultrafine dust is emitted, play the purpose of nature row pressure.Run into sparking at vacuum cavity and damage to cause and leak, after water at high temperature evaporated, safety exhaust can rapid exhaust.And the utility model cleaning vacuum pipe 11 is very convenient, starts blind plate 13 and just can carry out vacuum pipe 11 cleanings, puts down back natural enclosing vacuum pipe 11, sucks fully after the unlatching vacuum.
The utility model is realized hinged between blind plates 13 and the flange 12 by hinging pin shaft 17, and blind plate 13 is provided with first fixing part 15, and this first fixing part 15 is provided with first hinge hole; Flange 12 is provided with second fixing part 16, and this second fixing part 16 is provided with second hinge hole, and hinging pin shaft 17 is inserted on first hinge hole and second hinge hole successively.During use first fixing part 15 and second fixing part 16 are separately fixed on blind plate 13 and the flange 12, can be by welding, mode of connection such as bolt connection are separately fixed at first fixing part 15 and second fixing part 16 on blind plate 13 and the flange 12.
The utility model preferably is fixed on first fixing part 15 and second fixing part 16 on blind plate 13 and the flange 12 by holding bolt respectively, like this after blind plate 13 damages, can only change blind plate 13, after first fixing part 15 and 16 dismountings of second fixing part, also can continue to use.
Offer the groove that holds sealing-ring 14 on the end face of flange 12, sealing-ring 14 places in this groove, and sealing circle 14 is preferably the O RunddichtringO.But blind plate 13 levels that the utility model provides place on the flange 12, and also tiltable is arranged on the flange 12, when blind plate 13 is obliquely installed, should guarantee blind plate 13 under the effect of gravity, are close on the sealing-ring 14, to keep the sealing in the vacuum pipe 11.Preferably, blind plate 13 and angle of inclination horizontal plane are 45 degree.On the principle blind plate 13 and angle horizontal plane be can be degree 0～90 (not comprising 90), better in 30～50 degree effects, 45 effects when spending are best.
The crystal growing furnace that the utility model provides comprises vent valve, and wherein, vent valve is the as above disclosed safety exhaust of embodiment.Run into sparking at the vacuum cavity of crystal growing furnace and damage to cause and leak, after water at high temperature evaporated, safety exhaust can rapid exhaust.And the utility model cleaning vacuum pipe 11 is very convenient, starts blind plate 13 and just can carry out vacuum pipe 11 cleanings, puts down back natural enclosing vacuum pipe 11, sucks fully after the unlatching vacuum.
Each embodiment adopts the mode of going forward one by one to describe in this specification sheets, and what each embodiment stressed all is and the difference of other embodiment that identical similar part is mutually referring to getting final product between each embodiment.
To the above-mentioned explanation of the disclosed embodiments, make this area professional and technical personnel can realize or use the utility model.Multiple modification to these embodiment will be conspicuous concerning those skilled in the art, and defined herein General Principle can realize under the situation that does not break away from spirit or scope of the present utility model in other embodiments.Therefore, the utility model will can not be restricted to these embodiment shown in this article, but will meet and principle disclosed herein and the corresponding to wide region of features of novelty.
Claims (9)
1. safety exhaust, be used for the exhaust of crystal growing furnace, comprise blind plate (13) and sealing-ring (14), it is characterized in that, flange (12) on the vacuum pipe (11) of one end of described blind plate (13) and described crystal growing furnace is hinged, and described sealing-ring (14) is arranged between described blind plate (13) and the described flange (12).
2. safety exhaust as claimed in claim 1 is characterized in that, also comprises hinging pin shaft (17);
Described blind plate (13) is provided with first fixing part (15), and this first fixing part (15) is provided with first hinge hole;
Described flange (12) is provided with second fixing part (16), and this second fixing part (16) is provided with second hinge hole, and described hinging pin shaft (17) is inserted on described first hinge hole and described second hinge hole successively.
3. safety exhaust as claimed in claim 2 is characterized in that, first fixing part (15) and described second fixing part (16) are fixed on described blind plate (13) and the described flange (12) by holding bolt respectively.
4. safety exhaust as claimed in claim 1 is characterized in that, offers the groove that holds described sealing-ring (14) on the end face of described flange (12), and described sealing-ring (14) places in this groove.
5. safety exhaust as claimed in claim 4 is characterized in that, described sealing-ring (14) is the O RunddichtringO.
6. as each described safety exhaust of claim 1-5, it is characterized in that described blind plate (13) level places on the described flange (12).
7. as each described safety exhaust of claim 1-5, it is characterized in that described blind plate (13) is obliquely installed on described flange (12).
8. safety exhaust as claimed in claim 7 is characterized in that, described blind plate (13) is 30～50 degree with the angle of horizontal plane.
9. a crystal growing furnace comprises vent valve, it is characterized in that, described vent valve is as each described safety exhaust of claim 1-8.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201637061U CN202081192U (en) | 2011-05-20 | 2011-05-20 | Crystal growth furnace and safety exhaust valve of same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011201637061U CN202081192U (en) | 2011-05-20 | 2011-05-20 | Crystal growth furnace and safety exhaust valve of same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202081192U true CN202081192U (en) | 2011-12-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011201637061U Expired - Fee Related CN202081192U (en) | 2011-05-20 | 2011-05-20 | Crystal growth furnace and safety exhaust valve of same |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202081192U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102787363A (en) * | 2011-05-20 | 2012-11-21 | 浙江昱辉阳光能源有限公司 | Crystal growth furnace and safety exhaust valve thereof |
| CN104357908A (en) * | 2014-10-28 | 2015-02-18 | 西安建筑科技大学 | Crystal growing device and application thereof for being used as fluoro boron beryllium acid potassium crystal growing device |
-
2011
- 2011-05-20 CN CN2011201637061U patent/CN202081192U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102787363A (en) * | 2011-05-20 | 2012-11-21 | 浙江昱辉阳光能源有限公司 | Crystal growth furnace and safety exhaust valve thereof |
| CN104357908A (en) * | 2014-10-28 | 2015-02-18 | 西安建筑科技大学 | Crystal growing device and application thereof for being used as fluoro boron beryllium acid potassium crystal growing device |
| CN104357908B (en) * | 2014-10-28 | 2017-07-28 | 西安建筑科技大学 | Crystal growth equipment and its application as fluoro boron potassjum beryllate crystal growth equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111221 Termination date: 20190520 |