CN114197058A - Combined quartz cylinder cover for silicon carbide crystal growth furnace - Google Patents
Combined quartz cylinder cover for silicon carbide crystal growth furnace Download PDFInfo
- Publication number
- CN114197058A CN114197058A CN202111341913.6A CN202111341913A CN114197058A CN 114197058 A CN114197058 A CN 114197058A CN 202111341913 A CN202111341913 A CN 202111341913A CN 114197058 A CN114197058 A CN 114197058A
- Authority
- CN
- China
- Prior art keywords
- quartz cylinder
- silicon carbide
- top cover
- cylinder cover
- carbide crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010453 quartz Substances 0.000 title claims abstract description 41
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 41
- 239000013078 crystal Substances 0.000 title claims abstract description 18
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 18
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 48
- 230000000670 limiting effect Effects 0.000 claims abstract description 35
- 230000000694 effects Effects 0.000 description 4
- 238000010276 construction Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 239000002775 capsule Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a combined quartz cylinder cover for a silicon carbide crystal growth furnace, which comprises a cylinder cover main body for a quartz cylinder, wherein the cylinder cover main body comprises a fixed top disc, a top cover and a sealing element; the top cover limiting ring is screwed with three adjusting screws, the lower end parts of the three adjusting screws are respectively screwed with a pressure head, the three adjusting screws are respectively fixed with nuts, the nuts are positioned above the pressure heads, the pressure heads abut against the sealing elements, and the radial limiting ring and the sealing elements are both attached to the outer circular surface of the quartz cylinder. The invention realizes the requirement of high ultimate vacuum degree required by the growth of the silicon carbide furnace crystal through the combination of the top cover assembly and the quartz cylinder, and the top cover assembly is positioned in the axial direction, the radial direction and the circumferential direction.
Description
Technical Field
The invention relates to the field of silicon carbide crystal growing furnaces, in particular to a combined quartz cylinder cover for a silicon carbide crystal growing furnace.
Background
The silicon carbide crystal growth furnace adopts a quartz cylinder as a main chamber, which becomes the mainstream of the industry, a top cover of the quartz cylinder is buckled on the quartz cylinder by means of gravity and vacuum, and the top cover is not positioned on the circumference and can rotate relatively; the top cover can be inclined to cause sealing failure in an abnormal state; these are problems to be solved by the quartz capsule lid structure.
Disclosure of Invention
Aiming at the problems in the prior art, the invention provides a combined quartz cylinder cover for a silicon carbide crystal growth furnace, which is used for solving at least one technical problem.
The technical scheme of the invention is as follows: a combined quartz cylinder cover for a silicon carbide crystal growth furnace comprises a cylinder cover main body for a quartz cylinder and is characterized in that the cylinder cover main body comprises a fixed top disc, a top cover and a sealing element, the fixed top disc is connected with a frame of the quartz cylinder, the top cover is fixed on the fixed top disc through a housing, the sealing element is positioned in the top cover, a radial limiting ring is installed on the inner wall of the housing, the radial limiting ring and the housing are in coaxial relation, and a top cover limiting ring is fixed on the outer wall of the housing;
the top cover limiting ring is screwed with three adjusting screws, the lower end parts of the three adjusting screws are respectively screwed with pressure heads, nuts are respectively fixed on the three adjusting screws, the nuts are located above the pressure heads, the pressure heads abut against the sealing elements, and the radial limiting ring and the sealing elements are attached to the outer circular surface of the quartz cylinder.
The invention realizes the requirement of high ultimate vacuum degree required by the growth of the silicon carbide furnace crystal through the combination of the top cover assembly and the quartz cylinder, reduces the relative micro-displacement of the top cover assembly after the installation through the positioning of the top cover assembly in the axial direction, the radial direction and the circumferential direction, improves the stability of a sealing system and also improves the reliability of sealing. And the two limiting rings can provide circumferential limiting and axial limiting for the combined quartz cylinder cover to support and connect. The pressure head is screwed to press the sealing element, the axial limiting effect is achieved on the sealing element, the sealing element cannot be loosened axially, and the stable state of the sealing structure is guaranteed. The radial limiting ring and the sealing element are both attached to the outer circular surface of the quartz cylinder, so that the quartz cylinder can be prevented from radially swinging, and the stable state of the sealing structure is ensured. The fixed top disk component is connected with the frame and plays a fixed reference role.
Further preferably, the seal is a high vacuum seal. The ultrahigh vacuum in the quartz cylinder can be realized, the leakage is extremely small, and the pressure rise in a given time period is very small.
Further preferably, two extending angles are arranged on the top cover limiting ring, two cylindrical rods are arranged on the sealing element, and the two extending angles are respectively attached to the two cylindrical rods.
After the sealing state of the sealing element is stable, the invention prevents the circumference from relatively rotating, and ensures the stable state of the sealing structure.
