CN110319192A - For sealing sealing structure, process equipment and the assembly method of interior quartz ampoule - Google Patents
For sealing sealing structure, process equipment and the assembly method of interior quartz ampoule Download PDFInfo
- Publication number
- CN110319192A CN110319192A CN201910620816.7A CN201910620816A CN110319192A CN 110319192 A CN110319192 A CN 110319192A CN 201910620816 A CN201910620816 A CN 201910620816A CN 110319192 A CN110319192 A CN 110319192A
- Authority
- CN
- China
- Prior art keywords
- quartz ampoule
- sealing
- interior
- interior quartz
- ring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/02—Sealings between relatively-stationary surfaces
- F16J15/06—Sealings between relatively-stationary surfaces with solid packing compressed between sealing surfaces
- F16J15/067—Split packings
Abstract
It includes: ring mounts that the present invention, which provides a kind of sealing structure for sealing interior quartz ampoule, process equipment and assembly method, sealing structure, is set on the outside of interior quartz ampoule, and be provided with first boss on the internal perisporium of ring mounts；First seal assembly is arranged in first boss, for sealing the gap between the internal perisporium of ring mounts and the periphery wall of interior quartz ampoule；Annular support member is removably arranged in the bottom of ring mounts, and the collet portion including being used to support interior quartz ampoule, and is arranged above collet portion, and be set in the lateral support portion on the outside of interior quartz ampoule；Second seal assembly is arranged in lateral support portion, between collet portion and interior quartz ampoule, for sealing the gap between the internal perisporium of annular support member and the periphery wall of interior quartz ampoule.Using present invention effectively prevents assembly difficultys caused by gravity when installing seal assembly from top to bottom, the problems such as inefficiency.
Description
Technical field
The present invention relates to field of semiconductor manufacture, and in particular, to a kind of sealing structure for sealing interior quartz ampoule, work
Skill equipment and assembly method.
Background technique
Currently, the process equipment for being widely used in synthesizing semiconductor (such as silicon carbide, gallium nitride) monocrystal material is mainly given birth to
Long furnace, the environment of high temperature needed for the burner hearth of growth furnace is used to provide synthesis semiconductor, high vacuum and high-cleanness, high.Packet in burner hearth
It includes multiple for sealing the sealing structure of interior quartz ampoule, such as outer quartz ampoule, interior quartz ampoule and sealing structure, wherein sealing knot
Structure (such as bushing, sealing ring, gasket) is for preventing water, gas in burner hearth from entering in quartz ampoule.
In the prior art, the sealing structure for sealing interior quartz ampoule mainly includes the annular being set on the outside of interior quartz ampoule
Installation part, the annular support member for being pressed on interior quartzy bottom of the tube and the seal assembly for the interior quartzy seal of tube, the seal assembly
It is arranged in the seal groove between ring mounts, annular support member and interior quartz ampoule.In the assembly for being sealed structure, it is
It reduces the double-deck quartz ampoule and assembles requirement to assembly space, generally use the preferential outer quartz ampoule of assembly and reassemble interior quartz ampoule
Erection sequence.In this way, the position of outer quartz ampoule and ring mounts has been fixed before assembling interior quartz ampoule and seal assembly, institute
With seal assembly can only reversely install all seal assemblies from the opening below seal groove.Since seal assembly is used by upper
Reversed mounting means down, because of the effect of gravity, the seal assembly in seal groove can not be directly anchored in seal groove, only
Support can be provided for its fixed installation by compression of the sealing ring in seal assembly in seal groove, so that it is difficult to increase assembly
Degree.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art, propose a kind of for sealing interior stone
Sealing structure, process equipment and the assembly method of English pipe.
To achieve the purpose of the present invention, it on the one hand provides a kind of for sealing the sealing structure of interior quartz ampoule, the sealing
Structure includes:
Ring mounts are set on the outside of the interior quartz ampoule, and are provided on the internal perisporium of the ring mounts
First boss；
First seal assembly is arranged in the first boss, for sealing internal perisporium and the institute of the ring mounts
State the gap between the periphery wall of interior quartz ampoule；
The bottom of the ring mounts is removably arranged in annular support member, and including being used to support the interior stone
The collet portion of English pipe, and be arranged above the collet portion, and be set in the lateral support portion on the outside of the interior quartz ampoule；
Second seal assembly is arranged in the collet portion, between the lateral support portion and the interior quartz ampoule,
For sealing the gap between the internal perisporium of the annular support member and the periphery wall of the interior quartz ampoule.
