CN114197058B - Combined quartz cylinder cover for silicon carbide crystal growth furnace - Google Patents
Combined quartz cylinder cover for silicon carbide crystal growth furnace Download PDFInfo
- Publication number
- CN114197058B CN114197058B CN202111341913.6A CN202111341913A CN114197058B CN 114197058 B CN114197058 B CN 114197058B CN 202111341913 A CN202111341913 A CN 202111341913A CN 114197058 B CN114197058 B CN 114197058B
- Authority
- CN
- China
- Prior art keywords
- cover
- limiting ring
- fixed
- silicon carbide
- top cover
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000010453 quartz Substances 0.000 title claims abstract description 39
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 39
- 239000013078 crystal Substances 0.000 title claims abstract description 18
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 18
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 18
- 238000007789 sealing Methods 0.000 claims abstract description 48
- 239000002775 capsule Substances 0.000 claims 4
- 230000000694 effects Effects 0.000 description 6
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000006978 adaptation Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/36—Carbides
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a combined quartz cylinder cover for a silicon carbide crystal growing furnace, which comprises a cylinder cover main body for a quartz cylinder, wherein the cylinder cover main body comprises a fixed top disk, a top cover and a sealing piece, the fixed top disk is connected with a frame of the quartz cylinder, the top cover is fixed on the fixed top disk through a cover shell, the sealing piece is positioned in the top cover, a radial limiting ring is arranged on the inner wall of the cover shell, the radial limiting ring is in coaxial relation with the cover shell, and a top cover limiting ring is fixed on the outer wall of the cover shell; three adjusting screws are screwed on the top cover limiting ring, pressure heads are screwed on the lower end parts of the three adjusting screws respectively, nuts are fixed on the three adjusting screws respectively, the nuts are located above the pressure heads, the pressure heads are abutted against the sealing piece, and the radial limiting ring and the sealing piece are all attached to the outer circular surface of the quartz cylinder. The invention realizes the high-limit vacuum degree requirement required by the crystal growth of the silicon carbide furnace through the combination of the top cover assembly and the quartz cylinder, and positions the top cover assembly in the axial, radial and circumferential directions.
Description
Technical Field
The invention relates to the field of silicon carbide crystal growth furnaces, in particular to a combined quartz cylinder cover for a silicon carbide crystal growth furnace.
Background
The silicon carbide crystal growth furnace adopts a quartz cylinder as a main chamber, so that the main chamber becomes the main stream of the industry, the top cover of the quartz cylinder is buckled on the quartz cylinder by means of gravity and vacuum, and the circumference of the top cover is not positioned and can relatively rotate; the top cover can be inclined in abnormal state to cause sealing failure; these are all problems to be solved in the structure of the quartz cylinder cover.
Disclosure of Invention
The invention provides a combined quartz cylinder cover for a silicon carbide crystal growing furnace, which aims at solving at least one technical problem.
The technical scheme of the invention is as follows: the combined quartz cylinder cover for the silicon carbide crystal growth furnace comprises a cylinder cover main body for a quartz cylinder and is characterized in that the cylinder cover main body comprises a fixed top disc, a top cover and a sealing element, wherein the fixed top disc is connected with a frame of the quartz cylinder, the top cover is fixed on the fixed top disc through a cover shell, the sealing element is positioned in the top cover, a radial limiting ring is arranged on the inner wall of the cover shell, the radial limiting ring and the cover shell are in coaxial relation, and a top cover limiting ring is fixed on the outer wall of the cover shell;
the three adjusting screws are screwed on the top cover limiting ring, the pressure heads are screwed on the lower end parts of the three adjusting screws respectively, nuts are fixed on the three adjusting screws respectively, the nuts are located above the pressure heads, the pressure heads are abutted against the sealing piece, and the radial limiting ring and the sealing piece are attached to the outer circular surface of the quartz cylinder.
The invention realizes the high-limit vacuum degree requirement required by the crystal growth of the silicon carbide furnace through the combination of the top cover assembly and the quartz cylinder, reduces the relative micro-displacement of the top cover assembly after the installation is finished through positioning the top cover assembly in the axial, radial and circumferential directions, improves the stability of a sealing system and improves the sealing reliability. And can provide the spacing and the spacing support connection of axial of circumferencial direction for the quartzy cover of combination through two spacing rings. The pressing head is screwed to press the sealing piece, so that the sealing piece is axially limited, the sealing piece cannot be axially loosened, and the stability of the sealing structure is ensured. The radial limiting ring and the sealing piece are attached to the outer circular surface of the quartz cylinder, so that the quartz cylinder can be prevented from swinging radially, and the stability of the sealing structure is ensured. The fixed top disk part is connected with the frame and plays a role of a fixed reference.
Further preferably, the seal is a high vacuum seal member. The ultra-high vacuum in the quartz cylinder can be realized, the leakage is very small, and the pressure rise in a given time period is very small.
Further preferably, the top cover limiting ring is provided with two extending angles, the sealing piece is provided with two cylindrical rods, and the two extending angles are attached to the two cylindrical rods.