Preferably, the two extending angles are circular ring structures with gaps, the openings of the circular ring structures face the cylindrical rod, the openings of the circular ring structures are smaller than the diameter of the cylindrical rod, and the openings of the circular ring structures are elastic structures.
The invention can better limit the cylindrical rod by optimizing the structure of the extending angle.
Further preferably, the outer diameter of the pressure head gradually increases from top to bottom, and the contact surface of the pressure head and the sealing element is an arc surface.
The invention optimizes the structure of the pressure head, can be better contacted with the sealing element, and improves the whole sealing effect.
Further preferably, the arrangement positions of the three adjusting screws are in a triangular structure. Thereby can better evenly distributed play the effect of whole sealed.
Preferably, the fixed top plate is provided with a limit groove, and the limit groove is embedded with the outer edge of the housing.
The limiting groove is formed in the fixed top disc, so that the positioning of the housing can be facilitated, and the operation is facilitated.
Drawings
FIG. 1 is a schematic view of the construction of the cartridge cover body of the present invention;
FIG. 2 is a cross-sectional view of the housing of the present invention;
FIG. 3 is a schematic view of a portion of the construction of the housing of the present invention;
FIG. 4 is a schematic view of the protrusion angle and cylindrical rod of the present invention.
In the figure: 1. fixing the top plate; 2. a top cover; 3. a seal member; 4. a quartz cylinder; 11. a housing; 12. a radial spacing ring; 13. a top cover limiting ring; 14. a pressure head; 15. an adjusting screw; 16. a nut; 17. a protrusion angle; 18. a cylindrical rod.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1-4, a combined quartz cylinder cover for a silicon carbide crystal growth furnace comprises a cylinder cover main body for a quartz cylinder, wherein the cylinder cover main body comprises a fixed top disc 1, a top cover 2 and a sealing element 3, the fixed top disc is connected with a frame of the quartz cylinder 4, the top cover is fixed on the fixed top disc through a cover shell 11, the sealing element is positioned in the top cover, a radial limiting ring 12 is installed on the inner wall of the cover shell, the radial limiting ring and the cover shell are in a coaxial relationship, and a top cover limiting ring 13 is fixed on the outer wall of the cover shell; the top cover limiting ring is screwed with three adjusting screws 15, the lower end parts of the three adjusting screws are respectively screwed with a pressure head 14, the three adjusting screws are respectively fixed with nuts 16, the nuts are positioned above the pressure head, the pressure head is abutted against the sealing element, and the radial limiting ring and the sealing element are both attached to the outer circular surface of the quartz cylinder.
The invention realizes the requirement of high ultimate vacuum degree required by the growth of the silicon carbide furnace crystal through the combination of the top cover assembly and the quartz cylinder, reduces the relative micro-displacement of the top cover assembly after the installation through the positioning of the top cover assembly in the axial direction, the radial direction and the circumferential direction, improves the stability of a sealing system and also improves the reliability of sealing. And the two limiting rings can provide circumferential limiting and axial limiting for the combined quartz cylinder cover to support and connect. The pressure head is screwed to press the sealing element, the axial limiting effect is achieved on the sealing element, the sealing element cannot be loosened axially, and the stable state of the sealing structure is guaranteed. The radial limiting ring and the sealing element are both attached to the outer circular surface of the quartz cylinder, so that the quartz cylinder can be prevented from radially swinging, and the stable state of the sealing structure is ensured. The fixed top disk component is connected with the frame and plays a fixed reference role.
Further preferably, the seal is a high vacuum seal. The ultrahigh vacuum in the quartz cylinder can be realized, the leakage is extremely small, and the pressure rise in a given time period is very small.
Further preferably, two extending angles 17 are arranged on the top cover limiting ring, two cylindrical rods 18 are arranged on the sealing element, and the two extending angles are respectively attached to the two cylindrical rods. After the sealing state of the sealing element is stable, the invention prevents the circumference from relatively rotating, and ensures the stable state of the sealing structure.
Preferably, the two extending angles are circular ring structures with notches, the openings of the circular ring structures face the cylindrical rod, the diameter of the openings of the circular ring structures is smaller than that of the cylindrical rod, and the openings of the circular ring structures are elastic structures. The invention can better limit the cylindrical rod by optimizing the structure of the extending angle.
Further preferably, the outer diameter of the pressure head gradually increases from top to bottom, and the contact surface of the pressure head and the sealing element is an arc surface. The invention optimizes the structure of the pressure head, can be better contacted with the sealing element, and improves the whole sealing effect.
Further preferably, the arrangement positions of the three adjusting screws are in a triangular structure. Thereby can better evenly distributed play the effect of whole sealed.
Preferably, the fixed top plate is provided with a limit groove, and the limit groove is embedded with the outer edge of the housing. The limiting groove is formed in the fixed top disc, so that the positioning of the housing can be facilitated, and the operation is facilitated.
The foregoing is only a preferred embodiment of the present invention, and it should be noted that it is obvious to those skilled in the art that various modifications and improvements can be made without departing from the principle of the present invention, and these modifications and improvements should also be considered as the protection scope of the present invention.
