CN110299297A - A kind of silicon test platform - Google Patents
A kind of silicon test platform Download PDFInfo
- Publication number
- CN110299297A CN110299297A CN201810247686.2A CN201810247686A CN110299297A CN 110299297 A CN110299297 A CN 110299297A CN 201810247686 A CN201810247686 A CN 201810247686A CN 110299297 A CN110299297 A CN 110299297A
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- China
- Prior art keywords
- silicon wafer
- elevating lever
- silicon
- transferring arm
- test platform
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/30—Structural arrangements specially adapted for testing or measuring during manufacture or treatment, or specially adapted for reliability measurements
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention relates to a kind of silicon test platform, the silicon test platform includes workbench, calibrator and conveyer；The conveyer is for picking up silicon wafer to be detected and the silicon wafer to be detected picked up being sent to the workbench, for the calibrator for being adjusted to the angle of silicon wafer to be detected on the workbench, the workbench is used to detect the minority carrier life time of silicon wafer to be detected；The workbench includes stage body, elevating lever and fixed frame, and the elevating lever and fixed frame are mounted on the stage body, and in the fixed frame, the elevating lever is moved up and down relative to the stage body and the fixed frame for the position of the elevating lever.Fixed frame on the workbench is for the silicon wafer in fixed test, avoiding the silicon wafer from sliding in the detection process causes the silicon chip surface to damage, the minority carrier life time for effectively avoiding the silicon wafer reduces, and the elevating lever is for going up and down the silicon wafer, convenient for placing and taking out the silicon wafer.
Description
Technical field
The present invention relates to technical field of semiconductors, in particular to a kind of silicon test platform.
Background technique
Minority carrier life time is one of the important indicator for determining silicon wafer perfection, therefore the minority carrier life time of test silicon wafer is just shown
It obtains extremely important.
In the prior art, it generallys use silicon test platform to detect the minority carrier life time of silicon wafer and quality etc., but is examining
During survey, the component on silicon test platform may make silicon wafer generate pollutant or damage silicon wafer, and then influence silicon wafer
Minority carrier life time causes the minority carrier life time of silicon wafer to reduce.
Therefore, be badly in need of providing a kind of silicon test platform, with solve silicon wafer be easy when detecting it is impaired and generate pollutant and
The problem of causing minority carrier life time to reduce.
Summary of the invention
The purpose of the present invention is to provide a kind of silicon test platforms, are easy impaired and generation dirt when detecting to solve silicon wafer
The problem of contaminating object and minority carrier life time caused to reduce.
In order to achieve the above object, the present invention provides a kind of silicon test platform, the silicon test platform include workbench,
Calibrator and conveyer；
The conveyer is used to pick up silicon wafer to be detected and the silicon wafer to be detected picked up is sent to the workbench,
For the calibrator for being adjusted to the position of silicon wafer to be detected on the workbench, the workbench is to be detected for detecting
Silicon wafer；
The workbench includes stage body, elevating lever and fixed frame, and the elevating lever and fixed frame are mounted on the stage body,
The elevating lever is located in the fixed frame, and the elevating lever can be moved up and down relative to the fixed frame.
Optionally, in the silicon test platform, there are three the elevating lever, the liftings for setting in the fixed frame
Bar has a first end and a second end, and the first end of the elevating lever is embedded in the stage body, the elevating lever and the stage body
Upper surface is vertical, the setting triangular in shape of three in the fixed frame elevating lever.
Optionally, in the silicon test platform, after the elevating lever rises, the second end of the elevating lever is higher than
The fixed frame, after the elevating lever is fallen, the second end of the elevating lever is flushed with the stage body.
Optionally, in the silicon test platform, the calibrator includes adjustment structure, and the adjustment structure is for adjusting
The position of the whole silicon wafer to be detected.
Optionally, in the silicon test platform, the calibrator further includes detection structure, and the detection structure is used for
Detect the position of the silicon wafer to be detected.
Optionally, in the silicon test platform, the conveyer includes pedestal, the first transferring arm and the second transmission
Arm；
First transferring arm is movably arranged on the pedestal；Second transferring arm is movably arranged on described first and passes
It send on arm.
Optionally, in the silicon test platform, first transferring arm is had a first end and a second end, and described first
On the base, the second end of first transferring arm and second transferring arm rotate for the first end rotation connection of transferring arm
Connection.