After the sealing state of the sealing element is stable, the invention prevents the circumference from relative rotation, and ensures the stability of the sealing structure.
Further preferably, the two extending angles are ring structures with notches, the opening of the ring structures faces to the cylindrical rod, the opening of the ring structures is smaller than the diameter of the cylindrical rod, and the opening of the ring structures is of an elastic structure.
According to the invention, the structure of the extending angle is optimized, so that the limit effect on the cylindrical rod can be better achieved.
Further preferably, the outer diameter of the pressure head gradually increases from top to bottom, and the contact surface of the pressure head and the sealing element is an arc surface.
The invention optimizes the structure of the pressure head, can better contact with the sealing element, and improves the integral sealing effect.
Further preferably, the arrangement positions of the three adjusting screws are in a triangular structure. Thus, the even distribution that can be better plays the effect of whole sealed.
Further preferably, the fixed top plate is provided with a limit groove, and the limit groove is embedded with the outer edge of the housing.
According to the invention, the limiting groove is formed in the fixed top plate, so that the positioning of the housing can be facilitated, and the operation is convenient.
Drawings
FIG. 1 is a schematic view of the structure of the cap body of the present invention;
FIG. 2 is a cross-sectional view of the housing of the present invention;
FIG. 3 is a schematic view of a portion of the structure of the housing of the present invention;
FIG. 4 is a schematic view of the protrusion angle and cylindrical rod of the present invention.
In the figure: 1. fixing a top plate; 2. a top cover; 3. a seal; 4. a quartz cylinder; 11. a housing; 12. a radial limiting ring; 13. a top cover limiting ring; 14. a pressure head; 15. an adjusting screw; 16. a nut; 17. a protrusion angle; 18. a cylindrical rod.
Detailed Description
The invention is further described below with reference to the accompanying drawings.
Referring to fig. 1-4, a combined quartz cylinder cover for a silicon carbide crystal growing furnace comprises a cylinder cover main body for a quartz cylinder, wherein the cylinder cover main body comprises a fixed top disk 1, a top cover 2 and a sealing element 3, the fixed top disk is connected with a frame of the quartz cylinder 4, the top cover is fixed on the fixed top disk through a cover shell 11, the sealing element is positioned in the top cover, a radial limiting ring 12 is arranged on the inner wall of the cover shell, the radial limiting ring and the cover shell are in coaxial relation, and a top cover limiting ring 13 is fixed on the outer wall of the cover shell; three adjusting screws 15 are screwed on the top cover limiting ring, pressure heads 14 are screwed on the lower end parts of the three adjusting screws respectively, nuts 16 are fixed on the three adjusting screws respectively, the nuts are located above the pressure heads, the pressure heads are abutted against the sealing piece, and the radial limiting ring and the sealing piece are attached to the outer circular surface of the quartz cylinder.
The invention realizes the high-limit vacuum degree requirement required by the crystal growth of the silicon carbide furnace through the combination of the top cover assembly and the quartz cylinder, reduces the relative micro-displacement of the top cover assembly after the installation is finished through positioning the top cover assembly in the axial, radial and circumferential directions, improves the stability of a sealing system and improves the sealing reliability. And can provide the spacing and the spacing support connection of axial of circumferencial direction for the quartzy cover of combination through two spacing rings. The pressing head is screwed to press the sealing piece, so that the sealing piece is axially limited, the sealing piece cannot be axially loosened, and the stability of the sealing structure is ensured. The radial limiting ring and the sealing piece are attached to the outer circular surface of the quartz cylinder, so that the quartz cylinder can be prevented from swinging radially, and the stability of the sealing structure is ensured. The fixed top disk part is connected with the frame and plays a role of a fixed reference.
Further preferably, the seal is a high vacuum seal member. The ultra-high vacuum in the quartz cylinder can be realized, the leakage is very small, and the pressure rise in a given time period is very small.
Further preferably, the top cover limiting ring is provided with two extending angles 17, the sealing element is provided with two cylindrical rods 18, and the two extending angles are attached to the two cylindrical rods. After the sealing state of the sealing element is stable, the invention prevents the circumference from relative rotation, and ensures the stability of the sealing structure.
Further preferably, the two extending angles are ring structures with notches, the openings of the ring structures face the cylindrical rod, the openings of the ring structures are smaller than the diameter of the cylindrical rod, and the openings of the ring structures are elastic structures. According to the invention, the structure of the extending angle is optimized, so that the limit effect on the cylindrical rod can be better achieved.
Further preferably, the outer diameter of the pressure head gradually increases from top to bottom, and the contact surface of the pressure head and the sealing element is an arc surface. The invention optimizes the structure of the pressure head, can better contact with the sealing element, and improves the integral sealing effect.
Further preferably, the three adjusting screws are arranged in a triangular structure. Thus, the even distribution that can be better plays the effect of whole sealed.
Further preferably, the fixed top plate is provided with a limit groove, and the limit groove is embedded with the outer edge of the housing. According to the invention, the limiting groove is formed in the fixed top plate, so that the positioning of the housing can be facilitated, and the operation is convenient.