Optionally, the lateral surface in the lateral support portion is bonded with the ring mounts, the top in the lateral support portion
Face is bonded with the bottom surface of the first boss.
Optionally, the binding face of the lateral support portion and the ring mounts has to preset and slightly spend.
Optionally, second boss, the second seal assembly setting are provided on the internal perisporium in the lateral support portion
In the second boss.
It optionally, further include interior quartzy pipe gasket, the interior quartzy pipe gasket is located at the interior quartz ampoule and described second
Between boss.
Optionally, first seal assembly includes the interior quartzy pipe bushing, the first sealing ring set gradually from lower to upper
And first seal washer.
Optionally, first seal assembly further includes interior quartz ampoule baffle ring, and the interior quartz ampoule baffle ring is set to the ring
Between shape installation part and the interior quartzy pipe bushing.
Optionally, second seal assembly include the second seal washer set gradually from lower to upper, the second sealing ring,
Sealing shield ring, third sealing ring and third seal washer.
To achieve the purpose of the present invention, another further aspect provides a kind of process equipment, including interior quartz ampoule, outer quartz ampoule and
Sealing structure, the sealing structure include above-mentioned for sealing the sealing structure of interior quartz ampoule.
To achieve the purpose of the present invention, the third aspect provides a kind of assembly method of process equipment, is applied to above-mentioned technique
Equipment, which comprises
Ring mounts are mounted in the supporting beam in the middle part of the process equipment, and annular support member are placed in described
Designated position below ring mounts；
The interior quartz ampoule for being arranged with the second seal assembly is placed on the annular support member, is successively pressed from the bottom up
Second seal assembly, and first seal assembly is successively installed from the upper end of the interior quartz ampoule；
Outer quartz ampoule installation part successively is installed and outer quartz ampoule, the outer quartz ampoule installation part are removably mounted at the ring
On shape installation part, the outer quartz ampoule is mounted on the outer quartz ampoule installation part；
The annular support member and the interior quartz ampoule are moved upward to the installation site of the annular support member, and will
The annular support member is detachably connected with the ring mounts.
The invention has the following advantages:
Provided by the present invention for the sealing structure of quartz ampoule in sealing, the ring mounts of boss are equipped with including medial surface
Annular support member with collet portion and lateral support portion is equipped with, and is arranged the first seal assembly in the first boss, is used for
Seal the gap between the internal perisporium of the ring mounts and the periphery wall of the interior quartz ampoule；In the lateral support portion
Above, between the collet portion and the interior quartz ampoule, the second seal assembly is set, for sealing the annular support member
Gap between internal perisporium and the periphery wall of the interior quartz ampoule.Due to there is first boss support below the first seal assembly, the
There is the support of lateral support portion below two seal assemblies, so, assemble the first seal assembly and can be by when the second seal assembly
Under up assemble each sealing element, assembly caused by gravity is tired when effectively preventing installing seal assembly from top to bottom in the prior art
The problem of difficulty, inefficiency；The compression movement of the second seal assembly can be completed in the external of ring mounts simultaneously, be avoided existing
The problem for having assembly space caused by the compression for needing to complete all seal assemblies inside ring mounts in technology narrow.
Detailed description of the invention
Fig. 1 is the schematic diagram of internal structure of process equipment provided in an embodiment of the present invention；
Fig. 2 is the partial enlargement structural representation in Fig. 1 at A；
Fig. 3 is the structural schematic diagram of ring mounts provided in an embodiment of the present invention；
Fig. 4 is the partial enlargement structural representation in Fig. 3 at C；
Fig. 5 is the structural schematic diagram of annular support member provided in an embodiment of the present invention；
Fig. 6 is the partial enlargement structural representation in Fig. 5 at B.