Optionally, in the silicon test platform, second transferring arm is had a first end and a second end, and described second
The second end of the first end of transferring arm and first transferring arm, which rotates, to be connected, and the second transferring arm first end is stacked in described the
In the second end of one transferring arm；The second end of second transferring arm is provided with recess.
Optionally, in the silicon test platform, the indent of second transferring arm is provided with fixed equipment.
Optionally, in the silicon test platform, vacuum chuck is provided on second transferring arm.
In silicon test platform provided by the invention, the fixed frame on the workbench is used for the silicon wafer in fixed test,
Avoiding the silicon wafer from sliding in the detection process causes the silicon chip surface to damage；It avoids using in the present invention and pacify on the table
Vacuum stomata is filled to fix the silicon wafer, is effectively reduced due to the fixed silicon wafer bring pollution of vacuum stomata, makes institute
The minority carrier life time for stating silicon wafer will not be affected in the detection process, the elevating lever for going up and down the silicon wafer, convenient for placing and
The silicon wafer is taken out, and the silicon wafer will not be damaged during placing and taking out the silicon wafer.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the silicon test platform of the embodiment of the present invention；
Fig. 2 is the structural schematic diagram of the workbench of the embodiment of the present invention；
Fig. 3 is the structural schematic diagram of the conveyer of the embodiment of the present invention；
Wherein, 1- workbench；2- conveyer；3- calibrator；11- fixed frame；12- elevating lever；21- pedestal；22- first is passed
Send arm；The second transferring arm of 23-；24- vacuum chuck；25- recess；26- connection equipment；27- fixed equipment.
Specific embodiment
A specific embodiment of the invention is described in more detail below in conjunction with schematic diagram.According to following description and
Claims, advantages and features of the invention will become apparent from.It should be noted that attached drawing is all made of very simplified form and
Using non-accurate ratio, only for the purpose of facilitating and clarifying the purpose of the embodiments of the invention.
Fig. 1, Fig. 2 and Fig. 3 are please referred to, Fig. 1 is the structural schematic diagram of the silicon test platform of the embodiment of the present invention；Fig. 2 is this
The structural schematic diagram of the workbench of inventive embodiments；Fig. 3 is the structural schematic diagram of the conveyer of the embodiment of the present invention.
The present invention provides a kind of silicon test platform, the silicon test platform includes workbench 1, calibrator 3 and conveyer
2；The conveyer 2 is described for picking up silicon wafer to be detected and the silicon wafer to be detected picked up being sent to the workbench 1
For calibrator 3 for being adjusted to the position of silicon wafer to be detected on the workbench 1, the workbench 1 is to be detected for detecting
Silicon wafer.
Common, the silicon test platform is for detecting quality, minority carrier life time of silicon wafer to be detected etc., if such as silicon wafer
Minority carrier life time is affected, then can be left a trace on minority carrier life time figure.
The workbench 1 includes stage body, elevating lever 12 and fixed frame 11, and the elevating lever 12 and fixed frame 11 are mounted on institute
It states on stage body, the position of the elevating lever 12 is in the fixed frame 11, and the elevating lever 12 is relative to the stage body and described
Fixed frame 11 moves up and down.The stage body is for carrying and detect silicon wafer to be detected, and whether defective, detection if detecting the silicon wafer
Whether the minority carrier life time of the silicon wafer is affected, and detects the quality etc. of the silicon wafer；The elevating lever 12 is for going up and down institute
Silicon wafer is stated, convenient for placing and taking out the silicon wafer, and the silicon wafer will not be damaged during placing and taking out the silicon wafer.Institute
Fixed frame 11 is stated for the silicon wafer in fixed test, avoiding the silicon wafer from sliding in the detection process causes the silicon chip surface to damage
Wound.
Preferably, being provided with the fixed frame 11 of different model on the workbench 1, the fixed frame 11 is for fixed different
Model, different size of silicon wafer to be detected, slides all kinds of silicon wafers not in the detection process.
Referring to FIG. 2, the fixed frame 11 on the workbench 1 protrudes above the profile of fixed frame 11, institute in the workbench 1
The profile for stating fixed frame 11 is slightly higher than the workbench 1.The size of the fixed frame 11 can be according to different model silicon wafer
Size and determine, make the size of fixed frame 11 that can accommodate silicon wafer to be detected just, have the function that fixed silicon wafer to be detected, thus
It slide silicon wafer to be detected will not on workbench 1, meeting the silicon wafer to be detected, surface is not impaired in the detection process
Demand, is avoided in the present invention using the fixed frame 11 using the fixed silicon wafer to be detected of vacuum stomata, so as to avoid
A possibility that silicon wafer is polluted by vacuum stomata in the detection process does not make the minority carrier life time of the silicon wafer in the detection process not
It is affected.