Claims (7)
1. A combined quartz cylinder cover for a silicon carbide crystal growth furnace comprises a cylinder cover main body for a quartz cylinder and is characterized in that the cylinder cover main body comprises a fixed top disc, a top cover and a sealing element, the fixed top disc is connected with a frame of the quartz cylinder, the top cover is fixed on the fixed top disc through a housing, the sealing element is positioned in the top cover, a radial limiting ring is installed on the inner wall of the housing, the radial limiting ring and the housing are in coaxial relation, and a top cover limiting ring is fixed on the outer wall of the housing;
the top cover limiting ring is screwed with three adjusting screws, the lower end parts of the three adjusting screws are respectively screwed with pressure heads, nuts are respectively fixed on the three adjusting screws, the nuts are located above the pressure heads, the pressure heads abut against the sealing elements, and the radial limiting ring and the sealing elements are attached to the outer circular surface of the quartz cylinder.
2. The modular quartz lid of claim 1, wherein the seal is a high vacuum seal.
3. The combined quartz cylinder cover for a silicon carbide crystal growth furnace as claimed in claim 1, wherein the top cover limiting ring is provided with two protruding angles, the sealing member is provided with two cylindrical rods, and the two protruding angles are respectively attached to the two cylindrical rods.
4. The combined quartz cylinder cover for the silicon carbide crystal growing furnace as claimed in claim 3, wherein the two extending angles are a notched ring structure, the opening of the ring structure faces the cylindrical rod, the opening of the ring structure is smaller than the diameter of the cylindrical rod, and the opening of the ring structure is of an elastic structure.
5. The combined quartz cylinder cover for a silicon carbide crystal growth furnace of claim 1, wherein the outside diameter of the pressure head increases gradually from top to bottom, and the contact surface of the pressure head and the sealing member is a cambered surface.
6. The combined quartz cylinder cover for a silicon carbide crystal growth furnace according to claim 1, wherein the three adjusting screws are arranged in a triangular structure.
7. The combined quartz cylinder cover for a silicon carbide crystal growth furnace of claim 1, wherein the fixed top plate is provided with a limiting groove, and the limiting groove is embedded with the outer edge of the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111341913.6A CN114197058B (en) | 2021-11-12 | 2021-11-12 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111341913.6A CN114197058B (en) | 2021-11-12 | 2021-11-12 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114197058A true CN114197058A (en) | 2022-03-18 |
| CN114197058B CN114197058B (en) | 2023-11-21 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111341913.6A Active CN114197058B (en) | 2021-11-12 | 2021-11-12 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114197058B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03193695A (en) * | 1989-12-22 | 1991-08-23 | Shin Etsu Handotai Co Ltd | Single crystal pulling up device |
| US5533465A (en) * | 1995-01-20 | 1996-07-09 | E. I. Du Pont De Nemours And Company | Hydrothermal crystallization vessels |
| JPH10137575A (en) * | 1996-11-12 | 1998-05-26 | Norimasa Ozaki | Vessel for hydrothermal reaction |
| CN210287587U (en) * | 2019-08-14 | 2020-04-10 | 江苏星特亮科技有限公司 | Quartz tube high vacuum seal structure |
| CN213147419U (en) * | 2020-06-29 | 2021-05-07 | 浙江晶盛机电股份有限公司 | Furnace chamber structure of silicon carbide furnace |
| CN113606337A (en) * | 2021-07-30 | 2021-11-05 | 上海汉虹精密机械有限公司 | High vacuum sealing structure for inner circle of quartz cylinder |
-
2021
- 2021-11-12 CN CN202111341913.6A patent/CN114197058B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03193695A (en) * | 1989-12-22 | 1991-08-23 | Shin Etsu Handotai Co Ltd | Single crystal pulling up device |
| US5533465A (en) * | 1995-01-20 | 1996-07-09 | E. I. Du Pont De Nemours And Company | Hydrothermal crystallization vessels |
| JPH10137575A (en) * | 1996-11-12 | 1998-05-26 | Norimasa Ozaki | Vessel for hydrothermal reaction |
| CN210287587U (en) * | 2019-08-14 | 2020-04-10 | 江苏星特亮科技有限公司 | Quartz tube high vacuum seal structure |
| CN213147419U (en) * | 2020-06-29 | 2021-05-07 | 浙江晶盛机电股份有限公司 | Furnace chamber structure of silicon carbide furnace |
| CN113606337A (en) * | 2021-07-30 | 2021-11-05 | 上海汉虹精密机械有限公司 | High vacuum sealing structure for inner circle of quartz cylinder |
Non-Patent Citations (1)
| Title |
|---|
| 袁长路: "DRF-B80型蓝宝石晶体生长炉的研制", 人工晶体学报, vol. 41, no. 5, pages 1463 - 1467 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114197058B (en) | 2023-11-21 |
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