CN210287587U - Quartz tube high vacuum seal structure - Google Patents
Quartz tube high vacuum seal structure Download PDFInfo
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- CN210287587U CN210287587U CN201921312063.5U CN201921312063U CN210287587U CN 210287587 U CN210287587 U CN 210287587U CN 201921312063 U CN201921312063 U CN 201921312063U CN 210287587 U CN210287587 U CN 210287587U
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Abstract
The utility model discloses a high vacuum sealing structure of a quartz tube, which comprises a sealing element arranged at the end part of the quartz tube, a first sealing ring and a second sealing ring which are arranged between the sealing element and the quartz tube, a locking mechanism used for locking the sealing element at the end part of the quartz tube, an annular gap which is arranged in the sealing element and is positioned between the first sealing ring and the second sealing ring, and an air suction opening which is arranged on the sealing element and is communicated with the annular gap; the first sealing ring and the second sealing ring are in a horizontal arrangement state and a vertical arrangement state; when the first sealing ring and the second sealing ring are in a vertical arrangement state, the sealing structure further comprises an annular spacer arranged in the annular gap, and a first air hole and a second air hole which are arranged on the annular spacer and communicated with each other, wherein the first air hole is communicated with the air exhaust opening, and the second air hole is used for communicating the first sealing ring and the second sealing ring. The utility model relates to a quartz capsule high vacuum seal structure, arbitrary sealing washer department takes place to leak, and the high vacuum environment in the quartz capsule can continue to be guaranteed to the homoenergetic.
Description
Technical Field
The utility model relates to a quartz capsule high vacuum seal structure.
Background
Silicon carbide single crystals are generally grown in quartz crucibles, the ends of which are generally sealed by a single sealing ring. When the sealing ring is leaked, the inside of the quartz crucible can be directly communicated with the external atmospheric pressure, and the vacuum working environment in the quartz crucible is greatly damaged.
Disclosure of Invention
The utility model aims at providing a high vacuum seal structure of quartz capsule can realize the high vacuum environment in the quartz capsule, even if the sealing washer department that is close the quartz capsule tip takes place to leak, also can continue to guarantee the high vacuum environment in the quartz capsule.
In order to achieve the above purpose, the utility model adopts the technical scheme that:
a high vacuum sealing structure of a quartz tube comprises a sealing element arranged at the end part of the quartz tube, a first sealing ring and a second sealing ring which are arranged between the sealing element and the quartz tube, a locking mechanism used for locking the sealing element at the end part of the quartz tube, an annular gap arranged in the sealing element and positioned between the first sealing ring and the second sealing ring, and an air pumping opening which is arranged on the sealing element and communicated with the annular gap;
the first sealing ring and the second sealing ring are in a horizontal arrangement state and a vertical arrangement state;
when the first sealing ring and the second sealing ring are in the vertical arrangement state, the sealing structure further comprises an annular spacer arranged in the annular gap, and a first air hole and a second air hole which are arranged on the annular spacer and communicated with each other, wherein the first air hole is communicated with the air suction opening, and the second air hole is used for communicating the first sealing ring and the second sealing ring.
Preferably, the sealing member is disc-shaped, the first sealing ring and the second sealing ring are arranged between the sealing member and the end face of the end part of the quartz tube, and the first sealing ring and the second sealing ring are in the horizontal arrangement state.
More preferably, the locking mechanism comprises a first clamp ring which is annularly abutted against the outer peripheral part of the end part of the quartz tube, and a first bolt for locking the sealing element on the first clamp ring.
Preferably, the sealing member is cup-shaped, the first and second sealing rings are provided between an inner peripheral portion of the sealing member and an outer peripheral portion of the quartz tube, and the first and second sealing rings are in the vertical arrangement.
More preferably, the locking mechanism includes a second clamp ring that abuts against an outer peripheral portion of the quartz tube, and a second bolt for locking the sealing member on the second clamp ring, and the second clamp ring includes a convex ring that extends between the inner peripheral portion of the sealing member and the outer peripheral portion of the quartz tube and abuts against the first sealing ring or the second sealing ring.
Preferably, the first sealing ring, the second sealing ring, the quartz tube and the annular spacer all extend coaxially.
Because of above-mentioned technical scheme's application, compared with the prior art, the utility model have the following advantage: the utility model relates to a quartz capsule high vacuum seal structure is through setting up two sealing washers between the tip at sealing member and quartz capsule to through the annular gap evacuation of extraction opening between with two sealing washers, arbitrary sealing washer department takes place to leak, and the high vacuum environment in the quartz capsule can continue to be guaranteed to the homoenergetic.
Drawings
Fig. 1 is a schematic structural diagram of the device of the present invention.