In the silicon test platform provided by the embodiment of the present invention, there are three the elevating levers for setting in the fixed frame 11
12, the elevating lever 12 has a first end and a second end, and the first end of the elevating lever 12 is embedded in the stage body, the liter
It is vertical with the stage body upper surface that bar 12 drops, three elevating lever 12 settings triangular in shape in the fixed frame 11.
Preferably, the mode that the elevating lever 12 is gone up and down is similar to the strut for shrinking umbrella, it can extend, when elongation is exactly
The ascent stage of the elevating lever 12, can shorten, and when shortening is exactly the decline stage of the elevating lever 12.
Further, after the elevating lever 12 rises, the second end of the elevating lever 12 is higher than the fixed frame 11, institute
It states after elevating lever 12 falls, the second end of the elevating lever 12 is flushed with the stage body.If 12 second end of elevating lever rises
It has been higher by the workbench 1, the silicon wafer is placed or taken away convenient for the conveyer 2, if under 12 second end of the elevating lever
It drops to and is flushed with the workbench 1, then convenient for silicon wafer to be detected described in more accurate detection.
In the silicon test platform provided by the embodiment of the present invention, the calibrator 3 includes adjustment structure, the adjustment knot
Structure is used to adjust the position of the silicon wafer to be detected.Behind the orientation that the calibrator 3 determines silicon wafer to be detected, wanted according to detection
It asks, adjusts the position of the silicon wafer, improve the accuracy of the silicon wafer detection.
Further, the calibrator 3 further includes detection structure, and the detection structure is for detecting the silicon wafer to be detected
Position.The position of the silicon wafer to be detected is proofreaded specifically, the calibrator 3 radiates X-ray；It is mostly sharp at present
The silicon wafer to be detected is penetrated with infrared radiation to position the silicon wafer to be detected, and it is to be detected described in infrared penetration
After silicon wafer, light is irradiated into the profile of the fixed frame 11, is carried out calibration to the infrared ray in the fixed frame 11 and is not easy, and
After silicon wafer to be detected described in x-ray bombardment, the silicon wafer to be detected will not be penetrated, ray is anti-by the silicon chip surface to be detected
X-ray is projected, silicon wafer to be detected can be calibrated according to the angle of the X-ray and the silicon wafer to be detected that reflect, be conducive to more
Add and accurately the silicon wafer to be detected is positioned, therefore calibrate the position of the silicon wafer to be detected in the present invention using X-ray, really
Protect the accuracy of detection.
Referring to FIG. 3, the conveyer 2 includes pedestal 21, the first transferring arm 22 and the second transferring arm 23；Described first passes
Arm 22 is sent to be movably arranged on the pedestal 21, first transferring arm 22 can be moved relative to the pedestal 21；Described second
Transferring arm 23 is movably arranged on first transferring arm 22；Relatively described first transferring arm 22 of second transferring arm 23 can
It is mobile.
Preferably, the material of two transferring arms and pedestal 21 can be metal, it is also possible to the synthesis of other chemical substances
Material, for the height of pedestal 21 depending on the height of workbench 1 described in laboratory, the thickness of two transferring arms is also according to specific
Depending on it is required that, the conveyer 2 can be set to a rotary folding equipment；Such as ribs of the fan, the folding fruit of foldable fan
The blade of knife and the shape of shell are rotated by intermediate connection equipment 26, can be overlapped.In the way of rotary folding
The conveyer 2 is designed, the range of transmission is wide, and saves land occupation.
Further, in the silicon test platform, the both ends of first transferring arm 22 are respectively first end and
The first end at two ends, first transferring arm 22 is connected on the pedestal 21 by the connection rotation of equipment 26, and described first passes
The second end of arm 22 is sent to connect by connection equipment 26 and second transferring arm 23 rotation.
Preferably, the shape of first transferring arm 22 can be ellipse or rectangle etc., it is wider to make to transmit range,
Transferring arm can be grown as far as possible.The first transferring arm 22 in the present invention can play the role of an increase transmitting range, if real
It is shorter to test the distance that room needs to transmit, first transferring arm 22 can be cancelled, it, can be according to demand if the distance of transmission is longer
Increase the quantity of intermediate connection transferring arm.