Specific embodiment
To make those skilled in the art more fully understand technical solution of the present invention, come with reference to the accompanying drawing to the present invention
The sealing structure for sealing interior quartz ampoule provided and application its process equipment and process equipment assembly method carry out it is detailed
Thin description.
It is a kind of for sealing the sealing structure of interior quartz ampoule, as shown in figures 1 to 6, sealing structure include ring mounts 110,
First seal assembly, annular support member 140 and the second seal assembly.Wherein, ring mounts 110 are set in interior quartz ampoule 100
Outside, and first boss 111 is provided on the internal perisporium of ring mounts 110；First seal assembly is arranged in first boss
On 111, for sealing the gap between the internal perisporium of ring mounts 110 and the periphery wall of interior quartz ampoule 100；Annular support member
140, the bottom of ring mounts 110, and the collet portion 141 including being used to support interior quartz ampoule 100 are removably set, and
It is arranged above collet portion 141, and is set in the lateral support portion 142 in interior 100 outside of quartz ampoule；Second seal assembly, setting
In collet portion 142, between lateral support portion 141 and interior quartz ampoule 100, for sealing the inner circumferential of annular support member 140
Gap between wall and the periphery wall of interior quartz ampoule 100.
Annular installation provided in this embodiment for sealing the sealing structure of interior quartz ampoule, including medial surface equipped with boss
Part 110 and annular support member 140 equipped with collet portion 141 and lateral support portion 142, and it is arranged first in first boss 111
Seal assembly, for sealing the gap between the internal perisporium of ring mounts 110 and the periphery wall of interior quartz ampoule 100；Lateral
On support portion 142, between collet portion 141 and interior quartz ampoule 100, be arranged the second seal assembly, for sealing annular brace
Gap between the internal perisporium of part 140 and the periphery wall of interior quartz ampoule 100.Due to having first boss below the first seal assembly
111 support, and have the support of lateral support portion 142 below the second seal assembly, so, assemble the first seal assembly and the second sealing group
Each sealing element can be assembled when part from lower to upper, gravity when effectively preventing installing seal assembly from top to bottom in the prior art
The problem of caused assembly difficulty, inefficiency；The compression movement of the second seal assembly can be in the outer of ring mounts 110 simultaneously
Portion completes, and avoids caused by the compression for needing to complete all seal assemblies inside ring mounts 110 in the prior art
The narrow problem of assembly space.
In a specific embodiment, as shown in Fig. 2, the lateral surface in lateral support portion 142 and ring mounts 110 paste
It closes, the top surface in lateral support portion 142 is bonded with the bottom surface of first boss 111.The lateral surface and annular in lateral support portion 142 are set
Installation part 110 is bonded, then ring mounts 110 can provide laterally for the second seal in lateral support portion 142 and its inside
Support force, easily facilitate the installation of second seal.The top surface in lateral support portion 142 and the bottom surface of first boss 111 are set
Fitting, can be enhanced the sealing effect of interior quartz ampoule 100, prevent water, gas from ring mounts 110 and annular support member 140
Gap between enter interior quartz ampoule 100.
More specifically, as shown in Fig. 2, Fig. 4 and Fig. 6, in order to further enhance ring mounts 110 to lateral support portion
142 and its inside the second seal assembly lateral support, can be by the patch in lateral support portion 142 and ring mounts 110
The setting of conjunction face, which has to preset, slightly spends, i.e., the outer wall that lateral support portion 142 is contacted with ring mounts 110 has certain taper, from
Under up gradually slope inwardly.Correspondingly, the inner wall that ring mounts 110 are contacted with lateral support portion 142 also from the bottom up by
Gradually slope inwardly, in this way, ring mounts 110 can be enhanced to the lateral pressure of annular support member 140.
In a preferred embodiment, as shown in Figure 2 and Figure 6, second is provided on the internal perisporium in lateral support portion 142
Boss, the second seal assembly is arranged in second boss, then when installing the second seal assembly, second boss can be sealed to second
Component plays the role of certain support and compression, easily facilitates the installation of the second seal assembly；And second boss can also be right
The position of interior quartz ampoule 100 is limited, convenient for the installation of interior quartz ampoule 100.