The foregoing is merely a preferred embodiment of the present invention and it should be noted that modifications and adaptations to those skilled in the art may be made without departing from the principles of the present invention, which are intended to be comprehended within the scope of the present invention.
Claims (6)
1. The combined quartz cylinder cover for the silicon carbide crystal growth furnace comprises a cylinder cover main body for a quartz cylinder and is characterized in that the cylinder cover main body comprises a fixed top disc, a top cover and a sealing element, wherein the fixed top disc is connected with a frame of the quartz cylinder, the top cover is fixed on the fixed top disc through a cover shell, the sealing element is positioned in the top cover, a radial limiting ring is arranged on the inner wall of the cover shell, the radial limiting ring and the cover shell are in coaxial relation, and a top cover limiting ring is fixed on the outer wall of the cover shell;
three adjusting screws are screwed on the top cover limiting ring, pressure heads are screwed on the lower end parts of the three adjusting screws respectively, nuts are fixed on the three adjusting screws respectively, the nuts are positioned above the pressure heads, the pressure heads are abutted against the sealing piece, and the radial limiting ring and the sealing piece are attached to the outer circular surface of the quartz cylinder;
the top cover limiting ring is provided with two extending angles, the two extending angles are of a circular ring structure with a notch, and the sealing piece is provided with two cylindrical rods which are attached to the two cylindrical rods.
2. A combination quartz bowl cover for a silicon carbide crystal growth furnace as in claim 1, wherein the seal is a high vacuum seal member.
3. The combination quartz capsule for a silicon carbide crystal growth furnace of claim 1, wherein the opening of the annular structure faces the cylindrical rod, the opening of the annular structure is smaller than the diameter of the cylindrical rod, and the opening of the annular structure is of an elastic structure.
4. The combination quartz capsule for a silicon carbide crystal growth furnace of claim 1, wherein the outside diameter of the ram is gradually increased from top to bottom and the ram is in contact with the seal member in a cambered surface.
5. The combination quartz capsule for a silicon carbide crystal growth furnace of claim 1, wherein the three adjustment screws are arranged in a triangular configuration.
6. The combination quartz capsule for a silicon carbide crystal growth furnace of claim 1, wherein the stationary platen has a retaining groove therein, the retaining groove being engaged with an outer edge of the housing.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111341913.6A CN114197058B (en) | 2021-11-12 | 2021-11-12 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111341913.6A CN114197058B (en) | 2021-11-12 | 2021-11-12 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114197058A CN114197058A (en) | 2022-03-18 |
| CN114197058B true CN114197058B (en) | 2023-11-21 |
Family
ID=80647651
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111341913.6A Active CN114197058B (en) | 2021-11-12 | 2021-11-12 | Combined quartz cylinder cover for silicon carbide crystal growth furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114197058B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03193695A (en) * | 1989-12-22 | 1991-08-23 | Shin Etsu Handotai Co Ltd | Single crystal pulling up device |
| US5533465A (en) * | 1995-01-20 | 1996-07-09 | E. I. Du Pont De Nemours And Company | Hydrothermal crystallization vessels |
| JPH10137575A (en) * | 1996-11-12 | 1998-05-26 | Norimasa Ozaki | Vessel for hydrothermal reaction |
| CN210287587U (en) * | 2019-08-14 | 2020-04-10 | 江苏星特亮科技有限公司 | Quartz tube high vacuum seal structure |
| CN213147419U (en) * | 2020-06-29 | 2021-05-07 | 浙江晶盛机电股份有限公司 | Furnace chamber structure of silicon carbide furnace |
| CN113606337A (en) * | 2021-07-30 | 2021-11-05 | 上海汉虹精密机械有限公司 | High vacuum sealing structure for inner circle of quartz cylinder |
-
2021
- 2021-11-12 CN CN202111341913.6A patent/CN114197058B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03193695A (en) * | 1989-12-22 | 1991-08-23 | Shin Etsu Handotai Co Ltd | Single crystal pulling up device |
| US5533465A (en) * | 1995-01-20 | 1996-07-09 | E. I. Du Pont De Nemours And Company | Hydrothermal crystallization vessels |
| JPH10137575A (en) * | 1996-11-12 | 1998-05-26 | Norimasa Ozaki | Vessel for hydrothermal reaction |
| CN210287587U (en) * | 2019-08-14 | 2020-04-10 | 江苏星特亮科技有限公司 | Quartz tube high vacuum seal structure |
| CN213147419U (en) * | 2020-06-29 | 2021-05-07 | 浙江晶盛机电股份有限公司 | Furnace chamber structure of silicon carbide furnace |
| CN113606337A (en) * | 2021-07-30 | 2021-11-05 | 上海汉虹精密机械有限公司 | High vacuum sealing structure for inner circle of quartz cylinder |
Non-Patent Citations (1)
| Title |
|---|
| DRF-B80型蓝宝石晶体生长炉的研制;袁长路;人工晶体学报;第41卷(第5期);1463-1467 * |
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| Publication number | Publication date |
|---|---|
| CN114197058A (en) | 2022-03-18 |
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