Further, in the silicon test platform, the both ends of second transferring arm 23 are respectively first end and
Two ends, the first end of second transferring arm 23 is rotated by connection equipment 26 and the second end of first transferring arm 22 to be connected
It connects, 23 first end of the second transferring arm is stacked in the second end of first transferring arm 22, is transmitting the silicon wafer to be detected
When can also pivot about movement to connect equipment 26, the silicon wafer to be detected is sent to destination.
Further, the conveyer 2 is set by rotating the connection of first transferring arm 22 and second transferring arm 23
Standby 26 can be with the second transferring arm 23 described in moving in rotation；The conveyer 2 is by rotating first transferring arm 22 and the bottom
The connection equipment 26 of seat 21 can be with the described two transferring arms of moving in rotation.The position of heretofore described 2 pedestal 21 of conveyer can
Be it is fixed, be also possible to mobile.
Preferably, the second end of second transferring arm 23 is provided with recess 25.The recess 25 can be set to one
The biggish circular arc recess 25 of amplitude, may be set to be rectangular recess 25；Its effect is when taking out and placing the silicon wafer
It waits more convenient, the surface of the silicon wafer will not be damaged when taking out and placing the silicon wafer.
In the silicon test platform provided by the embodiment of the present invention, it is provided at the recess 25 of second transferring arm 23 solid
Locking equipment 27.For the conveyer 2 during transmitting the silicon wafer to be detected, the silicon wafer to be detected is placed on described second
On transferring arm 23, by being provided with a fixed equipment 27 at the recess 25, make the silicon wafer to be detected described second
It is more firm on transferring arm 23.It is preferred that being used as fixed equipment 27 using fixed frame 11, taken out in the conveyer 2 described to be detected
After silicon wafer, with the fixed silicon wafer to be detected of the fixed equipment 27, avoid generating in the transmit process of the silicon wafer to be detected
Sliding and landing, avoid damage to and pollute the silicon wafer to be detected.
Preferably, being provided with vacuum chuck 24 on second transferring arm 23.In the case where silicon wafer to be detected is smaller,
The silicon wafer to be detected is adsorbed using vacuum chuck 24 in the present invention, has the function that the fixed silicon wafer to be detected.
In the silicon test platform provided by the embodiment of the present invention, workflow is as follows: the conveyer 2 is from the silicon wafer
Silicon wafer to be detected is taken out in box, the silicon wafer is fixed on the conveyer 2, and the silicon wafer to be detected got is sent to institute
It states on workbench 1, by the detection structure on the calibrator 3 to the position of the silicon wafer to be detected on the workbench 1
It is calibrated, the position of the silicon wafer to be detected is adjusted using the adjustment structure, and adjusts to detecting state, it is described
Workbench 1 detects the silicon wafer to be detected.
To sum up, in silicon test platform provided by the invention, the fixed frame on the workbench is in fixed test
Silicon wafer, avoiding the silicon wafer from sliding during the test causes the silicon chip surface to damage；It avoids using in the present invention and work
Vacuum stomata is installed to fix the silicon wafer on platform, is effectively reduced since the fixed silicon wafer bring of vacuum stomata is dirty
Dye, be affected the minority carrier life time of the silicon wafer will not in the detection process, and the elevating lever is convenient for for going up and down the silicon wafer
The silicon wafer is placed and taken out, and the silicon wafer will not be damaged during placing and taking out the silicon wafer.
The above is only a preferred embodiment of the present invention, does not play the role of any restrictions to the present invention.Belonging to any
Those skilled in the art, in the range of not departing from technical solution of the present invention, to the invention discloses technical solution and
Technology contents make the variation such as any type of equivalent replacement or modification, belong to the content without departing from technical solution of the present invention, still
Within belonging to the scope of protection of the present invention.
Claims (10)
1. a kind of silicon test platform, which is characterized in that the silicon test platform includes workbench, calibrator and conveyer；
The conveyer is described for picking up silicon wafer to be detected and the silicon wafer to be detected picked up being sent to the workbench
Calibrator is for being adjusted the position of silicon wafer to be detected on the workbench, and the workbench is for detecting silicon to be detected
Piece；
The workbench includes stage body, elevating lever and fixed frame, and the elevating lever and fixed frame are mounted on the stage body, described
Elevating lever is located in the fixed frame, and the elevating lever can be moved up and down relative to the fixed frame.