Further, in order to which sealing effect is protected and enhanced in internal 100 bottom of quartz ampoule, which further includes
Interior quartz pipe gasket 150, interior quartz pipe gasket 150 is between interior quartz ampoule 100 and second boss 143.Specifically, interior quartz
Pipe gasket 150 can be pressed between interior quartz ampoule 100 and collet portion 141, and outer rim and second boss contact.In this way, can be with
The sealing effect of 100 bottom of quartz ampoule in enhancing, in addition to this, between interior quartz ampoule 100 and annular support member 140 in setting
Quartzy pipe gasket 150 can buffer active force of the annular support member 140 to interior quartz ampoule 100, reduce annular support member
140 drive in quartz ampoule 100 move up and down when, as inertia caused by impact force, can internally quartz ampoule 100 play
Certain protective effect.
In another specific embodiment, the first seal assembly includes that the interior quartz ampoule 100 set gradually from lower to upper serves as a contrast
Cover the 123, first sealing ring 122 and the first seal washer 121.In this way, main seal is played using the first sealing ring 122,
The first seal washer 121 of setting is installed at the upper end opening of the mounting groove of the first seal assembly, water, gas can be effectively prevented from opening
It is revealed at mouthful；Bushing 123 is set,
More specifically, the first seal assembly further includes interior quartz ampoule baffle ring 124, interior quartz ampoule baffle ring 124 is set to annular peace
Between 100 bushing 123 of piece installing 110 and interior quartz ampoule.Between 100 bushing 123 of ring mounts 110 and interior quartz ampoule in setting
Quartz ampoule baffle ring 124 can play certain limit and protective effect to bushing 123.
In another specific embodiment, the second seal assembly includes the second seal washer set gradually from lower to upper
131, the second sealing ring 132, Sealing shield ring 133, third sealing ring and third seal washer.Wherein, the second seal washer 131,
Second sealing ring 132 is similar with the setting principle of the first seal washer 121, the first sealing ring 122 respectively, is all to reach more
Good sealing effect；And two group of second seal washer 131 and the second sealing ring 132 are set, it further can effectively enhance second
The sealing effect of seal assembly；Sealing shield ring 133 is arranged between two the second sealing rings 132 can be to the second sealing ring 132
It plays a certain protective role, when preventing two the second sealing rings 132 from being compressed simultaneously, due to deformation, mutual extrusion makes close
The impaired even failure etc. of seal.
As another technical solution, based on the above embodiment identical inventive concept, the embodiment of the present invention also provides one
Kind process equipment, including the body that loads, lower thorax body, interior quartz ampoule 100 and outer quartz ampoule 200 further include above-mentioned for sealing interior stone
The sealing structure of English pipe.Specifically, which can be, but not limited to be growth furnace.
As another technical solution, based on the above embodiment identical inventive concept, the embodiment of the present invention also provides one
The assembly method of kind process equipment, is applied to above-mentioned process equipment, method includes: that ring mounts 110 are mounted on technique to set
In the supporting beam at standby middle part, and annular support member 140 is placed in the designated position below ring mounts 110；It will be arranged with
The interior quartz ampoule 100 of second seal assembly is placed on annular support member 140, is successively pressed the second seal assembly from the bottom up,
And first seal assembly is successively installed from the upper end of interior quartz ampoule 100；Outer quartz ampoule installation part 210 and outer quartz ampoule are successively installed
200, outer quartz ampoule installation part 210 is removably mounted on ring mounts 110, and outer quartz ampoule 200 is mounted on outer quartz ampoule peace
In piece installing 210；Annular support member 140 and interior quartz ampoule 100 are moved upward to the installation site of annular support member 140, and will
Annular support member 140 is detachably connected with ring mounts 110.
Specifically, ring mounts 110 can be mounted on the supporting beam in the middle part of process equipment by the fixed weldment 300 of burner hearth
On, annular support member 140 can be placed on to the top of burner hearth elevating mechanism, annular support member 140 is driven by elevating mechanism
And interior quartz ampoule 100 moves up.