Wherein: 1. a quartz tube; 2. a seal member; 3. a first seal ring; 4. a second seal ring; 5. an annular gap; 6. an air extraction opening; 7. a first clamp ring; 8. a first bolt; 9. a second clamp ring; 91. a convex ring; 10. a second bolt; 11. a first air hole; 12. a second air hole; 13. and an annular spacer.
Detailed Description
The technical solution of the present invention will be further explained with reference to the accompanying drawings.
Referring to fig. 1, the high vacuum sealing structure for the quartz tube comprises a sealing element 2 arranged at the end of the quartz tube 1, a first sealing ring 3 and a second sealing ring 4 arranged between the sealing element 2 and the quartz tube 1, a locking mechanism for locking the sealing element 2 at the end of the quartz tube 1, an annular gap 5 arranged in the sealing element 2 and located between the first sealing ring 3 and the second sealing ring 4, and an air suction opening 6 arranged on the sealing element 2 and communicated with the annular gap 5.
In the present embodiment, the quartz tube 1 extends in the up-down direction. The first seal ring 3 and the second seal ring 4 have a horizontally arranged state and a vertically arranged state:
when the first sealing ring 3 and the second sealing ring 4 are in a horizontal arrangement state, the first sealing ring 3 is positioned in the second sealing ring 4, and the first sealing ring 3, the second sealing ring 4 and the quartz tube 1 coaxially extend. When the second sealing ring 4 leaks, the high vacuum environment in the quartz tube 1 cannot be damaged due to the existence of the first sealing ring 3; when the first sealing ring 3 leaks, the annular gap 5 between the first sealing ring 3 and the second sealing ring 4 is vacuumized, the leaking part is communicated with the annular gap 5 and is not communicated with the external atmospheric pressure, and therefore the high-vacuum environment in the quartz tube 1 cannot be damaged.
When first sealing washer 3 and second sealing washer 4 are in vertical arrangement state, seal structure is still including locating annular spacer 13 in annular clearance 5, set up on annular spacer 13 and first gas pocket 11 and the second gas pocket 12 of intercommunication each other, first gas pocket 11 and extraction opening 6 intercommunication, second gas pocket 12 is used for communicateing first sealing washer 3 and second sealing washer 4, first gas pocket 11 extends along the horizontal direction, second gas pocket 12 extends along vertical direction, the upper and lower both ends of second gas pocket 12 all communicate with annular clearance 5. The first sealing ring 3 is close to the lower end of the quartz tube 1, and the second sealing ring 4 is far away from the lower end of the quartz tube 1. Because the material of sealing washer is softer, in order to guarantee the even deformation of two sealing washers, set up harder annular shock insulator 13 between the two, the both ends of annular shock insulator 13 are used for two sealing washers of conflict respectively, and first sealing washer 3, second sealing washer 4, annular shock insulator 13, the coaxial extension of quartz capsule 1. Similarly, when the second sealing ring 4 leaks, the high vacuum environment in the quartz tube 1 cannot be damaged due to the existence of the first sealing ring 3; when the first sealing ring 3 leaks, the annular gap 5 between the first sealing ring 3 and the second sealing ring 4 is vacuumized, the leaking part is communicated with the annular gap 5 and is not communicated with the external atmospheric pressure, and therefore the high-vacuum environment in the quartz tube 1 cannot be damaged.
In this embodiment, the sealing member 2 corresponding to the upper opening of the quartz tube 1 is in a disc shape, the first sealing ring 3 and the second sealing ring 4 are disposed between the lower surface of the sealing member 2 and the upper end surface of the end portion of the quartz tube 1, and the first sealing ring 3 and the second sealing ring 4 are in a horizontal arrangement state. The locking mechanism comprises a first compression ring 7 which is annularly abutted against the periphery of the outer side of the end part of the quartz tube 1 and is positioned below the sealing element 2, and a first bolt 8 for locking the sealing element 2 on the first compression ring 7. The outer diameter of the first compression ring 7 is the same as that of the disc-shaped sealing element 2, and the first compression ring and the disc-shaped sealing element are locked with each other in the vertical direction through a first bolt 8; the inner diameter of the first clamp ring 7 is the same as the outer diameter of the upper end of the quartz tube 1.
In the present embodiment, the sealing member 2 corresponding to the lower opening of the quartz tube 1 is in the shape of a cup with an upward opening, the first sealing ring 3 and the second sealing ring 4 are disposed between the inner peripheral portion of the sealing member 2 and the outer peripheral portion of the quartz tube 1, and the first sealing ring 3 and the second sealing ring 4 are in a vertical arrangement. The locking mechanism comprises a second compression ring 9 which is annularly abutted against the periphery of the outer side of the quartz tube 1 and is positioned above the sealing element 2, and a second bolt 10 for locking the sealing element 2 on the second compression ring 9. The outer diameter of the second clamp ring 9 is the same as the outer diameter of the cup-shaped seal 2, and the two are locked to each other in the vertical direction by a second bolt 10; the inner diameter of the second clamp ring 9 is the same as the outer diameter of the quartz tube 1. The second clamp ring 9 includes a protruding ring 91 for protruding between the inner peripheral portion of the seal member 2 and the outer peripheral portion of the quartz tube 1 and for abutting against the second seal ring 4.