2. silicon test platform as described in claim 1, which is characterized in that there are three the liftings for setting in the fixed frame
Bar, the elevating lever have a first end and a second end, and the first end of the elevating lever is embedded in the stage body, the elevating lever
It is vertical with the stage body upper surface, three elevating lever settings triangular in shape in the fixed frame.
3. silicon test platform as claimed in claim 2, which is characterized in that after the elevating lever rises, the elevating lever
Second end is higher than the fixed frame, and after the elevating lever is fallen, the second end of the elevating lever is flushed with the stage body.
4. silicon test platform as described in claim 1, which is characterized in that the calibrator includes adjustment structure, the adjustment
Structure is used to adjust the position of the silicon wafer to be detected.
5. silicon test platform as claimed in claim 4, which is characterized in that the calibrator further includes detection structure, the inspection
Geodesic structure is used to detect the position of the silicon wafer to be detected.
6. silicon test platform as described in claim 1, which is characterized in that the conveyer include pedestal, the first transferring arm and
Second transferring arm；
First transferring arm is movably arranged on the pedestal；Second transferring arm is movably arranged on first transferring arm
On.
7. silicon test platform as claimed in claim 6, which is characterized in that first transferring arm has first end and second
End, the first end rotation connection of first transferring arm on the base, the second end of first transferring arm and described the
The rotation connection of two transferring arms.
8. silicon test platform as claimed in claim 7, which is characterized in that second transferring arm has first end and second
The second end of end, the first end of second transferring arm and first transferring arm, which rotates, to be connected, second transferring arm first
Endlap is in the second end of first transferring arm；The second end of second transferring arm is provided with recess.
9. silicon test platform as claimed in claim 8, which is characterized in that the indent of second transferring arm is provided with fixation
Equipment.
10. silicon test platform as claimed in claim 8, which is characterized in that be provided with vacuum chuck on second transferring arm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810247686.2A CN110299297B (en) | 2018-03-23 | 2018-03-23 | Silicon wafer test bench |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810247686.2A CN110299297B (en) | 2018-03-23 | 2018-03-23 | Silicon wafer test bench |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110299297A true CN110299297A (en) | 2019-10-01 |
| CN110299297B CN110299297B (en) | 2022-02-15 |
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| CN201810247686.2A Active CN110299297B (en) | 2018-03-23 | 2018-03-23 | Silicon wafer test bench |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101126908A (en) * | 2006-08-16 | 2008-02-20 | 上海华虹Nec电子有限公司 | Multi-platform photolithographic machine silicon chip horizontal control and automatic focusing system and its implement method |
| CN101677077A (en) * | 2008-09-18 | 2010-03-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator and wafer processing process |
| CN203746813U (en) * | 2014-03-07 | 2014-07-30 | 福建安特微电子有限公司 | Novel silicon wafer supporting tray of silicon wafer testing machine |
| CN104183515A (en) * | 2013-05-24 | 2014-12-03 | 标准科技股份有限公司 | Wafer testing machine stand |
| CN104275701A (en) * | 2013-07-08 | 2015-01-14 | 株式会社安川电机 | Suction structure, robot hand and robot |
| CN206931569U (en) * | 2017-06-22 | 2018-01-26 | 珠海市中芯集成电路有限公司 | Wafer sort platform |
-
2018
- 2018-03-23 CN CN201810247686.2A patent/CN110299297B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101126908A (en) * | 2006-08-16 | 2008-02-20 | 上海华虹Nec电子有限公司 | Multi-platform photolithographic machine silicon chip horizontal control and automatic focusing system and its implement method |
| CN101677077A (en) * | 2008-09-18 | 2010-03-24 | 北京北方微电子基地设备工艺研究中心有限责任公司 | Manipulator and wafer processing process |
| CN104183515A (en) * | 2013-05-24 | 2014-12-03 | 标准科技股份有限公司 | Wafer testing machine stand |
| CN104275701A (en) * | 2013-07-08 | 2015-01-14 | 株式会社安川电机 | Suction structure, robot hand and robot |
| CN203746813U (en) * | 2014-03-07 | 2014-07-30 | 福建安特微电子有限公司 | Novel silicon wafer supporting tray of silicon wafer testing machine |
| CN206931569U (en) * | 2017-06-22 | 2018-01-26 | 珠海市中芯集成电路有限公司 | Wafer sort platform |
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| CN110299297B (en) | 2022-02-15 |
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