Further, before the interior quartz ampoule 100 for being arranged with the second seal assembly being placed on annular support member 140,
Further include: on annular support member 140, the lower position of the interior quartz ampoule 100 of placement, place interior quartzy pipe gasket 150.
It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses
Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from
In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.
Claims (10)
1. a kind of for sealing the sealing structure of interior quartz ampoule, which is characterized in that the sealing structure includes:
Ring mounts are set on the outside of the interior quartz ampoule, and are provided with first on the internal perisporium of the ring mounts
Boss；
First seal assembly is arranged in the first boss, for seal the internal perisporiums of the ring mounts with it is described interior
Gap between the periphery wall of quartz ampoule；
The bottom of the ring mounts is removably arranged in annular support member, and including being used to support the interior quartz ampoule
Collet portion, and be arranged above the collet portion, and be set in the lateral support portion on the outside of the interior quartz ampoule；
Second seal assembly is arranged in the collet portion, between the lateral support portion and the interior quartz ampoule, is used for
Seal the gap between the internal perisporium of the annular support member and the periphery wall of the interior quartz ampoule.
2. according to claim 1 for sealing the sealing structure of interior quartz ampoule, which is characterized in that the lateral support portion
Lateral surface be bonded with the ring mounts, the top surface in the lateral support portion is bonded with the bottom surface of the first boss.
3. according to claim 2 for sealing the sealing structure of interior quartz ampoule, which is characterized in that the lateral support portion
Have to preset with the binding face of the ring mounts and slightly spend.
4. according to claim 1 for sealing the sealing structure of interior quartz ampoule, which is characterized in that in the lateral support
Second boss is provided on the internal perisporium in portion, second seal assembly is arranged in the second boss.
5. according to claim 4 for sealing the sealing structure of interior quartz ampoule, which is characterized in that further include interior quartz ampoule
Washer, the interior quartzy pipe gasket is between the interior quartz ampoule and the second boss.
6. according to claim 1 for sealing the sealing structure of interior quartz ampoule, which is characterized in that first sealing group
Part includes interior quartzy pipe bushing, the first sealing ring and the first seal washer set gradually from lower to upper.
7. according to claim 6 for sealing the sealing structure of interior quartz ampoule, which is characterized in that first sealing group
Part further includes interior quartz ampoule baffle ring, the interior quartz ampoule baffle ring be set to the ring mounts and the interior quartzy pipe bushing it
Between.
8. according to claim 1 for sealing the sealing structure of interior quartz ampoule, which is characterized in that second sealing group
Part includes the second seal washer set gradually from lower to upper, the second sealing ring, Sealing shield ring, third sealing ring and third sealing
Washer.
9. a kind of process equipment, including interior quartz ampoule, outer quartz ampoule and sealing structure, which is characterized in that the sealing structure
It is described in any item for sealing the sealing structure of interior quartz ampoule including claim 1-8.