The above embodiments are only for illustrating the technical concept and features of the present invention, and the purpose of the embodiments is to enable people skilled in the art to understand the contents of the present invention and to implement the present invention, which cannot limit the protection scope of the present invention. All equivalent changes and modifications made according to the spirit of the present invention should be covered by the protection scope of the present invention.
Claims (6)
1. The utility model provides a quartz capsule high vacuum seal structure which characterized in that: the quartz tube sealing device comprises a sealing element arranged at the end part of the quartz tube, a first sealing ring and a second sealing ring which are arranged between the sealing element and the quartz tube, a locking mechanism used for locking the sealing element at the end part of the quartz tube, an annular gap arranged in the sealing element and positioned between the first sealing ring and the second sealing ring, and an air suction opening which is arranged on the sealing element and communicated with the annular gap;
the first sealing ring and the second sealing ring are in a horizontal arrangement state and a vertical arrangement state;
when the first sealing ring and the second sealing ring are in the vertical arrangement state, the sealing structure further comprises an annular spacer arranged in the annular gap, and a first air hole and a second air hole which are arranged on the annular spacer and communicated with each other, wherein the first air hole is communicated with the air suction opening, and the second air hole is used for communicating the first sealing ring and the second sealing ring.
2. A quartz tube high vacuum seal structure according to claim 1, characterized in that: the sealing member is disc-shaped, the first sealing ring and the second sealing ring are arranged between the sealing member and the end face of the end part of the quartz tube, and the first sealing ring and the second sealing ring are in a horizontal arrangement state.
3. A quartz tube high vacuum seal structure according to claim 2, characterized in that: the locking mechanism comprises a first compression ring which is annularly abutted against the periphery of the outer side of the end part of the quartz tube, and a first bolt which is used for locking the sealing element on the first compression ring.
4. A quartz tube high vacuum seal structure according to claim 1, characterized in that: the sealing element is cup-shaped, the first sealing ring and the second sealing ring are arranged between the inner peripheral part of the sealing element and the outer peripheral part of the quartz tube, and the first sealing ring and the second sealing ring are in the vertical arrangement state.
5. The high vacuum seal structure of a quartz tube according to claim 4, characterized in that: the locking mechanism comprises a second pressing ring which is annularly abutted to the periphery of the outer side of the quartz tube and a second bolt used for locking the sealing element on the second pressing ring, and the second pressing ring comprises a convex ring which is used for extending between the periphery of the inner side of the sealing element and the periphery of the outer side of the quartz tube and is used for abutting against the first sealing ring or the second sealing ring.
6. A quartz tube high vacuum seal structure according to claim 1, characterized in that: the first sealing ring, the second sealing ring, the quartz tube and the annular spacer are coaxially extended.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921312063.5U CN210287587U (en) | 2019-08-14 | 2019-08-14 | Quartz tube high vacuum seal structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921312063.5U CN210287587U (en) | 2019-08-14 | 2019-08-14 | Quartz tube high vacuum seal structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN210287587U true CN210287587U (en) | 2020-04-10 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201921312063.5U Active CN210287587U (en) | 2019-08-14 | 2019-08-14 | Quartz tube high vacuum seal structure |
Country Status (1)
| Country | Link |
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| CN (1) | CN210287587U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114197058A (en) * | 2021-11-12 | 2022-03-18 | 上海汉虹精密机械有限公司 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
-
2019
- 2019-08-14 CN CN201921312063.5U patent/CN210287587U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114197058A (en) * | 2021-11-12 | 2022-03-18 | 上海汉虹精密机械有限公司 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
| CN114197058B (en) * | 2021-11-12 | 2023-11-21 | 上海汉虹精密机械有限公司 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20210201 Address after: No.6, new material high tech Industrial Park, Baota District, Yan'an City, Shaanxi Province Patentee after: Yan'an xingteliang Technology Innovation Co.,Ltd. Address before: 8 Donglai Dongli Road, yangshe Town, Zhangjiagang City, Suzhou City, Jiangsu Province Patentee before: JIANGSU XINGTELIANG TECHNOLOGY Co.,Ltd. |
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| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20221214 Address after: No. 8 Donglai Dongli Road, Yangshe Town, Zhangjiagang City, Suzhou City, Jiangsu Province, 215000 (Xingteliang) Patentee after: JIANGSU XINGTELIANG TECHNOLOGY CO.,LTD. Address before: No.6, new material high tech Industrial Park, Baota District, Yan'an City, Shaanxi Province Patentee before: Yan'an xingteliang Technology Innovation Co.,Ltd. |