10. a kind of assembly method of process equipment, which is characterized in that be applied to process equipment as claimed in claim 9, the side
Method includes:
Ring mounts are mounted in the supporting beam in the middle part of the process equipment, and annular support member is placed in the annular
Designated position below installation part；
The interior quartz ampoule for being arranged with the second seal assembly is placed on the annular support member, from the bottom up successively described in press fitting
Second seal assembly, and first seal assembly is successively installed from the upper end of the interior quartz ampoule；
Outer quartz ampoule installation part and outer quartz ampoule are successively installed, the outer quartz ampoule installation part is removably mounted at the annular peace
In piece installing, the outer quartz ampoule is mounted on the outer quartz ampoule installation part；
The annular support member and the interior quartz ampoule are moved upward to the installation site of the annular support member, and will be described
Annular support member is detachably connected with the ring mounts.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910620816.7A CN110319192B (en) | 2019-07-10 | 2019-07-10 | Sealing structure for sealing inner quartz tube, process equipment and assembling method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910620816.7A CN110319192B (en) | 2019-07-10 | 2019-07-10 | Sealing structure for sealing inner quartz tube, process equipment and assembling method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110319192A true CN110319192A (en) | 2019-10-11 |
| CN110319192B CN110319192B (en) | 2020-12-08 |
Family
ID=68121737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910620816.7A Active CN110319192B (en) | 2019-07-10 | 2019-07-10 | Sealing structure for sealing inner quartz tube, process equipment and assembling method |
Country Status (1)
| Country | Link |
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| CN (1) | CN110319192B (en) |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050046180A1 (en) * | 2003-09-02 | 2005-03-03 | Tombler Thomas W. | Apparatus and method for actuating or maintaining a seal by differential pressure |
| CN1721587A (en) * | 2005-05-23 | 2006-01-18 | 西安理工大学 | High temperature crystal growth apparatus |
| CN102691109A (en) * | 2012-06-19 | 2012-09-26 | 东莞市天域半导体科技有限公司 | Vertical silicon carbide high-temperature oxidation device |
| CN102965724A (en) * | 2012-12-18 | 2013-03-13 | 福建福晶科技股份有限公司 | Single crystal furnace with double-layer quartz tube sealing structure by crystal pulling method |
| CN103628140A (en) * | 2013-10-09 | 2014-03-12 | 东莞市天域半导体科技有限公司 | Dual sealing structure for ultra high temperature double-layer water cooling quartz tube vacuum chamber |
| US20150176907A1 (en) * | 2013-12-20 | 2015-06-25 | 9282-3087 Quebec (dba TMC Canada) | Metallurgical Furnace |
| CN204874828U (en) * | 2015-08-04 | 2015-12-16 | 深圳市捷佳伟创新能源装备股份有限公司 | Double -deck thermal -insulated connection structure of quartz capsule |
| CN206072337U (en) * | 2016-08-29 | 2017-04-05 | 北京吉阳技术股份有限公司 | A kind of boiler tube sealing structure |
| CN106702345B (en) * | 2015-07-17 | 2019-02-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of high temperature CVD equipment |
| CN109852949A (en) * | 2018-11-01 | 2019-06-07 | 北京北方华创微电子装备有限公司 | A kind of reaction chamber and semiconductor processing equipment |
-
2019
- 2019-07-10 CN CN201910620816.7A patent/CN110319192B/en active Active
Patent Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20050046180A1 (en) * | 2003-09-02 | 2005-03-03 | Tombler Thomas W. | Apparatus and method for actuating or maintaining a seal by differential pressure |
| CN1721587A (en) * | 2005-05-23 | 2006-01-18 | 西安理工大学 | High temperature crystal growth apparatus |
| CN102691109A (en) * | 2012-06-19 | 2012-09-26 | 东莞市天域半导体科技有限公司 | Vertical silicon carbide high-temperature oxidation device |
| CN102965724A (en) * | 2012-12-18 | 2013-03-13 | 福建福晶科技股份有限公司 | Single crystal furnace with double-layer quartz tube sealing structure by crystal pulling method |
| CN103628140A (en) * | 2013-10-09 | 2014-03-12 | 东莞市天域半导体科技有限公司 | Dual sealing structure for ultra high temperature double-layer water cooling quartz tube vacuum chamber |
| US20150176907A1 (en) * | 2013-12-20 | 2015-06-25 | 9282-3087 Quebec (dba TMC Canada) | Metallurgical Furnace |
| CN106702345B (en) * | 2015-07-17 | 2019-02-01 | 中国科学院苏州纳米技术与纳米仿生研究所 | A kind of high temperature CVD equipment |
| CN204874828U (en) * | 2015-08-04 | 2015-12-16 | 深圳市捷佳伟创新能源装备股份有限公司 | Double -deck thermal -insulated connection structure of quartz capsule |
| CN206072337U (en) * | 2016-08-29 | 2017-04-05 | 北京吉阳技术股份有限公司 | A kind of boiler tube sealing structure |
| CN109852949A (en) * | 2018-11-01 | 2019-06-07 | 北京北方华创微电子装备有限公司 | A kind of reaction chamber and semiconductor processing equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110319192B (en) | 2020-12-08 |
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